CN108838563A - RTCP precision compensation method for five-axis laser processing equipment - Google Patents

RTCP precision compensation method for five-axis laser processing equipment Download PDF

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CN108838563A
CN108838563A CN201810699394.2A CN201810699394A CN108838563A CN 108838563 A CN108838563 A CN 108838563A CN 201810699394 A CN201810699394 A CN 201810699394A CN 108838563 A CN108838563 A CN 108838563A
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axis
rotary shaft
laser
vector
rotated
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CN108838563B (en
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江浩
杨小君
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Xi'an Zhongke Weijing Photon Technology Co ltd
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention particularly relates to an RTCP precision compensation method for five-axis laser processing equipment, which solves the problems that the precision compensation method for the existing mechanical five-axis processing equipment is not suitable for the five-axis laser processing equipment and cannot ensure the processing precision of the laser processing equipment. The method comprises the following steps: 1) respectively acquiring a Z-direction vector from a laser processing point to an A rotation axis, a vector from a laser beam central axis to the A rotation axis and a vector from the laser beam central axis to a C rotation axis; 2) and inputting each group of parameters into a control system to complete the precision compensation of the RTCP function.

Description

A kind of five axis laser process equipment RTCP precision compensation methods
Technical field
The present invention relates to five axis laser process equipment fields, and in particular to a kind of five axis laser process equipment RTCP precision benefit Compensation method.
Background technique
With the extensive use of laser processing technology, the advantage of laser processing is also gradually emerged from.Add relative to other Work technology, is mainly characterized in that:One, noncontact processing.Laser processing does not need cutter, and trimming is without mechanical stress, also without cutter The problems such as abrasion, replacement and dismounting, significantly shorten process time;Two, small to the heat affecting of rapidoprint.Laser beam The body surface of irradiation is regional area, and heat-affected zone very little has little effect non-irradiated region, therefore processes work Part basically will not produce deformation;Three, processing has flexibility.Laser beam is easy to focus, dissipates and be oriented to, and can conveniently obtain difference The hot spot of size and different capacity size, to adapt to different processing requests;Four, rapidoprint is extensive.Laser processing can be towards The processing of the materials such as composite material, glass, metal, timber.The above feature based on laser processing, is applied extensively at present In industries such as aerospace, automobile, electronics.
Five axis laser process equipments have both laser as that will laser machine the Typical Representative combined with traditional five-axle linkage The technical advantage of processing and five axes interpolation, is widely applied in high-end manufacture field at present.Existing five-axis machining apparatus It is substantially made of+two rotary shafts of three linear axis, based on the structure type of each equipment rotary shaft, following three type can be divided into Type:A, cutter rotation type, i.e. double pendulum header structure, two rotary shaft driving cutter rotations;B, cutter rotation+workpiece rotation class Type, a rotary shaft driving cutter rotation, another rotary shaft drive workpiece rotation;C, workpiece rotation type, two rotary shafts Drive workpiece rotation.
In laser processing procedure, the additional movement of point of a knife point, the control of control system are generated due to rotary motion System point is not overlapped with point of a knife point usually, and control system wants automatic Correction and Control point, to guarantee that point of a knife presses instruction both fixed tracks Movement.In three of the above process equipment type, RTCP functional application is come when double pendulum header structure using yaw rotary middle point It compensates, full name is rotary cutter center (Rotated Tool Center Point), and structure type is as shown in Figure 1.
" standard length bar+thousand is generallyd use in the RTCP accuracy compensation measurement of field of machining, five-axle linkage process equipment The combination tool of point table " detects, and simulates Cutting tool installation manner on main shaft using standard length bar, cutter is in different rotation angles When, using amesdial measurement error to compensate.But the structure type of five axis laser process equipments and five axis of standard machinery There are larger differences for process equipment, and main shaft is not present in it first, secondly because focus on light beam is not ordinarily visible (such as infrared light and purple Outer light), therefore " standard length bar " also not similar with focus on light beam outer dimension.In conclusion mechanical five-axis robot is set Standby RTCP precision compensation method is not suitable for five axis laser process equipments, not can guarantee the machining accuracy of laser process equipment.
