CN109095433A - Electric heating micro clamping device - Google Patents
Electric heating micro clamping device Download PDFInfo
- Publication number
- CN109095433A CN109095433A CN201810984302.5A CN201810984302A CN109095433A CN 109095433 A CN109095433 A CN 109095433A CN 201810984302 A CN201810984302 A CN 201810984302A CN 109095433 A CN109095433 A CN 109095433A
- Authority
- CN
- China
- Prior art keywords
- heat dissipation
- actuating arm
- gripping finger
- electric heating
- clamping device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005485 electric heating Methods 0.000 title claims abstract description 31
- 230000017525 heat dissipation Effects 0.000 claims abstract description 52
- 239000011159 matrix material Substances 0.000 claims abstract description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 206010037660 Pyrexia Diseases 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/031—Thermal actuators
Abstract
Present invention discloses a kind of electric heating micro clamping devices, including matrix, actuating arm and gripping finger, actuating arm to connect with matrix, and electric heating micro clamping device further includes heat dissipation beam, and heat dissipation beam is connected between actuating arm and gripping finger.For the present invention by heat dissipation beam connection actuating arm and end gripping finger, manufacture craft is simple, and processing cost is low, does not need the temperature that gripping finger can be effectively reduced in excessive extraneous subsidiary conditions, is with a wide range of applications in micro electro mechanical system field.
Description
Technical field
The invention belongs to micro electro mechanical system fields, and in particular to a kind of electric heating micro clamping device.
Background technique
Micro clamping device suffers from the fields such as bioengineering, micro assemby urgent demand.The drive form of micro clamping device
It is varied, wherein electric heating micro-driver is the important drive form of one kind of micro electro mechanical system field.The principle of micro clamping device
It is that hot arm fever generates thermal expansion after being passed through electric current, driving movable structure part generates displacement.
Electric heating micro clamping device has the advantages of driving structure is simple, driving force is big, strong antijamming capability, but since electric heating is micro-
Holder temperature is excessively high, limits the use scope of electric heating micro clamping device.
Summary of the invention
That the technical problem to be solved by the invention is to provide a kind of manufacture crafts is simple, the significant electric heating of cooling effect is micro-
Clamper.
In order to solve the above technical problems, the technical solution adopted by the present invention is that, a kind of electric heating micro clamping device, including matrix,
Actuating arm and gripping finger, the actuating arm are connect with described matrix, and the electric heating micro clamping device further includes heat dissipation beam, the heat dissipation beam
It is connected between the actuating arm and the gripping finger.
In addition, the present invention also proposes following attached technical scheme.
Preferably, the heat dissipation beam has a first end and a second end, and the first end is connect with the actuating arm, and described
Two ends are connect with the gripping finger.
Preferably, the heat dissipation beam is long beam.
Preferably, the heat dissipation beam is S-shaped.
Preferably, the heat dissipation beam and the actuating arm, the gripping finger are integrally formed.
Preferably, the heat dissipation beam is made of silicon or nickel.
Preferably, the actuating arm includes left actuating arm and right actuating arm, and the heat dissipation beam includes that left heat dissipation beam and the right side dissipate
Hot beam, the gripping finger include left gripping finger and right gripping finger.
Preferably, the left actuating arm, right actuating arm are connect with described matrix respectively, and the left heat dissipation beam is connected to described
Between left actuating arm and left gripping finger, the right heat dissipation beam is connected between the right actuating arm and right gripping finger.
Preferably, when the temperature of the junction of the heat dissipation beam and the actuating arm is 300 DEG C, the temperature of the gripping finger end
Degree is 35-70 DEG C.
Compared with the prior art, the present invention has the advantages that by heat dissipation beam connection actuating arm and end gripping finger, manufacture craft
Simply, processing cost is low, the temperature that gripping finger can be effectively reduced in excessive extraneous subsidiary conditions is not needed, in MEMS
Field is with a wide range of applications.
Heat dissipation beam is bent into S-shaped, connection actuating arm and end gripping finger, compact-sized, is effectively increasing the same of heat dissipation area
When, the risk that electric heating micro clamping device is damaged by environmental disturbances can be reduced.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of electric heating micro clamping device of the present invention.
Fig. 2 is the structural schematic diagram of the heat dissipation beam of electric heating micro clamping device of the present invention.
Wherein,
31. first end of beam 1. 2. actuating arm 3. of matrix radiates
32. 4. gripping finger of second end
Specific embodiment
In conjunction with the preferred embodiment and its attached drawing is further non-limitingly described in detail technical solution of the present invention.
