CN108637501A - 基于激光超声技术的硅基内部微结构成型的控制方法 - Google Patents
基于激光超声技术的硅基内部微结构成型的控制方法 Download PDFInfo
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- CN108637501A CN108637501A CN201810485537.XA CN201810485537A CN108637501A CN 108637501 A CN108637501 A CN 108637501A CN 201810485537 A CN201810485537 A CN 201810485537A CN 108637501 A CN108637501 A CN 108637501A
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- silicon substrate
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 87
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 87
- 239000010703 silicon Substances 0.000 title claims abstract description 80
- 239000000758 substrate Substances 0.000 title claims abstract description 74
- 238000000034 method Methods 0.000 title claims abstract description 42
- 238000000465 moulding Methods 0.000 title claims abstract description 18
- 238000012545 processing Methods 0.000 claims abstract description 28
- 238000002474 experimental method Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 241000931526 Acer campestre Species 0.000 claims description 2
- 238000013461 design Methods 0.000 claims description 2
- 230000005284 excitation Effects 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 10
- 230000008569 process Effects 0.000 abstract description 3
- 230000003749 cleanliness Effects 0.000 abstract description 2
- 238000009792 diffusion process Methods 0.000 description 12
- 230000007246 mechanism Effects 0.000 description 5
- 238000003672 processing method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000002210 silicon-based material Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/55—Working by transmitting the laser beam through or within the workpiece for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CN201810329071 | 2018-04-13 | ||
CN2018103290714 | 2018-04-13 |
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CN108637501A true CN108637501A (zh) | 2018-10-12 |
CN108637501B CN108637501B (zh) | 2020-04-24 |
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CN201810485537.XA Active CN108637501B (zh) | 2018-04-13 | 2018-05-21 | 基于激光超声技术的硅基内部微结构成型的控制方法 |
Country Status (1)
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CN (1) | CN108637501B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109350312A (zh) * | 2018-11-29 | 2019-02-19 | 杭州电子科技大学 | 一种基于超声加工的人工骨骼制造方法及装置 |
CN109866531A (zh) * | 2019-02-26 | 2019-06-11 | 王程豪 | 一种粉笔字迹的擦除装置以及应用 |
CN112632725A (zh) * | 2020-12-29 | 2021-04-09 | 杭州电子科技大学 | 一种基于温度梯度声聚焦内腔加工研究方法 |
CN114260576A (zh) * | 2021-12-31 | 2022-04-01 | 东北电力大学 | 一种超声辅助空心钨极gta-激光同轴复合焊接*** |
Citations (7)
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CN102489873A (zh) * | 2011-11-16 | 2012-06-13 | 中国科学院上海光学精密机械研究所 | 在多孔玻璃内部制备三维微流通道的方法 |
CN103025473A (zh) * | 2010-07-26 | 2013-04-03 | 浜松光子学株式会社 | 基板加工方法 |
CN103025471A (zh) * | 2010-07-26 | 2013-04-03 | 浜松光子学株式会社 | 激光加工方法 |
CN103025478A (zh) * | 2010-07-26 | 2013-04-03 | 浜松光子学株式会社 | 基板加工方法 |
CN103212786A (zh) * | 2012-01-20 | 2013-07-24 | 灿美工程股份有限公司 | 激光加工装置及其方法 |
CN103706955A (zh) * | 2013-12-19 | 2014-04-09 | 北京理工大学 | 一种利用电子动态调控制备高深径比三维微通道的方法 |
CN103831536A (zh) * | 2014-03-05 | 2014-06-04 | 北京工业大学 | 飞秒激光在pmma内制造三维微通道的方法及其装置 |
-
2018
- 2018-05-21 CN CN201810485537.XA patent/CN108637501B/zh active Active
Patent Citations (7)
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CN103025473A (zh) * | 2010-07-26 | 2013-04-03 | 浜松光子学株式会社 | 基板加工方法 |
CN103025471A (zh) * | 2010-07-26 | 2013-04-03 | 浜松光子学株式会社 | 激光加工方法 |
CN103025478A (zh) * | 2010-07-26 | 2013-04-03 | 浜松光子学株式会社 | 基板加工方法 |
CN102489873A (zh) * | 2011-11-16 | 2012-06-13 | 中国科学院上海光学精密机械研究所 | 在多孔玻璃内部制备三维微流通道的方法 |
CN103212786A (zh) * | 2012-01-20 | 2013-07-24 | 灿美工程股份有限公司 | 激光加工装置及其方法 |
CN103706955A (zh) * | 2013-12-19 | 2014-04-09 | 北京理工大学 | 一种利用电子动态调控制备高深径比三维微通道的方法 |
CN103831536A (zh) * | 2014-03-05 | 2014-06-04 | 北京工业大学 | 飞秒激光在pmma内制造三维微通道的方法及其装置 |
Non-Patent Citations (2)
Title |
---|
YAN LI,SHI-LIANG QU: "Fabrication of spiral-shaped microfluidic channels in glass by femtosecond laser", 《MATERIALS LETTERS》 * |
曹伟龙等: "微流体***中微通道网络成形工艺研究进展", 《现代制造工程》 * |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109350312A (zh) * | 2018-11-29 | 2019-02-19 | 杭州电子科技大学 | 一种基于超声加工的人工骨骼制造方法及装置 |
CN109866531A (zh) * | 2019-02-26 | 2019-06-11 | 王程豪 | 一种粉笔字迹的擦除装置以及应用 |
CN112632725A (zh) * | 2020-12-29 | 2021-04-09 | 杭州电子科技大学 | 一种基于温度梯度声聚焦内腔加工研究方法 |
CN114260576A (zh) * | 2021-12-31 | 2022-04-01 | 东北电力大学 | 一种超声辅助空心钨极gta-激光同轴复合焊接*** |
CN114260576B (zh) * | 2021-12-31 | 2023-11-24 | 东北电力大学 | 一种超声辅助空心钨极gta-激光同轴复合焊接*** |
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Effective date of registration: 20240607 Address after: B1101, No. 150, Shangzao Building, Gaofeng Community, Dalang Street, Longhua District, Shenzhen, Guangdong 518000 Patentee after: Shenzhen Litong Zhiyuan Technology Transfer Center Co.,Ltd. Country or region after: China Address before: 310018 no.1158, No.2 street, Baiyang street, Hangzhou Economic and Technological Development Zone, Zhejiang Province Patentee before: HANGZHOU DIANZI University Country or region before: China |