CN109061916A - A kind of liquid crystal display panel alignment detection apparatus and method - Google Patents
A kind of liquid crystal display panel alignment detection apparatus and method Download PDFInfo
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- CN109061916A CN109061916A CN201810957769.0A CN201810957769A CN109061916A CN 109061916 A CN109061916 A CN 109061916A CN 201810957769 A CN201810957769 A CN 201810957769A CN 109061916 A CN109061916 A CN 109061916A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
Abstract
The invention discloses a kind of liquid crystal display panel alignment detection apparatus and methods, by the way that plate electrode is marked composition plate condenser staggered relatively with to be measured, and series circuit is formed with voltage source, current source, the capacitance for measuring plate condenser by capacitance measurement module again can carry out contraposition detection according to measurement gained measurement capacitance.Can to array test in liquid crystal display panel manufacturing process in factory, at box test, COF engagement etc. using the more difficult test item of optical registration, it can be achieved that high-precision contraposition detects, and cost is relatively low for detection device, and detection mode is simple to operation.
Description
Technical field
The present invention relates to liquid panel technique field more particularly to a kind of liquid crystal that liquid crystal display panel aligning accuracy can be improved
Panel alignment detection device and method.
Background technique
With the development of photoelectricity and semiconductor technology, liquid crystal display (Liquid Crystal Display, LCD) is also obtained
It has arrived and has flourished.In many liquid crystal displays, Thin Film Transistor-LCD (Thin Film Transistor
Liquid Crystal Display, abbreviation TFT-LCD) there is high spatial utilization efficiency, low consumpting power, radiationless and low
The advantageous characteristics such as electromagnetic interference.In current information-intensive society, TFT-LCD has been widely used for the various aspects of life, from small ruler
Very little mobile phone, video camera, digital camera, laptop, the desktop computer of middle size, large-sized domestic TV are thrown to large-scale
Shadow equipment etc..TFT-LCD is on the basis of light, thin advantage, in addition perfect picture and quick response characteristic, in display city
Come out top on.
Current TFT-LCD liquid crystal display panel detection (test) equipment is essentially all to be carried out pair by optical image measuring instrument
Position.Optical image measuring instrument be integrate optics, machinery, electronics, the high-precision of computer image processing technology, high efficiency,
The equipment of high reliability.Its testing principle is: being amplified by optical amplification system to testee, by CCD camera system
Acquisition image feature is simultaneously sent into computer, obtains detection testee surface shape size, angle and position by calculating, and
Figure is generated on screen and carries out figure shadow control for operator, so as to intuitively resolved measurement result deviation that may be present.
But optical image measuring instrument equipment is costly, maintenance is complicated.
With reference to Fig. 1, common metal material alignment mark schematic diagram.The alignment mark (mark) of some testees belongs to
Metal material, such as common " L " type mark (as shown in figure grade 11), COF engage (bonding) mark (such as figure grade 12
It is shown) etc..The alignment mark of metal material have the characteristics that it is reflective opaque, it is relatively difficult to achieve using optical registration.
Therefore, how high-precision contraposition effectively and simply to be carried out to liquid crystal display panel, is especially carried out pair to using optics
The more difficult test item in position, which carries out contraposition detection, becomes technical problem urgently to be resolved.
Summary of the invention
The object of the present invention is to provide a kind of liquid crystal display panel alignment detection apparatus and methods, may be implemented effective and simple
It is single high-precision contraposition is carried out to liquid crystal display panel to detect, especially to using optics aligned more difficult test item into
Row contraposition detection.
To achieve the above object, the present invention provides a kind of liquid crystal display panel alignment detection apparatus, described device includes voltage
Source, current source, plate electrode and capacitance measurement module;The plate electrode is identical as indicia patterns to be measured, and when detecting
With the label composition plate condenser staggered relatively to be measured;The plate condenser and the voltage source, current source group bunchiness
Join circuit;The capacitance measurement module is electrically connected the plate electrode and reception mark note, described flat for measuring
The capacitance of plate capacitor is to carry out contraposition detection.
To achieve the above object, the present invention also provides a kind of liquid crystal display panel alignment detecting method, the method includes such as
Lower step: will plate electrode identical with indicia patterns to be measured and it is described it is to be measured label it is staggered relatively, form plate condenser;It will
The plate condenser is electrically connected with voltage source, current source, forms series circuit;To the carry out capacitance of the plate condenser
Measurement obtains measurement capacitance;By the measurement capacitance compared with the capacitor calculated value of the plate condenser, with completion pair
Position detection.