Summary of the invention
Present invention aim to address the precision compensation methods of existing machinery five-axis machining apparatus not to be suitable for five axis laser Process equipment, the problem of not can guarantee laser process equipment machining accuracy, propose a kind of RTCP of five axis laser process equipments Precision compensation method.This method has filled up the blank in the field, by using this method ensure that five axis of laser process equipment joins Dynamic machining accuracy, and since this method has certain versatility, it is borrowed for the laser process equipment of other diversified forms Mirror, such as laser ablation, laser boring, laser cleaning.
The technical scheme is that:
A kind of five axis laser process equipment RTCP precision compensation methods, the five axis laser process equipment includes XYZ tri- Linear axis, A rotary shaft, C rotary shaft, the A rotary shaft, C rotary shaft surround X-axis respectively, the axis of Z axis is rotated, Include the following steps:
1) Z-direction vector, laser central beam axis to A rotation axis that laser processing point arrives A rotation axis are obtained respectively The vector of vector, laser central beam axis to C rotation axis;
2) accuracy compensation of RTCP function will be completed in each group parameter input control system.
Further, the Z-direction vector that laser processing point to A rotation axis are obtained in step 1) specifically includes following steps,
1.11) dressing plate is set on equipment workbench, and the length of the dressing plate is respectively parallel to process The X-axis of equipment, Y-axis, Z axis;
1.12) C rotary shaft is rotated to 90 °, A rotary shaft is rotated to 90 °;
1.13) laser processing point is moved to dressing plate right side, records X axis coordinate;
1.14) C rotary shaft will be rotated to 270 °, mobile X-axis makes laser processing point be moved to dressing plate left side, records △ X value of the X-axis relative to step 1.13) at this time;
1.15) half of △ X and h difference is the Z-direction vector for laser machining point and arriving A rotation axis, and h is that dressing plate is long Degree.
Further, in step 1.13), displacement sensor is provided on laser Machining head, by reading displacement sensing The value of device obtains X axis coordinate value.
Further, the vector for laser central beam axis to A rotation axis being obtained in step 1) specifically includes following steps,
1.21) dressing plate is fixed on equipment workbench;
1.22) C rotary shaft is rotated to 0 °, A rotary shaft is rotated to 90 ° of positions, by laser processing point in dressing plate Front surface process the first mark point, recording equipment Z axis coordinate;
1.23) C rotary shaft is rotated 180 °, laser processing point is moved to step 1.22) by A rotary shaft to -90 ° of positions The first mark point at, and record Z axis coordinate at this time;
1.24) half of step 1.22) and Z axis coordinate difference in step 1.23) is rotated as laser central beam axis to A The Y-direction component of axis vector;
1.25) C rotary shaft is rotated to 90 °, A rotary shaft is rotated to 90 °, using laser processing point on the left of dressing plate Face processes the second mark point, records Z axis coordinate at this time;
1.26) C rotary shaft is rotated to 270 °, A rotary shaft is rotated to -90 °, and laser processing point is moved to step 1.25) at the second mark point, and Z axis coordinate at this time is recorded;
1.27) half of step 1.25) and Z axis coordinate difference in step 1.26) is rotated as laser central beam axis to A The X of axis vector is to component;
1.28) Y-direction component and step of the laser central beam axis obtained by step 1.24) to A rotation axis vector The rapid laser central beam axis 1.27) obtained obtains laser central beam axis and rotates to A to the X of A rotation axis vector to component The vector of axis.
