CN108759941A - A kind of small-bore measurement by capacitance conduit and preparation method thereof - Google Patents
A kind of small-bore measurement by capacitance conduit and preparation method thereof Download PDFInfo
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- CN108759941A CN108759941A CN201810525513.2A CN201810525513A CN108759941A CN 108759941 A CN108759941 A CN 108759941A CN 201810525513 A CN201810525513 A CN 201810525513A CN 108759941 A CN108759941 A CN 108759941A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
- G01F1/58—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by electromagnetic flowmeters
- G01F1/584—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects by electromagnetic flowmeters constructions of electrodes, accessories therefor
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Abstract
The invention discloses a kind of small-bore measurement by capacitance conduits, include successively from inside to outside：First ceramic layer, electrode layer, the second ceramic layer, shielded layer and third ceramic layer, the electrode wires being connect with electrode layer and the shielding line being connect with shielded layer.Measurement by capacitance conduit in small-bore of the present invention is capacitance type structure, creatively high temperature co-firing multi-layer ceramics technology is applied and is measured on conduit in small-bore, it is capacitance value stabilization between shielded layer and electrode layer, reliable, significantly capacitance can be answered by promotion feeling, the opposite measurement by capacitance conduit with conventional adhesive electrode, its dimensional accuracy higher, capacitance consistency is good, high temperature resistant, vibration resistance, corrosion-resistant.
Description
Technical field
The present invention relates to electromagnetic flow transducer technical field more particularly to a kind of small-bore measurement by capacitance conduit and its
Preparation method.
Background technology
Electromagnetic flow transducer uses faraday's electromagnetic principle (faraday's electromagnetic laws formula E=kBLV), and liquid flows through
Magnetic field, is equivalent to liquid being considered as conductor, and cutting magnetic line generates induced electromotive force E, wherein induced electromotive force E and caliber
L, magnetic field intensity B, flow velocity V are directly proportional, since the parameters such as caliber have been fixed as constant in design, induced electromotive force E's
Variation is only related with flow velocity V, and the size by measuring induced electromotive force E may further derive stream to calculate flow velocity V
The instantaneous volume flow of body, can calculate the parameters such as integrated flow, can be used for the metering fields such as flow rate of liquid, volume.
Conventional electromagnetic flow transducer is in direct contact with liquid using contact electrode, is passed through the voltage between measuring electrode
Method measure, abbreviation electric pole type electromagnetic flow transducer, such electric pole type electromagnetic flow transducer is widely used in macropore
Diameter (L>100mm) in liquid flow measurement, electric pole type electromagnetic flow transducer in small-bore (L 5-100mm) flow detection,
It needs to select noble metal (Pt, Pd) as detecting electrode, in the flow detection of small-bore, since electrode is contacted with liquid, in electricity
There can be electrochemical reaction between pole and liquid, generate potential difference E0, this electrochemical emf, can not compared with signal amplitude
Ignore, and the electrode of unlike material and the liquid of the different chemical contents electrochemical emf generated are different, limit electricity
Pole formula electromagnetic flow transducer is in the application of small-bore (L 5-100mm) flow, and electrode meeting during long-time use
Constantly loss, precision and service life can be affected.Electric pole type electromagnetic flow transducer is widely used in the conductor fluids flow velocity such as water
It measures, is directly contacted with liquid using inert metal electrode, measured in magnetic field, it is interior caused by conducting liquid cutting magnetic line
The induced electromotive force in portion, electrode material are surveyed using materials such as platinum, palladium, stainless steels by techniques such as signal amplification, filtering, calibration
Quantity of fluid flow velocity.
Capacitance-type electromagnetic flow transducer principle is by building capacitance structure, induced electricity being built between electrode and liquid
Hold, signal voltage caused by faraday electromagnetic induction is capacitively coupled to signal acquisition terminal, high low signal and flow
Directly proportional, due to capacitance type structure, it is non-conductive medium to be contacted with liquid, and there is no electrochemical emfs, can overcome electricity
The inaccurate phenomenon of pole formula electromagnetic flow transducer metering, can more accurately measure flow.
