CN108646396A - Auto-focusing microscopic system - Google Patents
Auto-focusing microscopic system Download PDFInfo
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- CN108646396A CN108646396A CN201810395360.4A CN201810395360A CN108646396A CN 108646396 A CN108646396 A CN 108646396A CN 201810395360 A CN201810395360 A CN 201810395360A CN 108646396 A CN108646396 A CN 108646396A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/241—Devices for focusing
- G02B21/244—Devices for focusing using image analysis techniques
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
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- Analytical Chemistry (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
The embodiment of the present invention provides a kind of auto-focusing microscopic system, which includes tube lens, object lens, mask plate and processor.The embodiment of the present invention will be on the pattern projection to measured object of mask plate, then auto-focusing is carried out using the pattern of mask plate, can carry out exact focus to transparent measured object, and using the pattern of mask plate carry out focusing can overcome hole or imperfect tape come the not high defect of focusing accuracy.The embodiment of the present invention determines the contrast of the pattern of acquired mask plate using processor, then determines the distance between object lens and measured object using contrast, to realize auto-focusing of the auto-focusing microscopic system to measured object, improves focusing efficiency.
Description
Technical field
The present invention relates to optical fields, and in particular to a kind of auto-focusing microscopic system.
Background technology
The subtle position that can be clearly observed measured object when measured object observation is carried out using microscope, is provided for observation
Reliable data, therefore microscope is needing the field for carrying out subtle observation to play very important effect.Utilizing microscope
It observes before measured object, it is necessary first to focusing microscope and measured object, standard can be more clear using to defocused microscope
True observation measured object.
In the prior art, mode generally manually or automatically is focused, that there are efficiency is low for the mode of manual focus,
The low defect of accuracy can improve focusing efficiency in the way of microscope progress auto-focusing, but be transparent in measured object
Object, measured object surface existing defects or measured object surface there are when hole, can not ensure focusing accuracy.For example, existing
There is microscope in technology to carry out auto-focusing using laser triangulation, specifically, microscope is added 808nm's in Visible optical trains
Laser, laser beam promoting menstruation cross a System Optics and obtain a semicircular hot spot on charge coupling device ccd, work as light
When spot radius minimum, focusing is completed.The above-mentioned Atomatic focusing method using laser triangulation, by dot projection to measured object surface
Afterwards, if on dot projection to the defect of measured object or hole, hot spot can be absorbed in defect or hole, cause the spot size observed
Less than actual spot size, therefore occurs pseudo- peak value when the size to hot spot judges, so as to cause the auto-focusing of mistake.
To sum up, the accuracy for how improving the efficiency of microscope focusing and improving microscope focusing is current urgent need to resolve
The technical issues of.
Invention content
(1) the technical issues of solving
In view of the deficiencies of the prior art, it the present invention provides a kind of auto-focusing microscopic system, can realize automatic
Focusing, improves the focusing efficiency of auto-focusing microscopic system, and can realize to defective, hole or transparent tested
Object ground exact focus.
(2) technical solution
In order to achieve the above object, the present invention is achieved by the following technical programs：
In a first aspect, providing a kind of auto-focusing microscopic system, the auto-focusing microscopic system is for observing
Measured object, the auto-focusing microscopic system include tube lens and object lens, and the auto-focusing microscopic system further includes：
Mask plate, first light source, the first beam splitter, the second beam splitter, the first speculum, the first charge coupling device and processing
Device；
The first light source emits the first light beam, and irradiates the mask plate using first light beam, obtains including to cover
The light beam of the light beam of the pattern of film version, the pattern comprising mask plate injects first beam splitter；
First beam splitter carries out light-splitting processing to the light beam of the pattern comprising mask plate, obtains the first transmitting
Beamlet, one of those first transmitting beamlet is injected the tube lens by first beam splitter, described therein
One first transmitting beamlet is mapped to by the tube lens and the object lens on the measured object；
One of those described first transmitting beamlet is reflected on the measured object, obtains the first the reflected beams,
First the reflected beams inject first beam splitter by the object lens and the tube lens successively；
First the reflected beams are carried out light-splitting processing by first beam splitter, obtain the first reflected beamlet, and
One of those first reflected beamlet is injected into second beam splitter；
The light beam of reception is carried out light-splitting processing by second beam splitter, obtains first object beamlet and the second target
Beamlet, second beam splitter make a reservation for first that the first object beamlet is mapped to first charge coupling device
The second target beamlet is injected first speculum by region, second beam splitter, and first speculum will
The second target beamlet is mapped to the second presumptive area of first charge coupling device；
The processor calculates the contrast of the image in first presumptive area, obtains the first contrast, calculates institute
The contrast for stating the image in the second presumptive area obtains the second contrast, according to first contrast and the second contrast
It determines defocus direction and the defocusing amount of the auto-focusing microscopic system, and institute is determined according to the defocus direction and defocusing amount
State the adjustment amount of object lens position.
