CN108931189A - Double vision field interferometer - Google Patents
Double vision field interferometer Download PDFInfo
- Publication number
- CN108931189A CN108931189A CN201811182159.4A CN201811182159A CN108931189A CN 108931189 A CN108931189 A CN 108931189A CN 201811182159 A CN201811182159 A CN 201811182159A CN 108931189 A CN108931189 A CN 108931189A
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- Prior art keywords
- amici prism
- mirror
- spectroscope
- collimating mirror
- double vision
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The present invention proposes a kind of double vision field interferometer, comprising: laser point light source；Amici prism, the Amici prism are located at below the laser point light source；Spectroscope, the spectroscope are located at below the Amici prism；Collimating mirror, the collimating mirror are located at spectroscopical right side；Reflectance standard mirror, the reflectance standard mirror are located at the right side of the collimating mirror；Camera is tested, the test camera is located at the left side of the Amici prism；Alignment cameras is assisted, the auxiliary alignment cameras is located at spectroscopical left side.Double vision field interferometer according to an embodiment of the present invention can guarantee the precision that null field is adjusted in the case where big visual field assists alignment pattern, while can guarantee the testing range and precision of super large under small field of view high-resolution test pattern.
Description
Technical field
The present invention relates to a kind of double vision field interferometers.
Background technique
Using cell-phone camera hole detector test camera shooting bore region the depth of parallelism when, need transmission criteria mirror and anti-first
The standard mirror of penetrating strictly levels row.The method of use is not place sample to be tested, and transmission criteria mirror and reflectance standard mirror are formed
Interference fringe is adjusted to null field.
Summary of the invention
The present inventor first recognizes that, since the detection bore of instrument is 5mm, visual field is too small.When in 5mm visual field
When internal interference striped number is less than 1, there is no strictly parallel with reflectance standard mirror for transmission criteria mirror.This is because if will
Visual field amplification, then can be appreciated that in original 5mm visual field there are a plurality of interference fringes.For example, in 5mm visual field internal interference fringe number
When mesh is less than 1, when in 30mm visual field, 5 interference fringes of physical presence.This indicates transmission criteria mirror and reflectance standard mirror
The depth of parallelism not debugging strictly.
The present invention is directed to solve at least some of the technical problems in related technologies.
For this purpose, can be assisted in big visual field to quasi-mode an object of the present invention is to provide a kind of double vision field interferometer
Guarantee the precision that null field is adjusted under formula, while can guarantee the testing range of super large under small field of view high-resolution test pattern
And precision.
A kind of double vision field interferometer according to an embodiment of the present invention, comprising:
Laser point light source；
Amici prism, the Amici prism are located at below the laser point light source；
Spectroscope, the spectroscope are located at below the Amici prism；
Collimating mirror, the collimating mirror are located at spectroscopical right side；
Reflectance standard mirror, the reflectance standard mirror are located at the right side of the collimating mirror；
Camera is tested, the test camera is located at the left side of the Amici prism；
Alignment cameras is assisted, the auxiliary alignment cameras is located at spectroscopical left side.
Advantageously, the laser spherical wave of laser point light source output, through the Amici prism, spectroscope, described
It exports, is transmitted with after reflectance standard mirror reflection, the optical path of return is divided into two-way, is the full view of 30mm all the way after collimating mirror
Field light beam, is received by the auxiliary alignment cameras, forms the interference fringe of full filed；It is the small field of view light beam of 5m all the way, by institute
Test camera is stated to receive.
Additional aspect and advantage of the invention will be set forth in part in the description, and will partially become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
Fig. 1 is the schematic diagram of double vision field interferometer according to an embodiment of the invention.
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, it is intended to is used to explain the present invention, and is not considered as limiting the invention.
Below with reference to the accompanying drawings it is described in detail double vision field interferometer according to an embodiment of the present invention.
As shown in Figure 1, a kind of double vision field interferometer according to an embodiment of the present invention, comprising: laser point light source 1 is divided rib
Mirror 2, spectroscope 3, collimating mirror 4, reflectance standard mirror 5 test camera 6, assist alignment cameras 7.
Specifically, Amici prism 2 is located at below laser point light source 1.
Spectroscope 3 is located at below Amici prism 2.
Collimating mirror 4 is located at the right side of spectroscope 3.
Reflectance standard mirror 5 is located at the right side of collimating mirror 4.
Test camera 6 is located at the left side of Amici prism 2.
Auxiliary alignment cameras 7 is located at the left side of spectroscope 3.
Advantageously, the laser spherical wave that laser point light source 1 exports, exports after Amici prism 2, spectroscope 3, collimating mirror 4,
After transmiting and reflecting with reflectance standard mirror 5, the optical path of return is divided into two-way, is the full filed light beam 101 of 30mm all the way, by assisting
Alignment cameras 7 receives, and forms the interference fringe of full filed；It is the small field of view light beam 102 of 5mm all the way, is received by test camera 6.
It when adjusting cavity interference fringe, adjusts in the case where assisting alignment pattern, when fringe number is adjusted to less than 1, cuts
Change to the test pattern of 5mm.The test pattern of 5mm is ideal null field at this time.
