CN109168116B - Angular rate closed-loop method for improving static and linear indexes of MEMS gyroscope - Google Patents
Angular rate closed-loop method for improving static and linear indexes of MEMS gyroscope Download PDFInfo
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Abstract
The invention discloses an angular rate closed-loop method for improving static and linear indexes of an MEMS gyroscope, and belongs to the field of sensor control. The invention optimizes the control mode of an MEMS gyroscope with angular rate closed loop, a fourth-order sigma-delta feedforward summation circuit is adopted to detect displacement error signals of gyroscope detection mode, comb-tooth electrodes are adopted to feed back and control angular rate error information, parallel plate electrodes correct mechanical non-orthogonal error signals, an angular rate error channel adopts a direct-I type controller, mechanical non-orthogonal error signals adopt a direct-II type controller, the detection mode of the MEMS gyroscope is always in the condition of zero rotating speed input, finally closed-loop control signals are superposed to form closed-loop control, the MEMS gyroscope is always kept in a balanced position in the detection mode, the MEMS gyroscope controlled by the servo control method always works on a specific working point, and the overall static performance and the dynamic performance of the MEMS gyroscope are improved.
Description
Technical Field
The invention discloses an angular rate closed-loop method for improving static and linear indexes of an MEMS gyroscope, and belongs to the technical field of sensor control.
Background
The MEMS gyroscope is a novel angular rate sensor. The basic principle is based on the Coriolis effect of mechanical resonance, which is essentially one of mechanical resonance gyros, and the high-precision MEMS gyroscope is successfully applied to many occasions and environments, but the contradiction between the high precision and the bandwidth of the static state of the MEMS gyroscope is difficult to deal with, and although the static performance of the MEMS gyroscope reaches the rate level (10-1000: (A) (B))○) H) accuracy, but it is difficult to satisfy the bandwidth in terms of dynamic range>The requirement of 70Hz (rate level) is that the high-precision MEMS gyroscope usually needs to reduce the difference Δ f between the natural frequencies of the driving and detecting modes to obtain a higher mechanical gain, and the mechanical bandwidth of the open-loop detecting direction of the MEMS gyroscope is about half of Δ f, so the bandwidth index of the MEMS gyroscope needs to be sacrificed to obtain a high mechanical gain, and the contradiction between the static accuracy and the bandwidth of the MEMS gyroscope can be effectively solved by adopting the angular rate closed-loop mode in the detecting mode. Compared with an open-loop detection system, the mass block of the MEMS gyroscope is always in a position balanced at the input of the angular-rate-free speed in the detection mode. MEMS gyroscope closed loop systemThe performance of the method in measuring range, nonlinear scale factor, symmetry of scale factor, repeatability, threshold value, resolution, zero offset stability and the like is greatly improved. The closed-loop detection of the MEMS gyroscope is based on the Coriolis force balance of the detection mode of the MEMS gyroscope, and the mass block of the MEMS gyroscope always works at the balance position of the detection mode, so that the nonlinearity of a capacitance signal is greatly reduced; meanwhile, errors caused by processing defects, residual stress and other structures are also restrained.
Disclosure of Invention
The purpose of the invention is as follows:
aiming at the current situations of low effective open-loop bandwidth, zero-bias stability and poor scale linearity of a high-precision MEMS gyroscope, an angular rate closed-loop method for improving static and linearity indexes of the MEMS gyroscope is provided. The bandwidth characteristic of the MEMS gyroscope, the dynamic response speed of the MEMS gyroscope and the pass band flatness of the MEMS gyroscope are improved, the static precision and the scale factor linearity of the MEMS gyroscope are effectively improved, and the MEMS gyroscope enters a high-precision and high-performance application technology platform.
