CN109001226A - A kind of integrated disk process equipment of semiconductor - Google Patents
A kind of integrated disk process equipment of semiconductor Download PDFInfo
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- CN109001226A CN109001226A CN201810477784.5A CN201810477784A CN109001226A CN 109001226 A CN109001226 A CN 109001226A CN 201810477784 A CN201810477784 A CN 201810477784A CN 109001226 A CN109001226 A CN 109001226A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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Abstract
The invention discloses a kind of semiconductors to integrate disk process equipment, including the first housing, the regulating device being set on the first housing, zygomorphism is set to the running gear in the regulating device, it is set to the photovoltaic devices of the running gear upper end, the detection device being set on rear side of the running gear and the labelling apparatus being set in the detection device, the regulating device include zygomorphism be set to that in the first housing and port is respectively facing the left and right sides slide chamber, it is described slide it is intracavitary be provided with can control slide and one end extend exit port outside slide column, the outer end for sliding column is fixedly connected with the second housing, the first successive chunk is provided between the second housing of zygomorphism setting and on the upside of the first housing, it is rotatably assorted on the left and right sides end face of first successive chunk and is connected with One connective pole.
Description
Technical field
The present invention relates to integrated disk processing technique field, specifically a kind of semiconductor integrates disk process equipment.
Background technique
It integrates and is frequently necessary in disk process using Laser Detecting Set to being carried out inside integrated disk in semiconductor
Detection see whether requisite quality, laser detector Setting pattern currently used in the market is more single, needs by manpower
Pushing meanss are advanced on integrated disk, and such detection efficiency is just very low, have seriously affected processing efficiency.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of semiconductors to integrate disk process equipment, is able to solve
State the problems in present technology.
The present invention is achieved through the following technical solutions: a kind of semiconductor of the invention integrates disk process equipment,
The row being set to including the first housing, the regulating device being set on the first housing, zygomorphism in the regulating device
Walking apparatus, the photovoltaic devices for being set to the running gear upper end, the detection device being set on rear side of the running gear and
The labelling apparatus being set in the detection device, the regulating device include zygomorphism be set in the first housing and
What port was respectively facing the left and right sides slides chamber, it is described slide it is intracavitary be provided with to control slide and one end extends outside exit port
Slide column, the outer end for sliding column is fixedly connected with the second housing, between the second housing of zygomorphism setting and position
It is provided with the first successive chunk on the upside of the first housing, be rotatably assorted connection on the left and right sides end face of first successive chunk
There is the first connective pole, first connective pole of zygomorphism setting is rotatably assorted respectively far from one end of first successive chunk
It is connected on the opposite side end face of the second housing, the column that slides is far from fixed on a side end face of the second housing
It is provided with the first fixed block, described slide of zygomorphism setting is provided with the first cavity, sets in the first housing between chamber
It is equipped with and leads to first cavity and second cavity for sliding chamber, by the between the front and back side inner wall of first cavity
One shaft, which is rotatably assorted, is connected with the first reel, and the first drawstring is arranged on first reel, first drawstring
One end is fixedly connected on first fixed block, and it is solid to be fixedly installed second for the medium position of end face on the upside of the first housing
Determine block, first turn of chamber be provided in second fixed block, first is provided in the upper inside walls of first turn of chamber and leads to hole,
The first driving machine is fixedly installed in the right side inner wall of first turn of chamber, the left end of first driving machine passes through shaft power
It is connected with the second reel, second reel is rotatably assorted with first turn of chamber and connect, is connected by power in described
Be provided with the first sealing ring between the shaft of first driving machine left end and the inner left wall of first turn of chamber, the volume Two around
Be arranged with the second drawstring on wheel, the upper end of second drawstring extend through described first lead to hole secure fit be connected to it is described
On the downside end face of first successive chunk, the running gear includes being set to the first caveli in the second housing, and described the
Front and back penetrates through on the downside inner wall of one caveli and what is interlinked is provided with the first driver slot, is provided in first caveli
Be rotatably assorted the first traveling wheel being connected on the first caveli left and right sides inner wall by the second shaft, first recess
Chamber is provided with the first tooth form in first installation cavity far from the first installation cavity is provided in the side inner wall of the first housing
Wheel, first toothed wheel, which passes through second shaft that extends in first installation cavity and is rotatably assorted, is connected to described the
Between the left and right sides inner wall of one installation cavity, on the upside of first toothed wheel and be located in first installation cavity be provided with it is described
The second toothed wheel that first toothed wheel is cooperatively connected, second toothed wheel are cooperatively connected by third shaft power and are set in fixation
It sets in the second driving machine in the second installation cavity wall.
