CN108788343A - A kind of method and apparatus making electrode using mask constraint liquid metal - Google Patents
A kind of method and apparatus making electrode using mask constraint liquid metal Download PDFInfo
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- CN108788343A CN108788343A CN201811002427.XA CN201811002427A CN108788343A CN 108788343 A CN108788343 A CN 108788343A CN 201811002427 A CN201811002427 A CN 201811002427A CN 108788343 A CN108788343 A CN 108788343A
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- metal
- collapsible form
- workpiece
- liquid
- liquid metal
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
- B23H1/04—Electrodes specially adapted therefor or their manufacture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
- B22D19/00—Casting in, on, or around objects which form part of the product
Abstract
The invention discloses a kind of method and apparatus making electrode using mask constraint liquid metal, wherein method includes：Collapsible form with void region and the complementation of required electrode structure, is tightly attached to the surface of workpiece by S1, and void region is adjacent with workpiece surface；S2 injects liquid metal to the void region of collapsible form；S3, the extra liquid metal in removal collapsible form upper surface；S4, after the cooling predetermined time, liquid metal in void region and the surface solidification of workpiece and is combined to form microelectrode with workpiece surface；S5 detaches collapsible form with workpiece.By the way that the electrode shape needed setting is formed vacancy section in collapsible form, then collapsible form is close to workpiece after fixing, liquid metal is injected in vacancy section, after the liquid metal of collapsible form excess surface is removed, it is combined to form microelectrode with workpiece after being present in the liquid metal solidification of vacancy section, technical process is simple, and cost is relatively low, the pretreated time is eliminated, the production cycle is reduced.
Description
Technical field
The present invention relates to EDM Technology fields, and electrode is made using mask constraint liquid metal more particularly to a kind of
Method and apparatus.
Background technology
The tool-electrode used in electric machining depends on traditional mechanical processing and is made, for size is smaller or shape
The more complicated tool-electrode of shape, the method mainly used at present have the methods of micro electroforming, micro EDM.Wherein,
Micro electroforming mainly use photoetching technique, on the surface of the workpiece make one layer of mask, using electrolytic effect mask hollow out
Region growing goes out a series of microelectrodes, to form array electrode.Micro EDM is divided into electric spark backcopy process and fine
Wire EDM method, fine electric spark backcopy process are using single electrode to produce array structure and then with the array junctions
Structure goes out Array microelectrode as Anode machining.Fine cutting method is then according to the shape of required electrode Material removal step by step.
Array electrode is manufactured using electric spark inverse beating processing method, technical costs is quite high, and the period is spent in manufacturing process
Long and complex process.Although Wire EDM can form electrode with time processing, labyrinth can not be processed
Electrode.And Array microelectrode is processed using general electrocasting, it needs to make one layer of mask in each workpiece surface, flower
Time-consuming longer, and after electroforming is complete, mask is difficult to remove clean, generates powerful stress when removing mask and is also easily destroyed
The micro-structure of electrotyping process.
Invention content
The object of the present invention is to provide a kind of method and apparatus making electrode using mask constraint liquid metal, are made
The simple for process of electrode, cost are relatively low, the manufacturing cycle is short, can produce complicated electrode structure.
In order to solve the above technical problems, making electrode using mask constraint liquid metal an embodiment of the present invention provides a kind of
Method, including：
Collapsible form with void region and the complementation of required electrode structure is tightly attached to the surface of workpiece by S1, described to engrave
Empty region is adjacent with the workpiece surface；
S2 injects liquid metal to the void region of the collapsible form；
S3 removes the extra liquid metal in the collapsible form upper surface；
S4, after the cooling predetermined time, the liquid metal void region and the workpiece surface solidification and with it is described
Workpiece surface combines and forms microelectrode；
S5 detaches the collapsible form with the workpiece.
Wherein, the S3 further includes：
The temperature of the metal liquid of the void region of the collapsible form is detected in real time.
Wherein, the S4 further includes：
The bottom of the workpiece is cooled down.
Wherein, the collapsible form is rubber collapsible form or organic glass collapsible form.