The technical scheme of the invention is as follows:
an angular rate closed-loop method for improving static and linearity indexes of a MEMS gyroscope, which adopts the following steps:
1) firstly, detecting weak capacitance signals by using a four-order feedforward summation type sigma-delta modulator processing circuit, and demodulating MEMS gyroscope angular rate error signals and MEMS gyroscope mechanical non-orthogonal error signals by using MEMS gyroscope angular rate related phases and MEMS gyroscope mechanical non-orthogonal related phases;
2) after passing through a CIC extraction filter, an IIR band-pass filter, an IIR band-stop filter, a CIC interpolation filter and a low-pass filter, the two error signals obtained in the step 1 enter a direct-I type controller, a direct-II type controller, and the direct-II type controller is used for respectively calculating the angular rate closed-loop control quantity of the MEMS gyroscope and the mechanical non-orthogonal closed-loop control quantity of the MEMS gyroscope;
3) and (3) summing the MEMS gyroscope angular rate closed-loop control quantity and the MEMS gyroscope mechanical non-orthogonal closed-loop control quantity obtained in the step (1) through a summing circuit, adding an obtained summing signal to an electrode of an MEMS gyroscope detection closed loop to realize displacement closed loop of an MEMS gyroscope detection mode, and taking the MEMS gyroscope angular rate closed-loop control quantity as an effective output signal of the closed-loop gyroscope.
The method is realized based on a four-order feedforward summation type sigma-delta modulator architecture signal processing circuit, and the circuit comprises a continuous variable gain capacitance detection circuit, an analog low-pass circuit and a quantizer circuit:
the continuous variable gain capacitance detection circuit comprises: the function of the circuit is to convert a capacitance signal from an MEMS gyroscope detection mode into a voltage signal, a feedback resistor formed by adopting a PMOS tube process provides a direct current working point for differential capacitance detection, and the amplification end of the continuous variable gain capacitance detection circuit is controlled by adopting a PMOS tube;
an analog low-pass circuit: the function of the MEMS gyroscope is to adopt a passive low-pass filtering mode, and an MEMS gyroscope angular rate error signal and an MEMS gyroscope mechanical non-orthogonal signal error signal enter a following circuit in a differential signal mode to drive a subsequent four-order feedforward summation type sigma-delta modulator architecture signal processing circuit;
a quantizer circuit: and a 7-path linear comparator is adopted to successively compare output signals of the four-order feedforward summation type sigma-delta modulator framework signal processing circuit, 7-bit comparison data are output, linear AND operation is carried out on the 3, 4, 5 and 6-bit comparison data and the 1, 2, 5 and 6-bit comparison data and the 0, 2, 4 and 6-bit comparison data respectively, and the output AND operation signal is 3-bit effective data.
The method comprises the following steps:
1) in the continuous variable gain capacitance detection circuit, a direct current working point feedback resistor cut to a large resistor by a PMOS (P-channel metal oxide semiconductor) tube is used between the inverting end of an operational amplifier (1) and the voltage low end of an operational amplifier (2) as an operational amplifier;
2) a four-order feedforward summation type sigma-delta modulator adopts a switched capacitor type processing scheme, and adopts MOS tube delay time to respectively form a time sequence of a switched capacitor and transfer of a time sequence control signal.
The step 2 comprises the following steps: firstly, converting a 3-bit code stream output by a four-order feedforward summation type sigma-delta modulator into 4-bit signed data, reducing the sampling rate of a high-speed 4-bit code stream output by the four-order feedforward summation type sigma-delta modulator by using a CIC (common information center) extraction filter, enabling a reduced 4-bit code stream signal to pass through an IIR (infinite impulse response) band-pass filter and an IIR (infinite impulse response) band-stop filter, converting the reduced 4-bit code stream signal into high-speed parallel data by using a CIC interpolation filter, performing zero-crossing comparison operation on the high-speed parallel data, and extracting phase information of an MEMS gyroscope angular rate error signal and an MEMS gyroscope mechanical non-orthogonal error signal.
The step 2 further comprises the following steps: the MEMS gyroscope angular rate error signal and the MEMS gyroscope mechanical non-orthogonal error signal enter a direct-I type controller, a direct-II type controller and a direct-I type controller, and the direct-II type controller adopts a feedforward and feedback summation mode, so that the zero and pole positions of the direct-I type controller and the direct-II type controller meet the control requirement of the system, and the dynamic and static performances of a closed loop are formed.
The invention has the advantages and beneficial effects that:
1) the invention effectively improves the zero-bias stability characteristic of the MEMS gyroscope, and the static stability index of the MEMS closed-loop gyroscope reaches 5.2○And h, the static precision of the MEMS gyroscope can be effectively improved. After the MEMS gyroscope angular rate is controlled in a closed loop mode, the difference frequency of the MEMS gyroscope can be greatly reduced so as to improve the static mechanical gain of the gyroscope, high static precision can be obtained after the high mechanical gain is obtained, the bandwidth of the MEMS gyroscope is not lost, the high-precision fourth-order feedforward summation type sigma-delta demodulation circuit has the advantages of good capacitance demodulation signal-to-noise ratio, simple structure and the like, and the advantage of good signal-to-noise ratio can be obtained while the minimum implementation cost is achieved.
