CN109037432B - Piezoelectric element temperature-changing polarization device and method - Google Patents
Piezoelectric element temperature-changing polarization device and method Download PDFInfo
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- CN109037432B CN109037432B CN201810822936.0A CN201810822936A CN109037432B CN 109037432 B CN109037432 B CN 109037432B CN 201810822936 A CN201810822936 A CN 201810822936A CN 109037432 B CN109037432 B CN 109037432B
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- 230000010287 polarization Effects 0.000 title claims abstract description 170
- 238000000034 method Methods 0.000 title claims abstract description 21
- 229920002545 silicone oil Polymers 0.000 claims abstract description 95
- 239000003921 oil Substances 0.000 claims description 106
- 238000010438 heat treatment Methods 0.000 claims description 56
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 11
- 238000001816 cooling Methods 0.000 abstract description 7
- 230000028161 membrane depolarization Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 6
- 238000003825 pressing Methods 0.000 description 6
- 230000009467 reduction Effects 0.000 description 5
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000010792 warming Methods 0.000 description 3
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
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- H10N30/01—Manufacture or treatment
- H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
- H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
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Abstract
The invention discloses a temperature-changing polarization device and method for a piezoelectric element, wherein the temperature-changing polarization device for the piezoelectric element comprises: the control assembly comprises a pressurizing unit and a control unit, and the pressurizing unit is electrically connected with the control unit; the polarization tank is used for containing silicone oil; and the polarization assembly comprises a fixed seat and a moving assembly connected with the fixed seat, the pressurizing unit is electrically connected with the fixed seat, the moving assembly is electrically connected with the control unit, and the moving assembly drives the fixed seat to move into or out of the silicone oil in the cavity. The temperature-changing polarization device of the piezoelectric element aims at realizing rapid cooling without reducing the piezoelectric performance.
Description
Technical Field
The invention relates to the technical field of piezoelectric element polarization, in particular to a piezoelectric element temperature-changing polarization device and method.
Background
Piezoelectric elements, particularly piezoelectric ceramics, on the market today need to be polarized before they can be used. The traditional polarization mode is to immerse the piezoelectric element and the polarization tool in an oil bath with a set polarization temperature for polarization, and the polarization temperature in the polarization process is not changed.
The main purpose of the polarization process is to make the spontaneous dipoles in the piezoelectric element align against the coercive field under the driving of the electric field. The coercive field is reduced along with the rise of the temperature, so that the polarization is more easy to be sufficient at high temperature, and good piezoelectric performance is obtained. However, after the polarization is cut off, the piezoelectric ceramic is depolarized by high temperature, and certain piezoelectric performance is lost, so that the piezoelectric performance of the piezoelectric element is reduced.
Disclosure of Invention
The invention mainly aims to provide a piezoelectric element temperature-changing polarization device, which aims to realize rapid cooling without reducing piezoelectric performance.
In order to achieve the above object, the present invention provides a temperature-variable polarization device for a piezoelectric element, comprising:
the control assembly comprises a pressurizing unit and a control unit, and the pressurizing unit is electrically connected with the control unit;
the polarization tank is used for containing silicone oil; and
the polarization assembly comprises a fixed seat and a moving assembly connected with the fixed seat, the pressurizing unit is electrically connected with the fixed seat, the moving assembly is electrically connected with the control unit, and the moving assembly drives the fixed seat to move into or out of the silicone oil in the cavity.
Further, the fixing base is concavely provided with a groove, the bottom wall of the groove is provided with at least two electrodes, and the pressurizing unit is respectively connected with the electrodes through leads.
Further, the depth of the groove is defined as d, and d is more than or equal to 1mm and less than or equal to 50 mm.
Further, the polarization cell is provided with a heating assembly, and the heating assembly is electrically connected with the control unit.
Further, the polarization pool is also provided with a temperature sensor, the temperature sensor and the heating assembly are arranged at intervals, and the temperature sensor is electrically connected with the control unit.
Furthermore, the polarization pool is an oil bath pool, the movable assembly comprises a cross beam, a vertical rod and a transmission part, the cross beam is erected at the opening end of the oil bath pool, the cross beam is provided with a sliding hole, one end of the vertical rod is connected with the fixed seat, the other end of the vertical rod slidably penetrates through the sliding hole, the transmission part is connected with the vertical rod and electrically connected with the control unit, and the transmission part drives the vertical rod and the fixed seat to ascend and descend along the sliding hole.
Furthermore, the polarization pool comprises a high-temperature oil bath pool and a low-temperature oil bath pool which are arranged at intervals, the movable assembly comprises a slide rail and a driving piece, one end of the slide rail is arranged in the high-temperature oil bath pool, the other end of the slide rail is arranged in the low-temperature oil bath pool, the fixed seat is in sliding fit with the slide rail, the driving piece is connected with the fixed seat and is electrically connected with the control unit, and the driving piece drives the fixed seat to move along the slide rail.
Furthermore, the high-temperature oil bath is provided with a first heating assembly, the low-temperature oil bath is provided with a second heating assembly, and the first heating assembly and the second heating assembly are both electrically connected with the control unit;
and/or the high-temperature oil bath is provided with a first temperature sensor which is electrically connected with the control unit;
and/or a second temperature sensor is also arranged in the low-temperature oil bath and is electrically connected with the control unit.
The invention also provides a piezoelectric element polarization method, which comprises the following steps:
step S10: providing the piezoelectric element temperature-variable polarization device;
step S20: fixing the piezoelectric element on a fixed seat of the polarization component;
step S30: immersing the fixed seat and the piezoelectric element into silicone oil in a polarization pool;
step S40: the control unit controls the pressurizing unit to polarize the piezoelectric element on the fixed seat;
step S50: when the pressurizing unit polarizes the piezoelectric element to a first preset time length, the control unit controls the moving assembly to drive the fixed seat to move out the silicone oil;
step S60: when the fixing seat moves out of the silicone oil and the pressurizing unit continues to polarize the piezoelectric element to a second preset time length, the control unit controls the pressurizing unit to stop polarizing the piezoelectric element and take out the piezoelectric element.