In addition to this, the embodiment of the present invention additionally provides a kind of device making electrode using mask constraint liquid metal,
Including：
Workbench, the workbench is for placing workpiece；
Collapsible form, the collapsible form is provided with the void region with the complementation of required electrode structure, for being placed on
It states workpiece surface and is close to combine with the workpiece by the void region；
Fixture, the fixture are arranged in the workbench, for the collapsible form and the workpiece to be close to combine
After fix；
Metal liquid output section, the metal liquid output section is arranged in the top of the collapsible form, for that will export
Metal liquid inject the collapsible form vacancy section and the workpiece combination cooled and solidified after form microelectrode；
Metal liquid cleaning section, the metal liquid cleaning section, which is arranged, to be used in the top of the collapsible form by the work
The extra metal liquid in moving platen upper surface is removed.
Wherein, further include the guide rail being arranged in the workbench, the guide rail is located at the top of the workpiece, the gold
Belong to liquid output portion, the metal liquid cleaning section is arranged in the guide rail.
Wherein, further include the sliding block being arranged in the guide rail, the metal liquid output section, the metal liquid cleaning section
It is connect with the guide rail by the sliding block.
Wherein, the collapsible form is rubber collapsible form or organic glass collapsible form.
Wherein, further include the refrigerator being arranged in the workbench, cooled down for the bottom to the workpiece.
Wherein, further include that the pressure for being used to detect pressure between the fixture and the collapsible form in the fixture is set
Sensor.
The method and apparatus for making electrode using mask constraint liquid metal that the embodiment of the present invention is provided, with existing skill
Art is compared, and is had the following advantages：
The method and apparatus that the mask constraint liquid metal makes electrode, by being arranged the electrode shape needed in work
Moving platen forms vacancy section, and then collapsible form is close to workpiece after fixing, and liquid metal is injected in vacancy section so that liquid
Metal can only be combined in the position for having vacancy section with workpiece surface, and the liquid metal of collapsible form excess surface is being removed and passed through
After cooling down after a period of time, being present in the liquid metal of vacancy section will solidify and is combined to form microelectrode or microelectrode battle array with workpiece
Row.Simple with device making electrode process process in this way, cost is relatively low, simultaneously because great using collapsible form
The time for eliminating the pretreated time, and liquid metal being waited for cool down the required time also much smaller than electroforming manufacture micro-structure,
Greatly reduce the production cycle.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is the present invention
Some embodiments for those of ordinary skill in the art without creative efforts, can also basis
These attached drawings obtain other attached drawings.
Fig. 1 is a kind of specific reality of the method provided in an embodiment of the present invention that liquid metal making electrode is constrained using mask
Apply the step flow diagram of mode；
Fig. 2 is a kind of specific reality of the method provided in an embodiment of the present invention that liquid metal making electrode is constrained using mask
Apply the structural schematic diagram of mode.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
It is the method provided in an embodiment of the present invention for constraining liquid metal making electrode using mask to please refer to Fig.1-2, Fig. 1
A kind of specific implementation mode step flow diagram；Fig. 2 is provided in an embodiment of the present invention golden using mask constraint liquid
Belong to a kind of structural schematic diagram of the specific implementation mode for the method for making electrode.
In a specific embodiment, the method for making electrode using mask constraint liquid metal, including：
Collapsible form with void region and the complementation of required electrode structure is tightly attached to the surface of workpiece by S1, described to engrave
Empty region is adjacent with the workpiece surface；
S2 injects liquid metal to the void region of the collapsible form；
S3 removes the extra liquid metal in the collapsible form upper surface；
S4, after the cooling predetermined time, the liquid metal void region and the workpiece surface solidification and with it is described
Workpiece surface combines and forms microelectrode；
S5 detaches the collapsible form with the workpiece.
The present invention does not limit void region in the set-up mode and concrete shape of collapsible form, size, can be with
It is cylindrical type, the microelectrode in the electrode or electrod-array produced in this way is exactly cylindrical type, can also be coniform, from workpiece
Its diameter of surface to the upper surface of collapsible form tapers into, the shape of certain microelectrode other than cross section is round,
It can also be the shape that other users such as triangle, rectangle need.
