CN108896241A - A kind of vacuum degree measurement system and method - Google Patents

A kind of vacuum degree measurement system and method Download PDF

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Publication number
CN108896241A
CN108896241A CN201810242335.2A CN201810242335A CN108896241A CN 108896241 A CN108896241 A CN 108896241A CN 201810242335 A CN201810242335 A CN 201810242335A CN 108896241 A CN108896241 A CN 108896241A
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China
Prior art keywords
vacuum
vacuum degree
transducer
negative pressure
controller
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CN201810242335.2A
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CN108896241B (en
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唐静
涂彬彬
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Shenzhen Dingli Software Technology Co ltd
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Dongguan Dingli Automation Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00Testing or calibrating of apparatus for measuring fluid pressure
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/20Control of fluid pressure characterised by the use of electric means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention discloses a kind of vacuum degree measurement systems, including:Vacuum chamber, for the vacuum generator to vacuum chamber, for reading the negative pressure gauge of vacuum degree in vacuum chamber, for controlling the first solenoid valve of vacuum chamber deflation, the vacuum transducer and controller of vacuum degree to be detected;Vacuum generator, negative pressure gauge, vacuum transducer and the first solenoid valve are connect with vacuum chamber, and negative pressure gauge and vacuum transducer are also connect with controller.Based on the vacuum degree measurement system, the invention also discloses a kind of vacuum detecting methods.The vacuum degree measurement system and method may be implemented the automatic detection of vacuum transducer, improve detection efficiency, shorten detection time, and detection time is reduced to 8s by original 18s;And feedback signal is determined by controller, avoids manually determining, eliminates erroneous judgement.

