CN108645694A - The mechanical property in-situ test auxiliary device of flexible substrates film gradient deformation - Google Patents
The mechanical property in-situ test auxiliary device of flexible substrates film gradient deformation Download PDFInfo
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- CN108645694A CN108645694A CN201810406312.0A CN201810406312A CN108645694A CN 108645694 A CN108645694 A CN 108645694A CN 201810406312 A CN201810406312 A CN 201810406312A CN 108645694 A CN108645694 A CN 108645694A
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- connecting rod
- mechanical property
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- 238000012360 testing method Methods 0.000 title claims abstract description 43
- 238000011065 in-situ storage Methods 0.000 title claims abstract description 18
- 239000000758 substrate Substances 0.000 title claims abstract description 15
- 238000011068 loading method Methods 0.000 claims abstract description 16
- 238000005259 measurement Methods 0.000 claims abstract description 9
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 238000012545 processing Methods 0.000 claims description 3
- 238000004891 communication Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract description 40
- 239000000463 material Substances 0.000 abstract description 20
- 239000010409 thin film Substances 0.000 abstract description 11
- 238000011160 research Methods 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000004154 testing of material Methods 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 description 3
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000002929 anti-fatigue Effects 0.000 description 2
- 230000032798 delamination Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 238000004630 atomic force microscopy Methods 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012625 in-situ measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0069—Fatigue, creep, strain-stress relations or elastic constants
- G01N2203/0075—Strain-stress relations or elastic constants
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/026—Specifications of the specimen
- G01N2203/0262—Shape of the specimen
- G01N2203/0278—Thin specimens
- G01N2203/0282—Two dimensional, e.g. tapes, webs, sheets, strips, disks or membranes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/02—Details not specific for a particular testing method
- G01N2203/06—Indicating or recording means; Sensing means
- G01N2203/0641—Indicating or recording means; Sensing means using optical, X-ray, ultraviolet, infrared or similar detectors
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The present invention relates to Material Testing Technologies, more particularly to the mechanical property in-situ test auxiliary device of kind flexible substrates film gradient deformation, include clamping device, gradient loadings load maintainer and Precision measurement unit.The present invention passes through slider-crank mechanism, convert sliding block linear movement to film test piece loading gradient load, the ess-strain of distribution gradient, atomic force microscope directly observe the microstructure change of film under different ess-strains, to obtain the macro-mechanical property of sample.The present invention can reappear operating mode of the thin-film material by gradient loadings, it can be under in-situ observation gradient stress, film different deformation and substrate caking power, film base junction closes energy, under same test environment, compares different deformation, it finds out film base junction and closes critical condition, and film morphology changes when failure, measures deformation, deformation mechanism and mechanical property in whole process, is that elasticity modulus, internal stress and combination of the research novel film material under this operating mode can strong test instruments.
Description
Technical field
The present invention relates to Material Testing Technology field, more particularly to a kind of and scanning electron microscope, atomic force microscope, optics are aobvious
The mechanical property in-situ test auxiliary device for the flexible substrates film gradient deformation that the coordinative composition of equipments such as micro mirror use.
Background technology
Currently, nanocomposite, thin-film material have many advantages, such as good good mechanical property, wear-resistant, high temperature resistant,
It is widely applied in every field, such as face coat, optical thin film, Low-E films, magnetic storage medium, micro-electro-mechanical systems
System（MEMS）Etc..If delamination, cracking, bulge etc. occur in use for thin-film device, show that structure occurs in device
Failure and loss function, this needs to be avoided in practical applications.So the research to thin film mechanical performance and antifatigue energy
The test of power just seems extremely important.But the mechanical property due to micro/nano-scale material differs greatly with macroscopic material, for dividing
The cupping machine for analysing the traditional macros of mechanical parameters such as yield strength, fracture strength, the elasticity modulus of material cannot
Meet the Research Requirements of micro/nano-scale material especially thin-film material.Moreover, can not be to thin-film material with traditional tension test
Microstructure observed in real time, can only use microtechnic to material section carry out observational study.Research thin-film material exists
Microscopic appearance variation and damage status under external force stress state have the mechanical behaviors such as the fracture, the delamination that understand material important
Meaning.It is thereby achieved that in-situ monitoring of the thin-film material under loaded-up condition, just seems very urgent and important.
Currently, lot of domestic and international research all concentrates on the development of film original position stretching/compression set.Such as：CN102346117
Torsion material mechanical performance test device, motor pass through worm and gear to microradian class precision in situ under a kind of disclosed scanning electron microscope
Transmission drives micro- turn of active dental forceps, driven dental forceps to cause stress-strain data equipped with torque sensor test torsional deflection.
CN102359912 discloses original position stretching/compression material mechanical test platform under a kind of scanning electron microscope based on semi-static load,
Dual-motors Driving realizes the microcosmic observation stretched with material after compression-loaded.Prior art research film is in a stretched state
The generation and propagation of Morphology Evolution and micro-crack calculate the mechanics parameters such as yield strength, the fracture strength of film, and estimate whereby
The anti-fatigue ability and service life of film.In terms of compressive load, elastic film is carried in single shaft in main research flexible substrate
Fold or buckling under lotus form problem, and the mechanics parameters such as the elasticity modulus of measuring and calculating film, internal stress and combination energy whereby.Such as
Combined load type material Mechanics Performance Testing device is bent in microscope drop-down disclosed in CN102384875, by driving elbow
Sideway feed makes test specimen occur bending and deformation.
However, existing in-situ test instrument there are the problem of have：（1）It is too simple to simulate operating mode, cannot simulate such as gradient
Gradient deformation caused by load etc.；（2）In-situ test instrument is mutual indepedent with AFM data, it is difficult to reappear thin-film material
The entire dynamic process of deformation or even failure loaded, is not carried out in-situ observation truly；（3）Mechanism is complicated, makes
It is bad to obtain microscopic angle, such as CN102384875, test piece deformation process observation inconvenience etc..
Invention content
In view of the above problems, be to provide one kind can in situ measurement test specimen gradient loadings Gradient for the goal of the invention of the present invention
The mechanical property in-situ test auxiliary device of the flexible substrates film gradient deformation of deformation.
In order to achieve the above object, the scheme that uses of the present invention for：A kind of mechanical property of flexible substrates film gradient deformation is former
Bit test auxiliary device includes clamping device, gradient loadings load maintainer and Precision measurement unit；Clamping device is by frame
Frame, left side tabletting, right side tabletting, connecting rod, axis pin composition, frame is hollow structure, and test specimen both sides are all connected with tabletting, the pressure of side
Piece is fixedly connected on frame, and the tabletting of the other side is fixed on connecting rod, and connecting rod bottom end is hinged on frame, head end is hinged gradient
The connecting rod of load load maintainer；Gradient loadings load maintainer includes connecting rod, sliding block, lead screw, precision DC servo motor,
Connecting rod both ends are respectively articulated with connecting rod and sliding block, and sliding block is driven with wire rod thread, and lead screw is by the precision DC configured with retarder
Servo motor drives, and precision DC servo motor is mounted on frame；Frame, connecting rod, connecting rod, sliding block constitute crank block machine
Structure；Precision measurement unit includes photoelectric encoder, displacement sensor, capture card and PC machine, photoelectric encoder and precision DC
Servo motor is coaxially connected, and displacement sensor is mounted on frame the slider displacement amount that acquires；Photoelectric encoder, displacement sensor warp
It crosses capture card gathered data and is transferred to PC machine processing, PC machine and microscope host communication.
Preferably, institute's displacement sensors are grating scale, grating ruler reading head is mounted on the frame on the outside of lead screw, sliding block
Upper concatenation pointer, grating scale main scale are mounted on pointer, acquire pointer moving displacement information.
Preferably, the tabletting and film test piece contact surface are with decorative pattern.
Preferably, the frame is equipped with the threaded hole that can mount in electron microscope cavity.
Preferably, the elaborate servo direct current generator is equipped with retarder.
The present invention is converted into film test piece loading gradient load by slider-crank mechanism, by sliding block linear movement, is distributed
The ess-strain of gradient, atomic force microscope directly observe the microstructure change of film under different ess-strains, to obtain
The macro-mechanical property of sample.The present invention can reappear operating mode of the thin-film material by gradient loadings, can under in-situ observation gradient stress,
Film different deformation and substrate caking power, film base junction closes energy, under same test environment, compares different deformation, finds out film base junction
Critical condition is closed, and film morphology changes when failure, measures deformation, deformation mechanism and mechanical property in whole process, be
Studying elasticity modulus, internal stress and combination of the novel film material under this operating mode can strong test instrument.
Description of the drawings
Fig. 1 is the schematic three dimensional views of clamping test pieces of the embodiment of the present invention；
Fig. 2 looks up schematic three dimensional views for clamping test pieces of the embodiment of the present invention；
Fig. 3 is Precision measurement unit schematic diagram in the embodiment of the present invention.
Description of symbols in figure：
1- clamping devices, 11- frames, 12- left side tablettings, 13- right side tablettings, 14- connecting rods, 15- axis pins.
2- gradient loadings load maintainers, 21- connecting rods, 22- sliding blocks, 23- lead screws, 24- precision DC servo motors.
3- Precision measurement units, 31- photoelectric encoders, 32- capture cards, 33- grating scales, 34- microscope hosts, 35-PC
Machine, 36- drivers.
4- film test pieces.
Specific implementation mode
For a better understanding of the present invention, with reference to the accompanying drawings and detailed description to technical scheme of the present invention do into
One step illustrates, referring to Fig. 1 to Fig. 3.
The mechanical property in-situ test auxiliary device of flexible substrates film gradient deformation according to embodiments of the present invention includes mainly
Three parts, i.e. clamping device 1, gradient loadings load maintainer 2 and Precision measurement unit 3.
Clamping device 1 includes frame 11, left side tabletting 12, right side tabletting 13, connecting rod 14, axis pin 15, during frame 11 is
Hollow structure, the narrow wide shape under being of film test piece 4,4 both sides of film test piece clamp power transmission with tabletting, and spiral shell is used in left side tabletting 12
Bolt is fixedly connected on frame, and 4 left side of film test piece is fixed and is kept fixed on the frame 11.Bolt is used in right side tabletting 13
It is fixedly connected on connecting rod 14,4 right side of film test piece is clamped on connecting rod 14.It is firm in order to clamp, tabletting and film test piece 4
Contact surface is with decorative pattern.The bottom end of connecting rod 14 is hinged on the frame 11 by axis pin 15, and head end is hinged gradient loadings load machine
The connecting rod 21 of structure 2 rotates under the transmission of connecting rod 21 around bottom end hinge joint.And be cooperation observation, frame 11 is diagonally set
There is the threaded hole that can mount in electron microscope cavity.
Gradient loadings load maintainer 2 include connecting rod 21, sliding block 22, lead screw 23, precision DC servo motor 24, even
21 both ends of extension bar are respectively articulated with right side tabletting 13 and sliding block 22, sliding block 22 and 23 screw-driven of lead screw, to reach fine feeding, silk
Bar 23 is driven by the precision DC servo motor 24 configured with retarder, and precision DC servo motor 24 is installed on the frame 11.
Frame 11, connecting rod 14, connecting rod 21, sliding block 22 constitute slider-crank mechanism, and connecting rod 14 is rotated around 15 hinge joint of bottom end axis pin, given
The stress of the load of film test piece 4 in gradient.
Precision measurement unit 3 includes photoelectric encoder 31, capture card 32, grating scale 33, driver 36 and PC machine 35, light
Photoelectric coder 31 with precision DC servo motor 24 is coaxial is connected, institute's displacement sensors are grating scale 33, and grating scale 33 is read
Head is mounted on the frame 11 in 23 outside of lead screw, and concatenation pointer on sliding block 22,33 main scale of grating scale is mounted on pointer, and acquisition refers to
Needle moving displacement information.Photoelectric encoder 31, grating scale 33 are transferred to the processing of PC machine 35, PC machine by 34 gathered data of capture card
35 communicate with microscope host 34.
