CN109115782B - Optical defect detection device based on multi-resolution image - Google Patents
Optical defect detection device based on multi-resolution image Download PDFInfo
- Publication number
- CN109115782B CN109115782B CN201810520331.6A CN201810520331A CN109115782B CN 109115782 B CN109115782 B CN 109115782B CN 201810520331 A CN201810520331 A CN 201810520331A CN 109115782 B CN109115782 B CN 109115782B
- Authority
- CN
- China
- Prior art keywords
- image
- resolution
- template
- original
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
Landscapes
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Theoretical Computer Science (AREA)
- Signal Processing (AREA)
- Health & Medical Sciences (AREA)
- Quality & Reliability (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Processing (AREA)
Abstract
The invention provides an optical defect detection device based on multi-resolution images, which comprises: an image shooting system for shooting an object to be detected to output an image signal with a first resolution; and an image processing system for receiving the image signal to store an image original with the first resolution, processing the image original according to at least one region parameter to generate an image with a second resolution, and generating an output image with at least the second resolution according to the region parameter, the image with the second resolution and the image original with the first resolution, wherein the second resolution is lower than the first resolution, and the output image is used for detecting the defect of the object to be detected.
Description
Technical Field
The present invention relates to an optical defect detecting device, and more particularly, to an optical defect detecting device based on a multi-resolution image, which reduces the area resolution according to the different density gathering areas on an object to be detected based on a high-resolution original image, so as to increase the processing speed for detecting the defects of the object to be detected.
Background
Consumer electronics products are required to be light, thin, short and small, so that the defects of electronic components to be detected by related detection machines are smaller and smaller, and the abnormity of the products cannot be caused. In order to detect these defect defects, the required scan resolution precision of an Automatic Optical Inspection (AOI) is also increasing.
In response to these market demands, the machines need to be equipped with high resolution optics and hardware to achieve this goal. However, the processing of high resolution images requires highly efficient hardware and software to perform the defect detection in a short time.
One prior art, new patent No. M470256, provides an optical defect detecting device, which is configured with different resolution camera devices according to different detection requirements. On the same machine equipment, the object to be detected is measured with different resolutions, the measurement of the high-resolution camera device can detect the defects of high-density gathered parts or dense circuit layout on the object to be detected, and the measurement of the low-resolution camera device can detect the defects of larger-volume parts or general circuit layout on the object to be detected. All detection has the consideration of specification and speed, if the specification of detecting defects is required to be small, an optical system architecture with high resolution needs to be matched, but the obtained integral image data volume is huge, and the detection efficiency of a production line can be reduced.
Although the optical defect detection device in the prior art can meet different requirements and improve detection efficiency, and the measurement of the high-resolution camera device can effectively reduce the detection volume of the mechanism, the cost of the machine is greatly increased by configuring the camera devices with different resolutions, the mechanism design is complex, and the time required for the related high-resolution measurement cannot be effectively reduced. Therefore, the present invention is industrially applicable to provide an optical defect detection device based on a multi-resolution image.
Disclosure of Invention
The invention solves the problems in the prior art, takes the picture of the high-resolution image original image of the object to be detected under the hardware architecture of the high-resolution optical system, determines the detection area with lower resolution according to the defect specification requirement of the client test material number, reduces the data volume of the high-resolution image original image of the detection area, adjusts the high-resolution image original image to the proper low-resolution image, and integrates the output images with different resolutions for detecting the defect.
The present invention provides an optical defect detecting device based on multi-resolution images, which uses a high-resolution camera to capture an object to be detected to generate an original image, and generates output images with different resolutions for detecting defects of the object to be detected in response to regions with different detection requirements to reduce the high resolution.
In order to achieve the above object, the present invention provides an optical defect detecting apparatus based on multi-resolution images, comprising:
an image shooting system for shooting an object to be detected to output an image signal with a first resolution; and
an image processing system for receiving the image signal to store an image original with the first resolution, processing the image original according to at least one region parameter to generate an image with a second resolution, and generating an output image with at least the second resolution according to the region parameter, the image with the second resolution and the image original with the first resolution, wherein the second resolution is lower than the first resolution, and the output image is used for detecting defects of the object to be detected.
