CN108827349A - A kind of omnidirection sliding feeling sensor - Google Patents
A kind of omnidirection sliding feeling sensor Download PDFInfo
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- CN108827349A CN108827349A CN201810622796.2A CN201810622796A CN108827349A CN 108827349 A CN108827349 A CN 108827349A CN 201810622796 A CN201810622796 A CN 201810622796A CN 108827349 A CN108827349 A CN 108827349A
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- 239000000463 material Substances 0.000 claims abstract description 30
- 238000009413 insulation Methods 0.000 claims abstract description 20
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 32
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 32
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 32
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 32
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 32
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 15
- 229910021389 graphene Inorganic materials 0.000 claims description 12
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 6
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 6
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 239000004411 aluminium Substances 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 235000007164 Oryza sativa Nutrition 0.000 claims description 3
- 239000004642 Polyimide Substances 0.000 claims description 3
- 239000002041 carbon nanotube Substances 0.000 claims description 3
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- 239000002861 polymer material Substances 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 235000009566 rice Nutrition 0.000 claims description 3
- 240000007594 Oryza sativa Species 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 238000010008 shearing Methods 0.000 abstract description 9
- 239000010408 film Substances 0.000 description 46
- 239000010703 silicon Substances 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 239000010410 layer Substances 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 12
- 238000002360 preparation method Methods 0.000 description 7
- 239000002390 adhesive tape Substances 0.000 description 5
- 239000003292 glue Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 4
- 229910021641 deionized water Inorganic materials 0.000 description 4
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000002689 soil Substances 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 241000209094 Oryza Species 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000010147 laser engraving Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000010146 3D printing Methods 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
Abstract
A kind of omnidirection sliding feeling sensor,Including superstructure and substructure,Superstructure is a cylindrical structure for having circular ring shape skirt,The material of superstructure is flexible material,The lower surface of skirt is equipped with top electrode,Substructure includes pressure drag film,Multiple lower electrodes and the insulation film for covering pressure drag film and multiple lower electrodes,Multiple lower electrodes around pressure drag film outside and be spaced apart,Pressure drag film is located at the center that multiple lower electrodes surround,The lower surface of cylindrical structure is directed at pressure drag film,When sensor is by shearing force,Superstructure is tilted to the direction of power,So that top electrode is contacted with the insulation film of lower part,To which the lower electrode below top electrode and insulation film induces electric signal,When sensor is acted on by normal pressure,Deformation occurs in normal direction for pressure drag film,To which its own resistance value changes correspondingly.The sliding feeling sensor can not only identify the sliding on any direction, moreover it is possible to measure the speed and shearing force size of sliding.
Description
Technical field
The present invention relates to sliding feeling sensors, more particularly to a kind of omnidirection sliding feeling sensor.
Background technique
Manipulator needs the feelings of relative motion between real-time monitoring manipulator and held object contact surface when grasping object
Condition holds object to determine suitable grip value under the premise of not damaging object.Sliding feeling sensor is that one kind is mainly used for
The device for sliding between inspecting manipuator and held object or sliding in advance, it is soft that performance directly determines that robot success is completed
Property grasp task.
The sliding feeling sensor developed at present is based primarily upon the principles such as piezoelectricity, pressure drag, capacitor.Though some sliding feeling sensors
It so can identify whether to slide, but be not capable of measuring the direction of sliding and speed or single square upward sliding can only be measured
Direction and speed.
Summary of the invention
It is a primary object of the present invention to make up the deficiencies in the prior art, a kind of omnidirection sliding feeling sensor, the cunning are provided
Feel that sensor can not only identify the sliding on any direction, moreover it is possible to measure the speed and shearing force size of sliding.
