CN108780280B - Discharge lamp, method of replacing the same, and exposure method and apparatus - Google Patents
Discharge lamp, method of replacing the same, and exposure method and apparatus Download PDFInfo
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- CN108780280B CN108780280B CN201680081229.XA CN201680081229A CN108780280B CN 108780280 B CN108780280 B CN 108780280B CN 201680081229 A CN201680081229 A CN 201680081229A CN 108780280 B CN108780280 B CN 108780280B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/50—Auxiliary parts or solid material within the envelope for reducing risk of explosion upon breakage of the envelope, e.g. for use in mines
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Abstract
The discharge lamp is provided with: a glass tube having an electrode for forming a light emitting section therein; and a base part provided at an end of the glass tube, the base part being provided with a through hole formed by an opening. The light source device includes: an irradiation unit for making the light beam incident on the through hole of the base part of the discharge lamp; a light receiving unit for detecting the light beam passing through the through hole; and a light source control system for determining the angle of the discharge lamp by using the detection result of the light receiving part. Whether the discharge lamp is used up or not, the rotation angle, and the like can be easily checked.
Description
Technical Field
The present invention relates to a discharge lamp and a replacement method thereof, a light source device provided with the discharge lamp, an exposure method using the replacement method, an exposure apparatus provided with the light source device, and a device manufacturing method using an exposure technique.
Background
In a photolithography process for manufacturing various devices (e.g., a liquid crystal display device, a semiconductor device, or the like), there is a type of exposure apparatus including a light source apparatus for exposure configured by combining a discharge lamp such as an ultrahigh pressure mercury lamp and a condenser lens in a primary exposure type projection exposure apparatus and a scanning exposure type projection exposure apparatus which are used for transferring a pattern formed on a mask onto a substrate (e.g., a glass plate, a semiconductor wafer, or the like) coated with a photosensitive material.
Among conventional light source devices, there are the following: a flange portion and a step portion are provided on one base of a discharge lamp, and the discharge lamp is fixed by biasing the step portion downward in the opening with a rod member or the like in a state where the flange portion is placed on the surface of the base portion provided with the opening (see, for example, patent document 1). Further, if the discharge lamp for the exposure apparatus is used for a time longer than a preset allowable time, the illuminance may be reduced, which may deteriorate the exposure performance (such as resolution). Therefore, when the cumulative usage time of the discharge lamp has elapsed the allowable time, the discharge lamp is replaced with an unused discharge lamp.
Documents of the prior art
Patent document
Patent document 1: international publication No. 2007/066947 pamphlet
Disclosure of Invention
In a light source device of an exposure apparatus, for example, when a used discharge lamp and an unused discharge lamp are stored in a common storage part and the discharge lamps can be automatically replaced, there is a possibility that the used discharge lamp and the unused discharge lamp have the same outer shape, and thus the used discharge lamp may be reused.
Further, for example, when a non-axisymmetrical discharge lamp is transported from the storage section to the installation position of the discharge lamp, if the rotation angle of the discharge lamp is greatly deviated from the target value, there is a possibility that the discharge lamp cannot be delivered to the transport section or the like quickly.
In view of such circumstances, an object of the present invention is to enable easy confirmation of the state of a discharge lamp.
According to the 1 st aspect of the present invention, there is provided a discharge lamp to be mounted in an apparatus including a detection unit for detecting a usage state of the discharge lamp, the discharge lamp including: an electrode for discharge; and a detection section which is detected by the detection section, and which changes from a1 st state to a2 nd state when the electrode is energized.
According to the 2 nd aspect of the present invention, there is provided a discharge lamp including a glass member forming a light emitting portion, and a1 st base member and a2 nd base member provided so as to sandwich the glass member, wherein a through hole is provided in the 1 st base member.
According to the 3 rd aspect, there is provided a light source device including the discharge lamp according to the aspect of the present invention, the light source device including: a storage unit for storing the discharge lamp; a conveying part for conveying the discharge lamp; a light transmitting unit that causes a light flux to enter the through hole of the 1 st base member of the discharge lamp; a light receiving unit that detects the light beam passing through the through hole; and a control unit that obtains the state of the discharge lamp using the detection result of the light receiving unit.
According to claim 4, there is provided an exposure apparatus comprising: the light source device according to the aspect of the present invention; an illumination system that illuminates a mask with light generated from the discharge lamp of the light source device; and a projection optical system for projecting an image of the pattern of the mask onto a substrate.
According to the 5 th aspect, there is provided a replacement method of a discharge lamp according to the aspect of the present invention, including: keeping the discharge lamp; transporting the discharge lamp from the storage part to an installation position; making a light beam incident on the through hole of the 1 st base member of the discharge lamp; detecting the light beam passing through the through hole; and determining a state of the discharge lamp using a detection result of the light beam.
According to the 6 th aspect, there is provided an exposure method comprising: replacing the discharge lamp by using the replacement method of the discharge lamp according to the aspect of the invention; illuminating a light cover with light generated from the discharge lamp; and projecting an image of the pattern of the mask onto a substrate.
According to an eighth aspect, there is provided a device manufacturing method comprising: forming a pattern of a photosensitive layer on a substrate using the exposure apparatus or the exposure method according to the aspect of the invention; and processing the substrate on which the pattern is formed.
Drawings
Fig. 1 is a diagram showing a schematic configuration of an exposure apparatus according to embodiment 1.
Fig. 2 is a view showing the discharge lamp in fig. 1.
Fig. 3 (a) is a sectional view taken along line AA of fig. 3 (B), (B) is a sectional view showing an anode-side base part of an unused discharge lamp, and (C) is a sectional view showing an anode-side base part of a used discharge lamp.
Fig. 4 (a) is a partially cut-away plan view showing the light source device in fig. 1, and (B) is a partially cut-away side view showing the light source device in fig. 4 (a).
Fig. 5 is a perspective view showing an anode-side base part and a pinch mechanism of the discharge lamp.
Fig. 6 (a) is a partially cut-away plan view showing the light source device in the process of moving the slide portion, and (B) is a partially cut-away side view showing the light source device in fig. 6 (a).
Fig. 7 (a) is a diagram showing a state in which the anode-side base part of the discharge lamp is sandwiched, and (B) is a diagram showing a state in which the sandwiching of the base part is released.
Fig. 8 is a partially cut-away side view of the light source device.
Fig. 9 (a) is a plan view showing a state where the anode-side base portion is held by the claw portion for holding the lamp, and (B) is a side view of fig. 9 (a).
Fig. 10 (a) is a partially cut-away plan view showing the light source device during the movement of the discharge lamp, and (B) is a partially cut-away side view showing the light source device of fig. 10 (a).
Fig. 11 is a partially cut-away view of a plurality of discharge lamps provided in a lamp storage turntable.
Fig. 12 is a diagram showing a positioning portion of a lamp storage dial.
Fig. 13 is a flowchart showing an example of a replacement method of the discharge lamp.
Fig. 14 (a) is a sectional view showing an anode-side base part of an unused discharge lamp according to embodiment 2, and (B) is a sectional view showing an anode-side base part of a used discharge lamp.
Fig. 15 (a) and (B) are sectional views each showing a clamping mechanism of the anode-side base part in fig. 14 (a).
Fig. 16 (a) is a sectional view showing an anode-side base part of a discharge lamp according to modification 1, and (B) is a sectional view showing an anode-side base part of a discharge lamp according to modification 2.
Fig. 17 (a) is a cross-sectional view showing an anode-side base part of a discharge lamp according to modification 3, and (B) is a cross-sectional view showing a state in which the ball of fig. 17 (a) has moved downward.
Fig. 18 (a) is a diagram showing a state in which the anode-side base part of the discharge lamp according to the 4 th modification is sandwiched, (B) is an enlarged cross-sectional view showing the anode-side base part of fig. 18 (a), (C) is a cross-sectional view showing the terminal part of fig. 18 (B), and (D) is a diagram showing the inside of the terminal part of fig. 18 (B) as viewed from the D direction.
Fig. 19 (a) is a view showing the inside of a terminal portion of an anode base portion of a discharge lamp according to a modification 5, and (B) is a view showing a state in which the interval between the distal ends of the 2 elastic hinge portions in fig. 19 (a) is enlarged.
Fig. 20 (a) is a view showing the inside of a terminal portion of an anode base portion of a discharge lamp according to a modification 6, and (B) is a view showing a state in which the interval between the distal ends of the 2 elastic hinge portions in fig. 20 (a) is enlarged.
Fig. 21 (a) is a cross-sectional view showing a terminal portion of an anode base portion of a discharge lamp according to a modification example 7, and (B) is a view showing a state in which an angle of a mirror portion of fig. 21 (a) is changed.
Fig. 22 is a flowchart showing an example of a manufacturing process of an electronic device.
Detailed Description
[ embodiment 1 ]
Fig. 1 shows a schematic configuration of an exposure apparatus EX including a light source apparatus 30 according to the present embodiment. The exposure apparatus EX is, for example, a projection exposure apparatus of a scanning exposure type. In fig. 1, the light source device 30 includes: a discharge lamp 1 composed of an arc discharge type ultrahigh-pressure mercury lamp; a support member 33 for holding the base part 26 on the cathode side of the discharge lamp 1; a pull-out section 36 (see fig. 4B) capable of moving the support member 33; a driving unit 34 for fixing and releasing the base part 26 to and from the support member 33; an elliptical mirror 2 (condenser mirror) disposed so as to surround the glass tube 25 (bulb) of the discharge lamp 1; and a box-shaped lamp housing 31 for housing the discharge lamp 1, the elliptical mirror 2, and the like during exposure (during use of the discharge lamp 1). During exposure, the light-emitting section in the glass tube 25 of the discharge lamp 1 is disposed near the 1 st focal point of the elliptical mirror 2 as an example.
Further, the light source device 30 includes: a flexible cable 24 detachably connected to the anode-side cap portion 28 of the discharge lamp 1; a flexible cable 23 connected to the base part 26 on the cathode side of the discharge lamp 1 via a support member 33; a power supply unit 20 that supplies power (current) to the discharge lamp 1 via cables 23 and 24 to cause the discharge lamp 1 to emit light; and a fully automatic replacing device 50 for replacing the used discharge lamp 1. The replacement device 50 includes: a clamp mechanism 52 for attaching and detaching the cable 24 to and from the cap portion 28 on the anode side; a storage part 54 for storing the discharge lamp 1; a lamp conveyance system 56 for conveying the discharge lamp 1 between the support member 33 and the storage part 54; and a box-shaped housing 51 for housing the storage part 54 and the lamp conveying system 56.
As shown in fig. 4B, the support member 33 is a substantially cylindrical metal (conductive) member having an annular flange portion formed at an upper portion thereof. The support member 33 is fixed to the center of the drawn portion 36 via the flange portion thereof, the drawn portion 36 is supported so as to be movable along the guide member 41 on the inner surface of the globe 31 as described later, and the support member 33 is electrically insulated from the drawn portion 36. Further, a driving unit 34 for the base part 26 is provided on the bottom surface of the pull-out part 36.
In fig. 1, the light source device 30 includes a light source control system 32 that controls operations of the power supply unit 20, the drive unit 34, the lamp conveyance system 56, and the like. The light source control system 32 monitors the cumulative usage time of the discharge lamp 1, and when the cumulative usage time reaches a preset allowable time, causes the replacement device 50 to operate to replace the used discharge lamp 1 with an unused discharge lamp. The detailed structure and operation of the light source device 30 will be described later.
The exposure apparatus EX includes: an illumination optical system 13 for illuminating the mask M with exposure light IL selected from the light beam supplied from the light source device 30; a projection optical system PL that projects an image of the pattern of the mask M under exposure light IL onto the surface of a plate P (photosensitive substrate) composed of a glass substrate coated with a resist; a mask stage MST for moving the mask M; a substrate stage PST for moving the plate P; and a main control system 14 composed of a computer for integrally controlling the operation of the entire exposure apparatus including the light source apparatus 30.
As an example, exposure apparatus EX is an exposure apparatus for manufacturing a liquid crystal display device, and a main body portion (a portion including mask stage MST, projection optical system PL, and substrate stage PST) of exposure apparatus EX is provided inside a box-shaped chamber (not shown) in a manufacturing factory, and light source device 30 is provided on a ceiling RT of the chamber. When the cumulative usage time of the discharge lamp 1 reaches the allowable time, the light source device 30 supplies information of the result to the main control system 14. Accordingly, the main control system 14 stops the exposure operation of the exposure apparatus EX until the information indicating that the replacement of the discharge lamp 1 is completed is supplied from the light source apparatus 30. Hereinafter, the Z axis is taken parallel to the optical axis AX of the projection optical system PL, the X axis is taken parallel to the paper surface of fig. 1 in a plane (substantially horizontal plane in the present embodiment) perpendicular to the Z axis, and the Y axis is taken perpendicular to the paper surface of fig. 1.
The light flux emitted from the discharge lamp 1 is converged near the 2 nd focal point by the elliptical mirror 2, and then passes through the vicinity of a shutter (not shown) to become divergent light, and enters the mirror 3 for bending the optical path. The mirror 3 is also housed in the lamp cover 31. The light beam reflected by the mirror 3 passes through the light transmissive window member 4 of the globe 31 and enters the interference filter 5, and only the exposure light IL composed of a predetermined bright line (for example, i-line of 365nm wavelength) is selected by the interference filter 5. As the exposure light IL, g-rays, h-rays, a mixture of these, or the like may be used in addition to i-rays, or glow rays from a lamp other than a mercury lamp may be used. The selected exposure light IL is incident on a fly-eye lens 6 (optical integrator), and a plurality of secondary light sources are formed on a variable aperture stop (hereinafter referred to as illumination σ stop) 7 disposed on an emission surface of the fly-eye lens 6. The exposure light IL having passed through the variable σ stop 7 is incident on a mask curtain (variable field stop) 9 via a1 st relay lens 8. The arrangement surface of the mask shade 9 and the pattern surface of the mask M are substantially conjugate, and the illumination area on the mask M is defined by setting the opening shape of the mask shade 9 by the driving device 9 a. Further, stage control system 15 can open and close mask curtain 9 by driving device 9a to prevent unnecessary exposure light from being irradiated onto board P during stepping movement of board P and the like.
