CN108627543A - Flexible gas sensor and its production method - Google Patents
Flexible gas sensor and its production method Download PDFInfo
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- CN108627543A CN108627543A CN201710180271.3A CN201710180271A CN108627543A CN 108627543 A CN108627543 A CN 108627543A CN 201710180271 A CN201710180271 A CN 201710180271A CN 108627543 A CN108627543 A CN 108627543A
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- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
Abstract
This application provides a kind of flexible gas sensors and its production method.The flexible gas sensor includes flexible substrates, OFET array inductions module and control and processing circuit module, wherein, OFET array induction modules are arranged on the first surface of flexible substrates, and OFET array induction modules include the different OFET of multiple parallel connections, OFET array induction modules are for perceiving gas and exporting the gas signal of generation；Control and processing circuit module setting on the first surface, and be electrically connecteds with OFET array induction modules, and work for controlling OFET array induction modules and the gas signal exported to OFET array induction modules are handled.The flexibility of the gas sensor preferably, can be applied in the structure of curved surface or other special shapes well.
Description
Technical field
This application involves field of gas detection, in particular to a kind of flexible gas sensor and its production method.
Background technology
With the getting worse of environmental pollution, environment measuring causes more and more concerns, the relevant production of air detection
Product temperature is also higher and higher, and various household grade gas sensors are more and more universal.
Electrical type gas sensor civilian at present is mainly divided to two classes, is optics gas sensor and semi-conductor type respectively
Electrochemical sensor.
Wherein, optics gas sensor calculates gas by analyzing absorbing state of the under test gas under infrared ray
Various composition, sensors with auxiliary electrode need light source emitter and light source detector, volume it is larger and in by environment vapor etc. because
Element is affected.
The application of semi-conductor type electrochemical sensor is more universal, such product is sintered by semiconductor, volume it is larger and
It needs to be packaged, while needing to combine PCB circuit board progress signal enhanced processing that can just obtain final data, be unfavorable for integrating
In structure applied to various special shapes, while sensors with auxiliary electrode needs to carry out gas detection by heating, and energy consumption is higher,
Response time is longer, is affected by environmental factor.
Invention content
The main purpose of the application is to provide a kind of flexible gas sensor and its production method, to solve the prior art
The flexibility of middle gas sensor is poor, it is difficult to be applied to curved surface or the problems in the structure of other special shapes.
To achieve the goals above, according to the one side of the application, a kind of flexible gas sensor, the flexibility are provided
Gas sensor includes：Flexible substrates；OFET array induction modules, are arranged on the first surface of above-mentioned flexible substrates, and on
The different OFET that OFET array induction modules include multiple parallel connections are stated, above-mentioned OFET array inductions module is for perceiving gas simultaneously
The gas signal of generation is exported；Control and processing circuit module, be arranged on above-mentioned first surface, and with above-mentioned OFET arrays
Induction module is electrically connected, work for controlling above-mentioned OFET array inductions module and defeated to above-mentioned OFET array inductions module
The above-mentioned gas signal gone out is handled.
Further, above-mentioned OFET array inductions module is OFET array induction films, and above-mentioned OFET array inductions film includes
Four OFET in parallel.
Further, each above-mentioned OFET includes organic semiconductor layer, and the organic semiconductor layer of four above-mentioned OFET is respectively
Pyrrolo-pyrrole-dione-thieno [3,2-b] thiophene-thiophene copolymers layer, two indenes of benzo and diazosulfide copolymer layer gather
Triaryl amine and indeno fluorene derivative copolymer layer and two indenes of benzo and poly- triaryl amine copolymer layer.
Further, above-mentioned control and processing circuit module include：Control circuit film, with above-mentioned OFET array inductions module
Input terminal electrical connection, the work for controlling above-mentioned OFET array inductions module；Signal processing circuit film, and it is OFET gusts above-mentioned
The output end of row induction module is electrically connected, at the above-mentioned gas signal for being exported to above-mentioned OFET array inductions module
Reason.
Further, above-mentioned signal processing circuit film includes OTFT arrays.
Further, above-mentioned flexible gas sensor includes connecting wire, and above-mentioned connecting wire includes silver nanowire.
Further, above-mentioned flexible substrates are PET base, PVA substrates, PEN substrates or PI substrates.
