CN108899294B - Liquid curtain detection device, processing equipment and liquid curtain detection method - Google Patents
Liquid curtain detection device, processing equipment and liquid curtain detection method Download PDFInfo
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- CN108899294B CN108899294B CN201810737337.9A CN201810737337A CN108899294B CN 108899294 B CN108899294 B CN 108899294B CN 201810737337 A CN201810737337 A CN 201810737337A CN 108899294 B CN108899294 B CN 108899294B
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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Abstract
A liquid curtain detection device, processing equipment and a liquid curtain detection method are provided. The liquid curtain detection device comprises a signal processing unit and a plurality of flow detection units. The flow detection units are sequentially arranged along a preset direction and used for detecting the flow of the liquid curtain formed along the preset direction at different positions; the signal processing unit is configured to receive the flow data detected by the plurality of flow detecting units and process the flow data to acquire state information of the liquid curtain. The liquid curtain detection device can be used for detecting the uniformity of the liquid curtain, for example, whether the liquid curtain has bifurcation or not, and the detection result of the liquid curtain detection device is more accurate and has wider application range.
Description
Technical Field
The embodiment of the disclosure relates to a liquid curtain detection device, processing equipment and a liquid curtain detection method.
Background
Thin Film Transistor (TFT) liquid crystal display devices and Organic Light Emitting Diode (OLED) display devices have become the mainstream of the display market. The array substrate of these display devices is generally formed by using a semiconductor integrated circuit fabrication technology, for example, various functional film layers, electrical elements, etc. are formed on a larger-sized substrate by sputtering, chemical deposition, etching, etc. Semiconductor integrated circuit fabrication processes often use liquids for cleaning, etching, and the like. For example, when a wet etching process is used for etching, the film layer to be etched needs to be pre-wetted in advance, so that the etching solution can be uniformly formed on the film layer to be etched. When operating with liquid, the liquid is typically applied by means of a liquid curtain.
Disclosure of Invention
At least one embodiment of the present disclosure provides a liquid curtain detection apparatus, including a signal processing unit and a plurality of flow detection units; the flow detection units are sequentially arranged along a preset direction and used for detecting the flow of the liquid curtain formed along the preset direction at different positions; the signal processing unit is configured to receive the flow data detected by the plurality of flow detection units and process the flow data to acquire the state information of the liquid curtain.
For example, in a liquid curtain detection device provided in at least one embodiment of the present disclosure, the processing flow data to obtain state information of the liquid curtain includes: and comparing the flow rate difference detected by the adjacent flow rate detection units to determine whether the liquid curtain has a bifurcation or not.
For example, in the liquid curtain detection apparatus provided in at least one embodiment of the present disclosure, the signal processing unit is further configured to receive position information of each of the flow rate detection units in the plurality of flow rate detection units, so as to determine a position of the branch in the liquid curtain.
For example, at least one embodiment of the present disclosure provides a liquid curtain detection device, further including: an alarm unit configured to issue an alarm when it is determined that the bifurcation exists in the liquid curtain.
For example, in a liquid curtain detection device provided in at least one embodiment of the present disclosure, the flow rate detection unit is a water wheel type flow meter.
For example, at least one embodiment of the present disclosure provides a liquid curtain detection device, further including: a position adjustment device, wherein the plurality of flow rate detection units are mounted on the position adjustment device such that the plurality of flow rate detection units are movable in a predetermined direction.
For example, in a liquid curtain detection device provided in at least one embodiment of the present disclosure, the position adjustment device includes a slider and a slide rail; the slide block is used for supporting and moving the plurality of flow detection units; the slide rail includes a predetermined rail, and the slider is disposed in and slidable along the rail.
For example, at least one embodiment of the present disclosure provides a liquid curtain detection device, further including: a driving unit connected with the position adjustment device and configured to drive the position adjustment device.
At least one embodiment of the present disclosure provides a processing apparatus including a liquid curtain forming device and a liquid curtain detection device as described in any one of the above corresponding to the liquid curtain forming device.
For example, the processing apparatus provided in at least one embodiment of the present disclosure further includes: and the cleaning device is configured to perform cleaning operation on the liquid curtain forming device according to the detection result of the liquid curtain detection device.
At least one embodiment of the present disclosure provides a liquid curtain detection method, including: detecting the flow of the liquid curtain at different positions by adopting a plurality of flow detection units; and receiving the flow data detected by the flow detection units, and processing the flow data to acquire the state information of the liquid curtain.
For example, in a liquid curtain detection method provided in at least one embodiment of the present disclosure, processing the flow data to obtain state information of the liquid curtain includes: and comparing the flow rate difference detected by the adjacent flow rate detection units to determine whether the liquid curtain has a bifurcation or not.