Photoelectric encoder 31 can be directed to the pulse of precision DC servo motor 24 or direction controlling provides rate and rotating speed
Feedback signal reaches precise closed-loop control, and grating scale 33 is detected the displacement of sliding block 22, since connecting rod is rigidity,
22 displacement of sliding block can be converted into the rotation angle of connecting rod 21.To realize in-situ test auxiliary device and atomic force microscopy
Mirror data synchronize, and recording sheet material is under by gradient loadings stress, film different deformation and substrate caking power, and film base junction closes energy,
Under same test environment, different deformation is compared, film base junction is found out and closes critical condition, and film morphology changes when failure, measures
Deformation, deformation mechanism in whole process and mechanical property, be study elasticity modulus of the novel film material under this operating mode,
Internal stress and combination can strong test instruments.
Claims (4)
1. a kind of mechanical property in-situ test auxiliary device of flexible substrates film gradient deformation, it is characterised in that：It include folder
Hold mechanism, gradient loadings load maintainer and Precision measurement unit；
Clamping device is made of frame, left side tabletting, right side tabletting, connecting rod, axis pin, and frame is hollow structure, and test specimen both sides are equal
Tabletting is connected, the tabletting of side is fixedly connected on frame, and the tabletting of the other side is fixed on connecting rod, and connecting rod bottom end is hinged on frame
On frame, head end be hinged the connecting rod of gradient loadings load maintainer；
Gradient loadings load maintainer includes connecting rod, sliding block, lead screw, precision DC servo motor, and connecting rod both ends are cut with scissors respectively
Connective pole and sliding block, sliding block are driven with wire rod thread, and lead screw is driven by the precision DC servo motor configured with retarder, accurate
DC servo motor is mounted on frame；Frame, connecting rod, connecting rod, sliding block constitute slider-crank mechanism；
Precision measurement unit includes photoelectric encoder, displacement sensor, capture card and PC machine, photoelectric encoder and precision DC
Servo motor is coaxially connected, and displacement sensor acquires slider displacement amount；Photoelectric encoder, displacement sensor are acquired by capture card
Data are transferred to PC machine processing, PC machine and microscope host communication.
2. the mechanical property in-situ test auxiliary device of flexible substrates film gradient deformation according to claim 1, special
Sign is：Institute's displacement sensors are grating scale, and grating ruler reading head is mounted on the frame on the outside of lead screw, is connected and is referred on sliding block
Needle, grating scale main scale are mounted on pointer, acquire pointer moving displacement information.
3. the mechanical property in-situ test auxiliary device of flexible substrates film gradient deformation according to claim 1, special
Sign is：The tabletting is with film test piece contact surface with decorative pattern.
4. the mechanical property in-situ test auxiliary device of flexible substrates film gradient deformation according to claim 1, special
Sign is：The frame is equipped with the threaded hole that can mount in electron microscope cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810406312.0A CN108645694B (en) | 2018-04-30 | 2018-04-30 | Mechanical property in-situ test auxiliary device for gradient deformation of flexible substrate film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810406312.0A CN108645694B (en) | 2018-04-30 | 2018-04-30 | Mechanical property in-situ test auxiliary device for gradient deformation of flexible substrate film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108645694A true CN108645694A (en) | 2018-10-12 |
| CN108645694B CN108645694B (en) | 2020-11-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810406312.0A Expired - Fee Related CN108645694B (en) | 2018-04-30 | 2018-04-30 | Mechanical property in-situ test auxiliary device for gradient deformation of flexible substrate film |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090090617A1 (en) * | 2005-07-14 | 2009-04-09 | Giauque Pierre H | Method and Apparatus for Producing Controlled Stresses and Stress Gradients in Sputtered Films |
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2018
- 2018-04-30 CN CN201810406312.0A patent/CN108645694B/en not_active Expired - Fee Related
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| CN108645694B (en) | 2020-11-03 |
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