CN108981412A - Vacuum drying oven and its viewing window cleaner - Google Patents

Vacuum drying oven and its viewing window cleaner Download PDF

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Publication number
CN108981412A
CN108981412A CN201810653639.8A CN201810653639A CN108981412A CN 108981412 A CN108981412 A CN 108981412A CN 201810653639 A CN201810653639 A CN 201810653639A CN 108981412 A CN108981412 A CN 108981412A
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CN
China
Prior art keywords
mounting base
pumping rod
viewing window
cleaning head
window cleaner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810653639.8A
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Chinese (zh)
Other versions
CN108981412B (en
Inventor
刘洋
黄恒
王占伟
严俊
许多挺
廖业宏
刘彤
任啟森
李锐
李雷
杨英
武海龙
翟剑晗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China General Nuclear Power Corp
China Nuclear Power Technology Research Institute Co Ltd
CGN Power Co Ltd
Guangdong Nuclear Power Joint Venture Co Ltd
China Nuclear Power Institute Co Ltd
Original Assignee
China General Nuclear Power Corp
China Nuclear Power Technology Research Institute Co Ltd
CGN Power Co Ltd
Guangdong Nuclear Power Joint Venture Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China General Nuclear Power Corp, China Nuclear Power Technology Research Institute Co Ltd, CGN Power Co Ltd, Guangdong Nuclear Power Joint Venture Co Ltd filed Critical China General Nuclear Power Corp
Priority to CN201810653639.8A priority Critical patent/CN108981412B/en
Publication of CN108981412A publication Critical patent/CN108981412A/en
Application granted granted Critical
Publication of CN108981412B publication Critical patent/CN108981412B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D25/00Devices or methods for removing incrustations, e.g. slag, metal deposits, dust; Devices or methods for preventing the adherence of slag
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/30Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D21/00Arrangements of monitoring devices; Arrangements of safety devices
    • F27D21/02Observation or illuminating devices

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

The present invention relates to a kind of vacuum drying oven and its viewing window cleaner, the outside of vacuum drying oven is equipped with the mounting base installed for form, and cleaning device includes pumping rod and cleaning head.Pumping rod is worn in mounting base, and can be mobile to pull inside and outside mounting base;Cleaning head is located at the inner end of pumping rod.In pumping rod draw process, the medial surface of form is cleaned.Cleaning device can realize the online cleaning of form under room temperature and worst hot case, it is contaminated on the inside of form after blocking observation, real-time online cleans form medial surface, guarantee measurement accuracy of the in-situ measurement device in high temperature high vacuum environment, cleaning process is easy to operate, it is ensured that the vacuum degree in furnace chamber.

Description

Vacuum drying oven and its viewing window cleaner
Technical field
The present invention relates to vacuum high temperature furnace fields, more specifically to a kind of vacuum drying oven and its viewing window cleaner.
Background technique
Currently, viewing window cleaner is widely used in aerospace, automobile, food, tobacco, outdoor video monitoring device etc. Industry, common cleaning device such as: windshield wiper, tobacco sorter viewing window cleaner, monitoring camera optical window, greatly Part is worked in room temperature, normal pressure operating condition.In industry frequently with cleaning mode be broadly divided into contact and contactless clear Clean two kinds.Contact cleaning mode is primarily referred to as cleaning brush and acts directly on form, carries out form by mechanical swing arm motion Cleaning, by taking windshield wiper as an example, main purpose is exactly the letter for preventing rainwater and other pollutant effects driver sight and installing Single burnisher, adhesive tape for wiper blade material are resistance to ozone and the strong rubber material of anti-uv-ray, have good water repellent and remove Dirty effect, but this kind of rubber can not use in worst hot case.Non-contact cleaning mode mainly passes through gas or liquid is formed Quick flow or liquid stream viewing surface is cleaned, this kind of device is complex, higher cost, with the view of tobacco sorter For window cleaning device, wind-force is provided using blower to clean form, but can not be very high by the wind speed that blower provides, in addition Wind speed is uneven, in electrostatic it is low with rate, EFFECTIVE RANGE is close etc., and reasons, form cleaning effect are undesirable.