Further, above-mentioned flexible gas sensor further includes：Power module, with above-mentioned control and processing circuit module with
And above-mentioned OFET array inductions module electrical connection, it is used for above-mentioned control and processing circuit module and above-mentioned OFET array inductions mould
Block is powered；Display module is electrically connected with above-mentioned control and processing circuit module, for show include gas concentration and gas
The data of ingredient.
According to the another aspect of the application, a kind of production method of flexible gas sensor, the production method packet are provided
It includes：On the first surface of flexible substrates be arranged OFET array induction modules, above-mentioned OFET array inductions module include it is multiple simultaneously
The different OFET of connection, above-mentioned OFET array inductions module is for perceiving gas and exporting the gas signal of generation；Above-mentioned
Setting control and processing circuit module, above-mentioned control and processing circuit module and above-mentioned OFET array inductions module on first surface
Electrical connection, above-mentioned control and processing circuit module are for controlling the work of above-mentioned OFET array inductions module and to above-mentioned OFET
The above-mentioned gas signal of array induction module output is handled.
Further, the forming process of above-mentioned OFET array inductions module includes：Using ink-jet printing above-mentioned first
OFET array induction films are printed on surface, form OFET array induction modules, and above-mentioned OFET array inductions film includes organic partly leading
Body layer.
Further, above-mentioned control and processing circuit module include control circuit film and signal processing circuit film, above-mentioned control
It makes and the manufacturing process of processing circuit module includes：Above-mentioned control circuit is formed on above-mentioned first surface using ink-jet printing
Film, above-mentioned control circuit film are electrically connected with the input terminal of above-mentioned OFET array inductions module, and above-mentioned control circuit film is for controlling
The work of above-mentioned OFET array inductions module；Above-mentioned signal processing circuit is formed on above-mentioned first surface using ink-jet printing
Film, above-mentioned signal processing circuit film are electrically connected with the output end of above-mentioned OFET array inductions module, above-mentioned signal processing circuit film
Above-mentioned gas signal for being exported to above-mentioned OFET array inductions module is handled.
Further, above-mentioned production method further includes：The ink printed including nanometer silver paste is existed using ink-jet printing
Silver nanowire is formed on above-mentioned first surface, and then forms silver nanowire conducting wire and/or silver nanowire electrode.
Using the technical solution of the application, OFET array inductions module is arranged with control and processing circuit module in flexible base
On bottom so that the flexibility of entire gas sensor preferably, can apply the structure in curved surface or other special shapes well
In.Also, different gas can be perceived using OFET array inductions module so that flexible gas sensor can be answered widely
During different gas detections.
Description of the drawings
The accompanying drawings which form a part of this application are used for providing further understanding of the present application, and the application's shows
Meaning property embodiment and its explanation do not constitute the improper restriction to the application for explaining the application.In the accompanying drawings：
Fig. 1 shows the structural representation for the flexible gas sensor that a kind of typical embodiment according to the application provides
Figure；
Fig. 2 shows the structural schematic diagrams for the flexible gas sensor that a kind of embodiment of application provides；And
Fig. 3 shows the structural schematic diagram for the flexible gas sensor that a kind of embodiment of application provides.
Wherein, above-mentioned attached drawing includes the following drawings label：
1, flexible substrates；2, OFET array inductions module；3, control and processing circuit module；20、OFET；31, control electricity
Road film；32, signal processing circuit film.
Specific implementation mode
It is noted that following detailed description is all illustrative, it is intended to provide further instruction to the application.Unless another
It indicates, all technical and scientific terms used herein has usual with the application person of an ordinary skill in the technical field
The identical meanings of understanding.
It should be noted that term used herein above is merely to describe specific implementation mode, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, operation, device, component and/or combination thereof.
As background technology is introduced, the flexibility of flexible gas sensor in the prior art is poor, in order to solve such as
On technical problem, present applicant proposes a kind of flexible gas sensors and its production method.
In a kind of typical embodiment of the application, it is proposed that a kind of flexible gas sensor, as shown in Figure 1, this is soft
Property gas sensor include flexible substrates 1, OFET array inductions module 2 with control and processing circuit module 3.Wherein, OFET
(Organic Field Effect Transistor, organic field effect tube) array induction module 2 is arranged in above-mentioned flexibility
On the first surface of substrate 1, as shown in Fig. 2, and above-mentioned OFET array inductions module 2 includes the different of multiple parallel connections
OFET20, above-mentioned OFET array inductions module 2 is for perceiving gas and exporting the gas signal of generation；Control and processing circuit
The setting of module 3 is electrically connected on above-mentioned first surface, and with above-mentioned OFET array inductions module 2, OFET gusts above-mentioned for controlling
The work of row induction module 2 and the above-mentioned gas signal exported to above-mentioned OFET array inductions module 2 are handled.
In the flexible gas sensor of the application, OFET array inductions module and control and processing circuit module setting are existed
In flexible substrates so that the flexibility of entire flexible gas sensor preferably, can be applied in curved surface or other are special well
In the structure of shape.And control in the flexible gas sensor in the application and processing circuit module are to OFET array inductions
The work of module control and handle the gas signal detected so that flexible gas sensor can obtain intuitively
Gas data；Also, the OFET array inductions module of the application can perceive different gas so that flexible gas sensor
It can be widely used in during different gas detections.
In order to enable flexible gas sensor can perceive four kinds or more of gas simultaneously, as shown in Fig. 2, the one of the application
In kind embodiment, above-mentioned OFET array inductions module 2 is OFET array induction films, and above-mentioned OFET array inductions film includes in parallel
Four OFET20.
In another embodiment of the application, each above-mentioned OFET includes organic semiconductor layer, and four above-mentioned OFET's is organic
Semiconductor layer is pyrrolo-pyrrole-dione-thieno [3,2-b] thiophene-thiophene copolymers layer, two indenes of benzo and benzo thiophene respectively
Diazole copolymer layer, poly- triaryl amine and indeno fluorene derivative copolymer layer and two indenes of benzo and poly- triaryl amine copolymer layer.Wherein,
Pyrrolo-pyrrole-dione-thieno [3,2-b] thiophene-thiophene copolymers layer is by material pyrrolo-pyrrole-dione-thieno [3,2-
B] thiophene-thiophene copolymers (DPPTTT) formation, the structural formula of DPPTTT isBenzo two
Indenes is formed with diazosulfide copolymer layer by two indenes of benzo and diazosulfide copolymer (IDT-BT), the structural formula of IDT-BT
ForPoly- triaryl amine is with indeno fluorene derivative copolymer layer by the poly- triaryl amine of material and indenofluorene
Derivative composition copolymer (IF-PTAA) is formed, and the structural formula of IF-PTAA isTwo indenes of benzo with it is poly-
Triaryl amine copolymer layer is formed by two indenes of material benzo and poly- triaryl amine copolymer (IDT-PTAA), and the structural formula of IDT-PTAA isThese four organic semiconductor layers can experience identical gas, than as can experiencing NO2, NO with
CO, they are different the reaction of gas of the same race, that is to say, that after contacting identical gas, the electrical property that respectively generates
Variation be different.After this four OFET experience certain gas, different variations is respectively produced, these variations are formed
Specific combination, it is possible thereby to discrimination gas and its concentration.
In the another embodiment of the application, as shown in figure 3, above-mentioned control and processing circuit module 3 include control circuit
Film 31 and signal processing circuit film 32, wherein control circuit film 31 and the input terminal of above-mentioned OFET array inductions module 2 are electrically connected
It connects, the input electrical signal into above-mentioned OFET array inductions module, and then controls unlatching or the pass of above-mentioned OFET array inductions module 2
It closes, and then controls the work (whether working) of induction module；Signal processing circuit film 32 and above-mentioned OFET array inductions module 2
Output end electrical connection, the above-mentioned gas signal for export to above-mentioned OFET array inductions module 2 handles, these are handled
Calculating, conversion including signal and amplification.Suitable circuit can be arranged come real in those skilled in the art according to actual conditions
Existing corresponding function.Calculate the data that corresponding and gaseous species and concentration are mainly calculated according to electric signal.
In order to make the connecting wire transparence of flexible gas sensor, and then it can neatly be applied to various special fields
Jing Zhong, the preferred connecting wire of the application include transparent silver nanowire.
In the another embodiment of the application, above-mentioned signal processing circuit film 32 includes Organic Thin Film Transistors (Organic
Thin Film Transistor, abbreviation OTFT) array, due to the preferable flexibilities of OTFT, and then advanced optimize flexibility
The flexility of gas sensor further ensures the flexible gas sensor and is applicable to various irregular scenes
In.