The detection device includes first be set in the second housing back end surface as a preferred technical solution,
Slide slot, is provided with first port slot on the rear side inner wall of first slide slot, in the downside inner wall of first slide slot
Be fixedly installed third driving machine, the upper end power of the third driving machine be connected with upper end be rotatably assorted be connected to it is described
The first screw rod in first slide slot upper inside walls, being provided in first slide slot can slide up and down and with described first
The first sliding block that screw rod is cooperatively connected, the second housing rear side are provided with frame in succession, are provided with end in the frame in succession
Mouth the second slide slot forwards is provided with second port slot, second slide slot in the upper inside walls of second slide slot
Downside inner wall in be fixedly installed the 4th driving machine, the 4th driving machine upper end power is connected with upper end and is rotatably assorted
The second screw rod being connected in the first slide slot upper inside walls, be provided in second slide slot can slide up and down and
The second sliding block being cooperatively connected with second screw rod, is provided with second between the second housing and the frame in succession and connects
Even block, being fixedly connected between the second successive chunk front end face and the first sliding block back end surface can be described first
The first guide block slided up and down in port slot, between the second successive chunk back end surface and the second sliding block front end face
It is fixedly connected with the second guide block, detection block is fixedly connected with by column in succession on the downside end face of second successive chunk, it is described
In detection block left and right perforation be provided with port it is downward lead to chamber, it is fixed in the upper inside walls for leading to chamber and front and back side inner wall
Be provided with laser detection head, the present apparatus can by decline the detection block by integrated disk protrude into described in lead to it is intracavitary in turn
Detection flaw detection is carried out to integrated disk by the laser detection head.
The photovoltaic devices include being set in the second housing and port is upward the as a preferred technical solution,
One end oral cavity is fixedly installed the 5th driving machine, the intracavitary rotation of first port in the downside inner wall in the first end oral cavity
It is equipped with switch block, the downside end face of the switch block is cooperatively connected by shaft power in the upper end of the 5th driving machine,
The upward second end oral cavity in port is provided in the switch block, the left end of inner wall is fixedly connected with peace on the downside of the second end oral cavity
Block is filled, the 6th driving machine is fixedly installed in the rotational installation block, is provided with and is fixedly connected on the right side of the 6th driving machine
Third successive chunk on the downside of the second end oral cavity on inner wall, the right end power of the 6th driving machine are connected with right end and turn
It is dynamic to be cooperatively connected in being connected with lower end surface and institute on the third screw rod in the third successive chunk, the third screw rod
State the first guide block that inner wall on the downside of second end oral cavity slides mating connection, the second end oral cavity on the downside of the third screw rod
Downside inner wall on be provided with the upward guide cavity in port, the lower end of first guide block is fixedly connected with can be left in the guide cavity
The right end of the second guide block that the right side is slided, second end oral cavity downside inner wall is fixedly connected with the 4th successive chunk, the second end
Stand is provided in oral cavity, the right end of end face is rotatably assorted by hinge on the downside of the stand is connected to the 4th successive chunk
Upper end is rotatably assorted on the downside end face of the stand and is connected with the second connective pole, and the lower end rotation of second connective pole is matched
The upper end for being connected to first guide block is closed, is fixedly installed photovoltaic panel on the upside end face of the stand.
As a preferred technical solution, the labelling apparatus include the coatings tank being set in second successive chunk and
It is fixedly connected on the tag block on the downside of second successive chunk on end face, is provided with siphunculus, the coatings tank in the tag block
It is interlinked with the siphunculus by pipe in succession, is fixedly installed the first check valve in the inside pipe wall in succession, under the siphunculus
End is provided with second one-way valve at port, and hydraulic cylinder is fixedly installed in the upper inside walls of the siphunculus, is matched in the hydraulic cylinder
Conjunction is connected with hydraulic stem, and the lower end secure fit of the hydraulic stem is connected with the piston that mating connection is slided with the siphunculus inner wall
Block.
Third body, the third are fixedly connected in the back end surface of frame in succession as a preferred technical solution,
The second caveli is provided in body, front and back perforation is provided with downward second in port in the downside inner wall of second caveli
Driver slot is rotatably assorted between the front and back side inner wall of second caveli by shaft and is connected with the second traveling wheel.
The front end of the first rotating shaft extends forward the front end face of the first housing out as a preferred technical solution,
Outside and it is fixedly connected with disk body, the right end of the disk body front end face is fixedly connected with wind.
The first cushion, institute are fixedly installed on the downside end face of first successive chunk as a preferred technical solution,
It states and is fixedly installed the second cushion on the upside end face of the second fixed block, first cushion is lined with second buffering
Benefit and buffering when reducing first successive chunk decline with second fixed block.
It is fixedly installed third cushion on the upside end face of the mounting blocks as a preferred technical solution, described
Three cushions can reduce the stand and downwardly turn over to buffering when being in contact with the mounting blocks.