For example, in the liquid curtain detection method provided by at least one embodiment of the present disclosure, when it is determined that the divergence exists in the liquid curtain, an alarm is issued.
For example, the liquid curtain detection method provided in at least one embodiment of the present disclosure further includes: and acquiring the position of the adjacent flow detection unit to determine the position of the branch in the liquid curtain.
For example, in a liquid curtain detection method provided by at least one embodiment of the present disclosure, before the detecting the flow rates of the liquid curtain at different positions by using the plurality of flow rate detecting units, the method further includes: adjusting the plurality of flow detection units to a predetermined position to receive the liquid curtain.
The liquid curtain detection device provided by at least one embodiment of the present disclosure can be used for detecting the uniformity of a liquid curtain, for example, whether the liquid curtain has a bifurcation or not, and the detection result of the liquid curtain detection device is more accurate and the application range is wider.
Drawings
To more clearly illustrate the technical solutions of the embodiments of the present disclosure, the drawings of the embodiments will be briefly introduced below, and it is apparent that the drawings in the following description relate only to some embodiments of the present disclosure and are not limiting to the present disclosure.
FIG. 1 is a schematic view of a liquid curtain inspection using an optical liquid curtain inspection device;
fig. 2 is a schematic diagram of a liquid curtain detection device according to an embodiment of the present disclosure;
FIG. 3 is a schematic view of a waterwheel-type flow meter according to an embodiment of the present disclosure;
fig. 4 is a schematic view of a liquid curtain detection device according to an embodiment of the present disclosure;
fig. 5 is a schematic view of another liquid curtain detection device provided in an embodiment of the present disclosure;
FIG. 6 is a schematic view of another liquid curtain detection apparatus according to an embodiment of the present disclosure;
fig. 7 is a schematic view of a processing apparatus according to an embodiment of the disclosure;
fig. 8 is a flowchart of a liquid curtain detection method according to an embodiment of the present disclosure;
fig. 9 is a flowchart of another liquid curtain detection method according to an embodiment of the present disclosure.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present disclosure more apparent, the technical solutions of the embodiments of the present disclosure will be described clearly and completely with reference to the drawings of the embodiments of the present disclosure. It is to be understood that the described embodiments are only a few embodiments of the present disclosure, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the disclosure without any inventive step, are within the scope of protection of the disclosure.
Unless otherwise defined, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this disclosure belongs. The use of "first," "second," and similar terms in this disclosure is not intended to indicate any order, quantity, or importance, but rather is used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that the element or item listed before the word covers the element or item listed after the word and its equivalents, but does not exclude other elements or items. The terms "connected" or "coupled" and the like are not restricted to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", and the like are used merely to indicate relative positional relationships, and when the absolute position of the object being described is changed, the relative positional relationships may also be changed accordingly.
As described above, when the wet etching process is used for etching, the film layer to be etched needs to be pre-wetted in advance, so that the etching solution can be uniformly formed on the film layer to be etched. In the process of applying the liquid, a liquid curtain forming device, such as a liquid knife, can be adopted to spray an etching liquid curtain on the film layer to be etched, so that the etching liquid can be uniformly formed on the film layer to be etched. However, in the actual operation process, the slit-shaped liquid outlet of the liquid curtain sprayed by the liquid knife is easily blocked by impurity particles, or due to some other reasons, the liquid curtain sprayed by the liquid knife is branched, so that the liquid spraying is not uniform, the film layer to be etched cannot be completely pre-wetted, the poor phenomena of non-uniform film layer etching and the like in the subsequent process are caused, and the yield is reduced.
In contrast, in order to smoothly perform the production process and improve the yield, an operator needs to periodically detect the liquid spraying state of the liquid knife, and when the situation that the liquid curtain may be branched is found, the liquid knife is cleaned.
For example, an optical liquid curtain detection device may be used to detect whether the liquid curtain is branched, as shown in fig. 1, a liquid knife 10 is used to spray the liquid curtain 11, a light source emitting device 12 is disposed on one side of the liquid curtain 11, and a light source receiving device 13 is disposed on the other side of the liquid curtain 11. The light source receiving device 13 is disposed corresponding to the light source emitting device 12, so that the light emitted from the light source emitting device 12 can penetrate through the liquid curtain 11 and enter the light source receiving device 13, and the light source receiving device 13 can obtain the light intensity information. Since the liquid curtain 11 may produce a scattering effect on the light, the intensity of the light emitted through the liquid curtain differs from the intensity of the light not emitted through the liquid curtain (e.g., at the liquid curtain bifurcation). Therefore, the presence or absence of divergence of the liquid curtain 11 can be determined by comparing the light intensity information received by the light source receiving device 13 at different positions. For example, in the case shown in fig. 1, the liquid curtain diverges at the position indicated by reference numeral 11A, and therefore the light intensity detected by the light source receiving device 13A corresponding to the position 11A at the same time is significantly different from the light intensity detected by the light source receiving device 13 adjacent thereto, so that it can be judged that the liquid curtain diverges at the position 11A, or the light intensity detected by the light source receiving device 13A corresponding to the position 11A at different times fluctuates, so that it can be judged that the liquid amount of the liquid curtain at the position 11A is unstable.