The present invention of mode and rate in to(for) the vacancy section injection liquid metal to collapsible form are not specifically limited, can
To be the surface that liquid metal is directly output to collapsible form, then flows freely, finally wait for the metal on collapsible form surface
When liquid hardly happens flowing, illustrate that void region is full of by metal liquid, then removes the liquid gold of excess surface
Belong to, is combined with workpiece surface after metal liquid cooling, cooling purpose is so that liquid metal is combined solidification with workpiece, finally
Collapsible form is detached with workpiece, completes the making of microelectrode；Can also be using the device of multi-syringe pin hole etc, accurately
The injection length and charge velocity for controlling each row void region through-hole, until filling position, then the position of travelling workpiece or
The position of metal liquid output device is embodied as the injection of the metal liquid of the through-hole of the void region of next row.
The present invention includes but is not limited to the metal liquid injection of above-mentioned two ways.
In the injection mode of above two metal liquid, former mode does not want the injection precision of metal liquid
It asks, but since metal liquid is flowed freely on the surface of collapsible form, injects void region, a degree of gold can be caused
Belong to the waste of liquid, but injection efficiency is higher, and the injection mode of latter metal liquid, injection precision are high, for device
Control require high, and due to being point row's injection, be not entirety while injecting, injection efficiency is low, therefore generally in order to save
Cost, selection uses former mode, and in this kind of mode, extra liquid metal can be with recycling, Ke Yi great
Width reduces cost, and reduces the injection length of platform metal simultaneously.
The method for making electrode using mask constraint liquid metal, by being arranged the electrode shape needed in activity
Template forms vacancy section, and then collapsible form is close to workpiece after fixing, and liquid metal is injected in vacancy section so that liquid gold
Category can only be combined in the position for having vacancy section with workpiece surface, and the liquid metal of collapsible form excess surface is being removed and passed through
After a period of time is cooling, being present in the liquid metal of vacancy section will solidify and is combined to form microelectrode or microelectrode battle array with workpiece
Row.Simple with device making electrode process process in this way, cost is relatively low, simultaneously because great using collapsible form
The time for eliminating the pretreated time, and liquid metal being waited for cool down the required time also much smaller than electroforming manufacture micro-structure,
Greatly reduce the production cycle.
The present invention is not specifically limited the type and actual temp of metal liquid.
Liquid metal in the present invention typically refers to the alloy functional material being in a liquid state at normal temperatures, as fusing point 30 DEG C with
Under metal and its alloy material, be also included within the low melting point alloy being in a liquid state in 40 DEG C~300 DEG C operation temperature areas, mainly
It is to be determined according to the operating temperature range of the electrod-array made in the present invention, it is ensured that be solid-state in operating temperature range, no
It can be melted and cause the damage of electrode, if operating temperature range is -40 DEG C~90 DEG C, therefore, to assure that its fusing point is higher than maximum work
Make 90 DEG C of temperature.
Liquid metal has low fusing point, high heat conductance/conductivity, property stabilization, high temperature resistant, not volatile, asepsis environment-protecting
The features such as, the technical parameters such as its fusing point, adhesiveness, mobility, conductivity, thermal conductivity can be adjusted according to the different demands of user.
The present invention is not specifically limited the material of liquid metal, and user can select the liquid of different melting points as needed
The fusing point of state metal, existing different melting points liquid metal alloy material has from low to high：8℃,10.5℃,11.5℃,12℃,
15.7℃、18℃、25℃、47℃、58℃、70℃、80℃、92℃、100℃、105℃、115℃、120℃、125℃、130
DEG C, 138 DEG C, 145 DEG C, 160 DEG C, 170 DEG C, 183 DEG C, 190 DEG C, 200 DEG C, 300 DEG C etc..
Certainly, if same middle alloy AB, wherein the change of a certain component can also influence the fusing point of alloy, therefore,
User can realize the preparation from the alloy material of 8 DEG C~300 DEG C fusing points by the ratio of adjustment component.