To achieve the above object, the present invention uses following technical scheme：
A kind of omnidirection sliding feeling sensor, including superstructure and substructure, the superstructure are one with annulus
The cylindrical structure of shape skirt, the material of the superstructure are flexible material, and the lower surface of the skirt is equipped with top electrode,
The top electrode of the equal thickness of the lower surface of the preferably one layer covering skirt, the substructure includes pressure drag film, multiple
Lower electrode and by the pressure drag film and the insulation film of the multiple lower electrode covering, the multiple lower electrode is around described
The outside of pressure drag film is simultaneously spaced apart, and the pressure drag film is located at the central area that the multiple lower electrode surrounds, the circle
The lower surface of column construction is directed at and compresses the pressure drag film, and the pressure drag film is described to power on for measuring normal pressure
Pole and the lower electrode are for incuding triboelectrification signal caused by different glide directions, and the sensor is by shearing force
When, the superstructure is tilted to the direction of power, so that the top electrode is contacted with the insulation film of lower part, thus described
Lower electrode below top electrode and the insulation film induces electric signal, when the sensor is acted on by normal pressure, institute
Stating pressure drag film, deformation occurs in normal direction, so that its own resistance value changes correspondingly.
Further：
For the multiple lower electrode along same circumferentially-spaced, the pressure drag film is located at what the multiple lower electrode surrounded
Center of circle region, geometric center are overlapped with the center of circle of circumference where the multiple lower electrode.
The lower electrode is arc-shaped electrode, has interval, the measurement on the pressure drag film between each arc-shaped electrode
Terminal is drawn by the interval.
The diameter of the cylindrical structure is 1-3 millimeters, is highly 3-6 millimeters, and the diameter of the circular ring shape skirt is 3-8
Millimeter, with a thickness of 0.3-1 millimeters, the lower surface of the circular ring shape skirt is 0.5- away from the lower surface height of the cylindrical structure
2 millimeters.
The lower electrode is arc-shaped electrode, and the inner circle ring diameter of the lower electrode is 1.5-3.5 millimeters, outer circle ring diameter
It is 4-8 millimeters.
The material of the top electrode is aluminium, copper or silver, and with a thickness of 200 nanometers to 50 microns, the material of the lower electrode is
Metal or graphene, with a thickness of 200 nanometers to 50 microns.
The flexible material is elastic polymer material.
The material of the insulation film is PDMS, polyimides or polytetrafluoroethylene (PTFE), with a thickness of 200 microns to 600 microns,
Width is 100 microns to 1 millimeter.
The material of the pressure drag film be induced with laser porous graphene or carbon nanotube, it is micro- with a thickness of 150 microns to 250
Rice.
The multiple lower electrode is four lower electrodes being evenly spaced on, and four lower electrodes are connected with radially
Four electrode leading-out terminals drawn outward, the pressure drag film are connected with through the interval between the lower electrode radially
Four measurement terminals drawn outward.
The present invention has the advantages that：
The present invention provides the sliding feeling sensor of a kind of measurable any direction sliding and shearing force, including superstructure is under
Portion's structure, superstructure are a cylindrical structure for having circular ring shape skirt, and the material of superstructure is flexible material, skirt
Lower surface is equipped with top electrode, and the lower surface of cylindrical structure is directed at and compresses the center of circle region that multiple lower electrodes surround, whole
Be formed as the structure that longitudinal cross-section is " soil " font, by the pressure drag measured thin film normal pressure in substructure, by powering on
Pole and leaning on for lower electrode incude triboelectrification signal caused by sliding recently, and when sensor is by shearing force, top is tied
Structure is tilted to the direction of power so that top electrode is contacted with the insulation film of lower part, thus top electrode with below insulation film
Lower electrode induces electric signal, and direction and the speed of sliding can be calculated by the size of electrical signal of reaction on multiple lower electrodes；
When sensor is acted on by normal pressure, deformation occurs in normal orientation for pressure drag film, so that its own resistance value is therewith
Change.After tested, using sliding feeling sensor of the invention, have to the sliding of any direction and accurately and reliably respond；When not Tongfang
To sliding occur when, the signal of acquisition has apparent difference；By the electric signal induced in comparison multiple electrodes, can integrate
Calculate direction and the speed of sliding；And pass through the resistance value of real-time monitoring lower part pressure drag film, it can also obtain and act on biography
The normal pressure numerical value of sensor.Sliding feeling sensor is designed as " soil " character form structure by the present invention, passes through the nanometer generating that rubs
Machine principle not only can identify whether to slide, moreover it is possible to measure direction and the speed of sliding.Meanwhile passing through pressure drag film material
Material, can perceive normal pressure simultaneously.
