CN108878559A - A kind of device and method of depositing solar battery thin film - Google Patents
A kind of device and method of depositing solar battery thin film Download PDFInfo
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- CN108878559A CN108878559A CN201810961412.XA CN201810961412A CN108878559A CN 108878559 A CN108878559 A CN 108878559A CN 201810961412 A CN201810961412 A CN 201810961412A CN 108878559 A CN108878559 A CN 108878559A
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- 239000010409 thin film Substances 0.000 title claims abstract description 38
- 238000000151 deposition Methods 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 112
- 239000010408 film Substances 0.000 claims abstract description 110
- 238000004804 winding Methods 0.000 claims abstract description 36
- 239000003792 electrolyte Substances 0.000 claims abstract description 34
- 238000000576 coating method Methods 0.000 claims description 66
- 239000011248 coating agent Substances 0.000 claims description 65
- 238000005096 rolling process Methods 0.000 claims description 26
- 238000012360 testing method Methods 0.000 claims description 25
- 238000001228 spectrum Methods 0.000 claims description 5
- 238000004876 x-ray fluorescence Methods 0.000 claims description 5
- 230000009467 reduction Effects 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 238000005868 electrolysis reaction Methods 0.000 claims 1
- 238000002955 isolation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000012423 maintenance Methods 0.000 abstract description 4
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 14
- 238000012544 monitoring process Methods 0.000 description 13
- 238000004140 cleaning Methods 0.000 description 5
- 230000005611 electricity Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000008151 electrolyte solution Substances 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000002189 fluorescence spectrum Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920006389 polyphenyl polymer Polymers 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D9/00—Electrolytic coating other than with metals
- C25D9/04—Electrolytic coating other than with metals with inorganic materials
- C25D9/06—Electrolytic coating other than with metals with inorganic materials by anodic processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Photovoltaic Devices (AREA)
Abstract
The invention discloses a kind of equipment of depositing solar battery thin film, including：Winding apparatus out, for exporting flexible conductive substrates；Wrap-up, for receiving flexible conductive substrates；Electrolytic cell is set to out between winding apparatus and the wrap-up；Flexible conductive substrates are by going out winding apparatus output, by being wound after the electrolyte progress plated film in electrolytic cell by wrap-up.A kind of antivacuum method of equipment utilization of depositing solar battery thin film provided by the invention deposits CIGS thin film in conductive flexible substrate, simplifies device structure, reduces production cost and maintenance cost；Also, antivacuum method is not limited by equipment size, is conducive to that CIGS battery is mass produced.
Description
Technical field
The present invention relates to area of solar cell, particularly relate to a kind of device and method of depositing solar battery thin film.
Background technique
With the whole world to energy demand be continuously increased and non-renewable energy resources, such as oil and coal persistently disappear
Consumption, the scheme for finding the traditional non-renewable energy resources of substitution are extremely urgent.As to cleaning, renewable energy is constantly ground
Study carefully, solar energy, specific gravity of the natural energy resources such as wind energy in mankind's using energy source structure also gradually increases.It is existing it is numerous can be again
In the raw energy, solar energy is one of energy the most abundant, and can directly be converted by solar battery during utilization
For electric energy.
Alternative solar battery is many kinds of currently on the market, wherein copper indium gallium selenide (CIGS) thin film solar electricity
Solar battery product of the pond as a new generation, photoelectric conversion efficiency with higher, dim light performance is good, and the absorption coefficient of light is big,
The advantages that band gap is adjustable, and temperature coefficient is low, and stability is good keeps it latent with very big application in military and civil field
Power.The especially usually only several microns of copper indium gallium selenide cell thickness, and can deposit on flexible substrates.Therefore, with copper
Flexible photovoltaic subassembly product based on indium gallium Se solar cell has more than the solar cell module of conventional crystalline silicon material
Add broad application prospect.