In a kind of embodiment in the application, above-mentioned signal processing circuit film further includes counting circuit, the counting circuit with
OTFT arrays be electrically connected, can to gas signal calculate, include gas concentration and gas componant number to obtain
According to.
In the another embodiment of the application, above-mentioned flexible gas sensor further includes external counting circuit, i.e., does not wrap
It includes in signal processing circuit film, which is electrically connected with signal processing circuit film, which can be arranged in example
In computer or mobile phone, the counting circuit is identical as the effect of above-mentioned counting circuit.
Flexible substrates in the application can be any flexible substrates in this field, and those skilled in the art can basis
Actual conditions select suitable flexible substrates.
In order to reduce cost and ensure that there is preferable flexibility, in a kind of embodiment of the application, above-mentioned flexible substrates
For PET base, PVA substrates, PEN substrates, PI substrates or textile material substrate.
In another embodiment of the application, the flexible gas sensor of the application further includes power module and display mould
Block, wherein power module is electrically connected with above-mentioned control and processing circuit module with above-mentioned OFET array inductions module, for upward
State control and processing circuit module and above-mentioned OFET array inductions module for power supply；Display module and above-mentioned control and processing circuit mould
Block is electrically connected, for showing to include gas concentration and gas componant data.
Above-mentioned two module can be user-friendly for multiple choices as external module, and type of attachment is very flexible,
Data can be transferred to display module by the method for electrical connection, can also by wireless method, such as bluetooth, wifi,
ZigBee etc..In view of practical application, power module can take electricity, display module can be according to actual conditions from application main body
Replace with the wireless modules such as bluetooth, by it is obtained including gas concentration and gas componant data transmission to mobile phone or its
He shows equipment.
Power module and display module are necessary two components, for example signal can be transferred to by the method for electrical connection
Display module can also pass through wireless method, such as bluetooth, wifi, ZigBee etc..
In a kind of embodiment of the application, above-mentioned display module is electrically connected with external counting circuit, by counting circuit meter
Calculate as a result, i.e. include that gas concentration and gas componant data are shown.
In the typical embodiment of another kind of the application, a kind of production method of flexible gas sensor is provided, it should
Production method includes：OFET array inductions module 2, above-mentioned OFET array inductions mould are set on the first surface of flexible substrates 1
Block includes the different OFET of multiple parallel connections, and above-mentioned OFET array inductions module 2 is for perceiving gas and believing the gas of generation
Number output；Setting control and processing circuit module 3, form flexible gas sensor shown in FIG. 1 on above-mentioned first surface, on
It states control and processing circuit module 3 to be electrically connected with above-mentioned OFET array inductions module 2, above-mentioned control and processing circuit module 3 are used
Believe in the work for controlling above-mentioned OFET array inductions module 2 and to the above-mentioned gas of above-mentioned OFET array inductions module 2 output
It number is handled.
Above-mentioned production method is simple, can improve the production efficiency of flexible gas sensor, and in above-mentioned making side
In method, OFET array inductions module and control and processing circuit module are respectively provided on a flexible substrate so that entire flexible air
The flexibility of body sensor preferably, can be applied in the structure of curved surface or other special shapes well；Using OFET arrays
Induction module perceives gas, which can perceive different gas so that flexible gas sensor can
It is widely used in during different gas detections.
Production method in order to be further simplified flexible gas sensor, and it is further ensured that prepared flexibility simultaneously
Sensor has preferable flexibility, in a kind of embodiment of the application, beaten on above-mentioned first surface using ink-jet printing
OFET array induction films are printed, form OFET array induction modules, above-mentioned OFET array inductions film includes organic semiconductor layer.The battle array
Row sense film to be formed by repeatedly printing.
In a kind of embodiment of the application, above-mentioned control and processing circuit module include control circuit film 31 and signal processing
Circuit film 32, signal processing circuit film include OTFT arrays, and the manufacturing process of above-mentioned control and processing circuit module 3 includes：It adopts
Control circuit film 31, above-mentioned control circuit film and above-mentioned OFET array inductions are formed on above-mentioned first surface with ink-jet printing
The input terminal of module is electrically connected, and above-mentioned control circuit film is used to control the work of above-mentioned OFET array inductions module；Using ink-jet
Impact system forms above-mentioned signal processing circuit film, above-mentioned signal processing circuit film and above-mentioned OFET arrays on above-mentioned first surface
The output end of induction module is electrically connected, and above-mentioned signal processing circuit film is above-mentioned for being exported to above-mentioned OFET array inductions module
Gas signal is handled.
In a kind of embodiment of the application, the process of the above-mentioned above-mentioned signal processing circuit film of formation includes：It is beaten using ink-jet
Print method prints OTFT arrays, the output end electricity of above-mentioned OTFT arrays and above-mentioned OFET array inductions module on above-mentioned first surface
Connection, above-mentioned OTFT arrays are used to the processing such as be amplified to the above-mentioned gas signal that above-mentioned OFET array inductions module exports.
Also, signal processing circuit film 32 is formed using inkjet printing OTFT arrays in this method, has advanced optimized flexible gas biography
The flexibility of sensor.
In the another embodiment of the application, above-mentioned production method further includes：To include nano silver using ink-jet printing
The ink printed of slurry forms silver nanowire on above-mentioned first surface, and then forms silver nanowire conducting wire and/or silver nanowire electricity
Pole (including the connecting wire of silver nanowire and/or the electrode including silver nanowire).Silver nanowire is transparent material so that even
Connect conducting wire and electrode transparence so that flexible gas sensor can be neatly applied in various special scenes.
In order to enable those skilled in the art can clearly understand the technical solution of the application, below with reference to reality
Apply the scheme that example illustrates the application.
Embodiment
First, OFET array induction films are printed on the first surface of PET base (flexible substrates 1) with ink-jet printing
(it is specifically divided into multiple printing：Grid is first printed, insulating layer is then printed, then print organic semiconductor layer, finally prints electrode),
Above-mentioned OFET array inductions film includes four OFET20 of parallel connection.Each above-mentioned OFET includes organic semiconductor layer, and four above-mentioned
The organic semiconductor layer of OFET is DPPTTT layers, IDT-BT layers, IF-PTAA layers and IDT-PTAA layers respectively.
Form control circuit film 31, control circuit film 31 and OFET array inductions on the first surface using ink-jet printing
The input terminal of film is electrically connected.OTFT arrays and counting circuit are printed on above-mentioned first surface using ink-jet printing, calculated
Circuit is electrically connected with OTFT arrays, and the two forms signal processing circuit film 32, and then forms flexible gas sensing shown in Fig. 3
Device, OTFT arrays are electrically connected with the output end of OFET array induction films, are carried out to the gas signal of OFET array induction films output
The processing such as amplification, and will in treated signal transmission to counting circuit, counting circuit to electric signal be calculated including
Gas concentration and gas componant data.
The flexible gas sensor further includes external display module and power module, power module and control circuit film 31
And signal processing circuit film 32 is electrically connected, and is used for above-mentioned control and processing circuit module 3 and above-mentioned OFET array inductions mould
Block 2 is powered.
Display module is electrically connected with the output end of signal processing circuit film 32, for show include gas concentration and gas
The data of body ingredient.
The production method of the flexible gas sensor is simple, and production efficiency is high, and prepared flexible gas sensor
Flexibility preferably, can apply well in the structure of curved surface or other special shapes；And the flexible gas sensor
Different gas can be perceived so that flexible gas sensor can be widely used in during different gas detections.
It can be seen from the above description that the application the above embodiments realize following technique effect：
1), the OFET array inductions module in the flexible gas sensor of the application and control and processing circuit module setting
On a flexible substrate so that the flexibility of entire flexible gas sensor preferably, can be applied in curved surface or other spies well
In the structure of different shape.And control in the flexible gas sensor in the application and processing circuit module are to OFET array senses
The work of module is answered control and handle the gas signal detected so that flexible gas sensor can obtain directly
The gas data of sight；Also, the OFET array inductions module of the application can perceive different gas so that flexible gas senses
Device can be widely used in during different gas detections.
2), the production method of the application is simple, can improve the production efficiency of flexible gas sensor, and in production method
In, OFET array inductions module and control and processing circuit module are respectively provided on a flexible substrate so that entire flexible gas
The flexibility of sensor preferably, can be applied in the structure of curved surface or other special shapes well；Using OFET array senses
Module is answered to perceive gas, which can perceive different gas so that flexible gas sensor can be wide
It applies generally during different gas detections.
The foregoing is merely the preferred embodiments of the application, are not intended to limit this application, for the skill of this field
For art personnel, the application can have various modifications and variations.Within the spirit and principles of this application, any made by repair
Change, equivalent replacement, improvement etc., should be included within the protection domain of the application.
