CN109059748B - Flexible sensor and flexible signal detection device - Google Patents
Flexible sensor and flexible signal detection device Download PDFInfo
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- CN109059748B CN109059748B CN201810744439.3A CN201810744439A CN109059748B CN 109059748 B CN109059748 B CN 109059748B CN 201810744439 A CN201810744439 A CN 201810744439A CN 109059748 B CN109059748 B CN 109059748B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
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Abstract
The present disclosure relates to a flexible sensor and a flexible signal detection device. The method comprises the following steps: the strain sensing device is used for obtaining a first signal according to the deformation of the part to be detected of the detected object; the optical sensing device is used for obtaining a second signal according to the deformation of the part to be detected of the detected object; the flexible substrate is used for bearing the strain sensing device and the optical sensing device and can be attached to the surface of the part to be detected of the detected object, so that the flexible sensor is attached to the surface of the part to be detected of the detected object, and the strain sensing device, the optical sensing device and the flexible substrate are all made of flexible materials. The flexible sensor is integrated with the strain sensing device and the optical sensing device, can dynamically acquire the planar strain data and the curvature change data in the orthogonal direction of the part to be detected of the detected object in real time, and can more accurately reflect the deformation signal of the part to be detected.
Description
Technical Field
The present disclosure relates to the field of semiconductor technology, and in particular, to a flexible sensor and a flexible signal detection device.
Background
The structure of the sensor can be generally divided into a signal sensing layer, a signal conversion layer, a signal transmission layer and the like. The signal induction layer carries out corresponding response on a signal to be measured by the sensor through the processes of structure, electrochemical reaction and the like; the signal conversion layer is used for converting different measurement response signals into electric signals which can be measured by the circuit. With the development of technology, people often need to use different types of sensors in the process of measuring human body signals by using electronic devices. The sensors can be classified into mechanical, electrical, thermal, optical, magnetic and other types according to different measurement signals, different measurement methods of the sensors are different, and corresponding signal acquisition and processing methods are also different, which provides challenges for the design of electronic devices.
Disclosure of Invention
In view of this, the present disclosure provides a flexible sensor and a flexible signal detection device.
According to an aspect of the present disclosure, there is provided a flexible sensor including:
the strain sensing device is used for obtaining a first signal according to the deformation of the part to be detected of the detected object;
the optical sensing device is used for obtaining a second signal according to the deformation of the part to be detected of the detected object;
a flexible substrate for carrying the strain sensing device and the optical sensing device and capable of being attached to the surface of the portion to be measured of the object to be detected so that the flexible sensor is attached to the surface of the portion to be measured of the object to be detected,
the strain sensing device, the optical sensing device and the flexible substrate are all made of flexible materials.
In one possible implementation manner, the strain sensing device includes a plurality of strain detection portions for detecting strain forces in different directions, respectively, and the plurality of strain detection portions are in a grid structure.
In one possible implementation manner, the strain sensing device further includes a plurality of flexible leads respectively connected to the plurality of strain detection portions, and the plurality of flexible leads have a serpentine structure.
In one possible implementation, the strain sensing device further includes:
and the strain sensing circuit is respectively connected with each flexible lead and is used for generating the first signal according to the deformation of the strain detection part.
In one possible implementation, the optical sensing device includes a plurality of optical waveguides, and the plurality of optical waveguides are orthogonally distributed.
In one possible implementation, the material of the optical waveguide includes: SU-8.
In one possible implementation, the flexible sensor further includes:
and the flexible packaging film is used for packaging the strain sensing device and the optical sensing device.
According to another aspect of the present disclosure, there is provided a flexible signal detecting apparatus including:
the flexible sensor according to claims 1 to 7, configured to obtain a first signal and a second signal according to a deformation of a portion to be detected of a detected object;
the signal processing module is used for respectively processing the first signal and the second signal to obtain a third signal and a fourth signal;
the signal transmitting module is used for carrying out wireless communication with terminal equipment and sending the third signal and the fourth signal to the terminal equipment so that the terminal equipment can determine the deformation characteristic of the detection object according to the third signal and the fourth signal;
and the flexible substrate is used for bearing the signal processing module and the signal transmitting module and is attached to the surface of the part to be detected of the detection object, so that the signal processing module and the signal transmitting module are attached to the surface of the part to be detected of the detection object.