Further, in step S30, step S40, and step S50, the temperature of the silicone oil in the polarization pool is: 70-150 ℃;
and/or in steps S40, S50, and S60, the voltage of the pressurizing unit on the piezoelectric element is: 20V-10000V;
and/or, in step S50, the first preset time period is: 1 min-60 min;
and/or, in step S60, the second preset time period is: 1min to 10 min.
The invention also provides a piezoelectric element polarization method, which comprises the following steps:
step S11: providing the piezoelectric element temperature-variable polarization device;
step S21: fixing the piezoelectric element on a fixed seat of the polarization component;
step S31: immersing the fixed seat and the piezoelectric element into silicone oil in a high-temperature oil bath;
step S41: the control unit controls the pressurizing unit to polarize the piezoelectric element on the fixed seat;
step S51: when the pressurizing unit polarizes the piezoelectric element in the high-temperature oil bath to a first preset time length, the control unit controls the driving piece to drive the fixed seat to move along the sliding rail and move from the silicone oil in the high-temperature oil bath to the silicone oil in the low-temperature oil bath;
step S61: and when the pressurizing unit continues to polarize the piezoelectric element in the low-temperature oil bath to a third preset time length, the control unit controls the pressurizing unit to stop polarizing the piezoelectric element and takes out the piezoelectric element.
Further, in step S31, step S41 and step S51, the silicone oil temperature of the high temperature oil bath is: 70-150 ℃;
and/or, in step S41, step S51 and step S61, the voltage of the pressurizing unit on the piezoelectric element is: 20V-10000V;
and/or, in the step S51 and the step S61, the temperature of the silicone oil of the low-temperature oil bath pool is as follows: room temperature to 70 ℃;
and/or, in step S51, the first preset duration is: 1 min-60 min;
and/or, in step S61, the third preset duration is: 1min to 10 min.
The piezoelectric element temperature-changing polarization device comprises a control assembly, a polarization pool and a polarization assembly, wherein the control assembly comprises a pressurizing unit and a control unit, and the pressurizing unit is electrically connected with the control unit; the polarization tank is used for containing silicone oil; the polarization assembly comprises a fixed seat and a movable assembly connected to the fixed seat, the pressurizing unit is electrically connected with the fixed seat, and the movable assembly is electrically connected with the control unit. According to the invention, by arranging the moving assembly, when the piezoelectric element completes polarization in the polarization pool, the pressurizing unit does not stop polarizing the piezoelectric element, the moving assembly is utilized to drive the fixing seat to move out of the silicone oil in the polarization pool, or the moving assembly is utilized to drive the fixing seat to move into the silicone oil at a lower temperature, so that the piezoelectric element is rapidly cooled; after the piezoelectric element reaches a lower temperature, the polarization of the piezoelectric element is stopped, so that the depolarization phenomenon caused by the fact that the piezoelectric element stops polarizing at a high temperature is avoided, and the piezoelectric performance loss of the piezoelectric element is favorably reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an embodiment of a temperature-variable polarization apparatus for a piezoelectric element according to the present invention;
FIG. 2 is a schematic structural diagram of another embodiment of the temperature-variable polarization apparatus for a piezoelectric element according to the present invention;
FIG. 3 is a schematic structural diagram of a fixing base according to an embodiment of the present invention;
FIG. 4 is a schematic flow chart illustrating a method for polarizing a piezoelectric element according to an embodiment of the present invention;
FIG. 5 is a schematic flow chart illustrating a polarization method of a piezoelectric device according to another embodiment of the present invention.
The reference numbers illustrate:
the implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description of "first", "second", etc. in an embodiment of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The invention provides a temperature-variable polarization device 100 of a piezoelectric element.
Referring to fig. 1 to 3, in the embodiment of the present invention, the temperature-variable polarization apparatus 100 for a piezoelectric element includes a control component 10, a polarization cell 20, and a polarization component 30. The control assembly 10 comprises a pressurizing unit 11 and a control unit 12, wherein the pressurizing unit 11 is electrically connected with the control unit 12; the polarization tank 20 is used for containing silicone oil; the polarization assembly 30 includes a fixed seat 31 and a movable assembly 32 connected to the fixed seat 31, the pressurizing unit 11 is electrically connected to the fixed seat 31, the movable assembly 32 is electrically connected to the control unit 12, and the movable assembly 32 drives the fixed seat 31 to move into or out of the silicone oil in the cavity 21.
Specifically, the polarization of the piezoelectric element is processed in two ways, one is silicon oil polarization and the other is air polarization. The polarization purpose of the piezoelectric element is to deflect the electric domain to reach the saturation polarization intensity, the domain deflection is fast under high voltage, and considering that the piezoelectric element is easy to break down under high voltage, the polarization voltage is generally reduced, the polarization time is prolonged, the polarization temperature is increased, and the domain deflection can be promoted under high temperature.
It will be appreciated that the choice of whether the polarization of the piezoelectric element is polarized by silicone oil or by air depends on the polarization voltage. For example, when the polarization voltage is high, air may be punctured to cause surface discharge, thereby damaging the sample, and the silicon oil polarization is generally adopted. The piezoelectric element temperature-changing polarization device 100 provided by the invention is used for the silicon oil polarization treatment of the piezoelectric element. The polarization tank 20 in the piezoelectric element temperature-varying polarization device 100 has a cavity 21, the cavity 21 is used for containing silicone oil, and the silicone oil has the functions of insulation, arc extinction and heat dissipation. The fixing seat 31 of the polarization component 30 is used for installing and fixing the piezoelectric element, and the moving component 32 drives the fixing seat 31 to be immersed in silicon oil for polarization, so that the piezoelectric element is prevented from being broken down and damaged when the polarization voltage is higher.