The exposure light IL passed through the mask curtain 9 illuminates the pattern region of the pattern surface of the mask M via the 2 nd relay lens 10, the mirror 11 for bending the optical path of the exposure light IL, and the condenser lens 12. The illumination optical system 13 includes an interference filter 5, a fly-eye lens 6, a variable σ diaphragm 7, relay lenses 8 and 10, a mask curtain 9, a mirror 11, and a condenser lens 12. The light beam from the light source device 30 illuminates an illumination area, for example, elongated in the Y direction, of a reticle M (reticle) as exposure light IL via an illumination optical system 13. The pattern in the illumination region of the mask M is projected onto an exposure region (a region optically conjugate to the illumination region) of one shot (shot) region of the plate P at a projection magnification β (β is, for example, an equal magnification, an enlargement magnification, or a reduction magnification) via the projection optical system PL. As the projection optical system PL, a multiple projection optical system or the like in which a plurality of projection optical systems are arranged in two rows in the Y direction, for example, can be used. In the case where a plurality of projection optical systems are used in this manner, the exposure light IL from the illumination optical system 13 illuminates a plurality of illumination areas on the pattern surface of the mask M in parallel.
The mask M is held on the upper surface of a mask stage MST that can be moved slightly in the X direction, the Y direction, and the rotation direction around the Z axis on a mask base (not shown). The position of the mask stage MST is measured with high accuracy by a laser interferometer 18R that irradiates a movable mirror 17R fixed to the mask stage MST with a measurement laser beam, and the measurement value is supplied to the stage control system 15 and the main control system 14. Based on the measurement value and control information from main control system 14, stage control system 15 controls the position of mask stage MST via drive system 19R including a linear motor and the like.
On the other hand, the board P is held on the upper surface of the substrate stage PST via a board holder (not shown), and the substrate stage PST is mounted on a base member (not shown) so as to be movable in the X direction and the Y direction. The position of the substrate stage PST is measured with high accuracy by a laser interferometer 18W that irradiates a movable mirror 17W fixed to the substrate stage PST with a measurement laser beam, and the measurement value is supplied to the stage control system 15 and the main control system 14. Based on the measurement values and control information from the main control system 14, the stage control system 15 controls the position of the substrate stage PST (wafer W) by a drive system 19W including a linear motor and the like.
In the exposure of the plate P, the following operations are repeated by step and scan (step and scan): an operation (step movement) of moving each shot (shot) region of the plate P forward of the exposure region of the projection optical system PL by the substrate stage PST; and an operation (scanning exposure) of illuminating the mask M with a light beam from the light source device 30 via the illumination optical system 13, moving the mask M and the plate P in the X direction (scanning direction) in synchronization with each other with respect to the projection optical system PL, and exposing an image of the pattern of the mask M to the entire surface of one irradiation region of the plate P. Thereby, the image of the pattern of the mask M is transferred to each irradiated area of the sheet P.
In order to perform alignment in advance during this exposure, for example, an aerial image measuring unit 22 for detecting the position of an alignment mark formed on the mask M is provided inside the substrate stage PST, and an alignment system 21 for detecting the position of an alignment mark attached to each irradiation region of the plate P is provided on the side surface of the projection optical system PL. The detection signals of the aerial image measuring unit 22 and the alignment system 21 are supplied to the alignment signal processing system 16, and the alignment signal processing system 16 processes these detection signals, for example, to obtain alignment information of the mask M and arrangement information of each irradiated area of the plate P, and supplies the obtained information to the main control system 14. The main control system 14 performs alignment of the mask M and position control of the plate P at the time of exposure based on these pieces of information. Thus, high overlay accuracy can be obtained in the overlay exposure.
Next, the structure of the light source device 30 of the present embodiment, the replacement operation of the discharge lamp 1 using the light source device 30, and the like will be described in detail.
Fig. 2 shows the discharge lamp 1 of the light source device 30 in fig. 1. In fig. 2, the discharge lamp 1 includes: a glass tube 25 composed of a bulb portion 25a and 2 rod-shaped portions 25b1, 25c fixed to the bulb portion 25a in a substantially symmetrical and cylindrical manner so as to sandwich the bulb portion 25 a; a connecting portion 25b2 provided to cover an end of one rod-shaped portion 25b 1; a cathode-side base part 26 connected to an end of the connection part 25b 2; a cover portion 25d provided to cover the middle portion of the other rod-shaped portion 25 c; and an anode base part 28 connected to an end of the rod-like part 25 c. An anode EL1 and a cathode EL2 for forming a light emitting portion are fixed to each other in the bulb portion 25a, and the cathode EL2 and the anode EL1 are electrically connected to the base portions 26 and 28, respectively. The entire base part 26 and most of the base part 28 (except for a ball 27 described later) are made of a metal having good electrical and thermal conductivity (e.g., brass). The base part 26, the glass tube 25, and the base part 28 are arranged along a straight line connecting the central axes of the rod-shaped parts 25b1, 25c of the glass tube 25 and passing through the center of the light-emitting part. The direction parallel to the straight line connecting the central axes of the rod-like portions 25b1, 25c is the longitudinal direction L of the discharge lamp 1. Cover portion 25d and coupling portion 25b2 need not necessarily be provided. In this case, the cap 26 may be connected to the end of the rod 25b 1.
The base parts 26 and 28 are basically used as power receiving terminals for supplying power from the power supply part 20 of fig. 1 to the cathode EL2 and the anode EL1 via the cables 23 and 24. In addition, the base part 26 is also used as a supported part for supporting the glass tube 25 (discharge lamp 1) by the supporting member 33 (see fig. 4B). Further, in each of the base parts 26 and 28, a concave-convex portion (a portion having an increased surface area) for efficiently radiating heat conducted from the glass tube 25 is formed.
Further, in the base part 26 on the cathode side, in order from the connection part 25b2 to the open end side: an annular flange portion 26a (a predetermined portion of the contact portion and the position in the longitudinal direction L) having an outer diameter about 2 times that of the coupling portion 25b 2; a cylindrical shaft portion 26b (fitting portion or position defining portion) having an outer diameter slightly larger than that of the coupling portion 25b 2; a cylindrical small-diameter portion 26f (stepped portion) having an outer diameter smaller than that of the shaft portion 26 b; and a fixing portion 26h having an outer diameter slightly smaller than the shaft portion 26b or a columnar shape having substantially the same outer shape as the shaft portion 26 b. A chamfered portion (not shown) may be formed at the boundary between the shaft portion 26b and the small diameter portion 26 f. A chamfered portion 26i is formed on the open end side of the fixing portion 26h, and a bar-shaped guide portion 26j having a diameter smaller than the small diameter portion 26f is formed on the end portion of the fixing portion 26 h. The outer shape of the cylindrical shaft 26b may be substantially the same as the outer shape of the rod-shaped portion 25b 1. The small diameter portion 26f may be formed by providing a recess (step) between the shaft portion 26b and the fixing portion 26h in a direction intersecting the longitudinal direction L of the discharge lamp 1.
When the discharge lamp 1 is placed on the support member 33 in fig. 4 (B), the flange portion 26a comes into contact with the step portion surrounding the opening in the center of the support member 33, and becomes a reference for positioning in the longitudinal direction L (1 st direction) of the light-emitting portion of the glass tube 25, and the shaft portion 26B is fitted into the opening, and becomes a reference for positioning the light-emitting portion in a plane orthogonal to the longitudinal direction L.
Further, a pressed surface 26g is formed on the small diameter portion 26f of the fixing portion 26 h. The pressed surface 26g is a plane perpendicular to the longitudinal direction L. The drive unit 34 of fig. 4 (B) has: a rod 38 for biasing the fixing portion 26h (pressed surface 26g) of the base portion 26 downward (-Z direction) when the discharge lamp 1 is supported by the support member 33; a tension coil spring 39 that rotates the lever 38 counterclockwise in a direction of applying force to the fixing portion 26 h; and a driving unit 40 such as an air cylinder or an electromagnetic cylinder for rotating the rod 38 clockwise to release the fixation of the base 26 by the rod 38. When the discharge lamp 1 is to be fixed and supported by the support member 33, the clockwise rotation of the lever 38 by the driving unit 40 may be released, and when the discharge lamp 1 is to be taken out from the support member 33, the lever member 38 may be rotated clockwise by the driving unit 40. Further, as the drive unit 34, a mechanism described in the pamphlet of international publication No. 2007/066947 can be used.
Since the heat generated by the discharge lamp 1 flows to the support member 33 having a large surface area and a large heat capacity through the base part 26, the temperature rise of the discharge lamp 1 can be suppressed. In order to enhance the cooling effect of the discharge lamp 1, the cooled gas may be fed from a blower (not shown) into the opening of the support member 33 in fig. 4B, into which the fixing portion 26h of the base portion 26 is inserted.
In fig. 2, for example, a spiral groove portion (not shown) may be formed from the flange portion 26a to the small diameter portion 26f on the surface of the shaft portion 26b of the base portion 26. By supplying gas for cooling from the outside, for example, to the groove portion, the cooling effect of the discharge lamp 1 can be improved.
In addition, 2 openings AP1 and AP2 (positioning portions) (the opening AP2 is not shown) are formed at 90 ° intervals, for example, in the flange portion 26a of the base portion 26. Accordingly, 2 pins (not shown) are provided on the surface of the support member 33 of fig. 4B on which the flange portion 26a is placed. When the discharge lamp 1 is placed on the support member 33, these 2 pins are inserted into the opening AP1 or the like of the flange portion 26a, whereby the discharge lamp 1 is positioned about an axis along the longitudinal direction L. The relative angle between the opening AP1 and the anode-side base 28 is set to an angle (predetermined angle) that facilitates the connection between the base 28 and the cable 24.
The shape of the base part 26 on the cathode side is arbitrary. As the base part 26, for example, a member may be used which is provided with only the flange part 26a and the shaft part 26b, and in the shaft part 26b, a recess into which the tip end part of the rod 38 of the driving unit 34 can be inserted is formed. In fig. 2, the base part 28 on the anode side includes, in order from the rod-shaped part 25c side to the open end side of the glass tube 25 of the discharge lamp 1: a heat radiating portion 28i in which a plurality of annular heat radiating fins 28j having an outer diameter larger than that of the rod-shaped portion 25c are formed; a gripped portion 28e (held portion) having a spherical outer shape; and a terminal portion 28a (coupled portion) having a substantially triangular prism shape and non-axisymmetric shape, in which 2 flat surface portions 28b and 28c having a V-shape are formed (see fig. 3 a).
Fig. 3 (B) shows the anode-side base part 28 in a state where the discharge lamp 1 of fig. 2 is not used, fig. 3 (C) shows the anode-side base part 28 in a state where the discharge lamp 1 is used up, and fig. 3 (a) is a cross-sectional view taken along the AA line of fig. 3 (B). In fig. 3a, a flat portion 28d is formed so as to connect 2 symmetrically (V-shaped) inclined flat portions 28b and 28c of the terminal portion 28a, and a narrow chamfered portion 28a4 parallel to the flat portion 28d is formed between the flat portions 28b and 28 c.
In fig. 3B, the upper end of the portion of the base 28 including the heat radiating portion 28i and the gripped portion 28e is fixed to the connecting portion 25d at the end of the rod-like portion 25c of the glass tube 25 of the discharge lamp 1 by a plurality of bolts (not shown), for example. Further, a circular convex portion 28e2 is provided at the center of a circular concave portion 28e1 formed at the upper end of the gripped portion 28 e. Further, the flange portion 29e of the housing 29 having a substantially cylindrical shape and an annular flange portion 29e provided at a lower end portion thereof is placed in the recess portion 28e1 so as to surround the projection portion 28e2, and the spherical body 27 having a high sphericity and a thermal expansion coefficient smaller than that of the housing 29 is placed so as to cover the circular opening 29b provided at the center of the upper portion 29a of the housing 29. The size of the interior of the housing 29 is such that the spherical body 27 can be displaced to some extent in the longitudinal direction of the discharge lamp 1 and in the plane orthogonal to the longitudinal direction. The diameter of the opening 29b is specified in the following manner: the diameter of the opening 29b is smaller than the diameter of the spherical body 27 at the temperature (substantially normal temperature) when the discharge lamp 1 is stored, and the diameter of the opening 29b becomes larger than the diameter of the spherical body 27 due to thermal expansion of the housing 29 in a state where the lamp base portions 26 and 28 of the discharge lamp 1 are energized to emit light from the discharge lamp 1 and the temperature of the discharge lamp 1 rises (a state where the use of the discharge lamp 1 lasts for several hours or more, for example). As a result, as shown in fig. 3 (C), the spherical body 27 passes through the opening 29b and is accommodated in the accommodating portion 29 in a state where the discharge lamp 1 is used for several hours or more, for example. For example, the spherical body 27 is made of ceramic having a very small thermal expansion coefficient, and the housing 29 is made of metal such as stainless steel or aluminum alloy. The spheres 27 may be made of an alloy having a low expansion rate such as invar.
In fig. 3 (B), a terminal portion 28a having a substantially triangular prism shape in outer shape and a circular flange portion 28a3 at a lower end portion is placed so as to cover the housing portion 29 and the spherical body 27 located at the upper portion of the housing portion 29. The inner surface of the terminal portion 28a is formed in a cylindrical shape in which the outer shape of the housing portion 29 is slightly increased, and the gap between the upper end of the inner surface of the terminal portion 28a and the ball 27 is set to be small so that the ball 27 does not fall off from the opening 29b of the housing portion 29. The flange portion 29e of the housing portion 29 overlaps the flange portion 28a3 of the terminal portion 28a, and the housing portion 29 and the terminal portion 28a are fixed to the gripped portion 28e by fixing the flange portions 29e, 28a2 to the recessed portion 28e1 of the gripped portion 28e at a plurality of positions with bolts BA1, for example. Note that, for convenience of explanation, the flange portions 29e and 28a2 are not shown in fig. 3 (C).
Further, along a straight line parallel to the flat surface portion 28d of the terminal portion 28a and passing through the center axis of the housing portion 29, 2 circular openings 29c and 29d having a diameter smaller than that of the ball 27 are formed so as to face the side surface of the housing portion 29, and circular openings 28a1 and 28a2 having a diameter substantially equal to that of the openings 29c and 29d are formed so as to face the openings 29c and 29d, respectively, in a region including the flat surface portion 28d and the chamfered portion 28a4 of the terminal portion 28 a. The height of the openings 29c and 29d is set so that the centers of the openings 29c and 29d substantially coincide with the center of the ball 27 when the ball 27 passes through the opening 29b and drops into the receiving portion 29 (the upper surface of the gripped portion 28 e), and the clearance between the inner surface of the receiving portion 29 and the ball 27 is set so that the ball 27 can move only by, for example, about 5% to 30% (e.g., about 10%) of the diameter of the ball 27.
