CN109134898A - A kind of composite and flexible resistive film of sound sensitive and preparation method thereof and sound transducer - Google Patents
A kind of composite and flexible resistive film of sound sensitive and preparation method thereof and sound transducer Download PDFInfo
- Publication number
- CN109134898A CN109134898A CN201811056726.1A CN201811056726A CN109134898A CN 109134898 A CN109134898 A CN 109134898A CN 201811056726 A CN201811056726 A CN 201811056726A CN 109134898 A CN109134898 A CN 109134898A
- Authority
- CN
- China
- Prior art keywords
- composite
- sound
- resistive film
- pdms
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C08J7/06—Coating with compositions not containing macromolecular substances
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2383/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers
- C08J2383/04—Polysiloxanes
Abstract
The present invention provides composite and flexible resistive film of a kind of sound sensitive and preparation method thereof and sound transducers, the composite and flexible resistive film comprises the following components in parts by weight: 0.2~1 part of graphene, 0.2~1 part of carbon nanotube, 15~20 parts of PDMS prepolymer, 100~1000 parts and 1.5~2 parts of curing agent of solvent, by the way that PDMS performed polymer and curing agent are smeared on a silicon substrate after mixing evenly, then silicon substrate is solidified, PDMS film is made, again by graphene, carbon nanotube is added in solvent, by shear agitation, dispersion liquid is made after ultrasonic disperse, finally PDMS film layer is put into impregnate in dispersion liquid and be dried, it is made.The composite and flexible resistive film can be realized the sensing to sound high sensitivity, it can be used to prepare the highly sensitive sensor of sound using the resistive film, the sensor has good super-hydrophobicity, can prevent ambient humidity environment from sensor being caused to decline the sensitivity of sound.
Description
Technical field
The present invention relates to technical field of electronic materials, and in particular to a kind of the composite and flexible resistive film and its system of sound sensitive
Preparation Method and sound transducer.
Background technique
Sensor technology is one of the core technology of current rapid photo detector.For a long time, as the crucial letter of extraction
The sensor of breath is widely used in the fields such as military affairs, aerospace, civilian, industrial.With semiconductor technology and
The development of information technology, sensor develop to miniaturization, multifunction.On the other hand, as information technology is to intelligence, bionical
Change development, new application scenarios occurs in sensor, thus to the new requirement of propositions such as the flexibility of sensor, wearable.It is existing
Stage, wearable, flexible sensor with sensing functions such as pressure, temperature have been widely studied, and in bionic machine
It is used widely in the fields such as people, portable medical device.In order to which the application of bionic sensor is better achieved, in addition to needing
Outside being responded to pressure, temperature, humidity, it is also necessary to which flexible sensor responds sound.But so far, have
Technically there are no realizations for the sound transducer of flexibility.
Summary of the invention
In order to make up the vacancy that existing composite and flexible resistive film is applied in terms of sound sensor, the first purpose of this invention
Be the provision of a kind of composite and flexible resistive film of sound sensitive, with porous structure, can by the fluctuation of sound come
It generates the variation of resistance and then realizes the sensing function to sound.
Second object of the present invention is to provide a kind of preparation method of the composite and flexible resistive film of sound sensitive, work
Skill is simple, and composite and flexible resistive film obtained can be realized the sensing to sound high sensitivity.
Third object of the present invention is to provide a kind of sensor that sound is highly sensitive, and sensor has good super
Hydrophobicity can prevent ambient humidity environment from sensor being caused to decline the sensitivity of sound.
To achieve the above object, the technical solution adopted by the present invention to solve the technical problems is: a kind of sound sensitive
Composite and flexible resistive film, comprises the following components in parts by weight: 0.2~1 part of graphene, 0.2~1 part of carbon nanotube, PDMS pre-polymerization
15~20 parts of object, 100~1000 parts of solvent and 1.5~2 parts of curing agent.