Although the optical detection device can be used in some ideal clean environments, when water vapor, liquid medicine vapor or other impurities exist in the environment, the impurities may scatter the light emitted by the light source emitting device 12, thereby affecting the detection result of the light source receiving device 13, and making the detection result of the optical liquid curtain detection device inaccurate. In addition, in a corrosive environment, the optical liquid curtain detection device is easily damaged, and therefore the application scenarios of the optical liquid curtain detection device are limited.
At least one embodiment of the present disclosure provides a liquid curtain detection device, including a signal processing unit and a plurality of flow detection units; the flow detection units are sequentially arranged along a preset direction and used for detecting the flow of the liquid curtain formed along the preset direction at different positions; the signal processing unit is configured to receive the flow data detected by the plurality of flow detection units and process the flow data to acquire the state information of the liquid curtain.
At least one embodiment of the present disclosure provides a processing apparatus, which includes a liquid curtain forming device and a liquid curtain detection device as described above corresponding to the liquid curtain forming device.
At least one embodiment of the present disclosure further provides a liquid curtain detection method, including: detecting the flow of the liquid curtain at different positions by adopting a plurality of flow detection units; and receiving the flow data detected by the flow detection units, and processing the flow data to acquire the state information of the liquid curtain.
The liquid curtain detection device, the processing equipment and the liquid curtain detection method of the present disclosure will be described below with reference to several specific embodiments.
At least one embodiment of the present disclosure provides a liquid curtain detection apparatus, as shown in fig. 2, the liquid curtain detection apparatus 100 includes a signal processing unit 102 and a plurality of flow rate detection units 101; the plurality of flow rate detecting units 101 are sequentially arranged in a predetermined direction (for example, a horizontal straight direction in fig. 2). For example, a plurality of flow rate detecting units 101 are arranged in a line at equal intervals in a predetermined direction for detecting flow rates of liquid curtains 103 formed in the predetermined direction at different positions. The signal processing unit 102 is configured to receive the flow rate data detected by the plurality of flow rate detection units 101, and process the flow rate data to acquire state information of the liquid curtain, such as whether the flow rate of the liquid curtain is uniform at different positions, whether a bifurcation exists, and the like.
In the embodiments of the present disclosure, the flow rate refers to the amount of liquid received by the flow rate detection unit within a predetermined time, and is used for representing the amount of liquid at different positions of the liquid curtain.
For example, the signal processing unit 102 receives and compares the flow data detected by the plurality of flow detecting units, and when the flow data detected by the plurality of flow detecting units 101 has a large difference, it can determine that the flow of the liquid curtain at different positions is not uniform, and can determine the non-uniform degree of the liquid curtain according to the difference of the flow data, so as to adjust the state of the liquid curtain in time according to the determination result, so as to facilitate the smooth operation of the production process.
For example, in one embodiment, processing the flow data to obtain status information of the liquid curtain comprises: and comparing the flow rate difference detected by the adjacent flow rate detection units to determine whether the liquid curtain has the bifurcation or not. When the liquid curtain is branched, the flow difference of the liquid curtain at the branched position is large, so that when the flow difference detected by the adjacent flow detection units is large, the liquid curtain can be judged to be branched. For example, when the flow rate difference detected by the adjacent flow rate detecting units exceeds a predetermined value, it can be determined that the liquid curtain is branched. For example, the predetermined value may be preset according to actual production conditions, requirements for uniformity of the liquid curtain and the like.
For example, in one embodiment, the signal processing unit may be further configured to receive position information of each of the plurality of flow detection units to determine a position of the bifurcation in the liquid curtain. In this embodiment, the signal processing unit can obtain the position information of the flow detection unit and the flow information detected by the flow detection unit at the same time, so that the liquid curtain detection device can simultaneously judge whether the liquid curtain is branched and the position of the liquid curtain at which the liquid curtain is branched, so as to timely and pertinently adjust the state of the liquid curtain.