The polarization component of the existing piezoelectric element can not realize rapid cooling after the piezoelectric element completes polarization, so that the piezoelectric element is depolarized at high temperature, and certain piezoelectric performance is lost. The piezoelectric element temperature-changing polarization device 100 provided by the invention is provided with the moving component 32, and when the piezoelectric element is polarized in the polarization tank 20 and the pressurizing unit 11 does not stop polarizing the piezoelectric element, the moving component 32 is utilized to drive the fixed seat 31 to move out of the silicone oil in the cavity 21 of the polarization tank 20, or the moving component 32 is utilized to drive the fixed seat 31 to move into the silicone oil with lower temperature, so as to realize the rapid cooling of the piezoelectric element; after the piezoelectric element reaches a lower temperature, the polarization of the piezoelectric element is stopped, so that the depolarization phenomenon caused by the fact that the piezoelectric element stops polarizing at a high temperature is avoided, and the piezoelectric performance loss of the piezoelectric element is favorably reduced.
In this embodiment, the control assembly 10 may be a controller or a main control device, the control assembly 10 includes a pressurizing unit 11 and a control unit 12, and the pressurizing unit 11 is electrically connected to the fixing seat 31 of the polarization assembly 30 through a lead 40. The pressurizing unit 11 is used for pressurizing the piezoelectric element on the fixing base 31, the control unit 12 is used for controlling the pressurizing unit 11 to pressurize, boost or stop pressurizing the piezoelectric element, and in this embodiment, the control unit 12 is further used for controlling the moving assembly 32 to drive the fixing base 31 to move. It is understood that the pressurizing unit 11 and the control unit 12 may be designed integrally or may be provided separately. For example, the pressurizing unit 11 may be a pressure resistance tester having both the pressurizing unit 11 and a control unit for controlling operations such as pressurizing, boosting, or stopping the pressurizing of the piezoelectric element by the pressurizing unit 11.
It is understood that the present embodiment achieves polarization of the piezoelectric element as follows. The piezoelectric element is installed and fixed on a fixed seat 31 of a polarization assembly 30, a moving assembly 32 of the polarization assembly 30 drives the fixed seat 31 to move, so that the piezoelectric element and the fixed seat 31 are immersed in silicon oil in a cavity 21 of a polarization pool 20, and a control unit 12 controls a pressurizing unit 11 to polarize the piezoelectric element on the fixed seat 31 through a lead 40; when the piezoelectric element finishes polarization, the control unit 12 continues to control the pressurizing unit 11 to maintain polarization voltage for the piezoelectric element, at this time, the control unit 12 controls the moving assembly 32 to drive the fixing seat 31 and the piezoelectric element to move out of the silicone oil in the accommodating cavity 21, so that the piezoelectric element and the fixing seat 31 are exposed out of the silicone oil, and thus, the piezoelectric element and the fixing seat 31 can be rapidly cooled in the air; after the temperature of the piezoelectric element is reduced to be less than 70 ℃, the control unit 12 controls the pressurizing unit 11 to stop polarizing the piezoelectric element, so that the phenomenon of depolarization caused by the fact that the piezoelectric element stops polarizing at high temperature is avoided, and reduction of piezoelectric performance loss of the piezoelectric element is facilitated.
Of course, in order to further achieve the rapid temperature reduction of the piezoelectric element, the control unit 12 may further control the moving assembly 32 to drive the fixed seat 31 and the piezoelectric element to move into the silicone oil with a lower temperature, so that the piezoelectric element and the fixed seat 31 are immersed in the silicone oil with a lower temperature, and thus the rapid temperature reduction of the piezoelectric element can be achieved, which is not limited in the present invention. It should be understood that the moving assembly 32 in the present embodiment is not limited herein as long as it can be used to drive the fixing base 31 and the piezoelectric element to move. In this embodiment, the fixing base 31 may be fixedly disposed on the moving component 32, or detachably disposed on the moving component 32, so as to facilitate the mounting and dismounting of the piezoelectric element and improve the safety of the user.
Further, referring to fig. 3, in the present embodiment, the fixing base 31 is concavely provided with a groove 312, the bottom wall of the groove 312 is provided with at least two electrodes 311, and the pressurizing units 11 are respectively connected with the electrodes 311 through the wires 40.
Specifically, the fixing seat 31 is made of an insulating material, and in this embodiment, the fixing seat 31 is preferably made of a teflon insulating plate, but in order to ensure the strength of the fixing seat 31, the fixing seat 31 may be a multi-layer structure, and the multi-layer structure may be made of an insulating material, or may not be made of an insulating material. In this embodiment, a groove 312 is disposed on a side of the fixing base 31 opposite to the bottom wall of the receiving cavity 21, inner walls of the groove 312 are made of teflon insulating plates, and the electrode 311 is disposed in the groove 312, preferably, the electrode 311 is disposed on the bottom wall of the groove 312. The teflon insulating plate is beneficial to avoiding short circuit caused by mutual conduction of the plurality of electrodes 311 in the groove 312.
It is understood that the groove 312 on the fixing base 31 may be formed by direct concave machining, or a sidewall may be protruded on the periphery of the fixing base 31, and the sidewall encloses the groove 312, which is not limited herein. The groove 312 is formed in the fixed seat 31, the control unit 12 controls the moving assembly 32 to drive the fixed seat 31 and the piezoelectric element to move out of the silicon oil in the cavity 21, when the piezoelectric element and the fixed seat 31 expose the silicon oil, a small amount of silicon oil still remains in the groove 312 of the fixed seat 31, so that in the process that the temperature of the piezoelectric element is reduced to be less than 70 ℃, the piezoelectric element is not broken down and damaged when the control unit 12 controls the pressurizing unit 11 to continue to polarize the piezoelectric element. Of course, since the amount of silicone oil in the groove 312 of the fixing seat 31 is too small, the temperature of the piezoelectric element is not affected to be rapidly reduced to less than 70 ℃.
In this embodiment, a plurality of electrodes 311 are disposed in the recess 312 of the fixing base 31, and a plurality of piezoelectric elements can be polarized simultaneously. For example, each piezoelectric element may be fixed by two electrodes 311, and the two electrodes 311 are respectively connected to the pressurizing unit 11 through the wires 40, but the piezoelectric element may also be fixed by three electrodes 311, which is not limited herein. In this embodiment, in order to fix and mount the piezoelectric element better, the electrode 311 is a spring plate, or a spring plate for fixing the piezoelectric element is disposed on the electrode 311.
