CN108734763A

CN108734763A - The digitizing solution and system in the micro assemby space of microassembly system

Info

Publication number: CN108734763A
Application number: CN201810621377.7A
Authority: CN
Inventors: 王代华; 王坎; 张朋
Original assignee: Chongqing University
Current assignee: Chongqing University
Priority date: 2018-06-15
Filing date: 2018-06-15
Publication date: 2018-11-02
Anticipated expiration: 2038-06-15
Also published as: CN108734763B

Abstract

A kind of digitizing solution in the micro assemby space of microassembly system, pass through computer micro-vision layer scanning technology, computer micro-vision is sliced scanning technique and carries out tomoscan acquisition tomoscan position to micro assemby space in the direction where each monocular micro-vision system of microassembly system, slice scanning is carried out on two orthogonal directions vertical along micro-vision system optical axis obtains slice scan image, calculate the three-dimensional digital micro assemby space in the direction where each monocular micro-vision system, and calculate the phase Crosslinking Mechanisms in the micro assemby space that monocular micro-vision system obtains in all directions, the as digitlization micro assemby space of microassembly system.This method is not only while ensureing high-resolution, improve micro assemby spatial dimension, and the microassembly system spatial information of ultraphotic field or the super depth of field is showed with digitized forms, to realize high efficiency, high-precision, full automatic assembly or operation under micro assemby space/microoperation space, it is with a wide range of applications and economic benefit.

Description

The digitizing solution and system in the micro assemby space of microassembly system

Technical field

The invention belongs to intelligence manufacture field and field of scientific studies, are specifically servicing to micro assemby and microoperation field, tool Body is related to the part Three Dimensional Reconfiguration of micro-vision system more particularly to the digitizing technique in micro assemby space.

Background technology

In microassembly system, micro-vision system plays a crucial role, and is mostly used greatly in microassembly system It is micro-vision system, the part Three Dimensional Reconfiguration of micro-vision system is all microassembly systems for possessing vision system Main research is also the content that must be handled well.The part three-dimensionalreconstruction of visual component in Marr theory of vision computing frames Two major classes can be divided into, one kind is the two dimensional image that is acquired to object by vision system to be reconstructed, and re-construction theory is main It is to realize object using the relationship between object point, line, surface and its point in two dimensional image, line in three dimensions Reconstruct.Another kind of is the image sequence for being obtained by way of tomoscan object cross section, by there is the image of certain intervals Sequence carrys out reconstruction of objects.

The high-resolution of micro-vision system, high-amplification-factor provide very big convenience to the observation of micro parts, but by This also brings the problem of small depth of field, small field of view.Small field of view is exactly that the overall picture to be installed to replace the spare parts, small scape can not be obtained on range Deep is exactly that part overall picture can not be obtained in depth.The space weight of part can not be thus carried out by the way of point, line, surface Structure, and the weight due to being also inconvenient to carry out part in microassembly system in such a way that the technologies such as CT, MRI carry out tomoscan Structure.Therefore spatial information overall picture can not be just reconstructed in the assembly or operation of miniature parts in micro assemby space, also with regard to nothing Method carries out assembly or the optimization of courses of action and then solves the technologies hardly possiblies such as assembly or performance accuracy are low, efficiency is low, assembly difficulty is big Topic.

Invention content

The purpose of the present invention is in view of the deficiencies of the prior art, propose a kind of number in the micro assemby space of microassembly system Change method and system, Three-dimensional Display is carried out to miniature parts under digitlization micro assemby space, pose detects and optimize miniature zero The assembly of part or courses of action are to improve assembly or the operating efficiency of whole system.

The technical solution adopted by the present invention to solve the technical problems is as follows：

A kind of micro assemby spatial digitalized method of microassembly system mainly uses computer micro-vision tomoscan Technology, computer micro-vision slice scanning technique obtain the position of fault sequence and slice scan image sequence in micro assemby space Row and the micro assemby spatial digitalized for realizing microassembly system.Generally, it micro- is regarded for the binocular in X-axis, Z-direction is orthogonal The microassembly system of feel system is controlled for the monocular micro-vision system (5) of X-direction using one-dimensional precise positioning system (8) Micro-vision system (5) processed carries out tomoscan along X-direction and obtains tomoscan position, then passes through two-dimentional Precision Position Location System (6,7) control micro-vision system (5) carries out slice scanning and obtains slice scanned image sequence；It is aobvious for the monocular of Z-direction Micro- vision system (1) carries out tomoscan using one-dimensional precise positioning system (4) control micro-vision system (1) along Z-direction Tomoscan position is obtained, then slice scanning is carried out by two-dimentional Precision Position Location System (3,2) control micro-vision system (1) and is obtained Take slice scanned image sequence；Similarly, for the micro assemby system of the orthogonal micro-vision system of three mesh in X-axis, Y-axis, Z-direction System increases the micro-vision system (22) in Y direction, and micro-vision system (22) edge is controlled using Precision Position Location System (19) Y direction carries out tomoscan and obtains tomoscan position, then controls micro-vision system by Precision Position Location System (21,20) (22) it carries out slice scanning and obtains slice scanned image sequence；For more mesh micro-visions in X-axis, Y-axis, Z axis, R axis directions The microassembly system of system then increases micro-vision system IV (44), and obtains and carry out tomography using Precision Position Location System (47) Scanning obtains corresponding tomoscan position, and is carried out using Precision Position Location System (45,46) in different tomoscan positions Slice scanning obtains the slice scanned image sequence of different position of fault；For slice scan image combine along X-axis, Y-axis, Z axis, Make micro- on the moving step sizes reconstruct corresponding direction of the Precision Position Location System of computer micro-vision tomoscan regard in R axis directions The three-dimensional slice view field space of feel system obtains the digitlization of three-dimensional slice view field space using rasterizing and grid numeralization Information, and seek the three-dimension disclocation space in micro assemby space of the micro assemby space in all directions；X-axis, Y are finally sought respectively Axis, Z axis, the digitlization micro assemby space in R axis directions, and seek the phase Crosslinking Mechanisms in the micro assemby space in all directions.

The method of the present invention is as follows：

Step 1：Micro assemby space is obtained using computer micro-vision slice scanning technique, computed tomography Slice scanned image sequence and tomography spatial position sequence：For X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Micro-vision system on Y-axis and Z axis and arbitrary axis (R axis) direction, X-axis and Z axis or X-axis and Y-axis along micro assemby space Tomoscan is carried out with Z axis or X-axis and Y-axis and Z axis and R axis directions, the focal plane place for obtaining each micro-vision system is micro- The tomography spatial position sequence of assembly space；For X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and Micro-vision system in R axis directions：Micro-vision system focal plane wherein in X-direction is disconnected in each of micro assemby space Sheaf space position, be utilized respectively two-dimentional Precision Position Location System control its along Y-axis, Z-direction carry out slice scanning obtain it is each The slice scanned image sequence of position of fault；Micro-vision system focal plane in Y direction is in each of micro assemby space Tomography spatial position controls it using two-dimentional Precision Position Location System and be sliced scanning and obtain each breaking along X-axis, Z-direction The slice scanned image sequence of sheaf space position；Micro-vision system focal plane in Z-direction is every in micro assemby space A tomography spatial position controls it using two-dimentional Precision Position Location System and carries out slice scanning acquisition each along X-axis, Y direction The slice scanned image sequence of tomography spatial position；Micro-vision system focal plane in R axis directions is in microassembly system Each tomography spatial position controls it on two orthogonal directions of vertical R axis using two-dimentional Precision Position Location System and is sliced Scanning obtains the slice scanned image sequence of each tomography spatial position.

(2) each monocular is micro- in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Vision system is in the X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions in micro assemby space Different tomography spatial positions slice scan image combine corresponding tomoscan Precision Position Location System step-length reformatted slices The three-dimensional slice view field space of image calculates X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis The three-dimension disclocation space in the digital information of the three-dimensional slice view field space of position of fault and micro assemby space number on direction Change information, to calculate each monocular in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions The digitlization micro assemby space that micro-vision system obtains；Calculate on this basis X-axis and Z axis or X-axis and Y-axis and Z axis, Or the digitlization micro assemby space intersection space that each monocular micro-vision system obtains in X-axis and Y-axis and Z axis and R axis directions, Obtain the digitlization micro assemby space of microassembly system；

(2.1) according to the list in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions The slice scanned image sequence of mesh micro-vision system focal plane different tomographies spatial position in micro assemby space, calculates X-axis It is regarded with the three-dimensional slice of micro-vision system on Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Field spatial dimension；

(2.2) to micro- on X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions The three-dimensional slice view field space rasterizing and grid of vision system quantize, and obtain three-dimensional slice view field space on corresponding direction Digital information；

(2.3) according to three-dimensional on X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions It is sliced view field space digital information, calculates X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis The digital information in the three-dimension disclocation space in micro assemby space on direction；

(2.4) according to micro- dress on X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Three-dimension disclocation spatial digitalized information with space calculate separately microassembly system X-axis and Z axis or X-axis and Y-axis and Z axis, Or the digitlization micro assemby space in X-axis and Y-axis and Z axis and R axis directions；

(2.5) micro assemby along X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions The three-dimensional relationship in space matches；

(2.6) it calculates each micro- in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions The phase Crosslinking Mechanisms of assembly space；

The micro assemby space refers to that can observe mechanical arm or micro- simultaneously in built microassembly system space The space of the global informations such as robot, workbench and object to be assembled.

The present invention further also proposes the system for realizing the micro assemby spatial digitalized method of above-mentioned microassembly system, including Precision Position Location System, micro-vision system and master computer.

The Precision Position Location System for drive micro-vision system along respective micro-vision system optical axis direction move with And carry out precision positioning；It includes the telecontrol equipment for realizing one-dimensional, two-dimentional precise motion, realizes positioning accuracy and micro-vision system The matched high accuracy positioning movement driving actuator of the depth of field of uniting and controller, realize that positioning accuracy and micro-vision system visual field are big Small matched two-dimension high-precision positioning movement driving actuator and controller.

The Precision Position Location System is also configured with displacement standard volume system, and what control slice position and record were obtained cuts The location information of piece；It includes the displacement quantity sensor that displacement sensing is realized on the motion for be set to Precision Position Location System, And carry out the Precision Position Location System controller and displacement sensor controller of guide rail controlled motion feedback control.

The micro-vision system obtains tomoscan image sequence for carrying out image slices scanning；It includes micro- puts Big unit realizes the amplification to imaging object in microscopic field of view space, imaging by light microscope or electron microscope Unit is completed by CCD or CMOS cameras to the image objects in microscopic field of view space.

The master computer is for being controlled and calculated to Precision Position Location System and micro-vision system, and into line number Word microscopic field of view spatial result is shown：Master computer utilizes the cutting in different position of fault in X-axis, Y-axis, Z-direction Piece scan image combines the three-dimensional slice view field space of the step-length reconstructed slice image of the Precision Position Location System of corresponding tomoscan； Then by the digital information of the technology reengineerings three-dimensional slice view field spaces such as rasterizing, grid numeralization and based on digitized Three-dimensional slice view field space calculates the three-dimension disclocation view field space digital information of the extension of the visual field of different position of fault；Finally The three-dimension disclocation view field space digital information of the extension of visual field based on different position of fault calculates X-axis, Y-axis, in Z-direction The digitlization microscopic field of view space that the visual field of monocular micro-vision system extends simultaneously with the depth of field, and regarded using micro- in all directions The visual field of feel system is calculated with the digitlization microscopic field of view space that the depth of field extends simultaneously intersects view field space digital information, to Obtain the digitlization micro assemby space of microassembly system.

