CN109115125A - Damage from laser silicon substrate or germanium base optical element surface Surface digitization characterizing method - Google Patents
Damage from laser silicon substrate or germanium base optical element surface Surface digitization characterizing method Download PDFInfo
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- CN109115125A CN109115125A CN201811092972.2A CN201811092972A CN109115125A CN 109115125 A CN109115125 A CN 109115125A CN 201811092972 A CN201811092972 A CN 201811092972A CN 109115125 A CN109115125 A CN 109115125A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The present invention provides a kind of damage from laser silicon substrate or germanium base optical element surface Surface digitization characterizing methods, be only capable of qualitative description damage morphologies to solve existing method, characterization result is not enough to support follow-up system Output Characteristic, although the excessive problem of injured surface information data volume can completely obtain.The present invention carries out the topography analyzer to the injured surface of optical element first, obtains complete three dimensional surface data, then carries out two-dimensional space filtering using Gaussian function；It recycles class sinc function to be fitted the curve in the aerial cross sectional of damage morphologies curved surface, obtains fit object function and parameter disaggregation U1、U2、U3And U4；Then in parameter set U1、U2、U3、U4Middle random configuration parameter vector [A0, B0, C0, D0], which is substituted into aforementioned fit object function can be obtained can characterize the curves of damage morphologies.The present invention only needs a small amount of parameter to carry out approximation to complicated Three-dimensional damage shape characteristic, more fully characterizes.
Description
Technical field
The present invention relates to a kind of damage from laser silicon substrate or germanium base optical element surface Surface digitization characterizing methods.
Background technique
For high energy laser system and electro-optical system, easily the optical element in system is made in light laser mechanism
At damage, and then influence the performance of system.Divided at present in damage from laser silicon substrate or germanium base optical element surface shape characteristic
Analysis evaluation aspect, there are three types of methods: the first is measured using Normarski microscope or atomic force microscope, and use is several
What morphology carries out qualitative description to damage morphologies, common description type have miro-pits, shell-like cracks,
Crater etc.；Second is characterized using lesion diameter and lesion depths；The third is to utilize laser confocal microscope
Or white light interferometer carries out three-dimensional measurement to surface, obtains complete three dimensional surface data.
There is certain deficiency in above method: first method can only qualitative description damage morphologies, qualitative description result
It can not be applied to follow-up system Output Characteristic；Second method only damages shape from two dimensional representations of lesion diameter and depth
Looks, characterization result are not enough to support follow-up system Output Characteristic；Although the third method can be obtained completely and characterize damage
Optical element surface pattern, but data volume is excessive, brings inconvenience to subsequent analysis and utilization.
Summary of the invention
Qualitative description is only capable of to solve existing damage from laser silicon substrate or germanium base optical element surface shape characteristic evaluation method
Damage morphologies, characterization result be not enough to support follow-up system Output Characteristic, although injured surface letter can completely obtain
Breath but the excessive technical problem of data volume, the present invention provides a kind of damage from laser silicon substrate or germanium base optical element surface pattern numbers
Word characterizing method can carry out more complete characterization, one side of characterization result to complicated Three-dimensional damage shape characteristic with a small amount of parameter
Face may be used as on the other hand also capable of theoretically instructing injury repair pattern to set system Output Characteristic after damage
Meter, instructs the improve and perfect of renovation technique.
Inventive concept of the invention is:
The topography analyzer is carried out to the injured surface of optical element first, obtains complete three dimensional surface data, then
Two-dimensional space filtering is carried out using Gaussian function；Since common laser facula is Gaussian spot, the Two dimensional Distribution in far field is
Bessel function, thus the curve in the aerial cross sectional of damage morphologies curved surface is fitted using class sinc function, intended
Close objective function and parameter disaggregation U1、U2、U3And U4；Then in the parameter set U of construction1、U2、U3、U4In corresponding random generate A0、
B0、C0、D0, constructing variable vector [A0, B0, C0, D0], by the parameter vector [A0, B0, C0, D0] substitute into aforementioned fit object function
It can be configured to the curve of characterization damage morphologies.
If caused by surface damage is super-Gaussian hot spot, being fitted using rectangle jump function, only needing at this time
Parameter set is constituted using corresponding two parameters.