2) The invention has beneficial results for improving the scale factor linearity of the MEMS gyroscope, and the test result of 339.3ppm shows that the MEMS gyroscope sensor adopting the angular rate closed-loop control technology always detects the modal balance position at the working point, the external influence factor is small, the anti-interference capability is strong, the MEMS gyroscope can obtain a higher mechanical dynamic range under extremely small displacement, the non-ideal factor of capacitance detection is reduced to obtain higher scale factor linearity, so that the gyroscope system can obtain a better linearity index.
Drawings
FIG. 1 is a MEMS gyro angular rate error control scheme;
FIG. 2 is a high precision capacitive sensing scheme for a MEMS gyroscope;
FIG. 3 is a CIC decimation filter architecture;
FIG. 4 shows a gyro CIC interpolation filter architecture;
FIG. 5 is a variable gain capacitor voltage conversion circuit;
FIG. 6 modulator summing circuit;
FIG. 7 is a MEMS gyroscope angular rate error controller architecture;
FIG. 8MEMS gyroscope mechanical non-orthogonal error controller architecture
The system comprises a four-order feedforward summation type sigma-delta demodulation circuit 1, a low-pass filter 2, a lead compensation controller 3, an addition circuit 4, a pmos transistor circuit 5 for gain control in a capacitance-current conversion circuit and a pmos transistor circuit 6 for direct-current feedback in the capacitance-current conversion circuit.
Detailed Description
The principle of the invention is as follows: the MEMS dual-mass gyroscope is a novel angular rate sensor. The basic principle is based on the Coriolis force effect of mechanical resonance, namely the stability of driving amplitude is kept in the driving direction of the MEMS dual-mass block gyroscope, a stable environment is provided for the Coriolis force effect, and the Coriolis force effect is conveniently utilized to test the angular rate of the gyroscope. The invention mainly introduces a mode of detecting modal open loop detection, and mainly introduces a mode of detecting modal closed loop, utilizes a high-precision capacitance detection mode to carry out error demodulation on mechanical non-orthogonal and angular rate signals of a detecting mode of an MEMS gyroscope, respectively enters error signals into a controller, and superposes compensation signals output by control on a detecting modal force application electrode to realize coriolis force balance of the detecting mode, so that an MEMS gyroscope working point is stable, and higher zero-bias stability and scale factor linearity indexes are obtained.
An angular rate closed-loop method for improving static and linearity indexes of a MEMS gyroscope, which adopts the following steps:
1) firstly, a four-order feedforward summation type sigma-delta modulator processing circuit is used for detecting weak capacitance signals, MEMS gyroscope angular rate error signals and MEMS gyroscope mechanical non-orthogonal error signals are demodulated by using MEMS gyroscope angular rate related phases and MEMS gyroscope mechanical non-orthogonal related phases, as shown in 1 in figure 1, the four-order feedforward summation type sigma-delta modulator processing circuit comprises a capacitance current conversion circuit, a low-pass filter circuit, an analog-to-digital conversion circuit, a quantization circuit and the like. The MEMS gyroscope angular rate error signal enters a capacitance demodulation module, wherein a capacitance current conversion circuit adopts a capacitance conversion circuit controlled by a variable gain, as shown in FIG. 3, the capacitance current conversion circuit is switched to a resistor by a pmos tube to form negative feedback, and a direct current working point is provided for the operational amplifier, as shown at 6 in FIG. 3. The pmos transistor controls the on/off of the feedback branch of the capacitance-to-current conversion circuit to form different gain multiples as shown at 5 in fig. 3. The effect of controllable gain is achieved. The error signal enters an analog-digital conversion circuit link after passing through a capacitance conversion circuit, the analog-digital conversion circuit is composed of a four-order feedforward summation type circuit, the circuit form is formed in a switched capacitor mode, the circuit form is shown in fig. 2, four integrators respectively enter a quantizer circuit after feedforward summation, the circuit forms coefficients shown in fig. 2 in a switched capacitor mode, as shown in fig. 4, the switched capacitors adopt four switching signals of C1_ S21, C1_ S22, C2_ S21 and C2_ S22, so that the capacitors are transferred in the circuit in fig. 4, the setting of coefficients of a1-a4, C1-C3, b1, b2 and the like in a system diagram of fig. 2 is completed, a stable modulator architecture is formed, and the modulator architecture has