Capacitance-type electromagnetic flow transducer, core are the design of the measurement conduit of sensor, and induced electricity capacitance is bigger,
Signal decaying is smaller, and Signal to Noise Ratio (SNR) is better, so the structure of inductance capacitance, material selection, process choice are the most key.Wherein,
It measures conduit to be generally made of non-magnetic stainless steel tube and fluoroplastics lining, magnet exciting coil is installed on measurement conduit with measuring electrode
On.According to the size of capacitor formula C=ε * ε 0*S/d, capacitance C and capacitor plate area, dielectric constant is directly proportional, with distance
It is inversely proportional, to improve the value of inductance capacitance, it is necessary to select the larger material of permittivity ε, contact distance d be reduced, to improve electricity
Hold the value of C, and in practical applications, capacitance should not be given a shock, the influence of the parameters such as temperature, and to the shielding of noise
It is better, signal could be stablized and reliable, to more practical and commercialization.The way of conventional capacitive-type electrode be ceramics or
Coating electrode in other high dielectric constant materials is shielded by additional stickup metallic shield layer method, and reliability is not high, and one
Cause property is poor, and the thickness between liquid is more than 1mm or more, the thickness of coating electrode, and compactness is difficult to ensure that solderability is poor, produces
Consistency can not solve, and shielded layer is shielded using net metal, need manually to be bonded, poor reliability.
Currently, realizing the only a fews such as commercialized only Japanese Keyemce in small-bore condenser type flow sensor in the world
Company, the material for measuring conduit are realized using special engineering plastics, belong to technology secret, and the country belongs to blank in this field.
Invention content
The technical problem to be solved in the present invention is, for the drawbacks described above of the prior art, provides a kind of small-bore capacitance
Formula measures conduit and preparation method thereof.
The technical solution adopted by the present invention to solve the technical problems is：According to an aspect of the present invention, it provides a kind of small
Aperture measurement by capacitance conduit includes successively from inside to outside：First ceramic layer, electrode layer, shielded layer and third ceramic layer and electricity
The electrode wires of pole layer connection and the shielding line being connect with shielded layer.
Preferably, the electrode layer is the first capacitor board and the second capacitor board of 2 symmetrically arranged c-types；The electrode
Line includes the first electrode line being connected with the first capacitor board and the second electrode line being connected with the second capacitor board.
Preferably, the first electrode line passes through third ceramic layer, shielded layer and the second ceramic layer and the first capacitor board phase
Even；Second electrode line is connected across third ceramic layer, shielded layer and the second ceramic layer with the second capacitor board；Shielding line include with
The first connected shielding line of shielded layer and secondary shielding line；First shielding line and secondary shielding line pass through third ceramic layer with screen
Layer is covered to be connected.
Preferably, the permittivity ε of first ceramic layer, the second ceramic layer and third ceramic layer is 8-25.
Preferably, the aperture for measuring conduit is 5~20mm.
The present invention also provides a kind of preparation methods of small-bore measurement by capacitance conduit, include the following steps：
S10, dispensing：Ceramic raw material, solvent, adhesive example high-speed uniform in mass ratio are mixed into casting slurry；
S20, curtain coating：Casting slurry is put into casting machine to be cast to form the ceramic chips of multiple and different thickness；The thickness of ceramic chips
Degree is 50uM or less；
S30, punching：According to the via design requirement for measuring conduit, beaten in the predetermined position of corresponding ceramic chips
Hole forms through-hole；
S40, filling perforation：The through-hole of each ceramic chips is filled with Metal slurry；
S50, printing：Electrode material is respectively formed electrode layer and shielded layer by being screen printed onto on two ceramic chips；
S60, lamination and lamination：According to the design sequence for measuring conduit, will be folded by multiple ceramic chips of filling perforation and printing
Swaging at a densification, have the multi-layer ceramics green body of predetermined strength；
S70, isostatic pressed：It is static pressure that the curling of multi-layer ceramics green body, which is put into mold to carry out high-pressure molding in equal pressing equipment,
Conduit；
S80, high temperature co-firing：By static pressure conduit by carrying out high temperature sintering under the protection of nitrogen in sintering furnace；High temperature is burnt
The temperature of knot is at 1400 DEG C or more；
S90, electrode connection and test：Electrode wires are connect with electrode layer, shielding line and shielded layer connect and to form measurement and lead
Pipe, and test the inductance capacitance and equiva lent impedance for measuring conduit.
Preferably, the ceramic raw material includes aluminium oxide and zirconium oxide；The aluminium oxide, zirconium oxide, solvent, adhesive are pressed
Mass ratio is 80%-90%, 7%-15%, 2%-6% and 2%-5%.
Preferably, the design sequence for measuring conduit is：It is followed successively by the first ceramic chips, electrode layer, second from inside to outside
Ceramic chips, shielded layer and third ceramic chips.
