CN108745265A - Reaction system and method with the continuous production HMDS for strengthening mass transfer and flowing - Google Patents
Reaction system and method with the continuous production HMDS for strengthening mass transfer and flowing Download PDFInfo
- Publication number
- CN108745265A CN108745265A CN201810773446.6A CN201810773446A CN108745265A CN 108745265 A CN108745265 A CN 108745265A CN 201810773446 A CN201810773446 A CN 201810773446A CN 108745265 A CN108745265 A CN 108745265A
- Authority
- CN
- China
- Prior art keywords
- pipe
- reaction
- tube
- collection device
- ammonia
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 74
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000010924 continuous production Methods 0.000 title claims abstract description 14
- 238000005728 strengthening Methods 0.000 title claims abstract description 10
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 74
- 239000007788 liquid Substances 0.000 claims abstract description 50
- 239000007787 solid Substances 0.000 claims abstract description 40
- 229910021529 ammonia Inorganic materials 0.000 claims abstract description 37
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000003756 stirring Methods 0.000 claims abstract description 19
- 229910001873 dinitrogen Inorganic materials 0.000 claims abstract description 18
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000012530 fluid Substances 0.000 claims abstract description 12
- 101100293261 Mus musculus Naa15 gene Proteins 0.000 claims abstract description 11
- 238000010521 absorption reaction Methods 0.000 claims abstract description 8
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 9
- 239000002904 solvent Substances 0.000 claims description 9
- 238000002425 crystallisation Methods 0.000 claims description 6
- 230000008025 crystallization Effects 0.000 claims description 6
- 238000009825 accumulation Methods 0.000 claims 1
- 238000001914 filtration Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000003786 synthesis reaction Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 239000003054 catalyst Substances 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000035484 reaction time Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- SQOJDBHJUUGQJP-UHFFFAOYSA-N 5-bromo-2-ethylpyrimidine Chemical compound CCC1=NC=C(Br)C=N1 SQOJDBHJUUGQJP-UHFFFAOYSA-N 0.000 description 1
- DCERHCFNWRGHLK-UHFFFAOYSA-N C[Si](C)C Chemical compound C[Si](C)C DCERHCFNWRGHLK-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 206010054949 Metaplasia Diseases 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 238000004176 ammonification Methods 0.000 description 1
- 150000008064 anhydrides Chemical class 0.000 description 1
- 239000003242 anti bacterial agent Substances 0.000 description 1
- 229940088710 antibiotic agent Drugs 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 230000015689 metaplastic ossification Effects 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 231100000252 nontoxic Toxicity 0.000 description 1
- 230000003000 nontoxic effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007086 side reaction Methods 0.000 description 1
- ZVHDZEHWBUJZDJ-UHFFFAOYSA-N silicon;urea Chemical compound [Si].NC(N)=O ZVHDZEHWBUJZDJ-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/24—Stationary reactors without moving elements inside
- B01J19/2415—Tubular reactors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J10/00—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J4/00—Feed or outlet devices; Feed or outlet control devices
- B01J4/001—Feed or outlet devices as such, e.g. feeding tubes
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic System
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage
Abstract
The invention discloses a kind of reaction systems and method with the continuous production HMDS for strengthening mass transfer and flowing.Reaction system includes ammonia absorption device, tubular reactor, solid collection device, fluid collection device, pipe portion, reactor down leg, evacuated tube, liquid feed pipe, ammonia feed pipe, NH on reactor4Cl solids exits pipe, liquid discharge nozzle, nitrogen gas stirring pipe, filter screen, the top of tubular reactor is pipe portion on reaction tube, lower part is reaction tube down leg, pipe portion is equipped with evacuated tube, liquid feed pipe on reaction tube, evacuated tube leads to ammonia absorption device, reaction tube down leg is set there are four feed and exhaust tube, respectively ammonia feed pipe, NH4Cl solids exits pipe, liquid discharge nozzle, nitrogen gas stirring pipe, NH4Cl solids exit pipes lead to solid collection device, and liquid discharge nozzle leads to fluid collection device, and nozzle has filter screen.Using continuous production of the present invention, be conducive to mass-and heat-transfer, accelerate reaction, improve production efficiency, increases production capacity.
Description
Technical field
The present invention relates to a kind of reaction system and method with the continuous production HMDS for strengthening mass transfer and flowing, reactions
Rapidly, the gas-liquid-solid smooth input and output material of energy, realizes steady and continuous reaction, is mainly used for chemical plant.
