CN108802283A - A kind of test method of glass baseplate surface defect direction and height - Google Patents
A kind of test method of glass baseplate surface defect direction and height Download PDFInfo
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- CN108802283A CN108802283A CN201810578783.XA CN201810578783A CN108802283A CN 108802283 A CN108802283 A CN 108802283A CN 201810578783 A CN201810578783 A CN 201810578783A CN 108802283 A CN108802283 A CN 108802283A
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- 230000007547 defect Effects 0.000 title claims abstract description 107
- 239000011521 glass Substances 0.000 title claims abstract description 96
- 238000010998 test method Methods 0.000 title claims abstract description 30
- 239000000523 sample Substances 0.000 claims abstract description 64
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 238000000034 method Methods 0.000 claims abstract description 20
- 238000005259 measurement Methods 0.000 claims abstract description 17
- 230000002950 deficient Effects 0.000 claims abstract description 9
- 238000012360 testing method Methods 0.000 claims description 25
- 238000006073 displacement reaction Methods 0.000 claims description 12
- HTCXJNNIWILFQQ-UHFFFAOYSA-M emmi Chemical compound ClC1=C(Cl)C2(Cl)C3C(=O)N([Hg]CC)C(=O)C3C1(Cl)C2(Cl)Cl HTCXJNNIWILFQQ-UHFFFAOYSA-M 0.000 claims description 4
- 238000005530 etching Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000004554 molding of glass Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
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Abstract
The present invention relates to a kind of test methods of glass substrate, include the following steps：Sample is made, the glass substrate with glass defect is cut into≤200 × 200mm, preferably≤150 × 150mm, more preferably≤100 × 100mm remove the spot of glass substrate and blemish surface；Defective locations are positioned；Measurement parameter is set, and is measured stroke and is set as 3000 μm hereinafter, probe scanning speed is set as 50 μm/S hereinafter, probe pressure is set as 10mg or less；And measuring process, direction and the height of glass baseplate surface defect are tested using step instrument.
Description
Technical field
The present invention relates to the detection fields of glass substrate, and in particular to a kind of glass baseplate surface defect direction and height
Test method.
Background technology
With the fast development of display technology, requirement of the user to electronic product clarity is higher and higher, and glass substrate
As the key foundation material of electronic display unit, its surface quality requirements are increasingly stringenter, small surface defect meeting
The optical quality for influencing glass substrate causes the image of observation to generate distortion.
In the molding of glass substrate and process, inevitably there is various types defect, part solid-state in surface
Or larger-size defect can be measured by light microscope or automatic checkout equipment, but for fine defects or appearance transparent
Similar with the glass defect of degree, such as small spot defect, fine scuffing fall transparent sags and crests, plated film in object, etch process
Bright spot or dim spot in technique etc., optical instrument or automatic checkout equipment are difficult accurate resolution and measure, therefore can not possibly be by lacking
Fall into position and height it is carried out deeper into research.
The method overwhelming majority for measuring glass-board surface defect direction and height at present be all optical detection (patent document 1,2,
3), for example, favorably being observed with light microscope, defect height (patent document 7) is calculated by focal length；Or by etching away
Defect come calculate defect height (patent document 8)；Either using video camera shooting defect image calculate height (patent document 4,
5,6).Optical microphotograph sem observation is easy to generate erroneous judgement because of optical skew in these methods, and measuring and calculating error is big；Use acid solution etching pair
Human body and environmental hazard are big；The defect on thicker glass, and above method can only be tested using video camera shooting defect image
Measurement accuracy is millimeter or micron order.It would therefore be desirable to have a kind of simple and quick and high certainty of measurement detection methods to detect glass
The direction of substrate surface defects and height.
(small spot defect fine scratch, falls transparent sags and crests in object, etch process, plating the defect of glass surface
Bright spot or dim spot in membrane process etc.) it is characterized in that：The above major part defect is because of too subtle or optical distortion, optical instrument
Can not accurately it be tested and judge with conventional method.