Claims (12)
1. a kind of flexible gas sensor, which is characterized in that the flexible gas sensor includes：
Flexible substrates (1)；
OFET array inductions module (2) is arranged on the first surface of the flexible substrates (1), and the OFET array inductions
Module (2) includes the different OFET (20) of multiple parallel connections, and the OFET array inductions module (2) is for perceiving gas and will produce
Raw gas signal output；And
Control and processing circuit module (3) are arranged on the first surface, and electric with the OFET array inductions module (2)
Connection, work for controlling the OFET array inductions module (2) and to the OFET array inductions module (2) output
The gas signal is handled.
2. flexible gas sensor according to claim 1, which is characterized in that the OFET array inductions module (2) is
OFET array induction films, the OFET array inductions film include four OFET (20) of parallel connection.
3. flexible gas sensor according to claim 2, which is characterized in that each OFET (20) includes organic partly leading
The organic semiconductor layer of body layer, four OFET (20) is pyrrolo-pyrrole-dione-thieno [3,2-b] thiophene-thiophene respectively
Pheno copolymer layer, two indenes of benzo and diazosulfide copolymer layer, poly- triaryl amine and indeno fluorene derivative copolymer layer and benzo
Two indenes and poly- triaryl amine copolymer layer.
4. flexible gas sensor according to claim 1, which is characterized in that the control and processing circuit module (3)
Including：
Control circuit film (31) is electrically connected with the input terminal of the OFET array inductions module (2), OFET gusts described for controlling
The work of row induction module (2)；And
Signal processing circuit film (32) is electrically connected with the output end of the OFET array inductions module (2), for the OFET
The gas signal of array induction module (2) output is handled.
5. flexible gas sensor according to claim 4, which is characterized in that the signal processing circuit film (32) includes
OTFT arrays.
6. flexible gas sensor according to claim 1, which is characterized in that the flexible gas sensor includes connection
Conducting wire, the connecting wire include silver nanowire.
7. flexible gas sensor according to any one of claim 1 to 6, which is characterized in that the flexible substrates (1)
For PET base, PVA substrates, PEN substrates or PI substrates.
8. flexible gas sensor according to any one of claim 1 to 6, which is characterized in that the flexible gas passes
Sensor further includes：
Power module is electrically connected with the control and processing circuit module (3) and the OFET array inductions module (2), uses
It powers with the OFET array inductions module (2) in the control and processing circuit module (3)；And
Display module, with it is described control and processing circuit module (3) be electrically connected, be used for show include gas concentration and gas
The data of ingredient.
9. a kind of production method of flexible gas sensor, which is characterized in that the production method includes：
On the first surface of flexible substrates be arranged OFET array induction modules, the OFET array inductions module include it is multiple simultaneously
The different OFET of connection, the OFET array inductions module is for perceiving gas and exporting the gas signal of generation；And
On the first surface setting control and processing circuit module, it is described control and processing circuit module with it is OFET gusts described
Row induction module be electrically connected, it is described control and processing circuit module be used for control the OFET array inductions module work and
The gas signal of OFET array inductions module output is handled.
10. manufacturing method according to claim 9, which is characterized in that the forming process of the OFET array inductions module
Including：
It prints OFET array induction films on the first surface using ink-jet printing, forms OFET array induction modules, institute
It includes organic semiconductor layer to state OFET array induction films.
11. manufacturing method according to claim 9, which is characterized in that the control and processing circuit module include control
The manufacturing process of circuit film and signal processing circuit film, the control and processing circuit module includes：
Form the control circuit film, the control circuit film and the OFET on the first surface using ink-jet printing
The input terminal of array induction module is electrically connected, and the control circuit film is used to control the work of the OFET array inductions module；
And
Form the signal processing circuit film on the first surface using ink-jet printing, the signal processing circuit film with
The output end of the OFET array inductions module is electrically connected, and the signal processing circuit film is used for the OFET array inductions mould
The gas signal of block output is handled.
12. production method according to claim 11, which is characterized in that the production method further includes：
Ink printed including nanometer silver paste is formed by silver nanowire, and then shape using ink-jet printing on the first surface
At silver nanowire conducting wire and/or silver nanowire electrode.
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| CN109855656A (en) * | 2019-01-11 | 2019-06-07 | 上海交通大学 | Transistor-type sensing device |
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