In the structure of CIGS solar battery, absorbed layer is the nuclear structure of solar battery, the matter of CIGS absorbed layer
Amount often determines the efficiency of solar battery, and also the quality to last component product and cost generation are huge for preparation method
It influences, production process is mostly vacuum method, such as coevaporation method and sputtering method.But vacuum method production solar battery is inhaled
Vacuum equipment early investment is larger in receipts layer process, and the device is complicated, and production energy consumption is big, and maintenance cost is high；The size of vacuum equipment
Limit large-scale production and efficiency；Vacuum equipment is complicated for operation, and halt device and cannot destroy true at any time in operational process
Altitude leads to the deposition that should not monitor film in real time, and utilization rate of raw materials is lower, and deposition effect is bad.
Summary of the invention
In view of this, it is an object of the invention to propose a kind of equipment of the deposition CIGS thin film of high efficiency, low cost and
Its method.
Based on a kind of above-mentioned purpose equipment of depositing solar battery thin film provided by the invention, including：
Winding apparatus out, for exporting flexible conductive substrates；
Wrap-up, for receiving the flexible conductive substrates；
Electrolytic cell, be set to it is described go out between winding apparatus and the wrap-up；
The flexible conductive substrates are by the winding apparatus output out, after the electrolyte in the electrolytic cell carries out plated film
It is wound by the wrap-up.
Further, the winding apparatus out, the side of sticky insulating back panel and the flexible conductive substrates is bonded,
So that the side of the flexible conductive substrates and the electrolyte completely cut off.
Further, the winding apparatus out, including：
First rolling assembly (1) exports the sticky insulating back panel；
Second rolling assembly (2), exports the flexible conductive substrates；
Make the test roll-in component (3), and the side of the sticky insulating back panel and the flexible conductive substrates is bonded.
Further, the wrap-up, including：
It winds roll-in component (12), separates the sticky insulating back panel and the flexible conductive substrates；
Third rolling assembly (14) receives the sticky insulating back panel；
4th rolling assembly (15), receives the flexible conductive substrates.
Further, at least one passive roller for being used to transmit the flexible conductive substrates is additionally provided in the electrolytic cell
(5、7)。
More preferably, the quantity of the passive roller is two, and removable roller bearing is equipped between the passive roller (5,7)
(6), which can move in the electrolyte, to adjust the flexible conductive substrates in the electrolyte
The path of middle traveling.
More preferably, the wrap-up further includes：
X-ray fluorescence spectra device (8), monitors the coating film thickness of the flexible conductive substrates；
Control unit is based on the coating film thickness and thickness setting value, is adjusted correspondingly to technological parameter.
Further, if the coating film thickness is less than thickness setting value, described control unit issues reduction of speed and instructs to package out
Set and wrap-up so that it is described go out winding apparatus reduce the speed that makes the test of the flexible conductive substrates and the sticky insulating back panel
To first gear speed；
If the coating film thickness be greater than thickness setting value, described control unit issue speed-raising instruction to it is described go out winding apparatus and
Wrap-up so that it is described go out winding apparatus improve the speed that makes the test of the flexible conductive substrates and the sticky insulating back panel to the
Second speed.
Further, if the coating film thickness is less than thickness setting value, described control unit, which issues, increases current-order to electricity
Slot power device is solved, so that the electrolytic cell power device increases to second gear electric current to the electrical current of electrolytic cell；
If the coating film thickness is greater than thickness setting value, described control unit, which issues, reduces current-order to the electrolytic cell
Power device, so that the electrolytic cell power device is decreased to first grade of electric current to the electrical current of electrolytic cell.
Further, if the coating film thickness be less than thickness setting value, described control unit sending move down instruction to it is described can
Mobile roller bearing (6), so that the removable roller bearing (6) moves down in the electrolytic cell；
If the coating film thickness is greater than thickness setting value, described control unit sending moves up instruction, so that described removable
Roller bearing (6) moves up in the electrolytic cell.
The present invention also provides a kind of methods of depositing solar battery thin film, include the following steps：
Export flexible conductive substrates；
The flexible conductive substrates are passed through into the electrolyte in electrolytic cell and carry out plated film；
Flexible conductive substrates after plated film are wound.
