CN109061232A - Probe unit of microscope with atomic force - Google Patents
Probe unit of microscope with atomic force Download PDFInfo
- Publication number
- CN109061232A CN109061232A CN201810995061.4A CN201810995061A CN109061232A CN 109061232 A CN109061232 A CN 109061232A CN 201810995061 A CN201810995061 A CN 201810995061A CN 109061232 A CN109061232 A CN 109061232A
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- China
- Prior art keywords
- probe
- locating piece
- micro
- cantilever
- rotation strip
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
Abstract
The invention discloses a kind of atomic force microscope probe and the combination unit of pedestal, the micro-cantilever of middle probe has stepped hole on its surface opposite with needle point；Probe base includes adsorption piece and locating piece, and adsorption piece includes vacuum suction slot and adsorption plane；Locating piece is stretched out in insertion stepped hole from adsorption plane and is rotated to abut with the step surface of stepped hole；Locating piece includes connected rotating bar and rotation strip, the flexible component of rotation strip upper surface device；Using connecting rod connection rotating bar and fine-tuning nut, fine-tuning nut controls fine tuning structure and drives locating piece mobile fine tuning structure.The device of the invention can be improved needle exchange efficiency, avoid run-bake-needle fault and dislocation, can apply fixed active force to probe cantilevers end, promote the sensitivity of probe cantilevers, improve test effect.
Description
Technical field
The present invention relates to semiconductor test technical field, in particular to a kind of probe unit of atomic force microscope.
Background technique
Atomic force microscope (Atomic Force Microscope, AFM) oneself be widely used in semiconductor samples test
In, its working principle is that passing through extremely weak atom between detection sample to be tested surface and a miniature force sensitive element (probe)
Between interaction force study the surface texture and property of substance.Usually, probe includes needle point and micro-cantilever, will be to micro-
Probe base is fixed in the micro-cantilever end of low force extreme sensitivity, and the needle point of micro-cantilever front end is close to sample surfaces.When needle point and sample
Extremely weak attraction or repulsive force are generated when product surface distance is minimum, between their atoms, deformation occurs so as to cause micro-cantilever
Or motion state changes.In scanning process, the micro-cantilever with needle point will the undulatory motion on perpendicular to sample surfaces direction,
By including that reflection laser beam and its photodetector system are acquired the state change of micro-cantilever, the change of micro-cantilever state is measured
Change the position corresponding relationship with scanning each point, to obtain that there are the materializations such as the material surface structure of atom and molecule class resolution ratio
Matter.
However, the test due to different physico-chemical properties needs the probe using different model, so atomic force microscope exists
Replacement probe is frequently necessary in use process to complete corresponding testing requirement.During needle exchange, the probe that need to will be exchanged
It takes out, the probe of replacement is put into probe base.However, substantially increasing the operation difficulty of needle exchange since probe is small and light.
Being easy to happen during needle exchange due to falling etc. probe dislocation or midway wastes new probe, increases testing cost,
If falling off for probe will affect test process during the test, staff is needed to suspend board operation, detection maintenance
Atomic force microscope board, to greatly increase time cost.
The mode that probe common at present is put into probe base has clamped-in style, absorption type etc., leads to when probe is put into probe base
The effect for crossing applied force, fixes probe end.There is no end fixed about atomic force microscope probe in the prior art
The concern and research that tightness influences test effect.
Summary of the invention
The test effect of atomic force microscope and probe cantilevers undulatory motion are closely related, and probe cantilevers end is solid
Due to probe base, the end fixed tightness of probe cantilevers restricts probe cantilevers undulatory motion, therefore probe is micro- outstanding
The end fixed tightness of arm is worth being concerned.Existing probe cantilevers tail end fixing device, locks probe end.
The main object of the present invention, which is intended to provide one kind, to be fixed fastening force in fact on demand to probe cantilevers end
Probe unit of microscope with atomic force, to apply fixed active force to probe cantilevers end.Probe cantilevers of the invention
Tail end fixing device reduces the installation difficulty of probe, largely avoids the run-bake-needle fault phenomenon of needle exchange process needle.In addition, this hair
The bright stationary state that can also efficiently control probe cantilever, improves its sensitivity, to improve material surface physico-chemical property
Test effect.