The technical solution of the invention is as follows:
Damage from laser silicon substrate or germanium base optical element surface Surface digitization characterizing method, are characterized in that, including
Following steps:
1) three-dimensional appearance data are obtained
The topography analyzer is carried out to the optical element to be characterized that laser irradiation is damaged, obtains complete three-dimensional appearance number
According to；
2) damage morphologies curved surface is obtained:
2-d gaussian filters are carried out to the three-dimensional appearance data, obtain damage morphologies curved surface；
3) transversal data are obtained
3.1) using the damage field center of optical element to be characterized as origin O, to cross origin O and be parallel to described to be characterized
Plane where optical element bottom surface is the face xOy, to cross origin O and be parallel to the optic thickness direction to be characterized as z-axis
Space coordinates are established in direction；
3.2) chose that z-axis is vertical with the face xOy, and the plane for being θ with x-axis direction angle, the damage obtained with step 2)
Impairment of the constitution looks surface intersection obtains the different corresponding transversal data of θ angle；
4) parameter fitting
According to different transversal data, parameter fitting is carried out to the transversal data using class sinc function, obtains fitting mesh
Scalar functions:
A, B, C, D are damage characterization parameter caused by Gaussian spot；
5) constructing variable real number disaggregation
From fit object function, extreme value (A therein is selectedmin、Amax)、(Bmin、Bmax)、(Cmin、Cmax) and (Dmin、
Dmax), corresponding parameter real number disaggregation U is constructed respectively1、U2、U3And U4:
U1=x | Amin≤x≤Amax,x∈R}；
U2=x | Bmin≤x≤Bmax,x∈R}；
U3=x | Cmin≤x≤Cmax,x∈R}；
U4=x | Dmin≤x≤Dmax,x∈R}；
6) constructing variable vector
Parameter real number disaggregation U based on step 5) construction1、U2、U3And U4, any one group of parameter vector [A of random configuration0,
B0, C0, D0], wherein A0∈U1,B0∈U2,C0∈U3,D0∈U4；
7) characterization curve y is obtained0
Parameter vector [the A constructed using the step 6)0, B0, C0, D0], the fit object function is substituted into, energy is obtained
The characterization curve y of enough optical element surface damage morphologies to be characterized0:
Further, the topography analyzer described in step 1) is to utilize laser confocal microscope or white light interferometer
It realizes.
The present invention also provides another damage from laser silicon substrate or germanium base optical element surface Surface digitization characterizing method,
It is characterized in that, comprising the following steps:
1) three-dimensional appearance data are obtained
The topography analyzer is carried out to the optical element to be characterized that laser irradiation is damaged, obtains complete three-dimensional appearance number
According to；
2) damage morphologies curved surface is obtained:
2-d gaussian filters are carried out to the three-dimensional appearance data, obtain damage morphologies curved surface；
3) transversal data are obtained
3.1) using the damage field center of optical element to be characterized as origin O, to cross origin O and be parallel to described to be characterized
Plane where optical element bottom surface is the face xOy, to cross origin O and be parallel to the optic thickness direction to be characterized as z-axis
Space coordinates are established in direction；
3.2) chose that z-axis is vertical with the face xOy, and the plane for being θ with x-axis direction angle, the damage obtained with step 2)
Impairment of the constitution looks surface intersection obtains the different corresponding transversal data of θ angle；
4) parameter fitting
According to different transversal data, parameter fitting is carried out to the transversal data using rectangle jump function function, is obtained
Fit object function:
M, N distinguishes damage characterization parameter caused by flat-top hot spot, R0For the radius of damage field；
5) constructing variable real number disaggregation
From the fit object function that step 4) obtains, extreme value (M therein is selectedmin、Mmax)、(Nmin、Nmax), difference structure
Make corresponding parameter real number disaggregation Q1、Q2:
Q1=x | Mmin≤x≤Mmax,x∈R}；
Q2=x | Nmin≤x≤Nmax,x∈R}；
6) constructing variable vector
Parameter real number disaggregation Q based on step 5) construction1、Q2, any one group of parameter vector [M of random configuration0, N0],
In, M0∈Q1,N0∈Q2；
7) characterization curve y is obtained0
Parameter vector [the M constructed using the step 6)0, N0], the fit object function is substituted into, obtaining can be described
The characterization curve y of optical element surface damage morphologies to be characterized0:
Further, the topography analyzer described in step 1) is to utilize laser confocal microscope or white light interferometer
It realizes.