In one possible implementation, the signal processing module includes:
the signal compensation circuit is used for carrying out signal compensation on the first signal to obtain a compensated first signal;
and the analog-to-digital conversion circuit is used for respectively performing analog-to-digital conversion on the compensated first signal and the compensated second signal to obtain the third signal and the fourth signal.
In one possible implementation manner, the signal processing module further includes:
the filter circuit is used for filtering noise of the third signal and the fourth signal;
a signal enhancement circuit to enhance signal strengths of the third signal and the fourth signal.
The flexible sensor is integrated with the strain sensing device and the optical sensing device, can dynamically acquire the strain data and curvature change data of the surface of the part to be detected of the detected object in real time, and can more accurately reflect the deformation state of the part to be detected.
Other features and aspects of the present disclosure will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate exemplary embodiments, features, and aspects of the disclosure and, together with the description, serve to explain the principles of the disclosure.
FIG. 1 is a schematic diagram illustrating the construction of a flexible sensor according to an exemplary embodiment.
FIG. 2 is a schematic diagram illustrating a flexible sensor according to an exemplary embodiment.
Fig. 3 is a schematic structural diagram illustrating a flexible signal detection device according to an exemplary embodiment.
Fig. 4a is a schematic diagram of a usage state of the flexible signal detection device in an application example.
FIG. 4b is a schematic diagram of a Wheatstone bridge configuration in an exemplary application.
Detailed Description
Various exemplary embodiments, features and aspects of the present disclosure will be described in detail below with reference to the accompanying drawings. In the drawings, like reference numbers can indicate functionally identical or similar elements. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
The word "exemplary" is used exclusively herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.
Furthermore, in the following detailed description, numerous specific details are set forth in order to provide a better understanding of the present disclosure. It will be understood by those skilled in the art that the present disclosure may be practiced without some of these specific details. In some instances, methods, means, elements and circuits that are well known to those skilled in the art have not been described in detail so as not to obscure the present disclosure.
FIG. 1 is a schematic diagram illustrating the construction of a flexible sensor according to an exemplary embodiment. As shown in fig. 1, the flexible sensor 100 includes:
the strain sensing device 101 is used for obtaining a first signal according to the deformation of the part to be detected of the detected object;
the optical sensing device 102 is used for obtaining a second signal according to the deformation of the part to be detected of the detected object;
and the flexible substrate 103 is used for bearing the strain sensing device 101 and the optical sensing device 102, and can be attached to the surface of the part to be measured of the detected object, so that the flexible sensor 100 is attached to the surface of the part to be measured of the detected object.
The strain sensing device 101, the optical sensing device 102 and the flexible substrate 103 are all made of flexible materials.
In this example, the detection object may be a biological tissue (e.g., a human body, a plant, etc.) or an abiotic tissue (e.g., a material with a complex surface, etc.), and is not limited herein.
In one possible implementation, the first signal may be used to reflect a changing state of strain of the surface of the site to be measured. The second signal may be used to reflect a state of curvature change of the surface of the site to be measured.
The flexible sensor is integrated with the strain sensing device and the optical sensing device, can dynamically acquire the strain data and curvature change data of the surface of the part to be detected of the detected object in real time, and can more accurately reflect the deformation state of the part to be detected. In addition, the strain sensing device, the optical sensing device and the flexible substrate are all made of flexible materials, so that the flexible sensor has strong skin-friendly performance, the influence of measurement is reduced to the maximum extent, the strain of the part to be measured can be effectively transmitted, and the flexible sensor can acquire more accurate deformation data.
As an example of the present embodiment, as shown in fig. 1, the strain sensing device 101 may include a plurality of strain detecting portions 1011 for detecting strain forces in different directions, respectively, so as to expand the detection range of the strain sensing device 101. Each strain detecting section 1011 may be a grid-like structure like a foil-type strain gauge (a thin metal foil grid). Because the thickness of the strain detection part 1011 is very small, the small deformation of the part to be detected can cause the grid-shaped structure of the strain detection part 1011 to deform, so that the resistance of the strain detection part 1011 changes. In general, the resistance change of the strain detection unit 1011 is larger as the strain detection unit 1011 deforms more, and the change value of the resistance of the strain detection unit 1011 and the strain value of the site to be measured may be in positive correlation, for example, the change value of the resistance and the strain value of the site to be measured are in direct proportion. Thus, the strain sensing device 101 may have high sensitivity, high linearity, and extremely short response time.