Battery, the battery and the photovoltaic is fixedly installed in the second housing as a preferred technical solution,
Plate is electrically connected and then stores the electric energy that the photovoltaic panel is converted.
The beneficial effects of the present invention are: the configuration of the present invention is simple, easy to operate, integrated disk detection is carried out by the present apparatus
When, the first driving machine starting, and then drive volume Two to rotate around wheel by shaft, and then by the second drawstring winding, at this time first
Successive chunk is moved down by the pulling force effect of the second drawstring, and then pushes the rotation of the first connective pole, and then drive zygomorphism
The second housing of setting is located remotely from each other to the state of same size with integrated disk, at this time staff the present apparatus can be placed with
On integrated disk, and integrated disk and the first traveling wheel and the second traveling wheel is kept to abut against state, wherein by left and right settings
Detection device contraction can reduce storage space and convenient transportation, at this time the second driving machine rotate, and then pass through third shaft
It drives the second toothed wheel to rotate, and then is connect by the second toothed wheel with the engagement of the first toothed wheel and drive the first tooth form rotation
It is dynamic, and then drive the first walking rotation dynamic by the second shaft, and then driving device advances on integrated disk, in this process
In, the 6th driving machine rotation, and then by third screw rod drive the first guide block move right, and then promotion the second connective pole to
Upper overturning, and then push stand to be flipped up by the second connective pole, the 5th driving machine rotates at this time, and then is driven by shaft
Switch block rotation drives stand to be directed at the sun to greatest extent by the 5th driving machine with the cooperation of the 6th driving machine rotation at this time
Light, while third driving machine starts simultaneously with the 4th driving machine, and then is driven respectively by the first screw rod and the second screw rod
First sliding block is moved down with the second sliding block, and then the second successive chunk is driven to move down, and then drives detection block downward
Mobile and protrude into integrated disk and lead to intracavitary, can detect integrated disk by laser detection head in advancement at this time be
It is no to have damage, when detect integrated disk damage when, hydraulic cylinder starting, and then by hydraulic stem drive piston block in siphunculus to
It lower extruding coating and then disk is integrated to the section is marked, in the process, the first closed check valve the when piston block declines
The conducting of two check valves, at this time can squeeze out the coating in siphunculus, and when piston block rises, second one-way valve closes the first check valve
Conducting, the coating in coatings tank can prepare label next time and then pipe in succession enters in siphunculus at this time, pass through the present apparatus pair
Integrated disk, which is detected, not only accelerates detection efficiency, saves manpower, at the same the present apparatus also have the characteristics that it is small in size,
When detecting that integrated disk damages, the present apparatus, which can also be marked the position for occurring damaging and record, facilitates later period work
It is handled as personnel.
Detailed description of the invention
The present invention is described in detail by following specific embodiments and drawings for ease of explanation,.
Fig. 1 is the schematic diagram of internal structure that a kind of semiconductor of the invention integrates disk process equipment；
Fig. 2 is the right view of the present apparatus；
Fig. 3 is the enlarged diagram of " A " in Fig. 1；
Fig. 4 is the enlarged diagram of " B " in Fig. 1；
Fig. 5 is the enlarged diagram of " C " in Fig. 2.
Specific embodiment
As Figure 1-Figure 5, a kind of semiconductor of the invention integrates disk process equipment, including the first housing 29, setting
The running gear that is set in the regulating device in the regulating device on the first housing 29, zygomorphism is set to institute
It states the photovoltaic devices of running gear upper end, the detection device being set on rear side of the running gear and is set to the detection dress
The labelling apparatus set, the regulating device include that zygomorphism is set in the first housing 29 and port is respectively facing a left side
Chamber 31 is slided in right two sides, it is described slide to be provided with to control in chamber 31 slide and one end extends outside exit port and slides column 32,
The outer end for sliding column 32 is fixedly connected with the second housing 11, between the second housing 11 of zygomorphism setting and is located at
It is provided with the first successive chunk 53 on the upside of the first housing 29, is rotatably assorted on the left and right sides end face of first successive chunk 53
It is connected with the first connective pole 51, the one end point of first connective pole 51 of zygomorphism setting far from first successive chunk 53