In industrial circles such as aerospace, automobile, derived energy chemicals, many components are all long services at high temperature, are such as sent out Motivation, boiler, refining equipment, cladding nuclear fuels pipe etc., they propose very high requirement to the high temperature resistant service performance of material, Correct evaluation material, the heat-resisting material for reasonably using material, research new, become above-mentioned industrial development and material science research One of vital task.By taking current nuclear power field research hotspot accident fault tolerant fuel (ATF) cladding tubes as an example, main target is A kind of traditional zirconium alloy cladding pipe of novel fire resistant material enclosure pipe substitution is developed, in design basis accident and super design reference Can be resisted under accident conditions high temperature, can prevent fission product release, fuel gas yield in permissible range in certain time, Keep reactor core can cooling capacity high performance fuel system, reduce reactor occur major accident risk, alleviate major accident after Fruit improves the extreme event ability that nuclear power station resists super design reference, improves the safety of reactor.
Advanced heat-resisting material refers to a generic material of the long-term work under high temperature and certain stress.Advanced resistance to height Adiabator elevated temperature strength with higher, good anti-oxidant and hot corrosion resistance, good anti-oxidant and corrosion and heat resistant Can, good fatigue behaviour, fracture toughness, plasticity etc..Currently, advanced heat-resisting material specifically includes that high temperature alloy, infusibility gold Category, ceramics, intermetallic compound, metal-base composites, ceramic composite etc..High temperature furnace and in-situ measurement device combine It is research advanced hightemperature mechanical property under high temperature complexity bad working environments, such as: stretching, creep, fatigue, fracture behavior machine The important measurement method of reason, wherein the high temperature furnace infrared induction furnace that is rapidly heated by traditional resistance furnace till now, former Level measuring arrangement is by traditional contact type measurement, such as: extensometer, and till now non-contact is measurement, such as: infrared survey, High-speed camera etc., data acquisition rate and accuracy are continuously improved.But it finds in use, in-situ measurement device is to measurement Form Penetration ration it is more demanding, with the decline of form Penetration ration in measurement process, measurement data will appear drift, influence to survey Accuracy of measurement leads to not measure when serious, and this phenomenon is particularly evident in traditional high temperature vacuum resistance furnace, and main cause is such as Under:
It (1) is more than 1000 DEG C of resistance furnace for using temperature, especially under high vacuum environment, calandria would generally be used Molybdenum filament or graphite heating body, trace volatiles in use can be attached to viewing surface, reduce form Penetration ration;
(2) when being more than 1000 DEG C using temperature, structural member in furnace, such as piece fixture, heat screen, heat insulation foam, even Certain oxysensible test specimens itself can also generate micro voloxidation object and be attached to viewing surface, reduce form Penetration ration;
(3) high temperature furnace is not it is difficult to ensure that furnace chamber has any pollution during cleaning, these pollutants are in the high temperature process It can volatilize and be attached to viewing surface, reduce form Penetration ration;
Therefore, a kind of viewing window cleaner suitable for vacuum high temperature furnace is developed, it is first to promotion in-situ measurement device It is of great significance into the further application in high-temperature material performance study.
High temperature high vacuum furnace viewing window cleaner is studied at present less, technical difficult points have as follows: first, it is only capable of Contact cleaning mode is taken to clean form, because the high-speed flow cleaning form formed using gas can make in furnace Vacuum degree and temperature generate fluctuation, influence measurement result, and volatile matter biggish for adhesive force not can guarantee and completely remove; Second, cleaning device Fixture Design will guarantee the cleaning effect of form;Third, the material of cleaning device, especially cleaning brush material The selection of matter, which will meet, to be used for a long time at high temperature;4th, cleaning device should guarantee the spirit of operation in use Activity guarantees the vacuum degree in furnace chamber again.
Summary of the invention
The technical problem to be solved in the present invention is that providing a kind of can carry out clean vacuum drying oven and its view to form online Window cleaning device.