Furthermore, the image capturing system comprises a camera with the first resolution and at least one light source, and the object to be detected is irradiated by the light source, so that the camera captures the object to be detected and outputs an image signal with the first resolution.
The image processing system further includes an image card, an image processing module and an image buffer, wherein the image card receives the image signal to generate the image source with the first resolution, and the image processing module receives and stores the image source with the first resolution into the image buffer.
Furthermore, the image processing module processes the image original according to the region parameter to generate and store the image with the second resolution into the image buffer.
Furthermore, the image processing module generates and stores an output image with the second resolution into the image buffer according to the region parameter, the image with the second resolution and the image original with the first resolution.
Furthermore, the image processing module generates and stores an output image with the first resolution and the second resolution to the image buffer according to the image with the second resolution and the image original with the first resolution.
Furthermore, the image processing system comprises an image output module, and the image output module outputs the output image to detect the defect of the object to be detected.
Further, the image capturing system captures a sample image to output a sample image signal with a first resolution, the image processing system receives the sample image signal to store a sample original image with the first resolution, processes the sample original image according to at least one region parameter to generate a sample image with a second resolution, and generates a sample standard image with at least the second resolution according to the region parameter, the sample image with the second resolution and the sample original image with the first resolution, the sample standard image is used for comparing with the output image to detect defects of the object to be detected.
Further, the image processing system generates a template standard image with the first resolution and the second resolution according to the template image with the second resolution and the template original image with the first resolution, and the template standard image is used for comparing with the output image to detect the defect of the object to be detected.
Further, the image processing system includes an image card, an image processing module and an image buffer, wherein the image card receives the template image signal to generate a template original image with the first resolution, the image processing module receives and stores the template original image with the first resolution into the image buffer, the image processing module processes the template original image according to the region parameter to generate and store a template image with the second resolution into the image buffer, and the image processing module generates and stores a template standard image with the first resolution and the second resolution into the image buffer according to the template image with the second resolution and the template original image with the first resolution.
The invention has the advantages that:
the optical defect detection device based on multi-resolution images can divide the data processing time of full-image consistency with high resolution into partial high-resolution high-data-volume calculation and partial low-resolution common-data-volume calculation, and shorten the whole data volume processing time of post-defect detection.
Drawings
FIG. 1 is a block diagram of an optical defect inspection apparatus according to the present invention;
FIG. 2 is an architecture diagram of an image processing system of the apparatus of the present invention;
FIG. 3 is a diagram illustrating an image and region parameters stored in an image buffer according to the present invention;
FIG. 4 is a schematic illustration of various image and region associations according to the present invention;
FIG. 5 is a schematic diagram illustrating region setting according to an embodiment of the present invention;
FIG. 6 is an integrated output image of the embodiment shown in FIG. 5.
Description of the symbols:
1 Camera
2 polarizer
3 spectroscope
4 positive light source
5 left side light Source
6 Right side light source
7 backlight source
8 object to be detected
10 image capturing system
20 image processing system
21 image card
22 image processing module
23 image output module
24 image buffer
31 high resolution A image original
32 area A
33 region B
34 region C
35 high resolution A image
36 resolution B image
37 resolution C image
38 integration of output images
Detailed Description
Referring first to FIG. 1, a system architecture diagram of an optical defect inspection apparatus of the present invention is shown. In an embodiment of the present invention, an optical defect detecting apparatus based on multi-resolution images includes an image capturing system 10 and an image processing system 20. The image capturing system 10 has a hardware architecture of a high-resolution optical system, including: a camera 1 with high resolution, the camera 1 defining an optical path for capturing an object 8 to be detected and outputting an image signal with high resolution (first resolution) to the image processing system 20. The side of the object 8 to be detected facing the camera 1 can have a plurality of components or its wiring distributed thereon. In addition, the image capturing system 10 is configured with various auxiliary light sources and optical components to show the defects and flaws of the object 8. These auxiliary light sources and optical components include: a polarizer 2 disposed on the optical path of the camera 1 to filter out stray light; a spectroscope 3 disposed on an optical path of the camera 1; a positive light source 4 matched with the spectroscope 3 to provide a positive light source of the object to be detected 8 for the camera 1 to shoot and take images; a left light source 5 and a right light source 6 for providing auxiliary light for shooting the object 8 to be detected; and a backlight source disposed below the object 8 to be detected for providing auxiliary light for shooting the object 8 to be detected.