As another example of this embodiment, the strain sensing device may further include: and the strain sensing circuit is respectively connected with each flexible lead and is used for generating a first signal according to the deformation of the strain detection part. For example, if the strain sensor includes three strain detection portions having detection directions of 0 °, 45 °, and 90 °, and the strain sensing circuit is a multi-channel resistance measuring instrument, the multi-channel resistance measuring instrument can acquire resistance change data of the three strain detection portions to obtain three first signals.
As another example of the present embodiment, as shown in fig. 1, the strain sensing device 101 may further include a plurality of flexible leads 1012 connected to the plurality of strain detecting portions 1011, respectively, where the plurality of flexible leads 1012 have a serpentine structure. This makes the flexible leads 1012 malleable and prevents the signal change of the strain sensing device 101 caused by the deformation of the flexible leads 1012, further increasing the detection accuracy of the strain sensing device 101.
In one possible implementation, the strain detection portion and the flexible lead may be made of a metal film through photolithography and etching (for example, the material of the metal film may be gold, copper, or other alloy, which is not limited herein).
As an example of this embodiment, the optical sensing device 102 may include a plurality of optical waveguides 1021, and the plurality of optical waveguides 1021 are orthogonally distributed. In addition, the optical sensor may further include a laser emitter 1022 and a photodetector 1023.
For example, as shown in FIG. 1, the optical sensing device 102 may include two mutually perpendicular optical waveguides 1021. The laser transmitters 1022 may respectively emit a laser beam toward a cross section of one end of each of the two optical waveguides 1021. A photodetector 1023 for receiving and processing the optical signal is integrated in each case at the location of the cross section facing the other section of the two optical waveguides 1021. Thus, the laser emitter 1022, the optical waveguide 1021, and the photodetector 1023 constitute the optical sensing device 102. By utilizing the characteristic of total reflection of light in the optical waveguide 1021, the photodetector 1023 collects the intensity signal of light at the cross section of another segment of the optical waveguide 1021, and can generate a second signal for reflecting the change state of the surface curvature of the portion to be measured.
In one possible implementation, the material of the optical waveguide may include: SU-8. SU-8 in this disclosure can be used as both a near UV negative photoresist and an optical fiber material.
The strain sensing device and the optical sensing device adopt a double-layer arrangement structure, so that mutual interference between signals is avoided, meanwhile, the structure saves space, and the in-plane integration level of the flexible sensor is improved.
As an example of this embodiment, the material of the flexible substrate 103 may comprise a bio-compatible film for carrying said strain sensing device 101 and said optical sensing device 102. Meanwhile, the lower surface of the flexible substrate 103 has an adhesive layer. The adhesive layer can be made of high-viscosity biological glue, can be directly and well adhered to the surface of the skin and cannot cause allergic reaction of the skin. Thus, the flexible substrate 103 can be tightly deformed along with the deformation of the portion to be measured, and effectively transmit the strain of the portion to be measured to the strain sensing device 101 and the optical sensing device 102, so that the strain sensing device 101 and the optical sensing device 102 respectively obtain the first signal and the second signal according to the deformation of the portion to be measured.
FIG. 2 is a schematic diagram illustrating a flexible sensor according to an exemplary embodiment. As shown in fig. 2, the flexible sensor 100 further includes: a flexible encapsulation film 104 for encapsulating the strain sensing device 101 and the optical sensing device 102. The flexible packaging film 104 can be made of a biocompatible film, the flexible packaging film 104 plays a role of packaging a thin film, the whole flexible sensor 100 is wrapped, electronic elements of the flexible sensor 100 are protected from being affected by external factors, the flexible sensor is waterproof and dustproof, and the stress strain effect on functional elements of the flexible sensor 100 under the bending deformation load can be reduced.