equivalent signal-to-noise ratio characteristics. The error signal enters a quantizer processing circuit, the quantizer processing circuit adopts a 7-path linear comparator to successively compare 7 bits of data, 3, 4, 5 and 6 bits and 1, 2, 5, 6 bits and 0, 2, 4 and 6 bits are respectively subjected to a group of AND, and the output signal is 3 bits of valid data with the rate of 2M. After the angular rate signal is output from the sigma delta modulator, the angular rate signal enters a digital filtering link in the form of a 3-bit code stream with 2M frequency. Namely 3bit code stream is converted into 4bit signed data, the sampling rate of the high-speed code stream output by the modulator is reduced by using a CIC (common information center) extraction filter, the signal is converted into high-speed parallel data by using a CIC interpolation filter after passing through an IIR band-pass filter and an IIR band-stop filter, finally the difference frequency signal is processed by using a low-pass filter, and the driving phase information is accurately extracted by using zero-crossing comparison to form 24-bit effective error data of 312K;
2) and (2) the two error signals obtained in the step (1) pass through a CIC decimation filter, an IIR band-pass filter, an IIR band rejection filter, a CIC interpolation filter and a low-pass filter, and then enter a direct-I type controller and a direct-II type controller, wherein the direct-I type controller and the direct-II type controller are used for respectively calculating the angular rate closed-loop control quantity of the MEMS gyroscope and the mechanical non-orthogonal closed-loop control quantity of the MEMS gyroscope, and the method is similar to the low-pass filter. Because the coefficient of the CIC decimation filter is 1, the structure has no multiplier, only an adder and a delay device are used, so that the circuit system can reduce or increase the sampling rate under the condition of no multiplier, and is very suitable for being realized by an FPGA and being transplanted to an ASIC scheme. The architecture of the adopted CIC decimation and CIC interpolation filter is shown in fig. 5 and 6.
3) And (3) summing the MEMS gyroscope angular rate closed-loop control quantity and the MEMS gyroscope mechanical non-orthogonal closed-loop control quantity obtained in the step (1) through a summing circuit, adding an obtained summing signal to an electrode of an MEMS gyroscope detection closed loop to realize displacement closed loop of an MEMS gyroscope detection mode, and taking the MEMS gyroscope angular rate closed-loop control quantity as an effective output signal of the closed-loop gyroscope.
The method is realized based on a four-order feedforward summation type sigma-delta modulator architecture signal processing circuit, and the circuit comprises a continuous variable gain capacitance detection circuit, an analog low-pass circuit and a quantizer circuit:
the continuous variable gain capacitance detection circuit comprises: the function of the circuit is to convert a capacitance signal from an MEMS gyroscope detection mode into a voltage signal, a feedback resistor formed by adopting a PMOS tube process provides a direct current working point for differential capacitance detection, and the amplification end of the continuous variable gain capacitance detection circuit is controlled by adopting a PMOS tube;
an analog low-pass circuit: the function of the MEMS gyroscope is to adopt a passive low-pass filtering mode, and an MEMS gyroscope angular rate error signal and an MEMS gyroscope mechanical non-orthogonal signal error signal enter a following circuit in a differential signal mode to drive a subsequent four-order feedforward summation type sigma-delta modulator architecture signal processing circuit;
a quantizer circuit: and a 7-path linear comparator is adopted to successively compare output signals of the four-order feedforward summation type sigma-delta modulator framework signal processing circuit, 7-bit comparison data are output, linear AND operation is carried out on the 3, 4, 5 and 6-bit comparison data and the 1, 2, 5 and 6-bit comparison data and the 0, 2, 4 and 6-bit comparison data respectively, and the output AND operation signal is 3-bit effective data.
The method comprises the following steps:
1) in the continuous variable gain capacitance detection circuit, a direct current working point feedback resistor cut to a large resistor by a PMOS (P-channel metal oxide semiconductor) tube is used between the inverting end of an operational amplifier (1) and the voltage low end of an operational amplifier (2) as an operational amplifier;
2) a four-order feedforward summation type sigma-delta modulator adopts a switched capacitor type processing scheme, and adopts MOS tube delay time to respectively form a time sequence of a switched capacitor and transfer of a time sequence control signal.