Further, before the output flexible conductive substrates, the method further includes：
Sticky insulating back panel and the flexible conductive substrates are exported respectively；
The side of the sticky insulating back panel and the flexible conductive substrates is bonded, so that the flexible conductive substrates
Side and the electrolyte completely cut off.
More preferably, the flexible conductive substrates by after plated film are wound, and are specifically included：
Flexible conductive substrates after the plated film are separated with the sticky insulating back panel；
Flexible conductive substrates after the plated film are wound respectively with the sticky insulating back panel.
More preferably, described that the flexible conductive substrates are passed through into the electrolyte progress plated film in electrolytic cell, it specifically includes：
The coating film thickness of the flexible conductive substrates is monitored with X-ray fluorescence spectra；
Based on the coating film thickness and thickness setting value, technological parameter is adjusted correspondingly.
Further, if the coating film thickness is less than thickness setting value, the flexible conductive substrates and the viscosity are reduced absolutely
The speed that makes the test of edge backboard is to first gear speed；If the coating film thickness is greater than thickness setting value, the compliant conductive lining is improved
The speed that makes the test of bottom and the sticky insulating back panel is to second gear speed.
Further, if the coating film thickness is less than thickness setting value, the electrical current of electrolytic cell is increased to second gear electric current；
When the coating film thickness is greater than thickness setting value, reduce the electrical current of electrolytic cell to first grade of electric current.
Further, if the coating film thickness is less than thickness setting value, the removable roller bearing (6) is moved down；The prison
When coating film thickness is greater than thickness setting value, the removable roller bearing (6) is moved up.
Further, if the coating film thickness is less than thickness setting value, the concentration of the electrolyte is improved；The coating film thickness
When greater than thickness setting value, the concentration of the electrolyte is reduced.
Therefore, a kind of device and method of depositing solar battery thin film of the present invention, using antivacuum method electrically conductive
Flexible substrate on deposit CIGS thin film, simplify device structure, reduce production cost and maintenance cost；Also, it is antivacuum
Method is not limited by equipment size, is conducive to that CIGS battery is mass produced.
Detailed description of the invention
Fig. 1 is a kind of equipment schematic diagram of depositing solar battery thin film of the embodiment of the present invention；
Fig. 2 is the cross section structure schematic diagram of flexible conductive substrates of the present invention with insulating back panel；
Wherein, the make the test passive roller bearing of roll-in component, 4-, 5- of the first rolling assembly of 1-, the second rolling assembly of 2-, 3- is passively rolled
Wheel, 6- move roller bearing, 7- passive roller, 8-X ray fluorescence spectra device, the passive roller bearing of 9-, 10- cleaning device, 11- drying
Device, 12- winding roll-in component, 13- resistance measuring instrument, 14- third rolling assembly, the 4th rolling assembly of 15-, 16- anode,
17- thermometer, 18- agitating device, 19a, 19b- heating device, 20- electrolyte, 21- electrolytic cell, 22- flexible conductive substrates,
23- adhesive layer, 24- viscosity insulating back panel.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.
It should be noted that all statements for using " first " and " second " are for differentiation two in the embodiment of the present invention
The non-equal entity of a same names or non-equal parameter, it is seen that " first " " second " only for the convenience of statement, does not answer
It is interpreted as the restriction to the embodiment of the present invention, subsequent embodiment no longer illustrates this one by one.
The equipment of a kind of depositing solar battery thin film of the embodiment of the present invention, as shown in Figure 1, including：It is soft for exporting
Property conductive substrates go out winding apparatus, the wrap-up for receiving flexible conductive substrates and be located at winding apparatus and wrap-up it
Between electrolytic cell 21；Flexible conductive substrates are by going out winding apparatus output, by being wound after the progress plated film of electrolytic cell 21 by wrap-up.
