CN108803724A - A kind of control system and method for micro-nano quartz crystal vacuum oven - Google Patents
A kind of control system and method for micro-nano quartz crystal vacuum oven Download PDFInfo
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- CN108803724A CN108803724A CN201810757249.5A CN201810757249A CN108803724A CN 108803724 A CN108803724 A CN 108803724A CN 201810757249 A CN201810757249 A CN 201810757249A CN 108803724 A CN108803724 A CN 108803724A
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- module
- vacuum
- vacuum oven
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
- G05D23/22—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element being a thermocouple
Abstract
The present invention proposes a kind of control system and method for micro-nano quartz crystal vacuum oven, including data obtaining module, control module, action module；Data obtaining module includes temperature detecting module, vacuum degree measurement module, cylinder location detection module；Control module includes microcontroller, receives the information sent from temperature detecting module, vacuum degree measurement module, cylinder location detection module, and send command adapted thereto to action module；Action module according to command adapted thereto to the heating of vacuum oven, cool down, inflated with nitrogen, vacuumize, the opening and closing of back chamber door acts, the auto-control degree of vacuum oven of the present invention is high, and operation is clear accurate, and completeness is high.
Description
Technical field
The invention belongs to mechanically operated technical field more particularly to a kind of controls of micro-nano quartz crystal vacuum oven
System and method.
Background technology
Under normal conditions, before micro-nano quartz crystal is packaged, it need to be toasted, remove moisture therein and
Impurity.Its temperature uniformity of general industry oven does not reach requirement, and cooling required time is longer, fails to meet production requirements, because
This, control system and the method design of vacuum oven seem and are highly desirable.
In the case, the vacuum oven control system and side that a kind of heating temperature is uniform, cooling efficiency is high are capable of providing
Method has its clear superiority.
Invention content
The purpose of the present invention is to provide a kind of control systems and method of micro-nano quartz crystal vacuum oven, in oven
Heating, constant temperature, temperature-fall period there is different instructions to be controlled respectively；And the vacuum degree in vacuum oven is also by different fingers
Order is controlled.
Technical solution is used by the present invention solves above-mentioned technical problem：A kind of micro-nano quartz crystal vacuum oven
Control system, which is characterized in that including data obtaining module, control module, action module；Described information acquisition module includes temperature
Spend detection module, vacuum degree measurement module, cylinder location detection module；The control module includes microcontroller, is received from temperature
The information that detection module, vacuum degree measurement module, cylinder location detection module are sent is spent, and is sent accordingly to the action module
Instruction；Action module according to command adapted thereto to the heating of vacuum oven, cool down, inflated with nitrogen, vacuumize, the opening and closing of back chamber door into
Action is made.
By said program, the temperature detecting module is upper, middle and lower thermocouple, the upper, middle and lower-ranking with vacuum oven
It is corresponding, be connected respectively with the temperature control module of the microcontroller, when every layer of temperature is too low and excessively high, controller can to its into
The corresponding control of row.
By said program, the vacuum degree measurement module includes that a low vacuum detection probe and a high vacuum detection are visited
Head, the condition of high vacuum degree in measurement in a closed series vacuum oven.
By said program, the cylinder location detection module is displacement sensor.