Further, it comprises the following components in parts by weight: 0.2 part of graphene, 0.2 part of carbon nanotube, PDMS prepolymer 15
Part, 100 parts of solvent and 1.5 parts of curing agent.
Further, curing agent is dimethyl methyl hydrogen siloxane, trimethyl silanol, alkoxy silane and hydroxyl silicon
At least one of alkane, solvent are n,N dimethylformamide.
Further, the preparation method of the composite and flexible resistive film of above-mentioned sound sensitive, comprising the following steps:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to big containing different pore size
On the silicon substrate of small porous array structure, then solidified, by the PDMS film after solidification peeled from substrate to get to
The PDMS film layer of different pore size size；
(2) graphene, carbon nanotube are added in solvent, successively pass through shear agitation, ultrasonic disperse, be made and uniformly divide
Dispersion liquid；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated, then take out drying,
It is made.
Further, the pore size on the porous array silicon substrate in step (1) is 10-100 microns.
Further, the condition of cure in step (1) are as follows: at 100 DEG C~120 DEG C, solidify 30-120 minutes.
Further, the mixing time in step (2) is 30-60 minutes, and the ultrasonic disperse time is 60-120 minutes.
Further, PDMS film layer is impregnated in step (3), the number of drying operation is 4-6 times.
A kind of sound transducer, the composite and flexible resistive film including above-mentioned sound sensitive.
It should be noted that graphene used in the embodiment of the present invention can be single-layer graphene oxide, multilayer oxygen fossil
Black alkene, single layer reduced graphene or multilayer reduced graphene.Carbon nanotube used in the embodiment of the present invention can be reduction single wall
Carbon nanotube, reduction multi-walled carbon nanotube, oxidized single-walled carbon nanotubes or oxidation multi-wall carbon nano-tube tube.
The invention has the following advantages:
Composite and flexible resistive film of the invention has similar cellular porous array structure, due to carbon nanotube and graphite
There is stronger effect, adsorption effect easy to form between alkene, therefore conduction can be formed between carbon nanotube and graphene
Network, the conductive network can be attached to porous structure surface, and hanging conductive network is finally formed in orifice surface；Sound causes
Air vibration can result in the surface vibration of hanging conductive film layer and surface deformation occur, the resistance of hanging conductive network occurs
Change and the resistance of entire flexible membrane layer change, therefore the resistance of entire flexible membrane embodies the characteristic to sound sensitive,
Its sound that can accurately differentiate 50Hz-3000Hz frequency range, 50dB or more, and the tone of sound can be distinguished.This
The flexible resistor film of the sound sensitive provided is invented, preparation process is simple, is easy to large-scale production.In addition, sound of the invention
Sensitive resistance film surface has superhydrophobic characteristic, and the flexible sound transducer surface based on the film layer is super-hydrophobic, so that should
Decline to the sensitivity of sound caused by sound transducer can work in certain ambient humidity environment without because of humidity.
Detailed description of the invention
Fig. 1 is the decibel resistance change curves of 1-9 of the embodiment of the present invention；
Fig. 2 is the frequency resistance change curves of 1-9 of the embodiment of the present invention；
Fig. 3 is that the thick aperture surface of composite and flexible resistive film of the embodiment of the present invention 1 amplifies 200 times of scanning electron microscope；
Fig. 4 is the scanning electron microscope that aperture surface amplifies 200 times in the composite and flexible resistive film of the embodiment of the present invention 5；
Fig. 5 is that 200 times of scanning electron microscope is amplified on the composite and flexible sound resistive film fine pore surface of the embodiment of the present invention 7；
Fig. 6 is the scanning electricity that the composite and flexible sound resistive film gross porosity diameter section of the embodiment of the present invention 1 amplifies 20000 times
Mirror；
Fig. 7 is the scanning electricity that aperture section amplifies 20000 times in the composite and flexible sound resistive film of the embodiment of the present invention 5
Mirror；
Fig. 8 is the scanning electricity that the composite and flexible sound resistive film fine pore section of the embodiment of the present invention 7 amplifies 20000 times
Mirror；
Fig. 9 is 10 micron pore size composite and flexible resistive film contact angle photos of the embodiment of the present invention 7；
Figure 10 is 50 micron pore size composite and flexible resistive film contact angle photos of the embodiment of the present invention 5；
Figure 11 is 100 micron pore size composite and flexible resistive film contact angle photos of the embodiment of the present invention 1.
