CN109167061A - A kind of solid-State Thin Film Li-Ion Batteries 3D film cathode and preparation method thereof - Google Patents
A kind of solid-State Thin Film Li-Ion Batteries 3D film cathode and preparation method thereof Download PDFInfo
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- CN109167061A CN109167061A CN201811002429.9A CN201811002429A CN109167061A CN 109167061 A CN109167061 A CN 109167061A CN 201811002429 A CN201811002429 A CN 201811002429A CN 109167061 A CN109167061 A CN 109167061A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/36—Selection of substances as active materials, active masses, active liquids
- H01M4/58—Selection of substances as active materials, active masses, active liquids of inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy; of polyanionic structures, e.g. phosphates, silicates or borates
- H01M4/581—Chalcogenides or intercalation compounds thereof
- H01M4/5815—Sulfides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
- H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/04—Processes of manufacture in general
- H01M4/0402—Methods of deposition of the material
- H01M4/0421—Methods of deposition of the material involving vapour deposition
- H01M4/0423—Physical vapour deposition
- H01M4/0426—Sputtering
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/136—Electrodes based on inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
- H01M4/139—Processes of manufacture
- H01M4/1397—Processes of manufacture of electrodes based on inorganic compounds other than oxides or hydroxides, e.g. sulfides, selenides, tellurides, halogenides or LiCoFy
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/02—Electrodes composed of, or comprising, active material
- H01M4/64—Carriers or collectors
- H01M4/70—Carriers or collectors characterised by shape or form
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Abstract
The invention discloses a kind of solid-State Thin Film Li-Ion Batteries 3D film cathodes and preparation method thereof, wherein solid-State Thin Film Li-Ion Batteries 3D film cathode includes the electrode current collecting body of three-dimensional staggered structure and the negative film for being covered on the electrode current collecting body surface；The negative film is to deposit the Sb for being formed by nanoparticle structure on the electrode current collecting body by reactive magnetron sputtering method as reaction gas as sputtering target, hydrogen sulfide gas using metallic antimony2S3Film.In technical solution of the present invention because in 3D substrate growth in situ Sb2S3Negative film is nano particle, is in two-dimensional structure between particle, conductive substrates are the reticular structure that interlocks, so Sb can be effectively relieved2S3Bulk effect of the negative electrode material in charge and discharge process, 3D film cathode specific capacity obtained is high, and multiplying power and cycle performance are excellent.
Description
Technical field
The present invention relates to solid lithium battery technical field more particularly to a kind of solid-State Thin Film Li-Ion Batteries 3D films
Cathode and preparation method thereof.
Background technique
It is expected to solve the safety issue of battery and real with the all-solid lithium-ion battery of solid electrolyte alternative electrolyte
Existing high-energy density and high power density, combine battery design, can be prepared into various shape and thickness, are applied to more fields
Institute.Wherein solid-State Thin Film Li-Ion Batteries can be directly integrated in circuit, be also used as smart card, sensor, microelectronics
The matching micro battery with micro mechanical system and flexible wearable equipment etc., in military affairs, medicine, the use of space industry
It is especially prominent on the way.Battery integral thickness reaches micron order.
Current commercialized lithium ion battery is mostly using graphite as negative electrode material, and theoretical specific capacity only has 372mAh/
G is not able to satisfy the following demand to battery high energy metric density.To realize the high energy density of solid-State Thin Film Li-Ion Batteries,
Lithium metal has been a hot spot of research as negative film.But the fusing point of lithium is lower and chemical activity is higher, higher
At a temperature of work and be difficult to keep to stablize, and the preparation process of entire battery requires harsh, high expensive, at the same safety issue according to
It not can solve so.Therefore, seek and prepare high-melting-point, the negative film of low chemical activity is applied to full solid thin film lithium ion
Battery is very important.
The preparation method of solid film has very much, such as thermal evaporation, pulse laser deposition, electron beam deposition, magnetron sputtering.
