CN109019505A - 一种同轴mems微镜及其制备方法 - Google Patents
一种同轴mems微镜及其制备方法 Download PDFInfo
- Publication number
- CN109019505A CN109019505A CN201810796901.4A CN201810796901A CN109019505A CN 109019505 A CN109019505 A CN 109019505A CN 201810796901 A CN201810796901 A CN 201810796901A CN 109019505 A CN109019505 A CN 109019505A
- Authority
- CN
- China
- Prior art keywords
- micro mirror
- coaxial
- frame
- mems micromirror
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00095—Interconnects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810796901.4A CN109019505A (zh) | 2018-07-19 | 2018-07-19 | 一种同轴mems微镜及其制备方法 |
Applications Claiming Priority (1)
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CN201810796901.4A CN109019505A (zh) | 2018-07-19 | 2018-07-19 | 一种同轴mems微镜及其制备方法 |
Publications (1)
Publication Number | Publication Date |
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CN109019505A true CN109019505A (zh) | 2018-12-18 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201810796901.4A Pending CN109019505A (zh) | 2018-07-19 | 2018-07-19 | 一种同轴mems微镜及其制备方法 |
Country Status (1)
Country | Link |
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CN (1) | CN109019505A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111551761A (zh) * | 2020-04-03 | 2020-08-18 | 四川知微传感技术有限公司 | 一种低噪声mems加速度计 |
CN111762751A (zh) * | 2020-07-06 | 2020-10-13 | 瑞声声学科技(深圳)有限公司 | Mems导电件以及导电镀层的制备方法 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1375721A (zh) * | 2001-03-02 | 2002-10-23 | 三星电子株式会社 | 微型镜驱动器以及控制微型镜驱动器的方法 |
CN1417615A (zh) * | 2001-08-24 | 2003-05-14 | 三星电子株式会社 | 光学扫描头及其制造方法 |
KR20040074477A (ko) * | 2003-02-19 | 2004-08-25 | (주) 인텔리마이크론즈 | 2 자유도 스캐닝 미러 및 그 제조 방법 |
US20040263938A1 (en) * | 2003-06-24 | 2004-12-30 | Samsung Electronics Co., Ltd. | Optical scanner with curved mirror and method of manufacturing the same |
JP2006293235A (ja) * | 2005-04-14 | 2006-10-26 | Konica Minolta Holdings Inc | 光偏向器 |
KR20060121536A (ko) * | 2005-05-24 | 2006-11-29 | 삼성전자주식회사 | 진동형 멀티 빔편향기 |
US7342346B2 (en) * | 2003-06-06 | 2008-03-11 | The Regents Of The University Of California | Microfabricated vertical comb actuator using plastic deformation |
CN101876547A (zh) * | 2009-12-08 | 2010-11-03 | 北京大学 | 一种采用静电平衡梳齿驱动器的水平轴微机械音叉陀螺 |
CN103086316A (zh) * | 2011-10-28 | 2013-05-08 | 中国科学院上海微***与信息技术研究所 | Mems垂直梳齿微镜面驱动器的制作方法 |
US8553307B2 (en) * | 2011-12-22 | 2013-10-08 | Chung-Shan Institute of Science and Technology, Armaments, Bureau, Ministry of National Defense | Double-projection apparatus |
CN105353506A (zh) * | 2015-12-18 | 2016-02-24 | 中国电子科技集团公司第十三研究所 | 垂直梳齿驱动moems微镜及其制作方法 |
-
2018
- 2018-07-19 CN CN201810796901.4A patent/CN109019505A/zh active Pending
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1375721A (zh) * | 2001-03-02 | 2002-10-23 | 三星电子株式会社 | 微型镜驱动器以及控制微型镜驱动器的方法 |
CN1417615A (zh) * | 2001-08-24 | 2003-05-14 | 三星电子株式会社 | 光学扫描头及其制造方法 |
KR20040074477A (ko) * | 2003-02-19 | 2004-08-25 | (주) 인텔리마이크론즈 | 2 자유도 스캐닝 미러 및 그 제조 방법 |
US7342346B2 (en) * | 2003-06-06 | 2008-03-11 | The Regents Of The University Of California | Microfabricated vertical comb actuator using plastic deformation |
US20040263938A1 (en) * | 2003-06-24 | 2004-12-30 | Samsung Electronics Co., Ltd. | Optical scanner with curved mirror and method of manufacturing the same |
JP2006293235A (ja) * | 2005-04-14 | 2006-10-26 | Konica Minolta Holdings Inc | 光偏向器 |
KR20060121536A (ko) * | 2005-05-24 | 2006-11-29 | 삼성전자주식회사 | 진동형 멀티 빔편향기 |
CN101876547A (zh) * | 2009-12-08 | 2010-11-03 | 北京大学 | 一种采用静电平衡梳齿驱动器的水平轴微机械音叉陀螺 |
CN103086316A (zh) * | 2011-10-28 | 2013-05-08 | 中国科学院上海微***与信息技术研究所 | Mems垂直梳齿微镜面驱动器的制作方法 |
US8553307B2 (en) * | 2011-12-22 | 2013-10-08 | Chung-Shan Institute of Science and Technology, Armaments, Bureau, Ministry of National Defense | Double-projection apparatus |
CN105353506A (zh) * | 2015-12-18 | 2016-02-24 | 中国电子科技集团公司第十三研究所 | 垂直梳齿驱动moems微镜及其制作方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111551761A (zh) * | 2020-04-03 | 2020-08-18 | 四川知微传感技术有限公司 | 一种低噪声mems加速度计 |
CN111551761B (zh) * | 2020-04-03 | 2021-11-30 | 四川知微传感技术有限公司 | 一种低噪声mems加速度计 |
CN111762751A (zh) * | 2020-07-06 | 2020-10-13 | 瑞声声学科技(深圳)有限公司 | Mems导电件以及导电镀层的制备方法 |
CN111762751B (zh) * | 2020-07-06 | 2022-01-07 | 瑞声声学科技(深圳)有限公司 | Mems导电件以及导电镀层的制备方法 |
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Address after: 214000 Jiangsu province Binhu District of Wuxi City Liyuan Development Zone 06-4 block (DiCui Road No. 100) 9 Building 2 layer Applicant after: ZHONGKEXIN INTEGRATED CIRCUIT Co.,Ltd. Address before: 214000 Jiangsu province Binhu District of Wuxi City Liyuan Development Zone 06-4 block (DiCui Road No. 100) 9 Building 2 layer Applicant before: CHINA KEY SYSTEM & INTEGRATED CIRCUIT Co.,Ltd. |
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TA01 | Transfer of patent application right |
Effective date of registration: 20200513 Address after: 214000 No.19, Erquan East Road, Xishan District, Wuxi City, Jiangsu Province Applicant after: Wuxi micro vision sensor technology Co.,Ltd. Address before: 214000 Jiangsu province Binhu District of Wuxi City Liyuan Development Zone 06-4 block (DiCui Road No. 100) 9 Building 2 layer Applicant before: ZHONGKEXIN INTEGRATED CIRCUIT Co.,Ltd. |
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RJ01 | Rejection of invention patent application after publication | ||
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Application publication date: 20181218 |