Fig. 3 is a schematic structural diagram illustrating a flexible signal detection device according to an exemplary embodiment. As shown in fig. 3, the flexible signal detecting apparatus may include:
the flexible sensor 100 is connected with the signal processing module 200 and is used for obtaining a first signal and a second signal according to the deformation of the part to be detected of the detected object; the signal processing module 200 is connected to the signal transmitting module 300, and configured to process the first signal and the second signal respectively to obtain a third signal and a fourth signal; the signal transmitting module 300 is configured to perform wireless communication with a terminal device, and send a third signal and a fourth signal to the terminal device, so that the terminal device determines a deformation characteristic of the detection object according to the third signal and the fourth signal; and a flexible substrate 400 for carrying the signal processing module 200 and the signal emitting module 300, and being attached to the surface of the portion to be detected of the detection object, so that the signal processing module 200 and the signal emitting module 300 are attached to the surface of the portion to be detected of the detection object.
In a possible implementation manner, the public signal transmitting module 300 may perform Wireless communication with a terminal device by using a Wireless communication standard such as Bluetooth (Bluetooth), IrDA (Infrared Data Association), Wi-Fi (Wireless-Fidelity), or a mobile communication network, which is not limited herein.
In a possible implementation manner, the wireless terminal of the present disclosure may include terminal devices such as a smart phone, a tablet computer, a notebook computer, and a desktop computer, which is not limited herein.
In one possible implementation, the material of the flexible substrate 400 of the present disclosure may include a bio-compatible film for carrying the signal processing module 200 and the signal transmitting module 300. Meanwhile, the lower surface of the flexible substrate 400 has an adhesive layer. The adhesive layer can be made of high-viscosity biological glue, can be directly and well adhered to the surface of the skin and cannot cause allergic reaction of the skin. So that the signal processing module 200 and the signal emitting module 300 are attached to the surface of the portion to be measured of the test object.
It should be noted that the flexible substrate and the flexible substrate of the present disclosure may be connected to each other or separated from each other, and are not limited herein.
The utility model discloses a flexible signal detection device can pass through the signal processing module, the signal transmission module is handled and is launched the signal that flexible sensor gathered, realize high-frequency measurement and the wireless transmission to power signal of telecommunication and photoelectric signal, the activity that can too much restriction by the measuring object, and flexible basement and flexible sensor can be laminated well with being measured the object, be favorable to flexible signal detection device to gather the deformation data on various complicated surfaces, and can make less production foreign body of being measured the object feel, be favorable to gathering the deformation condition of the position that awaits measuring of measuring the object for a long time, make terminal equipment acquire more sufficient measured data in order to carry out more accurate analysis.
As an example of the present embodiment, as shown in fig. 3, the signal processing module 200 may include a signal compensation circuit 201 and an analog-to-digital conversion circuit 202. The flexible sensor 100 may comprise a strain sensing device 101 and an optical sensing device 102, wherein the strain sensing device 101 may further comprise a strain detection section 1011, a flexible lead 1012 and a strain sensing circuit 105. As shown in fig. 3, the strain detecting unit 1011 may be connected to the strain sensitive circuit 105 through a flexible lead 1012, and the strain sensitive circuit 105 may generate a first signal according to the strain of the strain detecting unit 1011. The signal compensation circuit 201 may be connected to the strain sensing circuit 105, and configured to receive the first signal generated by the strain sensing circuit 105, and perform signal compensation on the first signal to obtain a compensated first signal. For example, the signal compensation circuit can be a temperature measurement circuit and an analysis circuit including a temperature measurement resistor, and can eliminate resistance value change caused by temperature by means of the analysis circuit according to the resistance value of the temperature measurement resistor, so that signal drift caused by environment temperature to detection data of the strain sensing device is prevented, and the detection precision of the strain sensing device is further improved.
As an example of the present embodiment, as shown in fig. 3, the analog-to-digital conversion circuit 202 may be a multi-channel analog-to-digital converter, and the analog-to-digital conversion circuit 202 is respectively connected to the strain sensing circuit 105 and the optical sensing device 102, and may perform analog-to-digital conversion on the compensated first signal (analog signal) to form a third signal (digital signal), and perform analog-to-digital conversion on the second signal (analog signal) generated by the optical sensing device 102 to form a fourth signal (digital signal).
The signal transmitting module 300 may be connected to the analog-to-digital conversion circuit 202, and the third signal and the fourth signal are sent to the terminal device through the signal transmitting module 300, so that the terminal device determines the deformation characteristic of the to-be-detected part of the detected object according to the third signal and the fourth signal.
As another example of this embodiment, as shown in fig. 3, the signal processing module 200 may further include: a filter circuit 203 and a signal enhancement circuit 204.