Relative to existing sliding feeling sensor, sliding feeling sensor high sensitivity of the invention can measure the sliding of any direction
And speed, and the normal pressure for acting on sensor can be measured.Moreover, sliding feeling sensor of the invention can be fast
Speed conveniently realizes production.
Detailed description of the invention
Fig. 1 is the schematic cross-section of the omnidirection sliding feeling sensor of an embodiment of the present invention；
Fig. 2 is the stereoscopic schematic diagram of the omnidirection sliding feeling sensor of an embodiment of the present invention；
Fig. 3 is the lower electrode and pressure drag film schematic diagram of the omnidirection sliding feeling sensor of an embodiment of the present invention.
Specific embodiment
It elaborates below to embodiments of the present invention.It is emphasized that following the description is only exemplary,
The range and its application being not intended to be limiting of the invention.
Refering to fig. 1 to Fig. 3, in one embodiment, a kind of omnidirection sliding feeling sensor, including superstructure and lower junction
Structure, the superstructure are a cylindrical structure 1 for having circular ring shape skirt, and the material of the superstructure is flexible material,
The lower surface of the skirt is equipped with top electrode 2, and the substructure includes pressure drag film 5, multiple lower electrodes 4 and by the pressure
The insulation film 3 of film 5 and the covering of the multiple lower electrode 4 is hindered, the multiple lower electrode 4 is around the pressure drag film 5
Outside is simultaneously spaced apart, and the pressure drag film 5 is located at the central area that the multiple lower electrode 4 surrounds, the cylindrical structure 1
Lower surface be directed at and compress the pressure drag film 5, the pressure drag film 5 is for measuring normal pressure, the top electrode 2 and institute
Lower electrode 4 is stated for incuding triboelectrification signal caused by different glide directions, when the sensor is by shearing force, institute
It states superstructure to tilt to the direction of power, so that the top electrode 2 is contacted with the insulation film 3 of lower part, thus on described
The lower electrode 4 of 3 lower section of electrode 2 and the insulation film induces electric signal, passes through electrical signal of reaction on the multiple lower electrode 4
Size can calculate direction and the speed of sliding, when the sensor is acted on by normal pressure, the pressure drag film 5 is in method
Deformation occurs upwards, so that its own resistance value changes correspondingly.
Omnidirection sliding feeling sensor according to the embodiment is the sliding feeling sensor that can measure any direction sliding and shearing force,
It is integrally formed into the structure that longitudinal cross-section is " soil " font, and size is in the micron-scale to Centimeter Level.Pass through friction nanometer power generator
Principle can not only identify the sliding on any direction, moreover it is possible to measure the speed and shearing force size of sliding.Meanwhile sliding feel sensing
Device bottom is provided with pressure drag film, can perceive normal pressure simultaneously.Pressure drag film preferably uses and is integrated with the figure of pressure drag material
Change structure.
In a preferred embodiment, top electrode 2 is the upper of the equal thickness of the lower surface of one layer of covering circular ring shape skirt
Electrode.
In a preferred embodiment, the multiple lower electrode 4 is located at along same circumferentially-spaced, the pressure drag film 5
The center of circle region that the multiple lower electrode 4 surrounds, geometric center are overlapped with the center of circle of the multiple lower 4 place circumference of electrode.
In a preferred embodiment, the lower electrode 4 is arc-shaped electrode, has interval, institute between each arc-shaped electrode
The measurement terminal stated on pressure drag film 5 is drawn by the interval.
In a preferred embodiment, the diameter of the cylindrical structure 1 is 1-3 millimeters, is highly 3-6 millimeters, the circle
The diameter of annular shirt rim is 3-8 millimeters, and with a thickness of 0.3-1 millimeters, the lower surface of the circular ring shape skirt is away from the cylindrical knot
The lower surface height of structure 1 is 0.5-2 millimeters.
