CN108981911A - Optical measuring system based on integrating sphere - Google Patents
Optical measuring system based on integrating sphere Download PDFInfo
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- CN108981911A CN108981911A CN201810859539.0A CN201810859539A CN108981911A CN 108981911 A CN108981911 A CN 108981911A CN 201810859539 A CN201810859539 A CN 201810859539A CN 108981911 A CN108981911 A CN 108981911A
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- Prior art keywords
- integrating sphere
- diffusing reflection
- optical measuring
- measuring system
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- 230000003287 optical effect Effects 0.000 title claims abstract description 22
- 239000000835 fiber Substances 0.000 claims abstract description 17
- 239000011248 coating agent Substances 0.000 claims abstract description 14
- 238000000576 coating method Methods 0.000 claims abstract description 14
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 7
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 238000005259 measurement Methods 0.000 abstract description 14
- 238000001228 spectrum Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 229940058401 polytetrafluoroethylene Drugs 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000011326 mechanical measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention discloses the optical measuring systems based on integrating sphere, including incident laser, beam-shrinked mirror, integrating sphere, energy meter, photoelectric tube, fiber coupler, computer, oscillograph and spectrometer, the integrating sphere is equipped with a light inlet and three light-emitting windows, beam-shrinked mirror is set at light inlet, energy meter, photoelectric tube and fiber coupler are respectively provided at three light-emitting windows, the output end of energy meter is connect with computer, the output end of photoelectric tube is connect with oscillograph, the output end of fiber coupler is connect with spectrometer, diffusing reflection coating is coated in integrating sphere inner wall, diffusing reflection plate is equipped on the inner wall of integrating sphere simultaneously, miniature DC motor is installed outside integrating sphere spherical shell, the rotor of miniature DC motor passes through integrating sphere spherical shell and connect with diffusing reflection plate.Itself in application, can energy parameter, time parameter and spectrum parameter to laser synchronize measurement, and can effectively inhibit laser speckle, improve parameter measurement precision, reduce manufacturing cost.
Description
Technical field
The present invention relates to field of optical measuring technologies, and in particular to the optical measuring system based on integrating sphere.
Background technique
Optical measurement is the measuring technique that photoelectric technology is combined with mechanical measurement comprising to ordinary light source, LED light source
And laser etc. measures.The prior art carry out laser measurement when, primary measured parameter include energy parameter, time parameter and
Spectrum parameter, measurement method are usually to use multi-disc plate glass that laser is divided into multi beam, inject different measuring instruments respectively
Device carries out different parameters measurement, and this measurement method needs individually adjust each plate glass, time-consuming and laborious, system collection
Cheng Du is not high, high to the requirement of laser light incident direction, is easy to appear measurement error.Laser can be synchronized using integrating sphere
Energy parameter, time parameter and spectrum parameter measurement, be easily integrated, to laser light incident direction tolerance height, still, laser tool
There are good temporal coherence and spatial coherence, the laser for importing integrating sphere will form after diffusing reflection in ball in exit portal
The presence of random intensity distribution, referred to as speckle, speckle can have some impact on the parameter measurement of laser.
Summary of the invention
The present invention is in view of the deficienciess of the prior art, provide the optical measuring system based on integrating sphere, in application, can
Measurement is synchronized with energy parameter, time parameter and the spectrum parameter to laser, and can effectively inhibit laser speckle, is improved
Parameter measurement precision reduces manufacturing cost.
The invention is realized by the following technical scheme:
Optical measuring system based on integrating sphere, including incident laser, beam-shrinked mirror, integrating sphere, energy meter, photoelectric tube, light
Fine coupler, computer, oscillograph and spectrometer, the integrating sphere are equipped with a light inlet and three light-emitting windows, beam-shrinked mirror
Be set at light inlet, energy meter, photoelectric tube and fiber coupler are respectively provided at three light-emitting windows, the output end of energy meter with
Computer connection, the output end of photoelectric tube are connect with oscillograph, and the output end of fiber coupler is connect with spectrometer, in integrating sphere
Inner wall is coated with diffusing reflection coating, while diffusing reflection plate is equipped on the inner wall of integrating sphere, is equipped with outside integrating sphere spherical shell micro-
Type direct current generator, the rotor of miniature DC motor pass through integrating sphere spherical shell and connect with diffusing reflection plate, and diffusing reflection plate can be driven to rotate,
Wherein: incident laser injects integrating sphere from light inlet after beam-shrinked mirror shrink beam, from three after diffusing reflection in integrating sphere
Light-emitting window projects to be received by energy meter, photoelectric tube and fiber coupler respectively, computer acquisition energy meter output parameter, oscillograph
Photoelectric tube output parameter, spectrometer collection fiber coupler output parameter are acquired, dissipating for laser is projected in the rotation removal of diffusing reflection plate
Spot.