It is allowed to cool in the present invention due to after the injection work for completing metal liquid, needing to wait for, in order to accelerate work
Make efficiency, shortens process cycle so that technique more standardizes, and in one embodiment of the invention, the S3 further includes：
The temperature of the metal liquid of the void region of the collapsible form is detected in real time.
By monitoring the temperature of the metal liquid of the void region of collapsible form in real time, as long as the temperature of liquid metal reduces
To predetermined value, you can carry out the dismounting of collapsible form.But it is longer by the time that natural cooling needs, it can entirely to make
The manufacturing cycle for making technique is longer, because in entire manufacturing process, the fixation for workpiece, collapsible form, to collapsible form
Liquid metal injection needed for time it is less, the main time is the cooling of metal liquid.
Therefore, in order to further speed up the cooling rate of metal liquid, shorten process cycle, in the implementation of the present invention
In example, the S4 further includes：
The bottom of the workpiece is cooled down.
It is cooled down by the bottom to workpiece, accelerates metal liquid and conduct heat to workpiece, accelerate metal liquid
Cooling efficiency shortens the cooling time of metal liquid, shortens entire process cycle.
The type of cooling of workpiece bottom is not specifically limited in the present invention, it can be directly to workpiece bottom using cold
But liquid or cooling gas are contacted, and take away the heat of workpiece by coolant liquid or cooling gas in the way of convection current, in turn
The heat for taking away metal liquid, to make it accelerate cooling, solidification, type and temperature of the present invention for coolant liquid or cooling gas
Degree is not specifically limited；Other than carrying out heat transmission using above-mentioned fluid, the side of similar heat sink heat dissipation can also be used
Formula radiates, or radiates in other manners, and the present invention is not specifically limited it.
The present invention of material and thickness in to(for) the collapsible form of use do not limit, but due to metal liquid itself
With certain temperature, require it that can work normally at such a temperature collapsible form, it is cold at most to allow that there are heat expansions
Contracting, does not allow that irreversible deformation occurs, can not react with collapsible form to damage, collapsible form has been exactly
To the effect of sizing, to form the electrode shape of needs, and there cannot be adhesiveness between collapsible form and liquid metal,
Liquid metal can only be combined during cooling with workpiece, cannot be combined with collapsible form.
The collapsible form is generally rubber collapsible form or organic glass collapsible form or other materials
Collapsible form.
In addition to this, the embodiment of the present invention additionally provides a kind of device making electrode using mask constraint liquid metal,
Including：
Workbench, the workbench is for placing workpiece 2；
Collapsible form 1, the collapsible form 1 is provided with the void region with the complementation of required electrode structure, for being placed on
Simultaneously the void region is close to combine with the workpiece 2 in 2 upper surface of the workpiece；
Fixture 3, the fixture 3 are arranged in the workbench, for the collapsible form 1 and the workpiece 2 to be close to
In conjunction with rear fixation；
Metal liquid output section 5, the metal liquid output section 5 are arranged in the top of the collapsible form 1, and being used for will be defeated
The metal liquid gone out inject the collapsible form 1 vacancy section combined cooled and solidified with the workpiece 2 after form microelectrode；
Metal liquid cleaning section 6, the metal liquid cleaning section 6, which is arranged, to be used in the top of the collapsible form 1 by institute
The extra metal liquid in 1 upper surface of collapsible form is stated to remove.
By the way that the electrode shape needed setting is formed vacancy section in collapsible form 1, then collapsible form 1 and workpiece 2 are tight
After patch is fixed, liquid metal is injected in vacancy section so that liquid metal can only be tied in the position for having vacancy section and 2 surface of workpiece
It closes, the liquid metal of 1 excess surface of collapsible form is being removed and after cooling down after a period of time, is being present in the liquid of vacancy section
Metal will solidify and be combined to form microelectrode or microelectrode array with workpiece 2.In this way electrode process is made with device
Process is simple, and cost is relatively low, simultaneously because greatly eliminating the pretreated time using collapsible form 1, and waits for liquid golden
Belong to the cooling required time also much smaller than the time of electroforming manufacture micro-structure, greatly reduces the production cycle, it is simple in structure.