The technical solution adopted by the present invention to solve the technical problems is: a kind of viewing window cleaner of vacuum drying oven is constructed, The outside of the vacuum drying oven is equipped with the mounting base installed for form, and the cleaning device includes pumping rod and cleaning head;
The pumping rod is worn in the mounting base, and can be mobile to pull inside and outside the mounting base;
The cleaning head is located at the inner end of the pumping rod, in the pumping rod draw process, in the form Side cleaning.
Preferably, the inner end of the pumping rod is equipped with connector, and the connector is stretched out to the form side, described clear Clean head is mounted on the connector end opposite with the form.
Preferably, the connector is removably mounted on the pumping rod, and the cleaning head is removably mounted on On the connector.
Preferably, the cleaning head uses high-ductility alloy, and the edge of the cleaning head and the form opposite side is opened Cutting edge.
Preferably, the width of the cleaning head is suitable with the width of the form, height of the pumping rod in the form Spend direction pull back and forth.
Preferably, the guiding mechanism for allowing the cleaning head to slide along the medial surface of the form is equipped in the mounting base.
Preferably, the guiding mechanism includes the guide groove being arranged on the inside of the mounting base, the extension of the guide groove Direction is parallel with the medial surface of the form, and the cleaning head is equipped with to be engaged and can be along the guide groove with the guide groove The guide protrusions of sliding.
Preferably, the cleaning device further includes the thermal baffle being arranged in the mounting base, the thermal baffle position In the side that the pumping rod is opposite with the form, the pumping rod, cleaning head are isolated with the furnace chamber of the vacuum drying oven.
Preferably, the protection block moving range of the cleaning head being defined in the mounting base.
Preferably, the mounting base is equipped with seal nipple, and seal assembly is equipped with outside the seal nipple;
The seal assembly includes sealing pipeline, sealing cover, and one end of the sealing pipeline is connect with the seal nipple, The sealing cover is mounted on the other end of the sealing pipeline, is connected in the sealing pipeline and the mounting base;
The sealing cover is equipped with perforation, and the pumping rod wears the perforation, and wears institute through the sealing pipeline It states in mounting base.
Preferably, the seal assembly further includes clips, and sealing pipeline one end opposite with the sealing cover is set There is a flange, the clips are by the sealing cover and the flange pinch seal.
Preferably, the sealing pipeline is telescopically arranged.
A kind of vacuum drying oven, including furnace body, the mounting base being arranged in outside the furnace body, and be mounted on it is right in the mounting base The form observed in the vacuum drying oven, the vacuum drying oven further include the viewing window cleaner, and the cleaning device setting exists In the mounting base.
Implement vacuum drying oven and its viewing window cleaner of the invention, has the advantages that cleaning device can be realized often The online cleaning of form under temperature and worst hot case is contaminated after blocking observation on the inside of form, and real-time online is to form medial surface It is cleaned, guarantees that measurement accuracy of the in-situ measurement device in high temperature high vacuum environment, cleaning process are easy to operate, it is ensured that Vacuum degree in furnace chamber.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples, in attached drawing:
Fig. 1 is the schematic diagram of the section structure of the vacuum drying oven with viewing window cleaner in the embodiment of the present invention;
Fig. 2 is the structural schematic diagram of the cleaning device in Fig. 1;
Fig. 3 is the positive structure schematic of the cleaning device in Fig. 1.
Specific embodiment
For a clearer understanding of the technical characteristics, objects and effects of the present invention, now control attached drawing is described in detail A specific embodiment of the invention.
As shown in Figure 1, the vacuum high temperature furnace in a preferred embodiment of the invention includes high temperature resistance furnace body 1, heating Body 2, testpieces 3, sample clamp 4, pressure guiding pipe 5, in-situ measurement device 6, cleaning device 7 and form 8.
1 material of high temperature resistance furnace body is high temperature resistant stainless steel, and is connected with cooling water conservation.Calandria 2, testpieces 3, sample Product fixture 4 is arranged in high temperature resistance furnace body 1.Calandria 2 can make in-furnace temperature be increased to 1200 DEG C, and pass through pressure guiding pipe 5 It is passed through pressurising medium, realizes pressurization in developmental tube.