To achieve the above object, the present invention provides a kind of atomic force microscope probe and its base combination device, including visits
Needle and probe base, wherein the probe includes micro-cantilever and the needle point based on described micro-cantilever one end, the micro-cantilever is at it
There is stepped hole on the surface opposite with the needle point；Probe base includes adsorption piece and locating piece, and the adsorption piece includes vacuum
Adsorption tank and adsorption plane, the vacuum suction slot are used to apply adsorption capacity for offsetting probe gravity to probe；The positioning
Part is stretched out from the adsorption plane to be inserted into the stepped hole and rotates with the step face contact with the stepped hole；The locating piece
It is located among rotation strip including connected rotating bar and rotation strip, rotating bar, and is filled in the upper surface of rotating bar two sides rotation strip
It is equipped with elastic parts, elastic parts is made of spring and elastic force vane, and elastic force vane is located at the top of spring, the end of spring
End is fixed on the upper surface of rotation strip；Fine tuning structure utilizes connecting rod connection rotating bar and fine-tuning nut, composition fastening force adjustment
Structure, fine-tuning nut control fine tuning structure and drive locating piece mobile.
Preferably, the stepped hole is two-part stepped hole, including aperture section and big hole section.
Preferably, the locating piece includes connected rotating bar and rotation strip, wherein the section maximum ruler of the rotating bar
The very little section minimum dimension less than the aperture section；The cross sectional shape of the rotation strip and the cross sectional shape of the aperture section match
It closes, cross-sectional maximum dimension is greater than the section minimum dimension of the aperture section and is less than the section minimum dimension of the big hole section；
The cross-sectional maximum dimension is cross sectional periphery side each point to rotation center apart from maximum value, and the section minimum dimension is section
Outer periphery each point is to rotation center apart from minimum value.
Preferably, the stepped hole is slot, and the rotation strip is rectangular bars.
Preferably, the locating piece includes the rotating bar and the rotation strip, and the rotating bar is located at the rotation strip
Centre, and the elastic parts is set in the rotation strip upper surface of the rotating bar two sides, the elastic parts is in array-like
Arrangement.
Preferably, fine-tuning nut spiral one week, locating piece lifting value are 0.01mm, and range is not less than 2mm.
Probe and base combination device proposed by the invention offsets probe gravity using vacuum absorption device, avoids changing
Run-bake-needle fault during needle can be by probe by the way that locating piece is arranged on probe base and corresponding stepped hole is arranged on probe
It is positioned at probe base, the probe as caused by probe is small and light misplaces during so avoidable needle exchange, improves different detections
The success rate exchanged between needle.By the way that elastic parts is arranged on the positioning element, locating piece is driven to move using fine tuning structure, thus
The compression degree of elastic parts is controlled, and then applies fixed active force to probe cantilevers end.Elastic parts realizes pair
The flexible fastening of probe cantilevers end promotes probe cantilevers sensitivity, improves test effect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of one embodiment of the invention atomic force microscope probe and base combination device；
Fig. 2 and Fig. 3 is the partial rear view and broken section of the detection needle of one embodiment of the invention atomic force microscope；
Fig. 4 is the perspective view of locating piece in one embodiment of the invention probe unit of microscope with atomic force.
Specific embodiment
To keep the contents of the present invention more clear and easy to understand, below in conjunction with Figure of description, the contents of the present invention are made into one
Walk explanation.Certainly the invention is not limited to the specific embodiment, general replacement known to those skilled in the art
It is included within the scope of protection of the present invention.
Fig. 1 to Fig. 4 is please referred to, probe unit of microscope with atomic force provided by the present embodiment includes detection needle and probe
Seat.Detecting needle includes the micro-cantilever 110 for being fixed on probe base and the needle point 120 set on the micro-cantilever one end.By micro-cantilever 110
The surface of needle point 120 is set as front, then its surface opposite with needle point 120 is the back side.In the present embodiment, micro-cantilever 110
It is fixed in probe base by vacuum suction.Specifically, probe base includes adsorption piece 210, which has an adsorption plane S,
Air slot C is offered on adsorption plane S, air slot C is connected to guide pipeline 220, is generated negative pressure using vacuumizing part and is offset spy
The self gravity of needle prevents run-bake-needle fault during needle exchange so that the back side of micro-cantilever 110 is adsorbed in adsorption plane S.
On the other hand, in order to fix probe, fixed active force is applied to probe cantilevers end and efficiently controls probe
Micro-cantilever undulatory motion amplitude, improves test effect.Probe base of the invention further includes the positioning extended downwardly from adsorption plane S
Part 230, while the stepped hole 130 being also equipped on needle corresponding to locating piece is detected, pass through the back by locating piece 230 from micro-cantilever
Face is inserted into stepped hole 130 and is rotated so that locating piece 230 is abutted with the step surface of stepped hole 130, to reach further solid
Surely the purpose of needle is detected.Locating piece 230 includes rotating bar 230a and rotation strip 230b, and rotating bar 230a is located in rotation strip 230b
Between, and elastic parts 230c is set in the upper surface of the two sides rotating bar 230a rotation strip 230b, elastic parts 230c is in array-like
Arrangement.Elastic parts 230c is made of spring and elastic force vane, and elastic force vane is located at the top of spring, and the end of spring is solid
It is scheduled on the upper surface of rotation strip 230b.Fine tuning structure 240 is arranged in adsorption piece 210, connects rotating bar 230a using connecting rod 260
With fine-tuning nut 250 and rotating bar 230a.To reach micro- to probe cantilevers end application fixed function power and control probe
The purpose of cantilever undulatory motion amplitude, improve test effect,.