Description

A kind of vacuum degree measurement system and method
Technical field
The present invention relates to the technical field of detection method, in particular to a kind of vacuum degree measurement system and method.
Background technique
Vacuum transducer is a kind of common pressure sensor, is widely used in various industrial automatic control environment, is related to stone Oil-piping, water conservancy and hydropower, railway traffic, intelligent building, production automatic control, aerospace, military project, petrochemical industry, oil well, electric power, ship, Numerous industries such as lathe, ventilation shaft.Vacuum transducer is that the pressure of medium acts directly on the diaphragm of sensor, makes diaphragm The micro-displacement directly proportional to pressure medium is generated, so that the resistance of sensor is changed, and detect this variation with electronic circuit, And convert output one standard signal for corresponding to this pressure.
The vacuum degree of existing vacuum transducer is using artificial detection method, and the artificial detection method of vacuum transducer is Vacuum pump is connected the sensor to, negative pressure of vacuum is increased by pressure controller manually, setting value is reached and observes sensor later Whether work, is further continued for whether observation sensor after increasing to a certain value stops.Such method inefficiency, and need artificial ginseng With judgement, easily judge by accident.
Therefore, the present invention provides a kind of vacuum degree measurement system and methods of automation.
Summary of the invention
The main purpose of the present invention is to provide a kind of vacuum degree measurement system and methods, have and detect, improve automatically Detection efficiency eliminates the advantages of erroneous judgement.
To achieve the above object, the technical scheme adopted by the invention is as follows:
A kind of vacuum degree measurement system, including:
Vacuum chamber;
For the vacuum generator to the vacuum chamber;
For reading the negative pressure gauge of vacuum degree in the vacuum chamber;
The first solenoid valve deflated for controlling the vacuum chamber;
The vacuum transducer of vacuum degree to be detected;
And controller;
The vacuum generator, the negative pressure gauge, the vacuum transducer and first solenoid valve with it is described Vacuum chamber connection, the negative pressure gauge and the vacuum transducer are also connect with the controller.
Preferably, the vacuum degree measurement system further includes first exhaust throttle valve, the first exhaust throttle valve, institute It states the first solenoid valve and sets gradually and be connected on the vacuum chamber.
Preferably, the first exhaust throttle valve is used to control the speed of the negative pressure ramp-up rate of the vacuum chamber.
Preferably, the vacuum degree measurement system further includes second solenoid valve and second exhaust throttle valve, and described second Solenoid valve, the second exhaust throttle valve are sequentially connected between the vacuum generator and the vacuum chamber.
Preferably, the second exhaust throttle valve is used to control the speed of the negative pressure drop low velocity of the vacuum chamber.
A kind of vacuum detecting method, the step specifically include:
S100, to vacuum chamber, when vacuum transducer is to controller feedback signal, controller reads the at this time One vacuum degree, vacuum chamber stops vacuumizing when reaching a setting vacuum degree, into next step;
S200, it deflates to vacuum chamber, when vacuum transducer is to controller feedback signal, controller reads second at this time Vacuum degree.
Preferably, further include before the step S100:
S0:A setting vacuum degree is preset in the controller, and the setting vacuum degree is according to the vacuum to be detected Sensor determines.
Preferably, the step S100 is specifically included:
Step S101, second solenoid valve is opened, vacuum chamber is vacuumized by vacuum generator;
Step S102, one setting time of spacing of controls reads the vacuum degree detected by negative pressure gauge;
Step S103, negative pressure reduces in vacuum chamber, and when vacuum degree is reduced to the vacuum degree lower limit of vacuum transducer, vacuum is passed Sensor obtains the first vacuum degree read at this time to controller feedback signal, controller.
Step S104, continue to vacuumize, stop vacuumizing when vacuum chamber reaches a setting vacuum degree.
Preferably, the step S200 is specifically included:
Step S201, the first solenoid valve is opened to deflate to vacuum chamber;
Step S202, one setting time of spacing of controls reads the vacuum degree detected by negative pressure gauge;
Step S203, negative pressure increases in vacuum chamber, and when the vacuum degree upper limit of vacuum up to vacuum transducer, vacuum is passed Sensor obtains the second vacuum degree read at this time to controller feedback signal, controller.
Compared with prior art, vacuum generator of the invention is vacuumized or is deflated to vacuum chamber, passes through controller The negative-pressure vacuum degree of negative pressure gauge when obtaining vacuum transducer feedback signal, vacuum transducer vacuum degree is surveyed when negative pressure increases The minimum of range of receiving surveys the peak of vacuum transducer vacuum degree range of receiving when negative pressure reduces.The vacuum degree measurement System and method may be implemented the automatic detection of vacuum transducer, improve detection efficiency, shorten detection time, when detection Between 8s is reduced to by original 18s;And feedback signal is determined by controller, avoids manually determining, eliminates erroneous judgement.
Detailed description of the invention
Fig. 1 is the vacuum degree measurement system of the embodiment of the present invention and the combining structure schematic diagram of vacuum transducer.
Fig. 2 is the flow chart of the vacuum detecting method of the embodiment of the present invention.
Specific embodiment
To be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, below with reference to Specific embodiment, the present invention is further explained.