For example, in one embodiment, as shown in fig. 2, the liquid curtain detection apparatus 100 may further include an alarm unit 110, the alarm unit 100 being configured to issue an alarm when it is determined that a bifurcation exists in the liquid curtain. For example, in the case shown in fig. 2, since the liquid curtain is branched, the flow rate detected by the flow rate detecting unit 101A at the branch of the liquid curtain is significantly smaller than the flow rates detected by the adjacent flow rate detecting units 101B and 101C, and when the difference between the flow rate detected by the flow rate detecting unit 101A and the flow rate detected by the flow rate detecting unit 101B or 101C exceeds a predetermined value, the signal processing unit 102 may determine that the liquid curtain is branched at the position corresponding to the flow rate detecting unit 101A, and the alarm unit 100 may issue an alarm.
For example, the alarm unit 110 may be in signal connection with the signal processing unit 102 in a wired or wireless manner, so that an adverse condition detected by the signal processing unit 102 may be alarmed. For example, the alarm unit 100 may alarm in the form of sound or an indicator light, and at this time, the alarm unit 100 may be, for example, a sound box or an LED light, and for example, the alarm unit 100 may also be a functional module of the control system, and when receiving the alarm information, the operator is prompted in the form of text, an icon, and the like in an operation interface of the control system. The embodiment of the present disclosure does not limit the specific form of the liquid curtain detection device. For example, the alarm unit 110 may be disposed on the liquid curtain detection apparatus 100, or may be disposed in an office of an operator, in which case the alarm unit 110 may be in wireless signal connection with the signal processing unit 102.
For example, in one embodiment, the flow sensing unit 101 is a water wheel-type flow meter. The waterwheel type flowmeter performs flow rate detection in a physical manner. For example, in one example, as shown in FIG. 3, a waterwheel 1011 includes a waterwheel having a liquid take off 1013 disposed on a turntable 1012 of the waterwheel. When the water wheel type flowmeter 1011 works, the rotary disc 1012 rotates at a constant speed, and flow data is obtained according to the quantity of liquid obtained by the liquid taking device 1013 in the rotary disc 1012. For example, the parts of the water wheel type flowmeter 1011 can be made of corrosion-resistant material, such as Polytetrafluoroethylene (PTFE) or Polystyrene (PS), so that the water wheel type flowmeter 1011 can measure the flow of corrosive chemical liquid.
For example, the signal processing unit 102 may be a Central Processing Unit (CPU) or other forms of processing units with data processing capability and/or program execution capability, such as a Programmable Logic Controller (PLC), a signal processor (DSP), a single chip, and the like, and the specific form of the signal processing unit 102 is not limited in the embodiments of the disclosure.
For example, the signal processing unit 102 may further include a storage unit to store information such as a threshold value for determining the degree of unevenness of the liquid curtain, for example, a predetermined value for determining whether the liquid curtain is branched or not. For example, the storage unit may be a computer-readable storage medium, such as a volatile memory and/or a nonvolatile memory, or may also be a semiconductor storage device, such as a flash memory, and this is not limited in this embodiment of the disclosure.
For example, the signal processing unit 102 may have a housing, and the housing may be made of a corrosion-resistant material, so that the entire liquid curtain detection apparatus may be used in a corrosive environment.
For example, in one embodiment, the liquid curtain detection apparatus may further include a position adjustment apparatus on which the plurality of flow rate detection units are mounted such that the plurality of flow rate detection units can move in a predetermined direction.
For example, as shown in fig. 4, the liquid curtain detection apparatus 100 includes a position adjustment apparatus in the form of, for example, a frame on which a flow rate detection unit 101 is provided. In the example shown in the figures, the position adjustment means comprise a plurality of slides 105 and a plurality of slide rails 106. The slider 105 is used to support and move the plurality of flow rate detection units 101, the slide rail 106 includes a predetermined track, and the slider 105 is disposed in the track and is slidable along the track.
For example, in fig. 4, a plurality of flow rate detecting units 101 are provided on a frame, and a signal processing unit 102 is provided inside the frame, which constitutes at least part of the housing of the signal processing unit 102. For example, the flow rate detecting units 101 and the signal processing unit 102 are formed as a whole, which may be directly disposed on the slider 105, and the slider 105 moves along the slide rail 106 to move the flow rate detecting units to a predetermined position, such as a position of the liquid curtain. For example, the liquid curtain forming means may spray liquid at different positions, or may be formed to be movable along a predetermined position. In this case, the liquid curtain detection apparatus 100 is provided to be movable so that both can be moved in synchronization, and the liquid curtain detection apparatus 100 can detect the condition of the liquid curtain forming apparatus in real time.
For example, as shown in fig. 5, a support frame 1051 may be provided on the slider 105 so that the plurality of flow rate detecting units 101 are sequentially mounted on the support frame 1051, for example, detachably mounted on the support frame 1051. For example, the supporting frame 1051 has a plurality of mounting portions arranged in an array, and the plurality of flow rate detecting units 101 may be selectively mounted on the mounting portions at different positions. For example, the signal processing unit 102 is formed as a plurality of parts corresponding to the plurality of flow rate detecting units 101 one by one, and the parts are connected by signals in a wired or wireless manner, so as to receive and compare the flow rate data detected by the plurality of flow rate detecting units 101.