The filter circuit 203 may be a multi-channel filter circuit, and the filter circuit 203 may be connected to the analog-to-digital conversion circuit 202 for filtering noise of the third signal and the fourth signal to obtain a filtered third signal and a filtered fourth signal. Therefore, environmental noise is eliminated, and the deformation state of the surface of the part to be detected can be more accurately reflected.
The signal enhancement circuit 204 may be connected to the filter circuit 203, and configured to enhance the signal strength of the filtered third signal and the filtered fourth signal, so as to obtain an enhanced third signal and an enhanced fourth signal, which are favorable for transmission and reception of signal transmission.
The signal transmitting module 300 may be a wireless transmitting circuit, the signal transmitting module 300 may be connected to the filter circuit 203, and the enhanced third signal and the enhanced fourth signal are sent to the terminal device through the signal transmitting module 300, so that the terminal device determines the deformation characteristic of the detection object according to the enhanced third signal and the enhanced fourth signal.
In an application example, taking the detection of the tested animal by using the flexible signal detection device as an example, the method comprises the following steps:
fig. 4a is a schematic diagram of a usage state of the flexible signal detection device in an application example. As shown in fig. 4a, the flexible signal detecting apparatus may include: the flexible sensor 100, the signal processing module 200, the signal storage module 500, the signal emitting module 300, and the flexible substrate 400. The flexible sensor 100 may include, among other things, a strain sensing device 101, an optical sensing device 102, and a flexible substrate 103. The signal processing module 200 may include a signal compensation circuit 201, an analog-to-digital conversion circuit 202, a filtering circuit 203, and a signal enhancement circuit 204.
As shown in fig. 4a, the strain sensing device 101 may include three grating-shaped strain detecting parts 1011 and serpentine-shaped flexible leads 1012 connected to the strain detecting parts 1011, respectively. The detection directions of the three strain detection portions 1011 are 0 °, 45 °, and 90 °, respectively, and the strain sensing device 101 can be formed by performing photolithography and etching on a metal layer sputtered on the flexible substrate 103 in advance by a standard MEMS (Micro-Electro-mechanical system) manufacturing process.
The optical sensing device 102 is composed of two mutually perpendicular optical waveguides 1021 (which may also be referred to as fiber optic ribbons), a laser emitter 1022, and a photodetector 1023. When the optical waveguide 1021 is manufactured, an SU-8 film can be formed by spin coating on the flexible substrate 103 and the strain sensing device 101, and by utilizing the characteristic that SU-8 can be used as photoresist or optical fiber material, the SU-8 is subjected to photoetching through an SU-8 patterning process to form two mutually perpendicular SU-8 optical waveguides 1021. A laser emitter 1022 may be integrated at a junction of central axes of the two optical waveguides 1021 as a light source, and the laser emitter 1022 may respectively emit a laser beam toward cross sections of one ends of the two optical waveguides 1021. A photodetector 1023 for receiving and processing the optical signal is integrated in each case at the location of the cross section facing the other section of the two optical waveguides 1021. Thus, the laser emitter 1022, the optical waveguide 1021, and the photodetector 1023 constitute the optical sensing device 102. This ductile fractal structure achieves the ductility of the optical sensing device 102 since the optical waveguide 1021, the laser emitter 1022, and the photodetector 1023 can be separately integrated on the flexible substrate 103 by conductive wires. The prepared optical sensing device 102 can measure the curvature change of the surface of the part to be measured in two orthogonal directions. The structure of the flexible sensor 100 adopts a three-dimensional multilayer structure, so that mutual interference between signals is avoided, meanwhile, the structure saves space, and the in-plane integration level of the flexible sensor 100 is improved.
The flexible substrate 103 plays a role of bearing the strain sensing device 101 and the optical sensing device 102, meanwhile, the lower surface of the flexible substrate 103 is provided with an adhesive layer which is directly contacted with the surface of the skin, and the adhesive layer can be made of high-viscosity biological glue, so that the adhesive layer can be effectively adhered to the skin without causing allergic reaction of the skin. In addition, the flexible substrate 103 is directly connected with the strain sensing device 101 and the optical sensing device 102, and can effectively transmit the strain generated by the part to be measured to the strain sensing device 101 and the optical sensing device 102, so that the strain sensing device 101 and the optical sensing device 102 can effectively acquire strain signals.