Further, the vector for laser central beam axis to C rotation axis being obtained in step 1) specifically includes following steps,
1.31) dressing plate is fixed on equipment workbench;
1.32) C rotary shaft is rotated to 0 °, A rotary shaft rotates to 0 ° of position, using laser processing point on dressing plate Surface processes third mark point, records equipment X axis coordinate at this time;
1.33) C rotary shaft is rotated to 180 °, 0 ° of position of A rotary shaft is constant, and laser processing point is moved to step 1.32) at third mark point, equipment X axis coordinate at this time is recorded;
1.34) half of step 1.32) and X axis coordinate difference in step 1.33) is rotated as laser central beam axis to C The X of axis vector is to component;
1.35) C rotary shaft is rotated to 90 °, 0 ° of position of A rotary shaft is constant, using laser processing point on dressing plate Surface processes the 4th mark point, records equipment Y axis coordinate at this time;
1.36) C rotary shaft is rotated to 270 °, 0 ° of position of A rotary shaft is constant, and laser processing point is moved to step 1.35) at the 4th mark point, equipment Y axis coordinate at this time is recorded;
1.37) half of step 1.35) and Y axis coordinate difference in step 1.36) is rotated as laser central beam axis to C The Y-direction component of axis vector;
1.38) the laser central beam axis obtained by step 1.34) is to the X of C rotation axis vector to component and step The rapid laser central beam axis 1.37) obtained obtains laser central beam axis and rotates to C to the Y-direction component of C rotation axis vector The vector of axis.
Compared with prior art, the present invention having the following technical effects:
The invention proposes a kind of precision compensation methods using five-axle linkage RTCP function process equipment, pass through this method The five axes interpolation precision of laser process equipment can be improved, and filled up and be related to laser machining five axis equipment about RTCP precision benefit The blank repaid.
Detailed description of the invention
Fig. 1 is the structure chart of existing five axis laser process equipment of Double swing head;
Fig. 2 is compensation method vector closed loop schematic diagram of the present invention.
Specific embodiment
The contents of the present invention are described in further detail below in conjunction with the drawings and specific embodiments:
As shown in Figure 1, five axis laser process equipments of the invention be existing cutter rotation type, i.e., double pendulum header structure plus Construction equipment, the equipment include five axis of XYZAC, and wherein A rotary shaft, C rotary shaft are double pendulum axis, laser Machining head can be driven to realize Rotation and beat movement;XYZ axis is linear axis, and part to be processed can be driven to realize linear motion.Above-mentioned XYZ axis is formed by flute The positive direction of karr coordinate system meets the right-hand rule, and A rotary shaft, the direction of motion of C rotary shaft are respectively around X-axis, the axis of Z axis Line is rotated, and the positive direction of rotation meets right-hand screw rule, and (thumb is directed toward the positive direction of axis, four directions referred to For the movement positive direction of rotary shaft).
As shown in Fig. 2, the present invention provides a kind of RTCP precision compensation method of five axis laser process equipments, this method master The measurement of three groups of parameters is contained, is Z-direction vector, laser central beam axis to A that laser processing point arrives A rotation axis respectively To the vector of C rotary shaft, the accuracy compensation of each group parameter respectively includes as follows the vector and laser central beam axis of rotary shaft Step:
1) the Z-direction vector of point P to A rotation axis is laser machined;
1.1) dressing plate known to a thickness is fixed on equipment workbench, dressing plate length is respectively parallel to The X-axis of process equipment, Y-axis, Z axis, the face that dressing plate is parallel to X-axis is front surface, and dressing plate is parallel to the face of Y-axis as a left side Side, the face that dressing plate is parallel to X/Y plane is upper surface;It is 0 ° that C rotary shaft, which is defined, in negative X-direction, defines A rotary shaft It is 0 ° in negative Z-direction;
1.2) C rotary shaft is rotated to 90 °, A rotary shaft is rotated to 90 °;