Further, in order to better control and prevent the piezoelectric element and the fixing base 31 from being broken down and damaged when the piezoelectric element and the fixing base are exposed from the silicone oil, referring to fig. 3, as a preferred embodiment of the present embodiment, the depth of the groove 312 is defined as d, and d is greater than or equal to 1mm and less than or equal to 50 mm. Preferably, the depth d of the groove 312 is 1mm, 2mm, 4mm, 5mm, 6mm, 8mm, 10mm, 12mm, 14mm, 15mm, 16mm, 18mm, 20mm, 22mm, 24mm, 25mm, 26mm, 28mm, 30mm, 32mm, 34mm, 35mm, 38mm, 40mm, 42mm, 45mm, 48mm, 50 mm.
Further, for more convenient polarization of the piezoelectric element, the temperature of the silicone oil in the cavity 21 of the polarization cell 20 is 70 ℃ to 150 ℃, so that for conveniently adjusting the temperature of the silicone oil in the polarization cell 20, in the present embodiment, the polarization cell 20 is provided with a heating assembly (not shown), and the heating assembly is electrically connected with the control unit 12. It is understood that the heating assembly may be integrated with the polarization cell 20, or may be separately disposed on the bottom or the side wall of the polarization cell 20. The control unit 12 may also be used to control the heating assembly to perform heating, warming or stopping heating. In this embodiment, the heating element may be a heating plate, a heating wire, a heating element, or the like, and is not limited herein. Of course, the heating assembly may be integrated with the control unit 12, and is not limited herein.
Further, in order to better control the temperature of the silicone oil in the polarization pool 20 and conveniently display and adjust the heating condition of the heating assembly, in the present embodiment, the polarization pool 20 is further provided with a temperature sensor (not shown), the temperature sensor and the heating assembly are arranged at an interval, and the temperature sensor is electrically connected with the control unit 12. It is understood that the temperature sensor may be a temperature sensing element, a thermocouple, etc., and is not limited thereto. The control unit 12 detects the temperature of the silicone oil in the polarization pool 20 according to the temperature sensor, and controls the heating assembly to adjust the temperature of the silicone oil in the polarization pool 20.
Referring to fig. 1, in an embodiment of the present invention, the polarization pool 20 is an oil bath, the moving component 32 includes a cross beam (not shown), a vertical rod (not shown), and a transmission member (not shown), the cross beam is erected at an open end of the oil bath, the cross beam is provided with a sliding hole (not shown), one end of the vertical rod is connected to the fixed base 31, the other end of the vertical rod slidably passes through the sliding hole, the transmission member is connected to the vertical rod and electrically connected to the control unit 12, and the transmission member drives the vertical rod and the fixed base 31 to move up and down along the sliding hole.
In this embodiment, the cross beam of the moving assembly 32 is used for supporting and fixing the vertical rod, and the sliding hole formed in the cross beam facilitates the driving member to drive the vertical rod to ascend and descend along the sliding hole. Specifically, the driving medium can be driving motor, and the sliding hole of crossbeam is provided with the internal thread, and the montant is provided with the external screw thread, and driving motor drive montant rotates to make the external screw thread of montant and the internal thread of crossbeam sliding hole realize sliding fit, thereby make the montant drive fixing base 31 and piezoelectric element go up and down along the sliding hole, so that fixing base 31 and piezoelectric element move into or shift out the silicon oil that holds the chamber 21.
It can be understood that the transmission component may also be a pulley block, one end of the pulley block is connected with the vertical rod, the vertical rod passes through the sliding hole of the cross beam, and the pulley block drives the vertical rod and the fixing seat 31 to ascend and descend along the sliding hole, so that the fixing seat 31 and the piezoelectric element move into or out of the silicon oil in the cavity 21. Of course, the moving assembly 32 in this embodiment may also be provided without any transmission member, and in this case, the moving assembly 32 is manually implemented to lift the fixing base 31 and the piezoelectric element along the sliding hole. Specifically, the movable assembly 32 includes a cross beam and a vertical rod, the cross beam is arranged at the open end of the oil bath, the cross beam is provided with a sliding hole, one end of the vertical rod is connected with the fixing seat 31, the other end of the vertical rod slidably penetrates through the sliding hole, the vertical rod is provided with a plurality of pin holes, and the vertical rod is fixed on the cross beam through a pin shaft. That is, when the piezoelectric element is mounted and fixed on the fixing seat 31 of the polarization assembly 30, the vertical rod is manually moved to descend along the sliding hole of the cross beam, at this time, the vertical rod drives the piezoelectric element and the fixing seat 31 to be immersed in the silicone oil in the cavity 21 of the polarization tank 20, and the control unit 12 controls the pressurizing unit 11 to polarize the piezoelectric element on the fixing seat 31 through the lead 40; when the piezoelectric element finishes polarization, the control unit 12 continues to control the pressurizing unit 11 to maintain polarization voltage for the piezoelectric element, and at the moment, the vertical rod is manually moved again to ascend along the sliding hole of the cross beam, so that the vertical rod drives the piezoelectric element and the fixing seat 31 to move out of the silicon oil in the cavity 21 of the polarization cell 20, and the piezoelectric element and the fixing seat 31 are exposed out of the silicon oil, so that the piezoelectric element and the fixing seat 31 can be rapidly cooled in the air; after the temperature of the piezoelectric element is reduced to be less than 70 ℃, the control unit 12 controls the pressurizing unit 11 to stop polarizing the piezoelectric element, so that the phenomenon of depolarization caused by the fact that the piezoelectric element stops polarizing at high temperature is avoided, and reduction of piezoelectric performance loss of the piezoelectric element is facilitated.