Liquid metal in the present invention typically refers to the alloy functional material being in a liquid state at normal temperatures, as fusing point 30 DEG C with
Under metal and its alloy material, be also included within the low melting point alloy being in a liquid state in 40 DEG C~300 DEG C operation temperature areas, mainly
It is to be determined according to the operating temperature range of the electrod-array made in the present invention, it is ensured that be solid-state in operating temperature range, no
It can be melted and cause the damage of electrode, if operating temperature range is -40 DEG C~90 DEG C, therefore, to assure that its fusing point is higher than maximum work
Make 90 DEG C of temperature.
Liquid metal has low fusing point, high heat conductance/conductivity, property stabilization, high temperature resistant, not volatile, asepsis environment-protecting
The features such as, the technical parameters such as its fusing point, adhesiveness, mobility, conductivity, thermal conductivity can be adjusted according to the different demands of user.
The present invention is not specifically limited the material of liquid metal, and user can select the liquid of different melting points as needed
The fusing point of state metal, existing different melting points liquid metal alloy material has from low to high：8℃,10.5℃,11.5℃,12℃,
15.7℃、18℃、25℃、47℃、58℃、70℃、80℃、92℃、100℃、105℃、115℃、120℃、125℃、130
DEG C, 138 DEG C, 145 DEG C, 160 DEG C, 170 DEG C, 183 DEG C, 190 DEG C, 200 DEG C, 300 DEG C etc..
Certainly, if same middle alloy AB, wherein the change of a certain component can also influence the fusing point of alloy, therefore,
User can realize the preparation from the alloy material of 8 DEG C~300 DEG C fusing points by the ratio of adjustment component.
In the present invention, since the metal liquid exported from metal liquid output section 5 has higher temperature, if by grasping
It is hand-held to make personnel, it may occur that scald.
Therefore, it manufactures for convenience, facilitates fixed metal liquid output section 5, it is in one embodiment of the invention, described
It further includes the guide rail 7 being arranged in the workbench, 7, the guide rail to make the device of electrode using mask constraint liquid metal
In the top of the workpiece 2, the metal liquid output section 5, the metal liquid cleaning section 6 are arranged in the guide rail 7.
By the way that metal liquid output section 5, the setting of metal liquid cleaning section 6 in guide rail 7, are injected it completing metal liquid
Afterwards, the extra metal liquid of output to 1 surface of collapsible form is removed.
The present invention does not limit guide rail 7, and single track, which may be used, can also use double track.
Metal liquid cleaning section 6 in the present invention, for the extra metal liquid on 1 surface of collapsible form to be removed, this
Invention does not limit its specific size and shape.Metal liquid cleaning section 6 can be scraper plate, can be metal liquid
It is adsorbed to reach clear purpose, also may be used during inswept to 1 surface of collapsible form with higher viscosity
To be the opposite material poor with liquid metal hydrophobicity, due to liquid metal have relative to collapsible form 1 it is higher hydrophobic
Property, it will not adhere to, during scraper plate is inswept, liquid metal can flow therewith, go to surface except extra to realize
The purpose of industry situation metal.
It is pointed out that metal liquid cleaning section 6, it, cannot be right if scraper plate is during clearly extra liquid metal
Liquid metal in the void region of collapsible form 1 is had an effect, it is made to increase or decrease.
In order to further improve to metal liquid output section 5, the metal liquid cleaning section 67 position of guide rail tune
Section, in one embodiment of the invention, the device that electrode is made using mask constraint liquid metal further includes being arranged described
The sliding block 4 of guide rail 7, the metal liquid output section 5, the metal liquid cleaning section 6 pass through the sliding block 4 and the guide rail 7
Connection.
In the present invention, for metal liquid output section 5, metal liquid cleaning section 6 in the control of 7 position of guide rail, Ke Yitong
It crosses and manually completes, can be controlled and be completed by machine automatization, reduced human intervention, improve the standard of manufacturing process.
