CN109140148A - A kind of series voltage driving nanopositioning stage - Google Patents
A kind of series voltage driving nanopositioning stage Download PDFInfo
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- CN109140148A CN109140148A CN201811028712.9A CN201811028712A CN109140148A CN 109140148 A CN109140148 A CN 109140148A CN 201811028712 A CN201811028712 A CN 201811028712A CN 109140148 A CN109140148 A CN 109140148A
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- motion platform
- flexible hinge
- spring assembly
- sensor
- platform
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- 239000000919 ceramic Substances 0.000 claims abstract description 62
- 238000006073 displacement reaction Methods 0.000 claims abstract description 19
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000001514 detection method Methods 0.000 claims abstract description 6
- 230000036316 preload Effects 0.000 claims description 18
- 229910052573 porcelain Inorganic materials 0.000 claims description 2
- 230000008878 coupling Effects 0.000 abstract description 5
- 238000010168 coupling process Methods 0.000 abstract description 5
- 238000005859 coupling reaction Methods 0.000 abstract description 5
- 230000009286 beneficial effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000000018 DNA microarray Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000005619 thermoelectricity Effects 0.000 description 1
- 201000009482 yaws Diseases 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
The invention discloses series voltages to drive nanopositioning stage, the platform body that is mounted in pedestal, the XY being mounted on platform body are to motion platform and piezoelectric ceramic actuator, XY passes through X respectively to motion platform and is assemblied in pedestal to flexible hinge and Y-direction flexible hinge, and X passes through X with Y-direction flexible hinge to flexible hinge respectively and connect to spring assembly with Y-direction spring assembly with platform body；XY is separately installed with the Y-direction sensor being displaced to the X of displacement to sensor and for detecting the motion platform Y-direction for detecting motion platform X, the detection and feedback of the common two degree-of-freedom motion for completing nanopositioning stage of displacement data cooperation that X is read to sensor and Y-direction sensor into motion platform；Piezoelectric ceramic actuator is embedded in X on flexible hinge and Y-direction flexible hinge respectively, for driving two dimensional motion of the XY to motion platform.The beneficial effects of the invention are as follows concatenated flexible hinge displacement coupling it is small, yaw is small, the linearity is good, positioning accuracy is high.
Description
Technical field
The invention belongs to high accuracy positioning equipment technical fields, flat more particularly, to a kind of series voltage driving nanometer positioning
Platform.
Background technique
Nano-device includes nano electron device and nano photoelectric device, can be widely applied to electronics, optics, micromechanics
Device, novel computer etc. are research field most dynamic in current new material and new device research field, and first device
The mainstream development direction of part miniaturization, intelligent, highly integrated etc..Nano-device is due to potential great market and national defence
Value, so that its method, approach, technique for designing and manufacturing etc. become numerous scientists, government and large enterprise's research and throws
The thermoelectricity of money.
It is accounted in big stroke, high speed, high-precision axis Nano-positioners in modern sophisticated industry manufacture and field of scientific study
There is extremely important status.As integrated circuit (Integrated circuit) manufacture, biochip technology, high-precision digital control add
The rapid development of the technologies such as work technology and high-velocity scanning detection, proposes the stroke of positioning system, speed, acceleration and precision
Higher requirement, it is also extremely urgent to high speed, the research of high-accuracy position system.
Currently, existing nanopositioning stage is driven using piezoelectric ceramic actuator, enlarger and decoupling-structure are had
Series and parallel structure.But there are more serious coupling phenomenons for nanopositioning stage in parallel, and rigidity is small, the stabilization of platform
Property it is poor, influence locating platform positioning accuracy.
Summary of the invention
That the object of the present invention is to provide a kind of structures is simple, easy to operate, positioning accuracy is high, the linearity is good, yaw is small, keeps away
Exempt from the series voltage driving nanopositioning stage of displacement coupling phenomenon.
Technical scheme is as follows:
A kind of series voltage drives nanopositioning stage, including pedestal, the platform body being mounted in pedestal, be mounted on it is flat
For XY on playscript with stage directions body to motion platform and piezoelectric ceramic actuator, the XY passes through X to motion platform to flexible hinge and Y respectively
In the susceptor to flexible hinge assembly, the X passes through X to spring assembly and Y to flexible hinge and Y-direction flexible hinge respectively
It is connect to spring assembly with the platform body；
The XY is separately installed with for detecting motion platform X to the X of displacement to sensor and use into motion platform
In the displacement data cooperation that the Y-direction sensor for detecting motion platform Y-direction displacement, the X are read to sensor and Y-direction sensor
The detection and feedback of the two degree-of-freedom motion of the nanopositioning stage are completed jointly；
The piezoelectric ceramic actuator is embedded in X on flexible hinge and Y-direction flexible hinge respectively, for driving XY to fortune
The two dimensional motion of moving platform.