The present invention has the advantages that the present invention is by marking composition capacity plate antenna staggered relatively with to be measured for plate electrode
Device, and series circuit is formed with voltage source, current source, then the capacitance of plate condenser, root are measured by capacitance measurement module
Contraposition detection can be carried out according to measurement gained measurement capacitance.Can to array test in liquid crystal display panel manufacturing process in factory, at
Box test, COF engagement etc., it can be achieved that high-precision contraposition detection, and are detected using the more difficult test item of optical registration
Installation cost is lower, and detection mode is simple to operation.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those skilled in the art, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1, common metal material alignment mark schematic diagram;
Fig. 2, the configuration diagram of liquid crystal display panel alignment detection apparatus of the present invention;
Fig. 3, the flow chart of liquid crystal display panel alignment detecting method of the present invention.
Specific embodiment
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
Liquid crystal display panel alignment detection apparatus of the present invention is a kind of electricity alignment detection apparatus, including voltage source, electricity
Stream source, plate electrode and capacitance measurement module.Plate electrode is identical as label the two pattern to be measured, and opposite with label to be measured
Place composition plate condenser;Plate condenser and voltage source, current source form series circuit;Capacitance measurement module is electrically connected respectively
Plate electrode and reception mark note are connect, the capacitance of the plate condenser for measuring plate electrode and reception mark note composition,
To carry out contraposition detection.
For implementation principle of the invention referring to plate condenser, plate condenser is by two pieces of close proximities and to be placed in parallel
Upper one layer of megohmite insulant is pressed from both sides among metal plate -- dielectric (air is also a kind of dielectric) is constituted.The electricity of plate condenser
Capacity is the variation of the distance between relative area and two metal plates with two metal plates and changes.The capacitance of plate condenser
The directly proportional distance d between two metal plates is inversely proportional dielectric dielectric between two metal plates with the relative area of two metal plates
Constant ε is directly proportional.
Plate condenser calculation formula are as follows: C=ε * ε 0*S/d.Wherein: C is capacitor calculated value, unit F;ε is opposite dielectric
Constant, unit F/m;ε 0 is permittivity of vacuum, unit F/m;S is the relative area of two metal plates, unit m2;D is two metals
Pole plate spacing between plate, unit m.
One of gold of plate condenser is equivalent in the present invention with the identical plate electrode of indicia patterns to be measured
Belong to plate, the label to be measured on liquid crystal display panel is equivalent to another piece of metal plate of plate condenser, and plate electrode can with to mark
Remember electricity conducting.In the present invention, area S is known, waits for mark when liquid crystal display panel first time product design is made
The area of note can measure to obtain, and processing procedure is constant, and S is constant;Pole plate spacing d can be aligned by liquid crystal display panel of the present invention and be examined
Surveying device can directly know according to pre-set distance.
By being formed by plate electrode and label composition plate condenser staggered relatively to be measured, and with voltage source, current source
Series circuit, then by the capacitance of capacitance measurement module measurement plate condenser, according to measurement gained measurement capacitance
Carry out contraposition detection.Wherein, concatenated voltage source, current source are equivalent to an ideal current source.What if two metal plates were overlapped
Area is bigger, then it is bigger to measure gained measurement capacitance.So at certain (gap) to column pitch, the plate that is calculated
The capacitance of capacitor is theoretical capacitance when two metal plates are completely coincident.That is, if plate electrode in detection device
It is completely coincident with the label to be measured (mark) on liquid crystal display panel, then capacitance measured by capacitance measurement module and calculating gained electricity
Capacitance it is correct closely can to represent test contraposition.
With reference to Fig. 2, the configuration diagram of liquid crystal display panel alignment detection apparatus of the present invention.Liquid crystal display panel pair of the present invention
Level detecting apparatus is a kind of electricity alignment detection apparatus, including voltage source U0, current source I0, plate electrode 21 and capacitance measurement
Module 22.Both plate electrode 21 and labels to be measured 29 pattern is identical, and with label 29 to be measured composition capacity plate antenna staggered relatively
Device C0;Plate condenser C0 and voltage source U0, current source I0 form series circuit;Capacitance measurement module 22 is electrically connected plate
Electrode 21 and reception mark note 29, the capacitor of the plate condenser C0 for measuring 29 composition of plate electrode 21 and reception mark note
Value, to carry out contraposition detection.
It is certain to column pitch (under pole plate spacing d) i.e. as shown in the figure, the capacitor for the plate condenser C0 being calculated
Value is theoretical capacitance when two metal plates are completely coincident.That is, the plate electrode 21 and the label 29 to be measured are complete
It is overlapped, then capacitance measured by capacitance measurement module 22 and calculating gained capacitance closely can represent test contraposition
Correctly.
The plate electrode 21 is replaceable plate electrode, has corresponding pattern according to different indicia patterns to be measured replacements
Plate electrode.Optionally, the plate electrode 21 includes the different figures such as L-type pattern plate electrode, circular pattern plate electrode
The plate electrode of case.Namely plate electrode 21 of the present invention can be replaced at any time according to indicia patterns to be measured.It can be with
It is engaged previously according to array test in liquid crystal display panel manufacturing process (Array test), at box test (Cell test), COF
(bonding) etc. test items need to make multiple plate electrodes of corresponding pattern, such as " L " mark, COF bonding
Mark etc., it is simple to operate to replace the plate electrode of corresponding pattern at any time when actually detected.