A kind of control method of micro-nano quartz crystal vacuum oven, which is characterized in that include the following steps：
S1) entry condition judges：Control module judges vacuum oven system running state by data obtaining module, works as nitrogen
When gas air pressure reaches setting value, vacuum shelves door is in sealing state, high and low vacuum valve is closed upon actuation, back
When chamber door is closed, meet entry condition；When above-mentioned condition is unsatisfactory for, control module pops up alarm signal and reminds operation
Personnel；
S2) nitrogen is replaced：Product starts automatic running button after being put into vacuum oven, and full auto-programs start, molecular pump
Valve is opened, molecule pump startup, and when molecular pump rotating speed reaches setting value, closing molecule pump valve opens low vacuum valve, take out low true
Sky, when low vacuum reaches setting value, closing low vacuum valve opens nitrogen filling-valve and is filled with a certain amount of nitrogen, after air pressure reaches
Close nitrogen filling-valve；
S3) heating waits for：It is first preheated, the automatic tuning PID of preheated one-section time Open control module, by automatic
Tuning PID carries out control heating, and temperature detecting module carries out data acquisition, PID according to displays temperature adjust automatically heating power,
Ensure that homogeneous heating is stablized；
S4) pumping high vacuum：After heating temperature reaches setting value, low vacuum valve is opened, and low vacuum is initially formed in cavity, when
Vacuum degree reaches molecule pump operation vacuum degree, opens high vacuum valve, forms high vacuum；
S5) vacuum oven cools down：Constant temperature for a period of time after, while logical nitrogen, the cooling water pipe into vacuum oven
Cooling water is inputted, vacuum oven inside is cooled down；
S6 material) is fetched and delivered：After cooling temperature reaches set temperature, signal is completed in output, and material conveying platform is taken to carry out fetching and delivering material,
After the completion of fetching and delivering material, signal is completed in output, and back chamber door is closed, and alarm latency lamp is lighted, and operator is reminded to fetch and deliver material action
It completes.
By said program, the step S3) in, first into vacuum oven, cooling water pipe is passed through one section before being preheated
The air of time, residual water when last cooling action is discharged.
By said program, the step S5) in, while logical nitrogen, the exhaust solenoid valve of vacuum oven is opened, and outer
Boundary carries out heat exchange.
The beneficial effects of the invention are as follows：The present invention provides control system and the side of a kind of micro-nano quartz crystal vacuum oven
Method, it is proposed that it is uneven, cold to solve the control of industrial baking oven temperature for a kind of higher control system of temperature control precision and method
But time longer problem.
Description of the drawings
Fig. 1 is the vacuum oven control system flow chart of one embodiment of the invention.
Fig. 2 is the vacuum oven control system schematic diagram of one embodiment of the invention.
Specific implementation mode
To more fully understand the present invention, the invention will be further described with reference to the accompanying drawings and examples.
As shown in Figure 1 and Figure 2, a kind of control system of micro-nano quartz crystal vacuum oven, including data obtaining module,
Control module, action module；Data obtaining module includes temperature detecting module, vacuum degree measurement module, cylinder location detection mould
Block；Control module includes microcontroller, is received from temperature detecting module, vacuum degree measurement module, cylinder location detection module hair
The information sent, and send command adapted thereto to action module；Action module according to command adapted thereto to the heating of vacuum oven, cool down,
Inflated with nitrogen, vacuumize, the opening and closing of back chamber door is acted.
Temperature detecting module be upper, middle and lower thermocouple, it is corresponding with the upper, middle and lower-ranking of vacuum oven, respectively with institute
The temperature control module for stating microcontroller is connected, and when every layer of temperature is too low and excessively high, controller can control it accordingly.
Vacuum degree measurement module includes a low vacuum detection probe and a high vacuum detection probe, measurement in a closed series vacuum
Condition of high vacuum degree in oven.
Cylinder location detection module is displacement sensor.
Specific control process is as follows：
1, control module judges vacuum oven system running state by data obtaining module, when nitrogen pressure reaches setting
When value, vacuum shelves door is in sealing state, high and low vacuum valve is closed upon actuation, back chamber door is in and closes shape
When state, meet entry condition；When above-mentioned condition is unsatisfactory for, control module pops up alarm signal and reminds operating personnel.
2, product starts automatic running button after being put into vacuum oven, and full auto-programs start, and molecule pump valve is opened, molecule
Pump startup, when molecular pump rotating speed reaches setting value, closing molecule pump valve opens low vacuum valve, carries out pumping low vacuum, work as low vacuum
Reach setting value, close low vacuum valve, open nitrogen filling-valve and be filled with a certain amount of nitrogen, nitrogen filling is closed after air pressure reaches
Valve.
3, first preheated, the automatic tuning PID of preheated one-section time Open control module, by tune automatically PID into
Row control heating, temperature detecting module carry out data acquisition, and PID ensures heating according to displays temperature adjust automatically heating power
It is uniform and stable.
