CN108776239A - A kind of two-freedom probe feed mechanism - Google Patents
A kind of two-freedom probe feed mechanism Download PDFInfo
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- CN108776239A CN108776239A CN201810279239.5A CN201810279239A CN108776239A CN 108776239 A CN108776239 A CN 108776239A CN 201810279239 A CN201810279239 A CN 201810279239A CN 108776239 A CN108776239 A CN 108776239A
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- type
- probe
- feed mechanism
- displacement
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of two-freedom probe feed mechanisms, including matrix, two flexible bridge-type enlargers being arranged symmetrically along Y-axis center line, semicircle connects hinge, double flat andante guiding mechanism, Z-type compliant mechanism forms, flexible bridge-type enlarger described in two of which is arranged along Y-direction, and it is driven respectively by a piezoelectric ceramic actuator, generate X-direction output displacement, and via the semicircle connects hinge, power and movement are transmitted to the double flat andante guiding mechanism, finally movement is transmitted to the Z-type compliant mechanism in mechanism center, it is symmetrical in both sides, under being acted on to the input displacement of central compression, Z-type compliant mechanism will generate the output displacement of Z-direction, probe is connected to the center of Z-type compliant mechanism with displacement sensor.The probe feed mechanism of the present invention is not only able to realize the feed motion of probe vertical direction, and can carry out the adjustment of horizontal direction.
Description
Technical field
The present invention relates to a kind of probe feed mechanisms, especially have the probe of the two-freedom of high-precision, high stability
Feed mechanism.
Background technology
The development of nanoprocessing and manufacturing technology so that micro-/micro-nano structure with nanometer size effect is with device in aviation
The application in the fields such as space flight, mechano-electronic, health care is increasingly extensive.Meanwhile scientific and technological progress and overseas market demand are to nanometer
More stringent requirements are proposed for the precision of processing, wherein the micro-nano scribing technique based on probe is since its is easy to operate, at low cost, answers
It is had received widespread attention with the wide feature of range, but mostly using the method based on atomic force microscope carries out delineation behaviour at present
Make, since the purpose of design of atomic force microscope is the topography measurement for super-smooth surface, the cantilever beam of linking probe is rigid
Very little is spent, the groove for processing high-aspect-ratio can not provide enough normal machine power, to limit answering for probe delineation
Use foreground.
Invention content
Purpose of the invention is to overcome the shortcomings in the prior art, provides a kind of two-freedom for micro-nano delineation
Probe feed mechanism, the mechanism have high-precision, the characteristic of high stability.
The purpose of the present invention is what is be achieved through the following technical solutions：
A kind of two-freedom probe feed mechanism, including it is matrix, flexible bridge-type enlarger, semicircle connects hinge, double
Parallel-plate guiding mechanism and Z-type compliant mechanism, the flexibility bridge-type enlarger along there are two the symmetrical settings of Y-axis, and point
Not by a piezoelectric ceramic actuator driving to generate the output displacement of X-direction, and via the semicircle connects hinge, by power
It is transferred to the double flat andante guiding mechanism with movement, finally movement is transferred to the Z-type compliant mechanism positioned at feed mechanism center,
Symmetrical in both sides and under being acted on to the input displacement of central compression, Z-type compliant mechanism will generate the output displacement of Z-direction, the Z-type
The center of compliant mechanism is equipped with probe and displacement sensor.
Further, the parallel-plate guiding mechanism is equipped with 4 parallel-plates.
Further, feed mechanism has the feeding degree of freedom of vertical direction, and can carry out the adjustment of horizontal direction.
Compared with prior art, advantageous effect caused by technical scheme of the present invention is：
1. integrated model can make mechanism obtain high-precision, high rigidity characteristic using flexible, symmetrical design；
2. being amplified to input displacement using flexible bridge-type enlarger, ensure that mechanism has sufficiently large output displacement to drive
Dynamic probe carries out micro-nano delineation processing；
3., can effective compensation processing and dress using Semicircular hinge connection bridge-type enlarger and double flat andante guiding mechanism
With error caused by asymmetry, the stability of system is improved；
4. being oriented to the input of Z-type compliant mechanism using double flat andante guiding mechanism, Y-direction can be generated to avoid it
Parasitic error or torsion around Z-direction, improve the kinematic accuracy of mechanism；
5. using Z-type compliant mechanism, the output displacement of vertical direction can be generated, necessary feeding is provided certainly for probe
By spending.
Description of the drawings
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the structural schematic diagram of the Z-type compliant mechanism of the present invention.
Reference numeral：1, matrix；2, piezoelectric ceramic actuator；3, flexible bridge-type enlarger；4, mounting hole；5, parallel-plate
Guiding mechanism；6, semicircle connects hinge；7, Z-type compliant mechanism；8, probe installing hole；9, displacement sensor mounting hole
Specific implementation mode
In order to further understand the content, features and effects of the present invention, the following examples are hereby given, and coordinate attached drawing
Detailed description are as follows：
Please refer to Fig.1~Fig. 2, a kind of high-precision, high stability two-freedom probe feed mechanism, including matrix 1, edge
Two flexible bridge-type enlargers 3, semicircle connects hinge 6, double flat andante guiding mechanism 5 and the Z that Y-axis center line is arranged symmetrically
Type compliant mechanism 7, flexible bridge-type enlarger 3 described in two of which arrange along Y-direction, and respectively by a piezoelectric ceramic actuator
Driving generates X-direction output displacement, and via the semicircle connects hinge 6, power and movement is transmitted to the double flat andante
Guiding mechanism 5, finally movement are transmitted to the Z-type compliant mechanism 7 in mechanism center, both sides symmetrically, to the input bit of central compression
Under shifting effect, Z-type compliant mechanism 7 will generate the output displacement of Z-direction, and the middle part of Z-type compliant mechanism 7 is equipped with probe installing hole 8
With displacement sensor mounting hole 9, probe and displacement sensing are separately installed in probe installing hole 8 and displacement sensor mounting hole 9
Device.
In the present embodiment, the parallel-plate guiding mechanism 5 is equipped with 4 parallel-plates.
The operation principle of probe feed mechanism of the present invention：
Two piezoelectric ceramic actuators 2 provide input displacement for probe feed mechanism, when two piezoelectric ceramic actuators 2 one
When a elongation one is shortened, Z-type compliant mechanism will generate X-direction output displacement, when two piezoelectric ceramic actuators extend simultaneously
Or when shortening, Z-type compliant mechanism will generate Z-direction output displacement；Under the action of piezoelectric ceramic actuator 2, flexible bridge-type amplification
Mechanism 3 will be amplified the input displacement, and displacement is transmitted to double flat andante guiding mechanism by semicircle connects hinge 6
On 5, and finally transmit motion on Z-type compliant mechanism 7.
In conclusion the probe feed mechanism of the present invention is not only able to realize the feed motion of vertical direction, and can
The adjustment of horizontal direction.
The present invention is not limited to embodiments described above.Above the description of specific implementation mode is intended to describe and say
Bright technical scheme of the present invention, the above mentioned embodiment is only schematical, is not restrictive.This is not being departed from
In the case of invention objective and scope of the claimed protection, those skilled in the art may be used also under the inspiration of the present invention
The specific transformation of many forms is made, within these are all belonged to the scope of protection of the present invention.
Claims (3)
1. a kind of two-freedom probe feed mechanism, which is characterized in that even including matrix, flexible bridge-type enlarger, semicircle
Connect hinge, double flat andante guiding mechanism and Z-type compliant mechanism, the flexibility bridge-type enlarger is provided with along Y-axis is symmetrical
Two, and respectively by a piezoelectric ceramic actuator driving to generate the output displacement of X-direction, and via the semicircle connection
Power and movement are transferred to the double flat andante guiding mechanism by hinge, and finally movement is transferred to the Z-type positioned at feed mechanism center
Compliant mechanism, symmetrical in both sides and under being acted on to the input displacement of central compression, Z-type compliant mechanism will generate the carry-out bit of Z-direction
It moves, the center of the Z-type compliant mechanism is equipped with probe and displacement sensor.
2. two-freedom probe feed mechanism according to claim 1, which is characterized in that the parallel-plate guiding mechanism is set
There are 4 parallel-plates.
3. two-freedom probe feed mechanism according to claim 1, which is characterized in that it is characterized in that, feed mechanism
Feeding degree of freedom with vertical direction, and the adjustment of horizontal direction can be carried out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810279239.5A CN108776239A (en) | 2018-03-30 | 2018-03-30 | A kind of two-freedom probe feed mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810279239.5A CN108776239A (en) | 2018-03-30 | 2018-03-30 | A kind of two-freedom probe feed mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108776239A true CN108776239A (en) | 2018-11-09 |
Family
ID=64033756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810279239.5A Pending CN108776239A (en) | 2018-03-30 | 2018-03-30 | A kind of two-freedom probe feed mechanism |
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| CN (1) | CN108776239A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN106195541A (en) * | 2016-07-04 | 2016-12-07 | 山东大学 | A kind of Three Degree Of Freedom Piezoelectric Driving micro-nano locating platform |
| CN106224713A (en) * | 2016-09-09 | 2016-12-14 | 西安交通大学 | A kind of five freedom degree precision positioning platform based on bridge shape compliant mechanism |
| US20160373029A1 (en) * | 2013-10-18 | 2016-12-22 | Shanghai Jiaotong University | Piezo ceramic planar motor and driving method thereof |
| EP3163095A4 (en) * | 2014-06-27 | 2018-03-14 | South China University of Technology | Precise-locating drive end pre-tightening device |
-
2018
- 2018-03-30 CN CN201810279239.5A patent/CN108776239A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20160373029A1 (en) * | 2013-10-18 | 2016-12-22 | Shanghai Jiaotong University | Piezo ceramic planar motor and driving method thereof |
| EP3163095A4 (en) * | 2014-06-27 | 2018-03-14 | South China University of Technology | Precise-locating drive end pre-tightening device |
| CN104505128A (en) * | 2014-12-26 | 2015-04-08 | 天津大学 | Two-freedom-degree, large-travel and large-load micro-positioning platform |
| CN106195541A (en) * | 2016-07-04 | 2016-12-07 | 山东大学 | A kind of Three Degree Of Freedom Piezoelectric Driving micro-nano locating platform |
| CN106224713A (en) * | 2016-09-09 | 2016-12-14 | 西安交通大学 | A kind of five freedom degree precision positioning platform based on bridge shape compliant mechanism |
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Application publication date: 20181109 |
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| WD01 | Invention patent application deemed withdrawn after publication |