CN108709506A - A kind of method using in optic fiber displacement sensor probe and optic fiber displacement sensor system - Google Patents
A kind of method using in optic fiber displacement sensor probe and optic fiber displacement sensor system Download PDFInfo
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- CN108709506A CN108709506A CN201810860678.5A CN201810860678A CN108709506A CN 108709506 A CN108709506 A CN 108709506A CN 201810860678 A CN201810860678 A CN 201810860678A CN 108709506 A CN108709506 A CN 108709506A
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- 238000006073 displacement reaction Methods 0.000 title claims abstract description 91
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- 230000001939 inductive effect Effects 0.000 abstract description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention discloses a kind of method using in optic fiber displacement sensor probe and optic fiber displacement sensor systems, method using in optic fiber displacement sensor probe includes a beam splitter, positioned at the first GRIN Lens of beam splitter incident side, positioned at the speculum of the first light emission side of beam splitter, the beam-expanding collimation lens positioned at the second light emission side of beam splitter and the second GRIN Lens on the reflecting light path of the beam-splitting surface of beam splitter.The optic fiber displacement sensor system includes wide spectrum light source, frequency sweep microwave signal source, electrooptic modulator, microwave power distributor, method using in optic fiber displacement sensor probe, photodetector, frequency mixer, data acquisition circuit and computer.The present invention uses method using in optic fiber displacement sensor probe for displacement inductive probe, and the displacement measurement sensitivity of whole system may depend on the frequency degree of regulation in frequency sweep microwave signal source used in system.The present invention can be adjusted systematic survey sensitivity in real time, improve displacement measurement accuracy.
Description
Technical field
The present invention relates to displacement measurement technology fields, are passed more particularly to a kind of method using in optic fiber displacement sensor probe and fiber optics displacement
Sensing system.
Background technology
Optical fibre displacement sensor mainly has fiber grating, the sensing of the types such as Fabry-perot optical fiber and Fiber-M-Z interferometer at present
Device.These displacement sensors are also all to realize the demodulation of displacement, Optical Demodulation method tool with common Optical Demodulation method
The shortcomings of having the features such as precision is high, but that there is also measurement ranges is small, being easy to be interfered by environmental factor.Optical fibre displacement sensor at present
Mainly there are Fabry-perot optical fiber, the sensor of the types such as fiber grating and optical fiber fluorescence.Based on the above-mentioned of existing fiber displacement sensor
Defect, it is urgent to provide a kind of method using in optic fiber displacement sensor equipment that can improve displacement measurement accuracy by those skilled in the art.
Invention content
The object of the present invention is to provide a kind of method using in optic fiber displacement sensor probe and optic fiber displacement sensor systems, to improve displacement survey
Accuracy of measurement.
To achieve the above object, the present invention provides a kind of method using in optic fiber displacement sensor probe, including a beam splitter, be located at it is described
First GRIN Lens of beam splitter incident side, positioned at the speculum of the first light emission side of the beam splitter, be located at the beam splitter
The beam-expanding collimation lens of second light emission side and the second self-focusing on the reflecting light path of the beam-splitting surface of the beam splitter
Lens;
The beam-expanding collimation lens enter positioned at the reflection of the beam-splitting surface on light path simultaneously, and the beam-expanding collimation lens are used
In the second beam light of the outgoing beam splitter, and the second beam light is radiated on tested motive objects, while received described in warp
The reflected beams of tested motive objects, and the reflected beams are focused into the beam-splitting surface, it is reflexed to by the beam-splitting surface described
Second GRIN Lens.
Optionally, the method using in optic fiber displacement sensor probe further includes babinet, and the babinet is equipped with fixed first autohemagglutination
The of the first through hole of focus lens, the second through-hole of fixed second GRIN Lens, and the fixed beam-expanding collimation lens
Three through-holes.
Optionally, the beam splitter is set to the box house, and the speculum is set at the top of the beam splitter, and described the
Two GRIN Lens are set to the beam splitter bottom.