It is not rotatably assorted on the opposite side end face for being connected to the second housing 11, the column 32 that slides is far from the second housing 11
A side end face on be fixedly installed the first fixed block 33, described slide of zygomorphism setting is provided with the first chamber between chamber 31
Body 36 is provided in the first housing 29 and leads to first cavity 36 and second cavity 35 for sliding chamber 31, described
It is rotatably assorted between the front and back side inner wall of second cavity 35 by first rotating shaft 39 and is connected with the first reel 37, the first volume
It is arranged with the first drawstring 34 on wheel 37, one end of first drawstring 34 is fixedly connected on first fixed block 33, institute
The medium position for stating 29 upside end face of the first housing is fixedly installed the second fixed block 42, is provided in second fixed block 42
First turn of chamber 43 is provided with first in the upper inside walls of first turn of chamber 43 and leads to hole 45, the right side of first turn of chamber 43
The first driving machine 48 is fixedly installed in inner wall, the left end of first driving machine 48 is connected with second by shaft power
Reel 46, second reel 46 are rotatably assorted with first turn of chamber 43 and connect, and are connected by power in first driving
The first sealing ring 47, second reel are provided between the shaft of 48 left end of machine and the inner left wall of first turn of chamber 43
The second drawstring 49 is arranged on 46, the upper end of second drawstring 49 extends through described first and leads to the connection of 45 secure fit of hole
In on the downside end face of first successive chunk 53, the running gear includes being set to the first recess in the second housing 11
Chamber 27, front and back perforation and what is interlinked be provided with the first driver slot 72 on the downside inner wall of first caveli 27, described the
It it is provided with the second shaft 26 in one caveli 27 is rotatably assorted and be connected on the 27 left and right sides inner wall of the first caveli
First traveling wheel 28, first caveli 27 are provided with the first installation cavity in the side inner wall far from the first housing 29
21, the first toothed wheel 25 is provided in first installation cavity 21, first toothed wheel 25 is by extending into first peace
Second shaft 26 behaveing affectedly in 21 is rotatably assorted between the left and right sides inner wall for being connected to first installation cavity 21, and described
On the upside of one toothed wheel 25 and it is located at second for being provided in first installation cavity 21 and being cooperatively connected with first toothed wheel 25
Toothed wheel 22, second toothed wheel 22 are cooperatively connected by 23 power of third shaft in being fixed at second installation cavity
In the second driving machine 24 in 21 inner walls.
Valuably, the detection device includes the first slide slot 75 being set in 11 back end surface of the second housing,
It is provided with first port slot 76 on the rear side inner wall of first slide slot 75, consolidates in the downside inner wall of first slide slot 75
Surely it is provided with third driving machine 73, the upper end power of the third driving machine 73, which is connected with upper end and is rotatably assorted, is connected to institute
State the first screw rod 74 in 75 upper inside walls of the first slide slot, be provided in first slide slot 75 can slide up and down and with
The first sliding block 77 that first screw rod 74 is cooperatively connected is provided with frame 93 in succession on rear side of the second housing 11, described
Port the second slide slot 94 forwards is provided in frame 93 in succession, is provided with second in the upper inside walls of second slide slot 94
Port slot 96 is fixedly installed the 4th driving machine 97, the 4th driving machine 97 in the downside inner wall of second slide slot 94
Upper end power is connected with upper end and is rotatably assorted the second screw rod 90 being connected in 75 upper inside walls of the first slide slot,
The second sliding block 95 that can be slided and be cooperatively connected up and down with second screw rod 90 is provided in second slide slot 94,
Be provided with the second successive chunk 79 between the second housing 11 and the frame in succession 93,79 front end face of the second successive chunk with
Can slide up and down in the first port slot 76 first is fixedly connected between first sliding block, 77 back end surface to lead
Block 78 is fixedly connected with the second guide block between second successive chunk, 79 back end surface and 95 front end face of the second sliding block
92, detection block 105, the detection block 105 are fixedly connected with by column 81 in succession on the downside end face of second successive chunk 79
Interior left and right perforation be provided with port it is downward lead to chamber 103, it is fixed in the upper inside walls for leading to chamber 103 and front and back side inner wall
Be provided with laser detection head 104, the present apparatus can by decline the detection block 105 by integrated disk protrude into described in lead to chamber
Detection flaw detection is carried out to integrated disk in 103 and then by the laser detection head 104.