The step 2 comprises the following steps: firstly, converting a 3-bit code stream output by a four-order feedforward summation type sigma-delta modulator into 4-bit signed data, reducing the sampling rate of a high-speed 4-bit code stream output by the four-order feedforward summation type sigma-delta modulator by using a CIC (common information center) extraction filter, enabling a reduced 4-bit code stream signal to pass through an IIR (infinite impulse response) band-pass filter and an IIR (infinite impulse response) band-stop filter, converting the reduced 4-bit code stream signal into high-speed parallel data by using a CIC interpolation filter, performing zero-crossing comparison operation on the high-speed parallel data, and extracting phase information of an MEMS gyroscope angular rate error signal and an MEMS gyroscope mechanical non-orthogonal error signal.
The step 2 further comprises the following steps: the MEMS gyroscope angular rate error signal and the MEMS gyroscope mechanical non-orthogonal error signal enter a direct-I type controller, a direct-II type controller and a direct-I type controller, and the direct-II type controller adopts a feedforward and feedback summation mode, so that the zero and pole positions of the direct-I type controller and the direct-II type controller meet the control requirement of the system, and the dynamic and static performances of a closed loop are formed.
Example one
After the MEMS gyroscope product is added with the angular rate closed-loop function, the mechanical non-orthogonal error items of the MEMS gyroscope can be kept stable in the full-temperature environment, and the angular rate error input of the MEMS gyroscope is also kept at a stable zero input position, namely the MEMS gyroscope adopting the angular rate closed-loop technology can drive the detection mode error items of the gyroscope to be zero, so that the MEMS gyroscope is in a balance position in the detection mode.
When the angular rate error term of the MEMS gyroscope is zero, the mechanical non-orthogonal error term of the MEMS gyroscope approaches to zero, the scale factor coefficient of the MEMS gyroscope is reduced by the influence factor of the external environment, the gyroscope does not have the mechanical non-orthogonal error term in the external environment, the stability characteristic of the scale factor of the gyroscope is greatly enhanced, and the MEMS gyroscope with the angular rate closed-loop function fully utilizes the performance advantage of good stability of the scale factor of the MEMS gyroscope in system application, namely a flight management system and a missile attitude system. As shown in figure 2, the scale factor of the MEMS gyroscope can reach 400ppm magnitude, and the application of missile-borne navigation and flight control systems is met.
In the application occasion, the controller parameters with excellent low-frequency characteristics are selected, so that the spectral characteristics of the MEMS angular rate closed-loop gyroscope have high passband gain in a low-frequency band, stable intermediate-frequency passband gain and high rejection ratio in a high-frequency band, and the performance of the MEMS gyroscope is improved by fully utilizing the angular rate closed loop.
Example two
The static index and dynamic bandwidth of a MEMS gyroscope are a pair of contradictory communities. After the MEMS gyroscope product is added with the angular rate closed-loop function, the MEMS gyroscope can effectively improve the bandwidth of the gyroscope while improving the static gain, break through the contradiction between the bandwidth and the static precision, improve the zero offset stability test performance of the MEMS gyroscope by one order of magnitude, improve the static zero offset stability index of the MEMS gyroscope by one order of magnitude, and meet the requirement of 5○The use requirement of the tactical level of the/h makes the application of the MEMS gyroscope in the aspects of attitude control, a measuring system and positioning and orientation more ideal, and makes the MEMS gyroscope fully embody the application advantages of the MEMS gyroscope in the fields of underground track measurement, track measurement and the like.
Claims (5)
1. An angular rate closed-loop method for improving static and linearity indexes of a MEMS gyroscope is characterized by comprising the following steps:
1) firstly, detecting weak capacitance signals by using a four-order feedforward summation type sigma-delta modulator processing circuit, and demodulating MEMS gyroscope angular rate error signals and MEMS gyroscope mechanical non-orthogonal error signals by using MEMS gyroscope angular rate related phases and MEMS gyroscope mechanical non-orthogonal related phases;
2) after passing through a CIC extraction filter, an IIR band-pass filter, an IIR band-stop filter, a CIC interpolation filter and a low-pass filter, the two error signals obtained in the step 1 enter a direct-I type controller, a direct-II type controller, and the direct-II type controller is used for respectively calculating the angular rate closed-loop control quantity of the MEMS gyroscope and the mechanical non-orthogonal closed-loop control quantity of the MEMS gyroscope;
3) and (3) summing the MEMS gyroscope angular rate closed-loop control quantity and the MEMS gyroscope mechanical non-orthogonal closed-loop control quantity obtained in the step (1) through a summing circuit, adding an obtained summing signal to an electrode of an MEMS gyroscope detection closed loop to realize displacement closed loop of an MEMS gyroscope detection mode, and taking the MEMS gyroscope angular rate closed-loop control quantity as an effective output signal of the closed-loop gyroscope.