In this embodiment of the present invention, the image processing system 20 receives an image signal with high resolution output by the image capturing system 10 capturing an object 8 to be detected. Before processing the image signal with high resolution, the image processing system 20 receives a region setting to partially reduce the resolution into a general data volume based on a region parameter, so as to meet different detection requirements of the object 8 to be detected. The image processing system 20 will finally output an output image with different resolution for defect detection of the object to be inspected.
Referring to fig. 2, an architecture diagram of an image processing module of the apparatus of the present invention is shown. The image processing system 20 of the present invention includes an image card 21, an image processing module 22, an image buffer 24 and an image output module 23. The image card 21 is connected to the image capture system 10 to receive an image signal from the image capture system 10 and output image originals having a high resolution. The image processing module 22 is connected to the image card 21, the image buffer 24 and the image output module 23, and the image processing module 22 receives and stores the image artwork with high resolution to the image buffer 24. In addition, the image processing module 22 receives the region setting and stores the region parameter associated with the image original into the image buffer 24, wherein the region parameter is used to determine that the reduced data amount in the image original associated with the high resolution of the object to be detected is a low resolution image (the image with the second resolution). Therefore, the area setting is a procedure before the optical defect detecting apparatus of the present invention detects a defect of an object to be detected, and is further described below.
Before detecting the defect of an object to be detected, the optical defect detecting device of the invention firstly executes a standard template establishing process. In this process, the image capturing system 10 first captures a standard template (template detection object) to output a high-resolution (first-resolution) template image signal to the image processing system 20. The image processing system 20 processes the template image signal for area setting, generates area parameters, stores the area parameters in the image buffer 24, and outputs a template standard image with different resolutions, which is used for comparing with an output image associated with an object to be detected to detect defects of the object to be detected.
In the standard template creation process, the graphic card 21 of the image processing system 20 receives the high resolution template image signal and outputs the high resolution template original to the image processing module 22, and the image processing module 22 stores the high resolution template original in the image buffer 24. Then, the image processing module 22 determines which areas in the template original image can detect the defect in the corresponding area of the object to be detected with the optimal resolution (the second resolution) according to the defect specification requirement of the test material number provided by the customer and the acceptable proper resolution of the reference defect detection algorithm. The optimal resolution is to determine which areas of the template original image are not required to be calculated with the data amount of the highest resolution (first resolution), so as to detect the defect specification requested by the customer, thereby reducing the data amount of the whole original image, and further shortening the data processing time to improve the defect detection efficiency. In various embodiments of the present invention, the corresponding area with the best resolution may also be defined by an operator directly in the template original image as a set of relative coordinates, and then the area parameters are stored in the image buffer 24.
After the image processing module 22 determines the optimal resolution of each region, the region parameters are stored in the image buffer 24. The image processing module 22 calculates the data amount in each region according to the region parameters and the high-resolution template original, and reduces the resolution to the optimum resolution by an image scaling algorithm, wherein the region parameters include the relative coordinates of the template original of a standard template and the optimum resolution. The image processing module 22 re-samples the data amount in each region, and stores the optimal resolution image (template image) of each region corresponding to each region. Finally, the image processing module 22 integrates the best resolution image of each region into the template original to generate a template standard image, and outputs the template standard image through the image output module 23. In the subsequent flaw detection process, the template standard image is used for being compared with an output image related to an object to be detected so as to detect flaws of the object to be detected.