Background technology
Hexamethyldisilazane(HMDS)It is water white transparency working fluid, nontoxic, slightly amine taste, density at 25 DEG C is
0.770-0.780 g/cm3, boiling range is 125-127 DEG C.It can be with a variety of immiscible organic solvents, and being contacted with air can rapid water
Solution generates trimethylsilane alcohol and hexamethyldisiloxane(HMDO).HMDS is important organosilicon reagent, in organosilicon and organic
Synthesis field is widely used.It is the conjunction for synthesizing the important source material of two silicon urea of hexamethyl, and develop rapidly in recent years
At indispensable reagent in semisynthetic antibiotics technique, have been widely used in medical treatment, semiconductor, rubber etc. tool.
The existing synthesis technologies of HMDS have very much, as catalyst method synthesis technology, HMDO make Material synthesis technique and solvent
Method synthesis technology etc..It is catalyst that catalyst method, which mostly uses the noble metals such as platinum, palladium, by trim,ethylchlorosilane at 160 DEG C
(TMS)Vapor reaction is carried out with ammonia, to obtain product, foreign countries mostly use such method, the method high income, product purity
Height, but it is stringent to equipment requirement, and investment needs larger.In recent years due to the demand sharp increase to HMDS, traditional production HMDS
Raw material TMS deficient trend is presented, therefore many scientific workers attempt to produce HDMS with HMDO is raw material;Report is relatively more
Be by HMDO with acid or anhydride reaction, produce trimethyl silicon substrate acid esters, then carry out ammonification synthesize HMDS.Solvent method is China
Current main synthesis technology.In the industrial production that solvent method synthesizes hexamethyldisilazane, trimethylchloro-silicane is generally used
Alkane is raw material, is reacted with ammonia under the conditions of existing for atent solvent, and reactant is centrifuged, rectifying removes atent solvent system
Obtain product.
The reaction equation that solvent method is related to is as follows:
Main reaction:
Side reaction:
In existing technology, the production hexamethyldisilazane overwhelming majority uses batch technology, is carried out using tank reactor
Reaction.Tank reactor heat transfer and mass transfer efficiency are relatively low, therefore the reaction time is longer, and intermittently operated also need auxiliary when
Between equal extra times, keep the reaction time longer, production capacity caused to be very limited.And in tank reactor, generated in reaction
NH4Cl particle packings easily wrap up raw material, can also influence fluid flowing and the mass transfer of reaction.
Invention content
It is a kind of with the continuous metaplasia for strengthening mass transfer and flowing the purpose of the present invention is overcoming the deficiencies of the prior art and provide
Produce the reaction system and method for HMDS.
A kind of reaction system with the continuous production HMDS for strengthening mass transfer and flowing, including ammonia absorption device, pipe
Formula reactor, solid collection device, fluid collection device, pipe portion, reactor down leg, evacuated tube, liquid feedstock on reactor
Pipe, ammonia feed pipe, NH4Cl solids exits pipe, liquid discharge nozzle, nitrogen gas stirring pipe, filter screen, the top of tubular reactor are
Pipe portion on reaction tube, lower part are reaction tube down leg, and pipe portion is equipped with evacuated tube, liquid feed pipe on reaction tube, and evacuated tube is logical
To ammonia absorption device, reaction tube down leg is set there are four feed and exhaust tube, respectively ammonia feed pipe, NH4Cl solids exits pipe,
Liquid discharge nozzle, nitrogen gas stirring pipe, NH4Cl solids exit pipes lead to solid collection device, and liquid discharge nozzle leads to liquid collection
Device, and nozzle has filter screen, nitrogen gas stirring pipe is connected with external nitrogen output device.
The ammonia feed pipe stretches into the nozzle position highest of reaction tube down leg, the nozzle position of liquid discharge nozzle
It, the nozzle position of solids exit pipe is minimum.
The ammonia feed pipe is bent downwardly with liquid discharge nozzle nozzle, and radian is 90 °.
The liquid discharge nozzle nozzle has filter screen.
The reactor down leg is passed through nitrogen by nitrogen gas stirring pipe, is stirred to fluid.
A method of with the continuous production HMDS for strengthening mass transfer and flowing, before reaction, solvent being full of in reaction tube
Hexamethyldisiloxane, ammonia are passed through by ammonia feed pipe in reaction tube, and nitrogen is passed through by nitrogen gas stirring pipe in reaction tube, by liquid
It is 1 that body feed pipe, which is passed through volume ratio,:5 TMS and HMDO mixed liquors, after reaction starts, valve opening, reactor down leg is accumulated successively
Tired crystallization is by NH4Cl solids exit pipes are discharged into solid collection device, and keep level stability in reaction tube, by filter screen,
Clarified solution after reaction is by liquid discharge nozzle influent collection device.
The method of the continuous production hexamethyldisilazane, the method are produced, and solid is not easy adherency pipe
Wall, gas-liquid-solid can smoothly discharge, and TMS conversion ratios are up to 95 %.
The beneficial effects of the invention are as follows:
1)Technique carries out hexamethyldisilazane continuous production using tubular reactor, is conducive to mass-and heat-transfer, accelerates reaction,
Production efficiency is improved, production capacity is increased;
2)Tubular reactor down leg ammonia feed pipe and liquid discharge nozzle nozzle are bowed downward in 90 ° of angles, react generation
NH4Cl crystallizations are not easy to accumulate in nozzle, and then block gas liquid input and output material, ensure that being normally carried out for reaction;
3)Liquid discharge nozzle nozzle has filter screen, NH4Cl crystallizations will not enter liquid discharge nozzle, ensure that the liquid being collected into
For clarified solution;
4)Reactor down leg stretches into nitrogen gas stirring pipe, is stirred using nitrogen in reaction process, and total tolerance increases, and strengthens stream
Body mass transfer and flowing, crystallization are not easy to be adhered to tube wall, are easy to discharge, and reaction is allow to be better achieved continuous and stablize.
Description of the drawings
Fig. 1 is the schematic diagram of the reaction system with the continuous production HMDS for strengthening mass transfer and flowing, in figure:Ammonia is inhaled
Receiving apparatus 1, tubular reactor 2, solid collection device 3, fluid collection device 4, pipe portion 5 on reactor, reactor down leg 6,
Evacuated tube 5-1, liquid feed pipe 5-2, ammonia feed pipe 6-1, NH4Cl solids exit pipes 6-2, liquid discharge nozzle 6-3, nitrogen stir
Mix pipe 6-4, filter screen 6-5.
Fig. 2 is the reaction tube down leg schematic diagram of the present invention.
Specific implementation mode
Below in conjunction with drawings and examples, the present invention is further elaborated.
As shown in Figure 1, 2, a kind of reaction system with the continuous production HMDS for strengthening mass transfer and flowing, including ammonia
Absorption plant 1, tubular reactor 2, solid collection device 3, fluid collection device 4, pipe portion 5, reactor down leg on reactor
6, evacuated tube(5-1), liquid feed pipe(5-2), ammonia feed pipe(6-1),NH4Cl solids exit pipes(6-2), liquid discharge nozzle
(6-3), nitrogen gas stirring pipe(6-4), filter screen(6-5), the top of tubular reactor 2 is pipe portion 5 on reaction tube, and lower part is reaction
Pipe down leg 6, pipe portion 5 is equipped with evacuated tube on reaction tube(5-1), liquid feed pipe(5-2), evacuated tube(5-1)Lead to ammonia
Absorption plant 1 reacts remaining ammonia and is absorbed by liquid absorption, and TMS is with HMDO mixed liquors by liquid feed pipe(5-2)It is passed through reaction
Pipe, reaction tube down leg 6 are set there are four feed and exhaust tube, respectively ammonia feed pipe(6-1),NH4Cl solids exit pipes(6-2),
Liquid discharge nozzle(6-3), nitrogen gas stirring pipe(6-4), NH4Cl solids exit pipes(6-2)Lead to solid collection device 3, liquid discharge
Expects pipe(6-3)Lead to fluid collection device 4, and nozzle has filter screen(6-5), nitrogen gas stirring pipe(6-4)With external nitrogen
Output device is connected.
The ammonia feed pipe(6-1)Stretch into the nozzle position highest of reaction tube down leg 6, liquid discharge nozzle(6-3)
Nozzle position take second place, solids exit pipe(6-2)Nozzle position it is minimum.Ammonia feed mouth position and liquid outlet opening position are high
In solid outlet, NH is prevented4Cl solids are such as accumulated in tube bottom, are blocked ammonia and are entered, and are influenced reaction and are carried out, and block liquid discharge
Material;Ammonia feed mouth position is higher than liquid outlet opening position, and liquid outlet reactiveness is made to stablize relatively, reduces sample detection
As a result existing error.
The ammonia feed pipe(6-1)With liquid discharge nozzle(6-3)Nozzle is bent downwardly, and radian is 90 °, prevents pipe
The NH of generation is reacted in formula reaction tube 24Nozzle is blocked in Cl solid precipitation processes.
Embodiment
Before reaction starts, solvent HMDO is full of in reaction tube 2, by ammonia feed pipe(6-1)It is passed through ammonia, flow 50
Ml/min, by liquid feed pipe(5-2)It is 1 to be passed through volume ratio:5 TMS and HMDO mixed liquors, flow are 1.2 ml/min, by
Nitrogen gas stirring pipe(6-4)It is passed through appropriate nitrogen gas stirring, starts to react, the crystallization for reacting generation gradually precipitates, in reactor down tube
After portion 6 accumulates, valve opening is by NH successively4Cl solids exit pipes(6-2)It is discharged into solid collection device 3, and keeps liquid level in reaction tube 2
Stablize, passes through filter screen(6-4), the clarified solution after reaction is by liquid discharge nozzle(6-3)Influent collection device, in reaction,
Gas-liquid-solid three-phase can be smoothed out input and output material, and raw material TMS conversion ratios are up to 95% or more.
Claims (7)
1. a kind of reaction system with the continuous production HMDS for strengthening mass transfer and flowing, which is characterized in that inhaled including ammonia
Receiving apparatus(1), tubular reactor(2), solid collection device(3), fluid collection device(4), pipe portion on reactor(5), reaction
Device down leg(6), evacuated tube(5-1), liquid feed pipe(5-2), ammonia feed pipe(6-1),NH4Cl solids exit pipes(6-2),
Liquid discharge nozzle(6-3), nitrogen gas stirring pipe(6-4), filter screen(6-5), tubular reactor(2)Top be reaction tube on pipe portion
(5), lower part is reaction tube down leg(6), the pipe portion on reaction tube(5)Equipped with evacuated tube(5-1), liquid feed pipe(5-2), row
Blank pipe(5-1)Lead to ammonia absorption device(1), reaction tube down leg(6)If there are four feed and exhaust tubes, respectively ammonia feed pipe
(6-1),NH4Cl solids exit pipes(6-2), liquid discharge nozzle(6-3), nitrogen gas stirring pipe(6-4), NH4Cl solids exit pipes(6-
2)Lead to solid collection device(3), liquid discharge nozzle(6-3)Lead to fluid collection device(4), and nozzle has filter screen(6-
5), nitrogen gas stirring pipe(6-4)It is connected with external nitrogen output device.
2. reaction system according to claim 1, which is characterized in that the ammonia feed pipe(6-1)Stretch into reaction tube
Down leg(6)Nozzle position highest, liquid discharge nozzle(6-3)Nozzle position take second place, solids exit pipe(6-2)Nozzle position
It sets minimum.
3. reaction system according to claim 1, which is characterized in that the ammonia feed pipe(6-1)With liquid discharge nozzle
(6-3)Nozzle is bent downwardly, and radian is 90 °.
4. reaction system according to claim 1, which is characterized in that the liquid discharge nozzle(6-3)Nozzle is with filtering
Net.
5. reaction system according to claim 1, which is characterized in that the reactor down leg(6)By nitrogen gas stirring pipe
(6-4)It is passed through nitrogen, fluid is stirred.
6. a kind of method of reaction system continuous production HMDS according to claim 1, which is characterized in that before reaction,
Reaction tube(2)In be full of solvent hexamethyldisiloxane, ammonia is by ammonia feed pipe(6-1)It is passed through reaction tube(2)In, nitrogen by
Nitrogen gas stirring pipe(6-4)It is passed through reaction tube(2)In, by liquid feed pipe(5-2)It is 1 to be passed through volume ratio:5 TMS and HMDO is mixed
Liquid is closed, is reacted after starting, successively valve opening, by reactor down leg(6)The crystallization of accumulation is by NH4Cl solids exit pipes(6-2)Row
Enter solid collection device(3), and keep reaction tube(2)Middle level stability, passes through filter screen(6-4), clarified solution after reaction by
Liquid discharge nozzle(6-3)Influent collection device.
7. the method for continuous production hexamethyldisilazane according to claim 6, which is characterized in that the method into
Row production, solid is not easy to adhere to tube wall, and gas-liquid-solid can smoothly discharge, and TMS conversion ratios are up to 95 %.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810773446.6A CN108745265A (en) | 2018-07-14 | 2018-07-14 | Reaction system and method with the continuous production HMDS for strengthening mass transfer and flowing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810773446.6A CN108745265A (en) | 2018-07-14 | 2018-07-14 | Reaction system and method with the continuous production HMDS for strengthening mass transfer and flowing |
Publications (1)
Publication Number | Publication Date |
---|---|
CN108745265A true CN108745265A (en) | 2018-11-06 |
Family
ID=63973763
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810773446.6A Pending CN108745265A (en) | 2018-07-14 | 2018-07-14 | Reaction system and method with the continuous production HMDS for strengthening mass transfer and flowing |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN108745265A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109748932A (en) * | 2019-01-09 | 2019-05-14 | 浙江新化化工股份有限公司 | A kind of continuous synthesis method of hexamethyldisilazane |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4644076A (en) * | 1985-04-11 | 1987-02-17 | Far Research, Inc. | Continuous process for the synthesis of hexamethyldisilazane |
CN104606996A (en) * | 2015-02-03 | 2015-05-13 | 成都赋阳技术开发有限公司 | Adsorption filtration and atomizing purification device suitable for industrial exhaust gas treatment |
CN105777793A (en) * | 2016-04-06 | 2016-07-20 | 衢州信步化工科技有限公司 | Column-type continuous synthesis method for hexamethyl-disilazane |
CN106732229A (en) * | 2016-12-03 | 2017-05-31 | 河南工程学院 | Spherical Solid-phase Polypeptide reaction bulb |
CN208824498U (en) * | 2018-07-14 | 2019-05-07 | 浙江大学 | Reaction system with the continuous production HMDS for strengthening mass transfer and flowing |
-
2018
- 2018-07-14 CN CN201810773446.6A patent/CN108745265A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4644076A (en) * | 1985-04-11 | 1987-02-17 | Far Research, Inc. | Continuous process for the synthesis of hexamethyldisilazane |
CN104606996A (en) * | 2015-02-03 | 2015-05-13 | 成都赋阳技术开发有限公司 | Adsorption filtration and atomizing purification device suitable for industrial exhaust gas treatment |
CN105777793A (en) * | 2016-04-06 | 2016-07-20 | 衢州信步化工科技有限公司 | Column-type continuous synthesis method for hexamethyl-disilazane |
CN106732229A (en) * | 2016-12-03 | 2017-05-31 | 河南工程学院 | Spherical Solid-phase Polypeptide reaction bulb |
CN208824498U (en) * | 2018-07-14 | 2019-05-07 | 浙江大学 | Reaction system with the continuous production HMDS for strengthening mass transfer and flowing |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109748932A (en) * | 2019-01-09 | 2019-05-14 | 浙江新化化工股份有限公司 | A kind of continuous synthesis method of hexamethyldisilazane |
CN109748932B (en) * | 2019-01-09 | 2021-06-08 | 浙江新化化工股份有限公司 | Continuous synthesis method of hexamethyldisilazane |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
RU2540618C2 (en) | Method and device to produce trisilylamine | |
CN101279735A (en) | Production method and apparatus for trichlorosilane | |
CN106927468A (en) | A kind of device for preparing electron level trichlorosilane | |
CN112678829A (en) | High-purity disilane continuous production system and preparation process | |
CN208824498U (en) | Reaction system with the continuous production HMDS for strengthening mass transfer and flowing | |
CN105439789A (en) | HMT continuous synthesis apparatus and method | |
CN112341395A (en) | Micro-reaction system and method for continuously preparing 2-methyl-4-amino-5-aminomethyl pyrimidine by using same | |
CN108745265A (en) | Reaction system and method with the continuous production HMDS for strengthening mass transfer and flowing | |
CN206033261U (en) | Disilane apparatus for producing | |
CN113861233A (en) | Preparation process and device of methyltrimethoxysilane | |
CN104556042A (en) | Polycrystalline silicon production method and equipment based on improved Siemens method | |
CN101774872B (en) | Preparation method of methyl chloride compounds and special device thereof | |
CN109320541A (en) | The method of tower acid binding agent method continuous production cyanoethyl triethoxysilane | |
CN208717207U (en) | A kind of reaction system of continuous production hexamethyldisilazane | |
CN113247862A (en) | High-purity electronic-grade hydrogen chloride production device and process | |
CN108659030A (en) | A kind of reaction system and method for continuous production hexamethyldisilazane | |
CN112723359B (en) | Method and system for preparing disilane by reaction of multi-metal silicide and ammonium chloride | |
CN106115718B (en) | A kind of disilane process units | |
CN209242692U (en) | Purify the device of trichlorosilane | |
CN201660570U (en) | Special device for preparing methyl chloride compound | |
CN209242693U (en) | Purify the device of trichlorosilane | |
CN206033262U (en) | Disilane reation kettle | |
CN105693759B (en) | The method for preparing chloropropyl alkylalkoxy silane using pathway reaction device | |
CN220684694U (en) | Polysilicon cold hydrogenation process system | |
CN111675196B (en) | Method for treating hydrogen chloride generated by hydrolysis of chlorosilane through enhanced condensation by using chloromethane as refrigerant |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WD01 | Invention patent application deemed withdrawn after publication | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20181106 |