Specific embodiment
The principle and features of the present invention will be described below with reference to the accompanying drawings, and the given examples are served only to explain the present invention, and
It is non-for limiting the scope of the invention, be not specified actual conditions in embodiment person, the item suggested according to normal conditions at manufacturer
Part carries out, reagents or instruments used without specified manufacturer, is the customary commercial that can be bought by market.Below with reference to
The present invention is further described for embodiment.
Embodiment 1
A kind of composite and flexible resistive film of sound sensitive, comprises the following components in parts by weight: 0.2 part of graphene, carbon nanometer
0.2 part of pipe, 18 parts of PDMS prepolymer, N, 100 parts of N-dimethylformamide solvent and dimethyl methyl hydrogen siloxane curing agent 1.8
Part.
The preparation method of the composite and flexible resistive film of above sound sensitivity, comprising the following steps:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to containing 100 micron pore sizes
Porous array structure silicon substrate on, then the silicon substrate is put into baking oven, carried out at 100 DEG C solidification 60 minutes；It will
PDMS film after solidification is peeled from substrate to get to PDMS film layer；
(2) graphene, carbon nanotube are added in n,N-Dimethylformamide solvent, are successively divided by shear agitation 30
Uniform dispersion is made in clock, ultrasonic disperse after sixty minutes；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated 5 minutes, it then will leaching
PDMS film layer after bubble takes out drying, and the composite and flexible resistive film of sound sensitive is made in such immersion-drying cycle 4 times.
A kind of sound transducer, the composite and flexible resistive film including above-mentioned sound sensitive.
Embodiment 2
A kind of composite and flexible resistive film of sound sensitive, comprises the following components in parts by weight: 0.2 part of graphene, carbon nanometer
0.2 part of pipe, 15 parts of PDMS prepolymer, N, 100 parts of N-dimethylformamide solvent and dimethyl methyl hydrogen siloxane curing agent 1.5
Part.
The preparation method of the composite and flexible resistive film of above sound sensitivity, comprising the following steps:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to containing 100 micron pore sizes
Porous array structure silicon substrate on, then the silicon substrate is put into baking oven, carried out at 100 DEG C solidification 80 minutes；It will
PDMS film after solidification is peeled from substrate to get to PDMS film layer；
(2) graphene, carbon nanotube are added in n,N-Dimethylformamide solvent, are successively divided by shear agitation 40
Uniform dispersion is made after ultrasonic disperse 80 minutes in clock；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated 5 minutes, it then will leaching
PDMS film layer after bubble takes out drying, and the composite and flexible resistive film of sound sensitive is made in such immersion-drying cycle 4 times.
A kind of sound transducer, the composite and flexible resistive film including above-mentioned sound sensitive.
Embodiment 3
A kind of composite and flexible resistive film of sound sensitive, comprises the following components in parts by weight: 1 part of graphene, carbon nanotube 1
Part, 20 parts of PDMS prepolymer, N, 1000 parts and 2 parts of alkoxysilane curative of N-dimethylformamide solvent.
The preparation method of the composite and flexible resistive film of above sound sensitivity, comprising the following steps:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to containing 100 micron pore sizes
Porous array structure silicon substrate on, then the silicon substrate is put into baking oven, carried out at 120 DEG C solidification 120 minutes；It will
PDMS film after solidification is peeled from substrate to get to PDMS film layer；
(2) graphene, carbon nanotube are added in n,N-Dimethylformamide solvent, are successively divided by shear agitation 60
Uniform dispersion is made after ultrasonic disperse 120 minutes in clock；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated 5 minutes, it then will leaching
PDMS film layer after bubble takes out drying, and the composite and flexible resistive film of sound sensitive is made in such immersion-drying cycle 6 times.