Preferably, the diffusing reflection coating and diffusing reflection plate are polytetrafluoroethylene (PTFE) material.
Preferably, the miniature DC motor is 42BYG type stepper motor.
Preferably, the miniature DC motor is connected with step motor control case SC300, step motor control case SC300
It is connect with computer.
Preferably, the beam-shrinked mirror is by front lens and rear lens group at heavy caliber incident laser shrink beam can be made at small-bore
Laser.
Preferably, the aperture efficiency of the integrating sphere is not more than 5%.
Preferably, the internal diameter of the integrating sphere is 300mm.
Preferably, the diameter of the diffusing reflection plate is 30mm, and the gap between diffusing reflection plate and integrating sphere inner wall is less than
1.5mm。
The present invention has the advantage that and the utility model has the advantages that
It 1, can energy parameter, time parameter and spectrum to laser the present invention is based on the optical measuring system of integrating sphere
Parameter synchronizes measurement.
2, the present invention is based on the optical measuring systems of integrating sphere, can effectively inhibit laser speckle, improve laser parameter and survey
The precision of amount.
3, the present invention is based on the optical measuring system of integrating sphere, device is simple and easy to get, and system structure is compact, manufacturing cost
It is low.
Detailed description of the invention
Attached drawing described herein is used to provide to further understand the embodiment of the present invention, constitutes one of the application
Point, do not constitute the restriction to the embodiment of the present invention.In the accompanying drawings:
Fig. 1 is that schematic diagram is arranged in diffusing reflection plate of the invention；
Fig. 2 is the diffusing reflection rate and integrating sphere aperture efficiency of the integrating sphere multiple reflections factor and diffusing reflection coating in embodiment
Relational graph；
Speckle comparison diagram when Fig. 3 is diffusing reflection plate rotation in embodiment.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below with reference to embodiment and attached drawing, to this
Invention is described in further detail, and exemplary embodiment of the invention and its explanation for explaining only the invention, are not made
For limitation of the invention.
Embodiment
As shown in Figure 1, the optical measuring system based on integrating sphere, including incident laser, beam-shrinked mirror, integrating sphere, energy meter,
Photoelectric tube, fiber coupler, computer, oscillograph and spectrometer, the integrating sphere is equipped with a light inlet and three go out light
Mouthful, beam-shrinked mirror is set at light inlet, and energy meter, photoelectric tube and fiber coupler are respectively provided at three light-emitting windows, energy meter
Output end connect with computer, the output end of photoelectric tube is connect with oscillograph, and the output end of fiber coupler and spectrometer connect
It connects, is coated with diffusing reflection coating in integrating sphere inner wall, while being equipped with diffusing reflection plate on the inner wall of integrating sphere, outside integrating sphere spherical shell
Portion is equipped with miniature DC motor, and the rotor of miniature DC motor passes through integrating sphere spherical shell and connect with diffusing reflection plate, can be with animation
Reflecting plate rotation, in which: incident laser injects integrating sphere from light inlet after beam-shrinked mirror shrink beam, by unrestrained anti-in integrating sphere
It projects after penetrating from three light-emitting windows and is received respectively by energy meter, photoelectric tube and fiber coupler, computer is acquired by energy meter
The energy parameter of laser is simultaneously shown that oscillograph acquires photoelectric tube output parameter, exports laser by photoelectric tube output parameter
Time waveform curve, even cunning is carried out to time waveform using average filter, then restore the time of incident laser by calculating
The speckle of laser is projected in wavy curve, spectrometer collection fiber coupler output spectrum parameter, the rotation removal of diffusing reflection plate, effectively
Improve measuring accuracy.
As shown in Fig. 2, for the experiment gained integrating sphere multiple reflections factor (or efficiency of integrating sphere) and diffusing reflection coating
Diffusing reflection rate and integrating sphere aperture efficiency relational graph, wherein ordinate indicate the integrating sphere multiple reflections factor, abscissa table
Show the diffusing reflection rate of diffusing reflection coating, f indicates the aperture efficiency of integrating sphere, as seen from the figure, in the diffusing reflection rate phase of diffusing reflection coating
With in the case where, the aperture efficiency for reducing integrating sphere can greatly increase the multiple reflections factor of integrating sphere, if aperture efficiency is greater than
5%, the high diffusing reflection rate of integrating sphere does not just play effect, therefore the opening area of integrating sphere setting is no more than table in integrating sphere
The 5% of area, while to comprehensively consider the uniformity that integrating sphere goes out light convenient for machining and measurement experiment, use internal diameter for
The integrating sphere of 300mm.
The spectral reflectance ratio of diffusing reflection coating has a significant impact to the spectral characteristic of integrating sphere emergent light, selects polytetrafluoro
Ethylene is as ball inner coating, and within less than 60 ° very well, reflectivity is up to 98% or more to diffusing characteristic diffuser.
Existing dephasign drying method includes: rotating mirror method, shakes plane mirror method and one section of optical fiber is placed on ultrasound
Method in wave washer.Vibration plane mirror method can make laser through vibration plane mirror reflection, can quickly change laser light incident
In the position of ball inner wall, coating rough surface introduces different optical path differences to the laser of different incidence points, and plane mirror is each when shaking
Variation reduces the spatial coherence of illumination to carry out random phase modulation to incident coherent light to the optical path difference of point rapidly at any time
Property, but its laser measurement environment for being difficult to apply to integrating sphere；One section of optical fiber, which is placed on the method in ultrasonic cleaner, makes light
Fibre shakes under the frequency of ultrasonic wave, mixes to the light of different spaces mode, can reduce dephasign stemness, but its cost
It is higher, it is not easy to extension and uses, therefore the diffusing reflection plate for being 30mm in integrating sphere inner wall setting diameter, it is made to be similar to plane
Mirror, then the coherence in integrating sphere for rotate and laser can be effectively reduced is driven by miniature DC motor, to go
Except speckle, the accuracy of laser measurement is improved, the material of diffusing reflection plate uses as the diffusing reflection coating on integrating sphere inner wall
Polytetrafluoroethylene (PTFE), diffusing reflection rate of this material in 250~2500nm wavelength band are up to 97%.
As shown in figure 3,532nm Single wavelength laser is injected integrating sphere, integrating sphere light-emitting window is shot using digital camera, is cut
A portion is taken, the left side is effect picture when diffusing reflection plate does not turn in figure, and the right is that miniature DC motor drives diffusing reflection plate
Effect picture when rotation, it can be seen that speckle removal effect is clearly when motor drives diffusing panel rotation.
Effectively removing laser speckle and not needing motor has too big revolving speed, and the minimum speed of miniature DC motor is about
For 1000RPM, this revolving speed is much higher than the relationship institute between quantitative assessment speckle removal effect and the diffusing reflection plate speed of rotation
Revolving speed is needed, speckle completely removes the relationship that can not reflect between motor speed and speckle removal effect, ordinary straight when motor rotates
Galvanic electricity machine rotates under the low speed uses retarder, and in order to show that revolving speed also needs digital display module, precision is not high, and uses 42BYG
Type stepper motor, while step motor control case SC300 is set again, step motor control case SC300 is connect with computer, just
Stepper motor can be controlled in such a way that computer programming sends order to rotate in the case where speed is arranged, do not need to be surveyed again
Speed, precision are up to 100%.
Above-described specific embodiment has carried out further the purpose of the present invention, technical scheme and beneficial effects
It is described in detail, it should be understood that being not intended to limit the present invention the foregoing is merely a specific embodiment of the invention
Protection scope, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should all include
Within protection scope of the present invention.
Claims (8)
1. the optical measuring system based on integrating sphere, including incident laser, beam-shrinked mirror, integrating sphere, energy meter, photoelectric tube, optical fiber
Coupler, computer, oscillograph and spectrometer, which is characterized in that the integrating sphere is equipped with a light inlet and three go out light
Mouthful, beam-shrinked mirror is set at light inlet, and energy meter, photoelectric tube and fiber coupler are respectively provided at three light-emitting windows, energy meter
Output end connect with computer, the output end of photoelectric tube is connect with oscillograph, and the output end of fiber coupler and spectrometer connect
It connects, is coated with diffusing reflection coating in integrating sphere inner wall, while being equipped with diffusing reflection plate on the inner wall of integrating sphere, outside integrating sphere spherical shell
Portion is equipped with miniature DC motor, and the rotor of miniature DC motor passes through integrating sphere spherical shell and connect with diffusing reflection plate, can be with animation
Reflecting plate rotation, in which: incident laser injects integrating sphere from light inlet after beam-shrinked mirror shrink beam, by unrestrained anti-in integrating sphere
It projects after penetrating from three light-emitting windows and is received respectively by energy meter, photoelectric tube and fiber coupler, the output of computer acquisition energy meter
Parameter, oscillograph acquire photoelectric tube output parameter, spectrometer collection fiber coupler output parameter, and the rotation removal of diffusing reflection plate is penetrated
The speckle of laser out.
2. the optical measuring system according to claim 1 based on integrating sphere, which is characterized in that the diffusing reflection coating and
Diffusing reflection plate is polytetrafluoroethylene (PTFE) material.
3. the optical measuring system according to claim 1 based on integrating sphere, which is characterized in that the miniature DC motor
For 42BYG type stepper motor.
4. the optical measuring system according to claim 1 or 3 based on integrating sphere, which is characterized in that the minisize dc
Motor is connected with step motor control case SC300, and step motor control case SC300 is connect with computer.
5. the optical measuring system according to claim 1 based on integrating sphere, which is characterized in that the beam-shrinked mirror is by preceding
Mirror and rear lens group are at can make heavy caliber incident laser shrink beam at small-bore laser.
6. the optical measuring system according to claim 1 based on integrating sphere, which is characterized in that the opening of the integrating sphere
Than being not more than 5%.
7. the optical measuring system according to claim 1 or 6 based on integrating sphere, which is characterized in that the integrating sphere
Internal diameter is 300mm.
8. the optical measuring system according to claim 1 or 2 based on integrating sphere, which is characterized in that the diffusing reflection plate
Diameter be 30mm, gap between diffusing reflection plate and integrating sphere inner wall is less than 1.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810859539.0A CN108981911A (en) | 2018-08-01 | 2018-08-01 | Optical measuring system based on integrating sphere |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810859539.0A CN108981911A (en) | 2018-08-01 | 2018-08-01 | Optical measuring system based on integrating sphere |
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| Publication Number | Publication Date |
|---|---|
| CN108981911A true CN108981911A (en) | 2018-12-11 |
Family
ID=64552182
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810859539.0A Pending CN108981911A (en) | 2018-08-01 | 2018-08-01 | Optical measuring system based on integrating sphere |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111579062A (en) * | 2020-05-11 | 2020-08-25 | 武汉锐科光纤激光技术股份有限公司 | Integrating sphere type laser power meter and using method thereof |
| CN114034391A (en) * | 2021-11-09 | 2022-02-11 | 中国计量科学研究院 | Target emissivity distribution characteristic measuring device |
| CN114354543A (en) * | 2021-12-22 | 2022-04-15 | 广东省中山市质量计量监督检测所 | Photometric sphere coating reflectivity measuring device and method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105628196A (en) * | 2015-12-22 | 2016-06-01 | 中国电子科技集团公司第四十一研究所 | Device and method of testing ultraviolet focal plane array response features |
| CN105737995A (en) * | 2016-03-25 | 2016-07-06 | 中国科学院上海光学精密机械研究所 | High-power laser multi-parameter measurement device based on integrating sphere |
| CN106052863A (en) * | 2016-05-23 | 2016-10-26 | 中国科学院长春光学精密机械与物理研究所 | Light source system |
-
2018
- 2018-08-01 CN CN201810859539.0A patent/CN108981911A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105628196A (en) * | 2015-12-22 | 2016-06-01 | 中国电子科技集团公司第四十一研究所 | Device and method of testing ultraviolet focal plane array response features |
| CN105737995A (en) * | 2016-03-25 | 2016-07-06 | 中国科学院上海光学精密机械研究所 | High-power laser multi-parameter measurement device based on integrating sphere |
| CN106052863A (en) * | 2016-05-23 | 2016-10-26 | 中国科学院长春光学精密机械与物理研究所 | Light source system |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111579062A (en) * | 2020-05-11 | 2020-08-25 | 武汉锐科光纤激光技术股份有限公司 | Integrating sphere type laser power meter and using method thereof |
| CN114034391A (en) * | 2021-11-09 | 2022-02-11 | 中国计量科学研究院 | Target emissivity distribution characteristic measuring device |
| CN114034391B (en) * | 2021-11-09 | 2024-02-02 | 中国计量科学研究院 | Target emissivity distribution characteristic measuring device |
| CN114354543A (en) * | 2021-12-22 | 2022-04-15 | 广东省中山市质量计量监督检测所 | Photometric sphere coating reflectivity measuring device and method thereof |
| CN114354543B (en) * | 2021-12-22 | 2024-06-04 | 广东省中山市质量计量监督检测所 | Device and method for measuring reflectivity of photometric sphere coating |
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Application publication date: 20181211 |
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