As shown in fig. 4 (B), a1 st detection device 94A is disposed above the turntable 79 on which the discharge lamp 1 is placed in the storage portion 54, and the 1 st detection device 94A includes: an irradiation unit 94Aa for irradiating the center of the openings 28a1 and 28a2 (or the openings 29c and 29d of the housing 29) of the terminal unit 28a of the discharge lamp 1 with the light beam LB 1; and a light receiving unit 94Ab for detecting the light beam LB1 passing through the openings 28a1, 28a2, 29c, and 29d in a state where the ball 27 does not fall into the housing unit 29, and a detection signal of the light receiving unit 94Ab is supplied to the light source control system 32. Since light beam LB1 cannot be detected by light receiving unit 94Ab in a state where ball 27 has fallen into storage unit 29, it is possible to detect whether or not ball 27 is present in storage unit 29, that is, whether discharge lamp 1 is used up or unused, by using 1 st detection device 94A. In other words, it is possible to detect whether the discharge lamp 1 is used up or unused by changing the state of the ball 27 with respect to the housing portion 29. The storage unit 29 and the spherical body 27 can be regarded as a device to be detected for detecting whether the discharge lamp 1 is used up or unused. The ball 27 can be said to be a movable part because it moves in the housing 29.
Further, a2 nd detection device 94B is provided below the turntable 79 of the storage portion 54, and the 2 nd detection device 94B includes: an irradiation unit 94Ba for irradiating a position near the center of the fixing unit 26h of the base unit 26 of the discharge lamp 1 with a light beam LB 2; and a light receiving unit 94Bb for detecting the light beam LB2 passing through the position in a state where the discharge lamp 1 is not present, and a detection signal of the light receiving unit 94Bb is supplied to the light source control system 32. Since the light receiver 94Bb cannot detect the light beam LB2 in a state where the fixed portion 26h is located in the optical path of the light beam LB2, the presence or absence of the discharge lamp 1 at a predetermined position on the turntable 79 can be detected by the 2 nd detector 94B.
The base part 28 of the present embodiment is provided at an end of the rod-like part 25c of the glass tube 25 by bolts (not shown) provided in a plurality of openings (not shown) of the recessed part 28e1 of the gripped part 28e, and is connected to a metal connecting part 25d electrically connected to the anode EL 1. Therefore, the base part 28 can be detached after the use of the discharge lamp 1, and the detached base part 28 can be reused when manufacturing a new discharge lamp 1. The base part 28 may be integrated with the glass tube 25 by bonding, welding, or the like.
Fig. 5 shows a state in which the cable 24 is connected to the anode-side base portion 28. In fig. 5, a metal (conductive) member (hereinafter referred to as a power feeding block) 66 is connected to an end portion of the cable 24, and the member 66 is formed with a V-shaped groove portion 66a having the same angle as the flat portions 28b and 28c of the terminal portion 28a of the base portion 28. The power feeding block 66 is fixed to the lower end of an L-shaped reference lever 67, an L-shaped drive lever 69 is rotatably coupled to the reference lever 67 via a coupling pin P51, and a roller 70 is rotatably fixed to the lower end of the drive lever 69 via a coupling pin P52. The roller 70 is pressed against the flat surface portion 28d of the terminal portion 28a of the base portion 28 on the side opposite to the flat surface portions 28b and 28 c. In addition, a recess (not shown) having a size capable of accommodating the roller 70 may be formed in the flat surface portion 28 d.
When the power feeding block 66 is coupled to the terminal portion 28a as described later, the reference rod 67 and the driving rod 69 are formed as thin as possible in order to reduce stress acting on the discharge lamp 1 as much as possible (in order to increase flexibility of the reference rod 67 and the driving rod 69), and further, in order to reduce the amount of light shielding of the light collected by the elliptical mirror 2. In fig. 5, the reference bar 67 is formed by connecting both end portions of 2L-shaped members (the other end portion is not shown), but the reference bar 67 may be formed of 1L-shaped member.
The clamping mechanism 52 is constituted by a power supply block 66, a reference lever 67, and a drive lever 69. The other end sides of the reference lever 67 and the drive lever 69 are formed to be elongated as shown in fig. 4 (B). In a state where the groove portion 66a of the power feeding block 66 is pressed in close contact with the flat surface portions 28b and 28c of the terminal portion 28a of the base portion 28, the roller 70 at the tip end portion of the drive lever 69 is pressed against the flat surface portion 28d of the terminal portion 28a, and the drive lever 69 is rotated counterclockwise about the connecting pin P51 (fulcrum), whereby the terminal portion 28a can be stably sandwiched between the roller 70 and the power feeding block 66 by the principle of leverage. In this state, the power (current) of the cable 24 is supplied to the base part 28 through the power supply block 66 with a small resistance, so that the loss of power is reduced. When the cable 24 (power feeding block 66) is detached from the base portion 28 (terminal portion 28a), the drive lever 69 may be rotated clockwise.
The terminal portion 28a of the base portion 28 can reduce the resistance (contact resistance) with the power feeding block 66 by the V-shaped flat portions 28b and 28 c. Instead of providing the roller 70 at the distal end portion of the drive lever 69, the distal end portion may be shaped into an arc, and the arc portion may be pressed against the flat surface portion 28 d.
The shape of the terminal portion 28a of the cap portion 28 on the anode side is not limited to the shape shown in fig. 2(B), and the sectional shape may be a square or a polygon.
In fig. 4 (a) and (B) and the like, the shapes of the base parts 26 and 28 of the discharge lamp 1 are simplified for convenience of description.
Next, fig. 4 (a) is a plan view showing the inside of the globe 31 and the housing 51 of the light source device 30 of fig. 1, and fig. 4 (B) is a side view showing the light source device 30 of fig. 4 (a). In fig. 4 (a) and (B) and fig. 6 (a) and (B) referred to below, the globe 31, the housing 51, the support member 33 for supporting the discharge lamp 1, and the like, and the pullout portion 36 are shown in cross section.
In fig. 4 (a) and (B), the globe 31 is divided into a lower housing 31A that houses the discharge lamp 1 and an upper housing 31B that houses the mirror 3 and has the window member 4 provided on a side surface thereof. An opening 31Ab for passing light from the discharge lamp 1 is provided on a surface adjacent to the outer shells 31A, 31B, and an opening 31Aa for passing the discharge lamp 1 or the like at the time of replacement of the discharge lamp 1 is provided on a side surface in the + X direction of the lower outer shell 31A. A case 51 of the replacement device 50 is provided on a side surface of the lower case 31A in the + X direction, and an opening 51A through which the discharge lamp 1 and the like pass is provided on a side surface of the case 51 facing the opening 31 Aa.
A window 51b for carrying in and out the discharge lamp 1 is provided on a side surface of the housing 51 in the + X direction, and the window 51b is opened and closed by a door (hereinafter referred to as a lamp replacement door) 45. The housing 51 of the exchange device 50 is coupled to the lower case 31A by a coupling member or the like, not shown, so that the positional relationship does not deviate. A storage part 54 for the discharge lamp 1 is provided near a window part 51b at the end in the + X direction in the housing 51, and a lamp conveyance system 56 is disposed at an upper part in the housing 51. Further, although not shown, the casing 51 is provided with an outside air intake port and a filter for removing dust and the like from the taken-in outside air.
Further, 1 pair of guide portions 41 parallel to the X direction are provided so as to face each other on 2 side surfaces in the Y direction of the lower housing 31A, the drawn portion 36 is disposed so as to be movable in the X direction along the guide portions 41, and the discharge lamp 1 is supported at the center portion of the drawn portion 36 via the support member 33. As the guide member 41, for example, a telescopic (multi-stage) guide mechanism may be used. Further, the elliptical mirror 2 is provided in the extension portion 36 so as to surround the discharge lamp 1, the elliptical mirror 2 is provided with a circular opening 2a (see fig. 4 a), and the light blocking member 42 having a shape like a truncated cone side surface is disposed in an upper portion of the lower housing 31A so as to cover the clamp mechanism 52 coupled to the base portion 28 of the discharge lamp 1. An opening (not shown) through which the discharge lamp 1 and the clamp mechanism 52 pass when the discharge lamp 1 is replaced is provided on the side surface of the light shielding member 42 in the + X direction.
The replacement device 50 includes, in addition to the driving unit 34 for the base part 26 on the cathode side, the clamping mechanism 52 for the base part 28 on the anode side, the storage part 54, and the lamp conveyance system 56, a pull-out driving unit 60 for pulling out the pull-out part 36 from the lower housing 31A through the openings 31Aa and 51A toward the housing 51, and a driving unit 72 for clamping and releasing the base part 28 by the clamping mechanism 52. As shown in fig. 4 (a), the pull-out drive unit 60 includes, on the bottom surface in the housing 51, on the-Y direction side of a straight line passing through the center of the lower case 31A and parallel to the X axis: a guide member 61 arranged along the X direction; a base 62 disposed movably in the X direction along the guide member 61; a driving unit 63 of, for example, a ball screw type, a belt driving type, a linear motor type, or the like, which drives the base 62 along the guide member 61 in the X direction; and a coupling member 43. The coupling member 43 couples a front end portion 62a protruding in the + Y direction and protruding in the Z direction at an end portion on the-X direction side of the base 62 to a protruding coupled portion 36c provided at the center portion in the Y direction at an end portion in the + X direction of the pull-out portion 36.
By moving the base 62 along the guide member 61 in the + X direction by the driving unit 63 of the pull-out driving unit 60, the pull-out unit 36 in the lower housing 31A can be moved (pulled out) to a position where the discharge lamp 1 supported by the pull-out unit 36 enters the housing 51. Further, since the drawn-out portion 36 is supported by the guide member 41 and the drawn-out portion 36 can smoothly move in the X direction along the guide member 41, a load of the drawn-out portion 36 hardly acts on the base 62. Therefore, as the pull-out driving means 60, a mechanism that moves the pull-out portion 36 in the X direction only by, for example, an air cylinder may be used instead of the mechanism that uses the guide member 61.
The driving unit 72 for driving the chucking mechanism 52 of the base part 28 of the discharge lamp 1 includes: a guide member 73 fixed to the upper surface of the base 62 and arranged along a direction slightly (e.g., about 15 degrees) clockwise inclined with respect to the X axis (hereinafter referred to as a retreat direction D of the clamp mechanism 52) (see fig. 4 a); a flat plate-shaped movable table 75 mounted on the guide member 73 via 2 sliders 74 and movable in the retreat direction D; a driving unit 77 such as an air cylinder or an electromagnetic cylinder for driving the movable table 75 in the retreat direction D with respect to the base 62; and a support member 65 elongated in the Z direction fixed to the upper surface of the movable table 75. A relay member 64 elongated in the Z direction is fixed to an end portion of the upper surface of the movable stage 75 in the-X direction, the other end of the cable 24 is connected to an upper portion of the relay member 64, and the other end of the cable 23 connected to the support member 33 is connected to a central portion of the relay member 64 in the Z direction through an opening provided in the draw-out portion 36. The cables 23 and 24 are also connected to the power supply unit 20 in fig. 1 via flexible extension cables (not shown).
Fig. 7 (a) shows a detailed structure of the clamp mechanism 52 and the drive unit 72. In fig. 7a, the end portion of the reference lever 67 in the + X direction of the clamp mechanism 52 is supported at the upper end of the support member 65 via a short linear guide 71H so as to be capable of fine movement in a movable direction D1 (axial direction) parallel to the retreat direction D of fig. 4 a. In addition, the drive unit 72 has: a tension coil spring 68 having one end fixed to a bottom portion near the + X direction end of the reference lever 67 and pulling the + X direction end of the drive lever 69 upward; and a driving unit 76 such as an air cylinder or an electromagnetic cylinder having one end fixed to the upper surface of the movable table 75 and capable of displacing the end portion of the driving rod 69 in the + X direction downward (-Z direction). One end of the driving unit 76 is coupled to the movable stage 75 via a rotatable joint 76 a. The distal end portion of the movable element of the driving portion 76 and the end portion of the drive lever 69 are coupled via a rotatable joint 76 b. For example, a so-called U-joint (clevises joint) may be used as the joint 76a, and a so-called fork joint (knuckle joint) may be used as the joint 76 b.
In the state of fig. 7 (a), since the driving portion 76 does not apply a force to the end portion of the driving lever 69, a force counterclockwise with respect to the reference lever 67 is applied to the driving lever 69 by the tension coil spring 68. Thus, the roller 70 provided at the end of the drive lever 69 in the-X direction urges the terminal portion 28a of the base portion 28 toward the power supply block 66, and therefore, the terminal portion 28a is stably held by the power supply block 66 and the roller 70. At this time, even if the distance between the movable stand 75 and the discharge lamp 1 deviates from the target value, the deviation amount can be cancelled by the movement of the reference rod 67 in the movable direction D1 via the linear guide 71H.
Next, when the terminal portion 28a is to be released from the clamping by the clamping mechanism 52, the end portion of the drive lever 69 is pulled downward by the drive portion 76, and the roller 70 is moved to a position higher than the terminal portion 28a, as shown in fig. 7 (B). At this time, the end of the driving rod 69 is positioned close to the discharge lamp 1, but the driving portion 76 is slightly rotated by the joint 76a in accordance with this, and therefore, stress that deforms the driving rod 69 does not act. In this state, the movable stand 75 is moved in the retreat direction D in the direction indicated by the arrow a2 by the driving unit 77 in fig. 4 (B), whereby the clamp mechanism 52 and the cable 24 can be pulled away from the base 28.
Further, the lamp conveying system 56 includes: 3 claw portions 86 for holding the held portion 28e of the cap portion 28 on the anode side of the discharge lamp 1 from above; a grasping claw opening/closing mechanism 85 for opening and closing the claw portions 86; a Z-axis drive mechanism 84 for holding the discharge lamp 1 and moving it up and down (Z direction); a rotation shaft 83 for rotating the Z-axis drive mechanism 84 around an axis parallel to the Z-axis; and a support portion 82 for supporting the swivel shaft 83 on the top wall portion of the housing 51.