Valuably, the photovoltaic devices include being set to the first end oral cavity that the second housing 11 is interior and port is upward
54, the 5th driving machine 58, rotation in the first end oral cavity 54 are fixedly installed in the downside inner wall in the first end oral cavity 54
It is equipped with switch block 56, the downside end face of the switch block 56 is cooperatively connected by shaft power in the 5th driving machine 58
Upper end is provided with the upward second end oral cavity 65 in port, the left end of the 65 downside inner wall of second end oral cavity in the switch block 56
Mounting blocks 63 are fixedly connected with, the 6th driving machine 62, the 6th driving machine 62 are fixedly installed in the rotational installation block 63
Right side is provided with the third successive chunk 57 being fixedly connected on the 65 downside inner wall of second end oral cavity, the 6th driving machine 62
Right end power be connected with right end and be rotatably assorted the third screw rod 66 being connected in the third successive chunk 57, described
It is connected with lower end surface on three screw rods 66 and the 65 downside inner wall of second end oral cavity slides the first guide block of mating connection
67, the upward guide cavity 61 in port is provided on the downside inner wall in the second end oral cavity 65 of 66 downside of the third screw rod,
The lower end of first guide block 67 is fixedly connected with the second guide block that can be slided in the guide cavity 61 or so, the second port
The right end of 65 downside inner wall of chamber is fixedly connected with the 4th successive chunk 55, and stand 71 is provided in the second end oral cavity 65, described
The right end of 71 downside end face of stand is rotatably assorted by hinge is connected to the upper end of the 4th successive chunk 55, the stand 71
Be rotatably assorted on the end face of downside and be connected with the second connective pole 68, the lower end of second connective pole 68 be rotatably assorted be connected to it is described
The upper end of first guide block 67 is fixedly installed photovoltaic panel 69 on the upside end face of the stand 71.
Valuably, the labelling apparatus includes the coatings tank 82 being set in second successive chunk 79 and is fixedly connected
Tag block 87 on the 79 downside end face of the second successive chunk is provided with siphunculus 88, the coatings tank in the tag block 87
82 are interlinked with the siphunculus 88 by pipe 86 in succession, are fixedly installed the first check valve 91, institute in 86 inner wall of pipe in succession
It states and is provided with second one-way valve 89 at the lower end port of siphunculus 88, be fixedly installed hydraulic cylinder in the upper inside walls of the siphunculus 88
83, be connected with hydraulic stem 84 in the hydraulic cylinder 83, the lower end secure fit of the hydraulic stem 84 be connected with it is described logical
88 inner wall of pipe slides the piston block 85 of mating connection.
Valuably, third body 98 is fixedly connected in the back end surface of the frame in succession 93, in the third body 98
It is provided with the second caveli 99, front and back perforation is provided with the second downward drive of port in the downside inner wall of second caveli 99
Slot 102 is moved, is rotatably assorted between the front and back side inner wall of second caveli 99 by shaft and is connected with the second traveling wheel 101.
Valuably, the front end of the first rotating shaft 39 extends forward outside the front end face of the first housing 29 out and fixed
It is connected with disk body 38, the right end of 38 front end face of disk body is fixedly connected with wind 41.
Valuably, the first cushion 52 is fixedly installed on the downside end face of first successive chunk 53, described second is solid
Determine to be fixedly installed the second cushion 44 on the upside end face of block 52, first cushion 52 has with second cushion 44
Benefit and buffering when reducing first successive chunk 53 decline with second fixed block 52.
Valuably, third cushion 64, the third cushion are fixedly installed on the upside end face of the mounting blocks 63
64, which can reduce the stand 71, downwardly turns over to buffering when being in contact with the mounting blocks 63.
Valuably, battery 12, the battery 12 and 69 electricity of photovoltaic panel are fixedly installed in the second housing 11
Property connect and then store the electric energy that the photovoltaic panel 69 is converted.
When original state, staff drives the first reel 37 tightening first by 41 rotating disk body 38 of wind
Drawstring 34 slides column 32 at this time and retracts to greatest extent and slides in chamber 31,51 winding of the first connective pole of zygomorphism setting at this time
It is downwardly turned over to greatest extent with the connects hinge of the first successive chunk 53, the second housing 11 of zygomorphism setting at this time is to greatest extent
Close to each other, the first sliding block 77 and the second sliding block 95 are maximum in the first slide slot 75 and the second slide slot 94 respectively at this time
Limit rises, and the second successive chunk 79 rises away from ground to greatest extent at this time, while hydraulic stem 84 retracts hydraulic cylinder to greatest extent
In 83, and then piston block 85 is driven to rise to greatest extent in siphunculus 88, while the first guide block 67 is moved to the left to greatest extent, this
When stand 71 retract second end oral cavity 65 in, the downside end face of stand 71 offsets with the upside end face of third cushion 64 at this time
It connects.