In the above-mentioned technical solutions, the piezoelectric ceramic actuator includes X to piezoelectric ceramic actuator and Y-direction piezoelectric ceramics
Driver, the X include X to piezo ceramic element and driver to piezoelectric ceramic actuator, and the X is to piezo ceramic element
Top is in contact to the X of motion platform to dead zone with the XY, and the X is flat to the end of piezo ceramic element and the XY to movement
The X of platform is fixedly connected to dynamic area, and the Y-direction piezoelectric ceramic actuator includes Y-direction piezo ceramic element and driver, the Y-direction
The top of piezo ceramic element is in contact with the XY to the Y-direction dead zone of motion platform, the end of the Y-direction piezo ceramic element with
The XY is fixedly connected to the area YXiang Dong of motion platform.
In the above-mentioned technical solutions, the X to piezo ceramic element and Y-direction piezo ceramic element include piezoelectric ceramics,
First pre-load nut and the first locking nut, one end of the piezoelectric ceramics are connect with the first pre-load nut, and described first pre-tightens
Nut is connect with the first locking nut.
In the above-mentioned technical solutions, the both ends of the piezoelectric ceramics are respectively hemispherical.
In the above-mentioned technical solutions, spring assembly is also equipped on the XY motion platform to be used for the X to flexibility
The displacement of hinge and Y-direction flexible hinge is replied.
In the above-mentioned technical solutions, the spring assembly includes X to spring assembly and Y-direction spring assembly, and the X is to spring
The top of component is in contact to the X of motion platform to dead zone with the XY, and the X is to the end of spring assembly and the XY to movement
The X of platform is fixedly connected to dynamic area, and the top of the Y-direction spring assembly connects with the XY to the Y-direction dead zone of motion platform
Touching, the end of the Y-direction spring assembly is fixedly connected to the XY of motion platform to the area YXiang Dong of motion platform with the XY.
In the above-mentioned technical solutions, the spring assembly includes spring, the second pre-load nut and the second locking nut, described
One end of spring is connect with the second pre-load nut, and second pre-load nut is connect with the second locking nut.
In the above-mentioned technical solutions, the X cuts the flexible hinges of structure to flexible hinge and Y-direction flexible hinge for three layers
Chain.
In the above-mentioned technical solutions, the X is located at the XY to the X of motion platform to dead zone and X to dynamic area to sensor
Between, the Y-direction sensor is located at the XY and moves section to the Y-direction dead zone of motion platform and Y-direction.
In the above-mentioned technical solutions, the X to sensor and Y-direction sensor be capacitance sensor.
The advantages and positive effects of the present invention are:
1. concatenated flexible hinge and piezo ceramic element cooperate, sensor is formed inside concatenated flexible hinge and is closed
Ring effectively avoids displacement coupling phenomenon, improves the precision of positioning.
2. flexible hinge under the premise of guaranteeing identical stroke, shortens the length of hinge by the way of multilayer cutting,
And the thickness of hinge is increased, the route problem of locating platform is effectively solved, and improve the stability of locating platform.
3. concatenated flexible hinge structure keeps main platform body compact-sized, resonance frequency is high, and the linearity is good, yaws small.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of series voltage driving nanopositioning stage of the invention；
Fig. 2 is the partial structural diagram of flexible hinge in the present invention；
Fig. 3 is the structural schematic diagram of piezo ceramic element in the present invention.
In figure:
1, platform body 2, X are to piezo ceramic element 3, X to spring assembly
4, Y-direction piezo ceramic element 5, Y-direction spring assembly 6, X are to sensor
7, Y-direction sensor 8, X are to flexible hinge 9, Y-direction flexible hinge
10, piezoelectric ceramics 11, the first pre-load nut 12, the first locking nut
Specific embodiment
Below in conjunction with specific embodiment, invention is further described in detail.It should be appreciated that described herein specific
Embodiment is used only for explaining the present invention, is not intended to limit the present invention, is never limited in protection scope of the present invention.