In a possible implementation manner, as shown in fig. 2, the flexible sensor 100 may further include a flexible packaging film, which may cover and wrap the strain sensing device 101 and the optical sensing device 102 integrally, and plays a role in packaging the strain sensing device 101 and the optical sensing device 102 and protecting electronic components from external factors; meanwhile, in the flexible sensor 100, the flexible substrate 103, the strain sensing device 101, the optical sensing device 102 and the flexible packaging film form a multilayer structure, and the strain sensing device 101 and the optical sensing device 102 are placed on a mechanical neutral layer of the whole structure of the flexible sensor 100, so that stress strain on functional elements such as the strain sensing device 101 and the optical sensing device 102 under bending deformation load can be reduced.
The materials of the flexible substrate, the flexible substrate and the flexible packaging film can adopt a biocompatible film, and the biocompatible film comprises but is not limited to a polymer film or a biological semipermeable film with a porous microstructure, and is characterized in that non-through holes with diameters ranging from hundreds of nanometers to tens of micrometers are arranged on the film, oxygen and water vapor can pass through the film, and liquid water and bacteria cannot pass through the film, so that the film has the functions of ventilation and water resistance. When the biological body is detected, the adverse reactions such as allergy and the like of the detected object are prevented, and the detection of the detected object is more facilitated.
As shown in fig. 4a, the flexible substrate 103 of the flexible sensor 100 can be separated from the flexible substrate 400, and the flexible sensor 100 can be attached to the portion to be measured of the animal to be measured. The flexible substrate 400 carrying the signal processing module 200, the signal storage module 500, the signal transmitting module 300 and other elements may be attached to other parts of the tested animal. The signal processing module 200 may be connected to the flexible sensor 100 by a flexible flat cable. Therefore, the influence of the signal processing module 200, the signal storage module and the signal transmitting module 300 on the flexible sensor 100 can be effectively reduced, and the fractal structure design can less obstruct the activity of the tested animal and is beneficial to measurement. Meanwhile, the strain sensing circuit 105 in the strain sensing device 101 may also be disposed on the flexible substrate 400, so as to avoid the influence of the strain sensing circuit 105 on the flexible substrate 103, which is beneficial for the strain sensing device 101 to acquire more accurate data.
In one possible implementation, the strain sensing circuit 105 may include three wheatstone bridges (not shown), and each strain detecting portion 1011 may be connected to one wheatstone bridge by a flexible wire 1012 having a serpentine structure. FIG. 4b is a schematic diagram of a Wheatstone bridge configuration in an exemplary application. As shown in fig. 4b, the strain detector 1011 may be connected in parallel with the voltage detector 1013 and a resistive sheet 1014 having a known resistance value. Under the condition that the strain detection part 1011 generates resistance change corresponding to the deformation of the part to be detected, according to the principle of a Wheatstone bridge, the voltage value of the strain detection part 1011 can be obtained by comparing the measured voltage of the voltage detector 1013 with the voltage of the external power supply 1015, and the strain sensing circuit generates three first signals which can respectively reflect the deformations of the surface of the part to be detected in the directions of 0 degree, 45 degrees and 90 degrees.
The signal compensation circuit 201 may be connected to the strain sensing circuit, and may perform signal compensation on the three first signals respectively to obtain three compensated first signals. The signal compensation circuit 201 may be a multichannel temperature measurement circuit including a temperature measurement resistor and an analysis circuit, and may eliminate signal drift caused by resistance change due to temperature to detection data of the strain sensing device 101 by means of the analysis circuit according to the resistance value of the temperature measurement resistor, thereby further improving the detection accuracy of the strain sensing device 101.
The analog-to-digital conversion circuit 202 may be a multi-channel analog-to-digital conversion circuit for converting analog signals (e.g., first and second signals) into digital signals (e.g., third and fourth signals). The analog-to-digital conversion circuit 202 is connected to the signal compensation circuit 201 and the photodetector 1023 in the optical sensor device 102, and can convert the three compensated first signals and the two compensated second signals into three third signals and two fourth signals, respectively.
