CN108754416A - A kind of the low abrasion guide rod and its surface treatment of pneumatic actuator application - Google Patents
A kind of the low abrasion guide rod and its surface treatment of pneumatic actuator application Download PDFInfo
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- CN108754416A CN108754416A CN201810526266.8A CN201810526266A CN108754416A CN 108754416 A CN108754416 A CN 108754416A CN 201810526266 A CN201810526266 A CN 201810526266A CN 108754416 A CN108754416 A CN 108754416A
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- guide rod
- pneumatic actuator
- substrate surface
- low abrasion
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- 238000005299 abrasion Methods 0.000 title claims abstract description 20
- 238000004381 surface treatment Methods 0.000 title claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 58
- 239000000463 material Substances 0.000 claims abstract description 35
- 238000000151 deposition Methods 0.000 claims abstract description 24
- 239000002253 acid Substances 0.000 claims abstract description 21
- 229910000975 Carbon steel Inorganic materials 0.000 claims abstract description 20
- 239000010962 carbon steel Substances 0.000 claims abstract description 20
- 238000005406 washing Methods 0.000 claims abstract description 20
- 238000005498 polishing Methods 0.000 claims abstract description 19
- 238000005253 cladding Methods 0.000 claims abstract description 10
- 238000001035 drying Methods 0.000 claims abstract description 10
- 239000007787 solid Substances 0.000 claims abstract description 10
- 229910052961 molybdenite Inorganic materials 0.000 claims abstract description 6
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 19
- 238000002360 preparation method Methods 0.000 claims description 16
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 9
- 229910052717 sulfur Inorganic materials 0.000 claims description 9
- 239000011593 sulfur Substances 0.000 claims description 9
- 239000001307 helium Substances 0.000 claims description 7
- 229910052734 helium Inorganic materials 0.000 claims description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 4
- 238000009940 knitting Methods 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 238000011221 initial treatment Methods 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 abstract description 10
- 230000007797 corrosion Effects 0.000 abstract description 10
- 230000000052 comparative effect Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 7
- 229910007948 ZrB2 Inorganic materials 0.000 description 7
- 229910052731 fluorine Inorganic materials 0.000 description 7
- 239000011737 fluorine Substances 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 7
- 229910052739 hydrogen Inorganic materials 0.000 description 7
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005272 metallurgy Methods 0.000 description 2
- 238000011056 performance test Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
Abstract
The invention discloses the low abrasion guide rod and its surface treatment of a kind of application of pneumatic actuator, including step (1) provides the carbon steel substrate of a guide rod, is positioned in acid solution behind its surface of polishing, washing and drying again after washing；Step (2) carries out gas bombardment to strengthen substrate surface, step (3), using Nd using Hall gas ion source to pretreated base material:YAG pulse lasers card punch beats circular hole in substrate surface；Step (4) deposits ZrB respectively using Magnetic filter deposition technique in substrate surface2Target and MoS2Target forms the solid cladding coated on substrate surface, and then obtains surface treatment treated guide rod.The guide rod for the pneumatic actuator application that the present invention is prepared, has excellent wearability, excellent corrosion resistance, self lubricity and good hardness.
Description
Technical field
The present invention relates to the guide rod field of material technology of pneumatic actuator application, and in particular to a kind of pneumatic actuator is answered
Low abrasion guide rod and its surface treatment.
Background technology
The energy that actuator is used by it can be divided into pneumatic, the electronic and three categories that surge.Using compressed air holding as power
Row device, referred to as pneumatic actuator, with simple in structure, reliable in action, performance stabilization, High power output, easy to maintain and fire prevention
The advantages that explosion-proof.It can not only be matched with pneumatic unit combination instrument, and pass through electric pneumatic converter or electric-gas valve
Locator can be matched with electric assembling instrument, computer.Therefore it is widely used in chemical industry, oil, metallurgy, electric power etc.
In industrial control process.
Pneumatic actuator is broadly divided into two major classes：Diaphragm type and piston type.They are all by control element and executive component
Composition.The basic system of common QZ type pneumatic actuators includes cylinder, piston, piston rod, connecting rod, output shaft and arm of force group
At.In improved pneumatic actuator, the structure of guide rod can be also set, guide rod can be born due to glider surface and work
Cross force caused by the variation of stopper rod vertical direction angle, plays a supporting role to piston rod.Support of the piston rod in guide rod
Under, the lateral load of piston is counteracted, the abrasion of piston rod, bearing and sealing element is reduced, prolongs the service life.Guide rod is general
Using carbon steel hard chrome plating as main base material, to ensure enough hardness and wearability.But Hard Chromium Plating Technology is at high price, not only
That plates is costly, also to be reprocessed after plating；Thickness of coating is too thin, and generally only 0.05~0.15mm or so influences material
Wearability and corrosion resistance；The lubricity of coating is limited, and self-lubricating effect is bad；In addition Hard Chromium Plating Technology is also to component surface
Bright and clean degree it is more demanding.
With pneumatic actuator in the industry such as petrochemical industry, electric power, metallurgy with more and more extensive, harsh use environment and
All to the performance and used life of parts in pneumatic actuator, more stringent requirements are proposed for operating condition.Ideal guide rod,
The parts material such as piston rod needs to have excellent wearability, excellent corrosion resistance, self lubricity and good hardness, such as
What obtained by certain preparation process the parts materials such as guide rod, the piston rod of ideal performance be it is urgently to be resolved hurrily at present and gram
The important topic of clothes.
Invention content
The problem of for current guide rod parts material, the present invention provide a kind of the low of pneumatic actuator application
Wear guide rod and its surface treatment.A kind of guide rod of pneumatic actuator application has been prepared in the present invention, and passes through a system
The process of surface treatment of row makes the guide rod obtained by preparation have excellent wearability, excellent corrosion resistance, self lubricity
With good hardness.
The invention discloses a kind of preparation processes of the low abrasion guide rod of pneumatic actuator application, include the following steps：
Step (1) provides the carbon steel substrate of a guide rod, its surface of polishing, and the carbon steel substrate after polishing is put
Be placed in acid solution, fully washing take out after washing and drying again, obtain pretreated base material；
Step (2) carries out gas bombardment come the base material table of strenuous primary treatment using Hall gas ion source to the base material
Face, Hall source operating voltage are 500~1800V, bombard 600~800 DEG C of environment temperature, 2~3h of bombardment time；
Step (3), using Nd：Treated that substrate surface beats circular hole, aperture in step (2) for YAG pulse lasers card punch
For 0.06~0.1mm, area occupation ratio is 10%~25%, obtains the base material of surface-texturing；
Step (4) deposits ZrB respectively using Magnetic filter deposition technique (FCVA) in the substrate surface of knitting of surface2Target and
MoS2Target forms the solid cladding coated on substrate surface, and then obtains surface treatment treated guide rod.
Preferably, the acid solution described in step (1) is 0.5~1mol/L's of 1~2mol/L of sulfur acid and hydrofluoric acid
Solution.
Preferably, the gas described in step (2) is helium, argon gas.
Preferably, the ZrB described in step (4)2Mass percent shared by target is 30~65%, the MoS2Shared by target
Mass percent is 35~70%.
Preferably, Magnetic filter deposition technique described in step (4) use 90~120A of striking current, bend pipe magnetic field 2.0~
4.0A, 200~800mA of line are deposited using negative pressure -800V~-300V.
The invention also discloses a kind of low abrasion guide rods of pneumatic actuator application, and the guide rod is via above-mentioned preparation work
Skill is prepared.
After above-mentioned technical solution, the present invention has the advantages that：
1. carrying out gas bombardment to the base material using Hall gas ion source in preparation process of the present invention, have many excellent
Point：1) surface compact degree is improved；It 2) being capable of activated substrate surface；3) it is strong to enter sub-surface formation chemical bond raising surface for gas
Degree, and then substrate surface can be strengthened.
2. compared to PVD depositions methods such as magnetron sputtering, electron beam evaporations, the Magnetic filter used in preparation process of the present invention is electric
Arc depositing device atom ionization level is very high.Since atom ionization level is high, plasma density can be made to increase, bulky grain when film forming
It reduces, is conducive to improve film hardness, wearability, compactness, film-substrate cohesion etc..
3. solid cladding prepared by the present invention has higher hardness and good greasy property, and preparation process letter
It is single, it can be in a variety of matrixes or workpiece surface as wear-resisting lubricant coating.
4. the guide rod of pneumatic actuator application prepared by the present invention makes preparation by a series of process of surface treatment
The guide rod of gained has excellent wearability, excellent corrosion resistance, self lubricity and good hardness.
5. preparation process of the present invention has, processing step is simple, operability is strong, controllability is good, is easy to industrialized production
Feature has preferable economic benefit and commercial promise.
Specific implementation mode
With reference to embodiment, the present invention is described in further detail, and embodiments of the present invention are not limited thereto.
The performance test results of all embodiment and comparative examples are tested with the following method.
The hardness test of coating：It is carried out on MTS Nano G200 nano-indenter test instrument.Wherein testing pressure head is using gold
Hard rock Berkovich pressure heads are 200nm to eliminate substrate effect maximum compression distance (within the 15% of film thickness).Each sample
Product measure 6 points, are averaged.
Wearability test：This test carries out on UMT-2 multifunction friction wear testing machines, passes through ball/plane contact
Mode reciprocatingly slides, and upper sample is the GCr15 steel balls (hardness HV766) of a diameter of 9.525mm, and lower sample is embodiment and right
Sample in ratio, sample size are 25mm × 12mm × 6mm.
Corrosion resistance is tested：Guide rod test sample is separately immersed in a concentration of 65% concentrated nitric acid, soaking time
It amounts to 18 hours, the corrosion condition of sample surfaces is observed, to characterize the corrosion resistance of sample.
Embodiment 1
A kind of low abrasion guide rod of pneumatic actuator application is prepared, is specifically comprised the following steps：Step (1), provides one
The carbon steel substrate of guide rod, its surface of polishing, and the carbon steel substrate after polishing is positioned over sulfur acid 1mol/L and hydrogen fluorine
In the acid solution of sour 0.5mol/L, fully washing take out after washing and drying again, obtain pretreated base material；Step (2) utilizes
Hall gas ion source carries out helium bombardment to strengthen substrate surface to the pretreated base material, and Hall source operating voltage is
1000V bombards 700 DEG C of environment temperature, bombardment time 2h；Step (3), using Nd：YAG pulse lasers card punch is in step (2)
Treated, and substrate surface beats circular hole, and aperture is 0.06~0.1mm, and area occupation ratio is 10%~25%, obtains surface-texturing
Base material；Step (4) uses Magnetic filter deposition technique to distinguish deposition quality percentage in the substrate surface of surface-texturing for 30%
ZrB2The MoS that target and mass percent are 70%2Target, the Magnetic filter deposition technique use striking current 100A, bend pipe magnetic field
3.0A, line 500mA are deposited using negative pressure -500V, form the solid cladding coated on substrate surface, and then obtain table
Guide rod after the process of face.
Embodiment 2
A kind of low abrasion guide rod of pneumatic actuator application is prepared, is specifically comprised the following steps：Step (1), provides one
The carbon steel substrate of guide rod, its surface of polishing, and the carbon steel substrate after polishing is positioned over sulfur acid 1mol/L and hydrogen fluorine
In the acid solution of sour 0.5mol/L, fully washing take out after washing and drying again, obtain pretreated base material；Step (2), profit
Helium bombardment is carried out to the pretreated base material with Hall gas ion source to strengthen substrate surface, Hall source operating voltage is
1000V bombards 700 DEG C of environment temperature, bombardment time 2h；Step (3), using Nd：YAG pulse lasers card punch is in step (2)
Treated, and substrate surface beats circular hole, and aperture is 0.06~0.1mm, and area occupation ratio is 10%~25%, obtains surface-texturing
Base material；Step (4) uses Magnetic filter deposition technique to distinguish deposition quality percentage in the substrate surface of surface-texturing for 45%
ZrB2The MoS that target and mass percent are 55%2Target, the Magnetic filter deposition technique use striking current 100A, bend pipe magnetic field
3.0A, line 500mA are deposited using negative pressure -500V, form the solid cladding coated on substrate surface, and then obtain table
Guide rod after the process of face.
Embodiment 3
A kind of low abrasion guide rod of pneumatic actuator application is prepared, is specifically comprised the following steps：Step (1), provides one
The carbon steel substrate of guide rod, its surface of polishing, and the carbon steel substrate after polishing is positioned over sulfur acid 1mol/L and hydrogen fluorine
In the acid solution of sour 0.5mol/L, fully washing take out after washing and drying again, obtain pretreated base material；Step (2), profit
Helium bombardment is carried out to the pretreated base material with Hall gas ion source to strengthen substrate surface, Hall source operating voltage is
1000V bombards 700 DEG C of environment temperature, bombardment time 2h；Step (3), using Nd：YAG pulse lasers card punch is in step (2)
Treated, and substrate surface beats circular hole, and aperture is 0.06~0.1mm, and area occupation ratio is 10%~25%, obtains surface-texturing
Base material；Step (4) uses Magnetic filter deposition technique to distinguish deposition quality percentage in the substrate surface of surface-texturing for 55%
ZrB2The MoS that target and mass percent are 45%2Target, the Magnetic filter deposition technique use striking current 100A, bend pipe magnetic field
3.0A, line 500mA are deposited using negative pressure -500V, form the solid cladding coated on substrate surface, and then obtain table
Guide rod after the process of face.
Embodiment 4
A kind of low abrasion guide rod of pneumatic actuator application is prepared, is specifically comprised the following steps：Step (1), provides one
The carbon steel substrate of guide rod, its surface of polishing, and the carbon steel substrate after polishing is positioned over sulfur acid 1mol/L and hydrogen fluorine
In the acid solution of sour 0.5mol/L, fully washing take out after washing and drying again, obtain pretreated base material；Step (2), profit
Helium bombardment is carried out to the pretreated base material with Hall gas ion source to strengthen substrate surface, Hall source operating voltage is
1000V bombards 700 DEG C of environment temperature, bombardment time 2h；Step (3), using Nd：YAG pulse lasers card punch is in step (2)
Treated, and substrate surface beats circular hole, and aperture is 0.06~0.1mm, and area occupation ratio is 10%~25%, obtains surface-texturing
Base material；Step (4) uses Magnetic filter deposition technique to distinguish deposition quality percentage in the substrate surface of surface-texturing for 65%
ZrB2The MoS that target and mass percent are 35%2Target, the Magnetic filter deposition technique use striking current 100A, bend pipe magnetic field
3.0A, line 500mA are deposited using negative pressure -500V, form the solid cladding coated on substrate surface, and then obtain table
Guide rod after the process of face.
Comparative example 1
A kind of low abrasion guide rod of pneumatic actuator application is prepared, is specifically comprised the following steps：Step (1), provides one
The carbon steel substrate of guide rod, its surface of polishing, and the carbon steel substrate after polishing is positioned over sulfur acid 1mol/L and hydrogen fluorine
In the acid solution of sour 0.5mol/L, fully washing take out after washing and drying again, obtain pretreated base material；Step (2), is adopted
Use Nd：For YAG pulse lasers card punch in step (1) treated substrate surface beats circular hole, aperture is 0.06~0.1mm, area
Rate is 10%~25%, obtains the base material of surface-texturing；Step (3), using Magnetic filter deposition technique knitting of surface base
Distinguish the ZrB that deposition quality percentage is 45% in material surface2The MoS that target and mass percent are 55%2Target, the Magnetic filter are heavy
Product technology uses striking current 100A, bend pipe magnetic field 3.0A, line 500mA to be deposited using negative pressure -500V, forms coating
In the solid cladding of substrate surface, and then obtain surface treatment treated guide rod.
Comparative example 2
A kind of low abrasion guide rod of pneumatic actuator application is prepared, is specifically comprised the following steps：Step (1), provides one
The carbon steel substrate of guide rod, its surface of polishing, and the carbon steel substrate after polishing is positioned over sulfur acid 1mol/L and hydrogen fluorine
In the acid solution of sour 0.5mol/L, fully washing take out after washing and drying again, obtain pretreated base material；Step (2), profit
Helium bombardment is carried out to the pretreated base material with Hall gas ion source to strengthen substrate surface, Hall source operating voltage is
1000V bombards 700 DEG C of environment temperature, bombardment time 2h；Step (3), using Nd：YAG pulse lasers card punch is in step (2)
Treated, and substrate surface beats circular hole, and aperture is 0.06~0.1mm, and area occupation ratio is 10%~25%, obtains surface-texturing
Base material；Step (4) uses magnetron sputtering method to distinguish deposition quality percentage in substrate surface for 45% ZrB2Target and quality hundred
The MoS that score is 55%2Target, wherein ZrB2Target Sputtering power density is：4.3W/cm2, MoS2Target Sputtering power density is：
0.5W/cm2, the solid cladding coated on substrate surface is formed, and then obtain surface treatment treated guide rod.
Comparative example 3
A kind of low abrasion guide rod of pneumatic actuator application is prepared, is specifically comprised the following steps：Step (1), provides one
The carbon steel substrate of guide rod, its surface of polishing, and the carbon steel substrate after polishing is positioned over sulfur acid 1mol/L and hydrogen fluorine
In the acid solution of sour 0.5mol/L, fully washing take out after washing and drying again, obtain pretreated base material, and then led
To bar.
The performance test results of embodiment 1-4 and comparative example 1-3 guide rods are shown in Table 1
Table 1
| Serial number | Hardness (GPa) | Wear rate (m3/N·m) | Friction coefficient | Corrosive effect |
| Embodiment 1 | 31 | 1.6×10-17 | 0.2 | Unobvious |
| Embodiment 2 | 36 | 6.7×10-17 | 0.2 | Unobvious |
| Embodiment 3 | 40 | 1.5×10-16 | 0.3 | Unobvious |
| Embodiment 4 | 45 | 5.2×10-16 | 0.3 | Unobvious |
| Comparative example 1 | 30 | 1.4×10-16 | 0.2 | Obviously |
| Comparative example 2 | 33 | 2.5×10-16 | 0.3 | Unobvious |
| Comparative example 3 | 7 | 7.8×10-12 | 0.9 | Obviously |
According in table 1 as a result, as can be seen that with MoS from Examples 1 to 42Shared mass percent it is upper
It rises, ZrB2Shared mass percent decline, the hardness of guide rod is gradually reduced, and wear rate and friction coefficient continuously decrease.
The guide rod hardness that the embodiment of the present application 1~4 is prepared is more than 30GPa, wear rate < 5.2 × 10-16, friction coefficient <
0.2, and corrosive effect unobvious, show excellent wearability, excellent corrosion resistance, self lubricity and good hardness.
Comparing embodiment 2 and comparative example 1, finding can be strong by carrying out gas bombardment to base material with Hall gas ion source
Change substrate surface, the hardness and wear rate of guide rod can be improved, and improve its corrosion resistance.2 He of further comparing embodiment
Comparative example 2 finds that the hardness of guide rod in embodiment 2 is higher than comparative example 2, and for low wear rate in comparative example 2, lubricity is better than comparison
Example 2.This is because compared to the deposition method of magnetron sputtering, the magnetically filter arc deposition used in preparation process of the present invention can make
Plasma density increases, and bulky grain is reduced when film forming, is conducive to improve film hardness, wearability, compactness, film-substrate cohesion
Deng.
It should be noted that each embodiment described above is merely to illustrate the model that the present invention is not intended to limit the present invention
Enclose, it will be understood by those of ordinary skill in the art that, under the premise without departing from the spirit and scope of the present invention to the present invention into
Capable modification or equivalent replacement, should all cover within the scope of the present invention.In addition, it is signified outer unless the context, with list
The word that number form formula occurs includes plural form, and vice versa.In addition, unless stated otherwise, then the whole of any embodiment or
A part is used in combination with all or part of of any other embodiment.
Claims (6)
1. a kind of preparation process of the low abrasion guide rod of pneumatic actuator application, which is characterized in that include the following steps：
Step (1) provides the carbon steel substrate of a guide rod, its surface of polishing, and the carbon steel substrate after polishing is positioned over
In acid solution, fully washing take out after washing and drying again, obtain pretreated base material；
Step (2) carries out gas bombardment come the substrate surface of strenuous primary treatment, suddenly using Hall gas ion source to the base material
Your source operating voltage is 500~1800V, bombards 600~800 DEG C of environment temperature, 2~3h of bombardment time；
Step (3), using Nd：Treated that substrate surface beats circular hole in step (2) for YAG pulse lasers card punch, and aperture is
0.06~0.1mm, area occupation ratio are 10%~25%, obtain the base material of surface-texturing；
Step (4), the substrate surface using Magnetic filter deposition technique in knitting of surface deposit ZrB respectively2Target and MoS2Target is formed
Solid cladding coated on substrate surface, and then obtain surface treatment treated guide rod.
2. the preparation process of the low abrasion guide rod of pneumatic actuator application according to claim 1, which is characterized in that step
Suddenly the acid solution described in (1) is the solution of 0.5~1mol/L of 1~2mol/L of sulfur acid and hydrofluoric acid.
3. the preparation process of the low abrasion guide rod of pneumatic actuator application according to claim 1, which is characterized in that step
Suddenly the gas described in (2) is helium, argon gas.
4. the preparation process of the low abrasion guide rod of pneumatic actuator application according to claim 1, which is characterized in that step
Suddenly the ZrB described in (4)2Mass percent shared by target is 30~65%, the MoS2Mass percent shared by target be 35~
70%.
5. the preparation process of the low abrasion guide rod of pneumatic actuator application according to claim 1, which is characterized in that step
Suddenly Magnetic filter deposition technique described in (4) use 90~120A of striking current, 2.0~4.0A of bend pipe magnetic field, line 200~
800mA is deposited using negative pressure -800V~-300V.
6. a kind of low abrasion guide rod of pneumatic actuator application, which is characterized in that the guide rod via according to claim 1~
Preparation process described in 5 is prepared.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110735120A (en) * | 2019-10-31 | 2020-01-31 | 江苏科技大学 | NbN/MoSN/MoS2Hard self-lubricating nano-structure composite film and preparation method thereof |
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| CN108754416B (en) | 2020-12-18 |
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