Method of the present invention is suitable for binocular, the micro assemby of the microassembly system of the orthogonal micro-vision system of more mesh Spatial digitalized.It is also applied for the micro- of the orthogonal microassembly system for having other non-orthogonal micro-vision systems concurrently of binocular, three mesh Assembly space digitizes, and to obtain the digital information in micro assemby space, is also applied for micro OS, cell manipulation system.

Method of the present invention in a computer can be to the digitlization side in the micro assemby space using microassembly system Miniature parts in the digitlization micro assemby space for the microassembly system that method obtains are operated.

The micro assemby space of microassembly system of the present invention is to constitute orthogonal micro- of more mesh of microassembly system to regard The intersection view field space in the micro assemby space that feel system and non-orthogonal micro-vision system obtain.

Present invention tool has the advantage that：

(1) present invention not only overcomes high-resolution and big visual field or the contradiction of the big depth of field online, that is, is ensureing high score While resolution, the range of imaging is improved, and the microassembly system spatial information of ultraphotic field or the super depth of field is digitized Form show, the visual in image three-dimensional information for characterizing object under micro assemby space, with realize in micro assemby space Lower high efficiency, high-precision, full automatic assembly or operation, are with a wide range of applications and economic benefit.

(2) present invention obtains micro assemby space using digitizing technique, avoids and existing obtains the depth of field by image co-registration The defect that general image clarity declines caused by extension is avoided because the calculating of extraction image characteristic point splicing fusion is complicated Degree and splicing precision problem.

(3) relatively existing to improve all directions list by adjusting micro-vision system inside and outside parameter, the method for topological structure The intersection view field space of mesh micro-vision system, the invention avoids because of adjustment micro-vision system inside and outside parameter, topological structure Caused by error.

The present invention application space digitizing technique and use digitizing technique can realize part under micro assemby space The operations such as reconstruct, assembly, positioning, pose detection, path planning are three-dimensional visualization, the road of micro assemby or microassembly system Diameter optimization, assembly, positioning, pose detection etc. provide necessary condition, effectively reduce the difficulty of micro assemby problem.

Description of the drawings

Fig. 1 is the micro assemby spatial digitalized method schematic diagram of the microassembly system of the orthogonal micro-vision system of three mesh；

Fig. 2 is micro- dress of the microassembly system with the conventional fine positioning system structure orthogonal micro-vision system of three mesh With spatial digitalized method system structural schematic diagram；

Fig. 3 is the micro assemby system of the Precision Position Location System structure orthogonal micro-vision system of three mesh with displacement sensor The micro assemby spatial digitalized method system structural schematic diagram of system；

Fig. 4 be have rotary stage realize multi-direction scanning the orthogonal micro-vision system of three mesh microassembly system Micro assemby spatial digitalized method schematic diagram；

Fig. 5 is the micro assemby spatial digitalized method schematic diagram of the microassembly system of the orthogonal micro-vision system of binocular；

Fig. 6 is the micro assemby system of the Precision Position Location System structure orthogonal micro-vision system of binocular with displacement sensor The micro assemby spatial digitalized method system structural schematic diagram of system；

Fig. 7 is that the micro assemby spatial digitalized method for the microassembly system that three mesh are just giving nonopiate micro-vision system is shown It is intended to；

Fig. 8 is that monocular micro-vision system different tomographies spatial position in micro assemby space obtains slice scan image meter Calculate micro assemby spatial digitalized method schematic diagram.

In figure：1, micro-vision system I, 2, Precision Position Location System I, 3, Precision Position Location System II, 4, Precision Position Location System III, 5, micro-vision system II, 6, Precision Position Location System IV, 7, Precision Position Location System V, 8, Precision Position Location System VI, 9, micro- Vision system I visual field is high, 10, I visual field of micro-vision system it is wide, 11, in Y direction visual field extension range, 12, micro-vision System I microscopic field of view space, 13, II microscopic field of view space of micro-vision system, 14, III microscopic field of view of micro-vision system it is empty Between, 15, in X-direction visual field extension range, 16, define coordinate system, 17, workbench, 18, micro assemby space, 19, accurate fixed Position system VII, 20, Precision Position Location System VIII, 21, Precision Position Location System Ⅸ, 22, micro-vision system III, 23, micro-vision system It unites I coaxial light source, 24, II coaxial light source of micro-vision system, 25, III coaxial light source of micro-vision system, 26, micro-clamp control Device, 27, displacement sensor controller, 28, Precision Position Location System controller, 29, light source controller, 30, image pick-up card, 31, Master computer, 32, micro-clamp system, 33, III displacement sensor of Precision Position Location System, 34, I displacement sensing of Precision Position Location System Device, 35, II displacement sensor of Precision Position Location System, 36, IV displacement sensor of Precision Position Location System, 37, Precision Position Location System VI Displacement sensor, 38, V displacement sensor of Precision Position Location System, 39, VIII displacement sensor of Precision Position Location System, 40, accurate fixed Position VII displacement sensor of system, 41, Ⅸ displacement sensor of Precision Position Location System, 42, worktable rotary direction, 43, part, 44, Micro-vision system IV, 45, Precision Position Location System Ⅹ, 46, Precision Position Location System XI, 47, Precision Position Location System XII, 48, micro- Vision system motion process.

Specific implementation mode

Below with reference to attached drawing, the preferred embodiment of the present invention is described in detail.Preferred embodiment is only for explanation The present invention, the protection domain being not intended to be limiting of the invention.

The digitizing solution in the micro assemby space of the microassembly system of the present invention may be used various shown by Fig. 1-Fig. 7 System is realized that these systems include Precision Position Location System, micro-vision system and master computer.

Micro-vision system (1,5,22) is controlled respectively by Precision Position Location System (4,8,19) along respective micro-vision system Optical axis direction moves, and obtains the tomography position where the focal plane of each monocular micro-vision system of the microassembly system in all directions It sets and slice scan image of the focal plane of each monocular micro-vision system on each position of fault.That is Precision Position Location System (4) control micro-vision system (1), which moves along the Z-direction for defining coordinate system (16) and carries out faultage image scanning, obtains tomography Scan position, and record the displacement of Precision Position Location System (4)Precision Position Location System (8) controls micro-vision system (5) along fixed The X-direction of adopted coordinate system (16), which moves and carries out faultage image scanning, obtains tomoscan position, and records precision positioning system The displacement of system (8)Precision Position Location System (19) controls micro-vision system (22) along the Y direction for defining coordinate system (16) It moves and carries out faultage image scanning and obtain tomoscan position, and record the displacement of Precision Position Location System (19)To remember Record the position of fault where the corresponding focal plane that the monocular micro-vision system tomoscan in all directions obtains.Utilize two dimension The Precision Position Location System (3 with 2,6 and 7,20 and 21) of orthogonal motion respectively control micro-vision system (1,5,22) each micro- Position of fault where the focal plane of vision system is along the X and Y direction, Y and Z-direction, X and the side Z for defining coordinate system (16) Slice scanning is carried out to movement, the slice visual field scanning figure of position of fault where obtaining the focal plane of all directions micro-vision system As sequence, and the displacement sequence of record Precision Position Location System (3 and 2,6 and 7,20 and 21) respectively.

By master computer, micro-vision system obtains micro assemby spatial digitalized information process to precision according to figure 8 Positioning system and micro-vision system are controlled and are calculated；According to Fig.8, for the monocular micro-vision in Z-direction System controls the focal plane of the micro-vision system different tomography space bits in micro assemby space using Precision Position Location System (4) It sets, using being control micro-vision system (1) respectively along the definition X-axis of coordinate system, Y using Precision Position Location System (3,2) Axis makees slice scanning, obtains slice scanned image sequence and the precision positioning system of the different tomography spatial positions where focal plane The displacement sequence of system.And pass through three-dimension disclocation Space Reconstruction, calculate each micro-vision system of different tomography spatial positions Three-dimensional slice view field space digital information, calculate the three-dimension disclocation spatial digitalized information in micro assemby space, it is basic herein The upper micro assemby spatial digitalized information for calculating monocular micro-vision system and obtaining.The motion process of micro-vision system such as label Shown in 48, the micro assemby space of acquisition is as shown in the reference numeral 18.Micro-vision system on other directions is in different tomoscan positions It sets and carries out slice scanning, the image sequence of different slice scannings is obtained, to realize micro- dress of monocular micro-vision system acquisition Process with spatial digitalized information can refer to the scanning process in Z-direction shown in Fig. 8.

Embodiment 1：

The digitization system in the micro assemby space of the microassembly system of the orthogonal micro-vision system of three mesh as shown in Figure 1, Precision Position Location System (4) control micro-vision system (1) is making tomoscan, precision positioning along definition coordinate system Z-direction System (8) control micro-vision system (5) is making tomoscan, Precision Position Location System control in definition coordinate system X-direction Micro-vision system (22) processed is making tomoscan in definition coordinate system Y direction, obtains micro- in all directions regard respectively The position of fault of the focal plane of feel system；Then it is directed to each position of fault of the focal plane of the micro-vision system in all directions, The Precision Position Location System control micro-vision system work slice scanning moved along other two direction of coordinate is defined is respectively adopted And record the sequence of slice scan image and the displacement of each Precision Position Location System.To realize the orthogonal micro-vision system of three mesh The micro assemby spatial digitalized of the microassembly system of system, microassembly system such as Fig. 2, the figure of the orthogonal micro-vision system of three mesh of structure Shown in 3.As shown in Figure 2, realize microassembly system micro assemby spatial digitalized its include mainly the orthogonal micro-vision of three mesh System, control micro-vision system carry out tomoscan and Precision Position Location System, image capturing system, the light source of slice scanning Control system, displacement sensor control system and micro-clamp system etc..For more high-accuracy acquisition Precision Position Location System Displacement, for tomoscan, slice scanning Precision Position Location System increase displacement sensor to realize precision positioning system The high precision displacement measurement of system, as shown in Figure 3.

It is suitable for using workbench along definition coordinate system X for the micro assemby spatial digitalized method of microassembly system The rotation of axis, Y-axis, Z axis realizes that micro-vision system obtains part position, posture digital information in micro assemby space It takes, as shown in Figure 4.It mainly realizes micro-vision system by changing workbench with respect to the angle position of micro-vision system Tomoscan at any angle to micro assemby space and slice scanning.The microassembly system of the orthogonal micro-vision system of three mesh Micro assemby spatial digitalized process be consistent with the process described in embodiment 4.

Embodiment 2：

The micro assemby spatial digitalized schematic diagram of the microassembly system of the orthogonal micro-vision system of binocular as shown in figure 5, It is by using micro-vision system (5) in the micro-vision system (1) and horizontal direction on vertical direction and corresponding Precision Position Location System, which is realized, carries out the digital information in the Digital Three-Dimensional micro assemby space in the both direction of micro assemby space It obtains, is then calculated by the intersection of three dimensions and obtain micro assemby spatial information, implement the structural schematic diagram of system As shown in Figure 6.As shown in Figure 6, the high-accuracy displacement of Precision Position Location System can be realized by increasing displacement sensor It measures.Described in the micro assemby spatial digitalized process and embodiment 5 of the microassembly system of the orthogonal micro-vision system of binocular Process is consistent.

Embodiment 3：

Three mesh are just giving the micro assemby spatial digitalized of the microassembly system of the non-orthogonal micro-vision system of more mesh to illustrate Figure is as shown in Figure 7.It respectively carries out the micro assemby space of microassembly system from any angle using each micro-vision system Tomoscan and slice scanning, if Precision Position Location System (4) control micro-vision system (1) is along the Z axis for defining coordinate system Direction carries out tomoscan, and controls micro-vision system (1) in each position of fault along fixed using Precision Position Location System (3,2) The X-axis of adopted coordinate system, Y-axis slice scanning obtain slice scan image；As Precision Position Location System (47) controls micro-vision system (44) tomoscan is carried out along any direction for defining coordinate system, and micro- regard is controlled using Precision Position Location System (45,46) Feel system (44) carries out in position of fault plane of the corresponding each position of fault along vertical micro-vision system (44) optical axis Slice scanning obtains slice scan image；Micro-vision system (5) and (22) respectively along define the X-axis of coordinate system, Y-axis into Row tomoscan, and micro-vision system (5) is controlled in each position of fault along definition coordinate system by Precision Position Location System (6,7) Y-axis, the Z-direction of system carry out slice scanning, and by Precision Position Location System (21,20) control micro-vision system (22), its is corresponding Position of fault carries out slice scanning along X-axis, the Z-direction for defining coordinate system, to obtain corresponding slice scan image. Three mesh are just being given described in micro assemby spatial digitalized process and the embodiment 6 of the microassembly system of non-orthogonal micro-vision system Process be consistent.

Embodiment 4：

The detailed process of micro assemby spatial digitalized is carried out using the microassembly system of the orthogonal micro-vision system of three mesh such as Under：

Step 1：Micro assemby space is obtained using computer micro-vision slice scanning technique, computed tomography Slice scanned image sequence and tomography spatial position sequence：For the micro-vision system in X-axis, Y-axis, Z-direction, along micro- X-axis, Y-axis, the Z-direction of assembly space carry out tomoscan, micro assemby space where obtaining the focal plane of micro-vision system Position of fault sequence；For each position of fault of the micro-vision system focal plane in X-direction in micro assemby space, It is utilized respectively two-dimentional Precision Position Location System and controls it and carry out slice scanning technique along Y-axis, Z-direction and obtain each position of fault Slice scanned image sequence；For each tomography of the micro-vision system focal plane in Y direction in micro assemby space Position controls it using two-dimentional Precision Position Location System and carries out each tomography position of slice scanning technique acquisition along X-axis, Z-direction The slice scanned image sequence set；It is disconnected in each of micro assemby space for the micro-vision system focal plane in Z-direction Layer position controls it using two-dimentional Precision Position Location System and carries out each tomography of slice scanning technique acquisition along X-axis, Y direction The slice scanned image sequence of position.

(1.1) it determines and carries out computer micro-vision tomoscan along the X-axis, Y-axis, Z-direction for defining coordinate system (16) Precision Position Location System (8,19,4) step-length, the direction of motion, motion mode, movement velocity, initial position and initial position When corresponding micro-vision system (5,22,1) focal plane defining the X-axis of coordinate system, the position of Y-axis, Z-direction respectivelyDetermination is big along X-axis, Y-axis, visual field resolution sizes, the depth of field of the micro-vision system of Z-direction (5,22,1) Suitable light source is arranged in small, pixel dimension, amplification factor；

(1.2) Precision Position Location System (4) control micro-vision system (1) is transported along the Z-direction for defining coordinate system (16) Dynamic to carry out tomoscan, the step-length that control micro-vision system (1) carries out the Precision Position Location System (4) of tomoscan isIts The displacement of a step-length is moved, then the tomography spatial position of the focal plane of micro-vision system changes, and records micro-vision The sequence number of position of fault where the focal plane of system (1) and the displacement of Precision Position Location System 4 are as follows：

WhereinIt is burnt when carrying out tomoscan along definition coordinate Z-direction for micro-vision system in microassembly system (1) Position of fault sequence where plane；The precision that tomoscan is carried out to control micro-vision system (1) in microassembly system is determined The vector of the displacement structure of position system 4；z_NThe number scanned along Z axis for micro-vision system (1)；Precision Position Location System (4) Z_kDisplacement after secondary movementWith step-lengthRelational expression it is as follows：

Similarly, for the tomoscan of micro-vision system (5) and micro-vision system (22), record micro-vision system The sequence number of the position of fault of the focal plane of system (5,22) and the displacement of Precision Position Location System 8,19 are as follows：

WhereinIt is burnt when carrying out tomoscan along definition coordinate X-direction for micro-vision system in microassembly system (5) Position of fault sequence where plane；x_NFor the number of micro-vision system (5) scanning；To control micro- regard in microassembly system Feel system (5) carries out the vector of the displacement structure of the Precision Position Location System (8) of tomoscan；To be shown in microassembly system For micro- vision system (22) along when defining coordinate Y direction progress tomoscan, focal plane can be with the tomography space sequence of blur-free imaging Arrange the vector of structure；y_NThe quantity in tomography space is scanned and obtained for micro-vision system (22)；To be controlled in microassembly system Micro-vision system (22) processed carries out the vector of the displacement structure of the Precision Position Location System (19) of tomoscan；Setting is accurate fixed Position system 8 and 19 moving step sizes be：8 xth of Precision Position Location System_iDisplacement after secondary movementWith step-length's 19 y of relational expression and Precision Position Location System_jDisplacement after secondary movementWith step-lengthRelational expression it is as follows：

(1.3) focal plane of micro-vision system (1) is along the tomography spatial position for defining coordinate system Z-directionIt determines It controls micro-vision system (1) and carries out the step-length for the Precision Position Location System (2,3) that computer micro-vision slice scans, movement side To, motion mode, movement velocity, initial position and micro-vision system (1) optical axis passes through the figure of focal plane when initial position Principal point position isThe focal plane of micro-vision system (5) is along definition coordinate system X-direction in tomography spatial positionDetermine that control micro-vision system (5) carries out the step of the Precision Position Location System (6,7) of computer micro-vision slice scanning Micro-vision system (5) optical axis passes through coke when length, the direction of motion, motion mode, movement velocity, initial position and initial position The image principle point location of plane isThe focal plane of micro-vision system (22) is along definition coordinate system Y direction in tomography Spatial positionDetermine that control micro-vision system (22) carries out the Precision Position Location System of computer micro-vision slice scanning The micro-vision system when step-length of (20,21), the direction of motion, motion mode, movement velocity, initial position and initial position (22) image principle point location of the optical axis across focal plane is

(1.4) in the position of fault of micro-vision system (1)Precision Position Location System (3) controls micro-vision system (1) It is scanned along the X-direction for defining coordinate system, the displacement of record Precision Position Location System (3) isPrecision Position Location System (2) Control micro-vision system (1) is scanned along the Y direction for defining coordinate system, and the displacement of record Precision Position Location System 2 isThen：

The step-length that Precision Position Location System (3) is arranged isThe step-length of Precision Position Location System (2) isThen precision positioning system The displacement of system and the relationship of step-length are：

According to Precision Position Location System (3,2) in tomographyDisplacementThe figure that each scanning of definition obtains As Serial No.The matrix of the slice scanned image sequence then obtained is：

Wherein x_N1、y_N1Indicate that Precision Position Location System (3,2) controls micro-vision system (1) along definition coordinate system X-axis, Y-axis The maximum times of direction slice scanning；For in the position of fault of micro-vision system 1Middle precision positioning system In x when uniting (3,2) respectively along definition coordinate system X-axis, Y direction movement_k、y_kDisplacement when ordinal position；For The position of fault of micro-vision system (1)In along define coordinate system X-axis, Y direction slice scanning slice scan image The matrix of sequence construct；

Similarly, in the position of fault of micro-vision system (5)Precision Position Location System (6) controls micro-vision system (5) Slice scanning is carried out along the Y direction for defining coordinate system, the displacement of record Precision Position Location System (6) isPrecision positioning system System (7) control micro-vision system (5) is scanned along the Z-direction for defining coordinate system, record Precision Position Location System (7) Displacement isThen：

The step-length that Precision Position Location System (6) is arranged isThe step-length of Precision Position Location System (7) isThen precision positioning system The displacement of system and the relationship of step-length are：

According to Precision Position Location System (6,7) micro-vision system (5) focal plane position of faultMake slice scanning position Shifting amountDefinition each scans the image sequence number obtainedThe slice scanning collection then obtained is combined into：

Wherein y_N5、z_N5Indicate Precision Position Location System control micro-vision system (5) along definition coordinate system Y-axis, Z-direction Maximum times；For the focal plane position of fault of micro-vision system (5)It is middle to be scanned along Y-axis, Z-direction slice Slice scanned image sequence constitute matrix；For the tomography space of micro-vision system (5)In in y_i、z_iSequence Slice scan image when number position；

Position of fault in micro-vision system (22)Precision Position Location System (21) controls micro-vision system (22) Slice scanning is carried out along coordinate system X-direction is defined, the displacement of record Precision Position Location System (21) isPrecision Position Location System (20) control micro-vision system (22) is scanned along coordinate system Z-direction is defined, the displacement of record Precision Position Location System (7) ForThen：

The step-length that Precision Position Location System (21) is arranged isThe step-length of Precision Position Location System (20) isThen precision positioning The displacement of system and the relationship of step-length are：

Position of fault according to Precision Position Location System (21,20) in micro-vision system (22)Make slice scanning shift Amount Definition each scans the image sequence number obtainedThe slice scanning collection then obtained is combined into：

Wherein x_N22、z_N22Indicate Precision Position Location System control micro-vision system (22) along definition coordinate system X-axis, Z axis side To the maximum times of scanning；For the position of fault of micro-vision system (22)In along define coordinate system X-axis, Z The matrix of the slice scanned image sequence structure of axis direction slice scanning.

It is scanned with slice for the tomoscan in X-axis and Y-axis and Z-direction, Precision Position Location System III, VI (4,8) control Micro-vision system I, II (1,5) processed carries out tomoscan step-lengthMicro-vision system I (1) carries out tomography space Slice scanning, the scanning step of Precision Position Location System I, II (2,3) isMicro-vision system II (5) carries out tomography The slice in space scans, and the scanning step of Precision Position Location System (6,7) isMicro-vision system III in Y direction (22), the step-length of Precision Position Location System VII (19) that control micro-vision system III (22) carries out slice space tomoscan isThe scanning step of Precision Position Location System IX, VIII (21,20) for carrying out slice scanning isIt needs to meet：

Wherein DOF₁、DOF₅、DOF₂₂The depth of field of respectively micro-vision system I, II, III (1,5,22), H₁、H₅、H₂₂Point Not Wei micro-vision system I, II, III (1,5,22) field height, W₁、W₅、W₂₂Respectively micro-vision system I, II, III The visual field width of (1,5,22).

Step 2：Different position of fault of each monocular micro-vision system in the X-axis, Y-axis, Z-direction in micro assemby space Slice scan image combine corresponding tomoscan Precision Position Location System step-length reconstructed slice image three-dimensional slice visual field Space, the three-dimension disclocation assembly for calculating the digital information, each position of fault of the three-dimensional slice view field space of each position of fault are empty Between digital information, to calculate the digitlization micro assemby space that each monocular micro-vision system obtains.It calculates on this basis The digitlization micro assemby space intersection space that each monocular micro-vision system obtains, obtains the digitlization micro assemby of microassembly system Space.