Referring to fig. 1, the moving assembly 32 may also be disposed on the bottom wall of the cavity 21 of the polarization cell 20, specifically, the moving assembly 32 includes a driving assembly (e.g., a driving cylinder) fixedly disposed on the bottom wall of the cavity 21 and a supporting member fixedly disposed at one end of the driving assembly, the fixing base 31 is fixedly disposed on a side of the supporting member opposite to the driving assembly, so that the driving assembly drives the supporting member to drive the fixing base 31 and the piezoelectric element to lift and lower in the cavity 21, so that the fixing base 31 and the piezoelectric element move into or out of the silicone oil in the cavity 21. Of course, the moving assembly 32 may also be other structures capable of implementing the above functions, and is not limited herein.
Referring to fig. 1, in another embodiment of the present invention, the polarization pool 20 includes a high temperature oil bath 22 and a low temperature oil bath 23 which are arranged at intervals, the moving component 32 includes a sliding rail 321 and a driving component 322, one end of the sliding rail 321 is arranged in the high temperature oil bath, the other end of the sliding rail 321 is arranged in the low temperature oil bath, the fixing base 31 is slidably engaged with the sliding rail 321, the driving component 322 is connected with the fixing base 31 and electrically connected with the control unit 12, and the driving component 322 drives the fixing base 31 to move along the sliding rail 321.
Specifically, the high-temperature oil bath 22 and the low-temperature oil bath 23 may be disposed in the cavity 21 of the polarization pool 20 at the same time, or two polarization pools 20 may be disposed respectively, one of the two polarization pools being the high-temperature oil bath 22 and the other being the low-temperature oil bath 23. In this embodiment, both the high temperature oil bath 22 and the low temperature oil bath 23 have cavities for containing silicone oil, the temperature of the silicone oil in the high temperature oil bath 22 is 70 ℃ to 150 ℃, and the temperature of the silicone oil in the low temperature oil bath 23 is less than 70 ℃. It is understood that, besides the above-mentioned structure, the moving component 32 may also be any other structure capable of moving the fixed seat 31 from the high temperature oil bath 22 to the low temperature oil bath 23, and is not limited herein.
The piezoelectric element temperature-changing polarization apparatus 100 according to the present embodiment polarizes a piezoelectric element as follows. The piezoelectric element is installed and fixed on the fixed seat 31 of the polarization assembly 30, the driving part 322 of the moving assembly 32 drives the fixed seat 31 and the piezoelectric element to move along the sliding rail 321, so that the piezoelectric element and the fixed seat 31 are immersed in the silicone oil in the high-temperature oil bath 22, and the control unit 12 controls the pressurizing unit 11 to polarize the piezoelectric element on the fixed seat 31 through the lead 40; when the piezoelectric element is polarized, the control unit 12 continues to control the pressurizing unit 11 to maintain the polarization voltage for the piezoelectric element, at this time, the driving part 322 of the moving assembly 32 drives the fixing seat 31 and the piezoelectric element to move along the sliding rail 321, so that the piezoelectric element and the fixing seat 31 are moved out of the silicone oil in the high-temperature oil bath 22 and continue to move along the sliding rail 321, so that the piezoelectric element and the fixing seat 31 are immersed in the silicone oil in the low-temperature oil bath 23, and thus, the piezoelectric element and the fixing seat 31 can realize rapid cooling in the low-temperature oil bath 23; after the temperature of the piezoelectric element is reduced to be less than 70 ℃, the control unit 12 controls the pressurizing unit 11 to stop polarizing the piezoelectric element, so that the phenomenon of depolarization caused by the fact that the piezoelectric element stops polarizing at high temperature is avoided, and reduction of piezoelectric performance loss of the piezoelectric element is facilitated.
Further, in order to polarize the piezoelectric element more conveniently so that the temperature of the silicone oil in the high temperature oil bath 22 is 70 ℃ to 150 ℃, and thus, in order to adjust the temperature of the silicone oil in the high temperature oil bath 22, in the present embodiment, the high temperature oil bath 22 is provided with a first heating element (not shown), and the first heating element is electrically connected to the control unit. It is understood that the first heating element may be integrated with the high temperature oil bath 22, or may be separately provided on the bottom or side wall of the high temperature oil bath 22. The control unit 12 may also be used to control the first heating assembly to perform heating, warming or stopping heating. In this embodiment, the first heating element may be a heating plate, a heating wire, a heating element, or the like, and is not limited herein. Of course, the first heating assembly may be integrated with the control unit 12, and is not limited herein.
It will be appreciated that in order to more conveniently polarize the piezoelectric element such that the temperature of the silicone oil in the low temperature oil bath 23 is less than 70 ℃, and thus, in order to conveniently adjust the temperature of the silicone oil in the low temperature oil bath 23, in the present embodiment, the low temperature oil bath 23 is provided with second heating elements (not shown), and the second heating elements are all electrically connected to the control unit. It is understood that the second heating element may be integrally provided with the low temperature oil bath 23, or may be separately provided at the bottom or the side wall of the low temperature oil bath 23. The control unit 12 can also be used to control the second heating assembly to perform heating, warming or stopping heating. In this embodiment, the second heating element may be a heating plate, a heating wire, a heating element, or the like, and is not limited herein. Of course, the second heating assembly may be integrated with the control unit 12, and is not limited herein. Of course, in other embodiments of the present invention, the high temperature oil bath 22 and the low temperature oil bath 23 may share one heating element, and are not limited herein.
Further, in order to better control the temperature of the silicone oil in the high temperature oil bath 22 and facilitate the display and adjustment of the heating condition of the first heating element, in the present embodiment, the high temperature oil bath 22 is provided with a first temperature sensor (not shown), and the first temperature sensor is electrically connected with the control unit 12. It is understood that the first temperature sensor may be a temperature sensing element, a thermocouple, etc., and is not limited thereto.
It will be appreciated that in order to better control the temperature of the silicone oil in the low temperature oil bath 23 and facilitate the display and adjustment of the heating of the second heating element, in this embodiment the low temperature oil bath 23 is provided with a second temperature sensor (not shown) which is electrically connected to the control unit 12. It is understood that the second temperature sensor may be a temperature sensing element, a thermocouple, etc., and is not limited thereto.