With reference to first aspect, in the first possible implementation, the auto-focusing microscopic system further includes adjusting
Save device；
The processor generates regulating command according to the adjustment amount, and the regulating command is sent to the adjusting
Device；
The adjuster adjusts the position of the object lens according to the regulating command.
With reference to first aspect, in second of possible realization method, the mask plate is variable period grating mask plate.
With reference to first aspect, in the third possible realization method, the auto-focusing microscopic system further includes
Two light sources, the second speculum, third beam splitter, the first filter element, the second filter element and the second charge coupling device；
The second light source emits the second light beam, and second light beam is injected second speculum；Described second
Second light beam is injected first beam splitter by speculum；
First beam splitter carries out light-splitting processing to second light beam, obtains the second transmitting beamlet, and described the
One of those second transmitting beamlet is injected the tube lens, one of those described second transmitting by one beam splitter
Light beam is mapped to by the tube lens and the object lens on the measured object；
One of those described second transmitting beamlet is reflected on the measured object, obtains the second the reflected beams,
Second the reflected beams inject first beam splitter by the object lens and the tube lens successively；
Second the reflected beams are carried out light-splitting processing by first beam splitter, obtain the second reflected beamlet, and
One of those second reflected beamlet is injected into the third beam splitter；The third beam splitter is to described therein one
A second reflected beamlet carries out light-splitting processing, and will obtain a beamlet and inject first filter element, by another
Beamlet injects second filter element；
One of those described first reflected beamlet is injected the third beam splitter, institute by first beam splitter
It states third beam splitter and light-splitting processing is carried out to one of those described first reflected beamlet, and a beamlet will be obtained and penetrated
Enter first filter element, another beamlet is injected into second filter element；
The first predetermined light beam in the light beam that first filter element is received filters out, and filtered light beam is penetrated
Enter second beam splitter；The first predetermined light beam is the third beam splitter to one of those described second reflection
Beamlet carries out the light beam that light-splitting processing obtains；
The second predetermined light beam in the light beam that second filter element is received filters out, and filtered light beam is penetrated
Enter second charge coupling device；The second predetermined light beam be the third beam splitter to it is described one of those first
Reflected beamlet carries out the light beam that light-splitting processing obtains；
Second charge coupling device receives light beam, and forms image using the light beam received.
The third possible realization method with reference to first aspect, in the 4th kind of possible realization method, described first
Filter element is white light optical filter, and the second filter element is infrared light optical filter.
The third possible realization method with reference to first aspect, in the 5th kind of possible realization method, described first
Light source is infrared light light source, and the second light source is white light source.
The 4th kind of possible realization method with reference to first aspect, in the 6th kind of possible realization method, described first
Beam splitter, the second optical element or third beam splitter are Amici prism.
The 4th kind of possible realization method with reference to first aspect, in the 7th kind of possible realization method, described second
Charge coupling device is surface array charge-coupled device.