Beneficial effects of the present invention:
1, the method for the present invention is simple, principle is reliable, without constructing the three-dimensional measuring result of discrete point, it is only necessary to a small amount of parameter structure
The characterization curve made carries out approximation to complicated Three-dimensional damage shape characteristic, more fully characterizes, and characterization result can be used for calculating
System downstream light field and instruct injury repair topographic design.
2, qualitative description is carried out to damage morphologies with geometric state compared to what is referred in background technique, and using damage
The method that diameter and lesion depths are characterized, the present invention are able to use specific mathematical model and characterize to damage morphologies,
The method for improving the subsequent availability of damage morphologies, and obtaining surface damage pattern with the three-dimensional measurement referred in background technique
It compares, the present invention can greatly reduce the data volume in subsequent analysis.
Detailed description of the invention
Fig. 1 is flow chart of the invention；
Fig. 2 is the present invention in the space coordinate of damage optical element surface building and the schematic diagram of the transversal of construction；
Fig. 3 is fitting parameter A, B, C, D variation range of the θ within the scope of 0 °~180 ° in the embodiment of the present invention, and wherein a is
The variation range of parameter A, b are the variation range of parameter B, and c is the variation range of parameter C, and d is the variation range of parameter D；
Fig. 4 is the characterization curve y that the embodiment of the present invention obtains0；
Fig. 5 is the damage morphologies that the embodiment of the present invention is randomly generated and θ (equal in the RMS of 0 °~180 ° range transversal errors
Root) value；
Specific embodiment
The present invention will be further explained below with reference to the attached drawings.
Referring to Fig. 1, damage from laser silicon substrate provided by the present invention or germanium base optical element surface Surface digitization characterization side
Method, specifically includes the following steps:
Step 1: obtain three-dimensional appearance data:
It is dry using laser confocal microscope or white light under conditions of guaranteeing to test ambient stable (i.e. non-vibration condition)
Interferometer carries out three-dimensional appearance survey to the optical element to be characterized (silicon-based optical element or germanium base optical element) that laser irradiation is damaged
Examination, obtains complete three-dimensional appearance data.
Step 2: obtain damage morphologies curved surface:
Dimensional Gaussian is carried out to the three-dimensional appearance data that step 1 obtains using Gaussian filter as defined in ISO11562 standard
Filtering processing, obtains damage morphologies curved surface, i.e., damage field as shown in Figure 2.
Step 3: obtain transversal data:
Step 3.1 is using optic element damage regional center to be characterized as origin O, to cross origin O and be parallel to described to table
Plane where levying optical element bottom surface is the face xOy, to cross origin O and be parallel to the optic thickness direction to be characterized as z
Axis direction establishes space coordinates.
Step 3.2 chose that z-axis is vertical with the face xOy, and the plane for being θ with x-axis direction angle, obtained with step 2)
Damage morphologies surface intersection obtains the different corresponding transversal data of θ angle.