Further, winding apparatus is also used to for sticky insulating back panel being bonded together with flexible conductive substrates out, leads flexibility
The side of electric substrate is insulated, when flexibility to shop substrate passes through the electrolyte in electrolytic cell 21, the side of the flexible conductive substrates
Completely cut off with electrolyte.It is illustrated in figure 2 the cross section structure schematic diagram of flexible conductive substrates of the present invention with insulating back panel, it is flexible
The adhesive layer 23 that conductive substrates 22 pass through on sticky insulating back panel 24 is bonded together, and flexible conductive substrates are stained with viscosity insulation back
The side of plate is insulated, and the other side is conductive, only forms plated film in conductive side when carrying out plated film by electrolytic cell；The present invention is real
It applies in example, flexible conductive substrates are selected from one of stainless steel, aluminium and titanium, and adhesive layer and insulating back panel, which are selected, has temperature resistance
Power, the temperature upper limit that can be resisted are not less than 150 DEG C of material, such as epoxy resin；Furthermore the viscosity insulation that the present invention uses
Backboard also has certain thickness and intensity, can be wound into a roll, reusable, reduces production cost, for example, polypropylene,
Polyphenyl alkene.
As shown in Figure 1, winding apparatus includes the first rolling assembly 1 for exporting the sticky insulating back panel out, for defeated
Second rolling assembly 2 of flexible conductive substrate and for sticky insulating back panel and flexible conductive substrates to be bonded together out
Make the test roll-in component 3；Plane where first rolling assembly, with the second rolling assembly and the roll-in component that makes the test is at an angle；
Or second rolling assembly, at an angle with the plane where the first rolling assembly and the roll-in component that makes the test；Band toughness is exhausted
The flexible conductive substrates of edge backboard also pass through a passive roller bearing 4 before being passed through electrolytic cell and carrying out plated film, pacify on passive roller bearing 4
Equipped with system tension tester, the tension of the flexible conductive substrates transport for monitoring sticky insulating back panel.
As shown in Figure 1, wrap-up includes the third rolling assembly 14 for receiving sticky insulating back panel, for receiving plating
The receipts of 4th rolling assembly 15 and the flexible conductive substrates for roll-in with toughness insulating back panel of flexible conductive substrates after film
Winding up roller presses component 12.For receiving the third rolling assembly of sticky insulating back panel, with winding roll-in component and for receiving plated film
Plane setting in a certain angle where 4th rolling assembly of flexible conductive substrates afterwards, being convenient in wrapup procedure will be sticky exhausted
Edge backboard is separated with the flexible conductive substrates after plated film；It is viscous with winding roll-in component and for receiving alternatively, the 4th rolling assembly
Property insulating back panel third rolling assembly where plane setting in a certain angle.
The passive rolling that at least one leaching is used to transmit the flexible conductive substrates in the electrolytic solution is additionally provided in electrolytic cell
Wheel, two passive rollers of setting of the embodiment of the present invention, passive roller 5 and 7 as shown in figure 1, more preferably, passive roller 5 and 7
Place straight line is parallel with bottom of electrolytic tank, and portion in a cell is arranged, so that flexible conductive substrates can uniformly fill
Divide ground and electrolyte contacts, so that plated film is more complete uniform；Flexible conductive substrates outflow in the embodiment of the present invention after plated film
Also pass through another passive roller bearing 9 after electrolyte, the passive roller bearing 9 and the passive roller bearing 4 for the side that makes the test are symmetrical arranged, and with receipts
Scroll pressure component 12 is located in same level, so that the flexible conductive substrates after plated film with sticky insulating back panel before separating
Keep horizontal；More preferably, it is provided with rolling distance test device on passive roller bearing 9, for detecting and recording flexible conductive substrates
The length of traveling.
As another embodiment, removable roller bearing 6 is equipped between passive roller 5 and 7, for adjusting flexible conductive substrates
The path advanced in the electrolytic solution；The removable roller bearing can the short transverse in electrolytic cell along electrolytic cell move back and forth,
Roller bearing 6 is moved in mobile process to submerge always in the electrolytic solution, is existed for adjusting flexible conductive substrates in coating process
The path advanced in electrolyte, to adjust coating film thickness.