1.3) laser processing point is moved to dressing plate right side, records X axis coordinate;
1.4) for rotation C rotary shaft to 270 °, mobile X-axis makes laser processing point be moved to dressing plate left side, records this When △ X value of the X-axis relative to step 1.3);
1.5) (△ X- dressing plate length)/2 are the vertical range for laser machining point and arriving A rotation axis;
2) vector of the laser central beam axis to A rotation axis;
2.1) dressing plate is fixed on equipment workbench;
2.2) C rotary shaft is rotated to 0 °, A rotary shaft rotates to 90 ° of positions, using laser processing point in dressing plate Front surface processes the first mark point, records equipment Z axis coordinate at this time;
2.3) C rotary shaft is rotated 180 °, adjusts A rotary shaft later to -90 ° of positions, laser processing point is moved to step At rapid the first mark point 2.2), and record Z axis coordinate at this time;
2.4) step 2.2) is with the half of Z axis coordinate difference in step 2.3) as laser central beam axis to A rotary shaft The Y-direction component of line vector;
2.5) C rotary shaft is rotated to 90 °, A rotary shaft is rotated to 90 °, using laser processing point on the left of dressing plate Face processes the second mark point, records Z axis coordinate at this time;
2.6) C rotary shaft is rotated to 270 °, A rotary shaft is rotated to -90 °, and laser processing point is moved to step 2.5) The second mark point at, and record Z axis coordinate at this time;
2.7) step 2.5) is with the half of Z axis coordinate difference in step 2.6) as laser central beam axis to A rotary shaft The X of line vector is to component;
2.8) Y-direction component and step of the laser central beam axis obtained by step 2.4) to A rotation axis vector 2.7) the laser central beam axis obtained obtains laser central beam axis to A rotary shaft to the X of A rotation axis vector to component The vector of line;
3) vector of the laser central beam axis to C rotary shaft;
3.1) dressing plate is fixed on equipment workbench;
3.2) C rotary shaft is rotated to 0 °, A rotary shaft rotates to 0 ° of position, using laser processing point on dressing plate Surface processes third mark point, records X axis coordinate at this time;
3.3) C rotary shaft is rotated to 180 °, 0 ° of position of A rotary shaft is constant, and laser processing point is moved to the of step 2 At three mark points, record X axis coordinate at this time;
3.4) step 3.2) is with the half of X axis coordinate difference in step 3.3) as laser central beam axis to C rotary shaft The X of line vector is to component;
3.5) C rotary shaft is rotated to 90 °, 0 ° of position of A rotary shaft is constant, uses laser processing point table on dressing plate Face processes the 4th mark point, records equipment Y axis coordinate at this time;
3.6) C rotary shaft is rotated to 270 °, 0 ° of position of A rotary shaft is constant, and laser processing point is moved to the of step 5 At four mark points, equipment Y axis coordinate at this time is recorded;
3.7) step 3.5) is with the half of Y axis coordinate difference in step 3.6) as laser central beam axis to C rotary shaft The Y-direction component of line vector;
3.8) the laser central beam axis obtained by step 3.4) is to the X of C rotation axis vector to component and step 3.7) the laser central beam axis obtained obtains laser central beam axis to C rotary shaft to the Y-direction component of C rotation axis vector The vector of line;
4) by above method by after the completion of three groups of parameter detectings, then each group parameter is input in control system and is completed The accuracy compensation of RTCP function;
In numerical control multi-shaft Interpolation Process, the position that digital control system calculates each interpolated point on machining path first (includes Interpolated point coordinate and direction vector), then interpolated point position is converted to the movement position coordinate of five axis of XYZAC, it is inserted each Mend biasing caused by the movement of AC rotary shaft in the period all must be compensated by XYZ axis, therefore digital control system is on obtaining After stating offset data, according to the relative positional relationship between AC rotary shaft on the direction XYZ, calculates lathe XYZ axis and revolved in AC Bias compensation amount in shaft Interpolation Process to realize RTCP function, and greatly improves processing efficiency and machining accuracy with this.