The present invention of material and thickness in to(for) the collapsible form of use 1 do not limit, but due to metal liquid sheet
Body has higher temperature, requires it that can work normally at such a temperature collapsible form 1, at most allows that there are heat expansions
Shrinkage does not allow that irreversible deformation occurs, and can not be reacted with collapsible form 1 to damage, collapsible form 1 is just
It is to play the role of sizing, cannot exists to form the electrode shape of needs, and between collapsible form 1 and liquid metal viscous
Attached property, liquid metal can only be combined during cooling with workpiece 2, cannot be combined with collapsible form 1.
The collapsible form 1 is generally rubber collapsible form 1 or organic glass collapsible form 1 or other materials
Collapsible form 1.
It is in one embodiment of the invention, described to utilize mask constraint liquid gold in order to further decrease process cycle
The device for belonging to making electrode further includes the refrigerator being arranged in the workbench, is carried out for the bottom to the workpiece 2 cold
But.
It is cooled down by the bottom to workpiece 2, accelerates metal liquid and conduct heat to workpiece 2, accelerate metal liquid
Cooling efficiency, shorten the cooling time of metal liquid, shorten entire process cycle.
The type of cooling of 2 bottom of workpiece is not specifically limited in the present invention, directly 2 bottom of workpiece can be used
Coolant liquid or cooling gas are contacted, and take away the heat of workpiece 2 by coolant liquid or cooling gas in the way of convection current, into
And take away the heat of metal liquid, to make its accelerate cooling, solidification, the present invention for coolant liquid or cooling gas type and
Temperature is not specifically limited；Other than carrying out heat transmission using above-mentioned fluid, similar heat sink heat dissipation can also be used
Mode radiates, or radiates in other manners, and the present invention is not specifically limited it.
Workpiece 2 and collapsible form 1 are fixed due to needing in the present invention, and during fixed, it needs therebetween
Adjacent surface be close to, gap cannot be generated so that metal liquid cannot flow freely on 2 surface of workpiece, can be only present in activity
In 1 corresponding void region of template, but when combination between the two can be only achieved requirement, rely only on work people
The experience of member, which is fixed, does not have standard, and does not have criterion, increases the set time, increases process cycle.
In order to solve this problem, in one embodiment of the invention, the mask constraint liquid metal makes the device of electrode also
Including the pressure sensor in the fixture 3 for detecting pressure between the fixture 3 and the collapsible form 1 is arranged.
By test detect, after pressure sensor detects that pressure value reaches certain range, you can reach workpiece 2 with
1 surface of collapsible form does not have apertured requirement, such staff just only to need the detection for observing pressure sensor vertical
Quickly judgement, it is whether qualified for the fixation of the two, reduce process cycle.
In the one embodiment for the device that the mask constraint liquid metal of the present invention makes electrode, manufacture craft is as follows：
The smooth one side of workpiece 2 is bonded with collapsible form 1, ensureing that gap between the two is small can be into no liquid
Enter, clamped the two with fixture 3 and fixation is installed.Sliding block 4 is installed on guide rail 7, metal liquid output is installed respectively on sliding block 4
The casting gate in portion 5 and the scraper plate of metal liquid cleaning section 6.Casting gate is controlled close to workpiece 2, to the vacancy section of collapsible form 1
Liquid metal is injected in domain, and after ensureing that each microflute is filled with liquid metal, control scraper plate will be extra on collapsible form 1
Metal liquid is cleared away.Static a period of time makes liquid metal solidification, is combined to be formed with matrix in each microflute of collapsible form 1
Microelectrode unit finally detaches collapsible form 1 with workpiece 2, and array electrode completes.
In conclusion the method and apparatus that mask constraint liquid metal provided in an embodiment of the present invention makes electrode, pass through
The electrode shape setting of needs is formed into vacancy section in collapsible form, then collapsible form is close to workpiece after fixing, in hollow out
Liquid metal is injected in area so that liquid metal can only be combined in the position for having vacancy section with workpiece surface, by collapsible form
The liquid metal of excess surface removes and after cooling down after a period of time, is present in the liquid metal solidification of vacancy section and and workpiece
In conjunction with formation microelectrode or microelectrode array.Simple with device making electrode process process in this way, cost is relatively low, together
When due to greatly eliminating the pretreated time using collapsible form, and it is also remote small to wait for liquid metal to cool down the required time
The time of micro-structure is manufactured in electroforming, greatly reduces the production cycle.