A kind of sound transducer, the composite and flexible resistive film including above-mentioned sound sensitive.
Embodiment 4
A kind of composite and flexible resistive film of sound sensitive, comprises the following components in parts by weight: 0.4 part of graphene, carbon nanometer
0.4 part of pipe, 15 parts of PDMS prepolymer, N, 500 parts of N-dimethylformamide solvent and dimethyl methyl hydrogen siloxane curing agent 1.5
Part.
The preparation method of the composite and flexible resistive film of above sound sensitivity, comprising the following steps:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to containing 50 micron pore sizes
Porous array structure silicon substrate on, then the silicon substrate is put into baking oven, carried out at 100 DEG C solidification 60 minutes；It will
PDMS film after solidification is peeled from substrate to get to PDMS film layer；
(2) graphene, carbon nanotube are added in n,N-Dimethylformamide solvent, are successively divided by shear agitation 30
Uniform dispersion is made in clock, ultrasonic disperse after sixty minutes；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated 5 minutes, it then will leaching
PDMS film layer after bubble takes out drying, and the composite and flexible resistive film of sound sensitive is made in such immersion-drying cycle 4 times.
A kind of sound transducer, the composite and flexible resistive film including above-mentioned sound sensitive.
Embodiment 5
A kind of composite and flexible resistive film of sound sensitive, comprises the following components in parts by weight: 0.6 part of graphene, carbon nanometer
0.6 part of pipe, 15 parts of PDMS prepolymer, N, 300 parts and 1.5 parts of trimethyl silanol curing agent of N-dimethylformamide solvent.
The preparation method of the composite and flexible resistive film of above sound sensitivity, comprising the following steps:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to containing 50 micron pore sizes
Porous array structure silicon substrate on, then the silicon substrate is put into baking oven, carried out at 110 DEG C solidification 40 minutes；It will
PDMS film after solidification is peeled from substrate to get to PDMS film layer；
(2) graphene, carbon nanotube are added in n,N-Dimethylformamide solvent, are successively divided by shear agitation 30
Uniform dispersion is made in clock, ultrasonic disperse after sixty minutes；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated 5 minutes, it then will leaching
PDMS film layer after bubble takes out drying, and the composite and flexible resistive film of sound sensitive is made in such immersion-drying cycle 5 times.
A kind of sound transducer, the composite and flexible resistive film including above-mentioned sound sensitive.
Embodiment 6
A kind of composite and flexible resistive film of sound sensitive, comprises the following components in parts by weight: 0.5 part of graphene, carbon nanometer
0.5 part of pipe, 17 parts of PDMS prepolymer, N, 800 parts of N-dimethylformamide solvent and dimethyl methyl hydrogen siloxane curing agent 1.7
Part.
The preparation method of the composite and flexible resistive film of above sound sensitivity, comprising the following steps:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to containing 50 micron pore sizes
Porous array structure silicon substrate on, then the silicon substrate is put into baking oven, carried out at 120 DEG C solidification 100 minutes；It will
PDMS film after solidification is peeled from substrate to get to PDMS film layer；
(2) graphene, carbon nanotube are added in n,N-Dimethylformamide solvent, are successively divided by shear agitation 50
Uniform dispersion is made after ultrasonic disperse 80 minutes in clock；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated 6 minutes, it then will leaching
PDMS film layer after bubble takes out drying, and the composite and flexible resistive film of sound sensitive is made in such immersion-drying cycle 5 times.
A kind of sound transducer, the composite and flexible resistive film including above-mentioned sound sensitive.