Step 4: parameter fitting:
It is divided into two following situations:
Situation one, laser facula are Gaussian spot
According to the corresponding transversal data of different θ angles, parameter is carried out respectively to the transversal data using class sinc function
Fitting obtains fit object function:
In formula, A, B, C, D are damage characterization parameter；
Situation two, laser facula are flat-top hot spot (i.e. super-Gaussian hot spot)
According to different transversal data, parameter fitting is carried out to the transversal data using rectangle jump function function, is obtained
Fit object function:
M, N distinguishes damage characterization parameter caused by flat-top hot spot, R0For the radius of damage field；
Step 5: constructing variable real number disaggregation:
Situation one, laser facula are Gaussian spot
From the fit object function that step 4 obtains, extreme value (A therein is selectedmin、Amax)、(Bmin、Bmax)、(Cmin、
Cmax) and (Dmin、Dmax), corresponding parameter sets U is constructed respectively1、U2、U3And U4:
U1=x | Amin≤x≤Amax,x∈R}；
U2=x | Bmin≤x≤Bmax,x∈R}；
U3=x | Cmin≤x≤Cmax,x∈R}；
U4=x | Dmin≤x≤Dmax,x∈R}；
Situation two, laser facula are flat-top hot spot
From the fit object function that step 4 obtains, extreme value (M therein is selectedmin、Mmax)、(Nmin、Nmax), difference structure
Make corresponding parameter real number disaggregation Q1、Q2:
Q1=x | Mmin≤x≤Mmax,x∈R}；
Q2=x | Nmin≤x≤Nmax,x∈R}；
Step 6: constructing variable vector
Situation one, laser facula are Gaussian spot
The parameter real number disaggregation U constructed based on step 51、U2、U3And U4, one group of parameter vector [A of random configuration0, B0, C0,
D0], wherein A0∈U1,B0∈U2,C0∈U3,D0∈U4；
Situation two, laser facula are flat-top hot spot
Parameter real number disaggregation Q based on step 5) construction1、Q2, any one group of parameter vector [M of random configuration0, N0],
In, M0∈Q1,N0∈Q2；
Step 7: obtaining characterization curve y0
Situation one, laser facula are Gaussian spot
By the parameter vector [A0, B0, C0, D0], the fit object function is substituted into, the optics member to be characterized is obtained
The characterization curve y of part surface damage shape characteristic0:
Situation two, laser facula are flat-top hot spot
Parameter vector [the M constructed using the step 6)0, N0], the fit object function is substituted into, obtaining can be described
The characterization curve y of optical element surface damage morphologies to be characterized0:
Below by way of specific embodiment, experimental verification is carried out in conjunction with attached drawing 3-5:
For Gaussian spot, digitized representation, knot are carried out to silicon-based optical element damage surface topography using the above method
Fruit is specific as follows:
According to the above method, initial three-dimensional surface data is obtained using step 1, recycle step 2-4 is to initial three-dimensional surface
Data are handled, and are obtained fitting parameter of the θ within the scope of 0 °~180 °, are selected extreme value therein, specific as shown in table 1:
Table 1
| A | B | C | D | |
| Maximum value | 2.14×10-5 | 2.4×10-5 | 34974.62 | 94118.05 |
| Minimum value | 2.04×10-5 | 4.17×10-6 | 26748.10 | 12312.22 |
Constructing variable real number disaggregation U is distinguished using parameter in table 11、U2、U3And U4::
U1=x | 2.04 × 10-5≤x≤2.14×10-5,x∈R}；
U2=x | 4.17 × 10-6≤x≤2.4×10-5,x∈R}；
U3=x | 26748.10≤x≤34974.62, x ∈ R }；
U4=x | 12312.22≤x≤94118.05, x ∈ R }；
Utilize U1、U2、U3、U4, construct a random parameter vector [2.125 × 10-5, 9.9944 × 10-5, 26940.36,
67424.62]。
Parameter vector in table 2 is substituted into class sinc function expression, obtains damage morphologies characteristic present curve y0, calculate
To y0The RMS value of error between any different angle section, as shown in Figure 5.As can be seen from Figure 5, the characterization curve y that the present invention obtains0
And the deviation of actual damage transversal is substantially 10-5Magnitude, can it is approximate, more fully characterize damage morphologies.