Liquid crystal display panel alignment detection apparatus of the present invention to array test in liquid crystal display panel manufacturing process in factory, at box
Test, COF engagement etc., it can be achieved that high-precision contraposition detection, and detect dress using the more difficult test item of optical registration
Set that cost is relatively low, detection mode is simple to operation.
It, can be to battle array in liquid crystal display panel manufacturing process in factory the present invention also provides a kind of liquid crystal display panel alignment detecting method
Column test, the test item more difficult using optical registration at box test, COF engagement etc., realize high-precision contraposition detection.
With reference to Fig. 3, the flow chart of liquid crystal display panel alignment detecting method of the present invention.The described method includes: S31: will with it is to be measured
The identical plate electrode of indicia patterns and the label to be measured are staggered relatively, form plate condenser;S32 is by the capacity plate antenna
Device is electrically connected with voltage source, current source, forms series circuit;S33: it to the carry out measured capacitance value of the plate condenser, obtains
Take measurement capacitance;S34: by the measurement capacitance compared with the capacitor calculated value of the plate condenser, to complete to align
Detection.
The method of the invention is by marking composition plate condenser staggered relatively, and and voltage with to be measured for plate electrode
Source, current source form series circuit, then measure the capacitance of plate condenser, can be carried out according to measurement gained measurement capacitance
Contraposition detection.
The method further includes: there is the plate electrode of corresponding pattern according to different indicia patterns to be measured replacements.
And plate electrode of the present invention is replaceable plate electrode, is had according to different indicia patterns to be measured replacements corresponding
The plate electrode of pattern.Optionally, the plate electrode includes the differences such as L-type pattern plate electrode, circular pattern plate electrode
The plate electrode of pattern.Namely plate electrode of the present invention can be replaced at any time according to indicia patterns to be measured.It can be with
It needs to make corresponding pattern previously according to array test in liquid crystal display panel manufacturing process, at test items such as box test, COF engagements
Multiple plate electrodes, such as " L " mark, COF bonding mark etc., to replace corresponding pattern at any time when actually detected
Plate electrode, it is simple to operate.
The capacitor calculated value are as follows: C=ε * ε 0*S/d, wherein C is the capacitor calculated value, unit F;ε is opposite dielectric
Constant, unit F/m;ε 0 is permittivity of vacuum, unit F/m;S is the face of the label and the plate electrode opposite face to be measured
Product, unit m2;D is the pole plate spacing between the label to be measured and the plate electrode, unit m.In the present invention and to mark
The note identical plate electrode of pattern is equivalent to one of metal plate of plate condenser, the label to be measured on liquid crystal display panel
It is equivalent to another piece of metal plate of plate condenser, and plate electrode can be connected with label electricity to be measured.The electricity of plate condenser
Capacity is the variation of the distance between relative area and two metal plates with two metal plates and changes.The capacitance of plate condenser
The directly proportional distance d between two metal plates is inversely proportional dielectric dielectric between two metal plates with the relative area of two metal plates
Constant ε is directly proportional.In the present invention, area S is known, to be measured when liquid crystal display panel first time product design is made
The area of label can measure to obtain, and processing procedure is constant, and S is constant;Pole plate spacing d can be aligned by liquid crystal display panel of the present invention
Detection device can directly be known according to pre-set distance.
Described in step S34 by the measurement capacitance compared with the capacitor calculated value of the plate condenser, to complete
Whether contraposition detection further comprises: judging the difference between the measurement capacitance and the capacitor calculated value in preset difference value
In range, if determining that contraposition is correct within the scope of preset difference value.Column pitch (i.e. under pole plate spacing d), is calculated certain
The capacitance of obtained plate condenser is theoretical capacitance when two metal plates are completely coincident.That is, the plate electrode
It is completely coincident with the label to be measured, then capacitance measured by capacitance measurement module can connect very much with gained capacitance is calculated
Closely, that is, it is correct to represent test contraposition.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (7)
1. a kind of liquid crystal display panel alignment detection apparatus, which is characterized in that described device includes voltage source, current source, plate electrode
And capacitance measurement module;
The plate electrode is identical as indicia patterns to be measured, and electric with the label composition plate staggered relatively to be measured when detecting
Container;
The plate condenser and the voltage source, current source form series circuit;
The capacitance measurement module is electrically connected the plate electrode and reception mark note, for measuring the plate electricity
The capacitance of container is to carry out contraposition detection.
2. liquid crystal display panel alignment detection apparatus as described in claim 1, which is characterized in that the plate electrode is replaceable flat
Plate electrode has the plate electrode of corresponding pattern according to different indicia patterns to be measured replacements.