For example, the spacing distance between the plurality of flow rate detection units 101 may be adjusted according to actual conditions, and for example, the spacing distance between the plurality of flow rate detection units 101 may be selected according to the accuracy requirement of detection to adjust the density of the plurality of flow rate detection units 101. For example, when the requirement for the detection accuracy is high, the spacing distance of the plurality of flow rate detection units 101 may be set to a small value, that is, the plurality of flow rate detection units 101 are densely arranged, so that the plurality of flow rate detection units 101 may obtain more position information and flow rate information, and thus when the liquid curtain is non-uniform, for example, the liquid curtain is split, the liquid curtain detection apparatus may make a more accurate determination as to whether the liquid curtain is non-uniform and where the liquid curtain is non-uniform, for example, whether the liquid curtain is split and where the split is generated.
For example, as shown in fig. 6, the position adjusting device may further include a lead screw 107 and a screw structure 108. The lead screw 107 and the screw structure 108 can be used to cooperate to provide a transmission power for the movement of the slider 105 on the slide rail 106. Fig. 6 shows a cross-sectional view of the lead screw 107 and the screw structure 108, and the lead screw 107 extends in the same direction as the slide rail 106. For example, the bottom of the supporting frame 1051 forms a spiral structure 108, and the rotation of the lead screw 107 can push the spiral structure 108 and the supporting frame 1051 thereon to move along the extending direction of the lead screw 107, so as to push the sliding block 105 to move along the track defined by the rail of the sliding block 106.
For example, in one embodiment, as shown in fig. 6, the liquid curtain detection apparatus 100 may further include a driving unit 109, and the driving unit 109 is connected with and configured to drive the position adjustment apparatus. For example, the drive unit 109 is in driving connection with the position adjustment device, so that the drive unit 109 can transmit power to the position adjustment device. For example, the connection between the driving unit 109 and the position adjustment device may be a direct connection or an indirect connection, and the embodiment of the present disclosure is not limited thereto.
For example, the driving unit 109 may be a motor, such as a stepping motor, a servo motor, etc., and the power output by the motor acts on the lead screw 107 to drive the lead screw 107 to rotate in the forward direction or in the reverse direction, so as to drive the slide block 105 to reciprocate on the slide rail 106.
For example, in one embodiment, as shown in fig. 6, the liquid curtain detection apparatus 100 may further include a control unit 111, for example, and the control unit 111 may be electrically connected to the driving unit 109 in a wired or wireless manner, so as to control the operating state of the driving unit 109. For example, in the case shown in fig. 6, the control unit 111 may control the driving unit 109 to drive the lead screw 107 in the rotation direction and the rotation number, so as to control the moving direction and the moving distance of the slider 105 on the slide rail 106, and move the plurality of flow rate detecting units 101 to the predetermined positions.
For example, the control unit 111 may be in the form of a Central Processing Unit (CPU), a single chip, a Programmable Logic Controller (PLC), and the like, which is not limited in this embodiment of the disclosure. For example, the control unit 111 may comprise processing circuitry as well as memory devices, which may be magnetic memory devices or semiconductor memory devices, for storing operating instructions or data or the like.
In other embodiments, the slider 105 and the slide rail 106 may take other forms. For example, the slide rail 106 is in the form of a bar, on which the slider 105 is fitted, so that the slider 105 can move in the direction in which the bar extends. The embodiment does not limit the specific implementation form of the sliding block 105 and the sliding rail 106.
In other embodiments, the position adjustment device may take other forms as well. For example, the position adjustment device may also be in the form of a gear and rack arrangement, in which case the flow sensing units are integrally arranged on a carriage having a gear, which carriage may travel along a track defined by the rack. For example, a driving unit for driving the trolley to move is arranged in the trolley, at this time, for example, the trolley can be driven by a control unit, and the control unit can control the moving direction and the moving distance of the trolley, so that the plurality of flow rate detection units move to the preset positions.
For example, in one embodiment, the liquid curtain detection device may further include a liquid recovery device for recovering the liquid flowing into the liquid curtain detection device so as not to pollute the environment when the liquid has destructive power such as corrosiveness, or for reusing the recovered liquid. For example, a liquid recovery device may be disposed below the plurality of flow rate detection units and the signal processing unit 102 (not shown in the figure) so as to recover the liquid flowing into the liquid curtain detection device.