(2.1) different in micro assemby space according to the monocular micro-vision system focal plane in X-axis, Y-axis, Z-direction The slice scanned image sequence of position of fault, calculates that X-axis, Y-axis, the three-dimensional slice visual field of micro-vision system is empty in Z-direction Between range；

1. for micro-vision system (1) focal plane in the Z-axis direction different position of fault by Precision Position Location System (3, 2) control micro-vision system (1) carries out the slice scanned image sequence that slice scanning obtains in X-axis, Y direction, in conjunction with micro- Three-dimensional slice visual field on visual field size and Precision Position Location System (4) moving step sizes the reconstruct corresponding position of vision system (1) Space；For the focal plane of micro-vision system (5), different position of fault are controlled by Precision Position Location System (6,7) in the X-axis direction Micro-vision system (5) processed carries out the slice scanned image sequence that slice scanning obtains in Y-axis, Z-direction, in conjunction with micro-vision Three-dimensional slice view field space on visual field size and Precision Position Location System (8) moving step sizes the reconstruct corresponding position of system (5)； For micro-vision system (22) focal plane in the Y-axis direction different tomography spatial positions by Precision Position Location System (21,20) Control micro-vision system (22) carries out the slice scanned image sequence that slice scanning obtains in X-axis, Z-direction, in conjunction with micro- Three-dimensional slice on visual field size and Precision Position Location System (19) moving step sizes the reconstruct corresponding position of vision system (22) regards Field space；According to the high H of visual field of micro-vision system (1,5,22)₁、H₅、H₂₂, the wide W of visual field₁、W₅、W₂₂And Precision Position Location System (4) moving step sizesThe moving step sizes of Precision Position Location System (8)The moving step sizes of Precision Position Location System (19)It is aobvious Micro- vision system (1) focal plane tomography spatial positionThe slice scan image that scanning is sliced in X-axis, Y direction is corresponding Three-dimensional slice view field space size isMicro-vision system (5) focal plane position of faultAlong Y-axis, Z axis The corresponding three-dimensional slice view field space size of slice scan image that scanning is sliced on direction isIt is micro- to regard Feel system (22) focal plane position of faultThe corresponding three-dimensional of slice scan image that scanning is sliced in X-axis, Z-direction is cut Piece view field space size isFor the matrix of slice scanned image sequence structure The corresponding three-dimensional slice view field space sequence matrix reconstructed is as follows：

2. for the three-dimensional slice view field space of micro-vision system (1)Corresponding Precision Position Location System (3,2) Moving displacement beAt this time in defining coordinate system in X-direction In range, in the Y-axis directionIn range, in the Z-axis directionIt is three-dimensional slice view field space in rangeInformation.Remove three-dimensional slice Three-dimensional slice view field space size is after information other than view field space：

For the three-dimensional slice view field space of micro-vision system (5)The fortune of corresponding Precision Position Location System (6,7) Dynamic displacement isDefining coordinate system in the X-axis direction at this timeIn range, In Y directionIn range, in the Z-axis direction It is three-dimensional slice view field space in rangeInformation.Three-dimensional is cut after information other than removal three-dimensional slice view field space Piece view field space size is：

For the three-dimensional slice view field space of micro-vision system (22)Corresponding Precision Position Location System (22,21) Moving displacement beDefining coordinate system in the X-axis direction at this time In range, in the Y-axis directionIn range, in the Z-axis directionIt is three-dimensional slice view field space in rangeInformation.Removal is three-dimensional Three-dimensional slice view field space size is after information other than slice view field space：

(2.2) the three-dimensional slice view field space rasterizing and grid of X-axis and Y-axis and micro-vision system in Z-direction Numeralization obtains the three-dimensional slice view field space digital information of micro-vision system on corresponding direction；

For three-dimensional slice view field spaceOne n is set_z×n_z×n_zThe grid cube of a pixel utilizesA grid cube is to three-dimensional slice view field spaceDiscretization, and according to grid cubic site with And the cubical functional value of grid, build a three-dimensional digital matrixIt indicates.Picture in each grid cube is set The number that vegetarian refreshments is 1Setting grid cube assignment threshold value is TH₁IfThen this grid cube It is assigned a value of 1, is otherwise assigned a value of 0.Three-dimensional slice view field spaceIn (p_k, q_k, r_k) position the cubical assignment letter of grid Number isI.e.：

Whereinp_k∈ [1 2 ... p], q_k∈ [1 2 ... q], r_k∈ [1 2 ... r],Matrix is digitized for three-dimensional slice view field spaceMiddle position is (p_k, q_k, r_k) grid cube The number that pixel is 1 in body.

For three-dimensional slice view field spaceOne n is set_x×n_x×n_xThe grid cube of a pixel utilizesA grid cube is to three-dimensional slice view field spaceDiscretization, and according to grid cubic site and The cubical functional value of grid builds a three-dimensional digital matrixIt indicates；Pixel in each grid cube is set For 1 numberSetting grid cube assignment threshold value is TH₅IfThen this grid cube is assigned a value of 1, otherwise it is assigned a value of 0；Three-dimensional slice view field spaceIn (p_i, q_i, r_i) the cubical assignment function of grid of position isI.e.：

Whereinp_i∈ [1 2 ... p], q_i∈ [1 2 ... q], r_i∈ [1 2 ... r],Matrix is digitized for three-dimensional slice view field spaceMiddle position is (p_i, q_i, r_i) grid cube The number that middle pixel is 1.

For three-dimensional slice view field spaceOne n is set_y×n_y×n_yThe grid cube of a pixel utilizesA grid cube is to three-dimensional slice view field spaceDiscretization, and according to grid cubic site with And the cubical functional value of grid, build a three-dimensional digital matrixIt indicates；Picture in each grid cube is set The number that vegetarian refreshments is 1Setting grid cube assignment threshold value is TH₂₂IfThen this grid cube It is assigned a value of 1, is otherwise assigned a value of 0；Three-dimensional slice view field spaceIn (p_j, q_j, r_j) position the cubical assignment letter of grid Number isI.e.：

Whereinp_j∈ [1 2 ... p], q_j∈ [1 2 ... q], r_j∈[1 2 ... r],Matrix is digitized for three-dimensional slice view field spaceMiddle position is (p_j, q_j, r_j) The number that pixel is 1 in grid cube.

(2.3) it according to three-dimensional slice view field space digital information in X-axis, Y-axis, Z-direction, calculates on corresponding direction The digital information in the three-dimension disclocation space in micro assemby space：

For micro-vision system (1) focal plane position of faultUtilize the square of three-dimensional slice view field space sequence construct Battle arrayIn each three-dimensional slice view field space corresponding digitlization matrix calculate the micro assemby space of micro-vision system (1) Three-dimension disclocation spaceThe digital information for obtaining the three-dimension disclocation view field space in micro assemby space is usedIt indicates, i.e.,

Digital information at this timeThe three-dimension disclocation space size in description micro assemby space is：

For micro-vision system (5) focal plane position of faultUtilize the square of three-dimensional slice view field space sequence construct Battle arrayIn each three-dimensional slice view field space corresponding digitlization matrix calculate the extension microscopic field of view of micro-vision system (5) Three-dimension disclocation spaceThe digital information of three-dimension disclocation view field space after obtained extension is usedIt indicates, i.e.,

Digital information at this timeDescribing the Digital Three-Dimensional tomography view field space size that visual field extends is：

For micro-vision system (22) focal plane position of faultUtilize three-dimensional slice view field space sequence construct MatrixIn the corresponding digitlization matrix of each three-dimensional slice view field space calculate the extension microscopic field of view of micro-vision system (5) Three-dimension disclocation spaceThe digital information of three-dimension disclocation view field space after obtained extension is usedIt indicates, i.e.,

(2.4) the three-dimension disclocation view field space digitlization extended according to coordinate system X-axis, Y-axis, the visual field of Z-direction is defined Information calculates separately the digitlization micro assemby space of monocular micro-vision system of the microassembly system on corresponding direction：

Calculate separately what two adjacent fields of view in all directions extended first for the tomoscan in X-axis, Y-axis, Z-direction Three-dimension disclocation view field spaceWithWithWithSliceable calculating digitlization matrixWithWithAndThen the visual field and scape of micro-vision system (1,5,22) are calculated separately The Digital Three-Dimensional microscopic field of view space extended deeply

1. for along X-direction tomoscan, defines Precision Position Location System (8) and control micro-vision system (5) along X-axis just Direction carries out tomoscan (Flag_x=1), according to two adjacent three-dimension disclocation spacesWithDigitlization matrix beThen：

When Precision Position Location System (8) control micro-vision system (5) carries out tomoscan (Flag along X-axis negative direction_x=- 1) when：

At this time in X-direction micro-vision system (5) micro assemby spaceDigital informationFor：

Digital information at this timeMicro assemby space size is describedFor：

2. for along Y direction tomoscan, defines Precision Position Location System (19) and control micro-vision system (22) along Y-axis Positive direction carries out tomoscan (Flag_y=1), according to two adjacent three-dimension disclocation spacesWithDigitlization matrix beThen：

When Precision Position Location System (19) control micro-vision system (22) carries out tomoscan (Flag along Y-axis negative direction_y =-1) when：

The micro assemby space of micro-vision system (22) in Y direction is calculated at this timeDigital informationFor：

Digital information at this timeThe micro assemby space of descriptionSize is：

3. being carried out along Z axis positive direction for Precision Position Location System (4) control micro-vision system (1) is defined along Z-direction Tomoscan (Flag_z=1), according to two adjacent three-dimension disclocation spacesWithDigitlization matrix beThen：

When Precision Position Location System (4) control micro-vision system (1) carries out tomoscan (Flag along Z axis negative direction_z=- 1) when：

The micro assemby space of micro-vision system (1) in Z-direction is calculated at this timeDigital informationFor：

Digital information at this timeMicro assemby space is describedSize is： Wherein [] ' representing matrix transposition, Flag_x、Flag_y、Flag_zFor recording along definition coordinate system X-axis, Y-axis, Z The direction of axis scanning.

(2.5) it is extended with the depth of field along X-axis, Y-axis, the visual field of each monocular micro-vision system of Z-direction digitized The three-dimensional relationship in microscopic field of view space matches.

Matches criteria template is set in the assembly space of microassembly system, in each monocular along X-axis, Y-axis, Z-direction The digitized microscopic field of view space of the visual field of micro-vision system and depth of field extensionMatches criteria is obtained respectively Template digital information.Specific matching process is as follows：

1. along X-axis, Y-axis, the micro assemby space size of each monocular micro-vision system of Z-direction and digitlization grid Cube size matches.A characteristic point in selection standard matching template, obtain this feature along X-axis, Y-axis, Z-direction it is micro- Assembly spaceIn corresponding digital information position.Using the same characteristic point of matches criteria template not The position principle of identity matching in equidirectional micro assemby spaceSpace size.According toSpace size With process, determine that the position of the digital information of selection characteristic point matches respectivelyIn X-axis, Y-axis, Z-direction Spatial dimension, to complete microscopic field of view spaceThe matching of size；Selection standard matching templateDistance feature is digitized, using the same distance feature of matches criteria template in the equidistant of different micro assemby spaces Principle pairDigitlization grid cube size matched, through digitlization microscopic field of view space size, number Word grid cube size matching after be along the micro assemby space of X-axis, Y-axis, Z-direction

2. the micro assemby space S in X-axis, Y-axis, Z-direction_x、S_y、S_zSpatial position matching.According to along X-axis, Y-axis, Z The micro assemby space S of each monocular micro-vision system of axis direction_x、S_y、S_zMake number using spatial translation and rotation transformation Change microscopic field of view space coordinates and is consistent with coordinate system (16) is defined.Enable micro assemby space S_x、S_y、S_zBy spatial translation And the microscopic field of view space after rotation transformation isIts digital information after three-dimensional space position matches For：

(2.6) the phase Crosslinking Mechanisms in the micro assemby space of microassembly system are calculated.

For X-axis, Y-axis, Z-direction micro assemby space, the intersection micro assemby space G in the micro assemby space in all directions For：

Wherein ∩ indicates that the intersection in microscopic field of view space calculates.

Embodiment 5：

The micro assemby spatial digitalized process of the microassembly system of the orthogonal micro-vision system of binocular is as follows：

Step 1：Micro assemby space is obtained using computer micro-vision slice scanning technique, computed tomography Slice scanned image sequence and tomography spatial position sequence：Tomography is obtained for the micro-vision system in X-axis and Z-direction Scan position and slice scanned image sequence and the X-axis in the step 1 in embodiment 5, the micro-vision system in Z-direction It obtains tomoscan position and slice scanned image sequence process is consistent, the step 1 in opposite embodiment 5 removes Y direction The processing of upper micro-vision system；

(1.1) parameter of the micro-vision system in the X-axis and Z-direction for defining coordinate system (16), precision positioning are determined The parameter of system, detailed process with in the X-axis of the step 1 (1.1) in embodiment 5, Z-direction it needs to be determined that micro-vision System, the parameter of Precision Position Location System are consistent, micro-vision system in step 1 (1.1) the removal Y direction in opposite embodiment 5 The parameter determination of system, Precision Position Location System.

(1.2) it is directed to the micro-vision system of X-axis and Z-direction, obtains the tomoscan sequence along X-axis and Z-direction With the displacement sequence of the corresponding Precision Position Location System for carrying out tomoscan；Operating process and step 1 (1.2) X in embodiment 5 The operation of micro-vision system is consistent on axis, Z-direction；It is micro- in step 1 (1.3) removal Y direction in opposite embodiment 5 The operation of vision system.

(1.3) determine that micro-vision system II and I (5,1) carries out essence on slice scanning corresponding direction in X-axis and Z-direction Each corresponding direction when the step-length of close positioning system, the direction of motion, motion mode, movement velocity, initial position and initial position Upper micro-vision system optical axis passes through the image principle point location of focal plane；Operating process and step 1 (1.3) X in embodiment 5 The operation of micro-vision system is consistent on axis, Z-direction；It is micro- in step 1 (1.3) removal Y direction in opposite embodiment 5 The operation of vision system.

(1.4) the tomoscan positions on corresponding direction micro-vision system II and I (5,1) carry out in X-axis and Z-direction It is sliced the image sequence of scanning, and records the displacement that slice scans corresponding Precision Position Location System.In operating process and embodiment 5 Step 1 (1.4) X-axis, the operation of micro-vision system is consistent in Z-direction；Step 1 (1.4) removal in opposite embodiment 5 The operation of micro-vision system in Y direction.

Step 2：Different position of fault of each monocular micro-vision system in the X-axis, Z-direction in micro assemby space are cut Piece scan image combines the three-dimensional slice view field space of the step-length reconstructed slice image of the Precision Position Location System of corresponding tomoscan, Calculate the digital information of the three-dimensional slice view field space of each position of fault, the three-dimension disclocation assembly space number of each position of fault Change information, to calculate the digitlization micro assemby space that each monocular micro-vision system obtains.Each monocular is calculated on this basis The digitlization micro assemby space intersection space that micro-vision system obtains, obtains the digitlization micro assemby space of microassembly system.

(2.1) the different tomographies in micro assemby space of the monocular micro-vision system focal plane in X-axis and Z-direction are directed to The slice scanned image sequence of spatial position combines the step-length for the Precision Position Location System for carrying out each tomoscan, reconstructs X-axis and Z The three-dimensional slice view field space range of micro-vision system in axis direction；Operating process and step 2 (2.1) X in embodiment 5 Operation on axis, Z-direction is consistent；The operation in step 2 (2.1) removal Y direction in opposite embodiment 5.

(2.2) it is directed to the micro-vision system three-dimensional slice view field space rasterizing and grid obtained in X-axis and Z-direction Lattice quantize, the method for obtaining the three-dimensional slice view field space digital information on corresponding direction；In operating process and embodiment 5 Step 2 (2.2) X-axis, the operation in Z-direction it is consistent；In step 2 (2.2) removal Y direction in opposite embodiment 5 Operation；

(2.3) it according to three-dimensional slice view field space digital information in X-axis and Z-direction, calculates in X-axis and Z-direction The digital information in the three-dimension disclocation space in micro assemby space；Operating process and step 2 (2.3) X-axis in embodiment 5, Z axis side Upward operation is consistent；The operation in step 2 (2.3) removal Y direction in opposite embodiment 5.

(2.4) micro- dress is calculated separately according to the three-dimension disclocation spatial digitalized information in micro assemby space in X-axis and Z-direction Digitlization micro assemby space of the match system in X-axis and Z-direction；Operating process and step 2 (2.4) X-axis in embodiment 5, Z Operation in axis direction is consistent；The operation in step 2 (2.4) removal Y direction in opposite embodiment 5.

(2.5) three-dimensional relationship in micro assemby space matches in X-axis and Z-direction；In selection standard matching template A characteristic point, obtain this feature along X-axis, Z-direction acquisition micro assemby spaceIn corresponding digital information Position, the position principle of identity using the same characteristic point of matches criteria template in different directions micro assemby space matches micro assemby SpaceSpace size；Existed according to location determination this feature digital information of digital informationIt is middle respectively with It is parallel to the respective distances value matching for two boundary planes for defining coordinate system X/Y planeDefining coordinate system Z-direction On range；This feature digital information existsIt is middle respectively be parallel to define coordinate system XZ planes two boundary planes Respective distances value matchingRange on defining coordinate system Y direction；This feature digital information existsIn point It is not matched with the respective distances value for being parallel to two boundary planes for defining coordinate system YZ planesDefining coordinate system X-axis Range on direction, to completeThe matching of size；Selection standard matching template existsDistance feature is digitized, Principle of equidistance pair using the same distance feature of matches criteria template in different digital micro-vision spaceDigitlization Grid cube size is matched.After digitlization micro assemby space size, digitlization grid cube size matching It is S along the micro assemby space that X-axis, Z-direction obtain_x、S_z；Complete X-axis and the micro assemby space S in Z-direction_xWith S_zTwo Spatial position match to obtain micro assemby space S_x、S_zMicroscopic field of view space after spatial translation and rotation transformation isIts digital information after three-dimensional space position matches is：

(2.6) the intersection space-wise for calculating micro assemby space in X-axis and Z-direction is as follows：

For X-axis, Z-direction micro assemby space, the intersection micro assemby space G in the micro assemby space in all directions is：

Embodiment 6：

The micro assemby space of the orthogonal micro-vision system of three mesh and the microassembly system of other nonopiate micro-vision systems Digitized process is as follows：

Step 1：Micro assemby space is obtained using computer micro-vision slice scanning technique, computed tomography Slice scanned image sequence and tomography spatial position sequence：For the micro-vision system in X-axis, Y-axis, Z axis and R axis directions System II, III, I and IV (5,22,1,44) obtain tomoscan position and slice scanned image sequence, wherein X-axis, Y-axis, Z axis Processing on direction is consistent with the process of the step 1 in embodiment 5, and the step 1 in opposite embodiment 5 increases to be shown in R axis directions The processing of micro- vision system.

(1.1) ginseng of the micro-vision system in X-axis, Y-axis, Z axis and the R axis directions for define coordinate system (16) is determined Number, the parameter of Precision Position Location System, X-axis, Y-axis, in Z-direction micro-vision system parameter, the parameter of Precision Position Location System Determine that detailed process unanimously, increases R axis directions with the step 1 (1.1) in embodiment 5 with respect to the step 1 (1.1) in embodiment 5 Upper micro-vision system, the parameter of Precision Position Location System determine.

(1.2) micro-vision system II, III, I and IV (5,22,1,44) of X-axis, Y-axis, Z axis and R axis directions are directed to, Obtain the Precision Position Location System of the tomoscan sequence and corresponding progress tomoscan along X-axis, Y-axis, Z axis and R axis directions Displacement sequence；X-axis, Y-axis, the operating process in Z-direction and the step 1 (1.2) in embodiment 5 are consistent；Opposite embodiment 5 In step 1 (1.2) increase R axis directions on operation.

(1.3) X-axis, Y-axis, micro-vision system II, III, I and IV (5,22,1,44) in Z axis and R axis directions are determined Carry out the step-length, the direction of motion of Precision Position Location System, motion mode, movement velocity, initial position on slice scanning corresponding direction And micro-vision system optical axis passes through the image principle point location of focal plane on each corresponding direction when initial position；X-axis, Y-axis, Z Operating process in axis direction is consistent with the operation of step 1 (1.3) in embodiment 5；Step 1 (1.3) in opposite embodiment 5 Increase the operation on the directions R.

(1.4) in X-axis, Y-axis, Z axis and R axis directions micro-vision system II, III, I with IV (5,22,1,44) right It answers tomoscan position on direction to carry out slice scanning and record slice scanned image sequence, and records slice and scan corresponding essence The displacement of close positioning system.X-axis, Y-axis, the operating process in Z-direction and the step 1 (1.4) in embodiment 5 operation one It causes；Step 1 (1.4) in opposite embodiment 5 increases the operation in R axis directions.

For the microassembly system of more mesh micro-vision systems, on the microassembly system of the orthogonal micro-vision system of three mesh Micro-vision system IV (44) in increased R axis directions, control micro-vision system IV (44) carry out different slices and scan position The step-length of the Precision Position Location System XII (47) for the tomoscan set needs to be less than the depth of field equal to micro-vision system IV (44), The scanning step for carrying out Precision Position Location System X, XI (45,46) of slice scanning is less than or equal to regarding for micro-vision system IV (44) Field width degree and height.

Step 2：Difference of each monocular micro-vision system in the X-axis in micro assemby space, Y-axis, Z axis and R axis directions The slice scan image of position of fault combines the step-length reformatted slices scan image of the Precision Position Location System of corresponding tomoscan Three-dimensional slice view field space, calculate the digital information of the three-dimensional slice view field space of each position of fault, each position of fault three Tomography assembly space digital information is tieed up, to calculate the digitlization micro assemby space that each monocular micro-vision system obtains.? The digitlization micro assemby space intersection space that each monocular micro-vision system obtains is calculated on the basis of this, obtains microassembly system Digitize micro assemby space.

(2.1) the monocular micro-vision system focal plane in X-axis, Y-axis, Z axis and R axis directions is directed in micro assemby space The slice scanned image sequence of middle difference tomography spatial position combines the step-length for the Precision Position Location System for carrying out each tomoscan, The three-dimensional slice view field space range of micro-vision system in reconstruct X-axis, Y-axis, Z axis and R axis directions；X-axis, Y-axis, Z axis side Upward operating process is consistent with the operation of step 2 (2.1) in embodiment 5；Step 2 (2.1) in opposite embodiment 5 increases Operation in R axis directions.

(2.2) the micro-vision system three-dimensional slice view field space grid obtained in X-axis, Y-axis, Z axis and R axis directions are directed to It formats and grid quantizes, the method for obtaining the three-dimensional slice view field space digital information on corresponding direction；X-axis, Y-axis, Z Operating process in axis direction is consistent with the operating process of step 2 (2.2) in embodiment 5；Step 2 in opposite embodiment 5 (2.2) increase the operating process in R axis directions.

(2.3) according to three-dimensional slice view field space digital information in X-axis, Y-axis, Z axis and R axis directions, X-axis, Y are calculated The digital information in the three-dimension disclocation space in micro assemby space in axis, Z axis and R axis directions；X-axis, Y-axis, the behaviour in Z-direction It is consistent with the operation of step 2 (2.3) in embodiment 5 to make process；Step 2 (2.3) in opposite embodiment 5 increases R axis directions On operation.

(2.4) according to the three-dimension disclocation spatial digitalized information in micro assemby space in X-axis, Y-axis, Z axis and R axis directions point It Ji Suan not digitlization micro assemby space of the microassembly system in X-axis, Y-axis, Z axis and R axis directions；X-axis, Y-axis, Z-direction On operating process it is consistent with the operating process of step 2 (2.4) in embodiment 5；Step 2 (2.4) in opposite embodiment 5 increases Add the operation in R axis directions.

(2.5) it is directed to X-axis and Y-axis and Z axis and the micro assemby space size and digitlization grid cube of R axis directions is big Small matching, then X-axis and Y-axis in Z-direction micro assemby space size and digitlization grid cube size matched On the basis of journey be 5 step 2 of embodiment (2.5) on the basis of considerSpatial dimension and the cubical size of grid, pass through Digitize after microscopic field of view space size, digitlization grid cube size matching along X-axis, Y-axis, Z axis and R axis directions Micro assemby space is S_x、S_y、S_z、S_R；Complete X-axis and Y-axis and Z axis and R axis directions it is multi-direction on micro assemby space S_xWith S_yWith S_zWith S_RSpatial position in multiple directions matches to obtain micro assemby space S_x、S_y、S_z、S_RBy spatial translation and rotation transformation Microscopic field of view space afterwards isIts digital information after three-dimensional space position matches is：

For X-axis, Y-axis, Z axis, R axis direction micro assembies space, the intersection micro assemby in the micro assemby space in all directions is empty Between G be：

The foregoing is merely the preferred embodiment of the present invention, are not intended to restrict the invention, it is clear that those skilled in the art Various changes and modifications can be made to the invention by member without departing from the spirit and scope of the present invention.If in this way, the present invention Within the scope of the claims of the present invention and its equivalent technology, then the present invention is also intended to include these these modifications and variations Including modification and variation.

Claims

1. a kind of digitizing solution in the micro assemby space of microassembly system, which is characterized in that the method is aobvious using computer Micro- vision layer scanning technology, computer micro-vision slice scanning technique are aobvious in each monocular in micro assemby space of microassembly system Direction where micro- vision system carries out tomoscan to micro assemby space and obtains focal plane tomoscan position, along micro-vision Slice scanning is carried out on two vertical orthogonal directions of systematic optical axis and obtains slice scan image, is based on each monocular micro-vision system The three-dimensional slice view field space of the slice scan image reconstruct micro-vision system of the different position of fault of system focal plane, to obtain The three-dimension disclocation space in micro assemby space is taken, and calculates three-dimensional micro assemby space and realizes the micro assemby space number of microassembly system Word includes the following steps：

(1) computer micro-vision slice scanning technique, computer micro-vision layer scanning technology is utilized to obtain micro assemby sky Between slice scanned image sequence and tomography spatial position sequence：For X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis With the micro-vision system on Y-axis and Z axis and arbitrary axis, that is, R axis directions, X-axis and Z axis or X-axis and Y in micro assemby space Tomoscan is carried out on axis and Z axis or X-axis and Y-axis and Z axis and R axis directions, the coke for obtaining all directions micro-vision system is flat Tomography spatial position sequence of the face in micro assemby space；For X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis With micro-vision system on Z axis and R axis directions：Micro-vision system focal plane wherein in X-direction is in micro assemby space Each tomography spatial position, be utilized respectively two-dimentional Precision Position Location System and control it and carry out slice scanning along Y-axis, Z-direction Obtain the slice scanned image sequence of each position of fault；Micro-vision system focal plane in Y direction is in micro assemby space In each tomography spatial position, using two-dimentional Precision Position Location System control its along X-axis, Z-direction carry out slice scanning obtain Take the slice scanned image sequence of each tomography spatial position；Micro-vision system focal plane in Z-direction is in micro assemby sky Between in each tomography spatial position, control it using two-dimentional Precision Position Location System and carry out slice scanning along X-axis, Y direction Obtain the slice scanned image sequence of each tomography spatial position；Micro-vision system focal plane in R axis directions is in micro assemby Each tomography spatial position in system controls it along on two orthogonal directions of vertical R axis using two-dimentional Precision Position Location System Carry out the slice scanned image sequence that slice scanning obtains each tomography spatial position；

(2) the monocular micro-vision in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions System in the X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions in micro assemby space not Slice scan image with tomography spatial position combines the step-length reformatted slices of the Precision Position Location System of corresponding tomoscan to scan The three-dimensional slice view field space of image calculates X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis The digital information of the three-dimensional slice view field space of different tomographies spatial position and the three-dimension disclocation in micro assemby space on direction Spatial digitalized information, to calculate X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions On monocular micro-vision system obtain digitlization micro assemby space；X-axis and Z axis or X-axis and Y are calculated on this basis The digitlization micro assemby space that each monocular micro-vision system obtains on axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Phase Crosslinking Mechanisms obtain the digitlization micro assemby space of microassembly system；

(2.1) aobvious according to the monocular in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions The slice scanned image sequence of micro- vision system focal plane different tomographies spatial position in micro assemby space, calculates X-axis and Z The three-dimensional slice visual field of micro-vision system is empty on axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Between range；

(2.2) to the micro-vision in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions The three-dimensional slice view field space rasterizing and grid of system quantize, and obtain three-dimensional slice view field space number on corresponding direction Change information；

(2.3) it is regarded according to micro- on X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions The three-dimensional slice view field space digital information of feel system calculates X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y The digital information in the three-dimension disclocation space in micro assemby space on axis and Z axis and R axis directions；

(2.4) empty according to micro assemby on X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Between three-dimension disclocation spatial digitalized information calculate separately microassembly system in X-axis and Z axis or X-axis and Y-axis and Z axis or Digitlization micro assemby space on X-axis and Y-axis and Z axis and R axis directions；

(2.5) the micro assemby space along X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Three-dimensional relationship matching；

(2.6) micro assemby in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions is calculated The phase Crosslinking Mechanisms in space；

The micro assemby space refers to that can observe mechanical arm or micro-machine simultaneously in built microassembly system space The space of the global informations such as people, workbench and object to be assembled.

2. the digitizing solution in the micro assemby space of microassembly system according to claim 1, which is characterized in that the step Suddenly the detailed process of (1) is：

(1.1) determine along the X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis for defining coordinate system (16) and In R axis directions micro-vision system carry out the step-length of Precision Position Location System of computer micro-vision tomoscan, the direction of motion, Distinguish the focal plane of micro-vision system when motion mode, movement velocity, initial position and initial position on corresponding direction Position in the X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions for defining coordinate system WithWithWithWithWithWithDetermine along X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and On Y-axis and Z axis and R axis directions micro-vision system II and I (5,1) or micro-vision system II and III and I (5,22, Or the visual field resolution sizes of micro-vision system II and III and I and IV (5,22,1,44), depth of field size, pixel ruler 1) Suitable light source is arranged in very little, amplification factor；

(1.2) be directed in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions micro- regards Feel system, Precision Position Location System control all directions monocular micro-vision system and obtain along X-axis and Z axis or X-axis and Y-axis and Z The Precision Position Location System of the tomoscan sequence of axis or X-axis and Y-axis and Z axis and R axis directions and corresponding progress tomoscan Displacement sequence；

Wherein Precision Position Location System III (4) controls micro-vision system I (1) and is moved along the Z-direction for defining coordinate system (16) Tomoscan is carried out, the step-length that control micro-vision system I (1) carries out the Precision Position Location System III (4) of tomoscan is It moves the displacement of a step-length, then the tomography spatial position of the focal plane of micro-vision system changes, and records micro- regard The sequence number of position of fault where the focal plane of feel system I (1) and the displacement of Precision Position Location System III (4) are as follows：

WhereinWhen carrying out tomoscan along definition coordinate Z-direction for micro-vision system I (1) in microassembly system, Jiao Ping Position of fault sequence where face；The precision that tomoscan is carried out to control micro-vision system I (1) in microassembly system is determined The vector of the displacement structure of position system III (4)；z_NThe number scanned along Z axis for micro-vision system I (1)；Precision positioning system Unite (4) z of III_kDisplacement after secondary movementWith step-lengthRelational expression it is as follows：

Similarly, for the tomoscan of micro-vision system II (5) and micro-vision system III (22), micro-vision is recorded The displacement of the sequence number and Precision Position Location System VI, VII (8,19) of the position of fault of the focal plane of system II, III (5,22) Amount is as follows：

WhereinWhen carrying out tomoscan along definition coordinate X-direction for micro-vision system II (5) in microassembly system, Jiao Ping Position of fault sequence where face；x_NFor the number of micro-vision system II (5) scannings；To control micro- regard in microassembly system Feel system II (5) carries out the vector of the displacement structure of the Precision Position Location System VI (8) of tomoscan；For microassembly system For middle micro-vision system III (22) along when defining coordinate Y direction progress tomoscan, focal plane can be with the tomography of blur-free imaging The vector of spatial sequence structure；y_NThe quantity in tomography space is scanned and obtained for micro-vision system III (22)；For micro- dress The displacement structure that micro-vision system III (22) carries out the Precision Position Location System VII (19) of tomoscan is controlled in match system Vector；The moving step sizes that Precision Position Location System VI, VII (8,19) is arranged are：Precision Position Location System VI (8) xth_i Displacement after secondary movementWith step-length(19) y of relational expression and Precision Position Location System VII_jDisplacement after secondary movement With step-lengthRelational expression it is as follows：

For R axis direction computer micro-vision tomoscans, then Precision Position Location System (47) is utilized to control monocular micro-vision System IV (44) obtains tomoscan positionRecord the displacement of the Precision Position Location System (47) of tomoscanWherein The moving step sizes Δ of Precision Position Location System_RLess than or equal to the depth of field of micro-vision system IV (44)；And displacementIt is walked with movement Length is in a linear relationship.

(1.3) micro-vision in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions is determined System II and I (5,1) or micro-vision system II and III and I (5,22,1) or micro-vision system II and III and I Step-length, the direction of motion, motion mode, the fortune of Precision Position Location System on slice scanning corresponding direction are carried out with IV (5,22,1,44) Micro-vision system optical axis passes through the image principal point of focal plane on each corresponding direction when dynamic speed, initial position and initial position Position；

Wherein determine that control micro-vision system I (1) carries out Precision Position Location System I, II of the slice scanning of computer micro-vision Micro-vision system I (1) when the step-length of (2,3), the direction of motion, motion mode, movement velocity, initial position and initial position Optical axis pass through focal plane image principle point location beIt is micro- to determine that control micro-vision system II (5) carries out computer The step-length of Precision Position Location System IV, V (6,7) of vision slice scanning, the direction of motion, motion mode, movement velocity, initial position And image principle point location of micro-vision system II (5) optical axis across focal plane is when initial positionDetermine control Micro-vision system III (22) carries out the step of Precision Position Location System VIII, IX (20,21) of computer micro-vision slice scanning Micro-vision system III (22) optical axis is worn when length, the direction of motion, motion mode, movement velocity, initial position and initial position The image principle point location for crossing focal plane isDetermine that control micro-vision system IV (44) carries out computer micro-vision It is sliced the step-length of Precision Position Location System (45,46) of scanning, the direction of motion, motion mode, movement velocity, initial position and just Micro-vision system IV (44) optical axis passes through the image principle point location of focal plane when beginning position；

(1.4) micro-vision system in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions II and I (5,1) or micro-vision system II and III and I (5,22,1) or micro-vision system II and III and I and IV (5,22,1,44) tomoscan position in all directions carries out slice scanning and obtains slice scanned image sequence, and records and cut Piece scans the displacement of corresponding Precision Position Location System；

Position of fault in (1) micro-vision system IPrecision Position Location System II (3) control micro-vision system I (1) along The X-direction for defining coordinate system is scanned, and the displacement of record Precision Position Location System II (3) isPrecision Position Location System I (2) Control micro-vision system I (1) is scanned along the Y direction for defining coordinate system, the position of record Precision Position Location System I (2) Shifting isThen：

The step-length that Precision Position Location System II (3) is arranged isThe step-length of Precision Position Location System I (2) isThen Precision Position Location System Displacement and the relationship of step-length be：

According to Precision Position Location System II, I (3,2) in tomographyDisplacementThe figure that each scanning of definition obtains As Serial No.The matrix of the slice scanned image sequence then obtained is：

Wherein x_N1、y_N1Indicate Precision Position Location System II, I (3,2) control micro-vision system I (1) along definition coordinate system X-axis, Y-axis The maximum times of direction slice scanning；For in the position of fault of (1) micro-vision system IMiddle precision positioning In x when system II, I (3,2) is moved respectively along definition coordinate system X-axis, Y direction_k、y_kDisplacement when ordinal position；For the position of fault of (1) micro-vision system IIn along define coordinate system X-axis, Y direction slice scanning cut The matrix of piece scanned image sequence structure；

Similarly, in the position of fault of micro-vision system (5)Precision Position Location System (6) control micro-vision system (5) along The Y direction for defining coordinate system carries out slice scanning, and the displacement of record Precision Position Location System (6) isPrecision Position Location System (7) Control micro-vision system (5) is scanned along the Z-direction for defining coordinate system, the displacement of record Precision Position Location System (7) ForThen：

The step-length that Precision Position Location System (6) is arranged isThe step-length of Precision Position Location System (7) isThen Precision Position Location System The relationship of displacement and step-length is：

According to Precision Position Location System (6,7) micro-vision system (5) focal plane position of faultMake slice scanning shift amountDefinition each scans the image sequence number obtainedThe slice scanning collection then obtained is combined into：

Wherein y_N5、z_N5Indicate Precision Position Location System control micro-vision system (5) along definition coordinate system Y-axis, the maximum of Z-direction Number；For the focal plane position of fault of micro-vision system (5)The middle slice scanned along Y-axis, Z-direction slice The matrix that scanned image sequence is constituted；For the tomography space of micro-vision system (5)In in y_i、z_iOrdinal position When slice scan image；

Position of fault in micro-vision system (22)Precision Position Location System (21) controls micro-vision system (22) along fixed Adopted coordinate system X-direction carries out slice scanning, and the displacement of record Precision Position Location System (21) isPrecision Position Location System (20) Control micro-vision system (22) is scanned along coordinate system Z-direction is defined, and the displacement of record Precision Position Location System (7) isThen：

The step-length that Precision Position Location System (21) is arranged isThe step-length of Precision Position Location System (20) isThen Precision Position Location System Displacement and the relationship of step-length be：

Wherein x_N22、z_N22Indicate that Precision Position Location System control micro-vision system (22) is swept along definition coordinate system X-axis, Z-direction The maximum times retouched；For the position of fault of micro-vision system (22)In along define coordinate system X-axis, Z axis side The matrix of the slice scanned image sequence structure of tangential section scanning；

Position of fault in micro-vision system (44)Micro-vision system is controlled by Precision Position Location System (45,46) respectively IV (44) carry out the slice scan image that slice scanning obtains each tomoscan positionRecord control micro-vision system IV (44) carry out the displacement sequence of the Precision Position Location System (45,46) of slice scanning, and the position of Precision Position Location System (45,46) Shifting amount sequence and step-length are in a linear relationship.

3. the digitizing solution in the micro assemby space of microassembly system according to claim 2, which is characterized in that be directed to X Tomoscan on axis and Z-direction, Precision Position Location System III, VI (4,8) control micro-vision system I, II (1,5) and carry out Tomoscan step-length isMicro-vision system I (1) carries out the slice scanning in tomography space, Precision Position Location System I, II The scanning step of (2,3) isMicro-vision system II (5) carries out the slice scanning in tomography space, Precision Position Location System The scanning step of (6,7) isIt needs to meet：

It is scanned with slice for the tomoscan in X-axis and Y-axis and Z-direction, the micro-vision system in increased Y direction III (22), control micro-vision system III (22) carry out the step-length of the Precision Position Location System VII (19) of slice space tomoscan ForThe scanning step of Precision Position Location System IX, VIII (21,20) for carrying out slice scanning isIt needs to meet：

Wherein DOF₁、DOF₅、DOF₂₂The depth of field of respectively micro-vision system I, II, III (1,5,22), H₁、H₅、H₂₂Respectively The field height of micro-vision system I, II, III (1,5,22), W₁、W₅、W₂₂Respectively micro-vision system I, II, III (1, 5,22) visual field width；

For the microassembly system of more mesh micro-vision systems, increase on the microassembly system of the orthogonal micro-vision system of three mesh R axis directions on micro-vision system IV (44), control micro-vision system IV (44) carries out different slice scan positions The step-length of the Precision Position Location System XII (47) of tomoscan needs to be less than the depth of field equal to micro-vision system IV (44), carries out The scanning step for being sliced Precision Position Location System X, XI (45,46) of scanning is wide less than or equal to the visual field of micro-vision system IV (44) Degree and height.

4. the digitizing solution in the micro assemby space of microassembly system according to claim 1, which is characterized in that the step Suddenly the detailed process of (2.1) is as follows：

1. being regarded for the monocular in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions is micro- Feel that the slice scanned image sequence that system focal plane is obtained in different tomography spatial positions combines the precision of corresponding tomoscan fixed The step-length of position system reconstructs micro- in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions The three-dimensional slice view field space range of vision system；Wherein X-axis, Y-axis, Z axis, the different tomoscan positions obtained in R axis directions The three-dimensional slice view field space set is as follows：

For the focal plane of micro-vision system (1), different position of fault are controlled by Precision Position Location System (3,2) in the Z-axis direction Micro-vision system (1) carries out the slice scanned image sequence that slice scanning obtains in X-axis, Y directionIn conjunction with micro- Visual field size (the H of vision system (1)₁×W₁) and Precision Position Location System (4) moving step sizesReconstruct the three-dimensional on corresponding position It is sliced view field space sequenceThe three-dimensional slice view field space size of the micro-vision system (1) of reconstruct isFor the matrix of slice scanned image sequence structureThe corresponding three-dimensional slice visual field reconstructed is empty Between sequence matrix it is as follows：

For the focal plane of micro-vision system (5), different position of fault are controlled by Precision Position Location System (6,7) in the X-axis direction Micro-vision system (5) carries out the slice scanned image sequence that slice scanning obtains in Y-axis, Z-directionIn conjunction with micro- Visual field size (the H of vision system (5)₅×W₅) and Precision Position Location System (8) moving step sizesReconstruct three on corresponding position Dimension slice view field space sequenceReconstructing three-dimensional slice view field space size isFor slice scanning figure As the matrix of sequence constructThe corresponding three-dimensional slice view field space sequence matrix reconstructed is as follows：

For micro-vision system (22) focal plane in the Y-axis direction different tomography spatial positions by Precision Position Location System (21, 20) control micro-vision system (22) carries out the slice scanned image sequence that slice scanning obtains in X-axis, Z-directionIn conjunction with the visual field size (H of micro-vision system (22)₂₂×W₂₂) and Precision Position Location System (19) moving step sizes Reconstruct the three-dimensional slice view field space on corresponding positionThe three-dimensional slice view field space size of reconstruct is For the matrix of slice scanned image sequence structureThe corresponding three-dimensional slice view field space sequence matrix reconstructed is such as Under：

For the micro-vision system IV (44) in R axis directions, and the micro-vision system focal plane in R axis directions is reconstructed not With the three-dimensional slice view field space of position of fault；According to the high H of the visual field of micro-vision system IV (44)₄₄, the wide W of visual field₄₄And essence The moving step sizes of close positioning system (47)The three-dimensional slice view field space size of different position of fault is

2. for X-axis and with monocular is micro- on Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions regards The processing that the three-dimensional slice view field space of the acquisition of feel system removes unexpected information is as follows：

For the three-dimensional slice view field space of micro-vision system I (1)The movement of corresponding Precision Position Location System (3,2) Displacement isAt this time in defining coordinate system in X-directionIn range, In the Y-axis directionIn range, in the Z-axis direction It is three-dimensional slice view field space in rangeInformation.Three-dimensional is cut after information other than removal three-dimensional slice view field space Piece view field space size is：

For the three-dimensional slice view field space of micro-vision system (5)The motion bit of corresponding Precision Position Location System (6,7) Shifting isDefining coordinate system in the X-axis direction at this timeIn range, in Y In axis directionIn range, in the Z-axis direction It is three-dimensional slice view field space in rangeInformation.Three-dimensional is cut after information other than removal three-dimensional slice view field space Piece view field space size is：

For the three-dimensional slice view field space of micro-vision system (22)The motion bit of corresponding Precision Position Location System (22,21) Shifting isDefining coordinate system in the X-axis direction at this timeIn range, In the Y-axis directionIn range, in the Z-axis direction It is three-dimensional slice view field space in rangeInformation.Three-dimensional is cut after information other than removal three-dimensional slice view field space Piece view field space size is：

The precision positioning of three-dimensional slice view field space and progress tomoscan, slice scanning for micro-vision system (44) The step-length of system, three-dimension disclocation view field space size is after removing the information other than three-dimensional slice view field space：

5. the digitizing solution in the micro assemby space of microassembly system according to claim 1, which is characterized in that described (2.2) to the micro-vision system on X-axis and Z axis either X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Three-dimensional slice visual field of the X-axis and Z axis of acquisition either in X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions is empty Between rasterizing and grid numeralization, obtain corresponding direction on three-dimensional slice view field space digital information method, wherein X Axis, Y-axis, Z axis, the three-dimensional slice view field space rasterizing in R axis directions and grid numeralization, obtain X-axis, Y-axis, Z axis, R The three-dimensional slice view field space digital information method that monocular micro-vision system obtains in axis direction is as follows：

The three-dimensional slice view field space obtained for Z-directionOne n is set_z×n_z×n_zThe grid of a pixel is vertical Cube utilizesA grid cube is to three-dimensional slice view field spaceDiscretization, and according to grid cube Body position and the cubical functional value of grid build a three-dimensional digital matrixIt indicates；It is vertical that each grid is set The number that pixel is 1 in cubeSetting grid cube assignment threshold value is TH₁IfThen this grid Lattice cube is assigned a value of 1, is otherwise assigned a value of 0；Three-dimensional slice view field spaceIn (p_k, q_k, r_k) position grid cube Assignment function beI.e.：

Whereinp_k∈ [1 2 ... p], q_k∈ [1 2 ... q], r_k∈ [1 2 ... r], Matrix is digitized for three-dimensional slice view field spaceMiddle position is (p_k, q_k, r_k) grid cube in pixel be 1 Number；

The three-dimensional slice view field space obtained for X-directionOne n is set_x×n_x×n_xThe grid cube of a pixel Body utilizesA grid cube is to three-dimensional slice view field spaceDiscretization, and according to grid cube Position and the cubical functional value of grid build a three-dimensional digital matrixIt indicates；Each grid cube is set The number that middle pixel is 1Setting grid cube assignment threshold value is TH₅IfThen this grid cube Body is assigned a value of 1, is otherwise assigned a value of 0；Three-dimensional slice view field spaceIn (p_i, q_i, r_i) position the cubical assignment of grid Function isI.e.：

Whereinp_i∈ [1 2 ... p], q_i∈ [1 2 ... q], r_i∈ [1 2 ... r],Matrix is digitized for three-dimensional slice view field spaceMiddle position is (p_i, q_i, r_i) grid cube The number that middle pixel is 1；

The three-dimensional slice view field space obtained for Y directionOne n is set_y×n_y×n_yThe grid of a pixel is vertical Cube utilizesA grid cube is to three-dimensional slice view field spaceDiscretization, and it is vertical according to grid Cube position and the cubical functional value of grid build a three-dimensional digital matrixIt indicates；Each grid is set The number that pixel is 1 in cubeSetting grid cube assignment threshold value is TH₂₂IfThen this Grid cube is assigned a value of 1, is otherwise assigned a value of 0；Three-dimensional slice view field spaceIn (p_j, q_j, r_j) position grid cube The assignment function of body isI.e.：

Whereinp_j∈ [1 2 ... p], q_j∈ [1 2 ... q], r_j∈[1 2 … R],Matrix is digitized for three-dimensional slice view field spaceMiddle position is (p_j, q_j, r_j) grid it is vertical The number that pixel is 1 in cube；

For the three-dimensional slice view field space matrix for the different position of fault that R axis directions micro-vision system IV (44) obtains The three-dimension disclocation view field space digitizing solution that X-axis, Y-axis, Z-direction obtain then is used to complete its three-dimensional slice view field space number Word process.

6. the digitizing solution in the micro assemby space of microassembly system according to claim 1, which is characterized in that the step Suddenly (2.3) are regarded according to three-dimensional slice on X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Field spatial digitalized information, calculates in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions The digital information in the three-dimension disclocation space in micro assemby space；Wherein X-axis, Y-axis, Z axis, in R axis directions micro assemby space three The digital information for tieing up tomography space is as follows：

For micro-vision system (1) focal plane position of faultUtilize the matrix of three-dimensional slice view field space sequence constructIn the corresponding digitlization matrix of each three-dimensional slice view field space calculate micro-vision system (1) micro assemby space three Tie up tomography spaceObtained micro assemby space position of faultThree-dimension disclocation space digital information useIt indicates, I.e.

For micro-vision system (5) focal plane position of faultUtilize the matrix of three-dimensional slice view field space sequence constructIn the corresponding digitlization matrix of each three-dimensional slice view field space calculate micro-vision system (5) micro assemby space three-dimensional Tomography spaceObtained micro assemby space position of faultThree-dimension disclocation space digital information useIt indicates, i.e.,

For micro-vision system (22) focal plane position of faultUtilize the matrix of three-dimensional slice view field space sequence constructIn the corresponding digitlization matrix of each three-dimensional slice view field space calculate micro-vision system (22) micro assemby space three Tie up tomography spaceObtained micro assemby space position of faultThree-dimension disclocation space digital information useIt indicates, I.e.

For micro-vision system (44) focal plane position of faultIn matrix using three-dimensional slice view field space sequence construct The corresponding three-dimensional for digitizing matrix and calculating the micro assemby space that micro-vision system (44) obtains of each three-dimensional slice view field space Tomography space.

7. the digitizing solution in the micro assemby space of microassembly system according to claim 1, which is characterized in that the step Suddenly (2.4) are according to micro assemby space on X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Three-dimension disclocation spatial digitalized information calculate separately microassembly system in X-axis and Z axis or X-axis and Y-axis and Z axis or X Digitlization micro assemby space on axis and Y-axis and Z axis and R axis directions；Wherein calculate separately X-axis, Y-axis, Z axis, in R axis directions The method difference for digitizing micro assemby space is as follows：

1. for along X-direction tomoscan, the three-dimensional of two adjacent position of fault in micro assemby space in X-direction is calculated first Tomography view field spaceWithSliceable calculating digitlization matrixWithPrecision Position Location System (8) is defined to control Micro-vision system (5) processed carries out tomoscan (Flag along X-axis positive direction_x=1), according to two adjacent three-dimension disclocation spacesWithDigitlization matrix beThen：

When Precision Position Location System (8) control micro-vision system (5) carries out tomoscan (Flag along X-axis negative direction_x=-1) when：

Micro assemby space in X-direction at this timeDigital informationFor：

Digital information at this timeMicro assemby space size is describedFor：

2. for along Y direction tomoscan, the three-dimensional of two adjacent position of fault in micro assemby space in Y direction is calculated first Tomography view field spaceWithSliceable calculating digitlization matrixWithDefine Precision Position Location System (19) It controls micro-vision system (22) and carries out tomoscan (Flag along Y-axis positive direction_y=1), according to two adjacent three-dimension disclocation spacesWithDigitlization matrix beThen：

When Precision Position Location System (19) control micro-vision system (22) carries out tomoscan (Flag along Y-axis negative direction_y=-1) When：

Micro assemby space in Y direction at this timeDigital informationFor：

3. for along Z-direction tomoscan, the three-dimensional of two adjacent position of fault in micro assemby space in Z-direction is calculated first Tomography view field spaceWithSliceable calculating digitlization matrixDefine Precision Position Location System (4) It controls micro-vision system (1) and carries out tomoscan (Flag along Z axis positive direction_z=1), according to two adjacent three-dimension disclocation spacesWithDigitlization matrix beThen：

When Precision Position Location System (4) control micro-vision system (1) carries out tomoscan (Flag along Z axis negative direction_z=-1) when：

Micro assemby space in Z-direction at this timeDigital informationFor：

Digital information at this timeMicro assemby space is describedSize is：

4. for along R axis direction tomoscans, the three-dimensional of two adjacent position of fault in micro assemby space in R axis directions is calculated first The digitlization matrix of the sliceable calculating of tomography view field space, and the direction of motion of the Precision Position Location System according to tomoscan Flag_RDetermine the micro assemby space of micro-vision system IV (44)Digital information

Wherein [] ' representing matrix transposition, Flag_x、Flag_y、Flag_z、Flag_RFor recording along definition coordinate system X-axis, Y-axis, Z The scanning direction of axis, R axis.

8. the digitizing solution in the micro assemby space of microassembly system according to claim 1, which is characterized in that the step Suddenly (2.5) the micro assemby space along X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Three-dimensional relationship matching process is as follows：

1. the micro assemby space size being directed in X-axis and Z-direction and digitlization grid cube size matching, selection standard A characteristic point in matching template obtains this feature along the micro assemby space of X-axis, Z-direction acquisitionIn it is corresponding The position of digital information, the position principle of identity using the same characteristic point of matches criteria template in different directions micro assemby space Match micro assemby spaceSpace size；Existed according to location determination this feature digital information of digital informationIt is middle to be matched respectively with the respective distances value for being parallel to two boundary planes for defining coordinate system X/Y planeFixed Range in adopted coordinate system Z-direction；This feature digital information existsIt is middle respectively be parallel to that define coordinate system XZ flat The respective distances value of two boundary planes in face matchesRange on defining coordinate system Y direction；This feature number Change information to existIt is middle to be matched respectively with the respective distances value for being parallel to two boundary planes for defining coordinate system YZ planesRange on defining coordinate system X-direction, to completeThe matching of size；Selection standard matching template ?Distance feature is digitized, using the same distance feature of matches criteria template in different digital micro-vision space Principle of equidistance pairDigitlization grid cube size matched.By digitizing micro assemby space size, number It is S along the micro assemby space that X-axis, Z-direction obtain to change after the matching of grid cube size_x、S_z；For X-axis and Y-axis and Z axis Micro assemby space size on direction and digitlization grid cube size matching, then one in selection standard matching template is special Point is levied, obtains this feature along the micro assemby space of X-axis, Y-axis, Z-directionIn corresponding digital information Position.Position principle of identity using the same characteristic point of matches criteria template in different directions micro assemby space matchesSpace size.According toSpace size matching process determines the digital information of selection characteristic point Position matches respectivelyIn X-axis, Y-axis, the spatial dimension of Z-direction, to complete microscopic field of view spaceThe matching of size；Selection standard matching templateDistance feature is digitized, standard is utilized Principle of equidistance pair with the same distance feature of template in different micro assemby spacesDigitlization grid cube it is big It is small to be matched.By digitlization microscopic field of view space size, digitlization grid cube size matching after along X-axis, Y-axis, Z The micro assemby space of axis direction is S_x、S_y、S_z；For the micro assemby space size and number of X-axis and Y-axis and Z axis and R axis directions Word grid cube size matches, then the micro assemby space size in X-axis and Y-axis and Z-direction and digitlization grid Consider on the basis of cube size matching processSpatial dimension and the cubical size of grid, through digitlization it is micro- View field space size, digitlization grid cube size matching after along the micro assemby space of X-axis, Y-axis, Z axis and R axis directions For S_x、S_y、S_z、S_R。

2. the space in micro assemby space in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Location matches：According to along X-axis, Y-axis, Z axis, R axis direction micro assemby space Ss_x、S_y、S_z、S_RBecome using spatial translation and rotation It changes so that the digitlization micro assemby space coordinates in all directions are consistent with coordinate system (16) is defined.In X-axis and Z-direction Micro assemby space S_xWith S_zComplete two spatial position matchings；X-axis and Y-axis and the micro assemby space S in Z-direction_xWith S_y With S_zComplete three spatial position matchings；Micro assemby space S on X-axis and Y-axis and Z axis and R axis directions are multi-direction_xWith S_yWith S_z With S_RComplete the spatial position matching in multiple directions；Enable micro assemby space S_x、S_y、S_z、S_RBecome by spatial translation and rotation Microscopic field of view space after changing isIts digital information after three-dimensional space position matches is：

9. the digitizing solution in the micro assemby space of microassembly system according to claim 1, which is characterized in that the step Suddenly (2.6) calculate micro assemby space in X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Intersection space-wise it is as follows：

For X-axis, Y-axis, Z-direction micro assemby space, the intersection micro assemby space G in the micro assemby space in all directions is：

For X-axis, Y-axis, Z axis, R axis direction micro assembies space, the intersection micro assemby space G in the micro assemby space in all directions For：

10. the digitizing solution in the micro assemby space of the microassembly system according to claim 1-9, which is characterized in that along X The matching of micro assemby spatial relationship can be on axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis and R axis directions Selected Assembly part, the digitalized signature realization X-axis of object and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis With the micro assemby spatial match in R axis directions, X-axis and Z axis or X-axis and Y-axis and Z axis or X-axis and Y-axis and Z axis are obtained With the micro assemby space after the spatial relationship matching in R axis directionsWithWithWithWithWithWith

11. the system for realizing the micro assemby spatial digitalized method of microassembly system described in claim 1-0, including precision positioning System, micro-vision system and master computer, which is characterized in that

The Precision Position Location System for drive micro-vision system moved along respective micro-vision system optical axis direction and into Row precision positioning；It includes the telecontrol equipment for realizing one-dimensional, two-dimentional precise motion, realizes positioning accuracy and micro-vision system scape Deep matched high accuracy positioning movement driving actuator and controller, realize positioning accuracy and micro-vision system visual field size The two-dimension high-precision positioning movement driving actuator and controller matched；

The micro-vision system obtains tomoscan image sequence for carrying out image slices scanning；It includes that micro- amplification is single Member, the i.e. amplification by light microscope or electron microscope realization to imaging object in microscopic field of view space, imaging unit, Completed to the image objects in microscopic field of view space by CCD or CMOS cameras；

The master computer is used to that Precision Position Location System and micro-vision system to be controlled and be calculated, and is digitized Microscopic field of view spatial result is shown：Master computer is utilized and is swept in the slice of different position of fault along X-axis, Y-axis, Z axis, R axis directions The three-dimensional slice view field space of the step-length reconstructed slice image of Precision Position Location System of the tracing as combining corresponding tomoscan；Then By rasterizing, grid quantize etc. technology reengineerings three-dimensional slice view field space digital information and be based on digitized three-dimensional Slice view field space calculates the three-dimension disclocation view field space digital information of the extension of the visual field of different position of fault；It is finally based on The three-dimension disclocation view field space digital information of the extension of the visual field of different position of fault calculate X-axis, Y-axis, Z axis, in R axis directions The digitlization microscopic field of view space that the visual field of monocular micro-vision system extends simultaneously with the depth of field, and regarded using micro- in all directions The visual field of feel system is calculated with the digitlization microscopic field of view space that the depth of field extends simultaneously intersects view field space digital information, to Obtain the digitlization micro assemby space of microassembly system.