With reference to first aspect, the possible realization method of the first of first aspect, first aspect second of possible reality
Existing mode, the 4th kind of possible realization method, first aspect of the third possible realization method of first aspect, first aspect
The 5th kind of possible realization method, first aspect the 6th kind of possible realization method or the 7th kind of first aspect it is possible
Realization method, in the 8th kind of possible realization method, first charge coupling device is linear charge-coupled array.
With reference to first aspect, the possible realization method of the first of first aspect, first aspect second of possible reality
Existing mode, the 4th kind of possible realization method, first aspect of the third possible realization method of first aspect, first aspect
The 5th kind of possible realization method, first aspect the 6th kind of possible realization method or the 7th kind of first aspect it is possible
Realization method, in the 9th kind of possible realization method, the auto-focusing microscopic system further includes third speculum；
The light beam of the pattern comprising mask plate is injected the third speculum by the first light source；The third is anti-
It penetrates mirror and the light beam of the pattern comprising mask plate is injected into first beam splitter.
(3) advantageous effect
An embodiment of the present invention provides a kind of auto-focusing microscopic systems.Has following advantageous effect：
By on the pattern projection to measured object of mask plate, auto-focusing then is carried out using the pattern of mask plate, it can be right
Burnt transparent measured object carries out exact focus, and using the pattern of mask plate carry out focusing can overcome hole or imperfect tape come
The not high defect of focusing accuracy.
The contrast that the pattern of acquired mask plate is determined using processor, then determines object lens and quilt using contrast
The distance between object is surveyed, to realize auto-focusing of the auto-focusing microscopic system to measured object, improves focusing efficiency.
Description of the drawings
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technology description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
Obtain other attached drawings according to these attached drawings.
Fig. 1 is the structural schematic diagram of the auto-focusing microscopic system of one embodiment of the invention；
Fig. 2 is the structural schematic diagram of the auto-focusing microscopic system of yet another embodiment of the invention.
Specific implementation mode
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
The every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
A kind of auto-focusing microscopic system, as shown in Figure 1, the auto-focusing microscopic system is for observing measured object
106, the auto-focusing microscopic system includes tube lens 104, object lens 105, mask plate 102, first light source 101, first
Beam splitter 103, the second beam splitter 107, the first speculum 109, the first charge coupling device 108 and processor are (in figure
It does not indicate).
The first light source 101 emits the first light beam, and irradiates the mask plate 102 using first light beam, obtains
Include the light beam of the pattern of mask plate.The light beam of the pattern comprising mask plate injects first beam splitter 103.
First beam splitter 103 carries out light-splitting processing to the light beam of the pattern comprising mask plate, obtains first
Emit beamlet, one of those first transmitting beamlet is injected the tube lens 104 by first beam splitter, described
One of those first transmitting beamlet is mapped to by the tube lens 104 and the object lens 105 on the measured object 106.
One of those described first transmitting beamlet is reflected on the measured object 106, obtains the first reflected light
Beam, first the reflected beams inject first beam splitter by the object lens 105 and the tube lens 104 successively
103。
First the reflected beams are carried out light-splitting processing by first beam splitter 103, obtain the first reflected beamlet,
And one of those first reflected beamlet is injected into second beam splitter 107.
The light beam of reception is carried out light-splitting processing by second beam splitter 107, obtains first object beamlet and second
The first object beamlet is mapped to first charge coupling device by target beamlet, second beam splitter 107
The second target beamlet is injected first speculum 109, institute by the first presumptive area B, second beam splitter 107
State the second presumptive area that the second target beamlet is mapped to first charge coupling device 108 by the first speculum 109
A。
The processor calculates the contrast of the image in first presumptive area, obtains the first contrast, calculates institute
The contrast for stating the image in the second presumptive area obtains the second contrast, according to first contrast and the second contrast
It determines defocus direction and the defocusing amount of the auto-focusing microscopic system, and institute is determined according to the defocus direction and defocusing amount
State the adjustment amount of object lens position.After the object lens adjust position according to the adjustment amount, the measured object is located at the object
On focal plane..Here defocusing amount refers to object lens focal plane with a distance from measured object, and measured object is remoter from object focal point, and defocusing amount is got over
Greatly.
When the difference for the picture contrast that two regions A, B receive on the first charge coupling device is 0, measured object is judged
On focal plane in object lens.The readability of contrast, that is, image, clearly image, is clearly outlined, details Xinfeng richness, contrast
It is high.The contrast of the image in two regions A, B, the value of sharpness evaluation function can be calculated using sharpness evaluation function
Bigger, the contrast of image is higher.
Preferably, processor can utilize shade of gray evaluation function, and information mathematic(al) function or frequency-domain function are as clarity
Evaluation function calculates the contrast of the image in two regions A, B.Wherein, shade of gray evaluation and function include absolute variance
Function, gradient mode side's function, Brenner functions (also known as gradient filter method), Roberts gradients and function, gray scale
Fluctuation and change function (Variance functions), rate of gray level and function, Laplace function, Sobel operator evaluation functions etc..
The present embodiment calculates separately the contrast of the image in two regions A, B using Brenner functions：
In formula, F4 is the contrast of image, and M is total line number of the pixel in image, and N is total row of the pixel in image
Number, x are the row where pixel, and y is the row where pixel, and d is scheduled number of pixels.
It is clear as image at a distance of the quadratic sum of the graded size of d pixel that above-mentioned Brenner functions have chosen the directions x
The basis for estimation of clear degree or contrast, actually it can be appreciated that calculating the d ladder degree of image.
In the present embodiment, mask plate can be equal periodic optical gratings mask plate, can also be variable period grating mask plate.Make
When with equal periodic optical gratings mask plate, the auto-focusing to most of measured objects may be implemented, but when measured object is and mask plate phase
When synperiodic grating, then the focusing to measured object is cannot achieve.Since measured object and mask plate are identical variable period gratings
Probability it is very small, therefore the focusing to arbitrary measured object may be implemented using variable period grating mask plate.
The periodic optical gratings mask plate or variable period grating mask plate such as utilize may be implemented to the accurate of transparent measured object
Focusing.In addition, since mask plate has certain projected area, the periodic optical gratings mask plate or variable period grating such as utilize to cover
The exact focus to defective or hole measured object may be implemented in film version.
In the present embodiment, the first charge coupling device is preferably line array CCD, and line array CCD possesses higher Image Acquisition
Digit, and calculation amount is few, and focusing speed is fast.
Further, in this embodiment the auto-focusing microscopic system further includes adjuster.The processor according to
The adjustment amount generates regulating command, and the regulating command is sent to the adjuster；The adjuster is according to the tune
Section order adjusts the position of the object lens.
The present embodiment is then focused on the pattern projection to measured object of mask plate using the pattern of mask plate, energy
The measured object of enough focusing transparent carries out exact focus, and carries out focusing using the pattern of mask plate and can overcome hole or defect
The not high defect of the focusing accuracy brought.The present embodiment determines the comparison of the pattern of acquired mask plate using processor
Degree, then determines the distance between object lens and measured object, to realize auto-focusing microscopic system to quilt using contrast
The auto-focusing for surveying object, improves focusing efficiency.
In one embodiment, described automatic as shown in Fig. 2, auto-focusing microscopic system is for observing measured object 206
Focusing microscopic system include tube lens 204, object lens 205, mask plate 202, first light source 201, the first beam splitter 203,
Second beam splitter 207, the first speculum 209, the first charge coupling device 208 and processor (not indicated in figure).It is above-mentioned
The function and light path of device are identical as a upper embodiment, therefore the part for repeating, and the present embodiment is no longer repeated.
In the present embodiment, the auto-focusing microscopic system further includes second light source 210, the second speculum 211, third
Beam splitter 212, the first filter element 216, the second filter element 213, the second charge coupling device 214 and third speculum
215。
The second light source 210 emits the second light beam, and second light beam is injected second speculum 211；Institute
It states the second speculum 211 and second light beam is injected into first beam splitter 203.
First beam splitter 203 carries out light-splitting processing to second light beam, obtains the second transmitting beamlet, described
One of those second transmitting beamlet is injected the tube lens 204 by the first beam splitter 203, it is described one of those the
Two transmitting beamlets are mapped to by the tube lens 204 and the object lens 205 on the measured object 206.
One of those described second transmitting beamlet is reflected on the measured object 206, obtains the second reflected light
Beam, second the reflected beams inject first beam splitter by the object lens 205 and the tube lens 204 successively
203。
Second the reflected beams are carried out light-splitting processing by first beam splitter 203, obtain the second reflected beamlet,
And one of those second reflected beamlet is injected into the third beam splitter 212；The third beam splitter 212 is to described
One of those second reflected beamlet carries out light-splitting processing, and will obtain a beamlet and inject first filter element
216, another beamlet is injected into second filter element 213.
One of those described first reflected beamlet is injected the third beam splitter by first beam splitter 203
212, the third beam splitter 212 carries out light-splitting processing to one of those described first reflected beamlet, and will obtain one
A beamlet injects first filter element 216, another beamlet is injected second filter element 213.
The first predetermined light beam in the light beam that first filter element 26 is received filters out, and by filtered light beam
Inject second beam splitter 207；The first predetermined light beam be the third beam splitter 212 to it is described one of those
Second reflected beamlet carries out the light beam that light-splitting processing obtains.
The second predetermined light beam in the light beam that second filter element 213 is received filters out, and by filtered light
Beam enters second charge coupling device 214；The second predetermined light beam be the third beam splitter 212 to it is described wherein
First reflected beamlet carry out the obtained light beam of light-splitting processing.
Second charge coupling device 214 receives light beam, and forms image using the light beam received.
The light beam of the pattern comprising mask plate is injected the third speculum 215 by the first light source 201；It is described
The light beam of the pattern comprising mask plate is injected first beam splitter 203 by third speculum 215.
First light source is infrared light light source in the present embodiment, and the second light source is white light source.Infrared light light source is used for
By on the pattern projection to measured object of mask plate, white light source is used to be formed the figure of measured object on the second charge coupling device
Picture, and increase the second charge coupling device 214 at image brightness.
In the present embodiment, the second filter element 213 is infrared light optical filter, therefore only includes the light of the pattern of measured object
Beam enters the second charge coupling device, including the light beam of the pattern of mask plate does not inject the second charge coupling device, therefore the
Two charge coupling devices have only formed the image of measured object.In the present embodiment, first filter element 26 is white light optical filter,
Therefore only the light beam of the pattern comprising mask plate injects the second beam splitter, then being only formed on the first charge coupling device
The pattern of mask plate, does not include the pattern of measured object, will not be made to carrying out focusing using reticle pattern in the present embodiment
At interference.
First beam splitter described in the present embodiment, the second optical element or third beam splitter are Amici prism.It is described
Second charge coupling device is surface array charge-coupled device.
In the present embodiment, mask plate is projected onto measured object surface by infrared light light source (i.e. first light source), reaches quilt
It surveys after the light reflection on object surface by object lens, imaging len, Amici prism, the prism that is split is divided into two-beam, wherein a branch of
Light directly projects area array CCD target surface (i.e. the second charge-coupled device of imaging by infrared light filter plate (i.e. filter element)
Part), it is used for the real-time observation of the image of measured object.Another beam passes through Amici prism and speculum, projects line respectively
The A of battle array CCD (i.e. the first charge coupling device), B area.It is flat that the A of line array CCD, B area are symmetrical with the picture being conjugated with area array CCD
Face.It is compared by the contrast of the image received two regions A, B on line array CCD, can detect the direction of defocus
And defocusing amount.Infrared light optical filter is placed before area array CCD, the picture made into onto area array CCD and line array CCD is independent of each other.
The present embodiment is then focused on the pattern projection to measured object of mask plate using the pattern of mask plate, energy
The measured object of enough focusing transparent carries out exact focus, and carries out focusing using the pattern of mask plate and can overcome hole or defect
The not high defect of the focusing accuracy brought.The present embodiment determines the comparison of the pattern of acquired mask plate using processor
Degree, then determines the distance between object lens and measured object, to realize auto-focusing microscopic system to quilt using contrast
The auto-focusing for surveying object, improves focusing efficiency.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also include other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in process, method, article or equipment including the element.
The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, it will be understood by those of ordinary skill in the art that：It still can be to aforementioned each implementation
Technical solution recorded in example is modified or equivalent replacement of some of the technical features；And these modification or
It replaces, the spirit and scope for various embodiments of the present invention technical solution that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of auto-focusing microscopic system, the auto-focusing microscopic system is described automatic right for observing measured object
Focusing microscope system includes tube lens and object lens, which is characterized in that the auto-focusing microscopic system further includes：Mask
Version, first light source, the first beam splitter, the second beam splitter, the first speculum, the first charge coupling device and processor；
The first light source emits the first light beam, and irradiates the mask plate using first light beam, obtains including mask plate
Pattern light beam, the light beam of the pattern comprising mask plate injects first beam splitter；
First beam splitter carries out light-splitting processing to the light beam of the pattern comprising mask plate, obtains the first transmitting sub-light
One of those first transmitting beamlet is injected the tube lens by beam, first beam splitter, it is described one of those
First transmitting beamlet is mapped to by the tube lens and the object lens on the measured object；
One of those described first transmitting beamlet is reflected on the measured object, obtains the first the reflected beams, described
First the reflected beams inject first beam splitter by the object lens and the tube lens successively；
First the reflected beams are carried out light-splitting processing by first beam splitter, obtain the first reflected beamlet, and by its
In first reflected beamlet inject second beam splitter；
The light beam of reception is carried out light-splitting processing by second beam splitter, obtains first object beamlet and the second target sub-light
The first object beamlet is mapped to the first fate of first charge coupling device by beam, second beam splitter
The second target beamlet is injected first speculum by domain, second beam splitter, and first speculum is by institute
State the second presumptive area that the second target beamlet is mapped to first charge coupling device；
The processor calculates the contrast of the image in first presumptive area, obtains the first contrast, calculates described the
The contrast of image in two presumptive areas obtains the second contrast, is determined according to first contrast and the second contrast
The defocus direction of the auto-focusing microscopic system and defocusing amount, and the object is determined according to the defocus direction and defocusing amount
The adjustment amount of mirror position.
2. auto-focusing microscopic system according to claim 1, which is characterized in that the auto-focusing microscopic system
It further include adjuster；
The processor generates regulating command according to the adjustment amount, and the regulating command is sent to the adjuster；
The adjuster adjusts the position of the object lens according to the regulating command.
3. auto-focusing microscopic system according to claim 1, which is characterized in that the mask plate is variable period grating
Mask plate.
4. auto-focusing microscopic system according to claim 1, which is characterized in that the auto-focusing microscopic system
Further include second light source, the second speculum, third beam splitter, the first filter element, the second filter element and the second charge coupling
Clutch part；
The second light source emits the second light beam, and second light beam is injected second speculum；Second reflection
Second light beam is injected first beam splitter by mirror；
First beam splitter carries out light-splitting processing to second light beam, obtains the second transmitting beamlet, described first point
One of those second transmitting beamlet is injected the tube lens, one of those described second transmitting beamlet by optical element
It is mapped on the measured object by the tube lens and the object lens；
One of those described second transmitting beamlet is reflected on the measured object, obtains the second the reflected beams, described
Second the reflected beams inject first beam splitter by the object lens and the tube lens successively；
Second the reflected beams are carried out light-splitting processing by first beam splitter, obtain the second reflected beamlet, and by its
In second reflected beamlet inject the third beam splitter；The third beam splitter to it is described one of those
Two reflected beamlets carry out light-splitting processing, and will obtain a beamlet and inject first filter element, by another sub-light
Beam enters second filter element；
One of those described first reflected beamlet is injected the third beam splitter by first beam splitter, and described the
Three beam splitters carry out light-splitting processing to one of those described first reflected beamlet, and will obtain a beamlet and inject institute
The first filter element is stated, another beamlet is injected into second filter element；
The first predetermined light beam in the light beam that first filter element is received filters out, and filtered light beam is injected institute
State the second beam splitter；The first predetermined light beam is the third beam splitter to one of those described second reflection sub-light
The light beam that Shu Jinhang light-splitting processings obtain；
The second predetermined light beam in the light beam that second filter element is received filters out, and filtered light beam is injected institute
State the second charge coupling device；The second predetermined light beam is the third beam splitter to one of those described first reflection
Beamlet carries out the light beam that light-splitting processing obtains；
Second charge coupling device receives light beam, and forms image using the light beam received.