In the description of the present invention, it is to be understood that, term " on ", "lower", "front", "rear", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "top", "bottom", "inner", "outside" is orientation based on the figure or position
Relationship is set, is merely for convenience of the description present invention, rather than the device or element of indication or suggestion meaning must have specifically
Orientation is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation ",
Terms such as " settings " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be with
It is mechanical connection, is also possible to be electrically connected；It can be directly connected, can also be indirectly connected by intermediate device.For ability
For the those of ordinary skill in domain, the meaning of above-mentioned term in the present invention can be understood as the case may be.
As shown in Figure 1 to Figure 2, electric heating micro clamping device of the present invention includes matrix 1, actuating arm 2, heat dissipation beam 3 and gripping finger 4.
Actuating arm 2 is connect with matrix 1, and heat dissipation beam 3 is connected between actuating arm 2 and gripping finger 4.As shown in Fig. 2, heat dissipation beam 3
With first end 31 and second end 32.First end 31 is connect with actuating arm 2, and second end 32 is connect with gripping finger 4.
Heat dissipation beam 3 is long beam, can effectively increase heat dissipation area.Preferably, heat dissipation beam 3 can be bent into S-shaped, so that electric
Hot micro clamping device is compact-sized, while effectively increasing heat dissipation area, reduces electric heating micro clamping device and is damaged by environmental disturbances
Risk.
Radiate beam 3 and actuating arm 2, the integrated molding of gripping finger 4.Preferably, heat dissipation beam 3 can production when with actuating arm 2, gripping finger
4 complete through same etch step.Heat dissipation beam 3 is made of silicon or nickel.
As shown in Figure 1, actuating arm 2 includes left actuating arm and right actuating arm, heat dissipation beam 3 includes left heat dissipation beam and right heat dissipation
Beam, gripping finger 4 include left gripping finger and right gripping finger.Left actuating arm, right actuating arm are connect with matrix 1 respectively, and left heat dissipation beam is connected to a left side
Between actuating arm and left gripping finger, right heat dissipation beam is connected between right actuating arm and right gripping finger.
When electric heating micro clamping device works, powers on, heat left actuating arm, left actuating arm temperature distortion passes through left heat dissipation
Sill bolt moves left gripping finger and is bent towards right gripping finger, picks up object.After object is moved to target ground, power supply is disconnected, left actuating arm is certainly
It is so cooling, left gripping finger is moved by left heat dissipation sill bolt and returns to initial position, unclamps object.
Through testing, when left actuating arm is made of silicon, the left actuating arm of electrified regulation, the junction of left heat dissipation beam and left actuating arm
Temperature when being 300 DEG C, the temperature of the end of left gripping finger 4 can be reduced to 30~70 DEG C, and the cooling effect of left heat dissipation beam is very
Significantly.It is of course also possible to heat right actuating arm individually to clamp or unclamp object, action principle is identical.
The use of the heat dissipation beam 3 of electric heating micro clamping device of the present invention, can be significantly reduced the temperature of gripping finger 4, overcomes use
When electric heating micro clamping device, the excessively high defect of temperature, so as to expand the use scope of electric heating micro clamping device.
The present invention connects actuating arm 2 and gripping finger 4 by heat dissipation beam 3, and manufacture craft is simple, and processing cost is low, does not need excessive
Extraneous subsidiary conditions the temperature of gripping finger 4 can be effectively reduced, be with a wide range of applications in micro electro mechanical system field.
It is pointed out that the technical concepts and features of above-mentioned preferred embodiment only to illustrate the invention, its object is to
Those skilled in the art can understand the contents of the present invention and implements accordingly, and protection of the invention can not be limited with this
Range.Any equivalent change or modification in accordance with the spirit of the invention should be covered by the protection scope of the present invention.
Claims (9)
1. a kind of electric heating micro clamping device, including matrix (1), actuating arm (2) and gripping finger (4), the actuating arm (2) and described matrix
(1) it connects, it is characterised in that: the electric heating micro clamping device further includes heat dissipation beam (3), and the heat dissipation beam (3) is connected to the drive
Between swing arm (2) and the gripping finger (4).
2. electric heating micro clamping device according to claim 1, it is characterised in that: the heat dissipation beam (3) has first end (31)
With second end (32), the first end (31) connect with the actuating arm (2), and the second end (32) and the gripping finger (4) are even
It connects.
3. electric heating micro clamping device according to any one of claims 1 to 2, it is characterised in that: the heat dissipation beam (3) is long beam.
4. electric heating micro clamping device according to any one of claims 1 to 2, it is characterised in that: the heat dissipation beam (3) is S-shaped.
5. electric heating micro clamping device according to claim 1, it is characterised in that: the heat dissipation beam (3) and the actuating arm
(2), the gripping finger (4) is integrally formed.
6. electric heating micro clamping device according to claim 1, it is characterised in that: the heat dissipation beam (3) is made of silicon or nickel.
