CN108982999A - hydrogen effect test device and system - Google Patents

hydrogen effect test device and system Download PDF

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Publication number
CN108982999A
CN108982999A CN201810770370.1A CN201810770370A CN108982999A CN 108982999 A CN108982999 A CN 108982999A CN 201810770370 A CN201810770370 A CN 201810770370A CN 108982999 A CN108982999 A CN 108982999A
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China
Prior art keywords
control module
test
module
hydrogen effect
electrically connected
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Pending
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CN201810770370.1A
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Chinese (zh)
Inventor
陈义强
黄云
恩云飞
师谦
来萍
肖庆中
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China Electronic Product Reliability and Environmental Testing Research Institute
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China Electronic Product Reliability and Environmental Testing Research Institute
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Priority to CN201810770370.1A priority Critical patent/CN108982999A/en
Publication of CN108982999A publication Critical patent/CN108982999A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/003Environmental or reliability tests

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)

Abstract

The present invention relates to a kind of hydrogen effect test device and systems.Wherein, hydrogen effect test device, including control module, atmosphere regulation mould group, sample test module, data acquisition module and the server for being electrically connected control module;Sample test module includes airtight box body, heater and the test circuit board for being electrically connected device under test;Heater and test circuit board are set in airtight box body;Heater is electrically connected control module;It tests circuit board and control module is electrically connected by data acquisition module, the test environment of device under test can be conveniently adjusted at any time using hydrogen effect test device, that is the atmosphere and temperature of box body, device under test hydrogen effect influence caused by it under different conditions thus can be tested out, and then can comprehensively, accurately and rapidly test out influence of the hydrogen effect to device.