5. auto-focusing microscopic system according to claim 4, which is characterized in that first filter element is white light
Optical filter, the second filter element are infrared light optical filter.
6. auto-focusing microscopic system according to claim 4, which is characterized in that the first light source is infrared light light
Source, the second light source are white light source.
7. auto-focusing microscopic system according to claim 5, which is characterized in that first beam splitter, second
Optical element or third beam splitter are Amici prism.
8. auto-focusing microscopic system according to claim 5, which is characterized in that second charge coupling device is
Surface array charge-coupled device.
9. according to claim 1 to 8 any one of them auto-focusing microscopic system, which is characterized in that first charge
Coupled apparatus is linear charge-coupled array.
10. according to claim 1 to 8 any one of them auto-focusing microscopic system, which is characterized in that the auto-focusing
Microscopic system further includes third speculum；
The light beam of the pattern comprising mask plate is injected the third speculum by the first light source；The third speculum
The light beam of the pattern comprising mask plate is injected into first beam splitter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810395360.4A CN108646396B (en) | 2018-04-27 | 2018-04-27 | Automatic focusing microscope system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810395360.4A CN108646396B (en) | 2018-04-27 | 2018-04-27 | Automatic focusing microscope system |
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| Publication Number | Publication Date |
|---|---|
| CN108646396A true CN108646396A (en) | 2018-10-12 |
| CN108646396B CN108646396B (en) | 2020-10-02 |
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| CN201810395360.4A Active CN108646396B (en) | 2018-04-27 | 2018-04-27 | Automatic focusing microscope system |
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| CN111443476A (en) * | 2020-04-13 | 2020-07-24 | 腾讯科技（深圳）有限公司 | Microscope auto-focusing method, microscope system, medical device, and storage medium |
| CN111443477A (en) * | 2020-04-13 | 2020-07-24 | 腾讯科技（深圳）有限公司 | Microscope auto-focusing method, microscope system, medical device, and storage medium |
| WO2021184169A1 (en) * | 2020-03-16 | 2021-09-23 | 中国科学院深圳先进技术研究院 | Real-time automatic focusing system for microscope |
| CN114778543A (en) * | 2022-05-23 | 2022-07-22 | 杭州迪安生物技术有限公司 | Active focusing module based on slide scanning imaging and application thereof |
| CN116540393A (en) * | 2023-07-07 | 2023-08-04 | 睿励科学仪器（上海）有限公司 | Automatic focusing system and method, semiconductor defect detection system and method |
| US11940610B2 (en) | 2021-12-13 | 2024-03-26 | National Cheng-Kung University | Autofocus system and autofocus method |
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| CN116540393A (en) * | 2023-07-07 | 2023-08-04 | 睿励科学仪器（上海）有限公司 | Automatic focusing system and method, semiconductor defect detection system and method |
| CN116540393B (en) * | 2023-07-07 | 2024-01-30 | 睿励科学仪器（上海）有限公司 | Automatic focusing system and method, semiconductor defect detection system and method |
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