The outside of vacuum drying oven is equipped with the mounting base 9 installed for form 8, can see inside furnace body 1 from form 8.In situ measurement Device 6 is arranged outside form 8, and form 8 is used as measurement window, can be outer to 3 pipe radial variations of testpieces in furnace body 1 from form 8 Observation monitoring in real time.
In conjunction with shown in Fig. 1 to Fig. 3, cleaning device 7 includes pumping rod 71 and cleaning head 72, and pumping rod 71 wears installation In seat 9, and can be mobile to pull inside and outside mounting base 9.Cleaning head 72 is located at the inner end of pumping rod 71, in 71 pull mistake of pumping rod Cheng Zhong cleans the medial surface of form 8.
Cleaning device 7 can realize the online cleaning of form 8 under room temperature and worst hot case, be contaminated and block on the inside of form 8 After observation, real-time online cleans 8 medial surface of form, guarantees survey of the in-situ measurement device 6 in high temperature high vacuum environment Accuracy of measurement.
In some embodiments, mounting base 9 is equipped with seal nipple 91, is equipped with seal assembly 73 outside seal nipple 91, Seal nipple 91 is equipped with interface, installs for seal assembly 73.
Seal assembly 73 includes sealing pipeline 731, sealing cover 732, on one end of sealing pipeline 731 and seal nipple 91 Interface connection, and the sealing after sealed between guarantee sealing pipeline 731 and the mating surface of seal nipple 91.
Sealing cover 732 is mounted on the other end of sealing pipeline 731, is connected in sealing pipeline 731 and mounting base 9.Sealing cover 732 are equipped with perforation 7321, and pumping rod 71 wears perforation 7321, and sealed pipeline 731 is worn in mounting base 9, pumping rod It seals and cooperates between 71 and perforation 7321.
Preferably, seal assembly 73 further includes clips 733, and the one end opposite with sealing cover 732 of sealing pipeline 731 is equipped with Flange 7311, clips 733 are by 7311 pinch seal of sealing cover 732 and flange.In other embodiments, flange 7311 can also be with Sealing after sealing cover 732 is sealed.Collective effect after the both ends sealing of sealing pipeline 731, guarantees the vacuum degree of entire fixture system.
In order to reduce influence of the sealing pipeline 731 to pumping rod 71 when moving of pumping rod 71, sealing pipeline 731 can stretch The setting of contracting ground, when pumping rod 71 is moved into mounting base 9, sealing pipeline 731 is compressed, in pumping rod 71 to outside mounting base 9 When mobile, sealing pipeline 731 is elongated.
Preferably, sealing pipeline 731 includes telescopic helix tube, can directly stretched after by axial force, certainly, Sealing pipeline 731 can also wherein one section of setting soft structures can stretch in stress.In general, sealing pipeline 731 has 30% or more retractility, while guaranteeing high temperature furnace system vacuum, it is ensured that stretches in 8 wiping process of form is flexible Property.
In other embodiments, seal assembly 73 can also be cancelled, pumping rod 71 is directly allowed to wear the insertion of seal nipple 91 Into mounting base 9.
The inner end of pumping rod 71 is equipped with connector 74, and connector 74 is stretched out to 8 side of form, 72 company of being mounted on of cleaning head , there is connector 74 in the end opposite with form 8 of connector 74, can in order to which cleaning head 72 to be mounted on to the end of connector 74, It allows cleaning head 72 to extend laterally, can reduce the outer dimension of cleaning head 72, be also convenient for pumping rod 71, cleaning head 72, connector Dismounting between 74.
Preferably, connector 74 is removably mounted on pumping rod 71, in general, the lower end of pumping rod 71 and connector 74 It threadably connects, facilitates subsequent installation and replacement.74 shape of connector is in T type, and one end is connect with pumping rod 71, separately It is installed for cleaning head 72 one end.Cleaning head 72 is removably mounted on connector 74, in general, cleaning head 72 is fixed by screw On connector 74, easy disassembly.