Embodiment 1
As shown in Figure 1-Figure 3, series voltage of the invention drives nanopositioning stage, including pedestal, is mounted in pedestal
Platform body 1, the XY that is mounted on platform body 1 to motion platform and piezoelectric ceramic actuator, XY distinguishes to motion platform
It is assemblied in pedestal by X to flexible hinge 8 and Y-direction flexible hinge 9, X passes through respectively to flexible hinge 8 and Y-direction flexible hinge 9
X is connect to spring assembly 3 with Y-direction spring assembly 5 with platform body 1, and X is three layers with Y-direction flexible hinge 9 to flexible hinge 8 and cuts
Cut the flexible hinge of structure；XY respectively constitutes cascaded structure to flexible hinge, to form closed loop.XY pacifies respectively into motion platform
Equipped with the Y-direction sensing being displaced to the X of displacement to sensor 6 and for detecting the motion platform Y-direction for detecting motion platform X
Device 7, X are located at XY to the X of motion platform to dead zone and X to dynamic section to sensor 6, and Y-direction sensor 7 is located at XY to motion platform
Y-direction dead zone and Y-direction move section, the displacement data cooperation that X is read to sensor 6 and Y-direction sensor 7 is common to complete nanometer positioning
The detection and feedback of the two degree-of-freedom motion of platform；It is flexible to flexible hinge 8 and Y-direction that piezoelectric ceramic actuator is embedded in X respectively
On hinge 9, for driving two dimensional motion of the XY to motion platform.
Above-mentioned piezoelectric ceramic actuator includes X to piezoelectric ceramic actuator and Y-direction piezoelectric ceramic actuator, and X makes pottery to piezoelectricity
Porcelain driver includes X to piezo ceramic element 2 and driver, top from X to piezo ceramic element 2 and X from XY to motion platform
It is in contact to dead zone, which is fixedly connected to the X of motion platform to dynamic area to the end of piezo ceramic element 2 with XY, Y-direction piezoelectricity
Ceramic driver includes Y-direction piezo ceramic element 4 and driver, and the top of Y-direction piezo ceramic element 4 and XY are to motion platform
Y-direction dead zone is in contact, and the end of the Y-direction piezo ceramic element 4 is fixedly connected with XY to the area YXiang Dong of motion platform.X is to piezoelectricity
Ceramic component 2 and Y-direction piezo ceramic element 4 include piezoelectric ceramics 10, the first pre-load nut 11 and the first locking nut 12, pressure
The both ends of electroceramics 10 are respectively hemispherical, and wherein one end hemispherical of piezoelectric ceramics 10 is connect with the first pre-load nut 11, and
One end that first pre-load nut 11 is contacted with piezoelectric ceramics 10 is equipped with V-type groove, and hemispherical one end of piezoelectric ceramics 10 is mounted on V
Inclined-plane in type groove is tangent and is fixed in groove, and the first pre-load nut 11 is connect with the first locking nut 12.
It is above-mentioned be also equipped on XY motion platform spring assembly with for X to flexible hinge 8 and Y-direction flexible hinge 9
Displacement is replied；Spring assembly includes X to spring assembly 3 and Y-direction spring assembly 5, and X is to the top of spring assembly 3 and XY to movement
The X of platform is in contact to dead zone, which is fixedly connected to the X of motion platform to dynamic area to the end of spring assembly 3 with XY, Y-direction bullet
The top of spring component 5 is in contact with XY to the Y-direction dead zone of motion platform, and the end of the Y-direction spring assembly 5 and XY are flat to movement
The XY of platform is fixedly connected to the area YXiang Dong of motion platform；Spring assembly includes spring, the second pre-load nut and the second locking screw
Mother, one end of spring are connect with the second pre-load nut, and the second pre-load nut is connect with the second locking nut.
Wherein, it should be pointed out that a is X-axis dead zone in attached drawing 1, b is the area XZhou Dong, c is Y-axis dead zone, d is the area YZhou Dong.
Using piezo ceramic element and the concatenated structure of flexible hinge, displacement coupling phenomenon, and energy can be effectively avoided
The inside for being connected to platform of enough sensors forms closed loop, can be realized accurate positioning；Flexible hinge is using multilayer cutting
Mode shortens the length of hinge under the premise of guaranteeing identical stroke, and increases the thickness of hinge, solves platform
Route problem improves the stability of platform, and positioning accuracy is high.
When using nanopositioning stage of the invention, the direction XY be respectively adopted X to driver and Y-direction driver,
It realizes when X-direction movement and is translatable in X-direction, and Y-direction is remain stationary, XY motion platform is detected in X to sensor 6 by X
Change in displacement on direction realizes whole closed-loop control so that peripheral control unit obtains data of the X to sensor 6；It is same with this
Reason is realized when Y-direction movement and is translatable in Y-direction, and X-direction is remain stationary, and detects XY motion platform by Y-direction sensor 7
Change in displacement in the Y direction realizes whole closed-loop control so that external control obtains the data of Y-direction sensor 7, to protect
Demonstrate,prove the accuracy of detection.
Embodiment 2
On the basis of embodiment 1, X to sensor 6 and Y-direction sensor 7 be capacitance sensor, with external controller phase
Even, closed-loop control of the platform in X or Y-direction, positioning accuracy with higher are realized.
Embodiment 3
On the basis of embodiment 1, upper cover plate and lower cover plate are installed in the upper and lower surface of platform body 1, can protect
Each element in platform body, moreover it is possible to guarantee the good appearance of locating platform.
The spatially relative terms such as "upper", "lower", "left", "right" have been used in embodiment for ease of explanation, have been used for
Relationship of the elements or features relative to another elements or features shown in explanatory diagram.It should be understood that in addition to figure
Shown in except orientation, spatial terminology is intended to include the different direction of device in use or operation.For example, if in figure
Device be squeezed, the element for being stated as being located at other elements or feature "lower" will be located into other elements or feature "upper".
Therefore, exemplary term "lower" may include both upper and lower orientation.Device, which can be positioned in other ways, (to be rotated by 90 ° or position
In other orientation), it can be interpreted accordingly used herein of the opposite explanation in space.
Moreover, the relational terms of such as " first " and " second " or the like are used merely to one with another with identical
The component of title distinguishes, without necessarily requiring or implying between these components there are any this actual relationship or
Sequentially.
One embodiment of the present invention has been described in detail above, but the content is only preferable implementation of the invention
Example, should not be considered as limiting the scope of the invention.It is all according to equivalent variations made by the present patent application range and improve
Deng should still be within the scope of the patent of the present invention.
Claims (10)
1. a kind of series voltage drives nanopositioning stage, including pedestal, the platform body being mounted in pedestal (1), it is mounted on
XY on platform body (1) is to motion platform and piezoelectric ceramic actuator, it is characterised in that: the XY leads to respectively to motion platform
It crosses X to assemble in the susceptor to flexible hinge (8) and Y-direction flexible hinge (9), the X is flexible to flexible hinge (8) and Y-direction
Hinge (9) is connect to spring assembly (3) with Y-direction spring assembly (5) with the platform body (1) by X respectively；
The XY is separately installed with for detecting motion platform X to the X of displacement to sensor (6) and being used for into motion platform
Detect the Y-direction sensor (7) of motion platform Y-direction displacement, the displacement that the X is read to sensor (6) and Y-direction sensor (7)
The detection and feedback of the two degree-of-freedom motion of the nanopositioning stage are completed in data cooperation jointly；
The piezoelectric ceramic actuator is embedded in X on flexible hinge (8) and Y-direction flexible hinge (9) respectively, for drive XY to
The two dimensional motion of motion platform.
2. series voltage according to claim 1 drives nanopositioning stage, it is characterised in that: the Piezoelectric Ceramic
Device includes X to piezoelectric ceramic actuator and Y-direction piezoelectric ceramic actuator, and the X includes that X makes pottery to piezoelectricity to piezoelectric ceramic actuator
Porcelain component (2) and driver, the X connect to the X of motion platform to dead zone to the top of piezo ceramic element (2) with the XY
Touching, the X are fixedly connected to the X of motion platform to dynamic area to the end of piezo ceramic element (2) with the XY, the Y-direction piezoelectricity
Ceramic driver includes Y-direction piezo ceramic element (4) and driver, top and the XY of the Y-direction piezo ceramic element (4)
It is in contact to the Y-direction dead zone of motion platform, the end of the Y-direction piezo ceramic element (4) and the XY are dynamic to the Y-direction of motion platform
Area is fixedly connected.