Existing vacuum degree measurement is all using artificial detection method, and the present invention provides a kind of automation vacuum degree measurement systems For system 100 for detecting to the vacuum degree of vacuum transducer 60, Fig. 1 is the vacuum degree measurement system 100 of the embodiment of the present invention Structural schematic diagram, as shown in Figure 1, the vacuum degree measurement system 100 of the present embodiment include vacuum chamber 10, vacuum generator 20, Negative pressure gauge 30, the vacuum transducer 60 of vacuum degree to be detected, the first solenoid valve 40 and controller 70, wherein vacuum occurs Device 20 for vacuumizing to vacuum chamber 10, use for reading vacuum degree in vacuum chamber 10, the first solenoid valve 40 by negative pressure gauge 30 It deflates in control vacuum chamber 10.
Specifically, the connection relationship between all parts is as follows:
Referring to Fig. 1, as shown in Figure 1, the vacuum generator 20 of the present embodiment, negative pressure gauge 30, vacuum transducer 60 And first solenoid valve 40 connect with vacuum chamber 10, negative pressure gauge 30 and vacuum transducer 60 are also connect with controller 70.
Furthermore the vacuum degree measurement system 100 of this implementation further includes first exhaust throttle valve 50, second solenoid valve 80 and Two exhaust shutters 90, first exhaust throttle valve 50 are used to control the speed of the negative pressure ramp-up rate of vacuum chamber 10, the second electromagnetism Valve 80 is vacuumized for controlling vacuum chamber 10, and first exhaust throttle valve 50 is used to control the fast of the negative pressure ramp-up rate of vacuum chamber 10 Slowly.Wherein, first exhaust throttle valve 50, the first solenoid valve 40 set gradually and are connected on vacuum chamber 10, second solenoid valve 80, Two exhaust shutters 90 are sequentially connected between vacuum generator 20 and vacuum chamber 10.But it is not limited thereto, the first solenoid valve 40 are not specifically limited with the front-rear position of first exhaust throttle valve 50, before second solenoid valve 80 and second exhaust throttle valve 90 Position is also not specifically limited afterwards.
Based on above-mentioned vacuum degree measurement system 100, the present invention also provides a kind of vacuum detecting method, Fig. 2 is this The flow chart of the vacuum detecting method of inventive embodiments, as shown in Fig. 2, the vacuum detecting method of the present embodiment specifically wraps It includes:
S100, to vacuum chamber, when vacuum transducer is to controller feedback signal, controller reads the at this time One vacuum degree, vacuum chamber stops vacuumizing when reaching a setting vacuum degree, into next step;
S200, it deflates to vacuum chamber, when vacuum transducer is to controller feedback signal, controller reads second at this time Vacuum degree.
Vacuum chamber is vacuumized, needs to set a vacuum degree lower limit, stops taking out when reaching the setting vacuum degree true Sky, specifically, presetting a setting vacuum degree in the controller, setting vacuum degree is true according to vacuum transducer to be detected It is fixed.Example:When the vacuum degree range of receiving of vacuum transducer is -40KPa~-60KPa, -40KPa is the vacuum degree of vacuum transducer The upper limit, -60KPa are the vacuum degree lower limit of vacuum transducer, then setting vacuum degree can be -70KPa, and but not limited to this, are only needed Meet setting vacuum degree and is less than vacuum degree lower limit.
It after the completion of default settings vacuum degree, can start to detect the vacuum degree of vacuum transducer, vacuum chamber is taken out The vacuum degree lower limit that vacuum transducer is surveyed when vacuum, surveys the vacuum degree upper limit of vacuum transducer when deflating to vacuum chamber.Step S100 is specific as follows:Second solenoid valve is opened, vacuum chamber is vacuumized by vacuum generator, spacing of controls one is set Time reads the vacuum degree detected by negative pressure gauge, and negative pressure reduces in vacuum chamber, and vacuum degree is reduced to vacuum transducer When vacuum degree lower limit, vacuum transducer obtains the first vacuum degree read at this time to controller feedback signal, controller;Continue to take out Vacuum stops vacuumizing when vacuum chamber reaches a setting vacuum degree.
After completing the vacuum degree lower limit detection of vacuum transducer, continue to examine the vacuum degree upper limit of vacuum transducer It surveys, step S200 is specific as follows:The first solenoid valve is opened to deflate to vacuum chamber, one setting time of spacing of controls read by One vacuum degree of negative pressure gauge detection, negative pressure increases in vacuum chamber, the vacuum degree upper limit of vacuum up to vacuum transducer When, vacuum transducer obtains the second vacuum degree read at this time to controller feedback signal, controller.
Then, the first vacuum degree of detection is the vacuum degree lower limit of vacuum transducer, and the second vacuum degree of detection is true The vacuum degree upper limit of empty sensor, the vacuum ranges value of vacuum transducer are the first vacuum degree to the second vacuum degree.
Compared with prior art, vacuum generator of the invention is vacuumized or is deflated to vacuum chamber, passes through controller The negative-pressure vacuum degree of negative pressure gauge when obtaining vacuum transducer feedback signal, vacuum transducer vacuum degree is surveyed when negative pressure increases The minimum of range of receiving surveys the peak of vacuum transducer vacuum degree range of receiving when negative pressure reduces.The vacuum degree measurement System and method may be implemented the automatic detection of vacuum transducer, improve detection efficiency, shorten detection time, when detection Between 8s is reduced to by original 18s;And feedback signal is determined by controller, avoids manually determining, eliminates erroneous judgement.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention.The technology of the industry Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the above embodiments and description only describe this The principle of invention, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes Change and improvement all fall within the protetion scope of the claimed invention.The claimed scope of the invention by appended claims and its Equivalent thereof.