Referring to fig. 4, the present invention further provides a polarization method for a piezoelectric element. In one embodiment of the present invention, a piezoelectric element polarization method includes the steps of:
step S10: providing a piezoelectric element temperature-changing polarization device 100;
in step S10, the specific structure of the piezoelectric element temperature-varying polarization apparatus 100 refers to the above-mentioned embodiments, and since the piezoelectric element polarization method adopts all the technical solutions of all the above-mentioned embodiments, at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments are achieved, and no further description is given here.
Step S20: fixing the piezoelectric element on the fixing seat 31 of the polarization component 30;
in step S20, the piezoelectric element is fixed in the recess 312 of the fixing base 31 by at least two electrodes 311 on the fixing base 31, wherein the two electrodes 311 are electrically connected to the pressing unit 11 of the control assembly 10 through the wires 40, respectively, and the pressing unit 11 is used for pressing the piezoelectric element on the fixing base 31.
Step S30: immersing the fixed seat 31 and the piezoelectric element into the silicone oil of the polarization tank 20;
in step S30, the fixed base 31 and the piezoelectric element are driven by the moving assembly 32 to be immersed in the silicone oil in the polarization tank 20, wherein the temperature of the silicone oil in the polarization tank 20 is: 70-150 ℃.
Step S40: the control unit 12 controls the pressurizing unit 11 to polarize the piezoelectric element on the fixed seat 31;
in step S40, after the fixing base 31 and the piezoelectric element are completely immersed in the silicone oil in the polarization tank 20, the temperature of the silicone oil in the polarization tank 20 is maintained as follows: 70-150 ℃; the control unit 12 controls the pressurizing unit 11 to polarize the piezoelectric element on the fixing base 31, wherein the voltage of the pressurizing unit 11 on the piezoelectric element is: 20V-10000V. As will be understood, the control unit 12 is used to control the pressurizing, boosting or stopping of the pressurizing of the piezoelectric element by the pressurizing unit 11.
Step S50: when the pressurizing unit 11 polarizes the piezoelectric element to the first preset time length, the control unit 12 controls the moving assembly 32 to drive the fixing seat 31 to move out the silicone oil;
in step S50, the pressurizing unit 11 polarizes the piezoelectric element to a first preset time period at the temperature of the silicone oil in the polarization cell 20 of 70 ℃ to 150 ℃, where the first preset time period is: 1 min-60 min; while the control unit 12 continues to control the pressurizing unit 11 to maintain the polarization voltage for the piezoelectric element, the control unit 12 controls the moving assembly 32 to drive the fixing seat 31 to move out of the silicone oil, so that the piezoelectric element and the fixing seat 31 expose the silicone oil, thus the piezoelectric element and the fixing seat 31 can realize rapid cooling in the air, and the voltage of the pressurizing unit on the piezoelectric element at this time is: 20V-10000V.
Step S60: when the fixing seat 31 moves out of the silicone oil and the pressurizing unit 11 continues to polarize the piezoelectric element to the second preset time length, the control unit 12 controls the pressurizing unit 11 to stop polarizing the piezoelectric element, and the piezoelectric element is taken out.
In step S60, after the fixing base 31 is moved out of the silicone oil, the pressurizing unit 11 continues to polarize the piezoelectric element for a second preset time period when the voltage of the pressurizing unit on the piezoelectric element is 20V to 10000V, where the second preset time period is: 1 min-10 min; the control unit 12 controls the pressurizing unit 11 to stop polarization of the piezoelectric element and take out the piezoelectric element.
It can be understood that, in order to prevent the piezoelectric element from being depolarized at high temperature due to the polarization of the piezoelectric element being stopped at high temperature, and the piezoelectric performance of the piezoelectric element is lost, the polarization of the piezoelectric element is not stopped after the polarization is completed at high temperature, so that the piezoelectric element first removes the silicone oil from the high-temperature environment, the piezoelectric element is rapidly cooled, and the polarization of the piezoelectric element is stopped when the temperature of the piezoelectric element is reduced to less than 70 ℃. Therefore, the depolarization phenomenon caused by the fact that the piezoelectric element stops polarizing at high temperature can be avoided, and the piezoelectric performance loss of the piezoelectric element is favorably reduced.
In the present embodiment, the temperature of the silicone oil in the polarization cell 20 is: 70-150 ℃. Preferably, the temperature of the silicone oil in the polarization cell 20 is 70 ℃, 80 ℃, 90 ℃, 100 ℃, 110 ℃, 120 ℃, 130 ℃, 140 ℃ and 150 ℃. The voltage of the pressurizing unit 11 on the piezoelectric element is: 20V-10000V. The first preset duration is: 1 min-60 min; preferably, the first preset time period is 1min, 5min, 10min, 15min, 20min, 25min, 30min, 35min, 40min, 45min, 50min, 55min, 60 min. The second preset duration is: 1min to 10min, preferably, the second preset time is 1min, 2min, 3min, 4min, 5min, 6min, 7min, 8min, 9min and 10 min.
Specifically, in an embodiment, the piezoelectric element is preferably piezoelectric ceramic, a piezoelectric ceramic wafer with a diameter of 10mm and a thickness of 1mm is fixed in the groove 312 of the fixing base 31 through the electrode 311, the fixing base 31 and the piezoelectric element are immersed in silicone oil in the polarization tank 20, the temperature of the silicone oil is controlled to be 100 ℃, the control unit 12 controls the pressurizing unit 11 to boost the pressure to 3kV at a speed of 1kV/min, the piezoelectric element on the fixing base 31 is polarized, the pressure maintaining polarization is performed for 30min, the control unit 12 controls the pressurizing unit 11 to continue to maintain the polarization voltage for the piezoelectric element, the control unit 12 controls the moving assembly 32 to move the fixing base 31 and the piezoelectric element out of the silicone oil in the cavity 21 of the polarization tank 20, and after the pressure maintaining polarization is continued for 5min, the control unit 12 controls the pressurizing unit 11 to stop polarization for the piezoelectric element.