When carrying out integrated disk detection by the present apparatus, the starting of the first driving machine 48, and then volume Two is driven by shaft
It is rotated around wheel 46, and then the second drawstring 49 is wound, the first successive chunk 53 is downward by the pulling force effect of the second drawstring 49 at this time
It is mobile, and then push the rotation of the first connective pole 51, so drive the second housing 11 of zygomorphism setting be located remotely from each other to collection
At disk state of same size, at this time staff the present apparatus can be placed on integrated disk, and keep integrated disk with
First traveling wheel 28 and the second traveling wheel 101 abut against state, and the second driving machine 24 rotates at this time, and then pass through third shaft
23 drive the rotation of the second toothed wheel 22, and then are connect by the second toothed wheel 22 with the engagement of the first toothed wheel 25 and drive the first tooth
Before shape wheel 25 rotates, and then drives the rotation of the first traveling wheel 28 by the second shaft 26, and then driving device is on integrated disk
Into, in the process, the rotation of the 6th driving machine 62, and then drive the first guide block 67 to move right by third screw rod 66, into
And push the second connective pole 68 to be flipped up, and then push stand 71 to be flipped up by the second connective pole 68, it the 5th drives at this time
Motivation 58 rotates, and then drives switch block 56 to rotate by shaft, passes through matching for the 5th driving machine 58 and the 6th driving machine 62 at this time
It closes and rotates and then stand 71 is driven to be directed at sunlight to greatest extent, while third driving machine 73 opens simultaneously with the 4th driving machine 97
It is dynamic, and then respectively by the first screw rod 74 and the second screw rod 90 the first sliding block 77 of drive and the second sliding block 95 to moving down
It is dynamic, and then drive the second successive chunk 79 to move down, and then drive detection block 105 to move down and protrude into integrated disk and lead to
In chamber 103, it can detect whether integrated disk have damage by laser detection head 104 in advancement at this time, when detecting
When integrated disk damage, hydraulic cylinder 83 starts, and then drives piston block 85 to be pressed down against painting in siphunculus 88 by hydraulic stem 84
Material integrates disk to the section in turn and is marked, and in the process, it is single to close second for the first check valve 91 when piston block 85 declines
It is connected to valve 89, the coating in siphunculus 88 can be squeezed out at this time, when piston block 85 rises, it is single that second one-way valve 89 closes first
It is connected to valve 91, the coating in coatings tank 82 can prepare label next time and then pipe 86 in succession enters in siphunculus 88 at this time.
The beneficial effects of the present invention are: the configuration of the present invention is simple, easy to operate, integrated disk detection is carried out by the present apparatus
When, the first driving machine starting, and then drive volume Two to rotate around wheel by shaft, and then by the second drawstring winding, at this time first
Successive chunk is moved down by the pulling force effect of the second drawstring, and then pushes the rotation of the first connective pole, and then drive zygomorphism
The second housing of setting is located remotely from each other to the state of same size with integrated disk, at this time staff the present apparatus can be placed with
On integrated disk, and integrated disk and the first traveling wheel and the second traveling wheel is kept to abut against state, wherein by left and right settings
Detection device contraction can reduce storage space and convenient transportation, at this time the second driving machine rotate, and then pass through third shaft
It drives the second toothed wheel to rotate, and then is connect by the second toothed wheel with the engagement of the first toothed wheel and drive the first tooth form rotation
It is dynamic, and then drive the first walking rotation dynamic by the second shaft, and then driving device advances on integrated disk, in this process
In, the 6th driving machine rotation, and then by third screw rod drive the first guide block move right, and then promotion the second connective pole to
Upper overturning, and then push stand to be flipped up by the second connective pole, the 5th driving machine rotates at this time, and then is driven by shaft
Switch block rotation drives stand to be directed at the sun to greatest extent by the 5th driving machine with the cooperation of the 6th driving machine rotation at this time
Light, while third driving machine starts simultaneously with the 4th driving machine, and then is driven respectively by the first screw rod and the second screw rod
First sliding block is moved down with the second sliding block, and then the second successive chunk is driven to move down, and then drives detection block downward
Mobile and protrude into integrated disk and lead to intracavitary, can detect integrated disk by laser detection head in advancement at this time be
It is no to have damage, when detect integrated disk damage when, hydraulic cylinder starting, and then by hydraulic stem drive piston block in siphunculus to
It lower extruding coating and then disk is integrated to the section is marked, in the process, the first closed check valve the when piston block declines
The conducting of two check valves, at this time can squeeze out the coating in siphunculus, and when piston block rises, second one-way valve closes the first check valve
Conducting, the coating in coatings tank can prepare label next time and then pipe in succession enters in siphunculus at this time, pass through the present apparatus pair
Integrated disk, which is detected, not only accelerates detection efficiency, saves manpower, at the same the present apparatus also have the characteristics that it is small in size,
When detecting that integrated disk damages, the present apparatus, which can also be marked the position for occurring damaging and record, facilitates later period work
It is handled as personnel.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
The change or replacement expected without creative work, should be covered by the protection scope of the present invention.Therefore, of the invention
Protection scope should be determined by the scope of protection defined in the claims.