In some embodiments, cleaning head 72 is high-ductility alloy cleaning head, cleaning head 72 and 8 opposite side of form Edge put the first edge on a knife or a pair of scissors mouth, improve cleaning effect.
Preferably, the width of cleaning head 72 is suitable with the width of form 8, pumping rod 71 form 8 short transverse back and forth Pull, convenient for controlling the trend in pull direction and cleaning head 72.Further, being equipped in mounting base 9 allows cleaning head 72 along form The guiding mechanism 92 of 8 medial surface sliding.
Guiding mechanism 92 includes the guide groove being arranged on the inside of mounting base 9, is oriented to the inside of trough extending direction and form 8 Face is parallel, and connector 74 is equipped with the guide protrusions 741 that engages with guide groove and can slide along guide groove.
In 71 draw process of pumping rod, connector 74 engages with guide groove always, makes cleaning head 72 and 8 inside of form tight Closely connected conjunction can limit cleaning head 72 and clean always to the medial surface of form 8, and the effect after guaranteeing clean surface cleaning is consistent, reach To required cleaning effect.
Preferably, the inside two edges of form 8 are provided with guide groove, and it is convex that the two sides of connector 74 are also provided with guiding 741 are played, two guide protrusions 741 engage with the guide groove of two sides respectively to be oriented to.In other embodiments, guide protrusions 741 It may also be arranged on the side of cleaning head 72.
Cleaning device 7 further includes the thermal baffle 75 being arranged in mounting base 9, and thermal baffle 75 is located at pumping rod 71 and view The opposite side of window 8 is isolated by pumping rod 71, cleaning head 72 with the furnace chamber of vacuum drying oven.Thermal baffle 75 can obstruct in furnace chamber Radiant heat directly acts on pumping rod 71, connector 74 and cleaning head 72, prevents from causing because of thermal deformation under device cleaning effect Drop.
Further, 8 inner ring edge of form is typically provided with sealing ring, guarantees vacuum degree in furnace, and prevent cleaning head 72 from existing 8 sealing ring of form is damaged during upper and lower pull.Cleaning head 72, which hits damage to sealing ring, in order to prevent influences sealing effect, The protection block 76 that the moving range of cleaning head 72 is defined in mounting base 9.
Protection block 76 keeps out connector 74, limits the moving range of cleaning head 72, protection block 76 can also be right respectively Cleaning head 72, pumping rod 71 are kept out, or are kept out multiple in cleaning head 72, pumping rod 71, cleaning head 72, pumping rod 71, are limited Determine the moving range of cleaning head 72.
In an Application Example of vacuum drying oven, the molybdenum alloy testpieces 3 of diameter of phi 9.712mm is passed through into sample clamp 4 are clamped in high temperature resistance furnace, and the sealing element that sample clamp 4 is equipped with graphite material seals testpieces 3, in-situ measurement device 6 registrations are 9.71255, and data are shown accurately.
1100 DEG C are warming up to 10 DEG C/min heating rate, and after 1100 DEG C of stabilizations, 5MPa is introduced into pipe by pressure guiding pipe 5 Internal pressure, 6 data of in-situ measurement device be 9.71265, data display stablize.1100 DEG C of heat preservation 1000min or so, it is in situ to survey Amount 6 data of device shows unstable, and registration fluctuates, and after showing that testpieces 3 is heated and volatilizing, cause dirt to 8 surface of form Dye.
Further extend soaking time, in-situ measurement device 6 can not show measurement data, show that form 8 is completely dirty Dye.Measurement window is cleaned by cleaning device 7, is cleaned 5~6 times repeatedly, 6 registration of in-situ measurement device reverts to 9.71365, shows Number accurate stable.
Measurement window after wiping can guarantee that 6 registration of in-situ measurement device stablizes 1000min or so again, then measure Registration can fluctuate again, until registration completely disappears.It repeats to wipe, it is ensured that the high penetration rate of measurement form 8 guarantees former The accuracy of 6 DATA REASONING of level measuring arrangement.