The method and apparatus for making electrode to mask provided by the present invention constraint liquid metal above have carried out detailed Jie
It continues.Principle and implementation of the present invention are described for specific case used herein, and the explanation of above example is only
It is the method and its core concept for being used to help understand the present invention.It should be pointed out that for those skilled in the art
For, it without departing from the principle of the present invention, can be with several improvements and modifications are made to the present invention, these improve and repair
Decorations are also fallen within the protection scope of the claims of the present invention.
Claims (10)
1. a kind of method making electrode using mask constraint liquid metal, which is characterized in that including：
Collapsible form with void region and the complementation of required electrode structure is tightly attached to the surface of workpiece, the vacancy section by S1
Domain is adjacent with the workpiece surface；
S2 injects liquid metal to the void region of the collapsible form；
S3 removes the extra liquid metal in the collapsible form upper surface；
S4, after the cooling predetermined time, the liquid metal the void region and the workpiece surface solidification and with it is described
Workpiece surface combines and forms microelectrode；
S5 detaches the collapsible form with the workpiece.
2. the method for making electrode using mask constraint liquid metal as described in claim 1, which is characterized in that the S3 is also wrapped
It includes：
The temperature of the metal liquid of the void region of the collapsible form is detected in real time.
3. the method for making electrode using mask constraint liquid metal as claimed in claim 2, which is characterized in that the S4 is also wrapped
It includes：
The bottom of the workpiece is cooled down.
4. the method for making electrode using mask constraint liquid metal as claimed in claim 3, which is characterized in that the movable mold
Plate is rubber collapsible form or organic glass collapsible form.
5. a kind of device making electrode using mask constraint liquid metal, which is characterized in that including：
Workbench, the workbench is for placing workpiece；
Collapsible form, the collapsible form is provided with the void region with the complementation of required electrode structure, for being placed on the work
Simultaneously the void region is close to combine with the workpiece in part upper surface；
Fixture, the fixture setting is in the workbench, for the collapsible form and the workpiece to be close to after combining admittedly
It is fixed；
Metal liquid output section, the metal liquid output section are arranged in the top of the collapsible form, the gold for that will export
Belong to liquid inject the collapsible form vacancy section and the workpiece combination cooled and solidified after form microelectrode；
Metal liquid cleaning section, the metal liquid cleaning section, which is arranged, to be used in the top of the collapsible form by the movable mold
The extra metal liquid in plate upper surface is removed.
6. the device of electrode is made using mask constraint liquid metal as claimed in claim 5, which is characterized in that further include setting
In the guide rail of the workbench, the guide rail is located at the top of the workpiece, the metal liquid output section, the molten metal
Body cleaning section is arranged in the guide rail.
7. the device of electrode is made using mask constraint liquid metal as claimed in claim 6, which is characterized in that further include setting
In the sliding block of the guide rail, the metal liquid output section, the metal liquid cleaning section pass through the sliding block and the guide rail
Connection.
8. the device of electrode is made using mask constraint liquid metal as claimed in claim 7, which is characterized in that the movable mold
Plate is rubber collapsible form or organic glass collapsible form.
9. the device of electrode is made using mask constraint liquid metal as claimed in claim 8, which is characterized in that further include setting
In the refrigerator of the workbench, cooled down for the bottom to the workpiece.
10. the device of electrode is made using mask constraint liquid metal as claimed in claim 9, which is characterized in that further include setting
Set the pressure sensor for being used to detect pressure between the fixture and the collapsible form in the fixture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811002427.XA CN108788343A (en) | 2018-08-30 | 2018-08-30 | A kind of method and apparatus making electrode using mask constraint liquid metal |
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| WO2020191196A1 (en) * | 2019-03-19 | 2020-09-24 | Trustees Of Boston University | Systems and methods for fabricating three-dimensional conductive electrodes |
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