In an embodiment of the invention, after the optical defect detecting apparatus performs a standard template establishing process, the image buffer 24 stores a plurality of area parameters related to an object to be detected, each area parameter includes a set of relative coordinates of an image original of the object to be detected and an optimal resolution thereof. When detecting the defect of the object, the image capturing system 10 of the present invention captures an object to be detected to output a high resolution image signal to the image processing system 20. The image card 21 of the image processing system 20 receives the high resolution image signal and outputs the high resolution image original to the image processing module 22, and the image processing module 22 stores the high resolution image original in the image temporary storage 24. The image processing module 22 calculates the data amount in each region according to the plurality of region parameters and the high resolution image original, reduces the resolution of each region to the optimum resolution by a resampling algorithm, and stores the optimum resolution image of each region in the image buffer 24. Finally, the image processing module 22 integrates the image with the optimal resolution in each region into the original image of the object to be detected to generate output images with different resolutions, and the output images are output by the image output module 23 for detecting defects.
Referring to fig. 3 and fig. 4, a schematic diagram of the image buffer storing image and area parameters of the present invention and a schematic diagram of the association between various images and areas of the present invention are shown, respectively. In an embodiment of the present invention, during the standard template creating process, the image processing module 22 determines which areas of the high-resolution template original 31 can detect the defects in the corresponding areas of the object to be detected with the optimal resolution, such as the area a parameter, the area B parameter, and the area C parameter, according to the defect specification requirement of the test material number provided by the customer and the acceptable proper resolution of the reference defect detection algorithm. The image processing module 22 stores the local parameters in the image buffer 24.
When detecting the defect of the object, the image capturing system 10 of the present invention captures an object to be detected to output a high resolution image signal to the image processing system 20. The image processing module 22 stores high-resolution image originals 31 (high-resolution a image originals) in the image buffer 24. As shown in fig. 3 and 4, the image processing module 22 cuts out and stores the high resolution a image 35 in the area a 32 of the image original 31 in the image buffer 24 according to the area a parameter. The image processing module 22 calculates the data amount of the area B33 of the image original 31 according to the area B parameter, and reduces the resolution to the resolution B image 36 by the resampling algorithm and temporarily stores the resolution B image in the image temporary storage area 24. The image processing module 22 calculates the data amount of the area C34 of the image original 31 according to the area C parameter, and reduces the resolution to the resolution C image 37 by the resampling algorithm and temporarily stores the image in the image temporary storage area 24. Finally, the image processing module 22 integrates the high resolution a image 35 of the area a 32, the resolution B image 36 of the area B33, and the resolution C image 37 of the area C34 into the image original 31 of the object to be inspected to generate an output image 38 with a different resolution A, B, C, which is output by the image output module 23 for defect detection.
Referring to fig. 5, a schematic diagram of region setting according to an embodiment of the invention is shown. In this embodiment of the present invention, during the standard template creation process, the image processing module 22 determines the regions 32, 33 according to the defect specification requirement of the test material number provided by the customer and the acceptable resolution of the reference defect detection algorithm, wherein the region 32 requires a high resolution image to inspect the defect specification of the wiring, and the region 33 requires only a lower resolution image to inspect the defect specification of the wiring.
Referring to fig. 6, an integrated output image of the embodiment shown in fig. 5 is shown. The image processing module 22 cuts out the high resolution image 35 of the area 32 from the image original and temporarily stores the cut high resolution image in the image temporary storage 24 according to the parameters of the areas 32 and 33 and the high resolution image original of the object to be detected, and calculates the high resolution image of the area 33 to reduce the resolution to the lower resolution image 36 by the resampling algorithm and temporarily stores the image in the image temporary storage 24. The image processing module 22 integrates an output image 38 as shown in fig. 6 according to the parameters of the areas 32 and 33, the images 35 and 36 with different resolutions of the areas 32 and 33, and the image original, and is used for detecting the defect of the object to be detected. Therefore, the detail process of the object to be detected can detect the defect in the area 32 by the high resolution image 35, and the defect in the area 33 can be detected by the lower resolution image 36 under the condition of other thick lines of the object to be detected, so that the whole data processing time for detecting the defect is shortened, and the whole detection speed is improved. In addition, the lower resolution image 36 has a reduced data amount, and the feature data amount obtained by the difference algorithm is still larger than that obtained by the conventional low resolution optical system, so that the detection efficiency is also relatively good.