Optionally, the beam-expanding collimation lens are convex lens.
The present invention also provides a kind of optic fiber displacement sensor systems, the system comprises wide spectrum light source, in the propagation side of light
Electrooptic modulator, above-mentioned method using in optic fiber displacement sensor probe, photodetector, frequency mixer, the data acquisition electricity set gradually upwards
Road and computer;And swept signal source, the microwave power distributor that is connect with the swept signal source, with the microwave power distributor
The microwave phase shifter of second output terminal connection, the output end of the microwave phase shifter connect the local oscillator input terminal of the frequency mixer,
Second microwave signal is inputted into the frequency mixer;
The first light emission side alignment of the method using in optic fiber displacement sensor probe is tested motive objects, the method using in optic fiber displacement sensor probe
The light inlet of the photodetector is accessed in the reflecting light path of beam-splitting surface;
First output end of the microwave power distributor is connect with the rf inputs of the electrooptic modulator, the electric light tune
The first microwave signal that the microwave power distributor exports is modulated on light by device processed forms light load microwave signal, and the light carries micro-
Wave signal forms the different light of two-way optical path difference after method using in optic fiber displacement sensor probe and carries microwave signal, the two-way optical path difference
Different light carries the rf inputs that microwave signal is input to the frequency mixer after the photodetector, and the frequency mixer will
It is low-pass filtered that the different light of the two-way optical path difference carries the intermediate-freuqncy signal after microwave signal is mixed with second microwave signal
The filtered direct current signal of device is input to the data acquisition circuit, and the data acquisition circuit is by the direct current signal difference width
Frequency at value is input to the computer and is calculated, and obtains the displacement of tested motive objects.
Optionally, the electrooptic modulator is connected with modulator control circuit, and the modulator control circuit is used for institute
The working point control of electrooptic modulator is stated in output orthogonal points.
Optionally, the optic fiber displacement sensor system further includes low noise amplifier, and the low noise amplifier is set to the light
Between electric explorer and the frequency mixer.
Optionally, the optic fiber displacement sensor system further includes low-pass filter, and the low-pass filter is set to described mixed
Between frequency device and the data acquisition circuit.
According to specific embodiment provided by the invention, the invention discloses following technique effects:Optical fiber disclosed by the invention
Displacement sensing is popped one's head in and optic fiber displacement sensor system uses method using in optic fiber displacement sensor probe for displacement inductive probe, the position of whole system
Shift measurement sensitivity may depend on the frequency degree of regulation and method using in optic fiber displacement sensor probe in frequency sweep microwave signal source used in system
The length of side of middle beam splitter.The present invention can be adjusted systematic survey sensitivity in real time.
Description of the drawings
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the present invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the method using in optic fiber displacement sensor sonde configuration schematic diagram that the embodiment of the present invention 1 provides;
Fig. 2 is the optic fiber displacement sensor system structural schematic diagram that the embodiment of the present invention 2 provides.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, below in conjunction with the accompanying drawings and specific real
Applying mode, the present invention is described in further detail.
Embodiment 1:
As shown in Figure 1, the method using in optic fiber displacement sensor probe that the present embodiment 1 provides includes a beam splitter 302, is located at the beam splitting
First GRIN Lens 301 of 302 incident side of device, positioned at the speculum 303 of 302 first light emission side of the beam splitter, be located at institute
It states the beam-expanding collimation lens 304 of beam splitter 302 second light emission side and reflects light path positioned at the beam-splitting surface of the beam splitter 302
The second GRIN Lens 305 on diameter;
The beam-expanding collimation lens 304 enter positioned at the reflection of the beam-splitting surface on light path simultaneously, and the beam-expanding collimation is saturating
Mirror 304 is used to be emitted the second beam light of the beam splitter 302, and the second beam light is radiated on tested motive objects, simultaneously
The reflected beams through the tested motive objects are received, and the reflected beams are focused into the beam-splitting surface, by the beam-splitting surface
Reflex to second GRIN Lens 305.
In the present embodiment, as shown in Figure 1, method using in optic fiber displacement sensor probe further includes babinet 306, the babinet is equipped with
The first through hole 307 of fixed first GRIN Lens 301, the second through-hole of fixed second GRIN Lens 305
308, and fix the third through-hole 309 of the beam-expanding collimation lens 304.Beam splitter 302 described in Fig. 1 is set to the babinet 306
Inside, the speculum 303 are set to 302 top of the beam splitter, and second GRIN Lens 305 is set to the beam splitter
302 bottoms.It should be noted that the beam-expanding collimation lens 304 in the present embodiment are convex lens.
The light popped one's head in into method using in optic fiber displacement sensor is incident on by the first GRIN Lens 301 on beam splitter 302, the beam splitter
Incident light is divided into two-way light, light beam enters the second GRIN Lens after the speculum 303 on beam splitter 302 reflects
In 305, the second beam light is irradiated to the surface of tested motive objects after beam-expanding collimation lens 304 and is irradiated again through the surface reflection
It is reflected into the second GRIN Lens 305 to beam-expanding collimation lens 304 and by the beam-splitting surface of beam splitter 302, is moved when tested
When animal is subjected to displacement, the optical path difference between the two-way reflected light that the second GRIN Lens 305 is collected into will change, therefore
The measurement for changing the displacement to realize tested motive objects of the interference signal between microwave signal can be carried by analyzing two light.
Embodiment 2:
As shown in Fig. 2, the optic fiber displacement sensor system that the present embodiment 2 provides includes wide spectrum light source 101, in the propagation side of light
Electrooptic modulator 103, above-mentioned method using in optic fiber displacement sensor probe 104, photodetector 106, the frequency mixer set gradually upwards
202, data acquisition circuit 204 and computer 205;And swept signal source 108, connect with the swept signal source 108 it is micro-
Wave power splitter 109, the microwave phase shifter 201 being connect with the second output terminal of the microwave power distributor 109, the microwave phase shifter
201 output end connects the local oscillator input terminal of the frequency mixer 202, and second microwave signal is inputted the frequency mixer 202;
The first light emission side alignment of the method using in optic fiber displacement sensor probe 104 is tested motive objects 105, the method using in optic fiber displacement sensor
The light inlet of the photodetector 106 is accessed in the reflecting light path of the beam-splitting surface of probe 104;
First output end of the microwave power distributor 109 is connect with the rf inputs of the electrooptic modulator 103, described
The first microwave signal that the microwave power distributor 109 exports is modulated on light by electrooptic modulator 103 forms light load microwave letter
Number, the light carries microwave signal and forms the different light load microwave letter of two-way optical path difference after method using in optic fiber displacement sensor probe 104
Number, the different light of the two-way optical path difference carries microwave signal and is input to the frequency mixer 202 after the photodetector 106
The different light of the two-way optical path difference is carried microwave signal and second microwave signal by rf inputs, the frequency mixer 202
The filtered direct current signal of the low-pass filtered device of intermediate-freuqncy signal after mixing is input to the data acquisition circuit 204, described
Frequency at the direct current signal difference amplitude is input to the computer 205 and calculated by data acquisition circuit 204, is obtained
The displacement of tested motive objects 105.
Specifically, the swept signal source 108 when adjusted per secondary frequencies, sends trigger signal acquires electricity to data
Road 204 carries out direct current signal acquisition with trigger data acquisition circuit 204, while frequency values when scanning are transmitted to the calculating
In machine 205, including the direct current signal of optical path difference information is transmitted in the computer 205, computer 205 is according to microwave signal source
The frequency values and direct current output under the frequency values for exporting microwave signal obtain the displacement of object under test.
When the specifically used optic fiber displacement sensor system, the electrooptic modulator 103 is also associated with modulator control circuit
102, the modulator control circuit 102 is used for the working point control of the electrooptic modulator 103 in output orthogonal points.
As an alternative embodiment, the optic fiber displacement sensor system further includes low noise amplifier 107, it is described low
Amplifier 107 of making an uproar is set between the photodetector 106 and the frequency mixer 202, and the low noise amplifier 107 is for handling
Microwave signal is carried by the different light of the two-way optical path difference of photodetector.The optic fiber displacement sensor system further includes low pass filtered
Wave device 203, the low-pass filter 203 are set between the frequency mixer 202 and the data acquisition circuit 204, the low pass
Filter 203 is used to handle the intermediate-freuqncy signal of the frequency mixer output.
The operation principle of this optic fiber displacement sensor system is as follows:
The linearly polarized light that wide spectrum light source 101 exports enters method using in optic fiber displacement sensor probe 104 after being incident on electrooptic modulator 103
In.Light into method using in optic fiber displacement sensor probe 104 is incident on by the first GRIN Lens 301 on beam splitter 302, which will
Incident light is divided into two-way light, and light beam enters the second GRIN Lens 305 after the speculum 303 on beam splitter 302 reflects
In, the second beam light is irradiated to the surface of tested motive objects after beam-expanding collimation lens 304 and is irradiated to again through the surface reflection
Beam-expanding collimation lens 304 are simultaneously reflected by the beam-splitting surface of beam splitter 302 in the second GRIN Lens 305, by the second autohemagglutination
Focus lens 305 collect two-way reflected light enter in photodetector 106, electrooptic modulator 103 by its control circuit 102 come
The control for realizing operating point, the needs of electrooptic modulator 103 are operated at output orthogonal points in this system.Frequency sweep microwave signal source
The microwave signal of 108 outputs is divided into the first microwave signal and the second microwave signal, the first microwave signal through 109 work(of microwave power distributor
Into the rf inputs of electrooptic modulator 103, the first microwave signal is modulated to and is incident to Electro-optical Modulation by electrooptic modulator 103
Light is generated in the area of light of linearly polarized light in device 103 and carries microwave signal, which carries microwave signal and visited by method using in optic fiber displacement sensor
It is carried after first 104 and is tested the displacement information of motive objects 105 and enters in photodetector 106, the photodetector 106 is by light
It carries microwave signal and becomes displacement microwave signal, which is amplified into frequency mixer 202 through low noise amplifier 107
Rf inputs;The second microwave signal that microwave power distributor 109 exports enters the sheet of frequency mixer 202 after microwave phase shifter 201
Shake input terminal, and the phase of the second microwave signal of local oscillator input terminal input is adjusted in microwave phase shifter 201;Frequency mixer 202 exports
The low-pass filtered device of intermediate-freuqncy signal 203 after enter in data acquisition circuit 204, the data of data acquisition circuit 204 pass through meter
Calculation machine 205 acquires to realize.When tested motive objects 105 are subjected to displacement, two-way reflected light that GRIN Lens 305 is collected into it
Between optical path difference will change, the present embodiment senses the variation of the optical path difference by way of microwave mixer, and utilizes mixing
Frequency spectrum afterwards calculates the displacement for being tested motive objects 105.
The displacement measurement principle of this sensor-based system is:
The microwave signal of frequency sweep microwave signal source output is represented by:
Vout(t)=Vcos2 π fmt (1)
Wherein V is the amplitude of microwave signal, fmFor the frequency of microwave signal.The microwave signal is loaded by electrooptic modulator
Onto light, the variation which generates the phase of the light transmitted in electrooptic modulator is:
Wherein VπFor the half-wave voltage of electrooptic modulator, VDCFor the DC offset voltage of electrooptic modulator.Wide spectrum light source
After electrooptic modulator is modulated, output intensity is represented by the light of laser output:
ξ is the loss of light path, I in above formula0For the light intensity of wide spectrum light source output, which passes by fiber optics displacement
It is divided into two-way light after sense probe, the light path of light is fixed all the way, and the light path of another way light is as object under test displacement d occurs
Variation and change in real time, can be expressed as:
Δ φ in formula1With Δ φ2The phase changing capacity that microwave signal generates after method using in optic fiber displacement sensor is popped one's head in is carried for light,
It is expressed as:
Δφ1=4 π fmnl1/c (6)
Δφ2=4 π fmn(d+l1)/c (7)
C is the light velocity in above formula, and n is optical fibre refractivity, l1For the half of the beam splitter length of side, d is object under test apart from beam splitting
The distance of the second light-emitting surface of device.Then the photoelectricity of high speed optoelectronic detection output flows through the voltage being converted to after load, which carries
Displacement information and the RF signal input end for entering frequency mixer, are represented by:
A is the conversion coefficient for becoming output voltage by light intensity in above formula.The another way local oscillation signal of signal source work(point enters
One phase shifter adjusts the phase shifter and so that the local oscillation signal is:
VLO=Bcos (2 π fm) (9)
B is the amplitude of local oscillation signal in above formula.Carry radiofrequency signal and the local oscillation signal of displacement information by frequency mixer into
Row mixing, the output of frequency mixer are represented by:
By above formula it can be seen that when measuring, change the frequency of signal source, the output of frequency mixer will appear to be changed with frequency
Periodic voltage signal, frequency interval between adjacent two minimum point of the cyclical signal or peak is a cycle,
Assuming that two adjacent minimum point frequencies are respectively f1And f2Then object under test is can be obtained by according to formula (10) apart from beam splitter second to go out
The distance of smooth surface is:
When object under test displacement changes, the frequency values of two troughs corresponding to the direct current of low-pass filter output
Also it changes, it is assumed that object under test is in position d1When the obtained difference on the frequency of two adjacent wave paddy of data collecting card be Δ f1, object
Its present position is d after being subjected to displacement2, the difference on the frequency for the two adjacent wave paddy that data collecting card obtains at this time is Δ f2, then object
Displacement is represented by
It can be seen that measured signal is unrelated with the amplitude of mixer-input signal, only with the frequency scanning precision of signal source
It is related, and the frequency accuracy of the two is all up 1Hz, this eliminates the need for traditional microwave mixer by input signal amplitude fluctuation to surveying
Measure the influence of result.Since the length of side of beam splitter is fixed, the absolute position of object under test can be obtained according to formula (12)
Shifting amount.
The workflow of this optic fiber displacement sensor system is as follows:
1, after the power is turned on, modulator control circuit is operated in linear work by procedure auto-control intensity type optical modulator
Point.After modulator operating point determines, the frequency of the arbitrary two adjacent waves paddy of the microwave signal of record data acquisition circuit output is simultaneously
Calculate difference on the frequency.
2, after the power is turned on, the modulator control circuit of electrooptic modulator passes through procedure auto-control intensity type electrooptic modulator work
Make in linear work point.After electrooptic modulator operating point determines, arbitrary the two of the microwave signal of record data acquisition circuit output
The frequency of adjacent trough simultaneously calculates difference on the frequency;
3, when motive objects to be measured are subjected to displacement, where the trough for the microwave signal that data acquisition circuit measures at this time
Frequency will change, and can be obtained according to formula (12) according to the corresponding frequency values of trough for currently measuring obtained microwave signal
To the shift value of object under test.
Each embodiment is described by the way of progressive in this specification, the highlights of each of the examples are with other
The difference of embodiment, just to refer each other for identical similar portion between each embodiment.
Principle and implementation of the present invention are described for specific case used herein, and above example is said
The bright method and its core concept for being merely used to help understand the present invention;Meanwhile for those of ordinary skill in the art, foundation
The thought of the present invention, there will be changes in the specific implementation manner and application range.In conclusion the content of the present specification is not
It is interpreted as limitation of the present invention.
Claims (7)
1. a kind of method using in optic fiber displacement sensor probe, which is characterized in that including a beam splitter, positioned at the first of the beam splitter incident side
GRIN Lens, positioned at the speculum of the first light emission side of the beam splitter, expand standard positioned at the second light emission side of the beam splitter
Straight lens and the second GRIN Lens on the reflecting light path of the beam-splitting surface of the beam splitter;
The beam-expanding collimation lens enter positioned at the reflection of the beam-splitting surface on light path simultaneously, and the beam-expanding collimation lens are used for out
The second beam light of the beam splitter is penetrated, and the second beam light is radiated on tested motive objects, while being received through described tested
The reflected beams of motive objects, and the reflected beams are focused into the beam-splitting surface, reflex to described second by the beam-splitting surface
GRIN Lens.
2. method using in optic fiber displacement sensor is popped one's head according to claim 1, which is characterized in that the method using in optic fiber displacement sensor, which is popped one's head in, further includes
Babinet, the babinet are equipped with the first through hole of fixed first GRIN Lens, fixed second GRIN Lens
Second through-hole, and fix the third through-hole of the beam-expanding collimation lens.
3. method using in optic fiber displacement sensor is popped one's head according to claim 2, which is characterized in that the beam splitter is set in the babinet
Portion, the speculum are set at the top of the beam splitter, and second GRIN Lens is set to the beam splitter bottom.
4. method using in optic fiber displacement sensor is popped one's head according to claim 1, which is characterized in that the beam-expanding collimation lens are convex lens.
5. a kind of optic fiber displacement sensor system, which is characterized in that the system comprises wide spectrum light source, in the direction of propagation of light according to
The electrooptic modulator of secondary setting, method using in optic fiber displacement sensor according to any one of claims 1-4 probe, photodetector, mixing
Device, data acquisition circuit and computer;And swept signal source, the microwave power distributor that is connect with the swept signal source, with institute
The microwave phase shifter of the second output terminal connection of microwave power distributor is stated, the output end of the microwave phase shifter connects the frequency mixer
Local oscillator input terminal, second microwave signal is inputted into the frequency mixer;
The first light emission side alignment of the method using in optic fiber displacement sensor probe is tested motive objects, the beam splitting of the method using in optic fiber displacement sensor probe
The light inlet of the photodetector is accessed in the reflecting light path in face;
First output end of the microwave power distributor is connect with the rf inputs of the electrooptic modulator, the electrooptic modulator
The first microwave signal that the microwave power distributor exports is modulated on light and forms light load microwave signal, the light carries microwave letter
Number the different light of two-way optical path difference is formed after method using in optic fiber displacement sensor probe carries microwave signal, and the two-way optical path difference is different
Light carry microwave signal and be input to the rf inputs of the frequency mixer after the photodetector, the frequency mixer will be described
The different light of two-way optical path difference carries the low-pass filtered device filter of the intermediate-freuqncy signal after microwave signal is mixed with second microwave signal
Direct current signal after wave is input to the data acquisition circuit, and the data acquisition circuit will be at the direct current signal difference amplitude
Frequency be input to the computer and calculated, obtain the displacement of tested motive objects.
6. optic fiber displacement sensor system according to claim 5, which is characterized in that the electrooptic modulator is connected with modulator
Control circuit, the modulator control circuit are used for the working point control of the electrooptic modulator in output orthogonal points.
7. optic fiber displacement sensor system according to claim 5, which is characterized in that the optic fiber displacement sensor system further includes
Low noise amplifier, the low noise amplifier are set between the photodetector and the frequency mixer.
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CN112129229A (en) * | 2020-09-04 | 2020-12-25 | 电子科技大学 | Quasi-distributed displacement measuring device and method based on photoelectric oscillator |
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CN208671919U (en) * | 2018-08-01 | 2019-03-29 | 天津博科光电科技有限公司 | A kind of method using in optic fiber displacement sensor probe and optic fiber displacement sensor system |
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CN112129229A (en) * | 2020-09-04 | 2020-12-25 | 电子科技大学 | Quasi-distributed displacement measuring device and method based on photoelectric oscillator |
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