In second Application Example of vacuum drying oven, the molybdenum alloy testpieces 3 of diameter of phi 9.735mm is passed through into sample For 4 grip seal of fixture in high temperature resistance furnace, the sealing element that sample clamp 4 is equipped with graphite material seals testpieces 3, in situ 6 registration of measuring device is Φ 9.7385mm, and data are shown accurately.
1150 DEG C are warming up to 10 DEG C/min heating rate, after 1150 DEG C of temperature are stablized, is drawn by pressure guiding pipe 5 into pipe Enter the internal pressure of 5MPa, 6 data of in-situ measurement device are Φ 9.7461mm, and data display is stablized.1150 DEG C of heat preservation 120min or so, 6 data of in-situ measurement device show unstable, and registration fluctuates, after showing the heated volatilization of testpieces 3, to 8 surface of form It pollutes.
1150 DEG C of heat preservation 150min or so, in-situ measurement device 6 can not show measurement data, show the quilt completely of form 8 Pollution.Measurement window is cleaned by cleaning device 7, is cleaned 5~6 times repeatedly, 6 registration of in-situ measurement device reverts to Φ 9.9543mm registration accurate stable.
Measurement window after wiping can guarantee that 6 registration of in-situ measurement device stablizes 120min or so again, then measure Registration can fluctuate again, until registration completely disappears.It repeats to wipe, it is ensured that the high penetration rate of measurement form 8 guarantees former The accuracy of 6 DATA REASONING of level measuring arrangement.
In the third Application Example of vacuum drying oven, 3 pipe of molybdenum alloy testpieces of diameter of phi 9.724mm is passed through into sample For 4 grip seal of product fixture in high temperature resistance furnace, the sealing element that sample clamp 4 is equipped with graphite material seals testpieces 3, former 6 registration of level measuring arrangement is Φ 9.7335mm, and data are shown accurately.
After introducing the internal pressure of 5MPa into pipe by pressure guiding pipe 5,1200 DEG C are warming up to 10 DEG C/min heating rate, After 1200 DEG C of temperature are stablized, 6 data of in-situ measurement device are that data display is stablized.1200 DEG C of heat preservation 30min or so, it is in situ to survey Amount 6 data of device shows unstable, and registration fluctuates, and after showing that testpieces 3 is heated and volatilizing, cause dirt to 8 surface of form Dye.
1200 DEG C of heat preservation 60min or so, in-situ measurement device 6 can not show measurement data, show the quilt completely of form 8 Pollution.Measurement window is cleaned by cleaning device 7, is cleaned 7~8 times repeatedly, 6 registration of in-situ measurement device reverts to 9.9843, Registration accurate stable.
Measurement window after wiping can guarantee that 6 registration of in-situ measurement device stablizes 30min or so again, and then measurement is shown Number can fluctuate again, until registration completely disappears.It repeats to wipe, it is ensured that the high penetration rate of measurement form 8 guarantees in situ The accuracy of 6 DATA REASONING of measuring device.
It is to be appreciated that above-mentioned each technical characteristic can be used in any combination and unrestricted.
The above description is only an embodiment of the present invention, is not intended to limit the scope of the invention, all to utilize this hair Equivalent structure or equivalent flow shift made by bright specification and accompanying drawing content is applied directly or indirectly in other relevant skills Art field, is included within the scope of the present invention.

Claims (13)

1. a kind of viewing window cleaner of vacuum drying oven, the outside of the vacuum drying oven is equipped with the mounting base (9) installed for form (8), It is characterized in that, the cleaning device (7) includes pumping rod (71) and cleaning head (72);
The pumping rod (71) wears in the mounting base (9), and can be mobile to pull inside and outside the mounting base (9);
The cleaning head (72) is located at the inner end of the pumping rod (71), in the pumping rod (71) draw process, to described The medial surface of form (8) cleans.
2. viewing window cleaner according to claim 1, which is characterized in that the inner end of the pumping rod (71) is equipped with connection Head (74), the connector (74) are stretched out to the form (8) side, and the cleaning head (72) is mounted on the connector (74) The opposite end with the form (8).