The filter circuit 203 may be connected to the analog-to-digital conversion circuit 202, and may filter the three third signals and the two fourth signals, respectively, to filter out noise signals and low-frequency signals introduced by other external factors in the signals, so as to obtain three filtered third signals and two filtered fourth signals. For example, if the movement of the intestine of the animal to be measured is measured, it is necessary to remove the interference caused by signals of regular frequencies such as heartbeat and movement of the animal to be measured, and to obtain a simple intestinal movement signal of the animal to be measured.
The signal enhancement circuit 204 may be connected to the filter circuit 203. The signal enhancement circuit 204 may amplify the three filtered third signals and the two filtered fourth signals to obtain three enhanced third signals and two enhanced fourth signals, which is convenient for subsequent signal processing and transmission.
The signal storage module 500 may be electrically connected to the signal enhancement circuit 204. The signal processing device is used for storing the three enhanced third signals and the two enhanced fourth signals so as to prevent signal loss caused by signal transmission and other faults.
The signal transmitting module 300 may be electrically connected to the signal storage module. The signal transmitting module 300 (for example, a bluetooth module) sends the three enhanced third signals and the two enhanced fourth signals to the terminal device (for example, a notebook computer or a smart phone), so that the terminal device determines the deformation characteristics of the detection object according to the enhanced third signals and the enhanced fourth signals.
The flexible signal acquisition device can realize real-time, dynamic and multi-channel acquisition, acquired data are amplified through the amplifying circuit and then are filtered, environmental noise is eliminated, deformation signals of the measured surface can be reflected more accurately, all deformation information (the strain state of the surface of the part to be measured and the curvature change in the orthogonal direction) of the measured position is stored, and subsequent analysis and calculation are carried out through a computer. According to the flexible sensor, the strain sensing device and the optical sensing device with the complex double-layer structure are formed in one step directly through large-range photoetching, so that the complex procedures and errors of subsequent integrated devices are avoided, and the preparation efficiency of the flexible sensor is improved. The strain sensing device and the optical sensing device adopt a double-layer arrangement structure, so that mutual interference between signals is avoided, meanwhile, the structure saves space, and the in-plane integration level of the flexible sensor is improved. In addition, the flexible sensor and the flexible substrate are both made of flexible materials, so that the flexible sensor has strong skin-friendly performance, the influence of measurement is reduced to the maximum extent, the strain of the part to be measured can be effectively transmitted, and the flexible sensor is favorable for acquiring more accurate deformation data.
Having described embodiments of the present disclosure, the foregoing description is intended to be exemplary, not exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terms used herein were chosen in order to best explain the principles of the embodiments, the practical application, or technical improvements to the techniques in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (10)
1. A flexible sensor, comprising:
the strain sensing device is used for obtaining a first signal according to the deformation of a part to be detected of the detected object, wherein the first signal is used for reflecting the change state of the strain of the surface of the part to be detected of the detected object;
the optical sensing device is used for obtaining a second signal according to the deformation of the part to be detected of the detected object, wherein the second signal is used for reflecting the curvature change state of the surface of the part to be detected of the detected object;
the flexible substrate is used for bearing the strain sensing device and the optical sensing device, can be attached to the surface of the part to be detected of the detected object and deforms along with the deformation of the part to be detected, so that the flexible sensor is attached to the surface of the part to be detected of the detected object and detects the deformation of the part to be detected, wherein the detected object comprises biological tissues, and the material of the flexible substrate comprises a biocompatible film;
the strain sensing device, the optical sensing device and the flexible substrate are all made of flexible materials;
wherein the strain sensing device and the optical sensing device are arranged in a double layer in the flexible sensor.
2. The flexible sensor of claim 1, wherein the strain sensing device comprises a plurality of strain sensing portions for sensing strain forces in different directions, respectively, wherein the plurality of strain sensing portions are of a grid structure.
3. The flexible sensor of claim 2, wherein the strain sensing device further comprises a plurality of flexible leads respectively connected to the plurality of strain sensing portions, the plurality of flexible leads having a serpentine configuration.
4. The flexible sensor of claim 3, wherein the strain sensing device further comprises:
and the strain sensing circuit is respectively connected with each flexible lead and is used for generating the first signal according to the deformation of the plurality of strain detection parts.
5. The flexible sensor of claim 1, wherein the optical sensing device comprises a plurality of optical waveguides, and wherein the plurality of optical waveguides are orthogonally distributed.