The flow detection unit of the liquid curtain detection device provided by the embodiment of the disclosure can acquire flow data in a physical manner, so that the influence of water vapor, liquid medicine vapor or other impurities possibly existing in the environment on the detection result can be avoided, and the detection result is more accurate; and this liquid curtain detection device can be used for in having the environment of corrosivity, therefore application scope is wider.
At least one embodiment of the present disclosure provides a processing apparatus, as shown in fig. 7, the processing apparatus 10 includes a liquid curtain forming device 104 and a liquid curtain detection device 100 corresponding to the liquid curtain forming device 104 and as described above.
For example, the liquid curtain forming device 104 is a liquid knife, and the liquid knife 104 includes, for example, a liquid storage unit and a liquid outlet for forming a liquid curtain. For example, in an etching process, a 104 liquid knife may be used for pre-wetting a material to be etched, or applying an etching liquid, so that a subsequent etching process can be smoothly performed.
For example, in one embodiment, as shown in fig. 7, the processing apparatus 10 may further include a control device 11, and the control device 11 may be in signal connection with the liquid curtain detection device 100 and the liquid curtain forming device 104 in a wired or wireless manner. For example, the control device 11 is configured to control the operating state of the liquid curtain forming device 104 based on the detection result of the liquid curtain detection device 100. For example, when the detected flow rate difference of the plurality of flow rate detecting units of the liquid curtain detecting apparatus 100 is large, or the detected flow rate difference of the adjacent flow rate detecting units exceeds a predetermined value, the liquid curtain detecting apparatus 100 determines that the liquid curtain is not uniform or a bifurcation phenomenon occurs, and at this time, the liquid curtain forming apparatus 104 may be contaminated by foreign particles or the like, so that the control apparatus 11 may control the liquid curtain forming apparatus 104 to stop operating or perform a cleaning operation.
For example, in one embodiment, the processing tool 10 may further include a cleaning device 12, the cleaning device 12 being configured to perform a cleaning operation on the liquid curtain forming device 104. For example, the cleaning device 12 is configured to perform a cleaning operation on the liquid curtain forming device 104 based on the detection result of the liquid curtain detection device 100.
For example, the control device 11 may also be configured to control the operating state of the cleaning device 12. For example, when the liquid curtain detection device 100 detects that the liquid curtain is not uniform or a bifurcation phenomenon occurs, the control device 11 controls the liquid curtain forming device 104 to stop operating, and controls the cleaning device 12 to open, at which time the cleaning device 12 cleans the liquid curtain forming device 104, when the cleaning device 12 cleans for a predetermined time, the cleaning is finished, the control device 11 controls the cleaning device 12 to stop operating, and then controls the liquid curtain forming device 104 to open, and the liquid curtain forming device 104 continues to spray the liquid curtain.
For example, the control device 11 may be in the form of a Central Processing Unit (CPU), a single chip, a Programmable Logic Controller (PLC), and the like, which is not limited in this embodiment of the disclosure. For example, the control means 11 may comprise processing circuitry as well as memory means, which may be magnetic memory means or semiconductor memory means, for storing operating instructions or data or the like. For example, the control device 11 and the control unit 111 shown in fig. 6 may be implemented as the same control device.
The processing equipment provided by the embodiment of the disclosure can control each part structure through the control device, for example, the working states of the liquid curtain forming device, the liquid curtain detection device and the cleaning device, detect the liquid curtain formed by the liquid curtain forming device through the liquid curtain detection device, and can also perform automatic treatment when detecting that a bad phenomenon occurs, so as to ensure that the liquid curtain formed by the liquid curtain forming device is uniformly sprayed.
At least one embodiment of the present disclosure provides a liquid curtain detection method, as shown in fig. 8, the method includes step S101 and step S102.
Step S101: and detecting the flow of the liquid curtain at different positions by adopting a plurality of flow detection units.
For example, a plurality of flow rate detecting units may be arranged in a predetermined direction to detect flow rates of liquid curtains formed in the predetermined direction at different positions. For example, the flow rate detection unit may employ a water wheel type flow meter. As described above, the waterwheel-type flow meter may physically acquire flow data. For example, each component of the waterwheel type flowmeter may be made of a corrosion-resistant material, so that the waterwheel type flowmeter can measure the flow of a corrosive chemical liquid.
Step S102: and receiving the flow data detected by the flow detection units, and processing the flow data to acquire the state information of the liquid curtain.
For example, the signal processing unit may be used to receive and process the flow data detected by the plurality of flow detection units. For example, the signal processing unit may be a Central Processing Unit (CPU) or other form of processing unit having data processing capability and/or program execution capability, and the specific form of the signal processing unit is not limited by the embodiments of the present disclosure.