3. viewing window cleaner according to claim 2, which is characterized in that the connector (74) is removably mounted on On the pumping rod (71), the cleaning head (72) is removably mounted on the connector (74).
4. viewing window cleaner according to claim 1, which is characterized in that the cleaning head (72) is that high-ductility alloy is clear Put the first edge on a knife or a pair of scissors mouth at the edge of clean head, the cleaning head (72) and the form (8) opposite side.
5. viewing window cleaner according to claim 1, which is characterized in that the width of the cleaning head (72) and the view The width of window (8) is suitable, short transverse back and forth pull of the pumping rod (71) in the form (8).
6. viewing window cleaner according to claim 1, which is characterized in that described clear equipped with allowing in the mounting base (9) The guiding mechanism (92) that clean head (72) is slided along the medial surface of the form (8).
7. viewing window cleaner according to claim 6, which is characterized in that the guiding mechanism (92) is included in the peace The guide groove being arranged on the inside of seat (9) is filled, the extending direction of the guide groove is parallel with the medial surface of the form (8), described clear Clean head (72) is equipped with the guide protrusions (741) that engages with the guide groove and can slide along the guide groove.
8. viewing window cleaner according to claim 1, which is characterized in that the cleaning device (7) further includes described The thermal baffle (75) being arranged in mounting base (9), the thermal baffle (75) are located at the pumping rod (71) and the form (8) The pumping rod (71), cleaning head (72) are isolated with the furnace chamber of the vacuum drying oven for opposite side.
9. viewing window cleaner according to claim 1, which is characterized in that the cleaning head in the mounting base (9) (72) the protection block (76) that moving range is defined.
10. viewing window cleaner according to any one of claims 1 to 9, which is characterized in that set on the mounting base (9) Have seal nipple (91), seal assembly (73) are installed outside the seal nipple (91);
The seal assembly (73) includes sealing pipeline (731), sealing cover (732), one end of the sealing pipeline (731) and institute Seal nipple (91) connection is stated, the sealing cover (732) is mounted on the other end of the sealing pipeline (731), the seal pipe It is connected in road (731) and the mounting base (9);
The sealing cover (732) is equipped with perforation (7321), and the pumping rod (71) wears the perforation (7321), and described in warp Sealing pipeline (731) is worn in the mounting base (9).
11. viewing window cleaner according to claim 10, which is characterized in that the seal assembly (73) further includes sealing It presss from both sides (733), the sealing pipeline (731) and the sealing cover (732) opposite one end are equipped with flange (7311), the clips (733) by the sealing cover (732) and the flange (7311) pinch seal.
12. viewing window cleaner according to claim 10, which is characterized in that the sealing pipeline (731) is scalable to be set The helix tube set.
13. a kind of vacuum drying oven, which is characterized in that the mounting base (9) including furnace body (1), setting in the furnace body (1) outside, and Be mounted on to the form (8) observed in the vacuum drying oven on the mounting base (9), the vacuum drying oven further include claim 1 to 12 described in any item viewing window cleaners (7), the cleaning device (7) are arranged on the mounting base (9).
CN201810653639.8A 2018-06-22 2018-06-22 Vacuum furnace and window cleaning device thereof Active CN108981412B (en)

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Application Number Priority Date Filing Date Title
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CN108981412B CN108981412B (en) 2020-05-22

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WO2023284018A1 (en) * 2021-07-16 2023-01-19 长鑫存储技术有限公司 Gate valve device, cleaning method, and mechanical equipment
US11933416B2 (en) 2021-07-16 2024-03-19 Changxin Memory Technologies, Inc. Gate valve device, cleaning method and mechanical apparatus

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WO2023284018A1 (en) * 2021-07-16 2023-01-19 长鑫存储技术有限公司 Gate valve device, cleaning method, and mechanical equipment
US11933416B2 (en) 2021-07-16 2024-03-19 Changxin Memory Technologies, Inc. Gate valve device, cleaning method and mechanical apparatus

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