CN108757407B - Standing wave type double-vibrator valveless piezoelectric pump and working method thereof - Google Patents
Standing wave type double-vibrator valveless piezoelectric pump and working method thereof Download PDFInfo
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- CN108757407B CN108757407B CN201810575372.5A CN201810575372A CN108757407B CN 108757407 B CN108757407 B CN 108757407B CN 201810575372 A CN201810575372 A CN 201810575372A CN 108757407 B CN108757407 B CN 108757407B
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- 238000000034 method Methods 0.000 title claims abstract description 7
- 229920002379 silicone rubber Polymers 0.000 claims abstract description 111
- 239000000758 substrate Substances 0.000 claims abstract description 63
- 239000007788 liquid Substances 0.000 claims abstract description 17
- 239000000919 ceramic Substances 0.000 claims abstract description 11
- 239000004945 silicone rubber Substances 0.000 claims description 26
- 238000003825 pressing Methods 0.000 claims description 18
- 238000005452 bending Methods 0.000 claims description 6
- 230000006835 compression Effects 0.000 description 8
- 238000007906 compression Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 4
- 238000005253 cladding Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
The invention discloses a standing wave type double-vibrator valveless piezoelectric pump and a working method thereof, wherein the pump comprises two pre-pressure top plates, two piezoelectric vibrators, two silicon rubber layers and a substrate, wherein the two silicon rubber layers are respectively arranged on two sides of the substrate; two piezoelectric vibrators are respectively arranged on the outer sides of the silicon rubber layers; two pre-pressure top plates are respectively arranged on the outer sides of the piezoelectric vibrators; the bolts fix the structure and apply a certain pre-pressure to the piezoelectric vibrator. The silicon rubber layer and the substrate are provided with a plurality of gaps which correspond to each other, and the positions of the gaps correspond to the wave crest and the wave trough of the standing waves of the two piezoelectric vibrators. By exciting the piezoelectric ceramic plates on the two piezoelectric vibrators, the two vibrators respectively generate standing waves with pi/2 phase difference in time, so that volume change and gap opening and closing of specific time sequences are generated between the vibrators and the silicon rubber layer, and liquid in the cavity is pressed to realize directional flow.
Description
Technical Field
The invention relates to the field of piezoelectric actuators and piezoelectric pumps, in particular to a standing wave type double-vibrator valveless piezoelectric pump and a working method thereof.
Background
With the development of MEMS technology in recent years, there is a great development space for the micro-pump technology, and the piezoelectric pump relying on the inverse piezoelectric effect is one of the most mature and easy-to-implement micro-pump technologies. In the past, most piezoelectric pumps realize the change of the cavity volume by the deformation of an equal-pressure original element such as a piezoelectric film so as to realize the pumping of the piezoelectric pump, and the flow direction of fluid is realized by forming a pressure difference through a one-way valve of an inlet and an outlet or a specific flow passage shape of the inlet and the outlet.
However, the valved piezoelectric pump using the check valve is not easily miniaturized due to the presence of the valve. On the other hand, the back pressure of the conventional valveless piezoelectric pump using a specific flow path shape to form a pressure difference is small, and the performance is not good enough.
Disclosure of Invention
The invention aims to solve the technical problem of providing a standing wave type double-vibrator valveless piezoelectric pump and a working method thereof aiming at the defects related to the background technology.