7. electric heating micro clamping device according to claim 1, it is characterised in that: the actuating arm (2) include left actuating arm and
Right actuating arm, the heat dissipation beam (3) include left heat dissipation beam and right heat dissipation beam, and the gripping finger (4) includes left gripping finger and right gripping finger.
8. electric heating micro clamping device according to claim 7, it is characterised in that: the left actuating arm, right actuating arm respectively with
Described matrix (1) connection, the left heat dissipation beam are connected between the left actuating arm and left gripping finger, and the right heat dissipation beam is connected to
Between the right actuating arm and right gripping finger.
9. electric heating micro clamping device according to claim 1, it is characterised in that: the heat dissipation beam (3) and the actuating arm (2)
The temperature of junction when being 300 DEG C, the temperature of gripping finger (4) end is 35-70 DEG C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810984302.5A CN109095433A (en) | 2018-08-28 | 2018-08-28 | Electric heating micro clamping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810984302.5A CN109095433A (en) | 2018-08-28 | 2018-08-28 | Electric heating micro clamping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109095433A true CN109095433A (en) | 2018-12-28 |
Family
ID=64851482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810984302.5A Pending CN109095433A (en) | 2018-08-28 | 2018-08-28 | Electric heating micro clamping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109095433A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110467147A (en) * | 2019-08-27 | 2019-11-19 | 苏州大学 | Hyperphalangeal minisize clamper part |
| CN110510569A (en) * | 2019-08-27 | 2019-11-29 | 苏州大学 | Micro clamping device preparation process |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1410346A (en) * | 2002-11-29 | 2003-04-16 | 清华大学 | Electrostatic actuating micro-holder |
| JP2006065131A (en) * | 2004-08-30 | 2006-03-09 | Sony Corp | Diffraction grating-optical modulator assembly |
| CN1923670A (en) * | 2006-09-21 | 2007-03-07 | 上海交通大学 | Modified SU8 electric heating micro-performer with multi-arc structure for straight line propulsion |
| CN101195472A (en) * | 2006-12-08 | 2008-06-11 | 中国科学院沈阳自动化研究所 | Electrothermal actuator and technique of producing the same |
| CN101621261A (en) * | 2009-08-06 | 2010-01-06 | 上海交通大学 | Flexible composite beam electric heating microdriver based on U+V shape |
| TWI387516B (en) * | 2010-08-30 | 2013-03-01 | Hon Hai Prec Ind Co Ltd | Actuator |
| CN204131752U (en) * | 2014-08-01 | 2015-01-28 | 鞍山市阁瑞节能科技有限公司 | A kind of composite metal electrothermal material structure |
| CN107628587A (en) * | 2017-09-21 | 2018-01-26 | 中国传媒大学 | A kind of multistage electrothermal drive big displacement big corner MEMS actuator and its manufacture method |
| CN208916814U (en) * | 2018-08-28 | 2019-05-31 | 苏州大学 | Electric heating micro clamping device |
-
2018
- 2018-08-28 CN CN201810984302.5A patent/CN109095433A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1410346A (en) * | 2002-11-29 | 2003-04-16 | 清华大学 | Electrostatic actuating micro-holder |
| JP2006065131A (en) * | 2004-08-30 | 2006-03-09 | Sony Corp | Diffraction grating-optical modulator assembly |
| CN1923670A (en) * | 2006-09-21 | 2007-03-07 | 上海交通大学 | Modified SU8 electric heating micro-performer with multi-arc structure for straight line propulsion |
| CN101195472A (en) * | 2006-12-08 | 2008-06-11 | 中国科学院沈阳自动化研究所 | Electrothermal actuator and technique of producing the same |
| CN101621261A (en) * | 2009-08-06 | 2010-01-06 | 上海交通大学 | Flexible composite beam electric heating microdriver based on U+V shape |
| TWI387516B (en) * | 2010-08-30 | 2013-03-01 | Hon Hai Prec Ind Co Ltd | Actuator |
| CN204131752U (en) * | 2014-08-01 | 2015-01-28 | 鞍山市阁瑞节能科技有限公司 | A kind of composite metal electrothermal material structure |
| CN107628587A (en) * | 2017-09-21 | 2018-01-26 | 中国传媒大学 | A kind of multistage electrothermal drive big displacement big corner MEMS actuator and its manufacture method |
| CN208916814U (en) * | 2018-08-28 | 2019-05-31 | 苏州大学 | Electric heating micro clamping device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110467147A (en) * | 2019-08-27 | 2019-11-19 | 苏州大学 | Hyperphalangeal minisize clamper part |
| CN110510569A (en) * | 2019-08-27 | 2019-11-29 | 苏州大学 | Micro clamping device preparation process |
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