Wherein, above-mentioned steps 1), the tandem present invention of step 2) and step 3) do not require, as long as this can be obtained Invent three groups of parameters, i.e., it is rapid 1), the tandem of step 2) and step 3) it is interchangeable.
It is as follows using the specific embodiment of the method for the present invention:
The accuracy compensation parameter of RTCP includes several vectors, and each vector forms vector closed loop, and this method is directed to (laser processing point arrives a Z-direction vector for A rotation axis, the vector of laser central beam axis to C rotation axis and sharp for these vectors Vector of the beam center axis to the first rotary shaft) scaling method is provided, and then realize the accuracy compensation of RTCP;
1) laser processing point arrives the Z-direction vector of A rotation axis;
1.1) dressing plate that a length is 10mm is fixed on the table;
1.2) C rotary shaft is rotated to 90 °, A rotary shaft is rotated to 90 °;
1.3) displacement sensor is installed on laser Machining head, then laser processing point is moved on the right side of dressing plate Face, reading displacement sensor indicating value F at this time, (value characterizes laser processing point when falling on dressing plate, and displacement sensor arrives The distance of dressing plate), and record X axis coordinate;
1.4) for rotation C rotary shaft to 270 °, mobile X-axis, which makes laser processing point be moved to dressing plate left side, (ensures this When displacement sensor indicating value be F), record △ X of the X-axis relative to step 1.3) at this time;
1.5) (△ X-10)/2 is the Z-direction vector for laser machining point and arriving A rotation axis;
2) vector of the laser central beam axis to A rotation axis;
2.1) dressing plate is fixed on equipment workbench;
2.2) C rotary shaft is rotated to 0 °, A rotary shaft rotates to 90 ° of positions, ensures to process point using displacement sensor In in the front surface of dressing plate, it is ensured that displacement sensor indicating value be F, using beam quality analysis instrument read at this time hot spot in light The position (position of laser processing point can be more accurately measured with beam quality analyzer) of beam quality analyzer, record is set at this time Standby Z axis coordinate;
2.3) C rotary shaft is rotated 180 °, adjusts A rotary shaft later to -90 ° of positions, is added by the mobile laser of equipment Y-axis Work point is F until displacement sensor indicating value, and then moving X-axis and Z axis makes laser processing point move to step 2.2) beam quality At the position of analyzer measurement, and record Z axis coordinate at this time;
2.4) step 2.2) is with the half of Z axis coordinate difference in step 2.3) as laser central beam axis to A rotary shaft The Y-direction component of line vector;
2.5) C rotary shaft is rotated to 90 °, A rotary shaft is rotated to 90 °, ensures that processing stand is located at using displacement sensor On the surface of dressing plate, it is ensured that displacement sensor indicating value be F, using beam quality analysis instrument read at this time hot spot in light beam matter The position (position of laser processing point can be more accurately measured with beam quality analyzer) for measuring analyzer, records equipment Z at this time Axial coordinate;
2.6) C rotary shaft is rotated to 270 °, A rotary shaft is rotated to -90 °, straight by the mobile laser processing point of equipment X-axis It is F to displacement sensor indicating value, then moving Y-axis and Z axis makes laser processing point move to step 2.5) beam quality analysis instrument At the position of measurement, and record Z axis coordinate at this time;
2.7) step 2.5) is with the half of Z axis coordinate difference in step 2.6) as laser central beam axis to A rotary shaft The X of line vector is to component;
2.8) Y-direction component and step 2.7) of the laser central beam axis for obtaining step 2.4) to A rotation axis vector The X of obtained laser central beam axis to A rotation axis vector is calculated to component, is obtained laser central beam axis and is revolved to A The vector of shaft axis;