In a preferred embodiment, the lower electrode 4 is arc-shaped electrode, and the inner circle ring diameter of the lower electrode 4 is
1.5-3.5 millimeters, outer circle ring diameter is 4-8 millimeters.
In a preferred embodiment, the material of the top electrode 2 is aluminium, copper or silver, with a thickness of 200 nanometers to 50 microns,
The material of the lower electrode 4 is metal or graphene, with a thickness of 200 nanometers to 50 microns.
In a preferred embodiment, the flexible material is elastic polymer material.
In a preferred embodiment, the material of the insulation film 3 is PDMS, polyimides or polytetrafluoroethylene (PTFE), thickness
It is 200 microns to 600 microns, width is 100 microns to 1 millimeter.
In a preferred embodiment, the material of the pressure drag film 5 is induced with laser porous graphene or carbon nanotube, thickness
Degree is 150 microns to 250 microns.
In a preferred embodiment, the multiple lower electrode 4 is four lower electrodes 4 being evenly spaced on, described four
Lower electrode 4 is connected with four electrode leading-out terminals radially drawn outward, and the pressure drag film 5 is connected with by under described
Four measurement terminals that interval between electrode 4 is radially drawn outward.
As shown in Figure 1, in a typically preferred embodiment, a kind of sliding feel sensing that can measure pressure and sliding simultaneously
Device, including：Cylindrical structure 1, top electrode 2, insulation film 3, lower electrode 4 and pressure drag film 5 with circular ring shape skirt.Cylinder
The high diameter of shape structure 1 compares removing for lower cylinder (i.e. circular ring shape skirt) and compares higher cylinder (i.e. annulus with high diameter
Cylinder above shape skirt) bottom surface connected component bottom surface on have equal thickness lower electrode 2, insulation film 3 will be multiple
Electrode 4 and pressure drag film 5 are completely covered, and 4 equidistantly distributed of multiple electrodes and are located on same circumference, and the diameter of circumference
The diameter of 1 bottom cylinder of cylindrical structure should be greater than, the center of circle of circumference where the geometric center and multiple electrodes of pressure drag film 5
It is overlapped, and the area of pressure drag film 5 should be less than the area of the bottom surface of 1 bottom cylinder of cylindrical structure.Cylinder is tied
The geometric center of the geometric center alignment 3 lower section pressure drag film 5 of insulation film of the bottom surface of the bottom cylinder of structure 1, makes two parts
Close structure is grouped together into a sliding feeling sensor.
The preparation process of omnidirection sliding feeling sensor of the present invention is described below.
Preparation example 1：
This preparation example makes the sliding feeling sensor based on single-electrode nano generator by some devices, specifically include with
Lower step：
1) two toughened resin molds are printed by laser 3D printing machine first, is that a great circle is recessed on one of mold
Slot middle part includes the Model array of a small round recessed, wherein 380 microns of 7 millimeters deep of great circle groove diameter；Roundlet groove diameter 3
750 microns of millimeters deep；Another mold is circular groove array, 2.5 millimeters of 3 millimeters deep of circular groove diameter.By two molds
Be washed with deionized water it is clean, then with being dried with nitrogen；
2) according to 10 on electronic scale:1 ratio mixes PDMS performed polymer with curing agent, will mix after being sufficiently stirred
PDMS pour into the mold and have in, be vacuum-treated three times using vacuum pump, to remove air extra in PDMS, by mold
50 DEG C of baking oven are put into be kept for 3 hours；
3) PDMS is stripped out from mold, is separated PDMS boss structure from array using PDMS chip cutting knife
Out.One layer 100 is plated again in the chromium that the lower surface of the larger cylinder of PDMS diameter of movement of two layers of cylinder first plates one layer 10 nanometers to receive
Rice aluminium, by two layers of cylindrical structure of PDMS be relatively large in diameter the cylinder upper surface center of circle alignment PDMS single layer cylindrical structure the center of circle,
The two is bonded together；
4) there is glue adhesive tape is smooth to be attached on one 4 cun clean silicon wafers kapton PI single side, by PI glue belt surface alcohol
It is cleaned up with deionized water, silicon wafer is put into carbon dioxide laser engraving machine, set laser power as 6W, laser emitter pair
Start to carve after eka-silicon piece center, from PI spatial induction graphene.Silicon wafer is placed on sol evenning machine sucker later, using true
Sky pump sucks, setting speed 300rpm, and rotational time is 45 seconds, will be according to mass ratio 1:1 is mixed with the liquid of n-hexane
PDMS is uniform in PI glue belt surface spin coating, and silicon wafer is placed on horizontal platform and stands 3 hours, silicon wafer is placed on 90 on hot plate later
DEG C baking one hour；
5) PDMS is peeled from silicon wafer and translates into reverse side, at the induced with laser Graphene electrodes endpoint for being mixed with PDMS
Coated with nano silver paste places into 90 DEG C of baking half an hour of baking oven, to paste copper adhesive tape at silver paste after device cooling, by PDMS
The figure of the induced with laser graphene of the geometric center alignment mixing PDMS of the bottom surface of the bottom cylinder of three layers of cylinder composite construction
Shape geometric center, double-layer structure is bonded together, and completes the production of sensor.