Fig. 9 (a) is a plan view showing a state where the gripped portion 28e of the base portion 28 is gripped by the 3 claw portions 86, and fig. 9 (B) is a side view of fig. 9 (a). As shown in fig. 9 (a), when the discharge lamp 1 is gripped by the lamp conveying system 56, the gripping claw opening/closing mechanism 85 is positioned so that the concave surfaces provided at the distal end portions of the 3 gripping claws 86 respectively face the spherical surfaces of the gripped portions 28 e. In this state, as shown in fig. 9 (B), the gripping claw opening/closing mechanism 85 moves (closes) the 3 claw portions 86 in the center direction, and closes the 3 claw portions 86 until the concave surfaces of the 3 claw portions 86 come into contact with the spherical surface of the gripped portion 28 e. Since the 3 claw portions 86 are connected to the grasping claw opening/closing mechanism 85 via spring mechanisms (not shown) that are displaceable in the radial direction, no stress acts on the base portion 28 to deform the base portion. In order to hold the base part 28 more stably, a convex part (pin) may be provided on the inner surface of the claw part 86, and a concave part for receiving the convex part may be provided in a corresponding part of the gripped part 28 e.
In fig. 4 (a) and (B), the storage unit 54 includes: a rotatable turntable 79 provided with a plurality of (6 in fig. 4 a) openings 79a (see fig. 11) concentrically for placing a used discharge lamp 1 and an unused discharge lamp 1 (hereinafter also referred to as a discharge lamp 1N); and a driving section 80 for rotating the turntable 79. The number of the openings 79a is the number of the discharge lamps 1, 1N that can be stored in the turntable 79, and the number of the discharge lamps 1, 1N that can be stored is arbitrary. For example, the turntable 79 is made of an insulating material having high heat resistance, such as a synthetic resin. The tip end portion of the base portion 26 on the cathode side of the discharge lamp 1 or 1N is inserted into the opening 79a, and the discharge lamp 1 or 1N is placed on the turntable 79 by its own weight via the flange portion 26a (see fig. 1 a) of the base portion 26.
As shown in fig. 12, positioning members 87 having a recess at the center and a semicircular cross section are provided on the side surfaces of the turntable 79 corresponding to the plurality of openings 79a, and plate spring portions 88 having projections engageable with the recesses of the positioning members 87 and deformable in the radial direction of the turntable 79 are arranged in the side surface direction of the turntable 79. When the positioning member 87 is engaged with the plate spring portion 88 (elastic member) by rotating the turntable 79 about the rotation shaft 79b, the rotation of the turntable 79 is stopped, and thereby the position of the opening 79a can be accurately positioned at the position where the discharge lamp 1 or 1N is delivered to the lamp conveying system 56.
As shown in fig. 11, a rotating unit 96 for rotating the discharge lamp 1N is disposed at the delivery position of the discharge lamps 1 and 1N below the turntable 79 as necessary. For example, the rotating portion 96 includes: a cylindrical rotating portion 95 rotatably coupled to a support portion (not shown) coupled to the bottom surface; pinch portions 96A, 96B, and 96C (pinch portion 96C is not shown) driven in the radial direction with respect to the rotating portion 95 by 3 driving portions 97A, 97B, and 97C (driving portion 97C is not shown) in order to fix the shaft portion 26B of the base portion 26 of the discharge lamp 1N inserted into the rotating portion 95; a gear 98a for rotating the rotary unit 95; and a drive portion 98 that drives the gear 98 a. The rotating unit 95 is provided with an encoder (not shown) for detecting a rotation angle, a detection result of the encoder is supplied to the light source control system 32, and the light source control system 32 controls the driving amount of the driving units 98 and 97A to 97C using the detection result and the like. Further, a lifting unit (not shown) is provided to retract the entire rotating unit 96 downward of the base unit 26, and normally the rotating unit 96 is retracted downward of the base unit 26. In the state of fig. 11, the 2 nd detection device 94B is disposed below the rotation portion 96, and the 1 st detection device 94A is disposed above a surface of the turntable 79 opposite to the surface having the rotation portion 96.
An example of an operation when the discharge lamp 1 is replaced by the replacement device 50 in the light source device 30 of the present embodiment will be described below. The replacement action is controlled by the light source control system 32. First, before the unused discharge lamp 1N is mounted on the exposure apparatus EX, when an energization test (light emission test) of the discharge lamp 1N is performed, the base parts 28 and 26 are energized in a state where the base part 28 is directed downward so that the ball 27 does not fall into the housing part 29. After the end of energization, the base portion 28 is directed downward until the temperature of the base portion 28 returns to the vicinity of the normal temperature. This can prevent the discharge lamp 1N that is not actually used from being judged as used up.
First, as shown in fig. 4a, the operator (not shown) opens the lamp replacement door 45 of the housing 51 of the replacement device 50, inserts the base part 26 of the unused discharge lamp 1N into the opening 79a of the turntable 79 of the storage part 54, and attaches the base part 26 of the discharge lamp 1N to the turntable 79 via the flange part 26a of the base part 26 (supplement of the discharge lamp). The dial 79 can be manually rotated in a power-off state, and as described with reference to fig. 12, the rotation angle of the dial 79 can be accurately set manually by rotating the dial 79 so that the predetermined positioning member 87 engages with the plate spring portion 88.
It is preferable that the discharge lamp is replenished in a state where the supply of electric power from the power supply unit 20 in fig. 1 is stopped and the discharge lamp 1 in the lower housing 31A in fig. 4 (B) is extinguished. However, measures may be taken to prevent the light of the discharge lamp 1 in the lower housing 31A from leaking to the outside, and the turntable 79 may be formed of an insulating material, whereby the lamp can be replaced with the turntable 79 even during lighting of the discharge lamp 1. As an example, in fig. 4 (a), the discharge lamps 1 and 1N can be arranged (supplemented) 6 on the turntable 79. However, in order to recover the used-up lamp, a space is reserved in the turntable 79. Fig. 4 (a) and (B) show a case where the discharge lamp 1 is placed in the globe 31, and therefore 5 discharge lamps 1N are arranged on the turntable 79. Thereafter, the lamp replacement door 45 is closed.
When the cumulative usage time of the discharge lamp 1 reaches the allowable time, the light source control system 32 transmits information indicating the cumulative usage time to the main control system 14, and the main control system 14 stops the exposure operation of the exposure device EX. Then, the light source control system 32 stops the supply of electric power from the power supply unit 20 to the discharge lamp 1 to turn off the discharge lamp 1, and then operates the replacement device 50 to replace the discharge lamp 1 with the discharge lamp 1N stored in the storage unit 54.
That is, first, in fig. 4 (B), the pull-out portion 36 that integrally supports the discharge lamp 1 and the elliptical mirror 2 in the globe 31 is pulled out to a predetermined position in the + X direction by the pull-out driving unit 60 as indicated by an arrow a 1. As a result, the draw-out portion 36 is drawn out to the position shown in fig. 6 (B). At this time, the clamp mechanism 52, the relay member 64, and the drive unit 72 are also integrally drawn out into the housing 51 in the + X direction together with the draw-out portion 36. Fig. 6 (a) is a plan view showing a part of the drawing portion 36 and the exchanging device 50 in fig. 6 (B) in a cross section. In fig. 8, fig. 10 (B), and the like, which are referred to below, some of the plurality of discharge lamps 1N are not shown in order to avoid complexity of the drawing.
Next, as described with reference to fig. 7B, the driving rod 69 of the clamp mechanism 52 is pulled downward by the driving portion 76 of the driving unit 72, and the roller 70 that strongly presses the terminal portion 28a of the base portion 28 of the discharge lamp 1 against the power feeding block 66 is rotated about the connecting pin P51 (fulcrum), so that the roller 70 is separated from the terminal portion 28a to be at a position higher than the terminal portion 28 a. Thereafter, the movable table 75 supporting the clamping mechanism 52 and the driving unit 76 is retracted in the retraction direction D in the direction indicated by the arrow a2 by the driving unit 77 (see fig. 4B). At this time, the roller 70 passes over the base 28.
Then, as shown in fig. 8, the driving unit 40 of the driving unit 34 rotates the lever 38 clockwise to release the clamping of the fixing portion 26h of the base portion 26 on the cathode side. Thereby, the base part 26 can be pulled out from the support member 33. In order to avoid the complexity of the drawing, the driving unit 34 for the base part 26 is not shown in fig. 10 (B) and the like, which will be referred to below.
Next, the swing shaft 83 of the lamp conveying system 56 is swung to move the grasping claw opening/closing mechanism 85 upward of the base 28 of the discharge lamp 1. Then, as indicated by an arrow a3, the gripper opening/closing mechanism 85 is lowered by the Z-axis drive mechanism 84 of the lamp transport system 56, and the gripper opening/closing mechanism 85 closes 3 gripper portions 86 on the bottom surface thereof to grip the gripped portion 28e of the base portion 28 (see fig. 9B). Thereafter, as shown by an arrow a5 in fig. 10 (B), the claw portion 86 holding the discharge lamp 1 is raised by the Z-axis driving mechanism 84. At this time, the discharge lamp 1 is raised until the lower end of the base part 26 on the cathode side of the discharge lamp 1 is at a position higher than the upper surface of the drawn part 36 (i.e., a position higher than the upper surface of the elliptical mirror 2).
Then, as shown by an arrow a6 in fig. 10 (a), the grasping claw opening/closing mechanism 85 grasping the discharge lamp 1 is rotated by about 180 degrees by the rotation shaft 83, and the discharge lamp 1 is moved upward of the turntable 79. At this time, the turntable 79 is rotated by the driving unit 80 of the storage unit 54, and the empty opening 79a of the turntable 79 is moved to the lower side of the grasping claw opening and closing mechanism 85 (discharge lamp 1). In this state, the grasping claw opening/closing mechanism 85 is lowered, and after the tip end portion of the base portion 26 of the discharge lamp 1 is accommodated in the opening 79a, the claw portion 86 is opened, whereby the used discharge lamp 1 is placed at the position a7 of the turntable 79 as shown in fig. 11. At this stage, the rotating portion 96 is retracted to below the base portion 26 by an elevating portion (not shown).
The following replacement operation of the discharge lamp will be described with reference to the flowchart of fig. 13. First, in fig. 11, the gripper opening/closing mechanism 85 of the lamp transport system 56 is raised. Then, in step 202 of fig. 13, it is checked by the 2 nd detection device 94B whether or not the base part 26 on the cathode side of the discharge lamp 1 is present (whether or not the discharge lamp 1 is located at the position a 7). At this stage, since the base part 26 is present, the operation proceeds to step 204, and it is checked by the 1 st detection device 94A whether or not the light beam LB1 passes through the openings 28a1 and 28a2 of the anode-side base part 28 (whether or not the discharge lamp 1 is used up and whether or not the ball 27 of the base part 28 falls into the housing 29).
When the light beam LB1 cannot be detected, the rotating unit 96 is raised, and the discharge lamp 1 is rotated within a range of about ± 60 degrees while the light beam LB1 is continuously detected by the light receiving unit 94Ab, for example. The operator sets the rotation angle of the discharge lamp 1 to an accuracy of about ± 30 degrees with respect to the target angle in advance. Then, when the light beam LB1 can be detected at a certain rotation angle, the angle of the discharge lamp 1 is set to the rotation angle at which the amount of light detected by the light receiving section 94Ab becomes maximum. Then, the rotating portion 96 is retracted downward. When the angle of the discharge lamps 1 and 1N placed on the turntable 79 is set to a target angle (the angle at which the light amount of the light beam LB1 detected by the light receiving unit 94Ab is substantially maximized in the case of the unused discharge lamp 1N) by the lamp conveying system 56 and the operator, the operation of correcting the rotation angle of the discharge lamps 1 and 1N can be omitted.
In this stage, the light source control system 32 is able to confirm that the discharge lamp 1 is used up, because the discharge lamp 1 is used up and the light beam LB1 is shielded by the ball 27. Then, whether the dial 79 has rotated 360 degrees is checked (step 212), and if the dial 79 has not rotated 360 degrees, the dial 79 is rotated 60 degrees, for example, and the process proceeds to step 202 in step 214. Here, for convenience of explanation, the discharge lamp 1N at the position a9 is moved to the optical path of the luminous fluxes LB1 and LB2 of the detection devices 94A and 94B.
Thereafter, it is confirmed whether or not there is the base part 26 of the discharge lamp 1N (step 202), and whether or not the light beam LB1 passes through the openings 28a1, 28a2 of the base part 28 (step 204). When the luminous flux LB1 cannot be detected at this time, the rotating unit 96 may be raised to rotate the discharge lamp 1N so that the detected amount of luminous flux LB1 becomes maximum. Here, since the discharge lamp 1N is not used and the spherical body 27 does not shield the light beam LB1, the light source control system 32 can confirm that the discharge lamp 1N is not used. Thereafter, the operation proceeds to step 206, and the discharge lamp 1N is conveyed to the support member 33. In step 202, if the base part 26 on the cathode side is not present, the operation proceeds to step 212. In step 212, if the unused discharge lamp 1N cannot be confirmed even if the turntable 79 is rotated 360 degrees, the process proceeds to step 216, where the operator is requested to replenish the discharge lamp 1N.
Then, in step 206, the grasping claw opening/closing mechanism 85 is lowered again, and after the grasped part 28e of the base part 28 of the unused discharge lamp 1N is grasped by the claw part 86, the grasping claw opening/closing mechanism 85 is raised. Then, by the operation reverse to the discharge lamp 1 carrying-out operation, the grasping claw opening/closing mechanism 85 is rotated by about 180 degrees by the rotating shaft 83 as indicated by the broken-line arrow B1 in fig. 10 (a), and the grasping claw opening/closing mechanism 85 grasping the discharge lamp 1N is lowered as indicated by the broken-line arrow B2 in fig. 10 (B), and the base part 26 on the cathode side of the discharge lamp 1N is placed on the support member 33. Then, as shown by a broken line arrow B3 in fig. 8, the grasping claw opening/closing mechanism 85 is raised, and as shown in fig. 6 (B), the holder portion 26 on the cathode side is held by the support member 33 by the drive unit 34.
Further, as shown in fig. 7B, the movable stand 75 supporting the clamp mechanism 52 is moved in the direction indicated by the arrow B4 (the direction toward the discharge lamp 1N) in the retreat direction D by the driving unit 77 of fig. 8, and the power feeding block 66 is brought into contact with the terminal portion 28a of the base portion 28 of the discharge lamp 1N. Then, the driving portion 76 pushes out the movable portion (in the case of an air cylinder, the suction force gradually weakens), and the driving lever 69 is rotated about the connecting pin P51 by the force of the tension coil spring 68, so that the roller 70 comes into contact with the terminal portion 28a to strongly press the terminal portion 28a against the power feeding block 66. As a result, the anode-side base part 28 can be supplied with electric power without loss of electric power.