Claims (9)

1. a kind of vacuum degree measurement system, which is characterized in that including:
Vacuum chamber;
For the vacuum generator to the vacuum chamber;
For reading the negative pressure gauge of vacuum degree in the vacuum chamber;
The first solenoid valve deflated for controlling the vacuum chamber;
The vacuum transducer of vacuum degree to be detected;
And controller;
The vacuum generator, the negative pressure gauge, the vacuum transducer and first solenoid valve with the vacuum Room connection, the negative pressure gauge and the vacuum transducer are also connect with the controller.
2. vacuum degree measurement system according to claim 1, which is characterized in that it further include first exhaust throttle valve, it is described First exhaust throttle valve, first solenoid valve set gradually and are connected on the vacuum chamber.
3. vacuum degree measurement system according to claim 1, which is characterized in that the first exhaust throttle valve is for controlling The speed of the negative pressure ramp-up rate of the vacuum chamber.
4. vacuum degree measurement system according to claim 1, which is characterized in that further include second solenoid valve and second exhaust Throttle valve, the second solenoid valve, the second exhaust throttle valve are sequentially connected to the vacuum generator and the vacuum chamber Between.
5. vacuum degree measurement system according to claim 1, which is characterized in that the second exhaust throttle valve is for controlling The speed of the negative pressure drop low velocity of the vacuum chamber.
6. a kind of vacuum detecting method using vacuum degree measurement system as described in any one in claim 1-5, feature It is, the step specifically includes:
S100, to vacuum chamber, when vacuum transducer is to controller feedback signal, controller is read at this time first true Reciprocal of duty cycle, vacuum chamber stops vacuumizing when reaching a setting vacuum degree, into next step;
S200, it deflates to vacuum chamber, when vacuum transducer is to controller feedback signal, controller reads the second vacuum at this time Degree.
7. vacuum detecting method according to claim 6, which is characterized in that further include before the step S100:
S0:A setting vacuum degree is preset in the controller, and the setting vacuum degree is sensed according to the vacuum to be detected Device determines.
8. vacuum detecting method according to claim 6, which is characterized in that the step S100 is specifically included:
Step S101, second solenoid valve is opened, vacuum chamber is vacuumized by vacuum generator;
Step S102, one setting time of spacing of controls reads the vacuum degree detected by negative pressure gauge;
Step S103, negative pressure reduces in vacuum chamber, when vacuum degree is reduced to the vacuum degree lower limit of vacuum transducer, vacuum transducer To controller feedback signal, controller obtains the first vacuum degree read at this time.
Step S104, continue to vacuumize, stop vacuumizing when vacuum chamber reaches a setting vacuum degree.
9. vacuum detecting method according to claim 6, which is characterized in that the step S200 is specifically included:
Step S201, the first solenoid valve is opened to deflate to vacuum chamber;
Step S202, one setting time of spacing of controls reads the vacuum degree detected by negative pressure gauge;
Step S203, negative pressure increases in vacuum chamber, when the vacuum degree upper limit of vacuum up to vacuum transducer, vacuum transducer To controller feedback signal, controller obtains the second vacuum degree read at this time.
CN201810242335.2A 2018-03-22 2018-03-22 Vacuum degree detection system and method Active CN108896241B (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04204133A (en) * 1990-11-30 1992-07-24 Yokogawa Electric Corp Calibrating device for reference vacuum gage
CN202442842U (en) * 2012-02-09 2012-09-19 江苏东方航天校准检测有限公司 Portable vacuum gauge calibrating device
CN102944357A (en) * 2012-11-12 2013-02-27 中国航天科技集团公司第五研究院第五一〇研究所 Device and method for calibrating vacuum gauge for work
CN203191151U (en) * 2012-12-21 2013-09-11 黄鸣 Vacuum gauge automatic calibrating device
CN103808457A (en) * 2013-12-24 2014-05-21 兰州空间技术物理研究所 Low-temperature vacuum calibration device and method
CN206269962U (en) * 2016-12-02 2017-06-20 山东中检高科检测技术有限公司 A kind of vacuum meter dynamic contrast calibrating installation

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04204133A (en) * 1990-11-30 1992-07-24 Yokogawa Electric Corp Calibrating device for reference vacuum gage
CN202442842U (en) * 2012-02-09 2012-09-19 江苏东方航天校准检测有限公司 Portable vacuum gauge calibrating device
CN102944357A (en) * 2012-11-12 2013-02-27 中国航天科技集团公司第五研究院第五一〇研究所 Device and method for calibrating vacuum gauge for work
CN203191151U (en) * 2012-12-21 2013-09-11 黄鸣 Vacuum gauge automatic calibrating device
CN103808457A (en) * 2013-12-24 2014-05-21 兰州空间技术物理研究所 Low-temperature vacuum calibration device and method
CN206269962U (en) * 2016-12-02 2017-06-20 山东中检高科检测技术有限公司 A kind of vacuum meter dynamic contrast calibrating installation

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Address after: 518000 1507b, building 8, Qianhai excellence Financial Center (phase I), No. 5033, Menghai Avenue, Nanshan street, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong Province

Patentee after: Shenzhen Dingli Software Technology Co.,Ltd.

Address before: 523000 workshop of the second Southwest Industrial Zone, Dongfeng North Road, Shijie Town, Dongguan City, Guangdong Province

Patentee before: DONGGUAN DINGLI AUTOMATION TECHNOLOGY Co.,Ltd.