As shown in Fig. 2, for sliding feeling sensor pictorial diagram made from this preparation example.Sliding feeling sensor obtained is upper in this example
Lower electrode spacing is 750 microns.
Preparation example 2：This preparation example and preparation example 1 the difference is that：Sensor structure size and electrode material therefor
Etc. parameters it is different.
The present embodiment makes the sliding feeling sensor based on single-electrode nano generator by some devices, specifically include with
Lower step：
1) PLA mold is printed by thermosetting formula 3D printer first, is in the middle part of one big round recessed on one of mold
Model array comprising a small round recessed, wherein 600 microns of 8 millimeters deep of great circle groove diameter；3 millimeters deep of roundlet groove diameter
2 millimeters；Another mold is circular groove array, 5 millimeters of 3 millimeters deep of circular groove diameter.Mold is washed with deionized water dry
Only, then with being dried with nitrogen；
2) according to 10 on electronic scale:1 ratio mixes PDMS performed polymer with curing agent, will mix after being sufficiently stirred
PDMS pour into the mold and have in, be vacuum-treated three times using vacuum pump, to remove air extra in PDMS, by mold
90 DEG C of baking oven are put into be kept for 1.5 hours；
3) PDMS is stripped out from mold, is separated PDMS boss structure from array using PDMS chip cutting knife
Out.Equal thickness copper adhesive tape is sticked the lower surface of the larger cylinder of PDMS diameter of movement of two layers of cylinder is smooth, by two layers of PDMS
The center of circle for being relatively large in diameter cylinder upper surface center of circle alignment PDMS single layer cylindrical structure of cylindrical structure, the two is bonded together；
4) there is glue adhesive tape is smooth to be attached on one 4 cun clean silicon wafers kapton PI single side, by PI glue belt surface alcohol
It is cleaned up with deionized water, silicon wafer is put into carbon dioxide laser engraving machine, set laser power as 5.5W, laser emitter
Alignment starts to carve after silicon wafer center, from PI spatial induction graphene.Later on silicon wafer on according to mass ratio 1:1 mixing
The liquid PDMS of n-hexane, it is using glass bar that PDMS is even flat, silicon wafer is placed on horizontal platform three hours, later by silicon wafer
It is placed on hot plate and toasts one hour for 90 DEG C；
5) PDMS is peeled from silicon wafer and translates into reverse side, at the induced with laser Graphene electrodes endpoint for being mixed with PDMS
Coated with nano silver paste places into 90 DEG C of baking half an hour of baking oven, to paste copper adhesive tape at silver paste after device cooling, by PDMS
The figure of the induced with laser graphene of the geometric center alignment mixing PDMS of the bottom surface of the bottom cylinder of three layers of cylinder composite construction
Shape geometric center, double-layer structure is bonded together, and completes the production of sensor.
The upper/lower electrode spacing of sliding feeling sensor obtained is 2 millimeters in this example.