3) vector of the laser central beam axis to C rotary shaft;
3.1) dressing plate is fixed on equipment workbench;
3.2) C rotary shaft rotates to 0 °, and A rotary shaft rotates to 0 ° of position, ensures that processing stand is located at using displacement sensor On the upper surface of dressing plate, it is ensured that displacement sensor indicating value is F.Using beam quality analysis instrument read at this time hot spot in light beam The position (position of laser processing point can be more accurately measured with beam quality analyzer) of mass-synchrometer, records equipment at this time X axis coordinate;
3.3) C rotary shaft is rotated to 180 °, 0 ° of position of A rotary shaft is constant, and laser processing point is moved to step 3.2) At the position of beam quality analysis instrument measurement, equipment X axis coordinate at this time is recorded;
3.4) step 3.2) is with the half of X axis coordinate difference in step 3.3) as laser central beam axis to C rotary shaft The X of line vector is to component;
3.5) C rotary shaft is rotated to 90 °, 0 ° of position of A rotary shaft is constant, reads this time using beam quality analysis instrument Spot is in the position (can more accurately measure the position of laser processing point with beam quality analyzer) of beam quality analysis instrument, record Equipment Y axis coordinate at this time;
3.6) C rotary shaft is rotated to 270 °, 0 ° of position of A rotary shaft is constant, and laser processing point is moved to step 3.5) At the position of beam quality analysis instrument measurement, equipment Y axis coordinate at this time is recorded;
3.7) step 3.5) is with the half of Y axis coordinate difference in step 3.6) as laser central beam axis to C rotary shaft The Y-direction component of line vector;
3.8) the laser central beam axis for obtaining step 3.4) is to the X of C rotation axis vector to component and step 3.7) The Y-direction component of obtained laser central beam axis to C rotation axis vector is calculated, and is obtained laser central beam axis and is revolved to C The vector of shaft axis;
4) by above method by after the completion of three groups of parameter detectings, then each group parameter is input in control system and is completed The accuracy compensation of RTCP function.

Claims (5)

1. a kind of five axis laser process equipment RTCP precision compensation methods, the five axis laser process equipment includes XYZ tri- straight Spool, A rotary shaft, C rotary shaft, the A rotary shaft, C rotary shaft surround X-axis respectively, the axis of Z axis is rotated, It is characterized in that, includes the following steps:
1) obtain respectively laser processing point to the Z-direction vector of A rotation axis, laser central beam axis to A rotation axis vector, Vector of the laser central beam axis to C rotation axis;
2) accuracy compensation of RTCP function will be completed in each group parameter input control system.
2. five axis laser process equipment RTCP precision compensation method according to claim 1, it is characterised in that:In step 1) The Z-direction vector for obtaining laser processing point to A rotation axis specifically includes following steps,
1.11) dressing plate is set on equipment workbench, and the length of the dressing plate is respectively parallel to process equipment X-axis, Y-axis, Z axis;
1.12) C rotary shaft is rotated to 90 °, A rotary shaft is rotated to 90 °;
1.13) laser processing point is moved to dressing plate right side, records X axis coordinate;
1.14) C rotary shaft will be rotated to 270 °, mobile X-axis makes laser processing point be moved to dressing plate left side, and record is at this time △ X value of the X-axis relative to step 1.13);
1.15) half of △ X and h difference is the Z-direction vector for laser machining point and arriving A rotation axis, and h is dressing plate length.
3. five axis laser process equipment RTCP precision compensation method according to claim 2, it is characterised in that:Step 1.13) in, it is provided with displacement sensor on laser Machining head, obtains X axis coordinate value by reading the value of displacement sensor.