4, after heating temperature reaches setting value, low vacuum valve is opened, and low vacuum is initially formed in cavity, when vacuum degree reaches
Molecule pump operation vacuum degree opens high vacuum valve, forms high vacuum.
5, constant temperature for a period of time after, while logical nitrogen, the cooling water pipe into vacuum oven inputs cooling water, to true
It is cooled down inside empty oven.
6, after cooling temperature reaches set temperature, signal is completed in output, and material conveying platform is taken to carry out fetching and delivering material, is expected when fetching and delivering
After the completion, signal is completed in output, and back chamber door is closed, and alarm latency lamp is lighted, and is reminded operator to fetch and deliver material action and is completed.
Before heating module starts action, the sky that a period of time is passed through in the cooling water pipe first into refrigerating module is needed
Gas, residual water when last cooling action is discharged, in order to avoid heating action is impacted.
In cooling stage, while logical nitrogen, exhaust solenoid valve is opened, and is carried out heat exchange with the external world, is increased cooling
Efficiency.
The above is only presently preferred embodiments of the present invention, is not imposed any restrictions to the present invention, every according to the present invention
Method essence still falls within the technology of the present invention side to any simple modification, change and equivalence change made by above example
In the protection domain of method.
Claims (7)
1. a kind of control system of micro-nano quartz crystal vacuum oven, which is characterized in that including data obtaining module, control mould
Block, action module；Described information acquisition module includes temperature detecting module, vacuum degree measurement module, cylinder location detection module；
The control module includes microcontroller, is received from temperature detecting module, vacuum degree measurement module, cylinder location detection module hair
The information sent, and send command adapted thereto to the action module；Action module is according to command adapted thereto to the heating of vacuum oven, cold
But, inflated with nitrogen, vacuumize, the opening and closing of back chamber door is acted.
2. a kind of control system of micro-nano quartz crystal vacuum oven according to claim 1, which is characterized in that described
Temperature detecting module be upper, middle and lower thermocouple, it is corresponding with the upper, middle and lower-ranking of vacuum oven, respectively with the microcontroller
The temperature control module of device is connected, and when every layer of temperature is too low and excessively high, controller can control it accordingly.
3. a kind of control system of micro-nano quartz crystal vacuum oven according to claim 1, which is characterized in that described
Vacuum degree measurement module includes a low vacuum detection probe and a high vacuum detection probe, in measurement in a closed series vacuum oven
Condition of high vacuum degree.
4. a kind of control system of micro-nano quartz crystal vacuum oven according to claim 1, which is characterized in that described
Cylinder location detection module is displacement sensor.
5. a kind of control method of micro-nano quartz crystal vacuum oven, which is characterized in that include the following steps：
S1) entry condition judges：Control module judges vacuum oven system running state by data obtaining module, when nitrogen gas
When pressure reaches setting value, vacuum shelves door is in sealing state, high and low vacuum valve is closed upon actuation, back chamber door
When being closed, meet entry condition；When above-mentioned condition is unsatisfactory for, control module pops up alarm signal and reminds operator
Member；
S2) nitrogen is replaced：Product starts automatic running button after being put into vacuum oven, and full auto-programs start, and molecule pump valve is beaten
It opens, molecule pump startup, when molecular pump rotating speed reaches setting value, closing molecule pump valve opens low vacuum valve, carries out pumping low vacuum,
When low vacuum reaches setting value, closing low vacuum valve opens nitrogen filling-valve and is filled with a certain amount of nitrogen, closed after air pressure reaches
Nitrogen filling-valve；
S3) heating waits for：It is first preheated, the automatic tuning PID of preheated one-section time Open control module, by tuning automatically
PID carries out control heating, and temperature detecting module carries out data acquisition, and PID ensures according to displays temperature adjust automatically heating power
Homogeneous heating is stablized；
S4) pumping high vacuum：After heating temperature reaches setting value, low vacuum valve is opened, and is initially formed low vacuum in cavity, is worked as vacuum
Degree reaches molecule pump operation vacuum degree, opens high vacuum valve, forms high vacuum；
S5) vacuum oven cools down：Constant temperature for a period of time after, while logical nitrogen, the cooling water pipe input into vacuum oven
Cooling water cools down vacuum oven inside；
S6 material) is fetched and delivered：After cooling temperature reaches set temperature, signal is completed in output, and material conveying platform is taken to carry out fetching and delivering material, when taking
After the completion of feeding, signal is completed in output, and back chamber door is closed, and alarm latency lamp is lighted, and is reminded operator to fetch and deliver material action and is completed.
6. a kind of control method of micro-nano quartz crystal vacuum oven according to claim 5, which is characterized in that described
Step S3) in, first into vacuum oven, cooling water pipe is passed through the air of a period of time before being preheated, and discharge is last cold
Residual water when but acting.
7. a kind of control method of micro-nano quartz crystal vacuum oven according to claim 5, which is characterized in that described
Step S5) in, while logical nitrogen, the exhaust solenoid valve of vacuum oven is opened, and heat exchange is carried out with the external world.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810757249.5A CN108803724A (en) | 2018-07-11 | 2018-07-11 | A kind of control system and method for micro-nano quartz crystal vacuum oven |
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| CN201810757249.5A CN108803724A (en) | 2018-07-11 | 2018-07-11 | A kind of control system and method for micro-nano quartz crystal vacuum oven |
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| CN204063805U (en) * | 2014-08-13 | 2014-12-31 | 深圳市腾达工业自动设备有限公司 | A kind of four vacuum ovens |
| CN204404710U (en) * | 2014-12-25 | 2015-06-17 | 宁德新能源科技有限公司 | A kind of electrokinetic cell vacuum dryer |
| CN204535280U (en) * | 2015-02-09 | 2015-08-05 | 深圳市瑞昇新能源科技有限公司 | Online rapid vacuum drying case |
| CN207231096U (en) * | 2017-07-27 | 2018-04-13 | 江苏众华生物科技有限公司 | A kind of electric drying oven with forced convection |
| CN108168220A (en) * | 2018-02-06 | 2018-06-15 | 河南鼎能电子科技有限公司 | Fully automatic mobile drying line |
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2018
- 2018-07-11 CN CN201810757249.5A patent/CN108803724A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102206809A (en) * | 2010-03-30 | 2011-10-05 | 杭州海鲸光电科技有限公司 | High temperature vacuum baking furnace and operation method thereof |
| CN202304265U (en) * | 2011-09-30 | 2012-07-04 | 深圳市腾达工业自动设备有限公司 | Automatic vacuum furnace |
| CN202719846U (en) * | 2012-06-28 | 2013-02-06 | 杭州大和热磁电子有限公司 | Silicon chip drying oven capable of preventing metal ion contamination |
| CN203112961U (en) * | 2013-01-29 | 2013-08-07 | 杭州士兰明芯科技有限公司 | Reaction furnace of etching baking device |
| CN203128652U (en) * | 2013-01-29 | 2013-08-14 | 杭州士兰明芯科技有限公司 | Etching and baking device |
| CN203704561U (en) * | 2013-11-22 | 2014-07-09 | 深圳市腾达工业自动设备有限公司 | Vacuum oven with three doors |
| CN204063805U (en) * | 2014-08-13 | 2014-12-31 | 深圳市腾达工业自动设备有限公司 | A kind of four vacuum ovens |
| CN204404710U (en) * | 2014-12-25 | 2015-06-17 | 宁德新能源科技有限公司 | A kind of electrokinetic cell vacuum dryer |
| CN204535280U (en) * | 2015-02-09 | 2015-08-05 | 深圳市瑞昇新能源科技有限公司 | Online rapid vacuum drying case |
| CN207231096U (en) * | 2017-07-27 | 2018-04-13 | 江苏众华生物科技有限公司 | A kind of electric drying oven with forced convection |
| CN108168220A (en) * | 2018-02-06 | 2018-06-15 | 河南鼎能电子科技有限公司 | Fully automatic mobile drying line |
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Application publication date: 20181113 |