Wherein magnetron sputtering method preparation thin-film technique is the most mature, filming performance is good, crystal form orientation is controllable, and it is each to be widely used in preparation
Kind thin-film material.Although existing document report prepares metal (Sb, Sn, Cu etc.) cathode, metal oxide using magnetron sputtering
(SnOx、V2O5、TiO2) cathode, alloy (Sn-Ti, Si-Ti, Sn-Ni-Al, Sn-Al, Li-Si) cathode, and use MoS2For target
Material is on foam copper, the gold that sputtering prepares film applied to lithium ion battery, but prepares in argon gas and hydrogen sulfide mixed atmosphere
Belong to oxide and MoS2Film crystal unity is low, and impurity phase is more, even if the crystallinity for increasing sputter temperature film is not still high and thin
Film crack phenomenon is serious, leads to the poor circulation of material, and circulating battery encloses capacity deep fades less than 50, is not suitable for giving birth to
It produces practical.Antimony sill has theoretical specific capacity height (Sb-660mAh/g, Sb as film lithium cell negative pole2O3- 1103mAh/g,
Sb2S3- 946mAh/g), the advantages of raw material easily obtains, material is easily-synthesized；China is to produce the first big country of antimony, Lengshuijiang, Hunan
Tinnery be antimony ore the biggest in the world, research and development antimony base cathode is beneficial to widen industry application, and national economy is promoted to increase
It is long.But antimony sill as cathode when there is " bulk effect " more outstanding, in removal lithium embedded, volume expansion causes to tie
Structure avalanche is low with high rate performance to recycle.Therefore, solving " bulk effect " of the material in cyclic process is that it moves towards industry
The key of application.Number of patent application is CN200710041501.4, a kind of entitled " lithium ion battery anode thin-film material Sb3N
And preparation method thereof ", Sb is prepared using antimony and nitrogen reactive sputtering3N, the Sb of this method preparation3N can be under low current density
(7uA/cm2) stablize circulation 50 times, but without solving material " bulk effect " and improving the related work of high rate performance.
Summary of the invention
Present invention aim to address the deficiencies of existing all-solid lithium-ion battery negative film, provide a kind of specific capacity
The 3D film cathode and preparation method thereof that height, chemical stability are good, circulation and high rate performance are excellent.
To achieve the above object, solid-State Thin Film Li-Ion Batteries 3D film cathode provided by the invention, including three-dimensional friendship
The electrode current collecting body of wrong structure and the negative film for being covered on the electrode current collecting body surface；The negative film is using metal
Antimony, as reaction gas, is sunk on the electrode current collecting body as sputtering target, hydrogen sulfide gas by reactive magnetron sputtering method
Product is formed by the Sb of nanoparticle structure2S3Film.
Preferably, the electrode current collecting body includes stainless steel fiber, nickel foam, carbon cloth, carbon paper, one in carbon nanotube
Kind is a variety of.
To achieve the above object, solid-State Thin Film Li-Ion Batteries 3D as described in any one of the above embodiments provided by the invention is thin
The preparation method of film cathode, comprising:
Using metallic antimony as sputtering target, the electrode current collecting body of three-dimensional staggered structure is placed on substrate, is controlled substrate and is splashed
The distance shot at the target is maintained at 5-15cm；
Sputtering chamber is evacuated down to 2 × 10-3Pa is hereinafter, hydrogen sulfide as reaction gas, while being passed through argon gas, hydrogen sulfide
It is 1:1-15 with the ratio between argon stream amount；
Under 0-450 DEG C of substrate temperature, with the sputtering pressure of 0.2-3.5Pa, the sputtering power of 20-180W, sputtering gold
Belong to antimony target 0.25-15h, so that Sb2S3Film is formed in the surface of the electrode current collecting body.
Preferably, with the sputtering power of the sputtering pressure of 0.2-3.5Pa, 20-180W, splash-proofing sputtering metal antimony target 0.25-
15h, so that Sb2S3Film was formed in front of the step of surface of the electrode current collecting body, metallic antimony target and electrode current collecting body it
Between baffle is set, with the sputtering pressure of 0.2-3.5Pa, the sputtering power of 20-180W, splash-proofing sputtering metal antimony target 1-30min.
Preferably, the ratio between hydrogen sulfide and argon stream amount are 1:3, sputtering pressure 0.6Pa, sputtering power 80W, substrate
The distance between sputtering target is 10cm, and substrate temperature is 350 DEG C, forms Sb2S3The sputtering time of film is 1.5h.
In technical solution of the present invention, it is made on the electrode current collecting body of three-dimensional staggered structure by reactive magnetron sputtering
Sb2S3Film is the graininess film of uniformly continuous, and mean particle size 500-700nm is in two-dimensional structure between particle,
Conductive substrates are the reticular structure that interlocks, and " bulk effect " of material is effectively relieved in both.Pass through this method simultaneously
The material of preparation has high crystallinity, and first discharge specific capacity reaches under 0.01-3V and 0.1C multiplying power in charge and discharge process
Specific capacity is filled to 1180mAh/g, head and reaches 870mAh/g, and first circle coulombic efficiency reaches 73%, follows under 1C and 2C multiplying power respectively
Capacity retention ratio after ring 50 encloses is 96% or more.
Above-mentioned performance shows the reactive magnetron sputtering Sb on 3D collector2S3The 3D film cathode being prepared is a kind of
Excellent negative electrode material, can be applied to solid-State Thin Film Li-Ion Batteries.Its specific capacity is high, and multiplying power and cycle performance are excellent.