2. The angular rate closed-loop method for improving static and linearity indexes of the MEMS gyroscope is implemented on the basis of a fourth-order feedforward-summation type sigma-delta modulator architecture signal processing circuit, wherein the circuit comprises a continuous variable-gain capacitance detection circuit, an analog low-pass circuit and a quantizer circuit:
the continuous variable gain capacitance detection circuit comprises: the function of the circuit is to convert a capacitance signal from an MEMS gyroscope detection mode into a voltage signal, a feedback resistor formed by adopting a PMOS tube process provides a direct current working point for differential capacitance detection, and the amplification end of the continuous variable gain capacitance detection circuit is controlled by adopting a PMOS tube;
an analog low-pass circuit: the function of the MEMS gyroscope is to adopt a passive low-pass filtering mode, and an MEMS gyroscope angular rate error signal and an MEMS gyroscope mechanical non-orthogonal signal error signal enter a following circuit in a differential signal mode to drive a subsequent four-order feedforward summation type sigma-delta modulator architecture signal processing circuit;
a quantizer circuit: and a 7-path linear comparator is adopted to successively compare output signals of the four-order feedforward summation type sigma-delta modulator framework signal processing circuit, 7-bit comparison data are output, linear AND operation is carried out on the 3, 4, 5 and 6-bit comparison data and the 1, 2, 5 and 6-bit comparison data and the 0, 2, 4 and 6-bit comparison data respectively, and the output AND operation signal is 3-bit effective data.
3. The closed-loop angular rate method for improving the static and linear indexes of the MEMS gyroscope according to claim 2, is characterized by adopting the following steps:
1) in the continuous variable gain capacitance detection circuit, a direct current working point feedback resistor cut to a large resistor by a PMOS (P-channel metal oxide semiconductor) tube is used between the inverting end of an operational amplifier (1) and the voltage low end of an operational amplifier (2) as an operational amplifier;
2) a four-order feedforward summation type sigma-delta modulator adopts a switched capacitor type processing scheme, and adopts MOS tube delay time to respectively form a time sequence of a switched capacitor and transfer of a time sequence control signal.
4. The closed-loop angular rate method for improving the static and linear indexes of the MEMS gyroscope as claimed in claim 1, wherein the step 2 comprises the following steps: firstly, converting a 3-bit code stream output by a four-order feedforward summation type sigma-delta modulator into 4-bit signed data, reducing the sampling rate of a high-speed 4-bit code stream output by the four-order feedforward summation type sigma-delta modulator by using a CIC (common information center) extraction filter, enabling a reduced 4-bit code stream signal to pass through an IIR (infinite impulse response) band-pass filter and an IIR (infinite impulse response) band-stop filter, converting the reduced 4-bit code stream signal into high-speed parallel data by using a CIC interpolation filter, performing zero-crossing comparison operation on the high-speed parallel data, and extracting phase information of an MEMS gyroscope angular rate error signal and an MEMS gyroscope mechanical non-orthogonal error signal.
5. The closed-loop angular rate method for improving the static and linear indexes of the MEMS gyroscope according to claim 3, wherein the step 2 further comprises the following steps: the MEMS gyroscope angular rate error signal and the MEMS gyroscope mechanical non-orthogonal error signal enter a direct-I type controller, a direct-II type controller and a direct-I type controller, and the direct-II type controller adopts a feedforward and feedback summation mode, so that the zero and pole positions of the direct-I type controller and the direct-II type controller meet the control requirement of the system, and the dynamic and static performances of a closed loop are formed.
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| US9484890B1 (en) * | 2013-01-08 | 2016-11-01 | Maxim Integrated Products, Inc. | Systems and methods to reduce quadrature error in sensors |
| CN107389090A (en) * | 2017-06-12 | 2017-11-24 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of mechanical non-orthogonal closed-loop policy for improving MEMS gyro anti-vibration characteristic |
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