3. liquid crystal display panel alignment detection apparatus as described in claim 1, which is characterized in that the plate electrode includes L-type figure
Case plate electrode, circular pattern plate electrode.
4. a kind of liquid crystal display panel alignment detecting method, which is characterized in that described method includes following steps:
Will plate electrode identical with indicia patterns to be measured and it is described it is to be measured label it is staggered relatively, form plate condenser;
The plate condenser is electrically connected with voltage source, current source, forms series circuit;
To the carry out measured capacitance value of the plate condenser, measurement capacitance is obtained;
By the measurement capacitance compared with the capacitor calculated value of the plate condenser, to complete contraposition detection.
5. liquid crystal display panel alignment detecting method as claimed in claim 4, which is characterized in that the method further includes: root
There is the plate electrode of corresponding pattern according to different indicia patterns to be measured replacements.
6. liquid crystal display panel alignment detecting method as claimed in claim 4, which is characterized in that the capacitor calculated value are as follows:
C=ε * ε 0*S/d,
Wherein, C is the capacitor calculated value, unit F;ε is relative dielectric constant, unit F/m;ε 0 is permittivity of vacuum, single
Position F/m;S is the area of the label and the plate electrode opposite face to be measured, unit m2;D be it is described it is to be measured label with it is described
Pole plate spacing between plate electrode, unit m.
7. liquid crystal display panel alignment detecting method as claimed in claim 4, which is characterized in that described by the measurement capacitance
Compared with the capacitor calculated value of the plate condenser, to further comprise the step of completing contraposition detection:
The difference between the measurement capacitance and the capacitor calculated value is judged whether within the scope of preset difference value, if default
In difference range, then determine that contraposition is correct.
Priority Applications (2)
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CN201810957769.0A CN109061916A (en) | 2018-08-22 | 2018-08-22 | A kind of liquid crystal display panel alignment detection apparatus and method |
PCT/CN2018/115600 WO2020037847A1 (en) | 2018-08-22 | 2018-11-15 | Alignment test device and method of liquid crystal panel |
Applications Claiming Priority (1)
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CN201810957769.0A CN109061916A (en) | 2018-08-22 | 2018-08-22 | A kind of liquid crystal display panel alignment detection apparatus and method |
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CN201810957769.0A Pending CN109061916A (en) | 2018-08-22 | 2018-08-22 | A kind of liquid crystal display panel alignment detection apparatus and method |
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US6518679B2 (en) * | 2000-12-15 | 2003-02-11 | International Business Machines Corporation | Capacitive alignment structure and method for chip stacking |
JP2011248207A (en) * | 2010-05-28 | 2011-12-08 | Hitachi High-Technologies Corp | Proximity exposure device, alignment method of proximity exposure device, and manufacturing method of panel substrate |
CN102608797A (en) * | 2012-04-09 | 2012-07-25 | 友达光电股份有限公司 | Alignment method for assembling liquid crystal display device |
CN105185283A (en) * | 2015-10-23 | 2015-12-23 | 京东方科技集团股份有限公司 | Detection device, substrate rack, and method for detecting substrate positions on substrate rack |
CN107942548A (en) * | 2017-11-28 | 2018-04-20 | 友达光电股份有限公司 | A kind of display panel and display module |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7193423B1 (en) * | 2005-12-12 | 2007-03-20 | International Business Machines Corporation | Wafer-to-wafer alignments |
DE102012212064A1 (en) * | 2012-07-11 | 2014-01-16 | Carl Zeiss Smt Gmbh | Lithographic plant with segmented mirror |
CN105241367A (en) * | 2015-10-26 | 2016-01-13 | 上海华力微电子有限公司 | Stitching technology aligning precision detection method and structure |
-
2018
- 2018-08-22 CN CN201810957769.0A patent/CN109061916A/en active Pending
- 2018-11-15 WO PCT/CN2018/115600 patent/WO2020037847A1/en active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6518679B2 (en) * | 2000-12-15 | 2003-02-11 | International Business Machines Corporation | Capacitive alignment structure and method for chip stacking |
JP2011248207A (en) * | 2010-05-28 | 2011-12-08 | Hitachi High-Technologies Corp | Proximity exposure device, alignment method of proximity exposure device, and manufacturing method of panel substrate |
CN102608797A (en) * | 2012-04-09 | 2012-07-25 | 友达光电股份有限公司 | Alignment method for assembling liquid crystal display device |
CN105185283A (en) * | 2015-10-23 | 2015-12-23 | 京东方科技集团股份有限公司 | Detection device, substrate rack, and method for detecting substrate positions on substrate rack |
CN107942548A (en) * | 2017-11-28 | 2018-04-20 | 友达光电股份有限公司 | A kind of display panel and display module |
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