The X-ray that the wrap-up of the embodiment of the present invention is provided with for detecting the flexible conductive substrates coating film thickness is glimmering
Light spectral device 8, the device are mounted on the winding side of electrolytic cell, for real-time monitoring plated film after flexible conductive substrates thickness
Degree, so as to control unit by the coating film thickness detected come adjusting process parameter, it is ensured that coating film thickness be thickness setting value,
CIGS thin film is set to be deposited on the surface of flexible conductive substrates with desired coating film thickness always.The embodiment of the present invention can also pass through tune
The electrical current of the speed that makes the test of whole flexible electrical electricity substrate and sticky insulating back panel, electrolytic cell, moves roller bearing (6) in electrolytic cell
In the parameters such as position adjust coating film thickness.
Specifically, when coating film thickness is less than thickness setting value, control unit issues reduction of speed and instructs to winding apparatus out and receipts
Winding apparatus, so that winding apparatus reduces the speed that makes the test of flexible conductive substrates to first gear speed out；When coating film thickness is greater than thickness
When setting value, control unit issues speed-raising instruction to winding apparatus out and wrap-up, so that winding apparatus improves compliant conductive lining out
The speed that makes the test at bottom may be used also to second gear speed in addition, multiple main regulation shelves can also be arranged in the speed that makes the test according to the actual situation
To be finely adjusted after carrying out main regulation to speed, according to the requirement to coating film thickness, the precise controlling to the speed that makes the test is realized.
If coating film thickness is less than thickness setting value, control unit, which issues, increases current-order to electrolytic cell power device, so that electrolytic cell
Power device increases to second gear electric current to the electrical current of electrolytic cell；If coating film thickness is greater than thickness setting value, control unit
It issues and reduces current-order to electrolytic cell power device, so that electrolytic cell power device is decreased to the to the electrical current of electrolytic cell
One grade of electric current, in addition, the size of electrolytic cell electrical current is in addition to as described herein first and second with reference to the adjusting for the speed that makes the test
Shelves, can also be arranged several main regulation shelves according to the actual situation, if can also be arranged after carrying out main regulation to electrical current
Dry fine tuning shelves, according to the requirement to coating film thickness, realization fine-tunes electrolytic cell electrical current.If coating film thickness is less than
Thickness setting value, control unit sending move down instruction, move down removable roller bearing (6)；When coating film thickness is set greater than thickness
When definite value, control unit sending moves up instruction, moves up removable roller bearing (6).It in actual application, can also be same
When adjust above-mentioned two or three parameters coating film thickness to be adjusted.Further, it is also possible to pass through the concentration for adjusting electrolyte
The thickness of plated film is adjusted, when monitoring result is that coating film thickness is less than setting value, the concentration of electrolyte is improved, works as monitoring result
When being greater than the set value for coating film thickness, the concentration of electrolyte is reduced.
Further, the electrolytic cell 21 of the embodiment of the present invention is being electrolysed including the anode 16 of bottom of electrolytic tank is arranged in, is arranged
The heating device 19a and 19b of slot inner sidewall, the thermometer 17 being monitored for the temperature to electrolyte 20, for stirring electricity
Solve the agitating device 18 of liquid 20.
A kind of equipment of the depositing solar battery thin film provided by the invention side that makes the test is additionally provided with cleaning device 10, is used for
Cleaning is sticked to impurity and ion on the flexible conductive substrates for completing plated film on a small quantity.The compliant conductive for completing plated film is served as a contrast after cleaning
Bottom is dried, therefore is additionally provided with drying device 11.Also the flexible conductive substrates resistance for completing plated film is measured after drying
13, uniformity and stability to coating film thickness carry out real-time monitoring.
The present invention also provides a kind of embodiments of the method for depositing CIGS thin film, specifically include following steps：
Export flexible conductive substrates；
Flexible conductive substrates are passed through into the electrolyte in electrolytic cell and carry out plated film；
Flexible conductive substrates after plated film are wound.As a kind of method for depositing CIGS thin film of the present invention
Another more detailed embodiment, specifically includes following steps：
(1) flexible conductive substrates are exported；
(2) it exports sticky insulating back panel and bonds the side of sticky insulating back panel and flexible conductive substrates, lead flexibility
The side of electric substrate and electrolyte completely cut off.