Using double-view field light channel structure, it can guarantee the precision that null field is adjusted in the case where big visual field assists alignment pattern, simultaneously
It can guarantee the testing range and precision of super large under small field of view high-resolution test pattern.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " be orientation based on the figure or
Positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning must
There must be specific orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more of the features.In the description of the present invention, the meaning of " plurality " is two or more, unless separately
There is clearly specific restriction.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " fixation " etc.
Term shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integral；It can be mechanical connect
It connects, is also possible to be electrically connected；It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The interaction relationship of the connection in portion or two elements.It for the ordinary skill in the art, can be according to specific feelings
Condition understands the concrete meaning of above-mentioned term in the present invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature in the second feature " on " or " down " can be with
It is that the first and second features directly contact or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature be directly above or diagonally above the second feature, or be merely representative of
First feature horizontal height is higher than second feature.Fisrt feature can be under the second feature " below ", " below " and " below "
One feature is directly under or diagonally below the second feature, or is merely representative of first feature horizontal height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
It can be combined in any suitable manner in one or more embodiment or examples.In addition, without conflicting with each other, the skill of this field
Art personnel can tie the feature of different embodiments or examples described in this specification and different embodiments or examples
It closes and combines.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is not considered as limiting the invention, those skilled in the art are within the scope of the invention to above-mentioned implementation
Example be changed, modify, replacement and variant, each fall within protection scope of the present invention.
Claims (2)
1. a kind of double vision field interferometer characterized by comprising
Laser point light source；
Amici prism, the Amici prism are located at below the laser point light source；
Spectroscope, the spectroscope are located at below the Amici prism；
Collimating mirror, the collimating mirror are located at spectroscopical right side；
Reflectance standard mirror, the reflectance standard mirror are located at the right side of the collimating mirror；
Camera is tested, the test camera is located at the left side of the Amici prism；
Alignment cameras is assisted, the auxiliary alignment cameras is located at spectroscopical left side.
2. double vision field interferometer according to claim 1, which is characterized in that the laser spherical surface of the laser point light source output
Wave exports after the Amici prism, the spectroscope, the collimating mirror, is transmitted with after reflectance standard mirror reflection, is returned
The optical path returned is divided into two-way, is the full filed light beam of 30mm all the way, is received by the auxiliary alignment cameras, forms the dry of full filed
Relate to striped；It is the small field of view light beam of 5mm all the way, is received by the test camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811182159.4A CN108931189A (en) | 2018-10-09 | 2018-10-09 | Double vision field interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811182159.4A CN108931189A (en) | 2018-10-09 | 2018-10-09 | Double vision field interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108931189A true CN108931189A (en) | 2018-12-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201811182159.4A Pending CN108931189A (en) | 2018-10-09 | 2018-10-09 | Double vision field interferometer |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130286404A1 (en) * | 2010-11-16 | 2013-10-31 | Thunder Bay Regional Research Institute | Methods and apparatus for alignment of interferometer |
| CN104034421A (en) * | 2014-05-21 | 2014-09-10 | 中国科学院西安光学精密机械研究所 | Double-view-field Doppler heterodyne ineterferometer |
| CN104296676A (en) * | 2014-09-29 | 2015-01-21 | 中国科学院光电研究院 | Heterodyne point diffraction interferometer based on phase shift of low-frequency-difference acousto-optic frequency shifter |
| CN204758259U (en) * | 2015-04-20 | 2015-11-11 | 成都太科光电技术有限责任公司 | Testing arrangement is interfered to striking cable in horizontal dual -port plane |
| CN105675262A (en) * | 2016-01-14 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Wavefront detection device for large-diameter high-parallelism optical element |
| CN208720999U (en) * | 2018-10-09 | 2019-04-09 | 上海乾曜光学科技有限公司 | Double vision field interferometer |
-
2018
- 2018-10-09 CN CN201811182159.4A patent/CN108931189A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130286404A1 (en) * | 2010-11-16 | 2013-10-31 | Thunder Bay Regional Research Institute | Methods and apparatus for alignment of interferometer |
| CN104034421A (en) * | 2014-05-21 | 2014-09-10 | 中国科学院西安光学精密机械研究所 | Double-view-field Doppler heterodyne ineterferometer |
| CN104296676A (en) * | 2014-09-29 | 2015-01-21 | 中国科学院光电研究院 | Heterodyne point diffraction interferometer based on phase shift of low-frequency-difference acousto-optic frequency shifter |
| CN204758259U (en) * | 2015-04-20 | 2015-11-11 | 成都太科光电技术有限责任公司 | Testing arrangement is interfered to striking cable in horizontal dual -port plane |
| CN105675262A (en) * | 2016-01-14 | 2016-06-15 | 中国科学院上海光学精密机械研究所 | Wavefront detection device for large-diameter high-parallelism optical element |
| CN208720999U (en) * | 2018-10-09 | 2019-04-09 | 上海乾曜光学科技有限公司 | Double vision field interferometer |
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