The above content is combine it is specific/further detailed description of the invention for preferred embodiment, cannot recognize
Fixed specific implementation of the invention is only limited to these instructions.For those of ordinary skill in the art to which the present invention belongs,
Without departing from the inventive concept of the premise, some replacements or modifications can also be made to the embodiment that these have been described,
And these substitutions or variant all shall be regarded as belonging to protection scope of the present invention.
Claims (10)
1. a kind of omnidirection sliding feeling sensor, which is characterized in that including superstructure and substructure, the superstructure is one
Cylindrical structure with circular ring shape skirt, the material of the superstructure are flexible material, are set on the lower surface of the skirt
There is top electrode, the top electrode of the equal thickness of the lower surface of the preferably one layer covering skirt, the substructure includes pressure drag
Film, multiple lower electrodes and the insulation film for covering the pressure drag film and the multiple lower electrode, the multiple lower electrode
Around the pressure drag film outside and be spaced apart, the pressure drag film is located at the center that the multiple lower electrode surrounds
The lower surface in domain, the cylindrical structure is directed at and compresses the pressure drag film, and the pressure drag film is used to measure normal pressure,
For incuding triboelectrification signal caused by different glide directions, the sensor is cut for the top electrode and the lower electrode
When shear force acts on, the superstructure is tilted to the direction of power, so that the top electrode is contacted with the insulation film of lower part,
To which the lower electrode below the top electrode and the insulation film induces electric signal, the sensor is made by normal pressure
Used time, deformation occurs in normal direction for the pressure drag film, so that its own resistance value changes correspondingly.
2. omnidirection sliding feeling sensor as described in claim 1, which is characterized in that the multiple lower electrode is between same circumference
Every distribution, the pressure drag film is located at the center of circle region that the multiple lower electrode surrounds, geometric center and the multiple lower electricity
The center of circle of circumference is overlapped where pole.
3. omnidirection sliding feeling sensor as claimed in claim 1 or 2, which is characterized in that the lower electrode is arc-shaped electrode,
There is interval, the measurement terminal on the pressure drag film is drawn by the interval between each arc-shaped electrode.
4. omnidirection sliding feeling sensor as described in any one of claims 1 to 3, which is characterized in that the cylindrical structure
Diameter is 1-3 millimeter, is highly 3-6 millimeters, and the diameter of the circular ring shape skirt is 3-8 millimeters, with a thickness of 0.3-1 millimeters, institute
It is 0.5-2 millimeters that the lower surface of circular ring shape skirt, which is stated, away from the lower surface height of the cylindrical structure.
5. such as the described in any item omnidirection sliding feeling sensors of Claims 1-4, which is characterized in that the lower electrode is circular arc
Shape electrode, the inner circle ring diameter of the lower electrode are 1.5-3.5 millimeters, and outer circle ring diameter is 4-8 millimeters.
6. such as omnidirection sliding feeling sensor described in any one of claim 1 to 5, which is characterized in that the material of the top electrode
For aluminium, copper or silver, with a thickness of 200 nanometers to 50 microns, the material of the lower electrode is metal or graphene, is received with a thickness of 200
Rice is to 50 microns.
7. such as omnidirection sliding feeling sensor as claimed in any one of claims 1 to 6, which is characterized in that the flexible material is bullet
Property polymer material.
8. omnidirection sliding feeling sensor as described in any one of claim 1 to 7, which is characterized in that the material of the insulation film
Material is PDMS, polyimides or polytetrafluoroethylene (PTFE), and with a thickness of 200 microns to 600 microns, width is 100 microns to 1 millimeter.
9. omnidirection sliding feeling sensor as claimed in any one of claims 1 to 8, which is characterized in that the material of the pressure drag film
Material is induced with laser porous graphene or carbon nanotube, with a thickness of 150 microns to 250 microns.
10. omnidirection sliding feeling sensor as claimed in any one of claims 1 to 8, which is characterized in that the multiple lower electrode is
Four lower electrodes being evenly spaced on, four lower electrodes are connected with four electrode leads to client radially drawn outward
Son, the pressure drag film are connected with four measurement terminals radially drawn outward by the interval between the lower electrode.
Priority Applications (1)
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