For example, the signal processing unit receives and compares the flow data detected by the plurality of flow detection units, when the flow data detected by the plurality of flow detection units have large difference, the liquid curtain can be judged to be non-uniform, and the non-uniform degree of the liquid curtain can be judged according to the difference of the flow data.
For example, the outer casing of the signal processing unit may also be made of a corrosion-resistant material, so that the entire liquid curtain detection device may be used in a corrosive environment.
For example, in one embodiment, processing the flow data to obtain status information of the liquid curtain comprises: and comparing the flow rate difference detected by the adjacent flow rate detection units to determine whether the liquid curtain has the bifurcation or not. When the liquid curtain is branched, the flow difference of the liquid curtain at the branched position is large, so that when the flow difference detected by the adjacent flow detection units is large, the liquid curtain can be judged to be branched. For example, when the flow rate difference detected by the adjacent flow rate detecting units exceeds a predetermined value, it can be determined that the liquid curtain is branched. The predetermined value can be preset according to the actual production condition, the requirement of uniformity of the liquid curtain and the like.
For example, in one embodiment, the liquid curtain detection method may further include: the positions of adjacent flow detection units are acquired to determine the position of the bifurcation in the liquid curtain. In this embodiment, the signal processing unit can obtain the position information of the flow detection unit and the flow information detected by the flow detection unit at the same time, so that the liquid curtain detection device can simultaneously judge whether the liquid curtain is branched and the position of the liquid curtain at which the liquid curtain is branched, so as to timely and pertinently adjust the state of the liquid curtain. For example, the position information of the flow detecting unit is the number of the flow detecting unit, the number is the order of the flow detecting unit in the array, and the specific position can be obtained from the order and the total number of the flow detecting unit.
For example, in one embodiment, an alarm is issued when the presence of the bifurcation in the liquid curtain is determined. For example, an alarm unit is used to generate an alarm. The alarm unit can be in signal connection with the signal processing unit in a wired or wireless mode, so that the alarm can be carried out on the bad conditions detected by the signal processing unit. For example, the alarm unit may alarm in the form of sound or an indicator light, and in this case, the alarm unit may be, for example, a sound box or an LED light. The embodiment of the present disclosure does not limit the specific form of the alarm unit.
For example, the signal processing unit may further include a storage unit to store information such as a threshold value for determining the degree of unevenness of the liquid curtain, for example, a predetermined value for determining whether the liquid curtain is branched or not. For example, the storage unit may be a computer-readable storage medium, such as a volatile memory and/or a nonvolatile memory, and the embodiment of the disclosure is not limited thereto.
For example, in one embodiment, as shown in fig. 9, before detecting the flow rates of the liquid curtain at different positions by using a plurality of flow rate detecting units, the liquid curtain detecting method may further include the step S100: and adjusting the plurality of flow detection units to a preset position to receive the liquid curtain.
For example, a position adjustment device may be used to adjust a plurality of flow sensing units to predetermined positions. For example, a plurality of flow rate detecting units are mounted on the position adjusting device such that the plurality of flow rate detecting units can move in a predetermined direction.
For example, the position adjusting device may be in the form of a slider engaged with a slide rail or the like, and may be controlled by a control unit. The specific form and operation of the position adjustment device can be referred to the above embodiments, and are not described herein again.
For example, in an embodiment, the liquid curtain detection method may further include other steps of recovering the liquid flowing into the liquid curtain detection device by using a liquid recovery device, and the embodiment of the disclosure is not limited thereto.
The liquid curtain detection method provided by the embodiment of the disclosure can acquire flow data in a physical manner, thereby avoiding the influence of water vapor, liquid medicine vapor or other impurities and the like possibly existing in the environment on the detection result and enabling the detection result to be more accurate; and the liquid curtain detection method can realize detection in corrosive environment, so the application range is wider.
The following points need to be explained:
(1) the drawings of the embodiments of the disclosure only relate to the structures related to the embodiments of the disclosure, and other structures can refer to the common design.
(2) For purposes of clarity, the thickness of layers or regions in the figures used to describe embodiments of the present disclosure are exaggerated or reduced, i.e., the figures are not drawn on a true scale. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or intervening elements may be present.
(3) Without conflict, embodiments of the present disclosure and features of the embodiments may be combined with each other to arrive at new embodiments.
The above description is only for the specific embodiments of the present disclosure, but the scope of the present disclosure is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present disclosure, and all the changes or substitutions should be covered within the scope of the present disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.