4. five axis laser process equipment RTCP precision compensation method according to claim 1, it is characterised in that:In step 1) The vector for obtaining laser central beam axis to A rotation axis specifically includes following steps,
1.21) dressing plate is fixed on equipment workbench;
1.22) C rotary shaft is rotated to 0 °, A rotary shaft is rotated to 90 ° of positions, through laser processing point before dressing plate Surface processes the first mark point, recording equipment Z axis coordinate;
1.23) C rotary shaft is rotated 180 °, A rotary shaft is moved to the of step 1.22) to -90 ° of positions, by laser processing point At one mark point, and record Z axis coordinate at this time;
1.24) step 1.22) is with the half of Z axis coordinate difference in step 1.23) as laser central beam axis to A rotation axis The Y-direction component of vector;
1.25) C rotary shaft is rotated to 90 °, A rotary shaft is rotated to 90 °, is added using laser processing point in dressing plate left side The second mark point of work records Z axis coordinate at this time;
1.26) C rotary shaft is rotated to 270 °, A rotary shaft is rotated to -90 °, and laser processing point is moved to step 1.25) At second mark point, and record Z axis coordinate at this time;
1.27) step 1.25) is with the half of Z axis coordinate difference in step 1.26) as laser central beam axis to A rotation axis The X of vector is to component;
1.28) Y-direction component and step of the laser central beam axis obtained by step 1.24) to A rotation axis vector 1.27) the laser central beam axis obtained obtains laser central beam axis to A rotary shaft to the X of A rotation axis vector to component The vector of line.
5. five axis laser process equipment RTCP precision compensation method according to any one of claims 1 to 4, it is characterised in that: The vector that laser central beam axis to C rotation axis are obtained in step 1) specifically includes following steps,
1.31) dressing plate is fixed on equipment workbench;
1.32) C rotary shaft is rotated to 0 °, A rotary shaft rotates to 0 ° of position, using laser processing point in dressing plate upper surface Third mark point is processed, equipment X axis coordinate at this time is recorded;
1.33) C rotary shaft is rotated to 180 °, 0 ° of position of A rotary shaft is constant, and laser processing point is moved to step 1.32) At third mark point, record equipment X axis coordinate at this time;
1.34) step 1.32) is with the half of X axis coordinate difference in step 1.33) as laser central beam axis to C rotation axis The X of vector is to component;
1.35) C rotary shaft is rotated to 90 °, 0 ° of position of A rotary shaft is constant, using laser processing point in dressing plate upper surface The 4th mark point is processed, equipment Y axis coordinate at this time is recorded;
1.36) C rotary shaft is rotated to 270 °, 0 ° of position of A rotary shaft is constant, and laser processing point is moved to step 1.35) At 4th mark point, equipment Y axis coordinate at this time is recorded;
1.37) step 1.35) is with the half of Y axis coordinate difference in step 1.36) as laser central beam axis to C rotation axis The Y-direction component of vector;
1.38) the laser central beam axis obtained by step 1.34) is to the X of C rotation axis vector to component and step 1.37) the laser central beam axis obtained obtains laser central beam axis to C rotary shaft to the Y-direction component of C rotation axis vector The vector of line.
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CN111408861A (en) * 2020-04-27 2020-07-14 中国科学院西安光学精密机械研究所 Five-axis laser equipment RTCP calibration equipment and method
CN111408836A (en) * 2020-04-23 2020-07-14 中国科学院西安光学精密机械研究所 High-precision adjusting method for double-swing-head laser processing light beam pointing and laser processing system
CN111673292A (en) * 2020-06-04 2020-09-18 西安中科微精光子制造科技有限公司 RTCP error calibration compensation method for five-axis laser processing equipment
CN112475591A (en) * 2020-11-26 2021-03-12 北京航空航天大学 Double-swing-head five-axis linkage laser processing machine tool and working method
CN112475592A (en) * 2020-11-26 2021-03-12 北京航空航天大学 Inherent parameter calibration method for double-swing-head five-axis linkage laser processing machine tool
CN113146068A (en) * 2021-04-28 2021-07-23 沧州领创激光科技有限公司 Groove cutting intelligence laser cutting machine
CN114193008A (en) * 2021-11-26 2022-03-18 中国科学院西安光学精密机械研究所 RTCP parameter calibration method for five-axis linkage laser processing equipment

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