The positioning method of the probe unit to the present embodiment is described in detail below.
With reference to Fig. 2-3, the back side of micro-cantilever 110 forms stepped hole 130.Stepped hole 130 is that two-part is rectangular in this implementation
Shape stepped hole, including the lesser aperture section 130a of the sectional dimension and biggish big hole section 130b of sectional dimension.It is corresponding, rotation
The cross-sectional maximum dimension of bar 230a is less than the section minimum dimension of aperture section 130a, can so be inserted freely into stepped hole；And
For rotation strip 230b, it can be inserted into the aperture section of stepped hole, but the cross-sectional maximum dimension of rotation strip 230b is greater than
The section minimum dimension of aperture section 130a and the section minimum dimension for being less than big hole section 130b so work as 230 insert stand of locating piece
After 130 certain depth of rank hole, rotation strip 230b is entirely located in big hole section 130b.Rotation strip 230b can in big hole section 130b
It is freely rotated, and can be connected on the step surface of stepped hole 130 at its section larger size after turning an angle, so that positioning
Part is sticked in stepped hole.Preferably, the cross sectional shape of rotation strip 230b is matched with the cross sectional shape of aperture section 130a, it can be more
It is easily inserted into aperture section 130a.Cross-sectional maximum dimension mentioned here refers to cross sectional periphery side each point to rotation center
Apart from maximum value, and section minimum dimension be cross sectional periphery side each point to rotation center apart from minimum value.
Next the needle exchange of the probe unit of microscope with atomic force to the present embodiment and force process are illustrated.
In the present embodiment, stepped hole 130 is rectangle stepped hole, and rotation strip 230b is smaller with the cooperation of aperture section shape
Rectangular bars, the section of rotating bar 230a are rectangular.The air slot 220 of probe base is set to be directed at the back side of micro-cantilever 110, benefit first
It is prevented with the self gravity that vacuumizing part generates negative pressure counteracting probe so that the back side of micro-cantilever 110 is adsorbed in adsorption plane S
Run-bake-needle fault during needle exchange.Secondly, probe to be moved to the position of probe base locating piece 230 along adsorption plane S, by locating piece
It is also in a certain angle between probe base and micro-cantilever 110 at this time in 230 insertion stepped holes 130.Later, locating piece 230 is opposite
It turns an angle in micro-cantilever 110, while the long side of rotation strip 230b and the long side of oblong shaped orifices section 130a is intersected
And the elastic parts on rotation strip 230b is made to contact step surface.At this point, the positioning of detection needle and probe base is completed.Finally, adjusting
Fine-tuning nut 250 regulates and controls fine tuning structure 240, and fine tuning structure 240 drives locating piece 23 along the aspect shifting perpendicular to adsorption plane S
It is dynamic, the compression degree of elastic parts 230c is controlled, elastic force vane is by the pressure transmission of position to control terminal and shows.With
Elastic force vane is applied fixed active force as micro-cantilever end by the average value of pressure.During the test, it closes and takes out
Vacuum component is realized to the elastic fastening of micro-cantilever end using the elastic parts 230c of the present apparatus, improves the shake of micro-cantilever
Dynamic effect.
In conclusion probe and base combination device proposed by the invention, offset probe weight using vacuum absorption device
Power can effectively avoid the run-bake-needle fault phenomenon during needle exchange.By the way that locating piece is arranged on probe base and is arranged on detection needle
Probe can be positioned at probe base by corresponding stepped hole, during so avoidable needle exchange as probe it is small and light caused by visit
Needle dislocation improves the success rate during replacement probe.By the way that elastic parts is arranged on the positioning element, fine tuning structure band is utilized
Dynamic locating piece movement, to control the compression degree of elastic parts, and then applies fixed active force to probe cantilevers end.
Elastic parts realizes the flexible fastening to probe cantilevers end, efficiently controls the stationary state of probe cantilever, improves it
Sensitivity improves test effect.
Although the present invention is disclosed as above with preferred embodiment, right many embodiments are illustrated only for the purposes of explanation
, it is not intended to limit the invention, those skilled in the art can make without departing from the spirit and scope of the present invention
Several changes and retouches, and the protection scope that the present invention is advocated should be subject to described in claims.