Step instrument belongs to contact surface topography measuring instrument.According to the difference for using sensor, contact step height measurement
3 kinds of inductance type, piezoelectric type and photo-electric can be divided into.Its measuring principle is：When contact pilotage is gently slipped over along measured surface, due to
Surface has small peak valley to make contact pilotage while sliding, and also moves up and down along peak valley.The motion conditions of contact pilotage just reflect
The case where surface profile.Sensor output electric signal after measuring bridge, output with contact pilotage deviate equilbrium position displacement at
The amplitude-modulated signal of direct ratio.Through amplifying with after phase depending on rectification, displacement signal can be demodulated to come from amplitude-modulated signal, be exaggerated
The slowly varying signal directly proportional to contact pilotage displacement.Again modulating frequency is further filtered off through noise filter, waviness filter
With the influence of the factors to roughness concentration such as external interference signal and waviness.
Step instrument traditional test methods mainly test thicknesses of layers, roughness, percent ripple etc., in terms of being not directed to glass defect
Detection.So far, this field is not yet using the research of step instrument test glass defect.
Existing technical literature
Patent document 1：CN106680289A disclosures
Patent document 2：CN204647937U announces text
Patent document 3：CN101652625B announces text
Patent document 4：CN103064206A disclosures
Patent document 5：CN207163931U announces text
Patent document 6：CN107966458A disclosures
Patent document 7：CN107024488A disclosures
Patent document 8：CN107063112A disclosures
Invention content
The technical problem to be solved in the present invention is to provide a kind of glass baseplate surface defect direction and the test method of height,
The method can rapidly and accurately measure the small spot defect of glass baseplate surface, fine scuffing, fall object, glass etching process
In transparent sags and crests and direction the defects of bright spot or dim spot in coating process and height, and measuring accuracy up to angstrom
Meter level.
The present inventor by research find using step instrument specific parameter and under the conditions of test glass defect, can
Solve above-mentioned technical problem.
In particular it relates to the following contents.
1, a kind of test method of glass substrate, includes the following steps：
Sample is made, the glass substrate with glass defect is cut into≤200 × 200mm, preferably≤150 ×
150mm, more preferably≤100 × 100mm remove the spot of glass substrate and blemish surface；
Defective locations are positioned；
Measurement parameter is set, and is measured stroke and is set as 3000 μm hereinafter, probe scanning speed is set as 50 μm/S hereinafter, probe pressure
Power is set as 10mg or less；With
Measuring process tests direction and the height of glass baseplate surface defect using step instrument.
2, the test method according to item 1, wherein according to the probe of step instrument glass defect surface move up and down come
Indicate the direction of defect.
3, the test method according to item 2, wherein the upper and lower displacement of probe is directly proportional to the height of defect.
4, the test method according to any one of item 1~3, wherein the face on the basis of glass baseplate surface.
5, the test method according to item 4, wherein reference plane is high for defect at a distance from probe upper and lower displacement maximum point
It is low.
6, the test method according to any one of item 1~5, wherein it is 200-2000 μm to measure stroke, preferably
300-1500 μm, more preferably 500-1000 μm.
7, the test method according to any one of item 2~6, wherein the sweep speed of probe is 10-50 μm/S, excellent
It is selected as 20-40 μm/S, more preferably 25-35 μm/S.
8, the test method according to any one of item 2~7, wherein the pressure of probe is 2-8mg, preferably 3-
7mg, more preferably 4-6mg.
9, the test method according to any one of item 1~8, wherein defect height measurement accuracy reaches Ethylmercurichlorendimide grade.
10, the test method according to any one of item 1~9, wherein defect sample need not be ground or etching, only needs
It cleans up and can measure.
The test method of glass baseplate surface defect provided by the present invention direction and height can be measured rapidly and accurately
The small spot defect of glass baseplate surface fine scratch, falls transparent sags and crests and plated film work during object, glass etching
The direction of the defects of bright spot or dim spot in skill and height, and measuring accuracy is up to Ethylmercurichlorendimide grade.By accurately testing glass
On the one hand the direction of substrate surface defects and height can determine the source of defect, take some countermeasures as early as possible, improve production yield；Separately
On the one hand can accurate evaluation defect to the influence degree of product, avoid customer complaint and loss caused by defective products erroneous judgement.
In addition, using the method for the present invention, defect sample to be measured is without grinding, etching or special processing, it is only necessary to
Subsequent detection can be carried out by being cleaned to it.