Claims (4)
1. damage from laser silicon substrate or germanium base optical element surface Surface digitization characterizing method, which is characterized in that including following step
It is rapid:
1) three-dimensional appearance data are obtained
The topography analyzer is carried out to the optical element to be characterized that laser irradiation is damaged, obtains complete three-dimensional appearance data；
2) damage morphologies curved surface is obtained:
2-d gaussian filters are carried out to the three-dimensional appearance data, obtain damage morphologies curved surface；
3) transversal data are obtained
3.1) using the damage field center of optical element to be characterized as origin O, to cross origin O and be parallel to the optics to be characterized
Plane where element bottom surface is the face xOy, to cross origin O and be parallel to the optic thickness direction to be characterized as z-axis direction,
Establish space coordinates；
3.2) chose that z-axis is vertical with the face xOy, and the plane for being θ with x-axis direction angle, the damage shape obtained with step 2)
Looks surface intersection obtains the different corresponding transversal data of θ angle；
4) parameter fitting
According to different transversal data, parameter fitting is carried out to the transversal data using class sinc function, obtains fit object letter
Number:
A, B, C, D are damage characterization parameter caused by Gaussian spot；
5) constructing variable real number disaggregation
From fit object function, extreme value (A therein is selectedmin、Amax)、(Bmin、Bmax)、(Cmin、Cmax) and (Dmin、Dmax),
Corresponding parameter real number disaggregation U is constructed respectively1、U2、U3And U4:
U1=x | Amin≤x≤Amax,x∈R}；
U2=x | Bmin≤x≤Bmax,x∈R}；
U3=x | Cmin≤x≤Cmax,x∈R}；
U4=x | Dmin≤x≤Dmax,x∈R}；
6) constructing variable vector
Parameter real number disaggregation U based on step 5) construction1、U2、U3And U4, any one group of parameter vector [A of random configuration0, B0, C0,
D0], wherein A0∈U1,B0∈U2,C0∈U3,D0∈U4；
7) characterization curve y is obtained0
Parameter vector [the A constructed using the step 6)0, B0, C0, D0], the fit object function is substituted into, obtaining can be described
The characterization curve y of optical element surface damage morphologies to be characterized0:
2. damage from laser silicon substrate according to claim 1 or germanium base optical element surface Surface digitization characterizing method,
Be characterized in that: the topography analyzer described in step 1) is realized using laser confocal microscope or white light interferometer.
3. damage from laser silicon substrate or germanium base optical element surface Surface digitization characterizing method, which is characterized in that including following step
It is rapid:
1) three-dimensional appearance data are obtained
The topography analyzer is carried out to the optical element to be characterized that laser irradiation is damaged, obtains complete three-dimensional appearance data；
2) damage morphologies curved surface is obtained:
2-d gaussian filters are carried out to the three-dimensional appearance data, obtain damage morphologies curved surface；
3) transversal data are obtained
3.1) using the damage field center of optical element to be characterized as origin O, to cross origin O and be parallel to the optics to be characterized
Plane where element bottom surface is the face xOy, to cross origin O and be parallel to the optic thickness direction to be characterized as z-axis direction,
Establish space coordinates；
3.2) chose that z-axis is vertical with the face xOy, and the plane for being θ with x-axis direction angle, the damage shape obtained with step 2)
Looks surface intersection obtains the different corresponding transversal data of θ angle；
4) parameter fitting
According to different transversal data, parameter fitting is carried out to the transversal data using rectangle jump function function, is fitted
Objective function:
M, N distinguishes damage characterization parameter caused by flat-top hot spot, R0For the radius of damage field；
5) constructing variable real number disaggregation
From the fit object function that step 4) obtains, extreme value (M therein is selectedmin、Mmax)、(Nmin、Nmax), phase is constructed respectively
The parameter real number disaggregation Q answered1、Q2:
Q1=x | Mmin≤x≤Mmax,x∈R}；
Q2=x | Nmin≤x≤Nmax,x∈R}；
6) constructing variable vector
Parameter real number disaggregation Q based on step 5) construction1、Q2, any one group of parameter vector [M of random configuration0, N0], wherein M0∈
Q1,N0∈Q2；
7) characterization curve y is obtained0
Parameter vector [the M constructed using the step 6)0, N0], the fit object function is substituted into, obtaining can be described to table
Levy the characterization curve y of optical element surface damage morphologies0:
4. damage from laser silicon substrate according to claim 3 or germanium base optical element surface Surface digitization characterizing method,
Be characterized in that: the topography analyzer described in step 1) is realized using laser confocal microscope or white light interferometer.
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| CN109919163A (en) * | 2019-02-12 | 2019-06-21 | 哈尔滨工业大学 | Two dimension normalization gaussian filtering method for 3 d surface topography feature extraction |
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| CN109986472A (en) * | 2019-04-12 | 2019-07-09 | 中国工程物理研究院机械制造工艺研究所 | A kind of Jet Polishing removal function extracting method based on interferometer duplex measurement |
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