Claims (8)
1. a kind of atomic force microscope probe and base combination device characterized by comprising
Probe, the needle point including micro-cantilever and set on described micro-cantilever one end, the micro-cantilever are opposite with the needle point at it
Surface on be formed with stepped hole；
Probe base, comprising: adsorption piece offers the air guide being connected to vacuumizing part with adsorption plane on the adsorption plane
Slot, for providing adsorption capacity to the probe to offset the gravity of its probe；Locating piece is extended downwardly from the adsorption plane
It is inserted into the stepped hole and rotates the step face contact so that the locating piece and the stepped hole；The locating piece includes phase
Rotating bar even and rotation strip, in the flexible component of upper surface device of the rotation strip；The elastic parts is by spring and bullet
Power vane is constituted, and the elastic force vane is located at the top of the spring, and the end of the spring is fixed on the rotation strip
Upper surface；
Fastening force adjusts structure, comprising: fine tuning structure, fine-tuning nut, fine tuning structure utilize connecting rod connection rotating bar and fine tuning spiral shell
Mother, fine-tuning nut control fine tuning structure and drive locating piece mobile.
2. atomic force microscope probe according to claim 1 and base combination device, which is characterized in that the stepped hole
For two-part stepped hole, including aperture section and big hole section.
3. atomic force microscope probe according to claim 2 and base combination device, which is characterized in that the locating piece
Including connected rotating bar and rotation strip, wherein the section that the cross-sectional maximum dimension of the rotating bar is less than the aperture section is minimum
Size；The cross sectional shape of the rotation strip is matched with the cross sectional shape of the aperture section, and cross-sectional maximum dimension is greater than described
The section minimum dimension of aperture section and the section minimum dimension for being less than the big hole section；The cross-sectional maximum dimension is cross sectional periphery
For side each point to rotation center apart from maximum value, the section minimum dimension is distance of the cross sectional periphery side each point to rotation center
Minimum value.
4. atomic force microscope probe according to claim 3 and base combination device, which is characterized in that the stepped hole
For slot, the rotation strip is rectangular bars.
5. atomic force microscope probe according to claim 4 and base combination device, which is characterized in that the locating piece
Including the rotating bar and the rotation strip, the rotating bar is located at the centre of the rotation strip, and in the rotating bar two sides
Rotation strip upper surface the elastic parts is set, the elastic parts is in array-like arrangement.
6. atomic force microscope probe according to claim 5 and base combination device, which is characterized in that the fine tuning spiral shell
Female spiral one week, locating piece lifting value are 0.01mm, and range is not less than 2mm.
7. the installation and application of a kind of atomic force microscope probe and base combination, which is characterized in that using any such as right
It is required that atomic force microscope probe described in 1-6 and base combination device.
8. the method according to the description of claim 7 is characterized in that aobvious using any atomic force as described in claim 1-6
Micro mirror probe and base combination device, and include step 1, the air slot of probe base to be made to be directed at the back side of micro-cantilever, it is true using taking out
Empty component generates the self gravity that negative pressure offsets probe, prevents run-bake-needle fault during needle exchange；Step 2, by probe along adsorption plane S
It is moved to the position of probe base locating piece, locating piece is inserted into stepped hole, at this time also in certain between probe base and micro-cantilever
Angle；Step 3, locating piece is turned an angle relative to micro-cantilever, while makes the long side and oblong shaped orifices of rotation strip
The long side of section intersects and the elastic parts on rotation strip is made to abut step surface, and the positioning of probe and probe base is completed；Step 4, it adjusts
Fine-tuning nut is saved, fine tuning structure is controlled, drives locating piece along moving in terms of perpendicular to adsorption plane, controls the pressure of elastic parts
Contracting degree, elastic force vane by the pressure transmission of position to control terminal, using elastic force vane by pressure average value as
Micro-cantilever end applies fixed active force；Step 5, during the test, vacuumizing part is closed, elastic parts processed is utilized
It realizes to the elastic fastening of micro-cantilever end, improves the vibrating effect of micro-cantilever.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810995061.4A CN109061232B (en) | 2018-08-29 | 2018-08-29 | Atomic force microscope probe device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810995061.4A CN109061232B (en) | 2018-08-29 | 2018-08-29 | Atomic force microscope probe device |
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| CN109061232A true CN109061232A (en) | 2018-12-21 |
| CN109061232B CN109061232B (en) | 2020-03-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810995061.4A Active CN109061232B (en) | 2018-08-29 | 2018-08-29 | Atomic force microscope probe device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109932530A (en) * | 2019-02-25 | 2019-06-25 | 天津大学 | A kind of afm scan probe clamper |
| CN112798205A (en) * | 2020-12-15 | 2021-05-14 | 东莞理工学院 | Atomic force microscope micro-cantilever elasticity coefficient calibration device |
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| CN112798205A (en) * | 2020-12-15 | 2021-05-14 | 东莞理工学院 | Atomic force microscope micro-cantilever elasticity coefficient calibration device |
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|---|---|
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