The invention adopts the following technical scheme for solving the technical problems:
a standing wave type double-vibrator valveless piezoelectric pump comprises a substrate, a first silicon rubber layer, a second silicon rubber layer, a first piezoelectric vibrator, a second piezoelectric vibrator and a first pre-pressure top plate and a second pre-pressure top plate;
the substrate is of a rectangular sheet structure, and wrapping plates are arranged on four sides of the substrate, so that a cuboid cavity without an upper end face is formed on the upper side of the substrate, and a cuboid cavity without a lower end face is formed on the lower side of the substrate;
the first and second silicone rubber layers are of rectangular sheet structures, wherein the short side and the two long sides of the left side of the first silicone rubber layer are respectively provided with a silicone rubber sheet which is upward and vertical to the first silicone rubber layer, so that a cuboid cavity with an upper end face and a right side face open is formed on the upper side of the first silicone rubber layer; the right short side and the two long sides of the second silicon rubber layer are respectively provided with a silicon rubber sheet which is downward and vertical to the second silicon rubber layer, so that a cuboid cavity with an opening lower end face and a left side face is formed at the lower side of the second silicon rubber layer;
the first silicon rubber layer is arranged on the upper end face of the substrate, and the left short side and the two long sides of the first silicon rubber layer are in interference fit with the cavity of the upper end face of the substrate; the second silicon rubber layer is arranged on the lower end face of the substrate, and the right short side and the two long sides of the second silicon rubber layer are in interference fit with the cavity of the lower end face of the substrate;
the first piezoelectric vibrator and the second piezoelectric vibrator both comprise rectangular bearing plates and a plurality of piezoelectric ceramic plates, wherein the bearing plates of the first piezoelectric vibrator are arranged in a cavity at the upper side of the first silicon rubber layer, the short side and the two long sides at the left side of the bearing plates of the first piezoelectric vibrator are respectively in interference fit with the cavity at the upper side of the first silicon rubber layer correspondingly, and the piezoelectric ceramic plates of the first piezoelectric vibrator are arranged on the upper surfaces of the bearing plates of the first piezoelectric vibrator and are used for exciting bending vibration modes of the bearing plates of the first piezoelectric vibrator; the bearing plate of the second piezoelectric vibrator is arranged in the cavity at the lower side of the second silicon rubber layer, the short side and the two long sides at the right side of the bearing plate are respectively in interference fit with the cavity at the lower side of the second silicon rubber layer correspondingly, and the plurality of piezoelectric ceramic plates of the second piezoelectric vibrator are arranged on the lower surface of the bearing plate and used for exciting the bending vibration mode of the bearing plate;
the first pre-pressure top plate is arranged on the first piezoelectric vibrator, the lower end face of the first pre-pressure top plate is provided with a plurality of strip-shaped pressing blocks for pressing the first piezoelectric vibrator bearing plate, and the pressing blocks of the first pre-pressure top plate are all arranged at the node line position of the standing wave on the first piezoelectric vibrator bearing plate; the two sides of the first pre-pressure top plate are respectively provided with a side plate for wrapping the wrapping plates at the two long sides of the base plate, and the side plates at the two sides of the first pre-pressure top plate are respectively provided with a fixing plate which is vertical to the side plates and faces outwards;
the second pre-pressure top plate is arranged below the second piezoelectric vibrator, the upper end face of the second pre-pressure top plate is provided with a plurality of strip-shaped pressing blocks for pressing the second piezoelectric vibrator bearing plate, and the pressing blocks of the second pre-pressure top plate are all arranged at the node line position of the standing wave on the second piezoelectric vibrator bearing plate; the two sides of the first pre-pressure top plate are respectively provided with a side plate for wrapping the wrapping plates at the two long sides of the base plate, and the side plates at the two sides of the second pre-pressure top plate are respectively provided with a fixing plate which is vertical to the side plates and faces outwards;
the fixing plates on the side plates on the two sides of the first pre-pressure top plate are respectively and correspondingly fixedly connected with the fixing plates on the side plates on the two sides of the second pre-pressure top plate;
the substrate, the first silicon rubber layer and the second silicon rubber layer are respectively provided with a slit perpendicular to a straight line where the long side of the substrate is located at the wave crest and the wave trough of the standing wave generated by the first piezoelectric vibrator;
the substrate, the first silicon rubber layer and the second silicon rubber layer are respectively provided with a slit perpendicular to a straight line where the long side of the substrate is located at the wave crest and the wave trough of the standing wave generated by the second piezoelectric vibrator;
the first piezoelectric vibrator generates standing waves and the second piezoelectric vibrator generates standing waves which are identical but are staggered, the dislocation distance is greater than zero and smaller than 1/2 of the wavelength of the standing waves, a first inlet and a second inlet are formed between the right short side of the first piezoelectric vibrator bearing plate and the wrapping plate on the right side of the upper end face of the substrate, and a second inlet and a second outlet are formed between the left short side of the second piezoelectric vibrator bearing plate and the wrapping plate on the left side of the lower end face of the substrate.
As a further optimization scheme of the standing wave type double-vibrator valveless piezoelectric pump, at least two positioning columns for positioning are arranged on the upper end face and the lower end face of the substrate;
positioning holes which are in one-to-one correspondence with the positioning columns on the upper end face of the substrate are formed in the first silicon rubber layer and the bearing plate of the first piezoelectric vibrator, and the positioning columns on the upper end face of the substrate sequentially penetrate through the first silicon rubber layer and the bearing plate of the first piezoelectric vibrator and the corresponding positioning holes;
and the bearing plates of the second silicon rubber layer and the second piezoelectric vibrator are respectively provided with positioning holes corresponding to the positioning columns on the lower end surface of the substrate one by one, and the positioning columns on the lower end surface of the substrate sequentially penetrate through the second silicon rubber layer and the bearing plates of the second piezoelectric vibrator and the corresponding positioning holes.
As a further optimization scheme of the standing wave type double-vibrator valveless piezoelectric pump, grooves are formed in the outer walls of the wrapping plates at the two long sides of the substrate;
protrusions matched with grooves on the outer walls of the wrapping plates at the two long sides of the base plate are arranged on the side plates at the two sides of the first pre-pressure top plate and the second pre-pressure top plate, so that the base plate is prevented from moving relative to the first pre-pressure top plate and the second pre-pressure top plate.
The invention also discloses a control method based on the standing wave type double-vibrator valveless piezoelectric pump, which comprises the following steps:
sinusoidal signals with pi/2 difference in time are applied to the first piezoelectric vibrator and the second piezoelectric vibrator, so that a plurality of cavities which change with time are formed between the first piezoelectric vibrator and the first silicon rubber layer and between the second piezoelectric vibrator and the second silicon rubber layer, meanwhile, the trough of the first piezoelectric vibrator is attached to the gap on the first silicon rubber layer, the crest of the second piezoelectric vibrator is attached to the gap on the second silicon rubber layer, so that the corresponding gap is closed, the rest gaps are opened, the trough of the crest changes with time, and the gap is correspondingly opened and closed; the change of the volume and the position of the cavity is matched with the opening and closing of gaps on the first silicon rubber layer and the second silicon rubber layer, so that liquid is pumped from the first inlet and outlet to the second inlet and outlet or from the second inlet and outlet to the first inlet and outlet;
and changing the flowing direction of the liquid by changing the sequence of the phase differences of the sinusoidal signals of the first piezoelectric vibrator and the second piezoelectric vibrator.
Compared with the prior art, the technical scheme provided by the invention has the following technical effects:
1. the piezoelectric vibrator has small amplitude, can realize pumping out of extremely small flow, and is applied to the field of precise measurement;
2. the device has the advantages of no traditional one-way valve, simple structure, better back pressure and power-off self-locking;
3. the open structure can be applied to the field of deep sea operation.
Drawings
FIG. 1 is an isometric view of the front face of a standing wave dual vibrator valveless piezoelectric pump structure of the present invention;
FIG. 2 is an exploded view of the front face of the present invention;
FIG. 3 is a cross-sectional view of the front face of the present invention;
FIG. 4 is a schematic view of a structure of a substrate;
FIG. 5 is a schematic structural view of a silicone rubber layer;
fig. 6 is a schematic structural view of a piezoelectric vibrator;
FIG. 7 is a schematic view of the structure of a pre-stressed top plate;
fig. 8 is a schematic diagram of the operation of the working part.
In the figure, 1-substrate; 1-1-positioning columns; 1-2-a slit on the substrate; 1-3-cladding; 1-4-grooves on the outer wall of the cladding plate at the long edge of the base plate; 2-a first silicone rubber layer; 2-1-positioning holes on the first silicone rubber layer; a slit in the 2-2-first silicone rubber layer; 2-3-silicone rubber sheet; 3-a first piezoelectric vibrator; 3-1-positioning holes on the first piezoelectric vibrator bearing plate; 3-2-piezoelectric ceramic plates; 4-a second pre-stressed top plate; 4-1-protrusions on the side plates on both sides of the second pre-compression top plate; 4-2-bolt holes; 4-3-briquetting; 5-bolts.
Detailed Description
The technical scheme of the invention is further described in detail below with reference to the accompanying drawings:
this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the components are exaggerated for clarity.
The invention relates to a standing wave type double-vibrator valveless piezoelectric pump, which comprises a substrate, a first silicon rubber layer, a second silicon rubber layer, a first piezoelectric vibrator, a second piezoelectric vibrator, a first precompression top plate and a second precompression top plate, as shown in figures 1, 2 and 3.
The base plate is rectangular sheet structure, and its four sides all are equipped with the package board for the upside of base plate forms the cuboid form cavity that does not have the up end, and the downside forms the cuboid form cavity that does not have the lower terminal surface, as shown in fig. 4.
The first and second silicone rubber layers are rectangular sheet structures, wherein the short side and the two long sides of the left side of the first silicone rubber layer are respectively provided with a silicone rubber sheet which is upward and vertical to the first silicone rubber layer, so that a cuboid cavity with an upper end face and a right side face open is formed on the upper side of the first silicone rubber layer; the short side and the two long sides on the right side of the second silicone rubber layer are respectively provided with a silicone rubber sheet which is downward and vertical to the second silicone rubber layer, so that the lower side of the second silicone rubber layer forms a cuboid cavity with an opening on the lower end face and the left side face, as shown in fig. 5.
The first silicon rubber layer is arranged on the upper end face of the substrate, and the left short side and the two long sides of the first silicon rubber layer are in interference fit with the cavity of the upper end face of the substrate; the second silicon rubber layer is arranged on the lower end face of the base plate, and the right short side and the two long sides of the second silicon rubber layer are in interference fit with the cavity of the lower end face of the base plate.
The first piezoelectric vibrator and the second piezoelectric vibrator both comprise a rectangular bearing plate and a plurality of piezoelectric ceramic plates, as shown in fig. 6. The bearing plate of the first piezoelectric vibrator is arranged in the cavity at the upper side of the first silicon rubber layer, the short side and the two long sides at the left side of the bearing plate are respectively in interference fit with the cavity at the upper side of the first silicon rubber layer correspondingly, and the piezoelectric ceramic plates of the first piezoelectric vibrator are arranged on the upper surface of the bearing plate and used for exciting the bending vibration mode of the bearing plate; the bearing plate of the second piezoelectric vibrator is arranged in the cavity at the lower side of the second silicon rubber layer, the short side and the two long sides at the right side of the bearing plate are respectively in corresponding interference fit with the cavity at the lower side of the second silicon rubber layer, and the plurality of piezoelectric ceramic plates of the second piezoelectric vibrator are arranged on the lower surface of the bearing plate and used for exciting the bending vibration mode of the bearing plate.
In the invention, the interference fit between the substrate and the first and second silicon rubber layers, the interference fit between the first piezoelectric vibrator and the first silicon rubber layer, and the interference fit between the second piezoelectric vibrator and the second silicon rubber layer are all used for sealing.
The pre-stressed roof structure is shown in fig. 7. The first pre-pressure top plate is arranged on the first piezoelectric vibrator, the lower end face of the first pre-pressure top plate is provided with a plurality of strip-shaped pressing blocks for pressing the first piezoelectric vibrator bearing plate, and the pressing blocks of the first pre-pressure top plate are all arranged at the node line position of the standing wave on the first piezoelectric vibrator bearing plate; the two sides of the first pre-pressure top plate are respectively provided with a side plate for wrapping the wrapping plates at the two long edges of the base plate, and the side plates at the two sides of the first pre-pressure top plate are respectively provided with a fixing plate which is perpendicular to the side plates and faces outwards.
The second pre-pressure top plate is arranged below the second piezoelectric vibrator, the upper end surface of the second pre-pressure top plate is provided with a plurality of strip-shaped pressing blocks for pressing the second piezoelectric vibrator bearing plate, and the pressing blocks of the second pre-pressure top plate are all arranged at the node line position of the standing wave on the second piezoelectric vibrator bearing plate; the first pre-compression top plate is provided with side plates which are used for wrapping the wrapping plates at the two long edges of the base plate at two sides of the first pre-compression top plate, and the side plates at two sides of the second pre-compression top plate are provided with fixing plates which are perpendicular to the side plates and face outwards.
The fixing plates on the side plates on the two sides of the first precompression top plate are respectively and correspondingly fixedly connected with the fixing plates on the side plates on the two sides of the second precompression top plate.
The substrate, the first silicon rubber layer and the second silicon rubber layer are respectively provided with a slit perpendicular to the straight line where the long side of the substrate is located at the crest and the trough of the standing wave generated by the first piezoelectric vibrator, and the substrate, the first silicon rubber layer and the second silicon rubber layer are respectively provided with a slit perpendicular to the straight line where the long side of the substrate is located at the crest and the trough of the standing wave generated by the second piezoelectric vibrator, as shown in figures 4 and 5.
The first piezoelectric vibrator generates standing waves and the second piezoelectric vibrator generates standing waves which are identical but are staggered, the dislocation distance is larger than zero and smaller than 1/2 of the wavelength of the standing waves, a first inlet and a second inlet are formed between the right short side of the first piezoelectric vibrator bearing plate and the wrapping plate on the right side of the upper end face of the substrate, and a second inlet and a second outlet are formed between the left short side of the second piezoelectric vibrator bearing plate and the wrapping plate on the left side of the lower end face of the substrate.
At least two positioning columns for positioning are arranged on the upper end face and the lower end face of the base plate.
As shown in fig. 2, the first silicone rubber layer and the bearing plate of the first piezoelectric vibrator are respectively provided with positioning holes corresponding to the positioning columns on the upper end surface of the substrate one by one, and the positioning columns on the upper end surface of the substrate sequentially penetrate through the first silicone rubber layer and the bearing plate of the first piezoelectric vibrator and the corresponding positioning holes.
And the second silicon rubber layer and the bearing plate of the second piezoelectric vibrator are respectively provided with positioning holes corresponding to the positioning columns on the lower end surface of the substrate one by one, and the positioning columns on the lower end surface of the substrate sequentially penetrate through the second silicon rubber layer and the bearing plate of the second piezoelectric vibrator and the corresponding positioning holes.
Grooves are formed in the outer walls of the wrapping plates at the two long sides of the substrate, protrusions matched with the grooves in the outer walls of the wrapping plates at the two long sides of the substrate are arranged on the side plates at the two sides of the first pre-compression top plate and the second pre-compression top plate, and therefore the substrate is prevented from moving relative to the first pre-compression top plate and the second pre-compression top plate.
The working principle of the invention is as follows: sinusoidal signals with pi/2 difference in time are applied to the first piezoelectric vibrator and the second piezoelectric vibrator, a plurality of cavities which change along with time are formed between the first piezoelectric vibrator and the first silicon rubber layer and between the second piezoelectric vibrator and the second silicon rubber layer, meanwhile, the trough of the first piezoelectric vibrator is attached to the gap on the first silicon rubber layer, the crest of the second piezoelectric vibrator is attached to the gap on the second silicon rubber layer, corresponding gaps are closed, other gaps are opened, and the trough of the crest changes along with time, so that the gaps are correspondingly opened and closed. The change of the volume and the position of the cavity is matched with the opening and closing of gaps on the first silicon rubber layer and the second silicon rubber layer, so that liquid is pumped from the first inlet and outlet to the second inlet and outlet or from the second inlet and outlet to the first inlet and outlet.
The working principle is specifically described with reference to fig. 8: in one vibration period of the first piezoelectric vibrator and the second piezoelectric vibrator, defining the time when the position of the first piezoelectric vibrator close to one end of the inlet is the maximum displacement as the 0 time of the motion period of the two piezoelectric vibrators, wherein the second piezoelectric vibrator is not deformed; after that, the deformation of the first piezoelectric vibrator is reduced, the second piezoelectric vibrator starts to deform, the gap A at the inlet is opened, and the liquid enters the cavity a; when t=T/4, the first piezoelectric vibrator is free from deformation, the second piezoelectric vibrator is deformed to reach the maximum value, and the liquid volume in the cavity a reaches the maximum value; after that, the deformation of the first piezoelectric vibrator enables the gap A and the gap B to be opened at the same time, the volume of the cavity a is reduced, the volume of the cavity B is increased, and liquid enters the cavity B from the cavity a through the gap A and the gap B; when t=T/2, the second piezoelectric vibrator is not deformed, the deformation of the first piezoelectric vibrator reaches the maximum value, and the liquid volume in the cavity b reaches the maximum value; after that, the deformation of the second piezoelectric vibrator causes the gap B and the gap C to be opened, the gap A is in a closed state, the volume of the cavity B is reduced, the volume of the cavity C is increased, and liquid enters the cavity C from the cavity B through the gap B and the gap C; when t=3t/4, the first piezoelectric vibrator is not deformed, the second piezoelectric vibrator is deformed to reach the maximum value, and the liquid volume in the cavity c reaches the maximum value; after that, the deformation of the first piezoelectric vibrator causes the gap C and the gap D to be opened, the gap B is in a closed state, the volume of the cavity C is reduced, the volume of the cavity D is increased, and liquid enters the cavity D from the cavity C through the gap C and the gap D; when t=T, the second piezoelectric vibrator is free from deformation, the deformation of the first piezoelectric vibrator reaches the maximum value, and the liquid volume in the cavity d reaches the maximum value; at this time, the liquid moves from the inlet to the cavity d in a single direction, the vibration cycle of the first piezoelectric vibrator and the second piezoelectric vibrator is continued, and the liquid continues to move until flowing out from the outlet.
And changing the flowing direction of the liquid by changing the sequence of the phase differences of the sinusoidal signals of the first piezoelectric vibrator and the second piezoelectric vibrator.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
While the foregoing is directed to embodiments of the present invention, other and further details of the invention may be had by the present invention, it should be understood that the foregoing description is merely illustrative of the present invention and that no limitations are intended to the scope of the invention, except insofar as modifications, equivalents, improvements or modifications are within the spirit and principles of the invention.
Claims (4)
1. The standing wave type double-vibrator valveless piezoelectric pump is characterized by comprising a substrate, first to second silicon rubber layers, first to second piezoelectric vibrators and first to second pre-pressure top plates;
the substrate is of a rectangular sheet structure, and wrapping plates are arranged on four sides of the substrate, so that a cuboid cavity without an upper end face is formed on the upper side of the substrate, and a cuboid cavity without a lower end face is formed on the lower side of the substrate;
the first and second silicone rubber layers are of rectangular sheet structures, wherein the short side and the two long sides of the left side of the first silicone rubber layer are respectively provided with a silicone rubber sheet which is upward and vertical to the first silicone rubber layer, so that a cuboid cavity with an upper end face and a right side face open is formed on the upper side of the first silicone rubber layer; the right short side and the two long sides of the second silicon rubber layer are respectively provided with a silicon rubber sheet which is downward and vertical to the second silicon rubber layer, so that a cuboid cavity with an opening lower end face and a left side face is formed at the lower side of the second silicon rubber layer;
the first silicon rubber layer is arranged on the upper end face of the substrate, and the left short side and the two long sides of the first silicon rubber layer are in interference fit with the cavity of the upper end face of the substrate; the second silicon rubber layer is arranged on the lower end face of the substrate, and the right short side and the two long sides of the second silicon rubber layer are in interference fit with the cavity of the lower end face of the substrate;
the first piezoelectric vibrator and the second piezoelectric vibrator both comprise rectangular bearing plates and a plurality of piezoelectric ceramic plates, wherein the bearing plates of the first piezoelectric vibrator are arranged in a cavity at the upper side of the first silicon rubber layer, the short side and the two long sides at the left side of the bearing plates of the first piezoelectric vibrator are respectively in interference fit with the cavity at the upper side of the first silicon rubber layer correspondingly, and the piezoelectric ceramic plates of the first piezoelectric vibrator are arranged on the upper surfaces of the bearing plates of the first piezoelectric vibrator and are used for exciting bending vibration modes of the bearing plates of the first piezoelectric vibrator; the bearing plate of the second piezoelectric vibrator is arranged in the cavity at the lower side of the second silicon rubber layer, the short side and the two long sides at the right side of the bearing plate are respectively in interference fit with the cavity at the lower side of the second silicon rubber layer correspondingly, and the plurality of piezoelectric ceramic plates of the second piezoelectric vibrator are arranged on the lower surface of the bearing plate and used for exciting the bending vibration mode of the bearing plate;
the first pre-pressure top plate is arranged on the first piezoelectric vibrator, the lower end face of the first pre-pressure top plate is provided with a plurality of strip-shaped pressing blocks for pressing the first piezoelectric vibrator bearing plate, and the pressing blocks of the first pre-pressure top plate are all arranged at the node line position of the standing wave on the first piezoelectric vibrator bearing plate; the two sides of the first pre-pressure top plate are respectively provided with a side plate for wrapping the wrapping plates at the two long sides of the base plate, and the side plates at the two sides of the first pre-pressure top plate are respectively provided with a fixing plate which is vertical to the side plates and faces outwards;
the second pre-pressure top plate is arranged below the second piezoelectric vibrator, the upper end face of the second pre-pressure top plate is provided with a plurality of strip-shaped pressing blocks for pressing the second piezoelectric vibrator bearing plate, and the pressing blocks of the second pre-pressure top plate are all arranged at the node line position of the standing wave on the second piezoelectric vibrator bearing plate; the two sides of the first pre-pressure top plate are respectively provided with a side plate for wrapping the wrapping plates at the two long sides of the base plate, and the side plates at the two sides of the second pre-pressure top plate are respectively provided with a fixing plate which is vertical to the side plates and faces outwards;
the fixing plates on the side plates on the two sides of the first pre-pressure top plate are respectively and correspondingly fixedly connected with the fixing plates on the side plates on the two sides of the second pre-pressure top plate;
the substrate, the first silicon rubber layer and the second silicon rubber layer are respectively provided with a slit perpendicular to a straight line where the long side of the substrate is located at the wave crest and the wave trough of the standing wave generated by the first piezoelectric vibrator;
the substrate, the first silicon rubber layer and the second silicon rubber layer are respectively provided with a slit perpendicular to a straight line where the long side of the substrate is located at the wave crest and the wave trough of the standing wave generated by the second piezoelectric vibrator;
the first piezoelectric vibrator generates standing waves and the second piezoelectric vibrator generates standing waves which are identical but are staggered, the dislocation distance is greater than zero and smaller than 1/2 of the wavelength of the standing waves, a first inlet and a second inlet are formed between the right short side of the first piezoelectric vibrator bearing plate and the wrapping plate on the right side of the upper end face of the substrate, and a second inlet and a second outlet are formed between the left short side of the second piezoelectric vibrator bearing plate and the wrapping plate on the left side of the lower end face of the substrate.
2. The standing wave type double-vibrator valveless piezoelectric pump according to claim 1, wherein the upper end face and the lower end face of the base plate are respectively provided with at least two positioning columns for positioning;
positioning holes which are in one-to-one correspondence with the positioning columns on the upper end face of the substrate are formed in the first silicon rubber layer and the bearing plate of the first piezoelectric vibrator, and the positioning columns on the upper end face of the substrate sequentially penetrate through the first silicon rubber layer and the bearing plate of the first piezoelectric vibrator and the corresponding positioning holes;
and the bearing plates of the second silicon rubber layer and the second piezoelectric vibrator are respectively provided with positioning holes corresponding to the positioning columns on the lower end surface of the substrate one by one, and the positioning columns on the lower end surface of the substrate sequentially penetrate through the second silicon rubber layer and the bearing plates of the second piezoelectric vibrator and the corresponding positioning holes.
3. The standing wave type double-vibrator valveless piezoelectric pump according to claim 1, wherein grooves are formed in the outer walls of the wrapping plates at the two long sides of the base plate;
protrusions matched with grooves on the outer walls of the wrapping plates at the two long sides of the base plate are arranged on the side plates at the two sides of the first pre-pressure top plate and the second pre-pressure top plate, so that the base plate is prevented from moving relative to the first pre-pressure top plate and the second pre-pressure top plate.
4. The control method based on the standing wave type double-vibrator valveless piezoelectric pump according to claim 1, is characterized by comprising the following steps:
sinusoidal signals with pi/2 difference in time are applied to the first piezoelectric vibrator and the second piezoelectric vibrator, so that a plurality of cavities which change with time are formed between the first piezoelectric vibrator and the first silicon rubber layer and between the second piezoelectric vibrator and the second silicon rubber layer, meanwhile, the trough of the first piezoelectric vibrator is attached to the gap on the first silicon rubber layer, the crest of the second piezoelectric vibrator is attached to the gap on the second silicon rubber layer, so that the corresponding gap is closed, the rest gaps are opened, the trough of the crest changes with time, and the gap is correspondingly opened and closed; the change of the volume and the position of the cavity is matched with the opening and closing of gaps on the first silicon rubber layer and the second silicon rubber layer, so that liquid is pumped from the first inlet and outlet to the second inlet and outlet or from the second inlet and outlet to the first inlet and outlet;
and changing the flowing direction of the liquid by changing the sequence of the phase differences of the sinusoidal signals of the first piezoelectric vibrator and the second piezoelectric vibrator.
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| CN110594138A (en) * | 2019-10-28 | 2019-12-20 | 南京航空航天大学 | Sandwich type valveless piezoelectric pump and working method thereof |
| CN115155405A (en) * | 2022-07-26 | 2022-10-11 | 广州大学 | Valveless one-way flow device based on piezoelectric ceramics |
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| JP2001020866A (en) * | 1999-07-12 | 2001-01-23 | Matsushita Electric Ind Co Ltd | Piezoelectric pump |
| CN1959109A (en) * | 2006-11-10 | 2007-05-09 | 南京航空航天大学 | Standing wave driven piezoelectric ceramic pump capable of realizing positive and negative directional flow of liquid |
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| JP3859627B2 (en) * | 2003-08-21 | 2006-12-20 | 株式会社鈴木 | Piezoelectric pump |
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| CN106438301B (en) * | 2015-08-13 | 2019-08-06 | 深圳市合一精密泵业科技有限公司 | A kind of piezoelectric pump with double chambers |
| CN105141175B (en) * | 2015-09-07 | 2017-06-16 | 南京航空航天大学 | A kind of sandwich standing-wave rotation type piezoelectric actuator |
| CN208702655U (en) * | 2018-06-06 | 2019-04-05 | 南京航空航天大学 | A kind of double oscillator Valveless piezoelectric pumps of standing wave type |
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| JP2001020866A (en) * | 1999-07-12 | 2001-01-23 | Matsushita Electric Ind Co Ltd | Piezoelectric pump |
| CN1959109A (en) * | 2006-11-10 | 2007-05-09 | 南京航空航天大学 | Standing wave driven piezoelectric ceramic pump capable of realizing positive and negative directional flow of liquid |
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