Description

Hydrogen effect test device and system
Technical field
The present invention relates to the field of test technology, more particularly to hydrogen effect test device and system.
Background technique
Currently, the device of enclosed package, chip and component more or less all can be by the shadows of hydrogen effect (i.e. hydrogen poisoning) It rings, hydrogen effect can reduce effective donor concentration of the barrier layer of device, chip and component, reduce channel carrier concentration, change Become the defects of Schottky built-in potential, induction or passivation device, to seriously affect the electric property of device, chip and component With service life.
However, the research for the analysis method and evaluation test method etc. of hydrogen effect failure mechanism is less.In order to It can be avoided or slow down drawbacks described above, need to test out hydrogen effect to device, chip and component degradation effects device, to improve The design of device, chip and component improves the reliability of product.But during realization, inventor has found traditional technology In at least there are the following problems: traditional test device can not comprehensively, accurately and fast test out hydrogen effect to the shadow of device It rings.
Summary of the invention
Based on this, it is necessary to can not comprehensively, accurately and fast test out hydrogen effect response device for traditional test device The problem of influence of part, provides a kind of hydrogen effect test device and system.
To achieve the goals above, on the one hand, the embodiment of the invention provides a kind of hydrogen effect test devices, including control Module, atmosphere regulation mould group, sample test module, data acquisition module and the server for being electrically connected control module;
Sample test module includes airtight box body, heater and the test circuit board for being electrically connected device under test;Heater It is set in airtight box body with test circuit board;Heater is electrically connected control module;It tests circuit board and passes through data acquisition module electricity Link control module;
Atmosphere regulates and controls mould group and is electrically connected control module, and the tracheae in atmosphere regulation mould group is arranged in airtight box body;
Wherein, the first control parameter that control module is sent according to server, control atmosphere regulation mould group adjust closed enclosure Intracorporal atmosphere;The second control parameter that control module is sent according to server, control heater heating;Data acquisition module is logical It crosses control module, the electrical data of the test circuit board of acquisition is transferred to server.
Control module includes the first controller and second controller in one of the embodiments,;
First controller is connected electrically between atmosphere regulation mould group and server;First controller response the first control ginseng Number;
Second controller is electrically connected heater, data acquisition module and server;The second control of second controller response Parameter.
Sample test module further includes being set to the intracorporal temperature monitoring unit of closed enclosure in one of the embodiments,;
Temperature monitor unit is electrically connected second controller.
Sample test module further includes being set to the intracorporal gas concentration monitoring list of closed enclosure in one of the embodiments, Member;
Gas concentration monitoring unit is electrically connected the first controller.
Sample test module further includes being set to the intracorporal air pressure monitor unit of closed enclosure and true in one of the embodiments, Reciprocal of duty cycle monitoring unit;
Air pressure monitor unit, vacuum degree monitoring unit are electrically connected control module.
It in one of the embodiments, further include the alarm for being electrically connected control module.
Airtight box body is equipped with box cover opening controller in one of the embodiments,;The electrical connection of box cover opening controller Second controller.
Atmosphere regulation mould group includes distribution module, valve control module and vacuum pump in one of the embodiments,;
Distribution module, valve control module and vacuum pump are electrically connected control module;
Valve control module connects distribution module, vacuum pump by pipeline, and tracheae one end connection valve control module, the other end are worn In airtight box body.
Data acquisition module includes Current Voltage low noise circuit in one of the embodiments,;
Current Voltage low noise circuit is connected electrically between test circuit board and control module.
On the other hand, the embodiment of the invention also provides a kind of hydrogen effect test macro, including terminal device and as above The hydrogen effect test device;
The server of hydrogen effect test device is connect with terminal equipment in communication.
A technical solution in above-mentioned technical proposal is had the following advantages and beneficial effects:
Hydrogen effect test device include control module, atmosphere regulation mould group, sample test module, data acquisition module and The server of link control module;Wherein, sample test module includes airtight box body, heater and the survey for connecting device under test Try circuit board;Heater and test circuit board are set in box body;Heater is electrically connected control module;Test circuit board passes through data Acquisition module link control module;Atmosphere regulates and controls mould group and is electrically connected control module, and tracheae thereon is arranged in box body;Hydrogen effect Test device working principle is the first parameter that control module is sent according to server, and control atmosphere regulates and controls in mould group damper box body Atmosphere;The second parameter that control module is sent according to server, control heater heating;Data collecting module collected test electricity The electrical data of road plate, and server is transferred to by control module, it can easily be adjusted at any time using hydrogen effect test device Save the test environment of device under test, the i.e. atmosphere and temperature of box body, it is thus possible to test out device under test in different conditions Lower hydrogen effect is influenced caused by it, and then can comprehensively, accurately and rapidly test out influence of the hydrogen effect to device.
Detailed description of the invention
Fig. 1 is the structural schematic block diagram of hydrogen effect test device of the present invention in one embodiment;
Fig. 2 is the structural schematic block diagram of control module in hydrogen effect test device of the present invention in one embodiment;
Fig. 3 is the structural schematic block diagram of distribution mould group in hydrogen effect test device of the present invention in one embodiment;
Fig. 4 is the structural schematic block diagram of sample test module in hydrogen effect test device of the present invention in one embodiment;
Fig. 5 is the structural schematic block diagram of alarm in hydrogen effect test device of the present invention in one embodiment;
Fig. 6 is the structural schematic block diagram of hydrogen effect test macro of the present invention in one embodiment.
Specific embodiment
To facilitate the understanding of the present invention, a more comprehensive description of the invention is given in the following sections with reference to the relevant attached drawings.In attached drawing Give preferred embodiment of the invention.But the invention can be realized in many different forms, however it is not limited to this paper institute The embodiment of description.On the contrary, purpose of providing these embodiments is make it is more thorough and comprehensive to the disclosure.
It should be noted that it can be directly to separately when an element is considered as " connection " another element One element and it is in combination be integrated, or may be simultaneously present centering elements.Term as used herein " being set to " and Similar statement is for illustrative purposes only.
Unless otherwise defined, all technical and scientific terms used herein and belong to technical field of the invention The normally understood meaning of technical staff is identical.Term as used herein in the specification of the present invention is intended merely to description tool The purpose of the embodiment of body, it is not intended that in the limitation present invention.Term " and or " used herein includes one or more phases Any and all combinations of the listed item of pass.
Influence of the hydrogen effect to device can not be comprehensively, accurately and fast tested out in order to solve traditional test device The problem of, as shown in Figure 1, providing a kind of hydrogen effect test device, including control module 11, atmosphere regulate and control mould group 12, sample Test module 13, data acquisition module 14 and the server 15 for being electrically connected control module 11;
Sample test module 13 includes airtight box body 131, heater 133 and the test circuit for being electrically connected device under test 16 Plate 135;Heater 133 and test circuit board 135 are set in airtight box body 131;Heater 133 is electrically connected control module 11;It surveys It tries circuit board 135 and control module 11 is electrically connected by data acquisition module 14;
Atmosphere regulate and control mould group 12 be electrically connected control module 11, and atmosphere regulation mould group 12 on tracheae 121 be arranged in it is closed Box body 131;
Wherein, the first control parameter that control module is sent according to server, control atmosphere regulation mould group adjust closed enclosure Intracorporal atmosphere;The second control parameter that control module is sent according to server, control heater heating;Data acquisition module is logical It crosses control module, the electrical data of the test circuit board of acquisition is transferred to server.
It should be noted that being equipped with control program on server, it is control parameter input terminal, is also shown in and tested The display end for the test data that journey is got.Server receives control parameter, and controls hydrogen effect test dress by control module Set corresponding component.
Control module controls the movement of component in hydrogen effect test device for receiving the control parameter of server sending, Further, control module can control the movement of atmosphere regulation mould group, can control the movement of heater, and acceptable sample tests mould The electrical data of block acquisition is simultaneously transmitted to server.Specifically, control module is joined according to the first control that server is sent Number, control atmosphere regulation mould group adjust the intracorporal atmosphere of closed enclosure, and the first control parameter is atmosphere composition control parameter at this time;Control The second control parameter that molding root tuber is sent according to server, control heater heating, the second control parameter is temperature control at this time Parameter.In one example, control module can be industrial personal computer or single-chip microcontroller.
In a specific embodiment, as shown in Fig. 2, control module 11 includes the first controller 111 and the second control Device 113 processed;First controller 111 is connected electrically between atmosphere regulation mould group 12 and server 15;First controller 111 response the One control parameter;Second controller 113 is electrically connected heater 133, data acquisition module 14 and server 15;Second controller 113 the second control parameters of response.In order to avoid the control of each component in hydrogen effect test device causes confusion, reduces hydrogen effect and survey Control module is divided into the first controller and second controller by the design difficulty that trial assembly is set, and the first controller is responsible for specially It controlling atmosphere and regulates and controls mould group, second controller is responsible for the electricity structure in control sample test module, such as heater specially, and Forward the electrical data of the device under test of data collecting module collected to server.
Atmosphere regulates and controls mould group for regulating and controlling the atmosphere composition of airtight box body.For example, oxygen and nitrogen in regulation airtight box body The ratio of gas can also regulate and control the ratio of oxygen in airtight box body, nitrogen, helium and hydrogen, specifically, it is closed for needing Which kind of atmosphere composition box body adjusts is assert according to actual needs.Further, atmosphere regulation mould group can be according to being actually subjected to be closed Which kind of atmosphere box body prepares to equip corresponding gas.
In a specific embodiment, as shown in figure 3, atmosphere regulation mould group 12 includes distribution module 123, valve control module 125 and vacuum pump 127;Distribution module 123, valve control module 125 and vacuum pump 127 are electrically connected control module 11;Valve control mould Block 125 connects distribution module 123, vacuum pump 127 by pipeline, and 121 one end connection valve control module 125 of tracheae, the other end are worn Set on airtight box body 131.Wherein, in one example, distribution module includes at least two gas cylinders, and each gas cylinder stores difference respectively Gas, the electronic control unit that control gas cylinder valve is opened is installed on each gas cylinder, which is electrically connected with the first controller, The valve opening of each gas cylinder is controlled by the first controller.Vacuum pump for extracting gas in airtight box body, i.e., distribution module to Before being sent into the gas that need to be prepared in airtight box body, first with vacuum pump by evacuating air existing in airtight box body, such as vacuum Pump can be dry pump or oil pump.Valve control module is used to control the gas between vacuum pump and airtight box body, distribution module and airtight box body The on state of pipe, control of the valve control module by the first controller.
Sample test module is used to for device under test provide test environment, and tests device under test in this test condition Electrical data, such as electric current and/or voltage.Sample test module include airtight box body, heater and can be used for connect to Survey the test circuit board of device.Wherein, airtight box body can provide a closed chamber during the test, close after test It closes box body and can open and be taken out sample.
In a specific embodiment, airtight box body is equipped with box cover opening controller;Box cover opening controller is electrically connected Connect second controller.By in airtight box body be arranged box cover opening controller, it can be achieved that box cover automatic opening, specifically, Box cover opening controller in airtight box body is controlled by server, inputs box cover open command with user orientation server, server will Box cover open command is sent to second controller, and second controller passes through box cover according to box cover open command according to box cover controller Opening controller opens box cover.
Heater is used to provide the test environment of high temperature for device under test, and heating method is controlled by second controller, tool Body, the second control parameter is transferred to the second control parameter of server data, i.e. temperature control parameter, server by user Two controllers, second controller control heater heating according to the second control parameter.
Test circuit board powers on, and collect device under test in test environment for being electrically connected device under test to device under test Under electrical data.In one example, multiple test circuit boards can be arranged in an airtight box body, has realized multiple test works Position, can test multiple device examples simultaneously, for example, 16 test circuit boards of arrangement.More test circuit boards provide more Station accelerate the testing efficiency of device under test, further, can be electric for each test suitable for the test of large quantities of metering device Road plate arranges a corresponding heater, so that the even heat around each test circuit board, provides for each device under test Equivalent test environment, to more accurately test each device under test, avoid because uneven heating it is even caused by error.
In a specific embodiment, as shown in figure 4, sample test module 13 further includes being set to 131 in airtight box body Temperature monitoring unit 41;Temperature monitor unit 41 is electrically connected second controller 113.Wherein, temperature monitoring unit is for real When monitor the intracorporal temperature change of closed enclosure, convenient for controlling the intracorporal temperature of closed enclosure.Specifically, by collected temperature Degree evidence is transferred to second controller, so that second controller changes the heating method of heater according to the temperature data in real time, Guarantee that the intracorporal temperature of closed enclosure maintains for test and at a temperature of being pre-designed, provides the test wrapper of constant temperature for device under test Border.More stable test condition is provided for device under test, thus it is more acurrate, really obtain device under test at a certain temperature Electrical data, to more accurately assess influence of the hydrogen effect to device at such a temperature.In one example, monitoring temperature Unit includes temperature sensor, further includes magnitude amplifier further.
In a specific embodiment, as shown in figure 4, sample test module 13 further includes being set to the intracorporal gas of closed enclosure Bulk concentration monitoring unit 42;Gas concentration monitoring unit 42 is electrically connected the first controller 111.Wherein, it is arranged in airtight box body Gas concentration monitoring unit, the atmosphere for monitoring airtight box body in real time forms, and collected atmosphere composition is transferred to the One controller, the first control form real-time control atmosphere regulation mould group according to the atmosphere and adjust the intracorporal atmosphere composition of closed enclosure, Guarantee that the intracorporal atmosphere group of closed enclosure becomes the atmosphere composition being pre-designed, thus the intracorporal atmosphere group of stability contorting closed enclosure At guaranteeing truly to test out influence of hydrogen effect of the device under test under a certain atmosphere composition to device.Show at one Example, gas concentration monitoring unit includes gas concentration sensor.
In a specific embodiment, as shown in figure 4, sample test module 13 further includes being set in airtight box body 131 Air pressure monitor unit 43 and vacuum degree monitoring unit 44;Air pressure monitor unit 43, the electrical connection of vacuum degree monitoring unit 44 second Controller 113.Wherein, air pressure monitor unit is used for the air pressure of real-time monitoring airtight box body, and air pressure monitor unit will be collected Barometric information is sent to control module, and control module regulates and controls mould group by atmosphere to adjust in airtight box body according to the barometric information Air pressure, guarantee the intracorporal air pressure of closed enclosure maintain the air pressure being pre-designed for test.To not only guarantee device under test Measuring air pressure adjust, it is also ensured that the safety of hydrogen effect test device.In one example, air pressure monitor unit includes gas Pressure sensor.Vacuum degree monitoring unit is used for the vacuum degree of real-time monitoring airtight box body, so as to utilize vacuum degree monitoring unit Judge whether vacuum pump is clean by the intracorporal gas extraction of closed enclosure, guarantees that the atmosphere after subsequent distribution module is supplied gas forms. In one example, vacuum degree monitoring unit includes vacuum sensor.
Data acquisition module is used for the electrical data that collecting test circuit board is collected into, in one example, electrical data For current or voltage, and current or voltage is transferred to server by control module, power spectral density is installed on server Data processing software can analyze the power spectral density data of device under test by the software, to analyze device under test The change information of defect concentration, and then the hydrogen Effect Evaluation realized real-time high-efficiency, automatically carry out device under test.It is specific at one Embodiment in, data acquisition module includes Current Voltage low noise circuit;Current Voltage low noise circuit is connected electrically in test Between circuit board and control module.
In a specific embodiment, as shown in figure 5, further including the alarm 17 for being electrically connected control module 11.
Wherein, alarm is for reminding user's hydrogen effect test device to break down, and further, alarm includes oxygen Concentration alarm, overtemperature alarm, vacuum breaking alarm and/or over voltage alarm device.Above-mentioned alarm guarantees the test of hydrogen effect The operational safety of device.
In each embodiment of hydrogen effect test device of the present invention, hydrogen effect test device includes the first hardware control module, gas Atmosphere regulates and controls mould group, sample test module, the first hardware controls mould of data acquisition module, the second hardware control module and connection The server of block, the second hardware control module;Wherein, sample test module includes that airtight box body, heater and connection are to be measured The test circuit board of device;Heater and test circuit board are set in box body;Heater connects the second hardware control module and is electrically connected It connects;It tests circuit board and the second hardware control module is connected by data acquisition module;Atmosphere regulates and controls mould group and is electrically connected the first hardware Control module, and tracheae thereon is arranged in box body;Hydrogen effect test device working principle be the first hardware control module according to The first parameter that server is sent, control atmosphere regulate and control the intracorporal atmosphere of mould group damper box;Second hardware control module is according to clothes The second parameter that business device is sent, control heater heating;Data collecting module collected tests the electrical data of circuit board, and passes through Second hardware control module is transferred to server, can be conveniently adjusted the survey of device under test at any time using hydrogen effect test device Test ring border, the i.e. atmosphere and temperature of box body, it is thus possible to which testing out device under test, hydrogen effect makes it under different conditions At influence, and then can comprehensively, accurately and rapidly test out influence of the hydrogen effect to device.
In one embodiment, as shown in fig. 6, providing a kind of hydrogen effect test macro, including terminal device 61 and Hydrogen effect test device as described above;The server 15 and terminal device 61 of hydrogen effect test device communicate to connect.
It should be noted that by connecting terminal device on the server, for example, mobile phone, tablet computer etc., so that user It can remote control test.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, all should be considered as described in this specification.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection of the invention Range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.

Claims (10)

1. a kind of hydrogen effect test device, which is characterized in that regulate and control mould group, sample test module, number including control module, atmosphere According to acquisition module and the server of the electrical connection control module;
The sample test module includes airtight box body, heater and the test circuit board for being electrically connected device under test;It is described to add Hot device and the test circuit board are set in the airtight box body;The heater is electrically connected the control module;The test Circuit board is electrically connected the control module by the data acquisition module;
Atmosphere regulation mould group is electrically connected the control module, and the tracheae in atmosphere regulation mould group be arranged in it is described close Close box body;
Wherein, the first control parameter that the control module is sent according to the server controls the atmosphere regulation mould group tune Save the intracorporal atmosphere of the closed enclosure;The second control parameter that the control module is sent according to the server, described in control Heater heating;The data acquisition module by the control module, by the electrical data of the test circuit board of acquisition It is transferred to the server.
2. hydrogen effect test device according to claim 1, which is characterized in that the control module includes the first controller And second controller;
First controller is connected electrically between the atmosphere regulation mould group and the server;The first controller response First control parameter;
The second controller is electrically connected the heater, the data acquisition module and the server;Second control Device processed responds second control parameter.
3. hydrogen effect test device according to claim 2, which is characterized in that the sample test module further includes being set to The intracorporal temperature monitoring unit of closed enclosure;
The temperature monitor unit is electrically connected the second controller.
4. hydrogen effect test device according to claim 3, which is characterized in that the sample test module further includes being set to The intracorporal gas concentration monitoring unit of closed enclosure;
The gas concentration monitoring unit is electrically connected first controller.
5. hydrogen effect test device according to any one of claims 1 to 4, which is characterized in that the sample test mould Block further includes being set to the intracorporal air pressure monitor unit of the closed enclosure and vacuum degree monitoring unit;
The air pressure monitor unit, the vacuum degree monitoring unit are electrically connected the control module.
6. hydrogen effect test device according to claim 5, which is characterized in that further include being electrically connected the control module Alarm.
7. hydrogen effect test device according to claim 6, which is characterized in that the airtight box body is opened equipped with box cover Controller;The box cover opening controller is electrically connected the second controller.
8. hydrogen effect test device according to claim 1, which is characterized in that the atmosphere regulation mould group includes distribution mould Block, valve control module and vacuum pump;
The distribution module, the valve control module and the vacuum pump are electrically connected the control module;
The valve control module connects the distribution module, the vacuum pump by pipeline, and described tracheae one end connects the valve Control module, the other end are arranged in the airtight box body.
9. hydrogen effect test device according to claim 1, which is characterized in that the data acquisition module includes electric current electricity Force down road of discharging of making an uproar;
The Current Voltage low noise circuit is connected electrically between the test circuit board and the control module.
10. a kind of hydrogen effect test macro, which is characterized in that including described in terminal device and claim 1 to 9 any one Hydrogen effect test device;
The server of the hydrogen effect test device is connect with the terminal equipment in communication.
CN201810770370.1A 2018-07-13 2018-07-13 hydrogen effect test device and system Pending CN108982999A (en)