Referring to fig. 5, the present invention further provides a polarization method for piezoelectric elements. In another embodiment of the present invention, a piezoelectric element polarization method includes the steps of:
step S11: providing a piezoelectric element temperature-changing polarization device 100;
in step S11, the specific structure of the piezoelectric element temperature-varying polarization apparatus 100 refers to the above-mentioned embodiments, and since the piezoelectric element polarization method adopts all the technical solutions of all the above-mentioned embodiments, at least all the beneficial effects brought by the technical solutions of the above-mentioned embodiments are achieved, and no further description is given here.
Step S21: fixing the piezoelectric element on the fixing seat 31 of the polarization component 30;
in step S21, the piezoelectric element is fixed in the recess 312 of the fixing base 31 by at least two electrodes 311 on the fixing base 31, wherein the two electrodes 311 are electrically connected to the pressing unit 11 of the control assembly 10 through the wires 40, respectively, and the pressing unit 11 is used for pressing the piezoelectric element on the fixing base 31.
Step S31: immersing the fixed seat 31 and the piezoelectric element into the silicone oil in the high-temperature oil bath 22;
in step S31, the fixed base 31 and the piezoelectric element are driven by the moving component 32 to be immersed in the silicone oil in the high temperature oil bath 22, wherein the temperature of the silicone oil in the high temperature oil bath 22 is: 70-150 ℃.
Step S41: the control unit 12 controls the pressurizing unit 11 to polarize the piezoelectric element on the fixed seat 31;
in step S41, after the fixing base 31 and the piezoelectric element are completely immersed in the silicone oil of the high temperature oil bath 22, the temperature of the silicone oil in the high temperature oil bath 22 is maintained at: 70-150 ℃; the control unit 12 controls the pressurizing unit 11 to polarize the piezoelectric element on the fixing base 31, wherein the voltage of the pressurizing unit 11 on the piezoelectric element is: 20V-10000V. As will be understood, the control unit 12 is used to control the pressurizing, boosting or stopping of the pressurizing of the piezoelectric element by the pressurizing unit 11.
Step S51: when the pressurizing unit 11 polarizes the piezoelectric element in the high-temperature oil bath 22 to a first preset time length, the control unit 12 controls the driving element to drive the fixing seat 31 to move along the sliding rail and move from the silicone oil in the high-temperature oil bath 22 to the silicone oil in the low-temperature oil bath 23;
in step S51, the pressurizing unit 11 polarizes the piezoelectric element at the temperature of the silicone oil in the high-temperature oil bath 22 of 70 ℃ to 150 ℃ for a first preset time period, wherein the first preset time period is: 1 min-60 min; while the control unit 12 continues to control the pressurizing unit 11 to maintain the polarization voltage on the piezoelectric element, the control unit 12 controls the driving unit 322 to drive the fixing base 31 to move along the sliding rail 321, and move from the silicone oil in the high temperature oil bath 22 to the silicone oil in the low temperature oil bath 23, so that the piezoelectric element and the fixing base 31 can achieve rapid cooling in the low temperature oil bath 23, where the voltage of the pressurizing unit on the piezoelectric element is: 20V-10000V, and the silicone oil temperature of the low-temperature oil bath pool 23 is as follows: room temperature to 70 ℃.
Step S61: when the pressurizing unit 11 continues to polarize the piezoelectric element in the low-temperature oil bath 23 to a third preset time length, the control unit 12 controls the pressurizing unit 11 to stop polarizing the piezoelectric element and take out the piezoelectric element.
In step S61, the pressurizing unit 11 continues to polarize the piezoelectric element for a third preset time period at a voltage of the pressurizing unit on the piezoelectric element of 20V to 10000V and a temperature of the silicone oil in the low-temperature oil bath 23 of room temperature to 70 ℃, wherein the third preset time period is: 1 min-10 min; the control unit 12 controls the pressurizing unit 11 to stop polarization of the piezoelectric element and take out the piezoelectric element.
It can be understood that, in order to prevent the piezoelectric element from being depolarized at high temperature due to the polarization of the piezoelectric element being stopped at high temperature, and the piezoelectric performance of the piezoelectric element is lost, the invention adopts the method that after the polarization is completed at high temperature, the polarization of the piezoelectric element is not stopped, so that the piezoelectric element is firstly moved from the high-temperature silicone oil environment to the low-temperature silicone oil environment, and the piezoelectric element is rapidly cooled, and when the temperature of the piezoelectric element is reduced to less than 70 ℃, the polarization of the piezoelectric element is stopped. Therefore, the depolarization phenomenon caused by the fact that the piezoelectric element stops polarizing at high temperature can be avoided, and the piezoelectric performance loss of the piezoelectric element is favorably reduced.
In this example, the silicone oil temperature in the high temperature oil bath 22 is: 70-150 ℃; preferably, the temperature of the silicone oil in the high temperature oil bath 22 is 70 ℃, 80 ℃, 90 ℃, 100 ℃, 110 ℃, 120 ℃, 130 ℃, 140 ℃ and 150 ℃. The voltage of the pressurizing unit 11 on the piezoelectric element is: 20V-10000V. The first preset duration is: 1 min-60 min; preferably, the first preset time period is 1min, 5min, 10min, 15min, 20min, 25min, 30min, 35min, 40min, 45min, 50min, 55min, 60 min. The silicone oil temperature in the low temperature oil bath 23 is: room temperature to 70 ℃. Preferably, the silicone oil temperature in the low temperature oil bath 23 is 20 ℃, 30 ℃, 40 ℃, 45 ℃, 50 ℃, 55 ℃, 60 ℃, 65 ℃ and 70 ℃. The third preset duration is: 1-10 min, preferably, the second preset time is 1min, 2min, 3min, 4min, 5min, 6min, 7min, 8min, 9min, 10 min.