(3) by flexible conductive substrates by carrying out plated film in the electrolyte containing copper indium gallium selenide；
(4) it cleans, the flexible conductive substrates after dry plated film；
(5) flexible conductive substrates after plated film are separated with sticky insulating back panel, and by the flexible conductive substrates after plated film
It is wound respectively with sticky insulating back panel.
(3) step is by flexible conductive substrates by further including being penetrated with X after progress plated film in the electrolyte containing copper indium gallium selenide
Line fluorescence spectrum monitors the coating film thickness of the flexible conductive substrates, and is based on the coating film thickness and thickness setting value, to work
Skill parameter is adjusted correspondingly.Specifically, when monitoring result is that coating film thickness is less than thickness setting value, compliant conductive lining is reduced
The speed that makes the test at bottom；When monitoring result is that coating film thickness is greater than thickness setting value, the speed that makes the test of flexible conductive substrates is improved.Prison
When survey result is that coating film thickness is less than thickness setting value, the electrical current of electrolytic cell is increased；Monitoring result is greater than for coating film thickness
When thickness setting value, reduce the electrical current of electrolytic cell.When monitoring result is that coating film thickness is less than thickness setting value, move down described
Mobile roller bearing (6)；When monitoring result is that coating film thickness is greater than thickness setting value, mobile roller bearing (6) are moved up.Monitoring result is plated film
When thickness is less than thickness setting value, the concentration of electrolyte is improved；When monitoring result is that coating film thickness is greater than thickness setting value, reduce
The concentration of electrolyte.In practical applications, above-mentioned two or three parameters according to circumstances can also be adjusted to adjust plated film simultaneously
Thickness.
(4) step is cleaned, the flexible conductive substrates after dry plated film further include：Flexible conductive substrates after monitoring plated film
Resistance, and then judge the uniformity of the coating film thickness.
Therefore, the device and method of a kind of depositing solar battery thin film provided by the invention, are existed using antivacuum method
CIGS thin film is deposited in conductive flexible substrate, simplifies device structure, reduces production cost and maintenance cost；Also,
Antivacuum method is not limited by equipment size, is conducive to that CIGS battery is mass produced.
Those of ordinary skills in the art should understand that：The discussion of any of the above embodiment is exemplary only, not
It is intended to imply that the scope of the present disclosure (including claim) is limited to these examples；Under thinking of the invention, above embodiments
Or can also be combined between the technical characteristic in different embodiments, step can be realized with random order, and be existed such as
Many other variations of the upper different aspect of the invention, for simplicity, they are not provided in details.
The embodiment of the present invention be intended to cover fall into all such replacements within the broad range of appended claims,
Modifications and variations.Therefore, all within the spirits and principles of the present invention, any omission, modification, equivalent replacement, the improvement made
Deng should all be included in the protection scope of the present invention.
Claims (18)
1. a kind of equipment of depositing solar battery thin film, which is characterized in that including：
Winding apparatus out, for exporting flexible conductive substrates；
Wrap-up, for receiving the flexible conductive substrates；
Electrolytic cell, be set to it is described go out between winding apparatus and the wrap-up；
The flexible conductive substrates are by the winding apparatus output out, by institute after the electrolyte progress plated film in the electrolytic cell
State wrap-up winding.
2. a kind of equipment of depositing solar battery thin film according to claim 1, which is characterized in that described to go out to be wrapped
It sets, the side of sticky insulating back panel and the flexible conductive substrates is bonded, so that the side of the flexible conductive substrates and institute
State electrolyte isolation.
3. a kind of equipment of depositing solar battery thin film according to claim 2, which is characterized in that described to go out to be wrapped
It sets, including：
First rolling assembly (1) exports the sticky insulating back panel；
Second rolling assembly (2), exports the flexible conductive substrates；
Make the test roll-in component (3), and the side of the sticky insulating back panel and the flexible conductive substrates is bonded.