6. The flexible sensor of claim 5, wherein the material of the optical waveguide comprises: SU-8.
7. The flexible sensor of claim 1, further comprising:
and the flexible packaging film is used for packaging the strain sensing device and the optical sensing device.
8. A flexible signal detection device, comprising:
the flexible sensor according to any one of claims 1 to 7, configured to obtain a first signal and a second signal according to a deformation of a portion to be detected of a detected object;
the signal processing module is used for respectively processing the first signal and the second signal to obtain a third signal and a fourth signal;
the signal transmitting module is used for carrying out wireless communication with terminal equipment and sending the third signal and the fourth signal to the terminal equipment so that the terminal equipment can determine the deformation characteristic of the detection object according to the third signal and the fourth signal;
and the flexible substrate is used for bearing the signal processing module and the signal transmitting module and is attached to the surface of the part to be detected of the detection object, so that the signal processing module and the signal transmitting module are attached to the surface of the part to be detected of the detection object.
9. The apparatus of claim 8, wherein the signal processing module comprises:
the signal compensation circuit is used for carrying out signal compensation on the first signal to obtain a compensated first signal;
and the analog-to-digital conversion circuit is used for respectively performing analog-to-digital conversion on the compensated first signal and the compensated second signal to obtain the third signal and the fourth signal.
10. The apparatus of claim 9, wherein the signal processing module further comprises:
the filter circuit is used for filtering noise of the third signal and the fourth signal;
a signal enhancement circuit to enhance signal strengths of the third signal and the fourth signal.
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| CN110118573B (en) * | 2019-04-25 | 2020-07-10 | 华中科技大学 | Conformal attached multifunctional flexible sensor and application thereof |
| CN110160439B (en) * | 2019-07-02 | 2020-02-14 | 清华大学 | Contact type flexible sensor |
| CN110571200A (en) * | 2019-09-20 | 2019-12-13 | 清华大学 | Sunken flexible circuit integrated device and manufacturing method thereof |
| CN110793573B (en) * | 2019-11-06 | 2020-05-19 | 清华大学 | Flexible electronic system capable of self-adjusting binding force |
| CN111780661B (en) * | 2020-07-22 | 2021-10-08 | 华中科技大学 | Method and system for accurately measuring bending strain of flexible electronic device |
| CN114061433B (en) * | 2021-09-24 | 2023-01-06 | 华中科技大学 | Breathable wearable strain sensor and preparation method and application thereof |
| CN113916655B (en) * | 2021-09-28 | 2024-06-11 | 上海腾达创科工程技术咨询有限责任公司 | Device and method for testing longitudinal prestress reinforcement performance of shield tunnel |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10176919A (en) * | 1996-12-18 | 1998-06-30 | Olympus Optical Co Ltd | Shape-inputting device |
| CN102822618A (en) * | 2009-11-26 | 2012-12-12 | 沃思测量技术股份有限公司 | Method and arrangement for tactile-optical determination of the geometry of a measurement object |
| CN106413430A (en) * | 2013-11-05 | 2017-02-15 | 华盛顿大学商业中心 | Protective helmets with non-linearly deforming elements |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014124049A2 (en) * | 2013-02-06 | 2014-08-14 | The Board Of Trustees Of The University Of Illinois | Stretchable electronic systems with containment chambers |
| CN106377266A (en) * | 2016-10-21 | 2017-02-08 | 浙江大学 | Fatigue monitoring device based on eye recognition |
| CN107115095A (en) * | 2017-04-07 | 2017-09-01 | 王莹 | A kind of eye automatic checkout system and detection method |
| CN107510460B (en) * | 2017-09-28 | 2021-04-23 | 歌尔光学科技有限公司 | Anti-fatigue control method for head-mounted display equipment and head-mounted display equipment |
-
2018
- 2018-07-09 CN CN201810744439.3A patent/CN109059748B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10176919A (en) * | 1996-12-18 | 1998-06-30 | Olympus Optical Co Ltd | Shape-inputting device |
| CN102822618A (en) * | 2009-11-26 | 2012-12-12 | 沃思测量技术股份有限公司 | Method and arrangement for tactile-optical determination of the geometry of a measurement object |
| CN106413430A (en) * | 2013-11-05 | 2017-02-15 | 华盛顿大学商业中心 | Protective helmets with non-linearly deforming elements |
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