Detailed description of the invention
Fig. 1 be as the reactive magnetron sputtering method of embodiment 1 on the glass substrate made from Sb2S3The XRD of film is composed
Figure；
Fig. 2 is the surface scan electron microscope for the 3D film cathode that embodiment 1 obtains；
Fig. 3 is the circulating ratio performance map for the 3D film cathode that embodiment 1 obtains；
Fig. 4 is the charge and discharge platform curve for the 3D film cathode that embodiment 1 obtains.
Specific embodiment
Below in conjunction with attached drawing and specific embodiment, the present invention will be further described in detail, but the present invention is not limited to
Following embodiment.
Embodiment 1
It (1) is conductive current collector and sputtering substrate with 316L stainless steel fiber (diameter 4um), mass percent is
99.9%, having a size ofMetallic antimony be target, substrate at a distance from target be 10cm；
(2) target and substrate close sputtering chamber after the installation is completed, are evacuated to 2 × 10-3Pa, substrate are heated to 350 DEG C,
It is passed through argon gas and vulcanization hydrogen mixed gas, hydrogen sulfide flow velocity is 10sccm, and argon gas flow velocity is 30sccm, and gas pressure intensity is maintained at
0.6Pa；
(3) it closes baffle (i.e. baffle plate setting is between metallic antimony target and electrode current collecting body) and carries out pre-sputtering, pre-sputtering
Power is 80W, sputtering time 30min；
(4) remove baffle, it is basad on sputtered, the power of sputtering is 80W, and the time is 1 hour；
(5) sputtering finishes, pass hull closure, takes out and weighs after substrate is cooling, and carries out detection and electrochemical property test.
Fig. 1 is please referred to, can determine that the substance as made from the above method is pure Sb as X-ray diffraction2S3。
Pattern is determined by scanning electron microscope, referring to figure 2., it can be found that Sb2S3Film has of uniformly continuous
Granular thin film structure, mean particle size 500-700nm is in two-dimensional structure between particle, and conductive substrates are staggeredly netted knot
Structure, " bulk effect " of material is effectively relieved in both.
The electrochemical property test of 3D film cathode of the invention is used as using lithium piece to electrode and reference electrode, electrolyte
For 1M LiPF6+ EC/DEC/DMC (1:1:1, v/v/v) is assembled into CR2032 button cell using 2032 diaphragm of Celgard,
Charge-discharge performance is determined that referring to figure 3., charge and discharge platform curve referring to figure 4., can for circulating ratio performance by LAND test macro
With discovery, first discharge specific capacity reaches 1182.9mAh/g under 0.01-3V and 0.1C multiplying power in charge and discharge process, and head fills ratio
Capacity reaches 871.7mAh/g, and first circle coulombic efficiency reaches 73.69%, the 50 circle capacity charging of circulation under 1C and 2C multiplying power respectively
Specific capacity is 840.1mAh/g, and capacity retention ratio 96.4% shows good circulation and high rate performance.
Embodiment 2
(1) using nickel foam as conductive current collector and sputtering substrate, mass percent 99.9%, having a size ofMetallic antimony be target, substrate at a distance from target be 12cm；
(2) target and substrate close sputtering chamber after the installation is completed, are evacuated to 1.8 × 10-3Pa, substrate are heated to 250
DEG C, it is passed through argon gas and vulcanization hydrogen mixed gas, hydrogen sulfide flow velocity is 10sccm, and argon gas flow velocity is 50sccm, and gas pressure intensity is kept
In 2Pa；
(3) it closes baffle (i.e. baffle plate setting is between metallic antimony target and electrode current collecting body) and carries out pre-sputtering, pre-sputtering
Power is 120W, sputtering time 20min；
(4) remove baffle, it is basad on sputtered, the power of sputtering is 60W, and the time is 1.5 hours；
(5) sputtering finishes, pass hull closure, takes out and weighs after substrate is cooling, and carries out detection and electrochemical property test.
The electrochemical property test of 3D film cathode of the invention is used as using lithium piece to electrode and reference electrode, electrolyte
For 1M LiPF6+ EC/DEC/DMC (1:1:1, v/v/v) is assembled into CR2032 button cell using 2032 diaphragm of Celgard,
Charge-discharge performance is determined by LAND test macro, it is found that is put for the first time under 0.01-3V and 0.1C multiplying power in charge and discharge process
Electric specific capacity reaches 1200mAh/g, and head fills specific capacity and reaches 882.5mAh/g, and first circle coulombic efficiency reaches 73.54%, exists respectively
50 circle capacity charge specific capacity of circulation is 849.5mAh/g under 1C and 2C multiplying power, and capacity retention ratio 96.3% is shown good
Circulation and high rate performance.