4. a kind of equipment of depositing solar battery thin film according to claim 2 or 3, which is characterized in that the winding
Device, including：
It winds roll-in component (12), separates the sticky insulating back panel and the flexible conductive substrates；
Third rolling assembly (14) winds the sticky insulating back panel；
4th rolling assembly (15), winds the flexible conductive substrates.
5. a kind of equipment of depositing solar battery thin film according to claim 1, which is characterized in that in the electrolytic cell
It is additionally provided at least one passive roller (5,7) for being used to transmit the flexible conductive substrates.
6. a kind of equipment of depositing solar battery thin film according to claim 5, which is characterized in that the passive roller
Quantity be two, be equipped between the passive roller (5,7) removable roller bearing (6), removable roller bearing (6) are in the electrolysis
It can be moved in liquid, to adjust the path that the flexible conductive substrates are advanced in the electrolyte.
7. a kind of equipment of depositing solar battery thin film according to claim 6, which is characterized in that the winding dress
It sets, further includes：
X-ray fluorescence spectra device (8), monitors the coating film thickness of the flexible conductive substrates；
Control unit is based on the coating film thickness and thickness setting value, is adjusted correspondingly to technological parameter.
8. a kind of equipment of depositing solar battery thin film according to claim 7, which is characterized in that if the plating film thickness
Degree is less than thickness setting value, and described control unit issues reduction of speed and instructs to winding apparatus out and wrap-up, so that described go out to be wrapped
The speed that makes the test for reducing the flexible conductive substrates is set to first gear speed；
If the coating film thickness is greater than thickness setting value, described control unit issues speed-raising instruction to winding apparatus and the winding out
Device so that it is described go out winding apparatus improve the speed that makes the test of the flexible conductive substrates to second gear speed.
9. a kind of equipment of depositing solar battery thin film according to claim 7, which is characterized in that if the plating film thickness
Degree is less than thickness setting value, and described control unit, which issues, increases current-order to electrolytic cell power device, so that the electrolytic cell
Power device increases to second gear electric current to the electrical current of electrolytic cell；
If the coating film thickness is greater than thickness setting value, described control unit issues reduction current-order to the electrolytic cell and is powered
Device, so that the electrolytic cell power device is decreased to first grade of electric current to the electrical current of electrolytic cell.
10. a kind of equipment of depositing solar battery thin film according to claim 7, which is characterized in that if the plated film
Thickness is less than thickness setting value, and described control unit sending moves down instruction to the removable roller bearing (6), so that described removable
Roller bearing (6) moves down in the electrolytic cell；
If the coating film thickness is greater than thickness setting value, described control unit sending moves up instruction, so that the removable roller bearing
(6) it is moved up in the electrolytic cell.
11. a kind of method of depositing solar battery thin film, which is characterized in that using described in any one of claims 1 to 10
Equipment, include the following steps：
Export flexible conductive substrates；
The flexible conductive substrates are passed through into the electrolyte in electrolytic cell and carry out plated film；
Flexible conductive substrates after plated film are wound.
12. a kind of method of depositing solar battery thin film according to claim 11, which is characterized in that the output is soft
Before property conductive substrates, the method further includes：
Sticky insulating back panel and the flexible conductive substrates are exported respectively；
The side of the sticky insulating back panel and the flexible conductive substrates is bonded, so that the side of the flexible conductive substrates
Completely cut off with the electrolyte.
13. a kind of method of depositing solar battery thin film according to claim 12, which is characterized in that described to pass through
Flexible conductive substrates after plated film are wound, and are specifically included：
Flexible conductive substrates after the plated film are separated with the sticky insulating back panel；
Flexible conductive substrates after the plated film are wound respectively with the sticky insulating back panel.
14. a kind of method of depositing solar battery thin film according to claim 11, which is characterized in that it is described will be described
Flexible conductive substrates pass through the electrolyte in electrolytic cell and carry out plated film, specifically include：
The coating film thickness of the flexible conductive substrates is monitored with X-ray fluorescence spectra；
Based on the coating film thickness and thickness setting value, technological parameter is adjusted correspondingly.