Description of the drawings
The test that Fig. 1 illustrates the test philosophy for testing glass baseplate surface defect direction and height in the present invention is former
Reason figure.
Fig. 2 illustrates the schematic diagram for calculating glass baseplate surface defect height in the present invention.
Fig. 3 illustrate based on the present invention test philosophy example spot defect is measured obtained from defect direction and
The exemplary plot of depth curve.
Fig. 4 illustrate the embodiment of the present invention 1 the tin ash defect to glass be measured obtained from defect direction and
The oscillogram of depth curve.
Fig. 5 illustrate the embodiment of the present invention 2 the transparent point defect of the etching to glass be measured obtained from defect
The oscillogram of direction and depth curve.
What Fig. 6 illustrated the embodiment of the present invention 3 falls defect direction obtained from object defect is measured to glass
And the oscillogram of depth curve.
Fig. 7 illustrate the embodiment of the present invention 4 the plated film fleck defect to glass be measured obtained from defect side
To and depth curve oscillogram.
Specific implementation mode
Specific embodiments of the present invention are more fully described below with reference to accompanying drawings.Although showing the present invention's in attached drawing
Specific embodiment, it being understood, however, that may be realized in various forms the present invention without should be limited by embodiments set forth here
System.It is to be able to be best understood from the present invention on the contrary, providing these embodiments, and can be complete by the scope of the present invention
Be communicated to those skilled in the art.The numberical range enumerated in the present invention includes two endpoints of the numberical range
Data, also include each specific numerical value in the numberical range, and the numerical value can be combined into arbitrary group of endpoint it is new
Small range.
To achieve the goals above, the present invention provides a kind of test method of glass substrate, includes the following steps：
Sample is made, the glass substrate with glass defect is cut into≤200 × 200mm, preferably≤150 ×
150mm, more preferably≤100 × 100mm remove the spot of glass substrate and blemish surface；
Defective locations are positioned；
Measurement parameter is set, and is measured stroke and is set as 3000 μm hereinafter, probe scanning speed is set as 50 μm/S hereinafter, probe pressure
Power is set as 10mg or less；With
Measuring process tests direction and the height of glass baseplate surface defect using step instrument.
Wherein, it is specified that probe pressure in 10mg hereinafter, when main protection test probe be not damaged, it is specified that measures stroke with
Probe scanning speed can detect that reference plane is horizontal and have the step image of height difference in a relatively short period of time, accurate to test
Go out data.
The test method of glass substrate according to the present invention can rapidly and accurately measure the defect of glass baseplate surface,
For example, small spot defect, fine scratching, falling in transparent sags and crests and coating process during object, glass etching
The direction of the defects of bright spot or dim spot and height.
In step instrument traditional test methods, need to handle sample to be tested to manufacture difference in height, such as other samples
It is generally required when test and carries out the step that the processes such as chemical etching or grinding produce difference in height, just can measure the height of sample
It is low.By chemical etching or milled processed sample, treated sample surface flatness, uniformity, also step intersection
Section regularity require it is all very high, it is slightly insufficient, will result in that reference plane is unsmooth or step unobvious.And glass defect has
Particularity：Glass surface is very smooth, and roughness is generally less than 0.01 μm, and on the glass surface, glass surface and defect are certainly for defect
It so is formed difference in height, no longer needs to deliberately manufacture step otherwise.This point is that the present invention is routinely surveyed with step instrument
One of difference of method for testing.
In a specific embodiment, moved up and down on glass defect surface to indicate scarce according to the probe of step instrument
Sunken direction.
In a specific embodiment, the upper and lower displacement of probe is directly proportional to the height of defect.
In a specific embodiment, the face on the basis of glass baseplate surface.
In a specific embodiment, reference plane is defect height at a distance from probe upper and lower displacement maximum point.
In a specific embodiment, measure stroke be 200-2000 μm, preferably 300-1500 μm, more preferably
500-1000μm.Thus, it is possible to the defects that precision higher measures glass baseplate surface.
In a specific embodiment, the sweep speed of probe is 10-50 μm/S, preferably 20-40 μm/S, more excellent
It is selected as 25-35 μm/S.Thus, it is possible to the defects that precision higher measures glass baseplate surface.