At this time, since the base part 26 on the cathode side of the discharge lamp 1N is fixed to the support member 33 by the driving means 34 (see fig. 6B), if the position of the power feeding block 66 is shifted with respect to the base part 28 on the anode side in a state where the position of the power feeding block 66 in the retreat direction D is fixed, a large force may be applied to the discharge lamp 1N, and the discharge lamp 1N may be damaged. In order to prevent this, in the present embodiment, as shown in fig. 7 (a), since the reference rod 67 to which the power feeding block 66 is attached can be moved in the direction D1 (in the radial direction with respect to the discharge lamp 1N) by the linear guide 71H, the positioning error of the power feeding block 66 can be corrected (absorbed). As the error absorbing mechanism, for example, the movable stage 75 may be freely moved in the direction D1.
The clamp mechanism 52 for the base part 28 is low in rigidity in the rotational direction and the swiveling direction of the drive lever 69 (rotational direction about an axis parallel to the Z axis), and can absorb positioning errors in the rotational direction and the swiveling direction by the flexure of the reference lever 67 and/or the drive lever 69. Further, since the groove portion 66a (see fig. 5) as the contact surface with the base portion 28 of the power feeding block 66 has a constant V-shape in cross section regardless of the Z-direction position, there is no problem even if the Z-direction position is displaced between the base portion 28 and the power feeding block 66.
As shown in fig. 6 (B), after the clamping of the base part 28 of the discharge lamp 1N by the power feeding block 66 by the clamp mechanism 52 is completed, the base 62 is moved in the-X direction by the pull-out driving unit 60 as shown by a broken line arrow B5 in fig. 4 (B), and the pull-out part 36 is returned to the home position in the lower housing 31A. Thereby, the used discharge lamp 1 is replaced with an unused discharge lamp 1N. Then, the discharge lamp 1N is turned on by the exposure apparatus EX to perform exposure (step 210).
According to the replacement method of the discharge lamp of the present embodiment, the spherical body 27 (movable body) is disposed in the terminal portion 28a of the base portion 28 of the discharge lamp 1, and when the temperature of the base portion 28 rises during use of the discharge lamp 1, the spherical body 27 passes through the opening 29b of the housing portion 29 in the terminal portion 28a and falls into the housing portion 29. When the discharge lamp 1 is placed on the turntable 79 of the storage part 54, the light beam LB1 of the 1 st detection device 94A is blocked by the ball 27 passing through the terminal part 28a, and it can be easily confirmed that the discharge lamp 1 is used up. Therefore, when the discharge lamp 1 is replaced with the unused discharge lamp 1N in a fully automatic manner, it is possible to prevent the used discharge lamp 1 from being attached to the support member 33 of the light source device 30 again by mistake.
The exposure apparatus EX of the present embodiment includes a light source apparatus 30 for emitting light from the discharge lamp 1 (exposure light source). The discharge lamp 1 further includes: a glass tube 25 (glass member) having an anode EL1 (1 st electrode) and a cathode EL2 (2 nd electrode) for forming a light-emitting part therein; and a base part 28 (1 st base member) and a base part 26 (2 nd base member) provided so as to sandwich the glass tube 25, the base part 28 being provided with a through hole (opening) including openings 28a1, 28a2, 29c, and 29 d.
Further, the light source device 30 includes: a storage part 54 for storing the discharge lamp 1; a lamp conveyance system 56 (conveyance unit) for conveying the discharge lamp 1; an irradiation section 94Aa (light transmitting section) for allowing the light beam LB1 to enter the through hole of the base section 28 of the discharge lamp 1; a light receiving unit 94Ab for detecting the light beam LB1 passing through the through hole; and a light source control system 32 (control unit) for determining the angle of the discharge lamp 1 as the state of the discharge lamp 1 by using the detection result of the light receiving unit 94 Ab.
According to this embodiment, for example, the angle of the discharge lamp 1 can be detected by rotating the discharge lamp 1 and obtaining the angle of the discharge lamp 1 when the detected light amount of the luminous flux LB1 is maximum. Using this angle, for example, the angle of the discharge lamp 1 can be set to a target angle, and therefore, when the discharge lamp 1 is not rotationally symmetric, the discharge lamp 1 can be easily held by the lamp conveyance system 56. Therefore, the discharge lamp 1 can be efficiently replaced.
The exposure apparatus EX of the present embodiment includes: the light source device 30 described above; an illumination optical system 13 (illumination system) for illuminating the mask M with light (exposure light IL) generated from the discharge lamp 1 of the light source device 30; and a projection optical system PL that projects an image of the pattern of the mask M onto a plate P (substrate) based on the exposure light IL. According to the exposure apparatus EX, the replacement time of the discharge lamp 1 can be shortened, and thus the throughput of the exposure process can be improved.
The above-described embodiment can be modified as follows.
First, in the above-described embodiment, the spherical body 27 is disposed in the terminal portion 28a of the base portion 28 of the discharge lamp 1, but the spherical body 27 may be omitted. In this case, the spherical body 27 and the housing portion 29 may be omitted, the terminal portion 28a may be formed in a substantially prismatic shape, and the through-hole may be formed so as to pass through the same position as the openings 28a1 and 28a 2. The through hole is irradiated with the light beam LB1 from the 1 st detection device 94A, and the light quantity of the light beam LB1 is detected by the light receiving unit 94Ab while the discharge lamp 1 is rotated, whereby the rotation angle of the discharge lamp 1 can be detected.
In the above-described embodiment, the power supply block 66 is supplied with power using the cable 24, but the power supply block 66 (discharge lamp 1) may be supplied with power using (conducting) the reference rod 67 and the power supply block 66 without using the cable 24. In addition, not only the power supply block 66 but also the compressed air for cooling the base part 28 may be supplied to the discharge lamp 1.
The clamp mechanism driving unit 72 in fig. 7a is configured to open and close the reference lever 67 and the driving lever 69 of the clamp mechanism 52 in the vertical direction (Z direction), but may be configured to open and close in the lateral direction (direction perpendicular to the longitudinal direction of the discharge lamp 1). By this, when the clamp mechanism 52 is moved in the X direction by the drive unit 77, the roller 70 at the tip end of the drive lever 69 does not need to be retracted to a position higher than the base 28. That is, only by the opening and closing operation of the clamp mechanism 52, the components of the clamp mechanism 52 are no longer present above the discharge lamp 1, and therefore the discharge lamp 1 can be conveyed in the Z direction.
[ 2 nd embodiment ]
Fig. 14 (a) and (B) show an anode-side base part 28A of the discharge lamp 1A of the present embodiment, and a power supply socket 152 for detachably connecting the base part 28A and the cable 24A, respectively. In fig. 14 (a) and (B), the anode base portion 28A includes: a gripped part 28Ae having a spherical outer surface and connected to the connecting part 25d at the end of the rod-shaped part 25c of the glass tube 25 of the discharge lamp 1A; a heat radiating portion 28Ai having a plurality of annular heat radiating fins 28Aj provided at the lower end of the gripped portion 28Ae so as to cover a part of the rod-like portion 25 c; a terminal portion 28Aa provided at the upper end of the gripped portion 28 Ae; a cylindrical box-shaped housing portion 29A disposed in the terminal portion 28Aa and the gripped portion 28 Ae; and a spherical body 27 having a thermal expansion coefficient smaller than that of the housing portion 29A, and placed so as to cover the circular opening 29Ab (which is provided in the center of the upper portion 29Aa of the housing portion 29A) in a state where the discharge lamp 1A is not used. Terminal portion 28Aa has a 2-step cylindrical portion gradually decreasing in diameter toward the front end, a recessed portion 28Ab is formed at the upper end of substantially axisymmetric terminal portion 28Aa, and a mountain-shaped protruding portion 28Ac is provided in the middle of recessed portion 28 Aa.
The housing portion 29A is disposed in a recess formed in the gripped portion 28Ae and the terminal portion 28Aa, and the housing portion 29A is biased toward the connecting portion 25d by the compression coil spring SP1 on the terminal portion 28Aa side. The diameter of the opening 29Ab is specified as follows: the diameter of the opening 29Ab is smaller than the diameter of the spherical body 27 at the temperature when the discharge lamp 1A is stored, and the diameter of the opening 29Ab becomes larger than the diameter of the spherical body 27 due to the thermal expansion of the housing 29A in a state where the temperature of the discharge lamp 1A is increased by lighting the discharge lamp 1A. Thus, when the discharge lamp 1A is used, the ball 27 passes through the opening 29Ab and drops onto the bottom 29Ae in the housing 29A. Instead of providing the compression coil spring SP1, a step may be provided in the space in which the housing portion 29A is disposed (for example, in the terminal portion 28 Aa) so that the upper portion is narrower than the lower portion, and the housing portion 29A may be disposed so that the lower surface of the step comes into contact with the upper surface of the housing portion 29A, whereby the housing portion 29A cannot be moved upward. In this case, the space in the upper portion, which is narrower than the lower portion, may be of a size in which the ball 27 can be disposed.
Further, a circular through hole 28Ae1 having a diameter smaller than that of the ball 27 is provided in the gripped portion 28Ae along a straight line passing through the center axis of the glass tube 25 and the center of the housing portion 29A (the center of the ball 27 when the ball 27 is present in the center of the bottom portion 29 Ae) and perpendicular to the longitudinal direction of the glass tube 25, and 2 circular openings 29Ac, 29Ad having a diameter smaller than that of the ball 27 are formed in the side surface of the housing portion 29A so as to face the through hole 28Ae 1. The clearance between the inner surface of the housing portion 29A and the ball 27 is set to be, for example, about 5% to 30% (for example, about 10%) of the diameter of the ball 27 that can move by the ball 27.
When the discharge lamp 1A is not used, the irradiation unit 94Aa of the 1 st detection device 94A irradiates the beam LB1 so as to pass through the center of the through hole 28Ae1 of the discharge lamp 1A and the openings 29Ac and 29Ad of the storage unit 29A, and the light receiver 94Ab detects the beam LB1, whereby it can be confirmed that the sphere 27 has not fallen into the storage unit 29A, that is, the discharge lamp 1A is not used. After the discharge lamp 1A is used, as shown in fig. 14 (B), in a state where the spherical body 27 has fallen into the housing portion 29A, the light beam LB1 is blocked by the spherical body 27, and the light receiving portion 94Ab cannot detect the light beam LB1, so that it can be confirmed that the discharge lamp 1A is already used up.
Further, the power supply socket 152 includes: a small circular plate-shaped body portion 153; a coupling portion 154 provided on the bottom surface of the body portion 153 and capable of coming into close contact with an upper portion (tapered portion) of the recess 28Ab of the terminal portion 28 Aa; a convex portion 155 provided at the lower end of the coupling portion 154; and a plurality of (for example, at least 4) spheres 157 provided on the convex portion 155 so as to be movable in the radial direction.
Fig. 15 (a) and (B) are sectional views each showing the power supply socket 152. In fig. 15 a, the lower end 153A and the upper end 153B of the power supply socket 152, on which the connection portion 154 is provided, are connected to the body 153 by bolts (not shown) or the like, a circular recess 153Aa is formed in the center of the lower end 153A, and a small circular through-hole 153Ab is formed between the recess 153Aa and the lower end of the projection 155. A piston portion 158 for an air cylinder is accommodated in the recess 153Aa, and a shaft portion 158b having a columnar shape and a recess 158a at a distal end portion is connected to a bottom surface of the piston portion 158 so as to pass through the through hole 153 Ab. Compressed and cooled gas (e.g., air) can be supplied into the recess 153Aa through the pipe in the cable 24A and the groove 153Ac in the body 153, a compression coil spring 160 is provided between the lower end 153A and the piston 158 so as to urge the piston 158 toward the upper end 153B, and a flexible movable sealing member (e.g., an "O-ring") 159 for maintaining airtightness is disposed between the recess 153A and the piston 158. Further, the spherical bodies 157 are disposed in the plurality of openings 154a (see fig. 15B) of the convex portion 155, respectively.
As shown in fig. 15 (B), when the power supply socket 152 is attached to the terminal portion 28Aa of the base portion 28A as shown in fig. 14 (B), compressed gas is supplied from the cable 24A to the piston portion 158, the piston portion 158 is lowered, and the ball 157 is accommodated in the concave portion 158A. Thereby, the spherical body 157 of the convex portion 155 can pass through the inside of the convex portion 28Ac of the base portion 28A. Then, by stopping the supply of compressed gas from the cable 24A to the piston portion 158, the piston portion 158 rises, and as shown in fig. 14 (B), the ball 157 engages with the convex portion 28Ac, and the power supply socket 152 is stably coupled to the terminal portion 28 Aa. When the power supply socket 152 is detached from the terminal portion 28Aa, compressed gas may be supplied from the cable 24A so as to lower the piston portion 158 again.
In the above-described embodiments, the 1 st detection device 94A is disposed in the storage portion 54, but the present invention is not limited to this, and the 1 st detection device 94A may be further provided in the globe 31 instead of or in addition to the storage portion 54. In this case, in order to avoid the influence of heat generated by the discharge lamp 1, the irradiation portion 94Aa and the light receiving portion 94Ab are preferably arranged in a state of being covered with a heat insulating material or the like. It is preferable that the lamp cover 31 is disposed at a position as far as possible from the discharge lamp 1. By disposing the 1 st detection device 94A in the globe 31 in this manner, it is possible to detect whether the discharge lamp 1 is used up or unused just before the discharge lamp 1 is turned on. Further, since the presence or absence of the falling of the globe 27 (or the time point of the falling) can be detected during the lighting of the discharge lamp 1, the state of the temperature of the discharge lamp 1, the rate of increase in the temperature of the discharge lamp 1, the temperature state and the cooling state in the globe 31, and the like can be detected. Further, it is also possible to detect an abnormality in the globe 31 based on the measurement result. Further, the replacement of the discharge lamp 1 may be performed or the replacement may be prompted to be performed (including displaying the time to be performed, etc.) based on the detection result of the 1 st detection device 94A provided in the lamp housing 31.
Next, various modifications of the discharge lamp that can be used in the exposure apparatus or the light source apparatus according to embodiment 1 and embodiment 2 will be described. In the drawings used in the following description of the modified examples, the same or similar reference numerals are given to the parts corresponding to fig. 3 (B), fig. 7 (a), and fig. 14 (a) and (B), and detailed description thereof is omitted.
Fig. 16 (a) is a cross-sectional view showing an anode-side base part 28A of a discharge lamp 1B according to modification 1. In contrast to the discharge lamp 1A shown in fig. 14 (a), in the discharge lamp 1B, a compression coil spring SP2 for biasing the spherical body 27 toward the housing portion 29A is disposed between the spherical body 27 contacting the outline of the opening 29Ab of the housing portion 29A (which is disposed inside the base portion 28) and the inner surface of the terminal portion 28Aa facing the spherical body 27. The housing portion 29A is fixed to the connection portion 25d side of the discharge lamp 1B by, for example, bonding. The other structure is the same as the embodiment of fig. 14 (a).
According to this modification, since the ball 27 is biased toward the opening 29Ab of the housing 29A by the compression coil spring SP2, the position of the ball 27 does not change even if the longitudinal direction of the discharge lamp 1B is made parallel to the horizontal plane during transportation or use of the discharge lamp 1B. By providing the compression coil spring SP2, when the discharge lamp 1B is used (energized), the temperature of the base part 28A rises, and the diameter of the opening 29Ab of the housing part 29A becomes larger than the diameter of the ball 27 due to thermal expansion, and at this time, the ball 27 reliably moves into the housing part 29A through the opening 29 Ab. Therefore, when the discharge lamp 1B is kept in storage, the light beam LB1 of the detection device 94A is blocked by the spherical body 27, and therefore, whether or not the discharge lamp 1B is used can be reliably determined regardless of the posture of the discharge lamp 1B during transportation and use.
As shown in the discharge lamp 1C of the 2 nd modification of fig. 16 (B), the spherical body 27 may be moved in a direction (lateral direction) orthogonal to the longitudinal direction of the discharge lamp. In the discharge lamp 1C, a storage portion 29B is disposed in a concave portion 28Af provided on a side surface of the gripped portion 28Ae of the base portion 28A, and the storage portion 29B is cylindrical and has a circular opening 29Bb in a side wall portion facing the outside of the gripped portion 28 Ae. Further, in the recess 28Af, the cylindrical fixing portion 29C is fixed by, for example, an annular band-shaped fixing ring (not shown) so as to be in contact with the housing portion 29B, the ball 27 is disposed in the fixing portion 29C so as to be in contact with the contour of the opening 29Bb, and the compression coil spring SP2 is disposed between the ball 27 and the inner surface of the side wall portion of the fixing portion 29C so as to bias the ball 27 toward the opening 29Bb side. The diameter of the opening 29Bb is specified in the following manner: the diameter of the opening 29Bb is smaller than the diameter of the spherical body 27 at the temperature when the discharge lamp 1C is stored, and the diameter of the opening 29Bb becomes larger than the diameter of the spherical body 27 due to the thermal expansion of the housing 29B in the state where the discharge lamp 1C is caused to emit light and the temperature of the discharge lamp 1C is increased.
Further, 2 circular openings 29Bc and 29Bd having a smaller diameter than the spherical body 27 are formed in the side surface of the housing portion 29B in the direction perpendicular to the paper surface (B) of fig. 16, and are used for passing the light beam LB1 of the detection device 94A, and a through hole (not shown) for passing the light beam LB1 is also provided in the held portion 28Ae of the base portion 28A in parallel with a straight line passing through the centers of the openings 29Bc and 29 Bd. The other structure is the same as the embodiment of fig. 14 (a).
In this modification as well, since the ball 27 is biased toward the opening 29Bb of the housing 29B by the compression coil spring SP2, the position of the ball 27 does not change even if the longitudinal direction of the discharge lamp 1C is parallel to the horizontal plane or parallel to the vertical direction during transportation or use of the discharge lamp 1C. Therefore, when the diameter of the opening 29Bb of the housing 29B is larger than the diameter of the ball 27 during use (energization) of the discharge lamp 1C, the ball 27 reliably passes through the opening 29Bb and moves into the housing 29B. Therefore, when the discharge lamp 1C is stored next, the presence or absence of use of the discharge lamp 1C can be reliably determined by the detection device 94A regardless of the posture of the discharge lamp 1C during transportation and use.
Next, fig. 17 (a) and (B) are cross-sectional views showing the anode-side base part 28B of the discharge lamp 1D according to the 3 rd modification. In this modification, the ball 27 is moved in stages according to the use time of the discharge lamp 1D. In fig. 17 (a), the base part 28B includes: a gripped part 28Be connected to the connecting part 25D of the discharge lamp 1D and having a spherical outer surface; a plurality of annular fins 28Bj (heat radiating portions) provided at the lower end of the gripped portion 28 Be; and a substantially cylindrical terminal portion 28Ba provided at the upper end of the gripped portion 28 Be. A concave portion 28Bb is formed in the center of the terminal portion 28Ba, and a mountain-shaped convex portion 28Bc is provided in the middle of the concave portion 28 Bb. Terminal portion 28Ba can be coupled to coupling portion 154 of power supply socket 152 shown in fig. 14 (a) via concave portion 28Bb and convex portion 28 Bc.
Further, a1 st cylindrical housing portion 29A, a2 nd cylindrical housing portion 29D, and a spherical body 27 are disposed in the terminal portion 28Ba and the gripped portion 28Be so as to Be stacked in order from the connecting portion 25D side, the housing portion 29A is fixed to the connecting portion 25D by bonding or the like, and the housing portion 29D is fixed to the upper surface of the housing portion 29A by bonding or the like. The receiving portions 29A and 29B are sized to be able to receive the ball 27, and the thermal expansion coefficients of the receiving portions 29A and 29B are larger than the thermal expansion coefficient of the ball 27. A circular opening 29Ab is formed in the partition wall portion above the lower housing portion 29A, and a circular opening 29Db having a larger diameter than the opening 29Ab is formed in the partition wall portion above the upper housing portion 29B.
At the temperature when the discharge lamp 1D is stored, the diameter D4 of the opening 29Db is smaller than the diameter of the sphere 27, and the diameter D3 of the opening 29Ab is smaller than the diameter D4. On the other hand, in a state (1 st threshold) where the discharge lamp 1D is mounted in the exposure apparatus and the discharge lamp 1D starts to emit light and the temperature of the discharge lamp 1D rises to approximately 1/2 of the highest temperature, for example, the diameter D4 of the opening 29Db becomes larger than the diameter of the spherical body 27 due to the thermal expansion of the housing 29D, and the spherical body 27 can pass through the opening 29Db, but the diameter D3 of the opening 29Ab of the housing 29A is still smaller than the diameter of the spherical body 27, and the spherical body 27 cannot pass through the opening 29 Ab. Further, when the discharge lamp 1D continues to emit light (power is supplied) and the temperature of the discharge lamp 1D rises to substantially the highest temperature, the diameter D3 of the opening 29Ab becomes larger than the diameter of the sphere 27 due to the thermal expansion of the housing portion 29A, and the sphere 27 can pass through the opening 29Ab, so that the diameters of the openings 26Ab and 29Db are defined as described above.
Further, circular through holes 28Be1 and 28Be2 having a smaller diameter than the spherical body 27 are provided in the held portion 28Be and the terminal portion 28Ba, respectively, along a straight line passing through the center axis of the glass tube 25 (see fig. 2) of the discharge lamp 1D and the centers of the receiving portions 29A and 29D (the center of the spherical body 27 when the spherical body 27 is present in the center of the receiving portions 29A and 29D) and orthogonal to the longitudinal direction of the discharge lamp 1D (glass tube 25). In addition, 2 circular openings 29Ac, 29Ad, 29Dc, and 29Dd having a diameter smaller than that of the spherical body 27 are formed in the side surfaces of the receiving portions 29A and 29D so as to face the through holes 28Be1 and 28Be2, respectively.
In a state where the discharge lamp 1D is placed on the turntable 79 of the storage part 54 in fig. 4 (B), as shown in fig. 17 (a), a1 st detection device 94A is disposed above the turntable 79, and the 1 st detection device 94A includes an irradiation part 94Aa for irradiating the light beam LB1 toward the center of the through hole 28Be1 of the discharge lamp 1D and the openings 29Ac, 29Ad of the storage part 29A, and a light receiving part 94Ab for detecting the light beam LB 1. Further, above the detector 94A, a2 nd detector 94C is disposed, and the 2 nd detector 94C has an irradiation unit 94Ca for irradiating the center of the through hole 28Be2 of the discharge lamp 1D and the openings 29Dc, 29Dd of the storage unit 29D with the light beam LB3, and a light receiving unit 94Cb for detecting the light beam LB 3. The detection signals of the light receiving units 94Ab and 94Cb are processed by the light source control system 32. The other structure is the same as the embodiment of fig. 14 (a).
In this modification, in a state where the discharge lamp 1D is not yet used and the spherical body 27 is in contact with the contour of the opening 29Db of the housing 29D, the light beams LB1 and LB3 pass through the housing 29A and 29D, respectively, and are detected by the light receiving portions 94Ab and 94 Cb. In other words, when the light beams LB1, LB3 can be detected by the detectors 94A, 94C at the same time, it can be confirmed that the ball 27 is located above the housing 29D and the discharge lamp 1D is not used.
On the other hand, in a state where the discharge lamp 1D is mounted in the exposure apparatus, and the discharge lamp 1D is caused to emit light, and the temperature of the discharge lamp 1D rises to about 1/2 of the highest temperature, as shown in fig. 17 (B), the spherical body 27 passes through the opening 29Db and moves into the housing 29D due to thermal expansion of the housing 29D. In the case where the use of the discharge lamp 1D is interrupted and the discharge lamp 1D returns to the turntable 79 of the storage portion 54 in this state, the light beam LB1 passes through the storage portion 29A and is detected by the light receiving portion 94Ab, but the light beam LB3 is blocked by the spherical body 27 in the storage portion 29D and cannot be detected by the light receiving portion 94 Cb. In other words, when the detector 94A can detect the luminous flux LB1 and the detector 94B cannot detect the luminous flux LB3, it can be confirmed that the ball 27 is located inside the housing 29D and the discharge lamp 1D is used (energized or lighted) for a predetermined time.
In a state where the discharge lamp 1D is mounted on the exposure apparatus and the discharge lamp 1D is used until the temperature of the discharge lamp 1D rises to the substantially highest temperature (2 nd threshold value) after the discharge lamp 1D is lighted, the spherical body 27 passes through the opening 29Ab due to the thermal expansion of the housing portion 29A and moves to a position PA1 indicated by a broken line in the housing portion 29A. Then, for example, when the use of the discharge lamp 1D is stopped after a predetermined usable time has elapsed and the discharge lamp 1D is returned to the turntable 79 of the storage unit 54, the light beam LB3 passes through the storage unit 29D and is detected by the light receiving unit 94Cb, but the light beam LB1 is blocked by the spherical body 27 in the storage unit 29A and cannot be detected by the light receiving unit 94 Ab. In other words, when the detection device 94A does not detect the luminous flux LB1 and the detection device 94B detects the luminous flux LB3, it can be confirmed that the ball 27 is located inside the housing 29A and the discharge lamp 1D has been used for a substantially predetermined usable time (has run out).
According to this modification, it is possible to determine the degree of time that the discharge lamp 1D has been used by detecting which of the storage sections 29A and 29D the ball 27 is located. In this modification, a compression coil spring (not shown) for biasing the ball 27 toward the opening 29Db of the housing 29D may be provided. The housing portions 29A and 29D may be formed of materials having different thermal expansion coefficients. The material forming the housing portion 29D is a material having a higher thermal expansion coefficient than the material forming the housing portion 29A. In this case, when the housing portion 29D is deformed to such an extent that the ball 27 can pass and the housing portion 29A is deformed but deformed to such an extent that the ball 27 cannot pass in a state where the discharge lamp 1D emits light and the temperature of the discharge lamp 1D rises to, for example, about 1/2, which is the highest temperature, the ball 27 is housed in the housing portion 29D. Further, in a state where the discharge lamp 1D is caused to emit light and the temperature of the discharge lamp 1D rises to substantially the highest temperature, the housing portion 29A is further deformed, and the spherical body 27 is housed in the housing portion 29A. By forming the housing portions 29A and 29D of materials having different thermal expansion coefficients in this manner, the presence or absence of use of the discharge lamp 1D can be detected in stages. When the housing portions 29A and 29D are made of materials having different thermal expansion coefficients, the diameter of the opening 29Ab and the diameter of the opening 29Db may be formed to have the same length. When the difference in thermal expansion coefficient is large, the diameter of the opening 29Db may be made longer than the diameter of the opening 29 Ab. In addition, although the presence or absence of use of the discharge lamp 1D is detected in 2 stages by providing the storage portions 29A and 29D as described above, the presence or absence of use of the discharge lamp 1D may be detected in more than 2 stages by providing a plurality of storage portions.
Next, fig. 18 (a) is a diagram showing a state where the discharge lamp 1E of the 4 th modification is held by the clamp mechanism 52 of fig. 7 (a), fig. 18 (B) is an enlarged cross-sectional view showing the base portion 28C of the discharge lamp 1E of fig. 18 (a), and fig. 18 (C) is a cross-sectional view showing the terminal portion 28Ca of fig. 18 (B). In this modification, the ball 27 is moved by elastic deformation of the predetermined member, not by thermal expansion of the predetermined member.
In fig. 18 (a), the base part 26 on the cathode side of the discharge lamp 1E is supported by the support member 33, and the terminal part 28Ca of the base part 28C on the anode side of the discharge lamp 1E is biased toward the power supply block 66 by the roller 70 of the clamp mechanism 52 and is supported.
As shown in fig. 18 (B), in the terminal portion 28Ca of the discharge lamp 1E, a circular opening 28Ch having a smaller diameter than the spherical body 27 is formed in a portion facing the roller 70. Further, inside the terminal portion 28Ca, a regulating member 29A is fixed to the upper surface of the gripped portion 28Ce in parallel to the opening 28Ch, and a spherical body 27 is disposed between the opening 28Ch and a notch 29Aa, wherein the regulating member 29 is formed with a U-shaped notch 29Aa shown in fig. 18 (D) and is in the form of an elastically deformable thin flat plate. The regulating member 29A may be formed of a steel material, for example. Further, an inclined member 29B is fixed to the restricting member 29A on the center direction side of the terminal portion 28Ca and on the upper surface of the gripped portion 28Ce, and the inclined member 29B is inclined so as to gradually become lower from the cutout portion 29Aa side of the restricting member 29A. Further, 2 openings 28Cf and 28Cg through which light beam LB1 of detection device 94A shown in fig. 18 (C) passes are formed in 2 side surfaces of terminal portion 28Ca in the direction perpendicular to the paper surface of fig. 18 (B).
In this modification, the maximum width d5 of the cutout portion 29Aa of the restricting member 29A is defined to be smaller than the diameter of the ball 27 in a state where no external force is applied to the restricting member 29A. Therefore, in a state where the discharge lamp 1E is not held by the clamp mechanism 52 (a state where the roller 70 does not contact the spherical body 27), the maximum width d5 of the cutout portion 29Aa is smaller than the diameter of the spherical body 27, the spherical body 27 is disposed between the opening 28Ch and the cutout portion 29Aa, and the light beam LB1 of the detection device 94A can pass through the openings 28Cf and 28Cg of the terminal portion 28 Ca. Therefore, it can be confirmed by the detection signal of the detection device 94A that the discharge lamp 1E is not used.
On the other hand, in a state where the discharge lamp 1E is held by the clamp mechanism 52 (a state where the roller 70 is in contact with the ball 27), the ball 27 is biased toward the regulating member 29A, the maximum width of the cutout portion 29Aa becomes larger than the diameter of the ball 27 due to elastic deformation of the regulating member 29A, and the ball 27 passes through the cutout portion 29Aa, rolls along the upper surface of the inclined member 29B, and stops at a position substantially between the openings 28Cf and 28Cg in the terminal portion 28 Ca. In this state, light beam LB1 of detection device 94A cannot pass through opening 28Cg of terminal portion 28 Ca. The other structure is the same as the embodiment of fig. 3 (B).
According to this modification, when the discharge lamp 1E is held by the clamp mechanism 52 in order to use the discharge lamp 1E in the exposure apparatus, the ball 27 in the base part 28C is urged toward the regulating member 29A by the roller 70 of the clamp mechanism 52, and the ball 27 moves between the openings 28Cf and 28 Cg. Therefore, when the discharge lamp 1E returns to the turntable 79 of the storage part, the light beam LB1 of the detection device 94A is blocked by the ball 27, and thus it can be confirmed that the discharge lamp 1E is already used up. Further, since the terminal portion 28Ca is provided with the tilting member 29B for moving the ball 27 in the direction between the openings 28Cf and 28Cg, the position of the ball 27 is stably maintained between the openings 28Cf and 28 Cg.
The width of the cutout portion 29Aa of the restriction member 29A is also increased to some extent by thermal expansion of the restriction member 29A due to a temperature increase of the base portion 28C caused by use (energization) of the discharge lamp 1E. Therefore, when the temperature of the base part 28C reaches the substantially highest temperature, the maximum width d5 of the cutout part 29Aa may be set to be wider than the diameter of the ball 27 due to the thermal expansion of the regulating member 29A.
Next, fig. 19 (a) and (B) are diagrams showing the inside of the terminal portion 28a of the anode-side base portion 28 of the discharge lamp according to the 5 th modification. In this modification, the width of the gap through which the ball 27 passes is enlarged by using the principle of leverage. In the terminal portion 28a of fig. 19 (a), a regulating member 29E made of a substantially U-shaped elastically deformable steel material, for example, is fixed to the upper surface of the gripped portion 28E of the base portion 28. The regulating member 29E has: a fixing portion 29Ec which is flat and fixed to the upper surface of the gripped portion 28 e; and 1 pair of L-shaped hinge portions 29Ea and 29Eb provided at both ends of the upper surface of the fixed portion 29Ec so as to be openable and closable by elastic deformation through a portion having a small cross-sectional area. The ball 27 is placed in a gap between the front ends of the hinge portions 29Ea and 29 Eb. Further, between the hinge portions 29Ea, 29Eb, there are provided, in order from the side of the fixed portion 29 Ec: a rod-shaped driving member 29H made of, for example, aluminum, which has a thermal expansion coefficient larger than that of the restricting member 29E; and a tension coil spring 29I that acts by narrowing the distance a between the front ends of the hinge portions 29Ea and 29 Eb. The tension coil springs 29I are provided at 2 positions spaced apart from each other by a distance in a direction perpendicular to the paper surface of fig. 19 (a), for example, and the balls 27 can be arranged between the 2 tension coil springs 29I.
Further, 2 openings 28a1, 28a2 (opening 28a1 is not shown) having a diameter smaller than that of the ball 27 are formed in 2 side surfaces of the terminal portion 28a in the direction perpendicular to the paper surface (a) of fig. 19, and the light beam LB1 of the detection device 94A of fig. 3 (B) passes through the openings.
At the temperature when the discharge lamp of this modification is stored, the length of the driving member 29H and the shape of the regulating member 29E are determined so that the distance a between the distal ends of the hinge portions 29Ea and 29Eb is smaller than the diameter d of the spherical body 27. On the other hand, in a state where the discharge lamp is caused to emit light and the temperature of the discharge lamp reaches substantially the highest temperature, as shown in fig. 19 (B), the length of the driving member 29H is determined so that the distance between the tip end portions of the hinge portions 29Ea and 29Eb becomes much larger than the diameter of the spherical body 27 by the leverage generated by the thermal expansion of the driving member 29H. In this case, the ball 27 passes through the gap between the distal end portions thereof from the original position PA2 and moves to the upper surface of the driving member 29H between the 2 tension coil springs 29I, and the light beam LB1 of the detection device 94A in fig. 3 (B) is shielded by the ball 27. The other structure is the same as the embodiment of fig. 3 (B).
In this modification, when the distance between the distal ends of the hinge portions 29Ea and 29Eb of the regulating member 29E becomes larger than the diameter of the spherical body 27 due to the thermal expansion of the driving member 29H during the use of the discharge lamp (at the time of energization), the spherical body 27 moves toward the upper surface of the driving member 29H through the distance between the distal ends thereof. Therefore, when storing the discharge lamp, the light beam LB1 of the detection device 94A is blocked by the sphere 27, and thus the presence or absence of use of the discharge lamp can be reliably determined.
Further, in this modification, under the leverage effect caused by the thermal expansion of the driving member 29H, the amount of extension of the interval a between the distal ends of the hinge portions 29Ea and 29Eb is much larger than the amount of extension of the interval between the distal ends of the hinge portions 29Ea and 29Eb caused by the thermal expansion of the regulating member 29E. Therefore, the processing accuracy of the regulating member 29E and the driving member 29H in manufacturing the discharge lamp can be made lower (rougher) than the processing accuracy of the opening 29B of the housing 29 in fig. 3B, for example, and thus the discharge lamp can be easily manufactured.
In this modification, a column 27C having a low thermal expansion coefficient, which extends in a direction perpendicular to the paper surface of fig. 19 (a), and has the same diameter as the diameter d of the sphere 27 may be used instead of the sphere 27. When the column 27C is used, if the distance between the distal ends of the hinge portions 29Ea and 29Eb is larger than the diameter d, the column 27C passes through the distance between the distal ends and reaches the position of the shielded light beam LB1, and thus the presence or absence of use of the discharge lamp can be determined.
As shown in the anode-side base part 28 of the discharge lamp of the 6 th modification of fig. 20 (a) and (B), the gap through which the ball 27 (or the column 27C) passes may be increased by the bimetal action, in addition to the lever principle used in the modification of fig. 19 (a). In fig. 20 a, plate-shaped driving members 29F and 29G made of, for example, aluminum and having a thermal expansion coefficient larger than that of the regulating member 29E are fixed to the inner sides of the hinge portions 29Ea and 29Eb at both ends of the regulating member 29E (disposed inside the terminal portion 28a of the base portion 28) by bonding or the like, respectively.
At the temperature when the discharge lamp of this modification is stored, the distance a between the distal ends of the hinge portions 29Ea and 29Eb is smaller than the diameter d of the spherical body 27, and the spherical body 27 is placed on the distance between the distal ends of the hinge portions 29Ea and 29 Eb. On the other hand, in a state where the discharge lamp is caused to emit light and the temperature of the discharge lamp reaches substantially the highest temperature, as shown in fig. 20 (B), the thermal expansion amount of the driving members 29F, 29G is larger than the thermal expansion amount of the regulating member 29E (the hinge portions 29Ea, 29Eb), and therefore, the distance between the tip end portions of the hinge portions 29Ea, 29Eb becomes much larger than the diameter of the spherical body 27 due to the bimetal action. Therefore, the ball 27 passes through the gap of the tip end portion from the original position PA2 and moves to the upper surface of the fixing portion 29Ec, and shields the light beam LB1 of fig. 3 (B) directed to the opening 28a 2. Therefore, when the discharge lamp is stored, the light beam LB1 of the detection device 94A is blocked by the sphere 27, and the presence or absence of use of the discharge lamp can be accurately determined.
Further, in this modification, due to the bimetal action caused by the thermal expansion of the driving members 29F and 29G, the amount of extension of the gap a between the distal ends of the hinge portions 29Ea and 29Eb is much larger than the amount of extension of the gap between the distal ends of the hinge portions 29Ea and 29Eb caused by the thermal expansion of the regulating member 29E. Therefore, the processing accuracy of the regulating member 29E and the driving members 29F and 29G in manufacturing the discharge lamp can be lower (rougher) than the processing accuracy of the opening 29B of the housing 29 in fig. 3B, for example, and thus, the discharge lamp can be easily manufactured.
Next, fig. 21 (a) and (B) are sectional views showing an anode-side base part 28D of the discharge lamp according to the 7 th modification. In this modification, the presence or absence of use of the discharge lamp is determined by the change in the angle of the reflecting surface of the mirror portion (provided in the base portion).
In fig. 21 (a), a circular convex portion 28e2 is provided at the center of a circular concave portion 28e1 (which is formed at the upper end portion of the gripped portion 28e of the base portion 28D). The flange portion of the support member 29J, which is substantially cylindrical and has an annular flange portion at a lower end portion thereof, is placed on the concave portion 28e1 so as to surround the convex portion 28e 2. A disc-shaped intermediate member 29K made of a material that is plastically deformed by heat, for example, an alloy containing lead is fixed to the upper surface of the support member 29J, and triangular prism-shaped mirror portions MR1 and MR4 having reflection surfaces facing outward are fixed so as to face the upper surface of the intermediate member 29K.
The terminal portion 28a having a substantially triangular prism shape in outer shape and a circular flange portion 28a3 at a lower end thereof is placed so as to cover the support member 29J, the intermediate member 29K, and the mirror portions MR1 and MR2 located above the intermediate member 29K. At positions facing the mirror portions MR1 and MR2 on the inner surface of the terminal portion 28a, triangular prism-shaped mirror portions MR2 and MR3 are fixed so that the reflection surfaces face inward, respectively. The flange portion of the support member 29J overlaps the flange portion 28a3 of the terminal portion 28a, and these 2 flange portions 28a3 and the like are fixed to the recessed portion 28e1 at a plurality of places with bolts BA 1.
Further, 2 circular openings 28a1 and 28a2 are formed in the side surface of the terminal portion 28a along a straight line passing through the central axis of the support member 29J so as to face the mirror portions MR1 and MR4 on the intermediate member 29J.
When the discharge lamp of this modification is not in use, when the discharge lamp is placed on the turntable 79 of the storage unit shown in fig. 11, the light beam LB1 emitted from the emitting unit 94Aa of the detection device 94A passes through the opening 28a1, the mirror unit MR1, MR2, MR3, MR4, and the opening 28a2, and is received by the light receiving unit 94 Ab. It can be confirmed from the detection signal of the light receiving unit 94Ab that the discharge lamp is not used.
On the other hand, in a state where the discharge lamp is mounted in the exposure apparatus and the temperature of the discharge lamp rises (a state where the temperature of the discharge lamp reaches substantially the highest temperature, or a state where the discharge lamp is used for a predetermined time or longer, for example), as shown in fig. 21 (B), the intermediate member 29K is plastically deformed by heat, and the angles of the reflection surfaces of the mirror portions MR1 and MR4 change. When the used discharge lamp is placed on the turntable 79 of the storage section shown in fig. 11, the light beam LB1 emitted from the irradiation section 94Aa of the detection device 94A is reflected by the mirror section MR1 (or MR4) in a direction different from that in the case of fig. 21 a, and is not received by the light receiving section 94 Ab. Therefore, the use-up of the discharge lamp can be confirmed by the detection signal of the light receiving unit 94 Ab.
In this modification, as shown in fig. 21 (a), the light receiving unit 94Ab of the detection device 94A may be disposed at a position PA5 indicated by a broken line close to the irradiation unit 94 Aa. In this case, the angle of the reflection surface of the mirror portion MR1 is set so that the light beam LB1 from the irradiation portion 94Aa is received by the light receiving portion 94Ab at the position PA5, and the other mirror portions MR2 to MR4 are omitted. In this case, even when the temperature of the discharge lamp has increased, the intermediate member 29K is plastically deformed by heat, the angle of the reflection surface of the mirror portion MR1 changes, and the reflected light from the mirror portion MR1 cannot be received by the light receiving portion 94 Ab. Therefore, the use-up of the discharge lamp can be confirmed by the detection signal of the light receiving unit 94 Ab. Although the example in which the mirror portion is provided on the side surface inside the terminal portion 28a is shown, the mirror portion is not limited to this, and may be provided on the side surface outside the terminal portion 28 a. In this case, the mirror portions MR2 and MR3 may be provided in the case 51, for example, without being provided in the terminal portion 28 a. By providing the mirror portion on the side surface outside the terminal portion 28a, it is possible to obtain an effect that the strength and rigidity of the terminal portion 28a are increased and the terminal portion 28a is easily manufactured without forming the openings 28a1 and 28a2 in the terminal portion 28 a.
The above description has been made on the detection device 94 including the irradiation portion 94Aa and the light receiving portion 94Ab of the irradiation beam LB1, but the detection device is not limited to this. The irradiation portion 94Aa may be a point light source, and whether or not the light receiving portion 94Ab detects a predetermined amount of light or more may confirm that the discharge lamp is used up. The light receiving unit 94Ab may be constituted by an imaging device such as a camera. Whether or not the spherical body 27 is accommodated in the accommodating section 29 may be detected by a known image capturing apparatus through image processing or the like.