15. a kind of method of depositing solar battery thin film according to claim 14, which is characterized in that described to be based on institute
Coating film thickness and thickness setting value are stated, technological parameter is adjusted correspondingly, is specifically included：
If the coating film thickness is less than thickness setting value, making the test for the flexible conductive substrates and the sticky insulating back panel is reduced
Speed is to first gear speed；
If the coating film thickness is greater than thickness setting value, making the test for the flexible conductive substrates and the sticky insulating back panel is improved
Speed is to second gear speed.
16. a kind of method of depositing solar battery thin film according to claim 14, which is characterized in that described to be based on institute
Coating film thickness and thickness setting value are stated, technological parameter is adjusted correspondingly, is specifically included：
If the coating film thickness is less than thickness setting value, the electrical current of electrolytic cell is increased to second gear electric current；
When the coating film thickness is greater than thickness setting value, reduce the electrical current of electrolytic cell to first grade of electric current.
17. a kind of method of depositing solar battery thin film according to claim 14, which is characterized in that described to be based on institute
Coating film thickness and thickness setting value are stated, technological parameter is adjusted correspondingly, is specifically included：
If the coating film thickness is less than thickness setting value, the removable roller bearing (6) is moved down；
When the prison coating film thickness is greater than thickness setting value, the removable roller bearing (6) is moved up.
18. a kind of method of depositing solar battery thin film according to claim 14, which is characterized in that described to be based on institute
Coating film thickness and thickness setting value are stated, technological parameter is adjusted correspondingly, is specifically included：
If the coating film thickness is less than thickness setting value, the concentration of the electrolyte is improved；
When the coating film thickness is greater than thickness setting value, the concentration of the electrolyte is reduced.
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| CN201810961412.XA CN108878559A (en) | 2018-08-22 | 2018-08-22 | A kind of device and method of depositing solar battery thin film |
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| CN201810961412.XA CN108878559A (en) | 2018-08-22 | 2018-08-22 | A kind of device and method of depositing solar battery thin film |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105235116A (en) * | 2015-09-25 | 2016-01-13 | 惠州易晖能源科技股份有限公司 | Roll-to-roll dipping and film coating system |
| CN105355706A (en) * | 2015-09-25 | 2016-02-24 | 惠州易晖能源科技股份有限公司 | Roll-to-roll dipping coating system and preparation method of flexible transparent conductive material |
| CN105603380A (en) * | 2015-10-30 | 2016-05-25 | 武汉科技大学 | Vacuum coating high-speed constant coiling tension apparatus and control method thereof |
| CN105887172A (en) * | 2016-03-31 | 2016-08-24 | 成都国珈星际固态锂电科技有限公司 | Film coating device and film coating method |
| CN208674139U (en) * | 2018-08-22 | 2019-03-29 | 北京铂阳顶荣光伏科技有限公司 | A kind of equipment of depositing solar battery thin film |
-
2018
- 2018-08-22 CN CN201810961412.XA patent/CN108878559A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105235116A (en) * | 2015-09-25 | 2016-01-13 | 惠州易晖能源科技股份有限公司 | Roll-to-roll dipping and film coating system |
| CN105355706A (en) * | 2015-09-25 | 2016-02-24 | 惠州易晖能源科技股份有限公司 | Roll-to-roll dipping coating system and preparation method of flexible transparent conductive material |
| CN105603380A (en) * | 2015-10-30 | 2016-05-25 | 武汉科技大学 | Vacuum coating high-speed constant coiling tension apparatus and control method thereof |
| CN105887172A (en) * | 2016-03-31 | 2016-08-24 | 成都国珈星际固态锂电科技有限公司 | Film coating device and film coating method |
| CN208674139U (en) * | 2018-08-22 | 2019-03-29 | 北京铂阳顶荣光伏科技有限公司 | A kind of equipment of depositing solar battery thin film |
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