Specifically, in a preferred embodiment, the piezoelectric element is preferably piezoelectric ceramic, a piezoelectric ceramic wafer with a diameter of 10mm and a thickness of 1mm is fixed in the groove 312 of the fixed seat 31 through the electrode 311, the fixed seat 31 and the piezoelectric element are immersed in silicone oil in the high-temperature oil bath 22, the temperature of the silicone oil is controlled to be 100 ℃, the control unit 12 controls the pressurizing unit 11 to boost the pressure to 3kV at a speed of 1kV/min, the piezoelectric element on the fixed seat 31 is polarized, and the pressure maintaining polarization is performed for 30 min; while the control unit 12 controls the pressurizing unit 11 to continue to maintain the polarization voltage for the piezoelectric element, the control unit 12 controls the driving member 322 to drive the fixing base 31 to move along the sliding rail 321, and move from the silicone oil in the high-temperature oil bath 22 to the silicone oil in the low-temperature oil bath 23, controls the temperature of the low-temperature oil bath 23 to be 50 ℃, and after continuing to maintain the pressure and polarize for 5min, the control unit 12 controls the pressurizing unit 11 to stop polarizing the piezoelectric element.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A temperature-variable polarization device for a piezoelectric element, comprising:
the control assembly comprises a pressurizing unit and a control unit, and the pressurizing unit is electrically connected with the control unit;
the polarization tank is used for containing silicone oil; and
the piezoelectric element fixing device comprises a polarization assembly, wherein the polarization assembly comprises a fixing seat and a moving assembly connected to the fixing seat, a groove is formed in the fixing seat in a concave mode, at least two electrodes are arranged on the bottom wall of the groove, a pressurizing unit is connected with the electrodes through leads respectively, spring pieces used for fixing piezoelectric elements are arranged on the electrodes, the moving assembly is electrically connected with a control unit, and the moving assembly drives the fixing seat to move into or out of silicon oil in a containing cavity.
2. The temperature-variable polarization device of piezoelectric element according to claim 1, wherein the depth of said recess is defined as d, d is 1mm or more and 50mm or less.
3. The piezoelectric element temperature-changing polarization device according to claim 1, wherein the polarization cell is provided with a heating element, and the heating element is electrically connected with the control unit.
4. The temperature-variable polarization device according to claim 3, wherein said polarization cell further comprises a temperature sensor, said temperature sensor is spaced apart from said heating element, and said temperature sensor is electrically connected to said control unit.
5. The temperature-variable polarization device according to any one of claims 1 to 4, wherein said polarization pool is an oil bath, said movable member comprises a cross member, a vertical member and a transmission member, said cross member is erected at the open end of said oil bath, said cross member is formed with a sliding hole, one end of said vertical member is connected to said fixed base, the other end of said vertical member slidably passes through said sliding hole, said transmission member is connected to said vertical member and electrically connected to said control unit, said transmission member drives said vertical member and said fixed base to move up and down along said sliding hole.
6. The temperature-variable polarization apparatus for piezoelectric elements according to claim 1 or 2, wherein said polarization cells comprise a high temperature oil bath and a low temperature oil bath which are spaced apart from each other, said movable assembly comprises a slide rail and a driving member, one end of said slide rail is disposed in said high temperature oil bath, the other end of said slide rail is disposed in said low temperature oil bath, said fixing seat is slidably engaged with said slide rail, said driving member is connected to said fixing seat and electrically connected to said control unit, and said driving member drives said fixing seat to move along said slide rail.
7. The piezoelectric element temperature-varying polarization device according to claim 6, wherein said high temperature oil bath is provided with a first heating element, said low temperature oil bath is provided with a second heating element, and both said first heating element and said second heating element are electrically connected to said control unit;
and/or the high-temperature oil bath is provided with a first temperature sensor which is electrically connected with the control unit;
and/or a second temperature sensor is also arranged in the low-temperature oil bath and is electrically connected with the control unit.
8. A piezoelectric element polarization method comprising the steps of:
step S10: providing a piezoelectric element temperature-changing polarization device as claimed in any one of claims 1 to 5;
step S20: fixing the piezoelectric element on a fixed seat of the polarization component;
step S30: immersing the fixed seat and the piezoelectric element into silicone oil in a polarization pool;
step S40: the control unit controls the pressurizing unit to polarize the piezoelectric element on the fixed seat;
step S50: when the pressurizing unit polarizes the piezoelectric element to a first preset time length, the control unit controls the moving assembly to drive the fixed seat to move out the silicone oil;
step S60: when the fixing seat moves out of the silicone oil and the pressurizing unit continues to polarize the piezoelectric element to a second preset time length, the control unit controls the pressurizing unit to stop polarizing the piezoelectric element and take out the piezoelectric element.
9. The piezoelectric element polarizing method according to claim 8,
in step S30, step S40, and step S50, the temperature of the silicone oil in the polarization pool is: 70-150 ℃;
and/or in steps S40, S50, and S60, the voltage of the pressurizing unit on the piezoelectric element is: 20V-10000V;
and/or, in step S50, the first preset time period is: 1 min-60 min;
and/or, in step S60, the second preset time period is: 1min to 10 min.
10. A piezoelectric element polarization method comprising the steps of:
step S11: providing a piezoelectric element temperature-changing polarization device according to claim 6 or 7;
step S21: fixing the piezoelectric element on a fixed seat of the polarization component;
step S31: immersing the fixed seat and the piezoelectric element into silicone oil in a high-temperature oil bath;
step S41: the control unit controls the pressurizing unit to polarize the piezoelectric element on the fixed seat;
step S51: when the pressurizing unit polarizes the piezoelectric element in the high-temperature oil bath to a first preset time length, the control unit controls the driving piece to drive the fixed seat to move along the sliding rail and move from the silicone oil in the high-temperature oil bath to the silicone oil in the low-temperature oil bath;
step S61: and when the pressurizing unit continues to polarize the piezoelectric element in the low-temperature oil bath to a third preset time length, the control unit controls the pressurizing unit to stop polarizing the piezoelectric element and takes out the piezoelectric element.
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