Embodiment 3
(1) using carbon cloth as conductive current collector and sputtering substrate, mass percent 99.9%, having a size ofMetallic antimony be target, substrate at a distance from target be 8cm；
(2) target and substrate close sputtering chamber after the installation is completed, are evacuated to 1.6 × 10-3Pa, substrate are heated to 100
DEG C, it is passed through argon gas and vulcanization hydrogen mixed gas, hydrogen sulfide flow velocity is 10sccm, and argon gas flow velocity is 100sccm；
(3) it closes baffle (i.e. baffle plate setting is between metallic antimony target and electrode current collecting body) and carries out pre-sputtering, gas pressure intensity
It is maintained at 2.3Pa, the power of pre-sputtering is 140W, sputtering time 10min；
(4) adjustment gas pressure intensity is 1Pa, removes baffle, it is basad on sputtered, the power of sputtering is 100W, time
It is 0.8 hour；
(5) sputtering finishes, pass hull closure, takes out and weighs after substrate is cooling, and carries out detection and electrochemical property test.
The electrochemical property test of 3D film cathode of the invention is used as using lithium piece to electrode and reference electrode, electrolyte
For 1M LiPF6+ EC/DEC/DMC (1:1:1, v/v/v) is assembled into CR2032 button cell using 2032 diaphragm of Celgard,
Charge-discharge performance determines by LAND test macro, the first discharge specific capacity under 0.01-3V and 0.1C multiplying power in charge and discharge process
Reach 1185.8mAh/g, head fills specific capacity and reaches 873.4mAh/g, and first circle coulombic efficiency reaches 73.65%, respectively in 1C and 2C
50 circle capacity charge specific capacity of circulation is 845.1mAh/g under multiplying power, and capacity retention ratio 96.8% shows good circulation
And high rate performance.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar cans understand the content of the present invention and implement it accordingly, and it is not intended to limit the scope of the present invention.It is all according to the present invention
Equivalent change or modification made by Spirit Essence, should be covered by the protection scope of the present invention.
Claims (5)
1. a kind of solid-State Thin Film Li-Ion Batteries 3D film cathode, which is characterized in that the electrode collection including three-dimensional staggered structure
Fluid and the negative film for being covered on the electrode current collecting body surface；The negative film be using metallic antimony as sputtering target,
Hydrogen sulfide gas is deposited on the electrode current collecting body by reactive magnetron sputtering method as reaction gas and is formed by nanometer
The Sb of grain structure2S3Film.
2. solid-State Thin Film Li-Ion Batteries 3D film cathode as described in claim 1, which is characterized in that the electrode current collecting
Body includes one of stainless steel fiber, nickel foam, carbon cloth, carbon paper, carbon nanotube or a variety of.
3. a kind of preparation method of solid-State Thin Film Li-Ion Batteries 3D film cathode as claimed in claim 1 or 2, feature
It is, the preparation method includes:
Using metallic antimony as sputtering target, the electrode current collecting body of three-dimensional staggered structure controls substrate and sputtering target as sputtering substrate
Distance be maintained at 5-15cm；
Sputtering chamber is evacuated down at least 2 × 10-3Pa is hereinafter, hydrogen sulfide as reaction gas, while being passed through argon gas, hydrogen sulfide
It is 1:1-15 with the ratio between argon stream amount；
Under 0-450 DEG C of base reservoir temperature, with the sputtering pressure of 0.2-3.5Pa, the sputtering power of 20-180W, splash-proofing sputtering metal antimony
Target 0.25-15h, so that Sb2S3Film is formed in the surface of the electrode current collecting body.
4. the preparation method of solid-State Thin Film Li-Ion Batteries 3D film cathode as claimed in claim 3, which is characterized in that
With the sputtering pressure of 0.2-3.5Pa, the sputtering power of 20-180W, splash-proofing sputtering metal antimony target 0.25-15h, so that Sb2S3Film is formed
Before the surface of the electrode current collecting body the step of, baffle is set between metallic antimony target and electrode current collecting body, with 0.2-
The sputtering power of the sputtering pressure of 3.5Pa, 20-180W, splash-proofing sputtering metal antimony target 1-30min.
5. the preparation method of solid-State Thin Film Li-Ion Batteries 3D film cathode as described in claim 3 or 4, feature exist
In the ratio between hydrogen sulfide and argon stream amount are 1:3, sputtering pressure 0.6Pa, sputtering power 80W, between substrate and sputtering target
Distance be 10cm, base reservoir temperature be 350 DEG C, formed Sb2S3The sputtering time of film is 1.5h.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113013384A (en) * | 2021-02-23 | 2021-06-22 | 蚌埠学院 | Preparation and synthesis method of lithium storage silicon-based material |
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