The invention can reduce the resolution of partial area and then detect the area without high precision by using the mixed resolution mode and a resampling algorithm in an area without high precision, and the obtained data volume can not lose too much, thereby improving the overall efficiency and speed.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An optical defect detection device based on multi-resolution images, comprising:
the single image shooting system shoots an object to be detected to output an image signal with a first resolution; and
an image processing system, receiving the image signal to store an image original with the first resolution, processing the image original according to at least one region parameter to generate an image with a second resolution, and generating an output image with the first resolution and the second resolution according to the region parameter, the image with the second resolution and the image original with the first resolution, wherein the output image is used for detecting a defect of the object to be detected, the second resolution is lower than the first resolution, the image area occupied by the second resolution is larger than the image area occupied by the first resolution, the region parameter comprises a set of relative coordinates of the image original of the object to be detected and an optimal resolution thereof, and the optimal resolution is the second resolution; the optimal resolution is the first resolution, and the required defect specification can be detected without calculating the data size of the highest resolution in the set of relative coordinates.
2. The apparatus of claim 1, wherein the single image capturing system comprises a camera with the first resolution and at least one light source, the light source illuminates the object to be detected, the camera captures the object to be detected and outputs an image signal with the first resolution.
3. The apparatus of claim 1 or 2, wherein the image processing system comprises an image card, an image processing module and an image buffer, wherein the image card receives the image signal to generate the image source with the first resolution, and the image processing module receives and stores the image source with the first resolution into the image buffer.
4. The apparatus of claim 3, wherein the image processing module processes the image source according to the area parameter to generate and store the image with the second resolution in the image buffer.
5. The apparatus of claim 4, wherein the image processing module generates and stores an output image with the second resolution into the image buffer according to the region parameter, the image with the second resolution, and the image artwork with the first resolution.
6. The apparatus of claim 4, wherein the image processing module generates and stores the output image with the first resolution and the second resolution into the image buffer according to the image with the second resolution and the image original with the first resolution.
7. The apparatus of claim 6, wherein the image processing system comprises an image output module, the image output module outputs the output image to detect defects of the object.
8. The apparatus of claim 1, wherein the single image capturing system captures a template image of the object to be inspected to output a template image signal with a first resolution, the image processing system receives the template image signal to store the template original with the first resolution, processes the template original according to the area parameter to generate a template image with a second resolution, and generates a template standard image with at least the second resolution according to the area parameter, the template image with the second resolution, and the template original with the first resolution, the template standard image being used for comparison with the output image to detect defects of the object to be inspected.
9. The apparatus of claim 8, wherein the image processing system generates a prototype standard image with the first resolution and the second resolution according to the prototype image with the second resolution and the prototype original with the first resolution, and the prototype standard image is compared with the output image to detect defects of the object.