Claims (9)
1. a kind of semiconductor integrates disk process equipment, including the first housing, the regulating device being set on the first housing,
Running gear that zygomorphism is set in the regulating device, the photovoltaic devices for being set to the running gear upper end, setting
Detection device on rear side of the running gear and the labelling apparatus being set in the detection device, the regulating device packet
It includes zygomorphism and is set to the chamber that slides that in the first housing and port is respectively facing the left and right sides, it is described to slide intracavitary setting
Have to control and slide and slide column outside one end extension exit port, the outer end for sliding column is fixedly connected with the second housing, left
The right side match setting the second housing between and be located on the upside of the first housing and be provided with the first successive chunk, described first connects
It is even rotatably assorted on the left and right sides end face of block and is connected with the first connective pole, first connective pole of zygomorphism setting is separate
One end of first successive chunk is rotatably assorted respectively to be connected on the opposite side end face of the second housing, described to slide column
The first fixed block is fixedly installed on a side end face far from the second housing, the described of zygomorphism setting slides between chamber
It is provided with the first cavity, is provided in the first housing and leads to first cavity and second cavity for sliding chamber, institute
It states to be rotatably assorted between the front and back side inner wall of the first cavity by first rotating shaft and is connected with the first reel, first reel
On be arranged with the first drawstring, one end of first drawstring is fixedly connected on first fixed block, on the first housing
The medium position of side end face is fixedly installed the second fixed block, is provided with first turn of chamber in second fixed block, and described first
Turn to be provided with first in the upper inside walls of chamber and lead to hole, is fixedly installed the first driving in the right side inner wall of first turn of chamber
Machine, the left end of first driving machine are connected with the second reel by shaft power, second reel with it is described
First turn of chamber is rotatably assorted connection, is connected by power in the shaft of first driving machine left end and the left side of first turn of chamber
It is provided with the first sealing ring between wall, the second drawstring is arranged on second reel, the upper end of second drawstring extends
Lead to hole secure fit by described first to be connected on the downside end face of first successive chunk, the running gear includes setting
It is placed in the first caveli in the second housing, the setting that front and back penetrates through and interlinks on the downside inner wall of first caveli
There is the first driver slot, the second shaft is provided in first caveli and is rotatably assorted that be connected to first caveli left
The first traveling wheel on the inner wall of right side, first caveli is far from being provided with the first peace in the side inner wall of the first housing
It behave affectedly, the first toothed wheel is provided in first installation cavity, first toothed wheel is by extending into first installation cavity
Interior second shaft is rotatably assorted between the left and right sides inner wall for being connected to first installation cavity, in first toothed wheel
Side and be located at first installation cavity in be provided with first toothed wheel be cooperatively connected the second toothed wheel, second tooth
Shape wheel is cooperatively connected by third shaft power in the second driving machine being fixed in the second installation cavity wall.
2. a kind of semiconductor according to claim 1 integrates disk process equipment, it is characterised in that: the detection device packet
The first slide slot being set in the second housing back end surface is included, is provided on the rear side inner wall of first slide slot
Single port slot is fixedly installed third driving machine, the upper end of the third driving machine in the downside inner wall of first slide slot
Power is connected with upper end and is rotatably assorted the first screw rod being connected in the first slide slot upper inside walls, and described first
The first sliding block that can be slided and be cooperatively connected up and down with first screw rod is provided in slide slot, after the second housing
Side is provided with frame in succession, is provided with port the second slide slot forwards in the frame in succession, in the upside of second slide slot
It is provided with second port slot in wall, is fixedly installed the 4th driving machine in the downside inner wall of second slide slot, the described 4th
Driving machine upper end power is connected with upper end and is rotatably assorted the second spiral being connected in the first slide slot upper inside walls
Bar is provided with the second sliding block that can be slided and be cooperatively connected up and down with second screw rod, institute in second slide slot
It states and is provided with the second successive chunk between the second housing and the frame in succession, the second successive chunk front end face and described first is slided
The first guide block that can be slided up and down in the first port slot is fixedly connected between row block back end surface, described second in succession
The second guide block, the downside of second successive chunk are fixedly connected between block back end surface and the second sliding block front end face
Detection block is fixedly connected with by column in succession on end face, in the detection block left and right perforation be provided with port it is downward lead to chamber,
Laser detection head is fixedly installed on the upper inside walls for leading to chamber and front and back side inner wall.