In a specific embodiment, the pressure of probe is 2-8mg, preferably 3-7mg, more preferably 4-6mg.By
This can precision higher measure the defect of glass baseplate surface.
In a specific embodiment, defect height measurement accuracy reaches Ethylmercurichlorendimide grade.
In a specific embodiment, defect sample need not be ground or etching, need to only clean up and can measure.Tool
For body, sample preparation step, which only includes, to cut and cleans, you can carries out next step test, therefore this method is easy quickly.
The present invention tests direction and the height of glass baseplate surface defect according to step instrument measuring principle.Referring to Fig.1, Fig. 1
It is the test schematic for illustrating the test philosophy in the present invention for testing glass baseplate surface defect direction and height.Work as spy
When the blemish surface of needle on the glass substrate slips over, blemish surface has small peak bottom to make probe while sliding, also edge
Peak bottom moves up and down, and the motion conditions of probe just reflect the defect direction on glass substrate, the height and defect of peak bottom
Height it is directly proportional.Fig. 2 illustrates the schematic diagram for calculating glass baseplate surface defect height in the present invention, with glass substrate
As reference plane, the difference on the vertex of reference plane and peak valley is the height of defect in face.It is former that Fig. 3 illustrates the test based on the present invention
The exemplary plot of defect direction and depth curve obtained from reason is measured example spot defect.
The method for measuring glass baseplate surface defect direction and height includes the following steps：
Make sample → defect location → measurement parameter setting → measurement
1, the glass substrate with glass defect is cut into≤100 × 100mm, is put into supersonic wave cleaning machine and cleans example
Such as 5 minutes, the spot of glass substrate and blemish surface is removed.
2, defective locations are identified with marking pen after Drying and cooling, petrographic microscope can be used or are borrowed in darkroom
The means such as bright light torch are helped to position defective locations.
3, direction and the height of glass baseplate surface defect are tested using step instrument.
4, instrument test parameter is set：
(1) it is 3000 μm hereinafter, preferably 200-2000 μm, more preferably 300-1500 μm to measure stroke, most preferably
500-1000μm；
(2) probe scanning speed is 50 μm/S hereinafter, preferably 10-50 μm/S, more preferably 20-40 μm/S, most preferably
For 25-35 μm/S；
(3) probe pressure is 10mg hereinafter, preferably 2-8mg, more preferably 3-7mg, most preferably 4-6mg.
5, when the blemish surface of probe on the glass substrate slips over, the up and down motion situation of probe just reflects glass substrate
The direction of upper defect.
6, the concave and convex direction of defect on glass substrate can be accurately determined according to step instrument probe displacement curve.
7, the displacement of probe reflects the height situation of defect on glass substrate, by being formed after electric signal conversion, amplification
Peak bottom height it is directly proportional to the height of defect.
8, the difference in height of the face on the basis of glass substrate face, reference plane and probe displacement maximum point is the height of defect.
The present invention is described in detail by the following examples.In the examples below, unless otherwise instructed, used
Each material can be commercially available, and unless otherwise instructed, method used is the conventional method of this field.
Embodiment：
1, required equipment and tool
| NO. | Title | Unit | Quantity |
| 1 | Step instrument (Dektak XT) | Platform | 1 |
| 2 | Glass cutter | It is a | 1 |
| 3 | Ruler | ? | 1 |
| 4 | Non-dust cloth | ? | 5 |
| 5 | Absolute ethyl alcohol | Bottle | 1 |
| 6 | Supersonic wave cleaning machine | Platform | 1 |
| 7 | Marking pen | Branch | 1 |
2, sample is made
2.1 will be cut into 100 × 100mm or less using glass cutter with defective glass substrate.
2.2 will be put into defective sample in the supersonic wave cleaning machine added with ultra-pure water, clean 5 minutes.
2.3 cool down the 105 DEG C of drying in an oven of the defect sample after cleaning, rear take out.
2.4 position defect using marking pen, by defect frame inlet identity area, convenient for being searched under step instrument.
3, measurement parameter is set
3.1 measurement strokes are 1000 μm；
3.2 probe scanning speed are 30 μm/S；
3.3, probe pressure 5mg.