Preferably, 2 through-holes are made a call to the predetermined position of the second ceramic chips, 4 is made a call to the predetermined position of third ceramic chips
A through-hole.
The technical solution for implementing measurement by capacitance conduit in small-bore of the present invention and preparation method thereof, has the following advantages that or has
Beneficial effect：Measurement by capacitance conduit in small-bore of the present invention is capacitance type structure, creatively by high temperature co-firing multi-layer ceramics technology
It applies on the measurement conduit of small-bore, it is capacitance value stabilization between shielded layer and electrode layer, reliable, it can significantly promotion feeling answer
Capacitance, the opposite measurement by capacitance conduit with conventional adhesive electrode, dimensional accuracy higher, capacitance consistency is good, high temperature resistant,
It is vibration resistance, corrosion-resistant.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Attached drawing be briefly described, it is therefore apparent that drawings in the following description are only some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Scheme, in attached drawing：
Fig. 1 is the flow diagram of the preparation method embodiment of measurement by capacitance conduit in small-bore of the present invention；
Fig. 2 is the stereogram of measurement by capacitance conduit embodiments in small-bore of the present invention；
Fig. 3 is the vertical view of measurement by capacitance conduit embodiments in small-bore of the present invention；
Fig. 4 is the front view of measurement by capacitance conduit embodiments in small-bore of the present invention.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, the various implementations that will be described below
Example will refer to corresponding attached drawing, these attached drawings constitute a part for embodiment, and which describe realization, the present invention may adopt
Various embodiments.It should be appreciated that other embodiments also can be used, or structure and work(are carried out to embodiment enumerated herein
Modification on energy, without departing from the scope of the present invention and essence.
As shown in Figure 1, the present invention provides a kind of preparation method embodiment of small-bore measurement by capacitance conduit, specifically include
Following steps：
S10, dispensing：Ceramic raw material, solvent, adhesive example high-speed uniform in mass ratio are mixed to form casting slurry；Tool
Body, ceramic raw material includes Al2O3 and ZrO3 (preferably powder state), and solvent and adhesive, input is added in example in mass ratio
It is uniform to ball milling mixing in high-speed dispersion equipment (such as ball mill), it is formed and is starched with predetermined thixotropy and highly viscous curtain coating
Material.More specifically, the Al2O3, ZrO3, solvent and adhesive example in mass ratio are 80%-90%, 7%-15%, 2%-
6%, 2%-5%.
S20, curtain coating：Casting slurry is put into casting machine to be cast to form the different ceramic chips of multiple thickness；The thickness of ceramic chips
Degree is preferably 50uM or less；Specifically, by casting slurry injection casting machine (preferably steel band casting machine) slurry tank after ball milling
In, casting slurry is flowed to by scraper in base band, and base band transmits casting slurry and forms thickness densification, uniform and tool by drying box
There are predetermined strength and flexible ceramic chips.
S30, punching：According to the via design requirement for measuring conduit, beaten in the predetermined position of corresponding ceramic chips
Hole forms through-hole.Specifically, very crucial to ceramic chips cheesing techniques, pore size, positional precision will directly affect its matter
Amount.Ceramic chips punch mainly by 3 kinds of methods：Numerical control drilling machine drilling, numerical control press punching and laser boring, wherein laser boring
Small to the influence of ceramic chips in drill process, minimum-value aperture is up to 50 μm, and perforating efficiency is high, is that one kind is preferably beaten
Hole method.Preferably, it includes the first ceramic chips (the first ceramic layer), electrode layer, the second green successively to measure conduit from inside to outside
Piece (the second ceramic layer), shielded layer and third ceramic chips (third ceramic layer), therefore, in punching, to the second ceramic chips (the
Two ceramic layers) in predetermined position 2 through-holes are made a call to, 4 through-holes are made a call in predetermined position to third ceramic chips (third ceramic layer),
Specifically, 2 through-holes of the second ceramic chips are used to wear the electrode wires of connection electrode layer, and 4 through-holes of third ceramic chips divide
The electrode wires of connection electrode layer Yong Yu not worn and connect the shielding line of shielded layer.
S40, filling perforation：Each through-hole of ceramic chips is filled with Metal slurry；Specifically, Metal slurry is to lead
Electric material.The method of through-hole filling generally has 2 kinds：Silk-screen printing and conductor raw cook filling perforation.Most commonly used is silk screen print method,
Using the method for negative-pressure ward when silk-screen printing, can make uniformly to be printed on Metal slurry around through-hole.Conductor raw cook filling perforation method
It is to rush in the conductor raw cook more thick than ceramic chips in through-hole, has reached the purpose of via metal, and then realize vertical direction
On electric interconnection.
S50, printing：Electrode material is respectively formed electrode layer and shielded layer by being screen printed onto on 2 ceramic chips；Tool
Body, electrode layer is the capacitance for including 2 capacitor boards, and shielded layer can be a capacitor board, or other forms
Metallization pattern.More specifically, electrode material is the conductive material for including the refractory metals such as tungsten, nickel, molybdenum and/or manganese, together
When, Metal slurry may be the conductive material.
S60, lamination and lamination：By multiple ceramic chips Jing Guo filling perforation and printing, is stacked according to design sequence, laminate to be formed
One densification, the multi-layer ceramics green body for having predetermined strength；Specifically, multiple ceramic chips by special equipment in certain temperature and
It laminates to form multi-layer ceramics green body under pressure.Specifically, design sequence is ceramic chips (third ceramic layer), shielded layer, ceramic chips
(the second ceramic layer), electrode layer, ceramic chips (the first ceramic layer).
S70, isostatic pressed：It is quiet that the curling of multi-layer ceramics green body, which is put into mold, and carries out high-pressure molding in equal pressing equipment
Press conduit；Specifically, this process and structure design need to consider the coefficient of expansion of ceramic material and sintered shrinking percentage.
More specifically, by multi-layer ceramics green body in the high-pressure bottle of equal pressing equipment using the incompressible characteristic of liquid medium and
The property of uniform conductive pressure carries out uniform pressurization, when liquid medium passes through compression pump from all directions to multi-layer ceramics green body
When injecting high-pressure bottle, pressure is constant and is evenly transferred to all directions, and multi-layer ceramics green body is made to receive in all directions
Even pressure.Isostatic pressing process can effectively reduce or eliminate stomata, especially large-sized stomata, be multi-layer ceramics green body
Densification provides good solution.
S80, high temperature co-firing：By static pressure conduit by carrying out high temperature sintering under the protection of nitrogen (N2) in sintering furnace；Tool
Body, the temperature of high temperature sintering is at 1400 DEG C or more；Dumping is carried out to static pressure conduit by sintering process, the purpose of sintering has been
Kind solid phase reaction, makes granular material be transformed into dense body.
Static pressure conduit is put into stove, heats and fires according to set sintering curre.Organic bond therein is vaporized
Or burn off, referred to as dumping.The heating curve of dumping is different with the difference of adhesive composition.The process of dumping cannot be too fast,
It should be carried out according to stringent dumping heating curve, otherwise can crack caused by the quick volatilization of organic principle or dumping is insufficient；
If dumping is excessive, and may make static pressure conduit fragmentation, therefore, heating rate is arranged according to set sintering curre to protect when sintering
Demonstrate,prove consistency, flatness and the shrinking percentage of static pressure conduit.
S90, electrode connection and test：Electrode wires are connect with electrode layer, shielding line and shielded layer connect and to form measurement and lead
Pipe；And test measure conduit inductance capacitance and equiva lent impedance, after sintering measure conduit must be tested, verification electrode layer and
The connectivity of the wiring of shielded layer.The instrument of test is mainly the automatic chip spy for visiting tester, package system company of the U.S.
Needle instrument etc..
Small-bore measurement by capacitance conduit prepared by the preparation method embodiment of measurement by capacitance conduit in small-bore of the present invention
Product is specifically as described later.
The ceramic material of high-k is mixed and made into slurry by preparation method of the present invention by solvent, by being cast legal system
At ceramic chips, the screen printed electrode material on ceramic chips, and concentric poroid silk-screen is made by techniques such as punching, curling, isostatic presseds
The measurement conduit with electrode layer and shielded layer double-layer structure is made, between liquid in diaphragm, and cofiring dumping at high temperature
It can be controlled within 0.2mm away from d, permittivity ε can significantly promote induced electricity between 8-25 using this technology
Capacitance, the opposite capacitance type sensor with conventional adhesive electrode, dimensional accuracy higher, capacitance consistency is good, high temperature resistant, shatter-proof
It is dynamic, corrosion-resistant, since its shielded layer takes the technology of cofiring (method that conventional shielded layer uses external spray or bonding) simultaneously,
Capacitance value stabilization between shielded layer and electrode layer reliably for subsequent conditioning circuit processing, provides stable signal processing means,
The stability of product can greatly be promoted.
As in Figure 2-4, the present invention also provides a kind of small-bore measurement by capacitance conduit embodiments, measure conduit by it is interior to
Include successively outside：First ceramic layer 11, electrode layer 12, the second ceramic layer 13, shielded layer 14 and third ceramic layer 15 and electrode
The electrode wires 16 of 12 connection of layer and the shielding line 17 being connect with shielded layer 14.Specifically, first ceramic layer 11, second
The permittivity ε of ceramic layer 13 and third ceramic layer 15 is 8-25.More specifically, the spacing d for measuring conduit and liquid can be with
Within 0.2mm, the aperture of the measurement conduit is 5~20mm for control.
Measurement by capacitance conduit in small-bore of the present invention is capacitance type structure, creatively by high-temperature co-fired ceramics multilayer technique
(HTCC) it applies on the measurement conduit of small-bore, specific preparation method refers to embodiment of the method.Due to taking multi-layer high-temperature to make pottery
Porcelain cofiring technology (general measure conduit is using external spray or the method for bonding), capacitance is steady between electrode layer and shielded layer
It is fixed, reliable, for subsequent conditioning circuit processing, stable signal processing means are provided, can greatly be promoted and measure the steady of conduit
It is qualitative.Capacitance significantly can be answered by promotion feeling using this technology, the opposite measurement by capacitance conduit with conventional adhesive electrode,
Dimensional accuracy higher, capacitance consistency is good, high temperature resistant, vibration resistance, corrosion-resistant.From process aspect improve the accuracy of measurement with
Stability, and the service life for measuring conduit is significantly promoted, different dielectric can be selected normal according to measurement structure intensity requirement
Several ceramic materials further increases the applicability and competitiveness for measuring conduit.
In the present embodiment, the electrode layer 12 includes the electricity of the first capacitor board 12a and second of 2 symmetrically arranged c-types
Hold plate 12b, the first capacitor board 12a and the second capacitor board 12b forms a capacitance；Electrode wires 16 include and the first capacitor board 12a
The connected first electrode line 16a and second electrode line 16b being connected with the second capacitor board 12b.Specifically, first electricity
Polar curve 16a is connected across third ceramic layer 15, shielded layer 14 and the second ceramic layer 13 with the first capacitor board 12a；Second electrode line
16b is connected across third ceramic layer 15, shielded layer 14 and the second ceramic layer 13 with the second capacitor board 12b.More specifically, electrode
Layer 12 and shielded layer 14 are the electrode material of high temperature, and electrode material is to include the refractory metals such as tungsten, nickel, molybdenum and/or manganese
Conductive material, meanwhile, Metal slurry may be the conductive material.
In the present embodiment, the shielding line 17 includes the first shielding line 17a and the second screen being connected with shielded layer 14
Cover line 17b；Wherein, the first shielding line 17a and secondary shielding line 17b are connected with shielded layer 14 across third ceramic layer 15.
The present invention uses refractory ceramics cofiring technology by the technique of electrode layer, shielded layer and ceramic layer cofiring, and metallizes
Via line is made, good reliability, and capacitance is significantly promoted (identical caliber is about adhered 4-5 times or more), shielding
Reliable and stable, the corrosion-resistant, high temperature resistant of layer, vibration resistance, can be used for the fields such as unmanned plane, chemical industry, oil, agricultural, this technique belongs to
The world is pioneering.It can be used for small-bore plant protection drone pesticide spraying flow measurement, be resistant to pesticide and corrode, unmanned plane high-frequency vibration,
And the monitoring etc. of big electromagnetic interference environment down-off.
The foregoing is merely illustrative of the preferred embodiments of the present invention, and those skilled in the art know, is not departing from the present invention
Spirit and scope in the case of, various changes or equivalent replacement can be carried out to these features and embodiment.In addition, in this hair
Under bright introduction, it can modify to these features and embodiment to adapt to particular situation and material without departing from this hair
Bright spirit and scope.Therefore, the present invention is not limited to the particular embodiment disclosed, the power of fallen with the application
Embodiment in sharp claimed range belongs to protection scope of the present invention.
Claims (10)
1. a kind of small-bore measurement by capacitance conduit, which is characterized in that include successively from inside to outside：First ceramic layer (11), electricity
Pole layer (12), the second ceramic layer (13), shielded layer (14) and third ceramic layer (15), the electrode being connect with the electrode layer (12)
Line (16) and the shielding line (17) being connect with the shielded layer (14).
2. measurement conduit according to claim 1, which is characterized in that the electrode layer (12) includes 2 symmetrically arranged C
The first capacitor board (12a) and the second capacitor board (12b) of type；The electrode wires (16) include and first capacitor board (12a)
Connected first electrode line (16a) and the second electrode line (16b) being connected with second capacitor board (12b).
3. measurement conduit according to claim 2, which is characterized in that the first electrode line (16a) passes through the third
Ceramic layer (15), shielded layer (14) and the second ceramic layer (13) are connected with first capacitor board (12a)；The second electrode line
(16b) passes through the third ceramic layer (15), shielded layer (14) and the second ceramic layer (13) and the second capacitor board (12b) phase
Even；
The shielding line (17) includes the first shielding line (17a) being connected with the shielded layer (14) and secondary shielding line
(17b)；First shielding line (17a) and secondary shielding line (17b) pass through the third ceramic layer (15) with the shielding
Layer (14) is connected.
4. measurement conduit according to claim 1, which is characterized in that first ceramic layer (11), the second ceramic layer
(13) and the permittivity ε of third ceramic layer (15) is 8-25.
5. measurement conduit according to claim 1, which is characterized in that the aperture for measuring conduit is 5~20mm.
6. a kind of preparation method of small-bore measurement by capacitance conduit, which is characterized in that include the following steps：
S10, dispensing：Ceramic raw material, solvent, adhesive example high-speed uniform in mass ratio are mixed into casting slurry；
S20, curtain coating：The casting slurry is put into casting machine to be cast to form the ceramic chips of multiple and different thickness；The ceramic chips
Thickness be 50uM or less；
S30, punching：According to the via design requirement for measuring conduit, beaten in the predetermined position of the corresponding ceramic chips
Hole forms through-hole；
S40, filling perforation：The through-hole of each ceramic chips is filled with Metal slurry；
S50, printing：Electrode material is respectively formed electrode layer and shielded layer by being screen printed onto on two ceramic chips；
S60, lamination and lamination：According to the design sequence for measuring conduit, will be folded by multiple ceramic chips of filling perforation and printing
Swaging at a densification, have the multi-layer ceramics green body of predetermined strength；
S70, isostatic pressed：It is static pressure that multi-layer ceramics green body curling, which is put into mold to carry out high-pressure molding in equal pressing equipment,
Conduit；
S80, high temperature co-firing：By the static pressure conduit by carrying out high temperature sintering under the protection of nitrogen in sintering furnace；The height
The temperature of temperature sintering is at 1400 DEG C or more；
S90, electrode connection and test：Electrode wires are connect with the electrode layer, shielding line connect to form survey with the shielded layer
Conduit is measured, and tests the inductance capacitance and equiva lent impedance for measuring conduit.
7. preparation method according to claim 6, which is characterized in that the ceramic raw material includes aluminium oxide and zirconium oxide.
8. preparation method according to claim 7, which is characterized in that the aluminium oxide, zirconium oxide, solvent, adhesive are pressed
Mass ratio is 80%-90%, 7%-15%, 2%-6% and 2%-5%.
9. preparation method according to claim 6, which is characterized in that it is described measure conduit design sequence be：By it is interior to
It is followed successively by the first ceramic chips, electrode layer, the second ceramic chips, shielded layer and third ceramic chips outside.
10. preparation method according to claim 6, which is characterized in that make a call to 2 to the predetermined position of second ceramic chips
A through-hole makes a call to 4 through-holes to the predetermined position of the third ceramic chips.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110542459A (en) * | 2018-05-28 | 2019-12-06 | 深圳研勤达科技有限公司 | Small-aperture capacitive electromagnetic flow sensor |
| CN113495191A (en) * | 2020-04-01 | 2021-10-12 | 中国科学院上海硅酸盐研究所 | Preparation method of seven-electrode conductivity sensor |
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| CN208350149U (en) * | 2018-05-28 | 2019-01-08 | 深圳研勤达科技有限公司 | A kind of small-bore measurement by capacitance conduit |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110542459A (en) * | 2018-05-28 | 2019-12-06 | 深圳研勤达科技有限公司 | Small-aperture capacitive electromagnetic flow sensor |
| CN113495191A (en) * | 2020-04-01 | 2021-10-12 | 中国科学院上海硅酸盐研究所 | Preparation method of seven-electrode conductivity sensor |
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