CN108807561A - A method of preparing copper and iron sulphur optoelectronic film with chloride - Google Patents

A method of preparing copper and iron sulphur optoelectronic film with chloride Download PDF

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Publication number
CN108807561A
CN108807561A CN201810704339.8A CN201810704339A CN108807561A CN 108807561 A CN108807561 A CN 108807561A CN 201810704339 A CN201810704339 A CN 201810704339A CN 108807561 A CN108807561 A CN 108807561A
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Prior art keywords
film
iron sulphur
copper
chloride
precursor thin
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CN201810704339.8A
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刘科高
徐勇
荆明星
姬明
石磊
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Shandong Jianzhu University
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Shandong Jianzhu University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0216Coatings
    • H01L31/02161Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02167Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
    • H01L31/02168Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/20Materials for coating a single layer on glass
    • C03C2217/28Other inorganic materials
    • C03C2217/287Chalcogenides
    • C03C2217/288Sulfides
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/11Deposition methods from solutions or suspensions
    • C03C2218/116Deposition methods from solutions or suspensions by spin-coating, centrifugation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

A method of copper and iron sulphur optoelectronic film being prepared with chloride, belongs to optoelectronic film preparing technical field, the present invention obtains as follows, cleans glass substrate first, then by CuCl2.2H2O、FeCl3.6H2O and Na2S2O3.5H2O is sequentially placed into aqueous solvent, prepare clear transparent solutions, precursor thin-film is obtained on the glass sheet with spin-coating method, naturally dry, be put into hydrazine hydrate can closed container, so that precursor thin-film sample is not in direct contact with hydrazine, after the closed container equipped with precursor thin-film sample is heated take out sample be dried, film quality can be improved by increasing reaction times and heat treatment process, obtain copper and iron sulphur optoelectronic film.The present invention does not need high temperature high vacuum condition, low to instrument and equipment requirement, and production cost is low, and production efficiency is high, easily operated.Gained copper and iron sulphur optoelectronic film has preferable continuity and uniformity, this new process to provide a kind of industrialized production method at low cost, achievable to prepare high performance copper and iron sulphur optoelectronic film.

Description

A method of preparing copper and iron sulphur optoelectronic film with chloride
Technical field
The invention belongs to optoelectronic film preparing technical field used for solar batteries more particularly to a kind of preparing copper with chloride The method of iron sulphur optoelectronic film.
Background technology
Copper and iron sulphur is a kind of ternary I-III-VI as photoelectric material2Compound semiconductor has chalcopyrite and dodges zinc The crystal structure of mine, at the same have the high absorption coefficient of light, for direct gap semiconductor, thermal stability is good, is imitated without light-induced degradation The advantages that answering, and because the cheap of copper and iron sulfur materials, rich reserves and the advantages such as nontoxic receive the extensive concern of scientist.
The preparation method of copper and iron sulphur film has much at present, mainly there is electrochemical deposition method, sputtering method, thermal evaporation, heat Spray coating method etc..It is a kind of very promising due to raw material rich reserves on earth, cheap and nontoxic Optoelectronic thin film material, but prior art route is complicated, manufacturing cost is high, thus need to explore the preparation process of low cost.
Method as previously described is the same, and other methods also have different defects.It is related to the present invention to also have following document:
[1] Xiankuan Meng, Hongmei Deng, Investigate the growth mechanism of Cu2FeSnS4 thin films by sulfurization of metallic precursor. Materials Letters, 2017.
Main have studied prepares Cu by metal precursor vulcanization2FeSnS4Film, and analyze Cu2FeSnS4The life of film Long mechanism.
[2] Erika Dutková, Zdenka Bujnáková, Mechanochemical synthesis, structural, magnetic, optical and electrooptical properties of CuFeS2 nanoparticles. Advanced Powder Technology, 2018.
Main have studied prepares CuFeS by mechanical milling method2Nano-particle has studied CuFeS2The structure of nano-particle, magnetic Property, electrical and optical properties.
[3] Sugathan A, B Bhattacharyya, et al. Why Does CuFeS2 Resemble Gold. Journal of Physical Chemistary Letters, 2018.
Mainly have studied CuFeS2The physical property of quantum dot.It is combined, is had studied in class using structure and optical characterisation methods It is similar to the collision phenomenon observed in the spectrum of the quantum dot of 500 nm.
[4] Aliyev YI, TM Ilyasli, et al. The structural and vibrational properties of Ni-doped chalcopyrite CuFeS2. Journal of Ovonic Research, 2018.
It is main to have studied nickel doping chalcopyrite CuFeS2Structure and oscillatory property, and analyze doping nickel CuFe0.99Ni0.01S2 To CuFeS2The influence of crystal structure.
[5] Rouchdi M, E Salmani, et al. Spray pyrolysis synthesis of CuxFe1- xS2 and their structural, electronic and optical properties: Experimental and first-principles study. Materials Science and Engineering B-advanced Functional Solid-state Materials, 2018.
Mainly using chemical spray pyrolysis (CSP) technology synthesis pyrite, FeS2(FS) and chalcopyrite copper and iron sulfide CuxFe1- xS2(CFS) film mainly has studied the influence that Cu concentration grows film.
[6] Xiong X, X Hua, et al. Oxidation mechanism of chalcopyrite revealed by X-ray photoelectron spectroscopy and first principles studies. Applied Surface Science, 2018.
Mainly have studied chalcopyrite(CuFeS2)The oxidation mechanism and first-principles calculations on surface.
Invention content
The present invention has invented a kind of and entirely different copper of existing preparation method to solve the deficiency of existing technology of preparing The preparation process of iron sulphur film.
The present invention prepares copper and iron sulphur film using spin coating-chemistry co-reducing process, uses sheet glass or silicon chip for substrate, with CuCl2.2H2O、FeCl3.6H2O、Na2S2O3.5H2O is raw material, using water as solvent, sequentially adds CuCl2.2H2O、 FeCl3.6H2O、Na2S2O3.5H2O makes it fully react.Certain thickness copper and iron sulphur precursor thin-film is first prepared with spin-coating method, It using hydrazine hydrate as reducing agent, is heated at a lower temperature in closed container, so that precursor thin-film is restored concurrent GCMS computer anti- It answers, prepared film quality can be improved by heat treatment after increasing reaction times and reaction, obtain target product.
The specific preparation method of the present invention includes following steps in sequence:
A. the cleaning of substrate is carried out, sheet glass or silicon chip are switched to by this experimental selection sheet glass or silicon chip first as substrate Then 20mm × 20mm × 2mm sizes are cleaned 2 ~ 3 times as film substrate with deionized water, then pass through dilute sulfuric acid boil 30 ~ 40min, 40 ~ 50min of heating water bath, deionized water are cleaned by ultrasonic 20min, after these three important cleaning steps, with dioxygen water logging Bubble saves backup.
B. by CuCl2.2H2O、FeCl3.6H2O and Na2S2O3.5H2O is sequentially placed into solvent, keeps the substance in solution equal Even mixing.Specifically, by the CuCl of 0.1705g2.2H2The water that 1mL is added in O in vial makes it fully dissolve, then successively The FeCl of 0.2702g is added in vial3.6H2The Na of O and 0.2481g2S2O3.5H2O makes its full and uniform mixed dissolution, The CuCl of middle addition2.2H2O、FeCl3.6H2O、Na2S2O3.5H2The amount of O and aqueous solvent can be according to the proportional change of number of film Change.
C. the substrate of the external uniform solution as described in step b is made, and is dried, precursor thin-film sample is obtained.It can incite somebody to action Above-mentioned solution drips on the substrate being placed on sol evenning machine, restarts sol evenning machine with 200 ~ 3500 revs/min of rotation certain times, makes After solution coating in drop is uniform, and substrate is carried out after natural drying, repeat to drip again after upper previous solu and spin coating again from It so dries, so repeatedly 2 ~ 8 times, certain thickness precursor thin-film sample has then been obtained on substrate.
D. precursor thin-film sample obtained by step c is placed on holder, be put into hydrazine hydrate can closed container, make Precursor thin-film sample is not contacted with hydrazine.The hydrazine hydrate amount of being put into is 0.5mL.It will be above-mentioned close equipped with precursor thin-film sample It closes container to be put into baking oven, be heated between 160 ~ 220 DEG C, soaking time 2 ~ 40 hours is then cooled to room temperature taking-up.
E. it takes out after spontaneously drying, repeats b, c and Step d 2 ~ 6 times, with the thickness of film prepared by increase, reduce film Defect.
F. by step e gains, after so that its room temperature is spontaneously dried, increase heat treatment process, heated in tubular heater To 200 ~ 400 DEG C, heat preservation 5 ~ 15 hours is to get to copper and iron sulphur optoelectronic film.
The present invention does not need high vacuum condition, low to instrument and equipment requirement, and production cost is low, and production efficiency is high, is easy to grasp Make.Gained copper and iron sulphur optoelectronic film has preferable continuity and uniformity, main phase CuFeS2Inexpensive big rule may be implemented in phase The industrialized production of mould.
Description of the drawings
Fig. 1 is 140 ~ 220 DEG C of heat preservations, 10 hours XRD comparison diagrams for preparing sample.
Specific implementation mode
Embodiment 1
A. the cleaning of glass substrate or silicon chip:Cleaning substrate is carried out as previously described, and size is 20mm × 20mm × 2mm.
It b. can be first by the CuCl of 0.1705g2.2H2The water that 1mL is added in O in vial makes it fully dissolve, then successively The FeCl of 0.2702g is added in vial3.6H2The Na of O and 0.2481g2S2O3.5H2O makes its full and uniform mixed dissolution.
C. above-mentioned solution is dripped on the glass substrate being placed on sol evenning machine, restarts sol evenning machine, sol evenning machine is with 200 Rev/min rotation 5 seconds, with 3000 revs/min rotate 15 seconds, after keeping the solution coating in drop uniform, after being dried to substrate, again It repeats to dry again after dripping upper previous solu and spin coating, is so repeated 6 times, certain thickness presoma has then been obtained on substrate Film sample.
D. precursor thin-film sample obtained by step c is placed on holder, be put into hydrazine hydrate can closed container, make Precursor thin-film sample is not contacted with hydrazine.The hydrazine hydrate amount of being put into is 0.5mL.It will be above-mentioned close equipped with precursor thin-film sample It closes container to be put into baking oven, is heated to 180 DEG C, soaking time 10 hours is then cooled to room temperature taking-up.
E. it takes out after spontaneously drying, repeats b, c and Step d 4 times, with the thickness of film prepared by increase, reduce film and lack It falls into.
F. by step e gains, after so that its room temperature is spontaneously dried, increase heat treatment process, heated in tubular heater To 300 DEG C, heat preservation 10 hours is to get to copper and iron sulphur optoelectronic film.

Claims (5)

1. a kind of method preparing copper and iron sulphur optoelectronic film with chloride, including it is following steps in sequence:
A. the cleaning of glass substrate or silicon chip;
B. by the CuCl of 0.1705g2.2H2The water that 1mL is added in O in vial makes it fully dissolve, then successively in vial The FeCl of 0.2702g is added3.6H2The Na of O and 0.2481g2S2O3.5H2O makes its full and uniform mixed dissolution;
C. the substrate of solution described in the even spread step b of surface is made, naturally dry obtains precursor thin-film sample;
D. precursor thin-film sample obtained by step c is placed on holder, be put into hydrazine hydrate can closed container, make presoma Film sample is not contacted with hydrazine hydrate;The hydrazine hydrate amount of being put into is 0.5mL;It will be above-mentioned closed equipped with precursor thin-film sample Container is put into baking oven, is heated between 160 ~ 220 DEG C, and soaking time 2 ~ 40 hours is then cooled to room temperature taking-up;
E. it takes out after spontaneously drying, repeats the above steps 2 ~ 6 times, with the thickness of film prepared by increase;
F. by step e gains, after so that its room temperature is spontaneously dried, increase heat treatment process, 200 are heated in tubular heater ~ 400 DEG C, heat preservation 5 ~ 15 hours is to get to copper and iron sulphur optoelectronic film.
2. a kind of method preparing copper and iron sulphur optoelectronic film with chloride as described in claim 1, which is characterized in that step a Sheet glass or silicon chip are switched to 20mm × 20mm × 2mm sizes as film substrate, are then cleaned with deionized water by the cleaning It 2 ~ 3 times, then passes through dilute sulfuric acid and boils 30 ~ 40min, 40 ~ 50min of heating water bath, deionized water ultrasonic cleaning 20min, this three After a important cleaning step, saved backup with hydrogen peroxide dipping.
3. a kind of method preparing copper and iron sulphur optoelectronic film with chloride as described in claim 1, which is characterized in that step b The solvent is aqueous solution, and the CuCl being wherein added2.2H2O、FeCl3.6H2O、Na2S2O3.5H2The amount of O and aqueous solvent can root According to the proportional variation of number of film.
4. a kind of method preparing copper and iron sulphur optoelectronic film with chloride as described in claim 1, which is characterized in that step c The substrate uniformly smeared is by sol evenning machine spin coating, and sol evenning machine is rotated with 200 ~ 3500 revs/min, is then carried out to substrate After drying, so repeats 2 ~ 8 times again, obtained certain thickness precursor thin-film sample.
5. a kind of method preparing copper and iron sulphur optoelectronic film with chloride as described in claim 1, which is characterized in that step d 0.5mL hydrazine hydrates are put into the closed container.
CN201810704339.8A 2018-07-01 2018-07-01 A method of preparing copper and iron sulphur optoelectronic film with chloride Withdrawn CN108807561A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103396009A (en) * 2013-07-09 2013-11-20 山东建筑大学 Method for preparing copper-aluminum-tellurium film
WO2015004666A1 (en) * 2013-07-11 2015-01-15 Yissum Research Development Company Of The Hebrew University Of Jerusalem Ltd. Thermal doping by vacancy formation in nanocrystals
CN105489673A (en) * 2015-12-17 2016-04-13 山东建筑大学 Method for preparing copper-indium sulfide photoelectric thin film by chloride system through two-step method
CN105932081A (en) * 2016-06-15 2016-09-07 山东建筑大学 Method for preparing copper indium sulfide photoelectric thin film from copper chloride

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103396009A (en) * 2013-07-09 2013-11-20 山东建筑大学 Method for preparing copper-aluminum-tellurium film
WO2015004666A1 (en) * 2013-07-11 2015-01-15 Yissum Research Development Company Of The Hebrew University Of Jerusalem Ltd. Thermal doping by vacancy formation in nanocrystals
CN105489673A (en) * 2015-12-17 2016-04-13 山东建筑大学 Method for preparing copper-indium sulfide photoelectric thin film by chloride system through two-step method
CN105932081A (en) * 2016-06-15 2016-09-07 山东建筑大学 Method for preparing copper indium sulfide photoelectric thin film from copper chloride

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Application publication date: 20181113