As a modification 8, when the discharge lamp is used (energized) for a predetermined time, the anode-side base 28D may be changed in state by color change, deformation, or the like, and the presence or absence of use of the discharge lamp may be detected by the detection device 94. When the discharge lamp is used (energized) for a predetermined time, a mark may be formed on the base 26 on the cathode side, the base 28 on the anode side, the glass tube 25, and the like by a mark forming unit (not shown), and the presence or absence of use of the discharge lamp may be detected by detecting the mark by the imaging device.
In addition, instead of the openings 28a1, 28a2, grooves may be formed in the terminal portion 28 a. In other words, since the light beam LB1 from the irradiation portion 94Aa only needs to pass through the housing portion, a slit may be provided without adopting a structure of a covering sphere like an opening. The openings 28a1 and 28a2 may be formed such that the light beam LB1 is covered with a transmissive material, for example, glass. This eliminates the possibility of dirt entering the housing 29.
In the above embodiments, the presence or absence of the discharge lamp is detected by the anode-side base part 28, but the presence or absence of the discharge lamp may be detected by providing the cathode-side base part 26 with the same configuration as the anode-side base part 28. Further, both the base part 26 on the cathode side and the base part 28 on the anode side may be provided with a configuration capable of detecting whether the discharge lamp is used or not.
A liquid crystal device such as a liquid crystal display element can be manufactured by forming a predetermined pattern (a circuit pattern, an electrode pattern, or the like) on a substrate (a plate P) using the exposure apparatus of each of the above embodiments or an exposure method using the exposure apparatus. An example of the manufacturing method will be described below with reference to steps S401 to S404 in fig. 22.
In step S401 (pattern forming step) of fig. 22, first, a coating step of coating a resist on a substrate to be exposed to prepare a photosensitive substrate (plate P), an exposure step of transferring and exposing a pattern of a mask for a liquid crystal display element onto the photosensitive substrate using the exposure apparatus, and a development step of developing the photosensitive substrate are performed. A predetermined resist pattern is formed on the substrate by a photolithography step including the coating step, the exposure step, and the development step. Subsequently, in the photolithography step, a predetermined pattern including a large number of electrodes and the like is formed on the substrate through an etching step using the resist pattern as a processing mask, a resist stripping step, and the like. The photolithography process and the like are performed a plurality of times in accordance with the number of layers on the board P.
In the next step S402 (color filter forming step), a color filter is formed by arranging a large number of groups of 3 fine filters corresponding to red R, green G, and blue B in a matrix, or by arranging a plurality of groups of 3 band-shaped filters of red R, green G, and blue B in the horizontal scanning line direction. In the next step S403 (cell assembly step), for example, liquid crystal is injected between the substrate having the predetermined pattern obtained in step S401 and the color filter obtained in step S402, thereby manufacturing a liquid crystal panel (liquid crystal cell).
In the subsequent step S404 (module assembling step), components such as a circuit for performing a display operation and a backlight are mounted on the liquid crystal panel (liquid crystal cell) thus assembled, and the liquid crystal panel is completed as a liquid crystal display element. According to the above-described method for manufacturing a liquid crystal display element, the discharge lamp can be efficiently replaced in the exposure apparatus, and therefore, high throughput can be obtained.
The present invention is not limited to the application to the manufacturing process of liquid crystal display elements, and can be widely applied to the manufacturing process of display devices such as plasma displays, the manufacturing process of imaging devices (such as CCDs), micromachines, MEMS (micro electro mechanical Systems), thin film magnetic heads using ceramic wafers as substrates, and various devices such as semiconductor elements.
The light source device of the above embodiment can be applied to a light source for exposure of a projection exposure apparatus (such as a stepper) of a step-and-repeat system, in addition to the projection exposure apparatus (such as a scanner) of a scanning exposure type of the step-and-scan system. The light source device according to the above embodiment can be applied to a light source device of an exposure device of a proximity (proximity) system or a contact system that does not use a projection optical system, or a light source of a device other than the exposure device.
Description of the reference numerals
EX … exposure device, M … mask, P … plate, PL … projection optical system, 1 … discharge lamp, 1N … unused discharge lamp, 2 … elliptical mirror, 13 … illumination optical system, 20 … power supply unit, 23, 24 … cable, 25 … glass tube, 25a … bulb unit, 26 … cathode side bulb unit, 28 … anode side bulb unit, 28a … terminal unit, 28e … gripped unit, 30 … light source device, 31 … lamp shade, 32 … light source control system, 33 … support member, 36 … pull-out unit, 50 … replacement device, 52 … clamping mechanism, 54 … holding unit, 56 … lamp transport system.
Claims (23)
1. A discharge lamp to be mounted on an apparatus including a detection unit for detecting a usage state of the discharge lamp, the discharge lamp comprising:
an electrode for discharge;
a glass member forming a light emitting portion; and
a current-carrying member provided at an end of the glass member and configured to carry current to the discharge electrode;
a detected portion which is detected by the detecting portion and which changes from a1 st state to a2 nd state when the electrode is energized,
the detection target section includes: an opening provided in the energizing member; and a movable portion capable of shielding at least a part of the light beam passing through the opening.
2. Discharge lamp as claimed in claim 1,
when the energization time for energizing the electrode has elapsed a predetermined time or more, the detected part changes from the 1 st state to the 2 nd state.
3. Discharge lamp as claimed in claim 1,
the detection section is an opening provided in the current-carrying member.
4. Discharge lamp as claimed in claim 1,
the energizing member has: a1 st housing portion provided with the opening and capable of housing the movable portion; and a2 nd housing portion which is provided adjacent to the 1 st housing portion via a partition portion provided with a hole and which can house the movable portion,
the movable portion is housed in the 2 nd housing portion in the 1 st state where the electrode is not energized, and the movable portion is housed in the 1 st housing portion by passing through the hole in the 2 nd state where the electrode is energized for a predetermined time.
5. Discharge lamp as claimed in claim 4,
the detected part has a restricting part that restricts movement in the 2 nd state so that the movable part in the 1 st housing part does not move to the 2 nd housing part.
6. Discharge lamp as claimed in claim 1,
the current-carrying member includes a1 st current-carrying member and a2 nd current-carrying member provided so as to sandwich the glass member.
7. A discharge lamp is provided with: a glass member forming a light emitting section; and a1 st energizing member and a2 nd energizing member for energizing the electrodes in the glass member,
the discharge lamp is characterized by comprising:
an opening provided in the 1 st energization member; and
a movable portion capable of shielding at least a part of the light beam passing through the opening of the 1 st power transmission member.
8. Discharge lamp as claimed in claim 7,
the 1 st conducting component comprises: a1 st housing portion provided with the opening and capable of housing the movable portion; and a2 nd housing portion which is provided adjacent to the 1 st housing portion via a partition portion provided with a hole and which can house the movable portion,
before the discharge lamp is used, the movable part is accommodated in the 2 nd accommodating part,
the movable portion is not allowed to pass through the hole of the partition wall portion in a state where the 1 st current-carrying member and the 2 nd current-carrying member are not energized, and the movable portion is allowed to pass through the opening in a state where the 1 st current-carrying member and the 2 nd current-carrying member are energized.
9. A discharge lamp as claimed in any one of the claims 6 to 8,
the 1 st conducting component comprises:
a connected portion that can be connected to a member to which the cable is connected; and
and a held portion including a non-planar portion that can be held by the conveying portion.
10. Discharge lamp as claimed in claim 9,
the held portion of the 1 st energizing member includes an axisymmetrical portion having a spherical surface.
11. A discharge lamp as claimed in any one of the claims 6 to 8,
the No. 1 energizing member has a heat sink.
12. A discharge lamp as claimed in any one of the claims 6 to 8,
the 2 nd conducting component comprises: a flange portion that can be placed on the support member; a small-diameter portion having a smaller cross-sectional area than the flange portion; and a stepped portion having a larger cross-sectional area than the small-diameter portion.
13. A light source device comprising the discharge lamp according to any one of claims 6 to 12,
the light source device is characterized by comprising:
a storage unit for storing the discharge lamp;
a conveying unit that conveys the discharge lamp;
a light transmitting portion that causes a light beam to enter the opening of the 1 st energizing member of the discharge lamp;
a light receiving unit that detects the light beam passing through the opening; and
and a control unit for determining the state of the discharge lamp by using the detection result of the light receiving unit.
14. The light source device according to claim 13,
a correction unit for correcting the rotation angle of the discharge lamp,
the control unit obtains a rotation angle of the discharge lamp using a detection result of the light receiving unit, and corrects the rotation angle of the discharge lamp by the correction unit based on the obtained rotation angle.
15. The light source device according to claim 13 or 14,
the discharge lamp includes a movable portion capable of shielding at least a part of the light flux incident on the opening of the 1 st power transmission member,
the control unit determines whether or not at least a part of the light beam incident on the opening is blocked by the movable unit using a detection result of the light receiving unit, and determines a usage state of the discharge lamp based on the determination result.
16. The light source device according to claim 13 or 14, comprising:
a connecting portion for detachably connecting a cable to the 1 st current-carrying member of the discharge lamp; and
and a support portion that detachably supports the 2 nd power transmission member of the discharge lamp.
17. An exposure apparatus is characterized by comprising:
the light source device according to any one of claims 14 to 16;
an illumination system that illuminates a mask with light generated from the discharge lamp of the light source device; and
and a projection optical system that projects an image of the pattern of the mask onto a substrate.
18. A replacement method of the discharge lamp according to any one of claims 6 to 12, the replacement method comprising:
keeping the discharge lamp;
transporting the discharge lamp from the storage part to an installation position;
making a light beam incident toward the opening of the 1 st energizing member of the discharge lamp;
detecting the light beam passing through the opening;
and discriminating the state of the discharge lamp using the detection result of the light beam.
19. The replacement method according to claim 18,
determining the state of the discharge lamp includes finding a rotation angle of the discharge lamp using a detection result of the light beam,
the replacement method includes correcting the rotation angle of the discharge lamp based on the obtained rotation angle.
20. The replacement method according to claim 18 or 19,
the discharge lamp includes a movable portion capable of shielding at least a part of the light flux incident on the opening of the 1 st power transmission member,
the judging the state of the discharge lamp comprises the following steps: the method includes determining whether or not at least a part of the light beam incident on the opening is blocked by the movable portion using a detection result of the light beam, and determining a use state of the discharge lamp based on a determination result.
21. An exposure method, comprising:
replacing the discharge lamp by using the replacement method for the discharge lamp according to any one of claims 18 to 20;
illuminating a light cover with light generated from the discharge lamp; and
projecting an image of the pattern of the mask onto a substrate.
22. A device manufacturing method, comprising:
forming a pattern of a photosensitive layer on a substrate using the exposure apparatus according to claim 17; and
and processing the substrate with the pattern.
23. A device manufacturing method, comprising:
forming a pattern of a photosensitive layer on a substrate using the exposure method according to claim 21; and
and processing the substrate with the pattern.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202011102491.2A CN112684664A (en) | 2015-12-09 | 2016-12-09 | Discharge lamp, method of replacing the same, and exposure method and apparatus |
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| JP2015240101 | 2015-12-09 | ||
| JP2015-240101 | 2015-12-09 | ||
| PCT/JP2016/086730 WO2017099221A1 (en) | 2015-12-09 | 2016-12-09 | Discharge lamp and method for exchanging same, and exposure method and device |
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| CN202011102491.2A Division CN112684664A (en) | 2015-12-09 | 2016-12-09 | Discharge lamp, method of replacing the same, and exposure method and apparatus |
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| CN108780280A CN108780280A (en) | 2018-11-09 |
| CN108780280B true CN108780280B (en) | 2020-10-30 |
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| CN201680081229.XA Expired - Fee Related CN108780280B (en) | 2015-12-09 | 2016-12-09 | Discharge lamp, method of replacing the same, and exposure method and apparatus |
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| JP (2) | JP6859957B2 (en) |
| KR (1) | KR20180091052A (en) |
| CN (2) | CN112684664A (en) |
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| JP7178240B2 (en) * | 2018-11-14 | 2022-11-25 | 東京エレクトロン株式会社 | Light irradiation device |
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| JP4003234B2 (en) * | 1996-04-10 | 2007-11-07 | セイコーエプソン株式会社 | Projection display |
| JP3951051B2 (en) * | 1996-04-10 | 2007-08-01 | セイコーエプソン株式会社 | Projection display |
| JPH1154090A (en) * | 1997-07-30 | 1999-02-26 | Matsushita Electric Works Ltd | Electrodeless discharge lamp device |
| JP3843556B2 (en) * | 1997-09-30 | 2006-11-08 | 東芝ライテック株式会社 | Fluorescent lamp and lighting device |
| WO2007066947A2 (en) | 2005-12-08 | 2007-06-14 | Electronics And Telecommunications Research Institute | Mobile wireless access router for separately controlling traffic signal and control signal |
| JP4101269B2 (en) * | 2006-03-31 | 2008-06-18 | 株式会社オーク製作所 | Light source device |
| JP4031508B1 (en) * | 2006-08-23 | 2008-01-09 | 株式会社オーク製作所 | Light source device |
| JP5272481B2 (en) * | 2008-04-04 | 2013-08-28 | カシオ計算機株式会社 | Projection apparatus and light source control method |
| JP5702122B2 (en) * | 2010-11-29 | 2015-04-15 | Ｎｓｋテクノロジー株式会社 | Light irradiation device for exposure equipment |
| JP6127348B2 (en) * | 2013-09-12 | 2017-05-17 | パナソニックＩｐマネジメント株式会社 | Lighting device |
| CN106415396B (en) * | 2014-03-28 | 2019-02-22 | 株式会社尼康 | Light supply apparatus, discharge lamp and its manufacturing method and exposure device |
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- 2016-12-09 WO PCT/JP2016/086730 patent/WO2017099221A1/en active Application Filing
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| CN112684664A (en) | 2021-04-20 |
| TWI723099B (en) | 2021-04-01 |
| TW201734654A (en) | 2017-10-01 |
| TW202122931A (en) | 2021-06-16 |
| KR20180091052A (en) | 2018-08-14 |
| CN108780280A (en) | 2018-11-09 |
| JP6859957B2 (en) | 2021-04-14 |
| JP2021107931A (en) | 2021-07-29 |
| JPWO2017099221A1 (en) | 2018-10-04 |
| WO2017099221A1 (en) | 2017-06-15 |
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