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CN201810770370.1A CN108982999A (en) 2018-07-13 2018-07-13 hydrogen effect test device and system

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Application Number Priority Date Filing Date Title
CN201810770370.1A CN108982999A (en) 2018-07-13 2018-07-13 hydrogen effect test device and system

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Publication Number Publication Date
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CN201810770370.1A Pending CN108982999A (en) 2018-07-13 2018-07-13 hydrogen effect test device and system

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CN109904099A (en) * 2019-03-15 2019-06-18 中国电子科技集团公司第十三研究所 Hydrogen effect test case and system
CN112363076A (en) * 2020-10-19 2021-02-12 武汉船用电力推进装置研究所(中国船舶重工集团公司第七一二研究所) Dynamics testing device and method for alloy hydrogen storage material

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109904099A (en) * 2019-03-15 2019-06-18 中国电子科技集团公司第十三研究所 Hydrogen effect test case and system
CN109904099B (en) * 2019-03-15 2021-06-15 中国电子科技集团公司第十三研究所 Hydrogen effect test box and system
CN112363076A (en) * 2020-10-19 2021-02-12 武汉船用电力推进装置研究所(中国船舶重工集团公司第七一二研究所) Dynamics testing device and method for alloy hydrogen storage material

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RJ01 Rejection of invention patent application after publication

Application publication date: 20181211

RJ01 Rejection of invention patent application after publication