Embodiment 7
A kind of composite and flexible resistive film of sound sensitive, comprises the following components in parts by weight: 0.2 part of graphene, carbon nanometer
0.2 part of pipe, 15 parts of PDMS prepolymer, N, 100 parts of N-dimethylformamide solvent and dimethyl methyl hydrogen siloxane curing agent 1.5
Part.
The preparation method of the composite and flexible resistive film of above sound sensitivity, comprising the following steps:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to containing 10 micron pore sizes
Porous array structure silicon substrate on, then the silicon substrate is put into baking oven, carried out at 100 DEG C solidification 60 minutes；It will
PDMS film after solidification is peeled from substrate to get to PDMS film layer；
(2) graphene, carbon nanotube are added in n,N-Dimethylformamide solvent, are successively divided by shear agitation 30
Uniform dispersion is made in clock, ultrasonic disperse after sixty minutes；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated 5 minutes, it then will leaching
PDMS film layer after bubble takes out drying, and the composite and flexible resistive film of sound sensitive is made in such immersion-drying cycle 4 times.
A kind of sound transducer, the composite and flexible resistive film including above-mentioned sound sensitive.
Embodiment 8
A kind of composite and flexible resistive film of sound sensitive, comprises the following components in parts by weight: 0.2 part of graphene, carbon nanometer
0.2 part of pipe, 15 parts of PDMS prepolymer, N, 100 parts of N-dimethylformamide solvent and dimethyl methyl hydrogen siloxane curing agent 1.5
Part.
The preparation method of the composite and flexible resistive film of above sound sensitivity, comprising the following steps:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to containing 10 micron pore sizes
Porous array structure silicon substrate on, then the silicon substrate is put into baking oven, carried out at 100 DEG C solidification 60 minutes；It will
PDMS film after solidification is peeled from substrate to get to PDMS film layer；
(2) graphene, carbon nanotube are added in n,N-Dimethylformamide solvent, are successively divided by shear agitation 30
Uniform dispersion is made in clock, ultrasonic disperse after sixty minutes；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated 5 minutes, it then will leaching
PDMS film layer after bubble takes out drying, and the composite and flexible resistive film of sound sensitive is made in such immersion-drying cycle 5 times.
A kind of sound transducer, the composite and flexible resistive film including above-mentioned sound sensitive.
Embodiment 9
A kind of composite and flexible resistive film of sound sensitive, comprises the following components in parts by weight: 0.2 part of graphene, carbon nanometer
0.2 part of pipe, 15 parts of PDMS prepolymer, N, 100 parts of N-dimethylformamide solvent and dimethyl methyl hydrogen siloxane curing agent 1.5
Part.
The preparation method of the composite and flexible resistive film of above sound sensitivity, comprising the following steps:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to containing 10 micron pore sizes
Porous array structure silicon substrate on, then the silicon substrate is put into baking oven, carried out at 100 DEG C solidification 50 minutes；It will
PDMS film after solidification is peeled from substrate to get to PDMS film layer；
(2) graphene, carbon nanotube are added in n,N-Dimethylformamide solvent, are successively divided by shear agitation 40
Uniform dispersion is made after ultrasonic disperse 70 minutes in clock；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated 5 minutes, it then will leaching
PDMS film layer after bubble takes out drying, and the composite and flexible resistive film of sound sensitive is made in such immersion-drying cycle 6 times.
A kind of sound transducer, the composite and flexible resistive film including above-mentioned sound sensitive.
The composite and flexible resistive film of sound sensitive made from embodiment 1-9 is detected as follows:
1, resistance-voice response situation, the result is shown in Figure 1.The composite and flexible resistive film that the present invention obtains is with higher
Resistance-voice response sensitivity, film resistance for intensity of sound from 70dB to 110dB in the range of can have good resistance
Change response characteristic, especially 7 composite and flexible resistive film of embodiment induction is most sensitive.
2, resistance-frequency situation of change, the result is shown in Fig. 2.The resistance for the composite and flexible resistive film that the present invention obtains is directed to
The sound wave of low-frequency range 50Hz to 1500Hz range all has higher sensitivity, can accurately induce the sound of different frequency range
The composite and flexible resistive film induction of variation, especially embodiment 7 is most sensitive.
3,200 times are amplified to the composite and flexible resistance film surface of different pore size size, observes composite film surface situation, specifically
As a result see Fig. 3, Fig. 4 and Fig. 5.Fig. 3, Fig. 4, Fig. 5 are respectively embodiment 1, different pore size size in embodiment 5 and embodiment 7
Composite and flexible resistance film surface amplifies 200 times of stereoscan photograph.Picture is shown: obtained composite and flexible resistance film surface
It is porous type pleated structure, surface covers one layer of continuous conduction network being made of carbon nano tube/graphene.
4,20000 times are amplified to the composite and flexible resistance film surface of different pore size size, observes composite film surface situation, tool
Body result is shown in Fig. 6, Fig. 7 and Fig. 8.Fig. 6, Fig. 7, Fig. 8 are respectively embodiment 1, different pore size answers in embodiment 5 and embodiment 7
20000 times of stereoscan photograph is amplified in the section for closing flexible resistor film, shows the porous structure of resistive film, is formed by hole
It is made of pore, mesoporous and large hole, aperture size is distributed between tens microns to 200 microns.Hole knot in the range
Structure is conducive to the formation of half-connection microcellular structure.
5, the water contact angle of the composite and flexible resistive film of different pore size size is detected, concrete outcome is shown in Fig. 9, Figure 10 and figure
11.Fig. 9, Figure 10, Figure 11 are respectively embodiment 1, the water of different pore size composite and flexible resistive film connects in embodiment 5 and embodiment 7
Feeler photo, detection are learnt that the contact angle of 10 microns, 50 microns and 100 micron pore size films is followed successively by 141 °, 135 °, 127 °, are connect
Feeler is sequentially reduced, and all shows preferable superhydrophobic characteristic.
Claims (9)
1. a kind of composite and flexible resistive film of sound sensitive, which is characterized in that comprise the following components in parts by weight: graphene 0.2
~1 part, 0.2~1 part of carbon nanotube, 15~20 parts of PDMS prepolymer, 100~1000 parts of solvent and 1.5~2 parts of curing agent.
2. the composite and flexible resistive film of sound sensitive as described in claim 1, which is characterized in that the group including following parts by weight
Point: 0.2 part of graphene, 0.2 part of carbon nanotube, 15 parts of PDMS prepolymer, 100 parts of solvent and 1.5 parts of curing agent.
3. the composite and flexible resistive film of sound sensitive as claimed in claim 1 or 2, which is characterized in that the curing agent is two
At least one of methyl hydrogen siloxane, trimethyl silanol, alkoxy silane and silicol, the solvent are N,
N-dimethylformamide.
4. the preparation method of the composite and flexible resistive film of sound sensitive as described in any one of claims 1-3, which is characterized in that
The following steps are included:
(1) PDMS performed polymer and curing agent are stirred evenly, which is uniformly applied to containing different pore size size
On the silicon substrate of porous array structure, then solidified, the PDMS film after solidification is peeled from substrate, obtains different holes
The PDMS film layer of diameter size；
(2) graphene, carbon nanotube are added in solvent, successively pass through shear agitation, ultrasonic disperse, is made evenly dispersed
Liquid；
(3) PDMS film layer made from step (1) is put into dispersion liquid made from step (2) and is impregnated, then take out drying, made
?.
5. the preparation method of the composite and flexible resistive film of sound sensitive as claimed in claim 4, which is characterized in that step (1)
Described in porous array silicon substrate on pore size be 10-100 microns.
6. the preparation method of the composite and flexible resistive film of sound sensitive as claimed in claim 4, which is characterized in that step (1)
In condition of cure are as follows: at 100 DEG C~120 DEG C, solidify 30-120 minutes.
7. the preparation method of the composite and flexible resistive film of sound sensitive as claimed in claim 4, which is characterized in that step (2)
In mixing time be 30-60 minute, the ultrasonic disperse time be 60-120 minutes.
8. the preparation method of the composite and flexible resistive film of sound sensitive as claimed in claim 4, which is characterized in that step (3)
Middle PDMS film layer is impregnated, the number of drying operation is 4-6 times.
9. a kind of sound transducer, which is characterized in that the composite and flexible including the described in any item sound sensitives of claim 1-3
Resistive film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811056726.1A CN109134898A (en) | 2018-09-11 | 2018-09-11 | A kind of composite and flexible resistive film of sound sensitive and preparation method thereof and sound transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811056726.1A CN109134898A (en) | 2018-09-11 | 2018-09-11 | A kind of composite and flexible resistive film of sound sensitive and preparation method thereof and sound transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109134898A true CN109134898A (en) | 2019-01-04 |
Family
ID=64824431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811056726.1A Pending CN109134898A (en) | 2018-09-11 | 2018-09-11 | A kind of composite and flexible resistive film of sound sensitive and preparation method thereof and sound transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109134898A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109896500A (en) * | 2019-03-05 | 2019-06-18 | 西安交通大学 | A kind of manufacturing process and sound wave detecting method of grid type acoustics sensor structure |
| CN110157192A (en) * | 2019-04-10 | 2019-08-23 | 中国科学院深圳先进技术研究院 | A kind of flexible polymer film and its manufacturing method can be used for sound intensity detection |
| CN110207808A (en) * | 2019-06-24 | 2019-09-06 | 西安柯莱特信息科技有限公司 | A kind of measuring device of intensity of acoustic wave |
| CN110687169A (en) * | 2019-11-01 | 2020-01-14 | 电子科技大学 | Humidity-sensitive carbon nanotube/graphene/organic composite flexible material, humidity sensor and preparation method thereof |
| CN115532565A (en) * | 2022-09-21 | 2022-12-30 | 沈阳航空航天大学 | Graphene-based composite material sensor and physical smearing preparation method and application thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103780121A (en) * | 2013-01-08 | 2014-05-07 | 国家纳米科学中心 | Ultrasonic sound and sound wave detector based on triboelectricity nanometer generator |
| CN104578892A (en) * | 2013-10-12 | 2015-04-29 | 纳米新能源（唐山）有限责任公司 | Integrated frictional generator and vibration sensor |
| US20160295338A1 (en) * | 2015-03-31 | 2016-10-06 | Vorbeck Materials Corp. | Microphone diaphragm |
-
2018
- 2018-09-11 CN CN201811056726.1A patent/CN109134898A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103780121A (en) * | 2013-01-08 | 2014-05-07 | 国家纳米科学中心 | Ultrasonic sound and sound wave detector based on triboelectricity nanometer generator |
| CN104578892A (en) * | 2013-10-12 | 2015-04-29 | 纳米新能源（唐山）有限责任公司 | Integrated frictional generator and vibration sensor |
| US20160295338A1 (en) * | 2015-03-31 | 2016-10-06 | Vorbeck Materials Corp. | Microphone diaphragm |
Non-Patent Citations (1)
| Title |
|---|
| CHUNHONG MU ET AL: ""Flexible Normal-Tangential Force Sensor with Opposite Resistance Responding for Highly Sensitive Artificial Skin"，Chunhong Mu et al", 《ADV. FUNCT. MATER.》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109896500A (en) * | 2019-03-05 | 2019-06-18 | 西安交通大学 | A kind of manufacturing process and sound wave detecting method of grid type acoustics sensor structure |
| CN109896500B (en) * | 2019-03-05 | 2021-01-15 | 西安交通大学 | Manufacturing process of grid type acoustic sensing structure and acoustic wave detection method |
| CN110157192A (en) * | 2019-04-10 | 2019-08-23 | 中国科学院深圳先进技术研究院 | A kind of flexible polymer film and its manufacturing method can be used for sound intensity detection |
| CN110157192B (en) * | 2019-04-10 | 2021-10-01 | 中国科学院深圳先进技术研究院 | Flexible polymer film for sound intensity detection and manufacturing method thereof |
| CN110207808A (en) * | 2019-06-24 | 2019-09-06 | 西安柯莱特信息科技有限公司 | A kind of measuring device of intensity of acoustic wave |
| CN110687169A (en) * | 2019-11-01 | 2020-01-14 | 电子科技大学 | Humidity-sensitive carbon nanotube/graphene/organic composite flexible material, humidity sensor and preparation method thereof |
| CN110687169B (en) * | 2019-11-01 | 2022-06-10 | 电子科技大学 | Humidity-sensitive carbon nano tube/graphene/organic composite flexible material, humidity sensor and preparation method thereof |
| CN115532565A (en) * | 2022-09-21 | 2022-12-30 | 沈阳航空航天大学 | Graphene-based composite material sensor and physical smearing preparation method and application thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109134898A (en) | A kind of composite and flexible resistive film of sound sensitive and preparation method thereof and sound transducer | |
| Zhang et al. | Printed carbon nanotubes-based flexible resistive humidity sensor | |
| Segev-Bar et al. | Tunable touch sensor and combined sensing platform: toward nanoparticle-based electronic skin | |
| CN107474293B (en) | Friction-sensitive composite flexible resistive film, preparation method thereof and friction sensor | |
| Liu et al. | Moisture-resistant MXene-sodium alginate sponges with sustained superhydrophobicity for monitoring human activities | |
| CN109945999A (en) | A kind of preparation method of fexible film pressure sensor | |
| Yoon et al. | A novel means of fabricating microporous structures for the dielectric layers of capacitive pressure sensor | |
| Wen et al. | Ultra-highly sensitive, low hysteretic and flexible pressure sensor based on porous MWCNTs/Ecoflex elastomer composites | |
| CN110137337B (en) | Flexible pressure sensor and preparation method thereof | |
| CN108225625A (en) | Pliable pressure sensor and preparation method thereof | |
| CN109855782B (en) | Flexible conductive composite film for sensor, preparation method thereof and flexible sensor | |
| Xiao et al. | Interface-engineered reduced graphene oxide assembly on nanofiber surface for high performance strain and temperature sensing | |
| Yi et al. | A new approach for an ultra-thin piezoresistive sensor based on solidified carbon ink film | |
| Aria et al. | Ethanol sensing properties of PVP electrospun membranes studied by quartz crystal microbalance | |
| Lei et al. | Highly sensitive and wide-range flexible pressure sensor based on carbon nanotubes-coated polydimethylsiloxane foam | |
| CN107266912A (en) | Redox graphene polyimides is heat-treated the preparation method of foam | |
| Sun et al. | Hydrophobic multifunctional flexible sensors with a rapid humidity response for long-term respiratory monitoring | |
| da Costa et al. | Fabrication and patterning methods of flexible sensors using carbon nanomaterials on polymers | |
| Nankali et al. | Dynamic thermoelectromechanical characterization of carbon nanotube nanocomposite strain sensors | |
| CN113776709B (en) | Dual-mode flexible touch sensor and preparation method and application thereof | |
| Yang et al. | Highly flexible and sensitive wearable strain and pressure sensor based on porous graphene paper for human motion | |
| CN107254158A (en) | Electrical-conductive nanometer composite cellulosic membrane with gas sensitive effect and preparation method thereof | |
| Han et al. | A stretchable and flexible strain sensor based on graphene sponge | |
| CN111766000A (en) | Gold thin film flexible crack sensor based on micro-scale wrinkles | |
| Li et al. | Facile and rapid fabrication of conductive layers on flexible polymer surfaces and their application to flexible strain sensors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190104 |