10. The multi-resolution image based optical defect detection apparatus according to claim 8 or 9, it is characterized in that the image processing system comprises an image card, an image processing module and an image temporary storage area, wherein the image card receives the template image signal to generate a template original image with the first resolution, the image processing module receives and stores the template original image with the first resolution into the image temporary storage area, the image processing module processes the template original image according to the area parameter to generate and store the template image with the second resolution into the image temporary storage area, the image processing module is used for processing the image according to the template image with the second resolution and the template original image with the first resolution, so as to generate and store the template standard image with the first resolution and the second resolution into the image temporary storage area.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2017207383634 | 2017-06-23 | ||
| CN201720738363 | 2017-06-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109115782A CN109115782A (en) | 2019-01-01 |
| CN109115782B true CN109115782B (en) | 2021-12-03 |
Family
ID=64822538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810520331.6A Active CN109115782B (en) | 2017-06-23 | 2018-05-28 | Optical defect detection device based on multi-resolution image |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109115782B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999053429A1 (en) * | 1998-04-14 | 1999-10-21 | Teralogic Incorporated | Multiresolution compressed image management system and method |
| CN101018299A (en) * | 2006-02-07 | 2007-08-15 | 日本胜利株式会社 | Method and apparatus for taking pictures |
| CN203587518U (en) * | 2013-10-17 | 2014-05-07 | 联策科技股份有限公司 | Optical defect detection device |
| CN103875033A (en) * | 2011-08-05 | 2014-06-18 | 福克斯体育产品公司 | Selective capture and presentation of native image portions |
| CN104954804A (en) * | 2015-06-19 | 2015-09-30 | 苏州淘老外网络科技有限公司 | Self-adaptive image resolution processing method |
| TWM551269U (en) * | 2017-06-23 | 2017-11-01 | Synpower Co Ltd | Optical type flaw inspection device based on multi-resolution image |
-
2018
- 2018-05-28 CN CN201810520331.6A patent/CN109115782B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999053429A1 (en) * | 1998-04-14 | 1999-10-21 | Teralogic Incorporated | Multiresolution compressed image management system and method |
| CN101018299A (en) * | 2006-02-07 | 2007-08-15 | 日本胜利株式会社 | Method and apparatus for taking pictures |
| CN103875033A (en) * | 2011-08-05 | 2014-06-18 | 福克斯体育产品公司 | Selective capture and presentation of native image portions |
| CN203587518U (en) * | 2013-10-17 | 2014-05-07 | 联策科技股份有限公司 | Optical defect detection device |
| CN104954804A (en) * | 2015-06-19 | 2015-09-30 | 苏州淘老外网络科技有限公司 | Self-adaptive image resolution processing method |
| TWM551269U (en) * | 2017-06-23 | 2017-11-01 | Synpower Co Ltd | Optical type flaw inspection device based on multi-resolution image |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109115782A (en) | 2019-01-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9865046B2 (en) | Defect inspection method and defect inspection device | |
| JP2008203034A (en) | Defect detection device and method | |
| US20080175466A1 (en) | Inspection apparatus and inspection method | |
| JPH0385742A (en) | Method of and device for detecting defective of circuit pattern | |
| JP2014190821A (en) | Defect detection device, and defect detection method | |
| KR20130135037A (en) | Apparatus for and method of inspecting substrate | |
| JP2018004272A (en) | Pattern inspection device and pattern inspection method | |
| JP5178781B2 (en) | Sensor output data correction device and sensor output data correction method | |
| CN109115782B (en) | Optical defect detection device based on multi-resolution image | |
| TWM551269U (en) | Optical type flaw inspection device based on multi-resolution image | |
| CN114723650A (en) | Wafer defect detection method and device, equipment and storage medium | |
| JP2011220735A (en) | Scanning electron microscope | |
| JP3788586B2 (en) | Pattern inspection apparatus and method | |
| JP2002024802A (en) | Image processing system | |
| TW202100991A (en) | Appearance inspection management system, appearance inspection management device, appearance inspection management method and program which can support a user to select a feature amount used as a defect determination index in an appearance inspection device and set a threshold value for each feature amount | |
| JP4956077B2 (en) | Defect inspection apparatus and defect inspection method | |
| JP2003203218A (en) | Visual inspection device and method | |
| TW201514479A (en) | Defect viewing device and defect viewing method | |
| JP3283866B2 (en) | Circuit pattern defect inspection method and apparatus | |
| TWI840374B (en) | System and method for inspecting defects of semiconductor device | |
| JP2000046748A (en) | Method and apparatus for inspecting conductor pattern and production of multilayered substrate | |
| JP2003270171A (en) | Printed circuit board inspection device | |
| JPH0894534A (en) | Pattern defect detecting deice | |
| CN117083630A (en) | Information processing apparatus, control program, and control method | |
| JP2021156629A (en) | Correction program, correction method, and information processor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |