CN108701542B

CN108701542B - Thin film capacitor

Info

Publication number: CN108701542B
Application number: CN201780014589.2A
Authority: CN
Inventors: 塚原太阳; 佐野正仁
Original assignee: Panasonic Intellectual Property Management Co Ltd
Current assignee: Panasonic Intellectual Property Management Co Ltd
Priority date: 2016-03-28
Filing date: 2017-03-21
Publication date: 2021-04-16
Anticipated expiration: 2037-03-21
Also published as: JPWO2017169955A1; WO2017169955A1; JP6941768B2; CN108701542A

Abstract

A film capacitor (100) is provided with: a dielectric thin film (111), a 1 st electrode (135), and a2 nd electrode (115). The 1 st electrode is arranged on one main surface (111a) side of the dielectric thin film and is composed of a conductive thin film. The 2 nd electrode is disposed at a position facing the 1 st electrode with a dielectric thin film interposed therebetween, and is composed of a conductive thin film. The dielectric thin film has a short direction (D1) and a long direction (D2). The 1 st electrode has: a 1 st connecting electrode (134) extending in the longitudinal direction, a 1 st counter electrode (132a) divided from the 1 st connecting electrode by a 1 st longitudinal slit (144) extending in the longitudinal direction, and a 1 st fuse (133 a). The 1 st fuse connects the 1 st connection electrode and the 1 st counter electrode by traversing the 1 st longitudinal slit. The 2 nd electrode has: a2 nd connecting electrode (114) extending in the longitudinal direction, and a2 nd counter electrode (112) connected to the 2 nd connecting electrode without a fuse.

Description

Thin film capacitor

Technical Field

The present disclosure relates to a thin film capacitor used for various electronic devices, electric machines, and industrial devices.

Background

A film capacitor is generally roughly classified into a capacitor using a metal foil for an electrode and a capacitor using a deposited metal provided on a dielectric film for an electrode. In a metallized film capacitor having electrodes formed by vapor deposition, the volume occupied by the electrodes is smaller than that of a capacitor using a metal foil, and the size and weight of the capacitor can be reduced. In a metallized film capacitor having an electrode formed of a deposited metal, when a short circuit occurs in an insulating defective portion, the deposited electrode around the defective portion is evaporated and scattered by the energy of the short circuit to be insulated, and the function of the capacitor is restored. Thus, the metalized film capacitor has high reliability against insulation breakdown, and has been widely used in the past.

In addition, a metallized thin film capacitor in which safety is further improved by providing a fuse function is also used.

As prior art literature information related to the present application, for example, patent document 1 is known.

Prior art documents

Patent document

Patent document 1: JP 2005-12082 publication

Disclosure of Invention

However, the conventional metallized film capacitor may generate heat at a location of dielectric breakdown, and may cause a failure of the entire circuit including the metallized film capacitor.

A thin film capacitor according to one aspect of the present disclosure includes: a dielectric film, a 1 st electrode and a2 nd electrode. The 1 st electrode is disposed on one main surface side of the dielectric thin film and is composed of a conductive thin film. The 2 nd electrode is disposed at a position facing the 1 st electrode with a dielectric thin film interposed therebetween, and is composed of a conductive thin film. Here, the dielectric thin film has a short direction and a long direction. The 1 st electrode has: the first connection electrode 1 extending in the longitudinal direction, and the first counter electrode 1 divided from the first connection electrode 1 by a first longitudinal slit extending in the longitudinal direction. The 1 st electrode has a 1 st fuse for connecting the 1 st connection electrode and the 1 st counter electrode by traversing the 1 st longitudinal slit. The 2 nd electrode has: a2 nd connecting electrode extending in the longitudinal direction, and a2 nd counter electrode connected to the 2 nd connecting electrode without a fuse.

The thin film capacitor according to one embodiment of the present disclosure suppresses heat generation at a location of dielectric breakdown, and has excellent safety and reliability.

Drawings

Fig. 1A is a cross-sectional view of a film capacitor according to embodiment 1.

Fig. 1B is a plan view of the 1 st metallized film constituting the film capacitor shown in fig. 1A.

Fig. 1C is a plan view of the 2 nd metallized film constituting the film capacitor shown in fig. 1A.

Fig. 2A is a plan view showing a state of capacitance formation of the thin film capacitor shown in fig. 1A.

Fig. 2B is an equivalent circuit diagram of the film capacitor shown in fig. 2A.

Fig. 3A is a plan view showing a state where insulation breakdown occurs in the thin film capacitor according to embodiment 1.

Fig. 3B is a cross-sectional view of the film capacitor shown in fig. 3A at line A3-A3.

Fig. 3C is an equivalent circuit diagram of the film capacitor shown in fig. 3A.

Fig. 4A is a plan view of the 1 st metalized film constituting the thin-film capacitor according to the modification of embodiment 1.

Fig. 4B is a plan view showing a state of capacitance formation of the thin-film capacitor according to the modification example of embodiment 1.

Fig. 5A is a cross-sectional view of the film capacitor according to embodiment 2.

Fig. 5B is a plan view of the 1 st metallized film constituting the film capacitor shown in fig. 5A.

Fig. 5C is a plan view of the 2 nd metallized film constituting the film capacitor shown in fig. 5A.

Fig. 6A is a plan view showing a state of capacitance formation of the thin film capacitor shown in fig. 5A.

Fig. 6B is an equivalent circuit diagram of the film capacitor shown in fig. 6A.

Fig. 7A is a plan view showing a state where insulation breakdown occurs in the thin film capacitor according to embodiment 2.

Fig. 7B is a sectional view of the film capacitor shown in fig. 7A at the line a6-a 6.

Fig. 7C is an equivalent circuit diagram of the film capacitor shown in fig. 7A.

Fig. 8A is a cross-sectional view of a film capacitor of a comparative example.

Fig. 8B is a plan view of the 1 st metallized film constituting the film capacitor shown in fig. 8A.

Fig. 8C is a plan view of the 2 nd metallized film constituting the film capacitor shown in fig. 8A.

Fig. 9A is a plan view showing a state of capacitance formation of the thin film capacitor shown in fig. 8A.

Fig. 9B is an equivalent circuit diagram of the film capacitor shown in fig. 9A.

Fig. 10A is a plan view showing a state in which insulation breakdown occurs in the film capacitor of the comparative example.

Fig. 10B is a sectional view of the film capacitor shown in fig. 10A at the line a9-a 9.

Fig. 10C is an equivalent circuit diagram of the film capacitor shown in fig. 10A.

Detailed Description

Hereinafter, comparative examples and embodiments will be described with reference to the drawings.

Comparative example

A film capacitor 300 of a comparative example will be described with reference to fig. 8A to 10C. Fig. 8A is a cross-sectional view of a film capacitor 300 of a comparative example.

In fig. 8A, the 1 st metalized film 330 and the 2 nd metalized film 310 of the film capacitor 300 are superimposed. The 1 st metalized film 330 includes: a 1 st dielectric thin film 331 as a base, and a 1 st electrode 335 formed by vapor deposition on one main surface 331a of the 1 st dielectric thin film 331. The 2 nd metallized film 310 has: a2 nd dielectric thin film 311 as a base, and a2 nd electrode 315 formed on one principal surface 311a of the 2 nd dielectric thin film 311 by vapor deposition. In the film capacitor 300, the 2 nd dielectric film 311 is sandwiched between the 1 st electrode 335 and the 2 nd electrode 315 opposed to the 1 st electrode 335, thereby forming a capacitor element. The 1 st electrode 335 is disposed on the other main surface 311b of the 2 nd dielectric thin film 311.

The 1 st dielectric film 331 and the 2 nd dielectric film 311 include a dielectric such as polypropylene or polyethylene terephthalate. The 1 st electrode 335 and the 2 nd electrode 315 contain a metal such as aluminum, for example. The 1 st electrode 335 and the 2 nd electrode 315 may be formed by chemical plating or by attaching rolled metal foil, instead of by evaporation of metal.

Fig. 8B shows a top view of the 1 st metalized film 330. Fig. 8C shows a top view of the 2 nd metalized film 310. The 1 st metalized film 330 and the 2 nd metalized film 310 have a long film shape. In the 1 st metalized film 330 and the 2 nd metalized film 310, the width direction is set to the short direction D1, and the longitudinal direction is set to the long direction D2.

In the 1 st metalized film 330, the 1 st electrode 335 has a 1 st connection electrode 334 and a plurality of 1

st counter electrodes

332a, 332b, and 332 c. At one end of the 1 st metalized film 330 in the short direction D1, a 1 st connection electrode 334 is provided along the long direction D2. At the other end portion of 1 st metalized film 330 in short direction D1, end surface edge 341 where no electrode is formed is provided along long direction D2.

The 1 st electrode 335 is divided into a plurality of regions by the 1 st long-direction slit 344 extending in the long direction D2, the 2 nd long-

direction slits

343b, 343c extending in the long direction D2, and the 1 st short-direction slit 342 extending in the short direction D1. The 1 st long direction slit 344, the 2 nd long direction slits 343b, 343c, and the 1 st short direction slit 342 are slit-like positions where no electrode is formed on the 1 st dielectric film 331.

The 1 st counter electrode 332a is divided from the 1 st connecting electrode 334 by the 1 st longitudinal slit 344. The 1

st counter electrodes

332a, 332b, and 332c are partitioned by the 2 nd long direction slits 343b and 343c and the 1 st short direction slit 342.

The 1 st connection electrode 334 and the 1 st counter electrode 332a are connected by a fuse 333 a. The 1 st counter electrode 332a and the 1 st counter electrode 332b are connected by a fuse 333 b. The 1 st counter electrode 332b and the 1 st counter electrode 332c are connected by a fuse 333 c.

In the 2 nd metalized film 310, the 2 nd electrode 315 includes a2 nd connection electrode 314 and a plurality of 2

nd counter electrodes

312a and 312 b. At one end of the 2 nd metallized film 310 in the short direction D1, a2 nd connection electrode 314 is provided along the long direction D2. At the other end of the 2 nd metallized film 310 in the short direction D1, an end face edge 321 where no electrode is formed is provided along the long direction D2.

The 2 nd electrode 315 is divided into a plurality of regions by the 1 st long-direction slit 323 extending in the long direction D2, the 2 nd long-direction slit 324 extending in the long direction D2, and the 2 nd short-direction slit 322 extending in the short direction D1. The 1 st long direction slit 323, the 2 nd long direction slit 324, and the 2 nd short direction slit 322 are slit-like positions where no electrode is formed on the 2 nd dielectric thin film 311. The 2 nd counter electrode 312a is divided from the 2 nd connecting electrode 314 by the 1 st longitudinal slit 323. The 2

nd counter electrodes

312a and 312b are partitioned by the 2 nd long direction slit 324 and the 2 nd short direction slit 322.

The 2 nd connection electrode 314 and the 2 nd counter electrode 312a are connected by a fuse 316. The 2 nd counter electrode 312a and the 2 nd counter electrode 312b are connected by a fuse 313. The

fuses

333a, 333b, 333c, 313, and 316 are blown when a current exceeding the blowing current flows, and the circuit including the

fuses

333a, 333b, 333c, 313, and 316 is cut off. The blowing currents of the

fuses

333a, 333b, 333c, 313, 316 are designed according to the required specifications of the film capacitor 300.

The

fuses

333a, 333b, and 333c are formed by providing the 1 st electrode 335 with a narrow width. The

fuses

313 and 316 are formed by providing the 2 nd electrode 315 with a narrow width. The

fuses

333a, 333b, and 333c may be formed of the same metal as other positions of the 1 st electrode 335, but may be formed of a metal that is easily fused compared to other positions of the 1 st electrode 335. The

fuses

313 and 316 are formed of the same metal as the other positions of the 2 nd electrode 315, but may be formed of a metal that is easily fused compared to the other positions of the 2 nd electrode 315.

Fig. 9A is a plan view illustrating a capacitance formation state of the thin-film capacitor 300 shown in fig. 8A. In fig. 9A, a2 nd metalized film 310 is disposed on the upper side of the paper surface, a 1 st metalized film 330 is disposed on the lower side of the paper surface, and the region where the 1 st electrode 335 and the 2 nd electrode 315 vertically overlap is indicated by a grid. When the 1 st metalized film 330 overlaps the 2 nd metalized film 310, the 1 st connecting electrode 334 overlaps the end face edge 321 at one end. When the 1 st metalized film 330 overlaps the 2 nd metalized film 310, the end surface edge 341 overlaps the 2 nd connecting electrode 314 at the other end.

In fig. 9A, the

capacitance forming portions

352a, 352b, 352c, and 352d are regions where the 1 st electrode 335 and the 2 nd electrode 315 are stacked on top of each other with the 2 nd dielectric thin film 311 interposed therebetween to form a capacitor element. Fig. 8A is a cross-sectional view of the film capacitor 300 shown in fig. 9A at line A8-A8.

Fig. 9B is an equivalent circuit diagram of the circuit along the line A8-A8 in the film capacitor 300 shown in fig. 9A. The capacitor elements C1, C2, C3, and C4 in fig. 9B are capacitor elements formed in the

capacitance forming portions

352a, 352B, 352C, and 352d shown in fig. 9A, respectively. Fuses F1, F2, F3, F21, and F22 in fig. 9B are

fuses

333a, 333B, 333c, 313, and 316 shown in fig. 9A, respectively. The terminals T1 and T2 are the 1 st connecting electrode 334 and the 2 nd connecting electrode 314 shown in fig. 8B and 8C, respectively.

The film capacitor 300 includes the

fuses

333a, 333b, 333c, 313, and 316, and thus, when a large current exceeding the fuse current flows, the thin film capacitor can protect the circuit by disconnecting the fuse.

Next, a case where insulation breakdown occurs in a part of the film capacitor 300 and the fuse blows will be described with reference to fig. 10A to 10C. Fig. 10A is a plan view showing a state in which insulation breakdown occurs in the capacitance forming portion 352b of the film capacitor 300 of the comparative example, and the fuse 333b and the fuse 313 are fused. In fig. 10A, similarly to fig. 9A, a2 nd metalized film 310 is disposed on the upper side of the paper, a 1 st metalized film 330 is disposed on the lower side of the paper, and the region where the 1 st electrode 335 and the 2 nd electrode 315 vertically overlap is shown by a grid. Fig. 10B is a sectional view of the film capacitor 300 shown in fig. 10A at line a9-a 9. Fig. 10C is an equivalent circuit diagram at the a9-a9 line of the film capacitor 300 shown in fig. 10A.

As shown in fig. 10A to 10C, when the insulation of a part of the 2 nd dielectric thin film 311 is lowered during the operation of the thin film capacitor 300, a large current flows between the 1 st counter electrode 332b and the 2 nd counter electrode 312b, and an insulation breakdown part 350 is formed. This short-circuits capacitor element C2 at the position of capacitance forming portion 352 b. Due to this large current, the fuse 333b connected to the 1 st counter electrode 332b in which the insulation breakdown part 350 exists and the fuse 313 connected to the 2 nd counter electrode 312b are blown, and the current to the insulation breakdown part 350 is cut off.

In this way, since the current to insulation breakdown part 350 is cut off, abnormal temperature rise of insulation breakdown part 350 can be prevented. As a result, the thin-film capacitor 300 loses its capacitor function, and thermal damage to peripheral components and circuits can be prevented, thereby improving safety.

However, in the case where the insulation breakdown part 350 is generated between the 2 nd long direction slit 343b of the 1 st metalized film 330 and the 2 nd long direction slit 324 of the 2 nd metalized film 310, the reliability of the film capacitor 300 may be deteriorated.

This is because, as shown in fig. 10C, since the fuse F2 fuses with the fuse F21, the capacitor element C2 including the insulation-breakdown portion 350 remains in the form of a circuit connected in series between the terminal T1 and the terminal T2. That is, one end of the capacitor element C2 is connected to the terminal T1 via the capacitor element C1 and the fuse F1. The other end of the capacitor element C2 is connected to the terminal T2 via the capacitor elements C3, C4, the fuse F3, and the fuse F22.

In this way, if capacitor element C2 including insulation breakdown part 350 is connected in series to the circuit between terminal T1 and terminal T2 and remains, insulation breakdown part 350 generates heat when an ac current flows. This causes failure or deterioration of the film capacitor 300, and the safety and reliability of the film capacitor 300 are reduced. Further, it is also possible to break down a circuit including the thin film capacitor 300.

(embodiment mode 1)

A film capacitor 100 according to embodiment 1 will be described with reference to fig. 1A to 3C. Fig. 1A is a cross-sectional view of a film capacitor 100 according to embodiment 1.

In fig. 1A, the 1 st metallized film 130 of the film capacitor 100 is coincident with the 2 nd metallized film 110. The 1 st metalized film 130 includes: a 1 st dielectric thin film 131 as a base, and a 1 st electrode 135 formed on one main surface 131a of the 1 st dielectric thin film 131 by vapor deposition. The 2 nd metallized film 110 has: a2 nd dielectric thin film 111 as a base, and a2 nd electrode 115 formed on one main surface 111a of the 2 nd dielectric thin film 111 by vapor deposition. In the film capacitor 100, the 2 nd dielectric film 111 is sandwiched between the 1 st electrode 135 and the 2 nd electrode 115 opposed to the 1 st electrode 135, thereby forming a capacitor element. The 1 st electrode 135 is disposed on the other main surface 111b side of the 2 nd dielectric thin film 111.

The 1 st dielectric film 131 and the 2 nd dielectric film 111 include a dielectric such as polypropylene or polyethylene terephthalate. The 1 st electrode 135 and the 2 nd electrode 115 include a metal such as aluminum, for example. The 1 st electrode 135 and the 2 nd electrode 115 may be formed by chemical plating or by bonding and rolling a metal foil, instead of by vapor deposition of a metal.

Fig. 1B shows a top view of the 1 st metalized film 130. Fig. 1C shows a top view of the 2 nd metalized film 110. The 1 st metallized film 130 and the 2 nd metallized film 110 have a long film shape. In the 1 st metalized film 130 and the 2 nd metalized film 110, the width direction is set to the short direction D1, and the longitudinal direction is set to the long direction D2.

In the 1 st metalized film 130, the 1 st electrode 135 includes a 1 st connection electrode 134 and a plurality of 1

st counter electrodes

132a, 132b, and 132 c. At one end of the 1 st metalized film 130 in the short direction D1, a 1 st connection electrode 134 is provided along the long direction D2. At the other end of the 1 st metalized film 130 in the short direction D1, an end face edge 141 where no electrode is formed is provided along the long direction D2.

The 1 st electrode 135 is divided into a plurality of regions by the 1 st long-direction slit 144 extending in the long direction D2, the 2 nd long-direction slits 143b and 143c extending in the long direction D2, and the 1 st short-direction slit 142 extending in the short direction D1. The 1 st long direction slit 144, the 2 nd long direction slits 143b and 143c, and the 1 st short direction slit 142 are slit-like positions where no electrode is formed on the 1 st dielectric thin film 131.

The 1 st counter electrode 132a is divided from the 1 st connecting electrode 134 by the 1 st longitudinal slit 144. The 1

st counter electrodes

132a, 132b, and 132c are partitioned by the 2 nd long direction slits 143b and 143c and the 1 st short direction slit 142.

The 1 st connection electrode 134 and the 1 st counter electrode 132a are connected by a 1 st fuse 133 a. The 1 st counter electrode 132a and the 1 st counter electrode 132b are connected by a2 nd fuse 133 b. The 1 st counter electrode 132b and the 1 st counter electrode 132c are connected by a2 nd fuse 133 c.

The 1 st and 2 nd fuses 133a, 133b, 133c are blown when a current exceeding the blowing current flows, and the circuit including the 1 st and 2 nd fuses 133a, 133b, 133c is cut off. The blowing currents of the 1 st and 2 nd fuses 133a, 133b, 133c are designed according to the specifications required for the film capacitor 100.

The 1 st fuses 133a, 133b, and 133c are formed by providing the 1 st electrode 135 with a narrow width. The 1 st fuse 133a, the 2 nd fuses 133b, and 133c may be formed of the same metal as other positions of the 1 st electrode 135, or may be formed of a metal that is easily fused compared to other positions of the 1 st electrode 135.

In the 2 nd metallized film 110, the 2 nd electrode 115 has a2 nd connecting electrode 114 and a plurality of 2 nd counter electrodes 112. A2 nd connection electrode 114 is provided along the long direction D2 at one end of the 2 nd metallized film 110 in the short direction D1. At the other end of the 2 nd metallized film 110 in the short direction D1, an end face edge 121 where no electrode is formed is provided along the long direction D2.

The 2 nd electrode 115 is divided into a plurality of 2 nd counter electrodes 112 by the 2 nd short direction slits 122 extending in the short direction D1. The 2 nd short-direction slit 122 is a slit-like position where no electrode is formed on the 2 nd dielectric thin film 111. In the 2 nd metallized film 110, the 2 nd counter electrode 112 is connected to the 2 nd connecting electrode 114 without a fuse. That is, the 2 nd electrode 115 has no fuse in a region where the 2 nd counter electrode 112 is formed. That is, the 2 nd counter electrode 112 is divided only in the long direction D2 by the 2 nd short direction slit 122 extending in the short direction D1 in the region opposed to the 1

st counter electrodes

132a, 132b, and 132c, respectively. The plurality of 2 nd counter electrodes 112 are electrodes formed on the 2 nd electrode 115 so as to be divided by the 2 nd short-direction slit 122 only in the long direction D2 out of the short direction D1 and the long direction D2.

Fig. 2A is a plan view illustrating a capacitance formation state of the thin-film capacitor 100 shown in fig. 1A. In fig. 2A, a2 nd metalized film 110 is disposed on the upper side of the drawing, a 1 st metalized film 130 is disposed on the lower side of the drawing, and a region where a 1 st electrode 135 and a2 nd electrode 115 are vertically overlapped is shown by a grid.

In the film capacitor 100, when the 1 st metalized film 130 and the 2 nd metalized film 110 are overlapped, the 1 st connection electrode 134 is overlapped with the end face edge 121 at one end portion. In the film capacitor 100, when the 1 st metalized film 130 and the 2 nd metalized film 110 overlap each other, the end face edge 141 overlaps the 2 nd connecting electrode 114 at the other end.

In fig. 2A, the

capacitance forming portions

152A, 152b, and 152c are regions where the 1 st electrode 135 and the 2 nd electrode 115 are stacked in the upper and lower direction with the 2 nd dielectric film 111 interposed therebetween to form a capacitor element. Fig. 1A is a cross-sectional view of the film capacitor 100 shown in fig. 2A at line a2-a 2.

Fig. 2B is an equivalent circuit diagram of a circuit along the line a2-a2 in the film capacitor 100 shown in fig. 2A. The capacitor elements C1, C2, and C3 in fig. 2B are capacitor elements formed in the capacitance forming portions 152A, 152B, and 152C shown in fig. 2A, respectively. Fuses F1, F2, and F3 in fig. 2B are the 1 st fuse 133a, the 2 nd fuses 133B, and 133c shown in fig. 2A, respectively. The terminals T1 and T2 are the 1 st connecting electrode 134 and the 2 nd connecting electrode 114 shown in fig. 1B and 1C, respectively.

The film capacitor 100 includes the 1 st fuse 133a, the 2 nd fuses 133b, and 133c, and thus, when a large current exceeding the fuse current flows, the thin film capacitor can cut off the 1 st fuse 133a and the 2 nd fuses to protect the circuit.

Next, a case where insulation breakdown occurs in a part of the film capacitor 100 and the fuse blows will be described with reference to fig. 3A to 3C. Fig. 3A is a plan view showing a state where insulation breakdown occurs in the capacitance forming portion 152b of the film capacitor 100 according to embodiment 1 and the 2 nd fuse 133b is blown. In fig. 3A, similarly to fig. 2A, a2 nd metalized film 110 is disposed on the upper side of the drawing sheet, a 1 st metalized film 130 is disposed on the lower side of the drawing sheet, and the region where the 1 st electrode 135 and the 2 nd electrode 115 vertically overlap is indicated by a grid. Fig. 3B is a cross-sectional view of the film capacitor 100 shown in fig. 3A at line A3-A3. Fig. 3C is an equivalent circuit diagram at line A3-A3 of the film capacitor 100 shown in fig. 3A.

As shown in fig. 3A to 3C, when the insulation of a part of the 2 nd dielectric thin film 111 is lowered during the operation of the thin film capacitor 100, a large current flows between the 1 st counter electrode 132b and the 2 nd counter electrode 112, and an insulation breakdown part 150 is formed. This short-circuits capacitor element C2 at the position of capacitance forming portion 152 b. Due to this large current, the 2 nd fuse 133b connected to the 1 st counter electrode 132b having the insulation breakdown part 150 is blown, and the current to the insulation breakdown part 150 is cut off.

As shown in fig. 3C, after the 2 nd fuse 133b (fuse F2) is fused, a circuit including the capacitor element C1 remains. On the other hand, the circuit including the insulation breakdown part 150 is a redundant circuit via the capacitor element C3 and the fuse F3. That is, unlike the comparative example, film capacitor 100 according to embodiment 1 does not newly generate a circuit including insulation breakdown part 150 in series even if the fuse is blown. Therefore, almost no current flows through insulation breakdown part 150, and almost no heat is generated. This can prevent the loss of the capacitor function and the thermal damage of the peripheral components and circuits due to the abnormal temperature rise of the film capacitor 100. That is, the film capacitor 100 has excellent safety and excellent reliability.

As described above, the film capacitor 100 according to embodiment 1 has the following structure. That is, the thin-film capacitor 100 includes a dielectric thin film (the 2 nd dielectric thin film 111), the 1 st electrode 135, and the 2 nd electrode 115. The 1 st electrode 135 is disposed on one main surface 111b side of the dielectric thin film (the 2 nd dielectric thin film 111), and is formed of a conductive thin film. The 2 nd electrode 115 is disposed at a position facing the 1 st electrode 135 with a dielectric thin film (the 2 nd dielectric thin film 111) therebetween, and is composed of a conductor thin film. Here, the dielectric film (2 nd dielectric film 111) has a short direction D1 and a long direction D2. The 1 st electrode 135 has: the 1 st connecting electrode 134 extending in the longitudinal direction D2, and the 1 st counter electrode 132a partitioned from the 1 st connecting electrode 134 by the 1 st longitudinal slit 144 extending in the longitudinal direction D2. The 1 st electrode 135 has a 1 st fuse 133a traversing the 1 st longitudinal slit 144 and connecting the 1 st connecting electrode 134 and the 1 st counter electrode 132 a. The 2 nd electrode 115 has: a2 nd connecting electrode 114 extending in the longitudinal direction D2, and a2 nd counter electrode 112 connected to the 2 nd connecting electrode 114 without a fuse.

As described above, the thin-film capacitor 100 has a fuse only in the 1 st electrode 135, and has no fuse in the 2 nd electrode 115 in the region where the 2 nd counter electrode 112 is formed. That is, the 2 nd counter electrode 112 is connected to the 2 nd connecting electrode 114 without a fuse.

With this configuration, even when the 2 nd dielectric film 111 generates the insulation breakdown part 150, only a part of the insulation breakdown part 150 is cut by the fuse blowing, and the other part of the insulation breakdown part 150 is not cut. Therefore, the portion including the insulation breakdown part 150 becomes a redundant circuit, and almost no current flows, and heat generation of the insulation breakdown part 150 can be suppressed. This can maintain the safety and reliability of the film capacitor 100.

In addition, although the film capacitor 100 has a fuse only in the 1 st electrode 135 and no fuse in the 2 nd electrode 115, the opposite may be true. That is, the same effect can be obtained by having a fuse only in the 2 nd electrode 115 and not having a fuse in the 1 st electrode 135. That is, the film capacitor 100 may have a fuse in only one of the pair of electrodes with the dielectric interposed therebetween.

Further, the film capacitor 100 may have the following structure. That is, in the thin film capacitor 100, a plurality of 1

st counter electrodes

132a, 132b, and 132c and a plurality of 2 nd counter electrodes 112 are formed, respectively. The 1

st counter electrodes

132a, 132b, and 132c are further divided by the 1 st short direction slit 142 extending in the short direction D1. The 2 nd counter electrode 112 is divided by the 2 nd short direction slit 122 extending in the short direction D1. With the above configuration, the film capacitor 100 can reduce the area of the capacitor element to be cut by the fuse when the 2 nd dielectric film 111 is subjected to insulation breakdown. Therefore, the reduction in the electrostatic capacitance of the thin-film capacitor 100 when the insulation breakdown occurs is small, and the influence on the electronic device using the thin-film capacitor 100 is small.

Further, the film capacitor 100 may have the following structure. That is, in the thin film capacitor 100, the 1

st counter electrodes

132a, 132b, 132c are further divided by the 2 nd

longitudinal slits

143b, 143c extending in the longitudinal direction. The 1 st electrode 135 further includes 2 nd fuses 133b and 133c that cross the 2 nd

longitudinal slits

143b and 143c and connect the adjacent 1

st counter electrodes

132a, 132b, and 132c to each other. With the above configuration, the film capacitor 100 can reduce the area of the capacitor element to be invalidated by the fuse when the 2 nd dielectric film 111 is subject to insulation breakdown. Therefore, the reduction in the electrostatic capacitance of the thin-film capacitor 100 when the insulation breakdown occurs is small, and the influence on the electronic device using the thin-film capacitor 100 is small.

Further, the film capacitor 100 may have the following structure. That is, the 2 nd counter electrode 112 is formed in plural. The plurality of 2 nd counter electrodes 112 are divided by short-direction slits (2 nd short-direction slits 122) extending in the short direction D1 only in the long direction D2 in regions facing the 1

st counter electrodes

132a, 132b, and 132c, respectively. With the above configuration, even when the insulation breakdown part 150 is generated in the 2 nd dielectric film 111, the film capacitor 100 is configured such that only a part of the insulation breakdown part 150 is cut by blowing the fuse and the other part of the insulation breakdown part 150 is not cut. Thus, thin-film capacitor 100 can suppress heat generation in insulation breakdown part 150, and can maintain safety and reliability.

(modification of embodiment 1)

A film capacitor 400 according to a modification of embodiment 1 will be described with reference to fig. 4A and 4B. Fig. 4A is a plan view of the 1 st metalized film 170 constituting the thin-film capacitor 400 according to the modification of embodiment 1. In the film capacitor 400 according to the modification of embodiment 1, the same reference numerals are given to the components that are common to the film capacitor 100 according to embodiment 1, and the description thereof is omitted.

Film capacitor 400 according to a modification example, in film capacitor 100 according to embodiment 1, 1 st metalized film 170 shown in fig. 4A is used instead of 1 st metalized film 130 shown in fig. 1B. The film capacitor 400 according to the modification is configured such that the 1 st metalized film 170 shown in fig. 4A overlaps the 2 nd metalized film 110 shown in fig. 1C. Fig. 4B is a plane showing a capacitance formation state of the thin-film capacitor 400 according to the modification.

The thin-film capacitor 400 of the modification differs from the thin-film capacitor 100 in that the 1 st electrode 171 further includes a3 rd fuse 172 that traverses the 1 st short-direction slit 142 and connects the adjacent 1

st counter electrodes

132a, 132b, and 132c to each other. With this structure, when insulation breakdown occurs in the thin-film capacitor 400, the area of the capacitor element to be disconnected is small, and the reduction in capacitance is small, so that the influence of insulation breakdown is small.

As described above, the 1 st electrode 171 of the thin-film capacitor 400 according to the modification of embodiment 1 further includes the 3 rd fuse 172 that traverses the 1 st short-direction slit 142 and connects the adjacent 1

st counter electrodes

132a, 132b, and 132c to each other. With this configuration, the reduction in capacitance when insulation breakdown occurs in the thin-film capacitor 400 of the modification is small.

(embodiment mode 2)

A film capacitor 200 according to embodiment 2 will be described with reference to fig. 5A to 7C. Fig. 5A is a cross-sectional view of the film capacitor 200 according to embodiment 2.

In fig. 5A, the 1 st metalized film 230 of the film capacitor 200 coincides with the 2 nd metalized film 210. The 1 st metalized film 230 includes: a 1 st dielectric thin film 231 as a base, and a 1 st electrode 235 formed by vapor deposition on one main surface 231a of the 1 st dielectric thin film 231. The 2 nd metallized film 210 has: a2 nd dielectric thin film 211 as a base, and a2 nd electrode 215 formed on one main surface 211a of the 2 nd dielectric thin film 211 by vapor deposition. In the film capacitor 200, the 2 nd dielectric film 211 is sandwiched between the 1 st electrode 235 and the 2 nd electrode 215 facing the 1 st electrode 235, thereby forming a capacitor element. The 1 st electrode 235 is disposed on the other main surface 211b side of the 2 nd dielectric thin film 211.

The 1 st dielectric film 231 and the 2 nd dielectric film 211 are made of a dielectric material such as polypropylene or polyethylene terephthalate. The 1 st electrode 235 and the 2 nd electrode 215 include a metal such as aluminum, for example. The 1 st electrode 235 and the 2 nd electrode 215 may be formed by chemical plating or by bonding and rolling a metal foil, instead of by vapor deposition of a metal.

Fig. 5B shows a top view of the 1 st metalized film 230. Fig. 5C shows a top view of the 2 nd metalized film 210. The 1 st metalized film 230 and the 2 nd metalized film 210 have a long film shape. In the 1 st metalized film 230 and the 2 nd metalized film 210, the width direction is set to the short direction D1, and the longitudinal direction is set to the long direction D2.

The 1 st metalized film 230 also has a 1 st direction D3 crossing both the short direction D1 and the long direction D2. The 1 st metalized film 230 also has a2 nd direction D4 crossing the short direction D1, the long direction D2, and the 1 st direction D3. The 1 st direction D3 and the 2 nd direction D4 are inclined from both the short direction D1 and the long direction D2 as shown in fig. 5B. The inclination angle of the 1 st direction D3 with respect to the short direction D1 and the long direction D2 and the inclination angle of the 2 nd direction D4 with respect to the short direction D1 and the long direction D2 are, for example, 45 degrees, and the angle at which the 1 st direction D3 intersects with the 2 nd direction D4 is, for example, 90 degrees.

In the 1 st metalized film 230, the 1 st electrode 235 includes a 1 st connection electrode 234 and a plurality of 1

st counter electrodes

232b, 232c, 232d, 232e, and 232 f. At one end of the 1 st metalized film 230 in the short direction D1, the 1 st connection electrode 234 is provided along the long direction D2. At the other end of the 1 st metalized film 230 in the short direction D1, an end face edge 241 where no electrode is formed is provided along the long direction D2.

The 1 st electrode 235 is divided into a plurality of regions by the 1 st and 3 rd slits 261 and 263 extending in the 1 st direction D3 and the 2 nd and 4 th slits 262 and 264 extending in the 2 nd direction D4. The 1 st slit 261, the 2 nd slit 262, the 3 rd slit 263, and the 4 th slit 264 are slit-like positions where no electrode is formed on the 1 st dielectric thin film 231.

The 1 st counter electrode 232b is divided from the 1 st connecting electrode 234 by the 1 st slit 261 and the 2 nd slit 262. The 1

st counter electrodes

232b, 232c, 232d, 232e, and 232f are partitioned by the 3 rd slit 263 and the 4 th slit 264.

The 1 st connection electrode 234 and the 1 st counter electrode 232b are connected by a 1 st fuse 265 and a2 nd fuse 266. The 1 st fuse 265 traverses the 1 st slit 261 and connects the 1 st connection electrode 234 and the 1 st counter electrode 232 b. The 2 nd fuse 266 traverses the 2 nd slit 262 and connects the 1 st connection electrode 234 and the 1 st counter electrode 232 b.

The 1

st opposing electrodes

232b, 232c, 232d, 232e, and 232f adjacent to each other are connected by a3 rd fuse 267 and a 4 th fuse 268. The 3 rd fuse 267 traverses the 3 rd slit 263 and connects the adjacent 1

st opposing electrodes

232b, 232c, 232d, 232e, 232f to each other. The 4 th fuse 268 crosses the 4 th slit 264 and connects the 1

st opposing electrodes

232b, 232c, 232d, 232e, 232f adjacent to each other.

The 1 st fuse 265, the 2 nd fuse 266, the 3 rd fuse 267, and the 4 th fuse 268 are blown when a current exceeding the blowing current flows, and the circuit including the respective fuses is cut off. The blowing currents of the 1 st fuse 265, the 2 nd fuse 266, the 3 rd fuse 267, and the 4 th fuse 268 are designed according to the required specifications of the film capacitor 200.

The 1 st fuse 265, the 2 nd fuse 266, the 3 rd fuse 267, and the 4 th fuse 268 are formed by providing a narrow width position in the 1 st electrode 235. The 1 st fuse 265, the 2 nd fuse 266, the 3 rd fuse 267, and the 4 th fuse 268 may be formed of the same metal as other positions of the 1 st electrode 235, or may be formed of a metal that is easily fused compared to other positions of the 1 st electrode 235.

In the 2 nd metallized film 210, the 2 nd electrode 215 has a2 nd connecting electrode 214 and a plurality of 2 nd counter electrodes 212. At one end of the 2 nd metallized film 210 in the short direction D1, a2 nd connection electrode 214 is provided along the long direction D2. At the other end of the 2 nd metallized film 210 in the short direction D1, an end face edge 221 where no electrode is formed is provided along the long direction D2.

The 2 nd electrode 215 is divided into a plurality of 2 nd counter electrodes 212 by short direction slits 222 extending in the short direction D1. The short-direction slit 222 is a slit-like position where no electrode is formed on the 2 nd dielectric thin film 211. In the 2 nd metalized film 210, the 2 nd counter electrode 212 is connected to the 2 nd connection electrode 214 without a fuse. The 2 nd electrode 215 has no fuse in a region where the 2 nd counter electrode 212 is formed. The plurality of 2 nd counter electrodes 212 are electrodes formed in regions opposed to the 1

st counter electrodes

232b, 232c, 232D, 232e, and 232f, and are divided by the short direction slits 222 only in the long direction D2 out of the short direction D1 and the long direction D2.

Fig. 6A is a plan view illustrating a capacitance formation state of the thin-film capacitor 200 shown in fig. 5A. In fig. 6A, a2 nd metalized film 210 is disposed on the upper side of the drawing, a 1 st metalized film 230 is disposed on the lower side of the drawing, and the region where the 1 st electrode 235 and the 2 nd electrode 215 vertically overlap is indicated by a grid.

In the film capacitor 200, when the 1 st metalized film 230 and the 2 nd metalized film 210 are overlapped, the 1 st connection electrode 234 overlaps the end face edge 221 at one end portion. In the film capacitor 200, when the 1 st metalized film 230 and the 2 nd metalized film 210 are overlapped with each other, the end surface edge 241 overlaps with the 2 nd connecting electrode 214 at the other end portion.

In fig. 6A, the

capacitance forming portions

252a, 252b, 252c, 252d, 252e, and 252f are regions where the 1 st electrode 235 and the 2 nd electrode 215 are stacked on top of each other with the 2 nd dielectric film 211 interposed therebetween to form a capacitor element. Fig. 5A is a cross-sectional view of the film capacitor 200 shown in fig. 6A at line a5-a 5.

Fig. 6B is an equivalent circuit diagram of a circuit along the line a5-a5 in the film capacitor 200 shown in fig. 6A. The capacitor elements C1, C2, C3, C4, C5, and C6 in fig. 6B are capacitor elements formed in the

capacitance forming portions

252a, 252B, 252C, 252d, 252e, and 252f shown in fig. 6A, respectively. Fuses F2, F5, F8, F9, F10, F11, and F14 in fig. 6B are

fuses

233a, 233B, 233c, 233d, 233e, 233F, and 233g shown in fig. 6A, respectively. Terminals T1 and T2 are the 1 st connecting electrode 234 and the 2 nd connecting electrode 214 shown in fig. 5B and 5C, respectively.

The film capacitor 200 includes the

fuses

233a, 233b, 233c, 233d, 233e, 233f, and 233g, and thus when a large current exceeding the fuse current flows, the thin film capacitor can be cut off to protect the circuit.

Next, a case where insulation breakdown occurs in a part of the film capacitor 200 and the fuse is blown will be described with reference to fig. 7A to 7C. Fig. 7A is a plan view showing a state where insulation breakdown occurs in the capacitance forming portion 252d of the film capacitor 200 according to embodiment 2 and the

fuses

233c, 233d, 233f, and 233g are blown. In fig. 7A, similarly to fig. 6A, a2 nd metalized film 210 is disposed on the upper side of the drawing sheet, a 1 st metalized film 230 is disposed on the lower side of the drawing sheet, and the region where the 1 st electrode 235 and the 2 nd electrode 215 vertically overlap is indicated by a grid. Fig. 7B is a cross-sectional view of the film capacitor 200 shown in fig. 7A at line a6-a 6. Fig. 7C is an equivalent circuit diagram at the line a6-a6 of the film capacitor 200 shown in fig. 7A.

As shown in fig. 7A to 7C, when the insulation property of a part of the 2 nd dielectric thin film 211 is lowered during the operation of the thin film capacitor 200, a large current flows between the 1 st counter electrode 232d and the 2 nd counter electrode 212, and an insulation breakdown part 250 is formed. This short-circuits capacitor element C4 at the position of capacitance forming portion 252 d. By this large current, fuses F8, F9, F10, and F11 connected to the 1 st counter electrode 232d having a portion where insulation breakdown occurs are blown, and the current to the insulation breakdown part 250 is cut off.

As shown in fig. 7C, after fuses F8, F9, F10, and F11 are fused, a circuit including capacitor elements C1, C2, C3, C5, and C6 remains. In contrast, capacitor element C4 including breakdown insulator 150 has one end connected to terminal T2 and the other end disconnected. That is, unlike the comparative example, in film capacitor 200 according to embodiment 2, even if the fuse is blown, a circuit including insulation breakdown part 250 in series is not newly generated. Therefore, almost no current flows through the insulation breakdown part 250, and almost no heat is generated. This can prevent the loss of the capacitor function and the thermal damage of the peripheral components and circuits due to the abnormal temperature rise of the film capacitor 200. That is, the thin film capacitor 200 has excellent safety and excellent reliability.

As described above, the thin-film capacitor 200 according to embodiment 2 has the following structure. That is, the film capacitor 200 includes: a dielectric film (2 nd dielectric film 211), a 1 st electrode 235, and a2 nd electrode 215. The 1 st electrode 235 is disposed on one main surface 211a side of the dielectric thin film (the 2 nd dielectric thin film 211), and is formed of a conductive thin film. The 2 nd electrode 215 is disposed at a position facing the 1 st electrode 235 with a dielectric thin film (2 nd dielectric thin film 211) therebetween, and is composed of a conductor thin film. The dielectric thin film (2 nd dielectric thin film 211) has: the short direction D1, the long direction D2, the 1 st direction D3 intersecting both the short direction D1 and the long direction D2, and the 2 nd direction D4 intersecting both the short direction D1, the long direction D2, and the 1 st direction D3. The 1 st electrode 235 has: a 1 st connection electrode 234, a 1 st counter electrode 232b, a 1 st fuse 265, and a2 nd fuse 266 extending in the long direction D2. The 1 st counter electrode 232b is divided from the 1 st connecting electrode 234 by a 1 st slit 261 extending in the 1 st direction D3 and a2 nd slit 262 extending in the 2 nd direction D4. The 1 st fuse 265 crosses the 1 st slit 261 to connect the 1 st connection electrode 234 and the 1 st counter electrode 232 b. The 2 nd fuse 266 crosses the 2 nd slit 262 to connect the 1 st connecting electrode 234 and the 1 st counter electrode 232 b. The 2 nd electrode 215 has: a2 nd connecting electrode 214 extending in the longitudinal direction D2, and a2 nd counter electrode 212 connected to the 2 nd connecting electrode 214 without a fuse.

As described above, the thin-film capacitor 200 has a fuse only in the 1 st electrode 235 and no fuse in the 2 nd electrode 215 in the region where the 2 nd counter electrode 212 is formed. That is, the 2 nd counter electrode 212 is connected to the 2 nd connecting electrode 214 without a fuse. With this configuration, even when the 2 nd dielectric film 211 generates the insulation breakdown part 250, the film capacitor 200 is cut only in a part of the insulation breakdown part 250 by the fuse blowing, and the other part of the insulation breakdown part 250 is not cut. Therefore, almost no current flows through the portion including insulation breakdown part 250, and heat generation of insulation breakdown part 250 can be suppressed. This can maintain the safety and reliability of the film capacitor 200.

Further, in the thin-film capacitor 200 according to embodiment 2, the 1 st counter electrode 232b is divided from the 1 st connecting electrode 234 by the slits in the 2 different directions, and is connected to the 1 st connecting electrode 234 by the fuses in the 2 different directions. With this configuration, when insulation breakdown occurs in the 1 st counter electrode 232b, the current flowing through each fuse becomes substantially half, and the amount of heat generated when each fuse is blown also becomes substantially half. Further, since the arrangement of the fuses connected to the 1 st connection electrode 234 of the film capacitor 200 is also dispersed, local heat generation due to the fusion of the fuses can also be dispersed. In this way, when the fuse is blown out due to dielectric breakdown, the thin film capacitor 200 can disperse a plurality of currents flowing through the fuse, and can suppress local heat generation, and therefore, is more excellent in safety and reliability.

Further, the film capacitor 200 may have the following structure. That is, in the thin film capacitor 200, the 1

st counter electrode

232b, 232c, 232D, 232e, 232f is further divided by the 3 rd slit 263 extending in the 1 st direction D3 and the 4 th slit 264 extending in the 2 nd direction D4. The 1 st electrode 235 further includes a3 rd fuse 267 that traverses the 3 rd slit 263 and connects the adjacent 1

st counter electrodes

232b, 232c, 232d, 232e, and 232f to each other. The 1 st electrode 235 further includes a 4 th fuse 268 which traverses the 4 th slit 264 and connects the adjacent 1

st counter electrodes

232b, 232c, 232d, 232e, and 232f to each other.

With the above configuration, the film capacitor 200 can reduce the area of the capacitor element to be cut by the fuse when the 2 nd dielectric film 211 is subjected to insulation breakdown. Therefore, even when insulation breakdown occurs, the capacitance of the thin-film capacitor 200 is less reduced, and the influence on the electronic device using the thin-film capacitor 200 is small.

While the thin film capacitors according to the embodiments have been described above, the present invention is not limited to the embodiments. The present invention may include a configuration in which various modifications that occur to those skilled in the art are implemented in the present embodiment, and a configuration in which components in different embodiments or modifications are combined and constructed, as long as the present invention does not depart from the gist of the present invention.

Industrial applicability

The thin film capacitor of the present disclosure is useful as an electronic component used for various electronic devices, electric machines, industrial devices, and the like.

-description of symbols-

100. 200, 300, 400 film capacitor

110. 210, 310 nd metallized film

111. 211, 311 2 nd dielectric film

111a, 111b, 131a, 211b, 231a, 311b, 331a main surface

112. 212, 312a, 312b No. 2 counter electrode

114. 214, 314 2 nd connecting electrode

115. 215, 315 nd electrode

121. 141, 221, 241, 321, 341 end face edges

122. 322 nd short direction slit

130. 170, 230, 330 No. 1 metallized film

131. 231, 331 st dielectric film

132a, 132b, 132c, 232b, 232c, 232d, 232e, 232f, 332a, 332b, 332c the 1 st counter electrode

133a, 265 th 1 st fuse

133b, 133c, 266 No. 2 fuse

134. 234, 334 No. 1 connecting electrode

135. 171, 235, 335 No. 1 electrode

142. 342 st 1 st short direction slit

143b, 143c, 324, 343b, 343c the 2 nd longitudinal slit

144. 323, 344 No. 1 longitudinal slit

150. 250, 350 insulation breakdown part

152a, 152b, 152c, 252a, 252b, 252c, 252d, 252e, 252f, 352a, 352b, 352c, 352d

172 rd fuse

222 short direction slit

233a, 233b, 233c, 233d, 233e, 233f, 233g, 313, 316, 333a, 333b, 333c fuses

261 slit No. 1

262 nd 2 nd slit

263 No. 3 slit

264 th slit

267 3 rd fuse

268 th fuse

Claims

1. A film capacitor is provided with:

a dielectric thin film;

a 1 st electrode which is arranged on one main surface side of the dielectric thin film and is composed of a conductor thin film; and

a2 nd electrode which is arranged at a position facing the 1 st electrode with the dielectric thin film interposed therebetween and is composed of a conductor thin film,

the dielectric thin film has a short direction and a long direction,

the 1 st electrode has:

a 1 st connection electrode extending in the longitudinal direction;

a 1 st counter electrode divided from the 1 st connecting electrode by a 1 st longitudinal slit extending in the longitudinal direction; and

a 1 st fuse for connecting the 1 st connection electrode and the 1 st counter electrode by traversing the 1 st longitudinal slit,

the 2 nd electrode has:

a2 nd connecting electrode extending in the longitudinal direction; and

a2 nd counter electrode connected to the 2 nd connection electrode without a fuse,

the 1 st counter electrode is divided into a plurality of 1 st short-direction slits extending in the short direction and 2 nd long-direction slits extending in the long direction,

the 1 st electrode further includes a2 nd fuse for connecting the adjacent 1 st counter electrodes to each other by traversing the 2 nd longitudinal slit,

the 2 nd counter electrode is divided into a plurality of 2 nd short direction slits extending in the short direction only in the long direction in a region facing the 1 st counter electrode.

2. The film capacitor of claim 1,

the 1 st electrode further includes a3 rd fuse that connects the 1 st counter electrode adjacent to each other by traversing the 1 st short-direction slit.

3. A film capacitor is provided with:

a dielectric thin film;

the dielectric thin film has: a short direction, a long direction, a 1 st direction intersecting both the short direction and the long direction, and a2 nd direction intersecting both the short direction, the long direction, and the 1 st direction,

the 1 st electrode has:

a 1 st connection electrode extending in the longitudinal direction;

a 1 st counter electrode divided from the 1 st connection electrode by a 1 st slit extending in the 1 st direction and a2 nd slit extending in the 2 nd direction;

a 1 st fuse which crosses the 1 st slit to connect the 1 st connection electrode and the 1 st counter electrode; and

a2 nd fuse crossing the 2 nd slit to connect the 1 st connection electrode and the 1 st counter electrode,

the 2 nd electrode has:

a2 nd connecting electrode extending in the longitudinal direction; and

the 1 st counter electrode is divided into a plurality of 3 rd slits extending in the 1 st direction and 4 th slits extending in the 2 nd direction,

the 1 st electrode further includes:

a3 rd fuse which crosses the 3 rd slit to connect the 1 st counter electrodes adjacent to each other; and

a 4 th fuse crossing the 4 th slit to connect the 1 st counter electrodes adjacent to each other,