4, it tests
4.1 directions measure
4.1.1 sample disc position verification is first carried out, standard sample tester is reused.
4.1.2 defect sample levels are put into step instrument sample room, mark zone is close to the upright position of probe.
4.1.3 drawing direction cursor first finds tag slot in software real-time video region, is then found in tag slot
Defect to be measured.
4.1.4 probe is dropped on glass substrate face, underface of the traveling probe to defect position to be measured.
Probe will be moved since quasi- basal plane on glass substrate when 4.1.5 testing.
4.1.6 when probe is from the height that after blemish surface is walked, probe moves on glass substrate face and blemish surface
Variation can be shown in data acquisition interface.
4.1.7 leveling is carried out using glass substrate face as horizontal base line.
4.1.8 there is upward peak, then glass defect direction is convex (being higher than glass substrate), downward paddy then glass occurs
Glass defect direction is recessed (being less than glass substrate).
4.2 elevation measurement
4.2.1 in data analysis module, oscillogram is analyzed.
4.2.1 dragging R and M carries out leveling to reference plane wave band or measurement zone wave band, until waveform is whole in a level
On line.
4.2.2 dragging R drags M to measurement zone (defect vertex) wave band, the width of R to reference plane (glass surface) wave band
The horizontal component of wave band should be covered as possible.
4.2.3 selection " Add Ash " obtains flaw height/depth, i.e.,：Defect vertex subtracts the height of glass surface.
According to above-mentioned steps, (implement to being respectively provided with tin ash (embodiment 1), etching brocken spectrum (embodiment 2), falling object
Example 3) and the glass of defect of plated film bright spot (embodiment 4) tested, test result is as follows shown in table 1.
Table 1
Although embodiment of the present invention is described above in association with attached drawing, the invention is not limited in above-mentioned
Specific embodiments and applications field, above-mentioned specific embodiment are only schematical, directiveness, rather than restricted
's.Those skilled in the art are under the enlightenment of this specification and in the range for not departing from the claims in the present invention and being protected
In the case of, a variety of forms can also be made, these belong to the row of protection of the invention.
Claims (10)
1. a kind of test method of glass substrate, includes the following steps：
Sample is made, the glass substrate with glass defect is cut into≤200 × 200mm, preferably≤150 × 150mm, more
Preferably≤100 × 100mm removes the spot of glass substrate and blemish surface；
Defective locations are positioned；
Measurement parameter is set, and is measured stroke and is set as 3000 μm hereinafter, probe scanning speed is set as 50 μm/S hereinafter, probe pressure is set
For 10mg or less；With
Measuring process tests direction and the height of glass baseplate surface defect using step instrument.
2. test method according to claim 1, wherein moved up and down on glass defect surface according to the probe of step instrument
To indicate the direction of defect.
3. test method according to claim 2, wherein the upper and lower displacement of the probe is directly proportional to the height of defect.
4. test method described in any one of claim 1 to 3, wherein the face on the basis of the glass baseplate surface.
5. test method according to claim 4, wherein the reference plane and the probe upper and lower displacement maximum point away from
From for defect height.
6. test method according to any one of claims 1 to 5, wherein it is 200-2000 μm to measure stroke, preferably
300-1500 μm, more preferably 500-1000 μm.
7. the test method according to any one of claim 2~6, wherein the sweep speed of the probe is 10-50 μ
M/S, preferably 20-40 μm/S, more preferably 25-35 μm/S.
8. the test method according to any one of claim 2~7, wherein the pressure 2-8mg of the probe, preferably
3-7mg, more preferably 4-6mg.
9. according to test method according to any one of claims 1 to 8, wherein defect height measurement accuracy reaches Ethylmercurichlorendimide grade.
10. according to test method according to any one of claims 1 to 8, wherein
The step of making sample comprises the steps of：
Glass substrate with glass defect is cut into≤200 × 200mm, preferably≤150 × 150mm, more preferably≤
100 × 100mm, and
Glass substrate is cleaned.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110095590A (en) * | 2019-04-23 | 2019-08-06 | 深圳市华星光电半导体显示技术有限公司 | Glass substrate residual material method for detecting and device |
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