Claims (13)
1. A liquid curtain detection apparatus comprising:
the flow detection units are sequentially arranged along a preset direction and are used for receiving liquid of the liquid curtain and simultaneously detecting the flow of the liquid curtain formed along the preset direction at the positions of different flow detection units, wherein the flow refers to the amount of the liquid received by the flow detection units within preset time;
a signal processing unit configured to receive the flow data detected by the plurality of flow detection units and compare the flow data of the plurality of flow detection units to acquire state information of the liquid curtain,
wherein the comparing the flow data of the plurality of flow detection units to obtain the state information of the liquid curtain comprises:
and comparing the flow rate difference detected by the adjacent flow rate detection units, and determining whether the liquid curtain has a branch when the flow rate difference exceeds a preset value, wherein the preset value can be set according to the uniformity requirement of the liquid curtain.
2. The liquid curtain detection device of claim 1, wherein the signal processing unit is further configured to receive position information for each of the plurality of flow detection units to determine the position of the bifurcation in the liquid curtain.
3. The liquid curtain detection device of claim 1, further comprising:
an alarm unit configured to issue an alarm when it is determined that the bifurcation exists in the liquid curtain.
4. The liquid curtain detection device according to any one of claims 1 to 3, wherein the flow rate detection unit is a water wheel type flow meter.
5. The liquid curtain detection device of any one of claims 1-3, further comprising:
a position adjustment device, wherein the plurality of flow rate detection units are mounted on the position adjustment device such that the plurality of flow rate detection units are movable in a predetermined direction.
6. The liquid curtain detection device of claim 5, wherein the position adjustment device comprises:
a slider for supporting and moving the plurality of flow rate detecting units;
and the sliding rail comprises a preset rail, and the sliding block is arranged in the rail and can slide along the rail.
7. The liquid curtain detection device of claim 5, further comprising:
a driving unit connected with the position adjustment device and configured to drive the position adjustment device.
8. A processing apparatus comprising a liquid curtain forming device and the liquid curtain detection device according to any one of claims 1 to 7 corresponding to the liquid curtain forming device.
9. The processing tool of claim 8, further comprising:
and the cleaning device is configured to perform cleaning operation on the liquid curtain forming device according to the detection result of the liquid curtain detection device.
10. A liquid curtain detection method comprises the following steps:
the method comprises the steps that a plurality of flow detection units which are sequentially arranged along a preset direction and are provided with liquid for receiving a liquid curtain are adopted to simultaneously detect the flow of the liquid curtain at the positions of different flow detection units, wherein the flow refers to the amount of the liquid received by the flow detection units within preset time;
receiving the flow data detected by the plurality of flow detection units, comparing the flow data of the plurality of flow detection units to obtain the state information of the liquid curtain,
wherein comparing the flow data of the plurality of flow detection units to obtain the state information of the liquid curtain comprises:
and comparing the flow rate difference detected by the adjacent flow rate detection units, and determining whether the liquid curtain is branched or not when the flow rate difference exceeds a preset value, wherein the preset value is set according to the uniformity requirement of the liquid curtain.
11. The liquid curtain detection method of claim 10, wherein an alarm is issued when the bifurcation is determined to be present in the liquid curtain.
12. The liquid curtain detection method of claim 10, further comprising:
and acquiring the position of the adjacent flow detection unit to determine the position of the branch in the liquid curtain.
13. The liquid curtain detection method according to any one of claims 10 to 12, wherein before the simultaneously detecting the flow rates of the liquid curtain at different positions using the plurality of flow rate detection units, the method further comprises:
adjusting the plurality of flow detection units to a predetermined position to receive the liquid curtain.
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| CN112893307B (en) * | 2021-02-04 | 2022-11-15 | 绵阳京东方光电科技有限公司 | Liquid knife and cleaning method |
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| JPS55137062A (en) * | 1979-04-15 | 1980-10-25 | Matsushita Electric Works Ltd | Curtain flow coater with detector for cutting of film |
| CN106098580A (en) * | 2016-06-29 | 2016-11-09 | 昆山国显光电有限公司 | A kind of liquid curtain bifurcated detection device and method |
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| CN103115489A (en) * | 2011-11-16 | 2013-05-22 | 宜兴市前锦炉业设备有限公司 | Full-automatic lithium battery ternary material sintering roller bed furnace |
| CN103624093A (en) * | 2012-08-29 | 2014-03-12 | 江苏博际喷雾***有限公司 | Cooling system for intermediate steel billets |
| CN206661107U (en) * | 2017-04-27 | 2017-11-24 | 玖龙纸业（太仓）有限公司 | A kind of stock mixing system |
| CN207265015U (en) * | 2017-08-30 | 2018-04-20 | 昆山龙腾光电有限公司 | Liquid curtain bifurcated detection device |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55137062A (en) * | 1979-04-15 | 1980-10-25 | Matsushita Electric Works Ltd | Curtain flow coater with detector for cutting of film |
| CN106098580A (en) * | 2016-06-29 | 2016-11-09 | 昆山国显光电有限公司 | A kind of liquid curtain bifurcated detection device and method |
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