3. according to right want 2 described in series voltage driving nanopositioning stage, it is characterised in that: the X is to piezoelectric ceramics group
Part (2) and Y-direction piezo ceramic element (4) include piezoelectric ceramics (10), the first pre-load nut (11) and the first locking nut
(12), one end of the piezoelectric ceramics (10) is connect with the first pre-load nut (11), first pre-load nut (11) and first
Locking nut (12) connection.
4. series voltage according to claim 3 drives nanopositioning stage, it is characterised in that: the piezoelectric ceramics (10)
Both ends be respectively hemispherical.
5. series voltage according to claim 4 drives nanopositioning stage, it is characterised in that: in the XY motion platform
On be also equipped with spring assembly and replied with the displacement for the X to flexible hinge (8) and Y-direction flexible hinge (9).
6. series voltage according to claim 5 drives nanopositioning stage, it is characterised in that: the spring assembly includes
X to spring assembly (3) and Y-direction spring assembly (5), top from the X to spring assembly (3) and X from the XY to motion platform
It is in contact to dead zone, which is fixedly connected to the X of motion platform to dynamic area to the end of spring assembly (3) with the XY, the Y
It is in contact to the top of spring assembly (5) with the XY to the Y-direction dead zone of motion platform, the end of the Y-direction spring assembly (5)
It is fixedly connected to the XY of motion platform to the area YXiang Dong of motion platform with the XY.
7. series voltage according to claim 6 drives nanopositioning stage, it is characterised in that: the spring assembly includes
Spring, the second pre-load nut and the second locking nut, one end of the spring are connect with the second pre-load nut, and described second pre-tightens
Nut is connect with the second locking nut.
8. series voltage according to claim 7 drives nanopositioning stage, it is characterised in that: the X is to flexible hinge
It (8) is three layers of flexible hinge for cutting structure with Y-direction flexible hinge (9).
9. series voltage according to claim 8 drives nanopositioning stage, it is characterised in that: the X is to sensor (6)
Positioned at the XY to the X of motion platform to dead zone and X to dynamic section, the Y-direction sensor (7) is located at the XY to motion platform
Y-direction dead zone and Y-direction move section.
10. series voltage according to claim 9 drives nanopositioning stage, it is characterised in that: the X is to sensor
It (6) is capacitance sensor with Y-direction sensor (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811028712.9A CN109140148B (en) | 2018-09-05 | 2018-09-05 | Series piezoelectric driving nanometer positioning platform |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811028712.9A CN109140148B (en) | 2018-09-05 | 2018-09-05 | Series piezoelectric driving nanometer positioning platform |
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| CN109140148B CN109140148B (en) | 2020-11-10 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110364221A (en) * | 2018-11-27 | 2019-10-22 | 广东工业大学 | A kind of two-freedom nanometer displacement locating platform in parallel based on flexible hinge |
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| JPH02310493A (en) * | 1989-05-26 | 1990-12-26 | Canon Inc | Moving stage device |
| CN101197197A (en) * | 2007-12-26 | 2008-06-11 | 西安交通大学 | Large moving range macro-micro dual drive locating platform |
| CN205211424U (en) * | 2015-09-17 | 2016-05-04 | 中国计量科学研究院 | Two -dimentional nanometer displacement table of flexible hinge direction |
| CN107622786A (en) * | 2017-11-08 | 2018-01-23 | 杭州电子科技大学 | Two-stage Piezoelectric Driving micro-nano locating platform |
| CN108198588A (en) * | 2017-12-29 | 2018-06-22 | 三英精控（天津）仪器设备有限公司 | A kind of single-degree-of-freedom large-stroke nanometer displacement locating platform based on flexible hinge |
-
2018
- 2018-09-05 CN CN201811028712.9A patent/CN109140148B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02310493A (en) * | 1989-05-26 | 1990-12-26 | Canon Inc | Moving stage device |
| CN101197197A (en) * | 2007-12-26 | 2008-06-11 | 西安交通大学 | Large moving range macro-micro dual drive locating platform |
| CN205211424U (en) * | 2015-09-17 | 2016-05-04 | 中国计量科学研究院 | Two -dimentional nanometer displacement table of flexible hinge direction |
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| CN108198588A (en) * | 2017-12-29 | 2018-06-22 | 三英精控（天津）仪器设备有限公司 | A kind of single-degree-of-freedom large-stroke nanometer displacement locating platform based on flexible hinge |
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| CN110364221A (en) * | 2018-11-27 | 2019-10-22 | 广东工业大学 | A kind of two-freedom nanometer displacement locating platform in parallel based on flexible hinge |
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