3. a kind of semiconductor according to claim 1 integrates disk process equipment, it is characterised in that: the photovoltaic devices packet
The first end oral cavity for being set to that the second housing is interior and port is upward is included, fixation is set in the downside inner wall in the first end oral cavity
It is equipped with the 5th driving machine, intracavitary be rotatably assorted of the first port is provided with switch block, and the downside end face of the switch block passes through shaft
Power is cooperatively connected in being provided with the upward second end oral cavity in port in the upper end of the 5th driving machine, the switch block, described
The left end of inner wall is fixedly connected with mounting blocks on the downside of second end oral cavity, and the 6th driving is fixedly installed in the rotational installation block
Machine, the 6th driving machine right side are provided with the third successive chunk being fixedly connected on the downside of the second end oral cavity on inner wall, institute
The right end power for stating the 6th driving machine is connected with right end and is rotatably assorted the third spiral being connected in the third successive chunk
Bar is connected with inner wall on the downside of lower end surface and the second end oral cavity on the third screw rod and slides the first of mating connection
Guide block is provided with the upward guide cavity in port on the downside inner wall in the second end oral cavity on the downside of the third screw rod, described
The lower end of first guide block is fixedly connected with can control the second guide block that slide in the guide cavity, in the second end oral cavity downside
The right end of wall is fixedly connected with the 4th successive chunk, and the second port is intracavitary to be provided with stand, the right side of end face on the downside of the stand
End is rotatably assorted by hinge is connected to the upper end of the 4th successive chunk, and be rotatably assorted connection on the downside end face of the stand
There is the second connective pole, the lower end of second connective pole, which is rotatably assorted, is connected to the upper end of first guide block, the stand
Upside is fixedly installed photovoltaic panel on end face.
4. a kind of semiconductor according to claim 1 integrates disk process equipment, it is characterised in that: the labelling apparatus packet
It includes the coatings tank being set in second successive chunk and is fixedly connected on the label on the downside of second successive chunk on end face
Block is provided with siphunculus in the tag block, and the coatings tank is interlinked with the siphunculus by pipe in succession, the inside pipe wall in succession
It is inside fixedly installed the first check valve, is provided with second one-way valve at the lower end port of the siphunculus, in the upside of the siphunculus
It is fixedly installed hydraulic cylinder in wall, hydraulic stem is connected in the hydraulic cylinder, the lower end secure fit of the hydraulic stem connects
It is connected to the piston block that mating connection is slided with the siphunculus inner wall.
5. a kind of semiconductor according to claim 1 integrates disk process equipment, it is characterised in that: after the frame in succession
It is fixedly connected with third body on side end face, is provided with the second caveli in the third body, under second caveli
Front and back perforation is provided with the second downward driver slot of port in the inner wall of side, passes through between the front and back side inner wall of second caveli
Shaft, which is rotatably assorted, is connected with the second traveling wheel.
6. a kind of semiconductor according to claim 1 integrates disk process equipment, it is characterised in that: the first rotating shaft
Front end extends forward outside the front end face of the first housing out and is fixedly connected with disk body, the right end of the disk body front end face
It is fixedly connected with wind.
7. a kind of semiconductor according to claim 1 integrates disk process equipment, it is characterised in that: first successive chunk
Downside end face on be fixedly installed the first cushion, be fixedly installed the second buffering on the upside end face of second fixed block
Pad.
8. a kind of semiconductor according to claim 1 integrates disk process equipment, it is characterised in that: the mounting blocks it is upper
Third cushion is fixedly installed on side end face.
9. a kind of semiconductor according to claim 1 integrates disk process equipment, it is characterised in that: in the second housing
Battery is fixedly installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810477784.5A CN109001226A (en) | 2018-05-18 | 2018-05-18 | A kind of integrated disk process equipment of semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810477784.5A CN109001226A (en) | 2018-05-18 | 2018-05-18 | A kind of integrated disk process equipment of semiconductor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109001226A true CN109001226A (en) | 2018-12-14 |
Family
ID=64574054
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810477784.5A Pending CN109001226A (en) | 2018-05-18 | 2018-05-18 | A kind of integrated disk process equipment of semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109001226A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1441290A (en) * | 2002-02-28 | 2003-09-10 | 新加坡籍联合投影有限公司 | Method for producing miro display |
| CN107831117A (en) * | 2017-12-16 | 2018-03-23 | 北京极图科技有限公司 | Adaptive caliber pipeline climbing robot |
| CN207191319U (en) * | 2017-09-10 | 2018-04-06 | 吴亚茜 | A kind of marine environmental monitoring device |
| CN207335625U (en) * | 2017-10-18 | 2018-05-08 | 苏州贝龙光电科技有限公司 | One kind perforation part laser detector |
-
2018
- 2018-05-18 CN CN201810477784.5A patent/CN109001226A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1441290A (en) * | 2002-02-28 | 2003-09-10 | 新加坡籍联合投影有限公司 | Method for producing miro display |
| CN207191319U (en) * | 2017-09-10 | 2018-04-06 | 吴亚茜 | A kind of marine environmental monitoring device |
| CN207335625U (en) * | 2017-10-18 | 2018-05-08 | 苏州贝龙光电科技有限公司 | One kind perforation part laser detector |
| CN107831117A (en) * | 2017-12-16 | 2018-03-23 | 北京极图科技有限公司 | Adaptive caliber pipeline climbing robot |
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Application publication date: 20181214 |