CN108724501A - A kind of reversible silicon single crystal rod cutter device - Google Patents
A kind of reversible silicon single crystal rod cutter device Download PDFInfo
- Publication number
- CN108724501A CN108724501A CN201810919031.5A CN201810919031A CN108724501A CN 108724501 A CN108724501 A CN 108724501A CN 201810919031 A CN201810919031 A CN 201810919031A CN 108724501 A CN108724501 A CN 108724501A
- Authority
- CN
- China
- Prior art keywords
- movable plate
- motor
- fixed plate
- feed device
- fixing axle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a kind of reversible silicon single crystal rod cutter devices, it includes fixed plate, and feed device is slidably connected in the middle part of fixed plate；The both sides of feed device are both provided with movable plate A, and the both ends of each movable plate A are both provided with tensioning wheel；It is rotatably connected to fixing axle A and threaded rod A on each tensioning wheel；Directive wheel there are two being respectively provided in the middle part of each movable plate A；The both ends of the feed device are both provided with bobbins, and diamond cutting secant is connected between two bobbins；It is respectively connected with fixing axle C and bearing on each bobbins, rotating wheel is respectively connected on each fixing axle C；The both ends of feed device are both provided with mobile bar, and threaded rod B is threaded in the middle part of each mobile bar；It is provided with conveyer belt and motor C below the feed device；It is connected with PLC controller in the fixed plate.The present invention can not only improve efficiency, keep operation more convenient, also have the advantages that applied widely, mechanical flexibility is preferable and structural stability is preferable.
Description
Technical field
The present invention relates to a kind of reversible silicon single crystal rod cutter devices that monocrystalline silicon fabricates industry.
Background technology
Monocrystalline silicon is needed with silicon single crystal rod cutter device to silicon single crystal rod in the production process of monocrystalline silicon using wide
It carries out cutting into silicon chip, but existing silicon single crystal rod cutter device generally uses the diamond cut of rotation when cutting silicon single crystal rod
Line is sawed from the side of silicon single crystal rod to the other side, and speed is slower, less efficient；And to the tensioning wheel on silicon single crystal rod cutter device
It is more complex with the operation of the adjusting of directive wheel, and then silicon single crystal rod cutter device is made to be only applicable to that the diamond of single specification is installed
Cutting line, smaller scope of application.Therefore, there is less efficient, operation is more complex and suitable for existing silicon single crystal rod cutter device
With the smaller problem of range.
Invention content
The object of the present invention is to provide a kind of reversible silicon single crystal rod cutter devices.The present invention can not only improve efficiency,
Keep operation more convenient, also has the advantages that the scope of application is wider.
Technical scheme of the present invention：A kind of reversible silicon single crystal rod cutter device, including fixed plate, the sliding of fixed plate middle part
It is connected with feed device, multiple cylinder A are connected on feed device；The both sides of feed device, which are both provided with to slide with fixed plate, to be connected
The movable plate A connect, the both ends of each movable plate A are both provided with tensioning wheel；It is rotatably connected on each tensioning wheel and movement
It is respectively connected with the threaded rod A being slidably connected with movable plate A on the fixing axle A, each fixing axle A that plate A is slidably connected；Each screw thread
The one end bar A is threaded with the nut positioned at the sides movable plate A, is connected between nut and movable plate A and is socketed in threaded rod A
On spring；Be respectively provided in the middle part of each movable plate A there are two directive wheel, be rotatably connected on each directive wheel with it is mobile
The fixing axle B that plate A is slidably connected；Connecting rod A is respectively connected on each fixing axle B, the one end connecting rod A is rotatably connected to and movement
The screw A that plate A is threadedly coupled；The sides each movable plate A are respectively connected with multiple cylinder B in fixed plate；It is described to send
The both ends of material device are both provided with bobbins, and diamond cutting secant is connected between two bobbins；Diamond cutting secant with
Bearing up pulley and directive wheel are all connected with, and fixing axle C is respectively connected on each bobbins；It is socketed on each fixing axle C and solid
The bearing that fixed board is slidably connected is respectively connected with belt on each fixing axle C；One end of each belt is respectively connected with rotating wheel, often
The motor A being slidably connected with fixed plate is respectively connected on a rotating wheel；The both ends of the feed device are both provided with and fixed plate
The both ends of the mobile bar being slidably connected, each mobile bar are connect with bearing and motor A respectively；Screw thread connects in the middle part of each mobile bar
It is connected to the one end threaded rod B, each threaded rod B and is respectively connected with motor B；It is provided with conveyer belt, conveyer belt below the feed device
On be connected with motor C；PLC controller, the cylinder A, cylinder B, motor A, motor B and motor C are connected in the fixed plate
It is electrically connected with PLC controller；It is provided with the coolant liquid Universal pipe being fixed in fixed plate below the feed device.
In a kind of reversible silicon single crystal rod cutter device above-mentioned, the feed device includes movable plate B, in movable plate B
Portion is equipped with through-hole；Setting is respectively connected with cylinder C there are two clamping shoe on each clamping shoe above through-hole；The tops the movable plate B
Portion both sides are respectively connected with riser, and transverse slat is connected between two risers；Montant is slidably connected in the middle part of transverse slat, montant both sides are nibbled
Conjunction is connected with gear, and motor D is respectively connected on each gear；The montant bottom end is connected with the fastening above clamping shoe
Ring, dead ring sidewall thread are connected with multiple screw B；The both sides of the bottom ends the movable plate B are both provided with sliding block A, described solid
It is corresponded on fixed board and is equipped with sliding slot A at the position of sliding block A；The cylinder C and motor D is electrically connected with PLC controller；It is described solid
It is corresponded on fixed board and is equipped with fluting C at the position of feed device.
In a kind of reversible silicon single crystal rod cutter device above-mentioned, the PLC controller can control cylinder A it is flexible,
The flexible of cylinder B, the rotation of motor A, the rotation of motor B, the rotation of motor C, flexible and motor D the rotation of cylinder C.
In a kind of reversible silicon single crystal rod cutter device above-mentioned, corresponds on the movable plate A and set at the position of fixing axle A
There are the both sides fluting A, the fixing axle A to be both provided with slide block B；The both sides fluting A correspond to and are equipped with sliding slot B at the position of slide block B, mobile
It is corresponded on plate A and is equipped with trepanning at the position of threaded rod A；It is corresponded on the movable plate A and is equipped with fluting B at the position of fixing axle B, Gu
The both sides dead axle B are both provided with sliding block C；The both sides fluting B correspond to and are equipped with sliding slot C at the position of sliding block C, and screw A is corresponded on movable plate A
Position at be equipped with threaded hole；The both sides of the bottom ends the movable plate A are both provided with sliding block D, and the position of sliding block D is corresponded in fixed plate
It sets place and is equipped with sliding slot D；It corresponds to be equipped at the position of movable plate A on fluting D, the movable plate A in the fixed plate and corresponds to feeding
Half fluting A is equipped at the position of device；It is corresponded in the fixed plate and is equipped with half fluting B at the position of fixing axle B.
It is equipped with and opens at the position of corresponding shaft bearing in a kind of reversible silicon single crystal rod cutter device above-mentioned, in the fixed plate
Slot E, bearing both sides are both provided with sliding block E, and the both sides fluting E, which correspond to, is equipped with sliding slot E at the position of sliding block E；It is right in the fixed plate
It answers and is equipped with fluting F at the position of motor A, the both sides motor A are both provided with sliding block F, and the both sides fluting F correspond to be set at the position of sliding block F
There is sliding slot F；It is connected with connecting rod B between the mobile bar and bearing, connecting rod B is also connected between mobile bar and motor A；It moves
Lever both ends are both provided with sliding block G, are corresponded in fixed plate and are equipped with sliding slot G at the position of sliding block G；It is separate on the threaded rod B
One end of motor B is socketed with bearing, and the belt is located above bearing；It corresponds in the mobile bar and is set at the position of threaded rod B
There is tapped through hole.
In a kind of reversible silicon single crystal rod cutter device above-mentioned, the conveyer belt both sides are both provided with partition board, conveyer belt
Both ends are connected separately with driven wheel and driving wheel, and driving wheel is connect with motor C.
In a kind of reversible silicon single crystal rod cutter device above-mentioned, it is arranged at the position that the connecting rod A is connect with screw A
There is round block, the one end screw A, which corresponds to, is equipped with circular groove at the position of round block.
In a kind of reversible silicon single crystal rod cutter device above-mentioned, the fixed plate bottom end is connected with multiple columns.
Compared with prior art, present invention improves over existing silicon single crystal rod cutter devices, by fixing silicon single crystal rod
After on feed device, being controlled after motor A drives rotating wheel rotation by PLC controller makes bobbins rotate, and bobbins passes through
After cooperation with tensioning wheel and directive wheel, the diamond cutting secant being wound on tensioning wheel, directive wheel and bobbins is set to rotate, then
PLC controller drives movable plate A to be moved to silicon single crystal rod side after controlling cylinder B elongation again, directive wheel on movable plate A and
Bearing up pulley is also moved to silicon single crystal rod side, at the same PLC controller also control after motor B rotation by threaded rod B drive motor A and
Bobbins is moved to the side far from silicon single crystal rod, is located at the diamond cutting secant part below each movable plate A then close to single
The both sides of silicon single crystal rod are simultaneously cut into certain depth, and the Buddha's warrior attendant being wound on directive wheel, tensioning wheel and bobbins by crystalline silicon rod
Stone cutting line is in tensioning state always, and then PLC controller is driven thereon after controlling cylinder A elongations again by feed device
Silicon single crystal rod is moved to the movable plate A of side, and the diamond cutting secant part below the movable plate A of side then will be in silicon single crystal rod
The part that portion is not cut is cut, and then silicon chip is cut into from silicon single crystal rod, by diamond cutting secant to monocrystalline silicon
It is cut while stick both sides, improves the speed of present invention cutting silicon single crystal rod, efficiency is higher；And by turning threaded rod A mono-
After the nut at end, the compression degree of spring changes, and threaded rod A is also moved in the sides movable plate A, and fixing axle A drives tensioning in turn
Wheel movement, while screw A is turned again, so that screw A is moved on movable plate A, screw A after connecting rod A by driving fixing axle B to move
It is dynamic, fixing axle B and then drive directive wheel movement, and then keep the operation of the adjusting of tensioning wheel and directive wheel more convenient, and by making
Tensioning wheel and directive wheel are moved to the same side, and then the diamond cutting secant for keeping present invention installation perimeter different, and then are improved
The scope of application of the present invention.In addition, the present invention on feed device also by being arranged clamping shoe and gear, tooth after clamping shoe unclamps
After wheel drives riser movement, after the silicon single crystal rod on dead ring is also moved with riser, then by clamping shoe by silicon single crystal rod
It clamps, feed device completes the primary conveying of silicon single crystal rod, and mechanism is more flexible；By the way that slide block B and sliding slot B is arranged, make fixation
The movement of axis A is relatively stablized, and by the way that sliding block C and sliding slot C is arranged, so that the movement of fixing axle B is relatively stablized, by the way that sliding block D and cunning is arranged
Slot D makes the movement of movable plate A relatively stablize, and then improves the structural stability of the present invention；By conveyer belt both ends connection from
Driving wheel and driving wheel further improve mechanism by the way that round block and circular groove are arranged at the position that connecting rod A is connect with screw A
Flexibility.Therefore, the present invention can not only improve efficiency, keep operation more convenient, also with applied widely, mechanical flexibility is preferable
The preferable advantage with structural stability.
Description of the drawings
Fig. 1 is the structural schematic diagram of the present invention；
Fig. 2 is the front view of the present invention；
Fig. 3 is the sectional view at A-A in Fig. 2；
Fig. 4 is the structural schematic diagram at movable plate A；
Fig. 5 is the structural schematic diagram at bobbins；
Fig. 6 is the vertical view of feed device；
Fig. 7 is the front view of feed device；
Fig. 8 is the front view of mobile bar；
Fig. 9 is the sectional view at round block；
Figure 10 is the sectional view at conveyer belt.
Label in attached drawing be：1- fixed plates, 2- feed devices, 3- cylinders A, 4- movable plate A, 5- tensioning wheel, 6- are fixed
Axis A, 7- threaded rod A, 8- nut, 9- springs, 10- directive wheels, 11- fixing axles B, 12- connecting rod A, 13- screw A, 14- cylinder
B, 15- bobbins, 16- fixing axles C, 17- bearing, 18- belts, 19- rotating wheels, 20- motors A, 21- mobile bar, 22- threaded rods
B, 23- motor B, 24- conveyer belt, 25- motors C, 26-PLC controller, 27- movable plates B, 28- through-hole, 29- clamping shoes, 30- gas
Cylinder C, 31- riser, 32- transverse slats, 33- montants, 34- gears, 35- motors D, 36- dead ring, 37- screws B, 38- sliding block A, 39-
Sliding slot A, 40- fluting A, 41- slide block Bs, 42- sliding slots B, 43- fluting B, 44- sliding blocks C, 45- sliding slot C, 46- diamond cutting secant,
47- slots C, and 48- sliding blocks D, 49- sliding slot D, 50- slot D, and 51- partly slots A, and 52- partly slots B, 53- coolant liquid Universal pipes, 54-
Slot E, 55- sliding blocks E, 56- sliding slot E, 57- fluting F, 58- sliding blocks F, 59- sliding slot F, 60- connecting rod B, 61- sliding block G, 62- cunning
Slot G, 63- bearing, 64- partition boards, 65- driven wheels, 66- driving wheels, 67- columns, 68- round blocks, 69- circular grooves, 70- tapped through holes.
Specific implementation mode
The present invention is further illustrated with reference to the accompanying drawings and examples, but be not intended as to the present invention limit according to
According to.
Embodiment.A kind of reversible silicon single crystal rod cutter device is constituted as shown in Fig. 1 to 10, including fixed plate 1, fixed
1 middle part of plate slidably connects feed device 2, and multiple cylinder A3 are connected on feed device 2；The both sides of feed device 2 are respectively provided with
There is the movable plate A4 being slidably connected with fixed plate 1, the both ends of each movable plate A4 are both provided with tensioning wheel 5；Each tensioning wheel 5
On be rotatably connected on the fixing axle A6, each fixing axle A6 being slidably connected with movable plate A4 be respectively connected with and movable plate A4 slide
The threaded rod A7 of dynamic connection；Each one end threaded rod A7 is threaded with the nut 8 positioned at the sides movable plate A4, nut 8 with
The spring 9 being socketed on threaded rod A7 is connected between movable plate A4；It is led there are two being respectively provided in the middle part of each movable plate A4
To wheel 10, the fixing axle B11 being slidably connected with movable plate A4 is rotatably connected on each directive wheel 10；Each fixing axle B11
On be respectively connected with connecting rod A12, the one end connecting rod A12 is rotatably connected to the screw A13 being threadedly coupled with movable plate A4；It is described every
The sides a movable plate A4 are respectively connected with multiple cylinder B14 in fixed plate 1；The both ends of the feed device 2 are both provided with
Bobbins 15 is connected with diamond cutting secant 46 between two bobbins 15；Diamond cutting secant 46 and tensioning wheel 5 and directive wheel
10 are all connected with, and fixing axle C16 is respectively connected on each bobbins 15；It is socketed with and fixed plate 1 on each fixing axle C16
The bearing 17 being slidably connected is respectively connected with belt 18 on each fixing axle C16；One end of each belt 18 is respectively connected with rotating wheel
19, the motor A20 being slidably connected with fixed plate 1 is respectively connected on each rotating wheel 19；The both ends of the feed device 2 are respectively provided with
There are the mobile bar 21 being slidably connected with fixed plate 1, the both ends of each mobile bar 21 to be connect respectively with bearing 17 and motor A20；Often
21 middle part of a mobile bar is threaded with the one end threaded rod B22, each threaded rod B22 and is respectively connected with motor B23；The feeding
2 lower section of device is provided with conveyer belt 24, and motor C25 is connected on conveyer belt 24；It is connected with PLC controller in the fixed plate 1
26, the cylinder A3, cylinder B14, motor A20, motor B23 and motor C25 are electrically connected with PLC controller 26；It is described to send
2 lower section of material device is provided with the coolant liquid Universal pipe 53 being fixed in fixed plate 1.
The feed device 2 includes movable plate B27, and through-hole 28 is equipped in the middle part of movable plate B27；28 top of through-hole is provided with two
A clamping shoe 29 is respectively connected with cylinder C30 on each clamping shoe 29；The top end parts movable plate B27 both sides are respectively connected with riser
31, transverse slat 32 is connected between two risers 31；32 middle part of transverse slat slidably connects montant 33, and connection is engaged in 33 both sides of montant
There is gear 34, motor D35 is respectively connected on each gear 34；33 bottom end of the montant is connected with above clamping shoe 29
Dead ring 36,36 sidewall thread of dead ring are connected with multiple screw B37；The both sides of the bottom ends the movable plate B27 are both provided with
Sliding block A38 is corresponded in the fixed plate 1 and is equipped with sliding slot A39 at the position of sliding block A38；The cylinder C30 and motor D35 with
PLC controller 26 is electrically connected；It is corresponded in the fixed plate 1 and is equipped with fluting C47 at the position of feed device 2；The PLC controls
Device 26 can control the flexible of cylinder A3, cylinder B14 flexible, the rotation of motor A20, the rotation of motor B23, motor C25
Rotation, flexible and motor D35 the rotation of cylinder C30；It is corresponded on the movable plate A4 and is equipped with fluting at the position of fixing axle A6
The both sides A40, the fixing axle A6 are both provided with slide block B 41；The both sides fluting A40, which correspond to, is equipped with sliding slot at the position of slide block B 41
It is corresponded on B42, movable plate A4 and is equipped with trepanning at the position of threaded rod A7；The position of fixing axle B11 is corresponded on the movable plate A4
Place is equipped with fluting B43, and the both sides fixing axle B11 are both provided with sliding block C44；Fluting B43 both sides correspond to be equipped at the position of sliding block C44
It is corresponded on sliding slot C45, movable plate A4 and is equipped with threaded hole at the position of screw A13；The both sides of the bottom ends the movable plate A4 are all provided with
It is equipped with sliding block D48, is corresponded in fixed plate 1 and is equipped with sliding slot D49 at the position of sliding block D48；Movable plate A4 is corresponded in the fixed plate 1
Position at be equipped with fluting D50, correspond on the movable plate A4 and is equipped with half at the position of feed device 2 and slots A51；The fixation
It is corresponded on plate 1 and is equipped with half fluting B52 at the position of fixing axle B11；It is equipped with and opens at the position of corresponding shaft bearing 17 in the fixed plate 1
Slot E54,17 both sides of bearing are both provided with sliding block E55, and the both sides fluting E54, which correspond to, is equipped with sliding slot E56 at the position of sliding block E55；Institute
It states and is equipped with fluting F57 at the position for corresponding to motor A20 in fixed plate 1, the both sides motor A20 are both provided with sliding block F58, and slot F57
Both sides, which correspond to, is equipped with sliding slot F59 at the position of sliding block F58；It is connected with connecting rod B60 between the mobile bar 21 and bearing 17, moves
Also connecting rod B60 is connected between lever 21 and motor A20；21 both ends of mobile bar are both provided with sliding block G61, in fixed plate 1
It is equipped with sliding slot G62 at the position of corresponding sliding block G61；One end far from motor B23 on the threaded rod B22 is socketed with bearing 63,
The belt 18 is located at 63 top of bearing；It is corresponded in the mobile bar 21 and is equipped with tapped through hole 70 at the position of threaded rod B22；Institute
It states 24 both sides of conveyer belt and is both provided with partition board 64,24 both ends of conveyer belt are connected separately with driven wheel 65 and driving wheel 66, actively
Wheel 66 is connect with motor C25；Round block 68, the one end screw A13 are provided at the position that the connecting rod A12 is connect with screw A13
It is equipped with circular groove 69 at the position of corresponding round block 68；1 bottom end of the fixed plate is connected with multiple columns 67.
Operation principle：The PLC controller 26 is a kind of electronic system of digital operation, specially in industrial settings
Using and design, it using the memory that can program, be used for execute storage logical operation and sequential control, timing,
The instruction with operations such as arithmetical operations is counted, and various types of by the input (I) and output (O) interface, control of number or simulation
The mechanical equipment or production process of type；The diamond cutting secant 46 is the annular setting of head and the tail connection, tensioning wheel 5 and bobbins
15 are located at the inside of the annular, and directive wheel 10 is located at the outside of the annular；When original state, multiple gas for being connected on movable plate A4
Cylinder B14 is in contraction state, and two movable plate A4 are respectively positioned on one end far from feed device 2 in its travel paths, movable plate A4
On tensioning wheel 5 and directive wheel 10 also be located at one end far from feed device 2 in its travel paths；Connect on the feed device 2
The cylinder A3 connect is also at contraction state, and the cylinder C30 on the feed device 2 is in contraction state；The mobile bar 21
In, close to one end of feed device 2, bobbins 15 also is located in its travel paths close to the one of feed device 2 on threaded rod B22
End；And diamond cutting secant 46 is in the state that the wheel 5 that is tensioned, directive wheel 10 and bobbins 15 are tensioned.
When work, it would be desirable to which the one end for cut into the silicon single crystal rod of silicon chip is passed through from the through-hole 28 of movable plate B27
Rear enclosure enters in dead ring 36, then tightens screw B37, and silicon single crystal rod is made to be fixed in dead ring 36, and silicon single crystal rod court
Under one end be then located in the plane where diamond cutting secant 46 and the height certain less than the plane, this is highly from monocrystalline
The thickness of the silicon chip cut down on silicon rod；Then coolant liquid is accessed into one end of coolant liquid Universal pipe 53, then opens this
The power supply of invention, PLC controller 26 control two motor A20 according to the program of setting and rotate, and motor A20 drives corresponding turn
Driving wheel 19 also rotates, and rotating wheel 19 drives fixing axle C16 to be rotated on bearing 17 by belt 18 in turn, and fixing axle C16 is in turn
Corresponding bobbins 15 is driven to rotate, the diamond cutting secant 46 that two bobbins 15 drive its disposed thereon after rotating also turns
It is dynamic, and diamond cutting secant 46 is also wound on multiple tensioning wheels 5 and directive wheel 10, and tensioning wheel 5 and directive wheel 10 with it is corresponding
Fixing axle A6 and fixing axle B11 rotation connections, diamond cutting secant 46 is in turn on bobbins 15, tensioning wheel 5 and directive wheel 10
Rotation, while PLC controller 26 controls motor C25 rotations, motor C25 drives driving wheel 66 to rotate, and the drive of driving wheel 66 is located at
24 partial turn of conveyer belt thereon, and conveyer belt 24 is wound between driven wheel 65 and driving wheel 66, conveyer belt 24 in turn can
It is rotated on driven wheel 65 and driving wheel 66；PLC controller 26 controls again stretches positioned at the cylinder C30 of the silicon single crystal rod on both sides of the middle
Long, cylinder C30 drives two clamping shoes 29 close to silicon single crystal rod, after cylinder C30 is elongated to maximum travel limit, two
Clamping shoe 29 clamps silicon single crystal rod.
Then PLC controller 26 controls each cylinder B14 elongations, two movable plate A4 of multiple cylinder B14 and then promotion again
It is moved to 2 side of feed device, movable plate A4 drives corresponding fixing axle A6 and fixing axle B11 to feed device 2 one in turn
Side is moved, and corresponding tensioning wheel 5 and directive wheel 10 are also moved to 2 side of feed device；Cylinder B14 PLC while elongation are controlled
Device 26 processed also controls motor B23 rotations, motor B23 and then the B22 rotations of drive threaded rod, the corresponding movement of threaded rod B22 drives
Bar 21 is moved to the side far from feed device 2, and the sliding block G61 at 21 both ends of mobile bar is then slided on sliding slot G62, mobile bar 21
It is then also moved to the side far from feed device 2 with dynamic bearing 17 and motor A20 by connecting rod B60, the cunning of 17 both sides of bearing
Block E55 is slided along sliding slot E56, and the sliding block F58 of the both sides motor A20 is slided along sliding slot F59, and bearing 17 and motor A20 are in turn
Fixing axle C16 and rotating wheel 19 is driven also to be moved to the side far from feed device 2, the bobbins 15 connected on fixing axle C16
Also it is moved to the side far from feed device 2.
To after far from the movement of 2 side of feed device, diamond cutting secant 46 is wound on bobbins 15 two bobbins 15
Part is also moved to far from the silicon single crystal rod side on feed device 2, and the tensioning wheel 5 and directive wheel 10 per side are sent to close
It is located at the part below movable plate A4 after expecting the movement of 2 side of device, on diamond cutting secant 46 then on feed device 2
It moves silicon single crystal rod side；It is located at the part of tensioning wheel 5 and directive wheel 10 on diamond cutting secant 46 then with movable plate A4
Movement and close to silicon single crystal rod in moving process, silicon single crystal rod is slowly carried out cutter by the part of diamond cutting secant 46
Make, after the piston rod on the cylinder B14 on the movable plate A4 of silicon single crystal rod both sides is elongated to maximum length, diamond cut
On line 46 positioned at the part of tensioning wheel 5 and directive wheel 10 also in moving process by two of close feed device 2 on silicon single crystal rod
Certain depth is cut into side section, at this time the moving and be moved to remote on threaded rod B22 also with motor B23 of mobile bar 21
One end from feed device 2, then PLC controller 26 control motor B23 stop operating, mobile bar 21 also therewith stop movement,
And bobbins 15 is moved through with directive wheel 10 to close to 2 side of feed device to far from the movement of 2 side of feed device and tensioning wheel 5
Cheng Zhong, diamond cutting secant 46 are in the state that the wheel 5 that is tensioned, directive wheel 10 and bobbins 15 are tensioned always；Movable plate A4 exists
When in the elongation process of cylinder B14 close to feed device 2, the width of half fluting A51 on movable plate A4 is more than feed device 2
Width, thus movable plate A4 can continue to drive the gold being located at below movable plate A4 by half fluting A51 avoids feed device 2
46 part of hard rock cutting line is close to silicon single crystal rod；And the width that middle part is not cut down by diamond cutting secant 46 on silicon single crystal rod
It is then the distance between 46 part of diamond cutting secant being now placed in below the movable plate A4 of both sides.
Then PLC controller 26 controls cylinder A3 elongations again, and cylinder A3 drives feed device 2 to be moved to side, feeding dress
It sets the movable plate B27 on 2 then to move on sliding slot A39 by sliding block A38, feed device 2 drives the silicon single crystal rod being clipped in thereon
Also it is moved to side, and by the diamond cut below the movable plate A4 of side during silicon single crystal rod is moved to side
46 part of line is cut, and until cylinder A3 is elongated to maximum travel limit, and the range is more than on silicon single crystal rod before this not by Buddha's warrior attendant
The width that stone cutting line 46 is cut down, thus by the movement of diamond cutting secant 46 and feed device 2 on the silicon single crystal rod
Movement cooperation under and be cut a piece of silicon chip, the silicon chip being cut then drop on the conveyer belt 24 of rotation and
Be transported to the present invention outside collect, diamond cutting secant 46 it is two-way to silicon single crystal rod carry out cutting improve cutting speed
Degree, efficiency are higher；Then PLC controller 26 controls cylinder A3 and shrinks again, and cylinder A3 drives feed device 2 and monocrystalline silicon thereon
Stick is returned to original position, and PLC controller 26 also controls cylinder B14 and shrinks, and cylinder B14 drives corresponding movable plate A4 and movable plate A4
On tensioning wheel 5 and directive wheel 10 be returned to original position, tensioning wheel 5 and directive wheel 10 and moved to the side far from feed device 2, gas
PLC controller 26 also control motor B23 and rotates backward while cylinder B14 is shunk, motor B23 so that by the drive of mobile bar 21 around
Silk cylinder 15 is restored to initial position, and bobbins 15 is moved to close to the side of feed device 2, and is wound on tensioning wheel 5, directive wheel 10
It is also in tensioning state always with the diamond cutting secant 46 on bobbins 15, the diamond cutting secant being located at below movable plate A4
It is moved to the side far from silicon single crystal rod 46 parts.
When needing to cutting a silicon chip on silicon single crystal rod again, PLC controller 26 controls the silicon single crystal rod on both sides of the middle
Cylinder C30 shrink, two clamping shoes 29 and then separated with silicon single crystal rod, PLC controller 26 control again motor D35 rotate it is small
Angle, motor D35 drives corresponding gear 34 also to rotate small angle, and the rotation of two gears 34 direction on the contrary, and
The rotation of two gears 34 can make montant 33 move down small distance, montant 33 and then drive dead ring 36 and dead ring
Silicon single crystal rod on 36 moves down small distance, which as needs the silicon cut down from silicon single crystal rod
The thickness of piece, then PLC controller 26 control motor D35 stop operating, silicon single crystal rod stopping move down, PLC controller 26
Cylinder C30 elongations are controlled again, and cylinder C30 is clamped silicon single crystal rod by clamping shoe 29, then repeats above-mentioned work step i.e.
It can.
It is separate when nut 8 to be threaded towards after the nut 8 by turning the one end threaded rod A7 when adjusting the position of tensioning wheel 5
When 2 side of feed device, spring 9 pushes nut 8 to side far from feed device 2, and threaded rod A7 is also corresponded in movable plate A4
Through-hole in moved to far from 2 side of feed device, the slide block Bs 41 of the both sides fixing axle A6 is then filled along sliding slot B42 to far from feeding
It sets the movement of 2 sides, fixing axle A6 and then drive tensioning wheel 5 to move to separate 2 side of feed device, while turning screw A13 again,
Screw A13 is set also to be moved to far from 2 side of feed device in corresponding threaded hole on movable plate A4, and on connecting rod A12
The then rotation in the circular groove 69 of screw A13 of round block 68, screw A13 are fixed by being driven after the connecting rod A12 that is rotatablely connected with it
Axis B11 is also moved to far from 2 side of feed device, and the sliding block C44 of the both sides fixing axle B11 is then moved along sliding slot C45, fixing axle
B11 drives directive wheel 10 to be moved to far from 2 side of feed device in turn, makes tensioning wheel 5 and directive wheel 10 to far from feeding dress
After setting the movement of 2 sides, diamond cutting secant 46 can be tensioned to stronger degree, the present invention can also be made to be suitable for week
Long longer diamond cutting secant 46；Conversely, when reversely turning nut 8 and screw A13, keep tensioning wheel 5 and directive wheel 10 equal
To after the movement of 2 side of feed device, the present invention is applicable to the shorter diamond cutting secant 46 of perimeter, and then improves
The scope of application of the present invention.
Claims (8)
1. a kind of reversible silicon single crystal rod cutter device, it is characterised in that：Including fixed plate (1), the sliding of fixed plate (1) middle part connects
It is connected to feed device (2), multiple cylinder A (3) are connected on feed device (2)；The both sides of feed device (2) are both provided with and consolidate
The both ends of the movable plate A (4) that fixed board (1) is slidably connected, each movable plate A (4) are both provided with tensioning wheel (5)；Each tensioning
It is rotatably connected to the fixing axle A (6) being slidably connected with movable plate A (4) on wheel (5), is respectively connected on each fixing axle A (6)
The threaded rod A (7) being slidably connected with movable plate A (4)；Each threaded rod A (7) one end is threaded with positioned at movable plate A (4)
The nut (8) of side is connected with the spring (9) being socketed on threaded rod A (7) between nut (8) and movable plate A (4)；It is described every
It is respectively provided in the middle part of a movable plate A (4) there are two directive wheel (10), is rotatably connected to and movable plate A on each directive wheel (10)
(4) the fixing axle B (11) being slidably connected；It is respectively connected with connecting rod A (12), connecting rod A (12) one end on each fixing axle B (11)
It is rotatably connected to the screw A (13) being threadedly coupled with movable plate A (4)；Each movable plate A (4) side is respectively connected with multiple
Cylinder B (14) in fixed plate (1)；The both ends of the feed device (2) are both provided with bobbins (15), two bobbins
(15) diamond cutting secant (46) is connected between；Diamond cutting secant (46) is all connected with tensioning wheel (5) and directive wheel (10),
It is respectively connected with fixing axle C (16) on each bobbins (15)；It is socketed with and fixed plate (1) on each fixing axle C (16)
The bearing (17) being slidably connected is respectively connected with belt (18) on each fixing axle C (16)；One end of each belt (18) is all connected with
There is rotating wheel (19), the motor A (20) being slidably connected with fixed plate (1) is respectively connected on each rotating wheel (19)；The feeding
The both ends of device (2) are both provided with the mobile bar (21) being slidably connected with fixed plate (1), the both ends difference of each mobile bar (21)
It is connect with bearing (17) and motor A (20)；It is threaded with threaded rod B (22), each screw thread in the middle part of each mobile bar (21)
Bar B (22) one end is respectively connected with motor B (23)；Conveyer belt (24) is provided with below the feed device (2), on conveyer belt (24)
It is connected with motor C (25)；PLC controller (26), the cylinder A (3), cylinder B (14), electricity are connected on the fixed plate (1)
Machine A (20), motor B (23) and motor C (25) are electrically connected with PLC controller (26)；Setting below the feed device (2)
There is the coolant liquid Universal pipe (53) being fixed in fixed plate (1).
2. a kind of reversible silicon single crystal rod cutter device according to claim 1, it is characterised in that：The feed device
(2) include (27) movable plate B, through-hole (28) is equipped in the middle part of movable plate B (27)；There are two clamping shoes for setting above through-hole (28)
(29), it is respectively connected with cylinder C (30) on each clamping shoe (29)；Movable plate B (27) the top end part both sides are respectively connected with riser
(31), it is connected with transverse slat (32) between two risers (31)；Montant (33), montant (33) two are slidably connected in the middle part of transverse slat (32)
Side, which is engaged, is connected with gear (34), and motor D (35) is respectively connected on each gear (34)；Montant (33) the bottom end connection
There are the dead ring (36) above clamping shoe (29), dead ring (36) sidewall thread to be connected with multiple screw B (37)；The shifting
The both sides of movable plate B (27) bottom end are both provided with sliding block A (38), correspond on the fixed plate (1) and are set at the position of (38) sliding block A
There is sliding slot A (39)；The cylinder C (30) and motor D (35) are electrically connected with PLC controller (26)；On the fixed plate (1)
It is equipped with fluting C (47) at the position of corresponding feed device (2).
3. a kind of reversible silicon single crystal rod cutter device according to claim 2, it is characterised in that：The PLC controller
(26) the flexible of cylinder A (3), the flexible of cylinder B (14), the rotation of motor A (20), the rotating of motor B (23), electricity can be controlled
The rotation of machine C (25), flexible and motor D (35) the rotation of cylinder C (30).
4. a kind of reversible silicon single crystal rod cutter device according to claim 1, it is characterised in that：The movable plate A (4)
Fluting A (40) is equipped at the position of upper corresponding fixing axle A (6), fixing axle A (6) both sides are both provided with slide block B (41)；It opens
Slot A (40) both sides correspond to and are equipped with sliding slot B (42) at the position of slide block B (41), and the position of (7) threaded rod A is corresponded on movable plate A (4)
It sets place and is equipped with trepanning；It is corresponded on the movable plate A (4) and is equipped with fluting B (43), fixing axle B (11) at the position of (11) fixing axle B
Both sides are both provided with sliding block C (44)；Fluting B (43) both sides, which correspond to, is equipped with sliding slot C (45), movable plate A at the position of (44) sliding block C
(4) it is corresponded on and is equipped with threaded hole at the position of (13) screw A；The both sides of movable plate A (4) bottom end are both provided with sliding block D
(48), it is corresponded in fixed plate (1) and is equipped with sliding slot D (49) at the position of (48) sliding block D；Movable plate A is corresponded on the fixed plate (1)
(4) it is equipped with fluting D (50) at position, is corresponded on the movable plate A (4) and is equipped with half fluting A at the position of feed device (2)
(51)；It is corresponded on the fixed plate (1) and is equipped with half fluting B (52) at the position of (11) fixing axle B.
5. a kind of reversible silicon single crystal rod cutter device according to claim 1, it is characterised in that：The fixed plate (1)
Fluting E (54) is equipped at the position of upper corresponding shaft bearing (17), bearing (17) both sides are both provided with sliding block E (55), and slot E (54) two
Side, which corresponds to, is equipped with sliding slot E (56) at the position of (55) sliding block E；It corresponds on the fixed plate (1) and is equipped at the position of (20) motor A
Slot F (57), and motor A (20) both sides are both provided with sliding block F (58), and fluting F (57) both sides correspond to be set at the positions of (58) sliding block F
There is sliding slot F (59)；Connecting rod B (60), mobile bar (21) and motor A are connected between the mobile bar (21) and bearing (17)
(20) connecting rod B (60) is also connected between；Mobile bar (21) both ends are both provided with sliding block G (61), are corresponded in fixed plate (1)
Sliding slot G (62) is equipped at the position of sliding block G (61)；One end far from motor B (23) is socketed with bearing on the threaded rod B (22)
(63), the belt (18) is located above bearing (63)；It corresponds on the mobile bar (21) and is equipped at the position of (22) threaded rod B
Tapped through hole (70).
6. a kind of reversible silicon single crystal rod cutter device according to claim 1, it is characterised in that：The conveyer belt (24)
Both sides are both provided with partition board (64), and conveyer belt (24) both ends are connected separately with driven wheel (65) and driving wheel (66), driving wheel
(66) it is connect with motor C (25).
7. a kind of reversible silicon single crystal rod cutter device according to claim 1, it is characterised in that：The connecting rod A
(12) it is provided with round block (68) at the position being connect with screw A (13), screw A (13) one end corresponds to be set at the positions of round block (68)
There is circular groove (69).
8. a kind of reversible silicon single crystal rod cutter device according to any claim in claim 1 to 7, feature exist
In：Fixed plate (1) bottom end is connected with multiple columns (67).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810919031.5A CN108724501B (en) | 2018-08-14 | 2018-08-14 | Bidirectional single crystal silicon rod cutting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810919031.5A CN108724501B (en) | 2018-08-14 | 2018-08-14 | Bidirectional single crystal silicon rod cutting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108724501A true CN108724501A (en) | 2018-11-02 |
| CN108724501B CN108724501B (en) | 2020-05-05 |
Family
ID=63942711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810919031.5A Expired - Fee Related CN108724501B (en) | 2018-08-14 | 2018-08-14 | Bidirectional single crystal silicon rod cutting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108724501B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204867702U (en) * | 2015-06-25 | 2015-12-16 | 安徽省振泉数控科技有限公司 | Wire cut electrical discharge machining bed cutting wire's overspeed device tensioner |
| CN207256597U (en) * | 2017-10-14 | 2018-04-20 | 昆山进荣中川五金有限公司 | A kind of guide pulley for multi-wire saw |
| CN108326201A (en) * | 2017-11-14 | 2018-07-27 | 惠安县威科电子科技有限公司 | A kind of copper wire cutting equipment with propulsion functions |
| CN209273723U (en) * | 2018-08-14 | 2019-08-20 | 浙江贝盛新材料科技有限公司 | Reversible silicon single crystal rod cutter device |
-
2018
- 2018-08-14 CN CN201810919031.5A patent/CN108724501B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204867702U (en) * | 2015-06-25 | 2015-12-16 | 安徽省振泉数控科技有限公司 | Wire cut electrical discharge machining bed cutting wire's overspeed device tensioner |
| CN207256597U (en) * | 2017-10-14 | 2018-04-20 | 昆山进荣中川五金有限公司 | A kind of guide pulley for multi-wire saw |
| CN108326201A (en) * | 2017-11-14 | 2018-07-27 | 惠安县威科电子科技有限公司 | A kind of copper wire cutting equipment with propulsion functions |
| CN209273723U (en) * | 2018-08-14 | 2019-08-20 | 浙江贝盛新材料科技有限公司 | Reversible silicon single crystal rod cutter device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108724501B (en) | 2020-05-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108724500A (en) | A kind of silicon single crystal rod cutting machine that the scope of application is wider | |
| CN207482729U (en) | A kind of conveyer belt with positioning function | |
| CN109731736A (en) | Coating machine | |
| CN206484546U (en) | A kind of manipulator lateral adjustment device | |
| CN209035506U (en) | A kind of planer drilling machine with more drill bit mounting structures | |
| CN108995062A (en) | It is a kind of to adjust more conveniently silicon single crystal rod cutter device | |
| CN209273723U (en) | Reversible silicon single crystal rod cutter device | |
| CN102303244A (en) | Drilling equipment | |
| CN108724501A (en) | A kind of reversible silicon single crystal rod cutter device | |
| CN202283664U (en) | Drilling equipment | |
| CN104174738A (en) | Bridge rack forming machine | |
| CN106736800A (en) | A kind of method that utilization hydraulic cylinder and gear realize double-speed Mobile Slide | |
| CN203356505U (en) | Wall penetrating bolt automatic feeder | |
| CN206065424U (en) | A kind of Horizontal type cart spends machine knife header structure | |
| CN209440559U (en) | A kind of silicon single crystal rod cutting machine | |
| CN107398576A (en) | A kind of vertical multi-shaft drilling machine of adjustable spacing | |
| CN206343699U (en) | A kind of transmitting device of pipe cutting machine | |
| CN207343826U (en) | A kind of vertical multi-shaft drilling machine of adjustable spacing | |
| CN203529333U (en) | Device capable of quickly adjusting material transmission passageways | |
| CN206798497U (en) | Double-deck feeder | |
| CN208544802U (en) | A kind of novel adjustment rack | |
| CN204748027U (en) | Character bending machine | |
| CN201647594U (en) | Magnetic tile feeding device | |
| CN103466273B (en) | A kind of feeder | |
| CN103754567B (en) | A kind of conveyer line with guide rail |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200505 Termination date: 20210814 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |