CN108615807A - A kind of range and the adjustable flexible sensor of sensitivity and preparation method thereof - Google Patents
A kind of range and the adjustable flexible sensor of sensitivity and preparation method thereof Download PDFInfo
- Publication number
- CN108615807A CN108615807A CN201810497330.4A CN201810497330A CN108615807A CN 108615807 A CN108615807 A CN 108615807A CN 201810497330 A CN201810497330 A CN 201810497330A CN 108615807 A CN108615807 A CN 108615807A
- Authority
- CN
- China
- Prior art keywords
- sensor
- laser
- flexible
- layer
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M9/00—Aerodynamic testing; Arrangements in or on wind tunnels
- G01M9/06—Measuring arrangements specially adapted for aerodynamic testing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
Abstract
The invention belongs to field of sensor preparation, and disclose a kind of range and the adjustable flexible sensor of sensitivity and preparation method thereof.This method includes：(a) it is sequentially depositing laser reactive layer and transparent flexible substrate on the rigid transparent substrate, laser reactive layer is detached with rigid transparent substrate, the double-layer structure of laser reactive layer and transparent flexible substrate layer is obtained with this；(b) according to the type deposition electrode layer of the sensor of required preparation；(c) laser irradiation flexible transparent substrate, ablation decomposition reaction occurs for the energy that laser reactive layer absorbs the laser, the gas generated is reacted to jack up the illuminated region of laser reactive layer and detach with flexible transparent substrate, to form cavity between flexible transparent substrate and laser reactive layer, the preparation of flexible sensor is thus completed.The invention also discloses the products that the preparation method obtains, and through the invention, preparation method is simple, and the transducer sensitivity of preparation is high, range real-time, tunable.
Description
Technical field
The invention belongs to field of sensor preparation, more particularly, to a kind of range and the adjustable flexible sensing of sensitivity
Device and preparation method thereof.
Background technology
Aircraft smart skins are a kind of advanced Intelligent material structures, can be greatly improved aircraft flying speed,
Mobility, environment sensing and security maintenance ability are operated, is generally made of the sensor of specific information, controller and driver,
Have three kinds of information transmission, information processing and driving functions.Wherein aircraft surface pressure measurement is to the pneumatic of exploratory flight device
Characteristic is particularly important.Measure dummy vehicle each component in wind-tunnel, such as wing, empennage, fuselage, control surface, store Combinations table
The pressure in face is distributed, and load is provided for aircraft and its each modular construction Strength co-mputation, is the performance of aircraft and its each component,
The flow behavior studied around model provides data.Minimum pressure point position on wing can be determined by pressure distribution measurement, swashed
Whether wave position, air-flow detach, and act on lift, pressure drag and the position of Center of Pressure on model etc..
Normal pressures distribution uses pressure hole measurement.In wind tunnel test, pressure sensor generally has surface installation, insertion
It installs and scanning three kinds of modes of valve is external to by pipe-line system.But the presence of pressure tap destroys the globality of model, increases
The difficulty of processing of model is added, and cost is high, the period is long.In addition pressure tap changes in neighbouring flow curvature and hole and exists
Whirlpool, irregularly also can be to surveying so as to cause pressure port institute measuring pressure higher than true pressure and different aperture and peritreme
Amount generates different influences.The action principle of partition capacitance sensor and piezoelectric transducer can be summarized as corresponding functional layer knot
Structure deforms, and the capacitance of corresponding region is caused to change, or generates piezoelectric signal based on piezoelectric effect, to realization pair
The perception and measurement of functional layer structure deformation, and realize using this principle the preparation of various pressure, strain transducer, existing skill
A kind of thinking that this type sensor sensitivity is improved in art is optimized to sensor internal structure, and promotion is used for
Deformation extent of the functional layer structure of sensing under external influence, to increase inductive signal.
Invention content
For the disadvantages described above or Improvement requirement of the prior art, it is adjustable soft that the present invention provides a kind of ranges and sensitivity
Property sensor and preparation method thereof, this method obtains cavity structure using laser processing technology, is gas inside the cavity structure,
Outer layer is ultrathin film, and due to its hollow characteristic, under external influence, ultrathin film structure easily deforms, pass through by
The functional layer of sensing is embedded in ultrathin film, can significantly improve the sensitivity of sensor, in addition, by adjusting cavity height and
Internal air pressure size can adjust range and the sensitivity of sensor, and it is low nonadjustable with range thus to solve transducer sensitivity
Technical problem.And the method for using the cavity structure preparing hypersensor.
To achieve the above object, according to one aspect of the present invention, a kind of range and the adjustable flexibility of sensitivity are provided
The preparation method of sensor, which is characterized in that this method includes the following steps：
(a) rigid transparent substrate is chosen, deposition thickness the swashing between 1 micron to 50 microns on the rigid transparent substrate
Light reaction layer, transparent flexible substrate of the deposition thickness between 50 microns to 5 millimeters on the laser reactive layer, by the laser
Conversion zone is detached with the rigid transparent substrate, and the double-layer structure of laser reactive layer and transparent flexible substrate layer is obtained with this, is sentenced
The type of the sensor prepared needed for disconnected；
(b) when the sensor of preparation is piezoelectric transducer, piezoelectric material is used in the laser reactive layer disposed thereon
Sensor function layer, then be used to draw the electrode layer of signal to be measured in the functional layer disposed thereon；When the sensing of preparation
When device is parallel plate capacitor sensor, in the disposed thereon electrode layer of the laser reactive layer；
(c) in the lower section of the flexible transparent substrate using the laser irradiation flexible transparent substrate, wherein the transparent flexible
Mask plate is placed at both ends below substrate, the laser penetration do not place mask plate region flexible transparent substrate expose to it is described
Ablation decomposition reaction occurs for the bottom surface of laser reactive layer, the energy which absorbs the laser, which generates
Gas the illuminated region of the laser reactive layer is jacked up and is detached with the flexible transparent substrate, in the flexibility
Cavity is formed between transparent substrate and laser reactive layer, by the air pressure inside and height and cavity top that adjust the cavity
Laser reactive layer, functional layer or electrode layer thickness realize the adjustment of the flexible sensor range and sensitivity respectively.
It is further preferred that when the sensor of preparation is parallel plate capacitor sensor, it, need to also be after step (c)
The transparent flexible substrate lower section and the cavity corresponding position depositing electrode layer.
It is further preferred that in step (b), the electrode layer is divided into two parts, and a part is arranged in the sky
The top of chamber, another part are arranged in the top of non-cavity.
It is further preferred that in step (a), the rigid transparent substrate uses the material of resistance to 300 DEG C or more high temperature, excellent
Choosing uses quartz glass or sapphire.
It is further preferred that in step (a), the laser reactive layer preferably uses polyimides, polymethylacrylic acid
Methyl esters or various photosensitivity Other substrate materials.
It is further preferred that in step (a), the flexible transparent substrate preferably use dimethyl silicone polymer, poly- pair
Ethylene terephthalate or platinum catalysis silicon rubber, the deposition method of the flexible transparent substrate is to preferably using rotary coating, painting
Film or die casting.
It is further preferred that in step (b), the piezoelectric material preferably uses polyvinylidene fluoride material and its derivative
Object or piezoelectric high polymer nylon.
It is further preferred that in step (b), the thickness of the sensor function layer is at least below the laser reactive layer
/ 5th of thickness.
It is further preferred that the thickness of the electrode layer is no more than 100 nanometers.
It is another aspect of this invention to provide that providing a kind of adjustable soft using a kind of range described above and sensitivity
Flexible sensor prepared by the preparation method of property sensor.
It is further preferred that the flexible sensor is a unit, battle array is formed by the arrangement and combination of multiple units
The cavity of rowization sensor, each unit in the array sensor is interconnected, and is sensed in the array with setting
Air storing cavity outside device is connected, and the air pressure of each unit cavity and the tune of height are realized by changing the air pressure in air storing cavity
It is whole, the adjustment of the array transducer sensitivity and range is realized with this.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect：
1, the cavity structure proposed by the present invention generated using laser processing prepares fexible film pressure sensor, has height
Sensitivity and the adjustable characteristic of range/sensitivity, are applicable to the pressure measurement requirement of wind-tunnel under different Mach number, by large area,
Array is arranged, and the global measuring of pressure may be implemented, and overcomes normal pressures measurement and pressure tap and discrete type is needed to measure
Disadvantage, this kind of sensor is ultra-thin and conformal can improve measurement in aircraft surface to hardly be had an impact to air-flow
Accuracy；
2, the side of cavity of the present invention is flexible transparent substrate, and the other side is the polymer thin that ablation effect occurs with laser
Film, laser penetration transparent substrate are absorbed by other side thin polymer film, and the polymer thin-film material for closing on transparent substrate is burnt
Gas is reacted and is generated in erosion, and gas makes the interface being closed originally detach, and jacks up the film of side, forms cavity structure,
Violent absorption due to polymer to ultraviolet light, ablation depth are only tens nanometer, and therefore, this ablation process is to micron dimension
Film it is almost lossless, the cavity structure outer wall thickness being finally prepared can be reduced to micron dimension, to greatly carrying
High deformation extent of the cavity structure under external influence, realizes the preparation of hypersensor；
3, the size of cavity structure of the invention, shape, height, internal air pressure can be realized by changing technological parameter
It adjusts, and then to the sensitivity of sensor detection, range is regulated and controled, and various working is adapted to, the gas prepared using this kind of method
The characteristics of shape of cavity configuration can be with arbitrary graphic pattern, in conjunction with condenser type and piezoelectric type two types, by sensor large area, battle array
Prepared by rowization, while realizing static and dynamic pressure, global measuring, overcome normal pressures measurement and need pressure tap and discrete
The shortcomings that formula measures；
4, for sensor provided by the invention due to that can control the sensor thickness in a few micrometers, overall structure is thin, altogether
Shape hardly has an impact air-flow after aircraft surfaces, improves the accuracy of measurement, can be in each battle array using this method
The connection of fluid channel is realized in rowization air cavity, can in real time be adjusted inside sensor air cavity by controlling the pressure of external air cavity
Pressure size, air cavity height meet different Mach to realize to the real-time control of sensor detectivity and investigative range
The pressure measurement requirement of several lower wind-tunnel also has in addition, since the sensor has the characteristics such as ultra-thin, hypersensitive in electronic skin
Good application prospect.
Description of the drawings
Fig. 1 is a kind of preparation process schematic diagram of flexible sensor constructed by preferred embodiment according to the invention；
Fig. 2 is the operation principle schematic diagram of the flexible sensor constructed by preferred embodiment according to the invention；
Fig. 3 is the change technological parameter constructed by preferred embodiment according to the invention to regulate and control biography according to the present invention
The sensitivity of sensor and the principle schematic diagram of range；
Fig. 4 is to realize array sensor using one step of photomask constructed by preferred embodiment according to the invention
The schematic diagram of preparation；
Fig. 5 is array collecting sensor signal and the process chart constructed by preferred embodiment according to the invention；
Fig. 6 is the method for the sensitivity and range of the real-time monitoring sensor constructed by preferred embodiment according to the invention
Schematic diagram.
In all the appended drawings, identical reference numeral is used for indicating identical element or structure, wherein：
10- rigid transparent substrate 20- laser reactive layer 11- flexible transparent substrate 30- sensor function layers 40- is powered on
Upper electrode 42- right over the layer 401- patterning upper electrode layer 41- lower electrode layer 402- sensor unit 43- cavitys of pole
Non- cavity area upper electrode 44- sensor cavities structure outer wall 45- array sensor unit 46- array sensors
The fluid channel 48- of unit 47- connection sensor units is used to implement the air storing cavity 63- patternings of the sensor array of regulation and control
Corresponding cavity structure 72- gusts of the cavity structure 71- arrays sensor unit 45 of photomask 70- sensor units
46 corresponding cavity structure of rowization sensor unit
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
It does not constitute a conflict with each other and can be combined with each other.
Fig. 1 is a kind of preparation process schematic diagram of flexible sensor constructed by preferred embodiment according to the invention, such as
Shown in Fig. 1, the preparation of the sensor usually requires to include the following steps：
Step 1：Prepare one piece of rigid transparent substrate 10, and deposition laser reactive layer 20 on the transparent substrate.The transparent base
Plate needs have high-permeability to laser.As quartz glass or sapphire substrate can be used.The laser reactive layer of deposition is
The key for forming cavity structure, needs to meet following condition：1, the conversion zone can acutely absorb laser, and it is logical to absorb depth
Often need to be less than 100 nanometers.It acutely heats up after absorbing the laser reactive layer in depth by the irradiation of laser, it may occur that ablation
Equal decomposition reactions.The reaction can make laser reactive layer that interfacial separation occur with transparent substrate, and generate bulk gas product.2, should
Conversion zone cannot be fragile material, while also need have certain flexibility and ductility, should to meet the jack-up of the gas after ablation
When conversion zone forms cavity structure, which will not occur fracture and damage easily.(such as polyimides gathers number of polymers
Methyl methacrylate or various photosensitivity Other substrate materials) be the laser reactive layer ideal chose, utilize ultraviolet laser
Ablation aggregation can occur interfacial separation and generate bulk gas product.Preferably, polyimides may be used as laser
Conversion zone.The material is widely adopted in electronic manufacture as flexible insulating substrate due to its outstanding machinery, electric property.
Polyimides can be detached by the excimer laser ablation of 308nm from rigid substrates, and generate bulk gas product, and such as two
The various gases such as carbonoxide, carbon monoxide.The technique has been widely suitable for laser lift-off technique and has been used to prepare Flexible Displays system
In making.The polymer materials such as polyimides can be deposited on by modes such as rotary coatings on transparent rigid substrate, and thickness is logical
Often control then carries out high-temperature process, makes polyimide material imidization, obtain good machine at a few micrometers to some tens of pm
Tool, electric property.
Step 2：In laser reactive layer disposed thereon layer of transparent flexible base board 11, the substrate material as flexible sensor
Material.The transparent material needs have high-penetration to laser, such as dimethyl silicone polymer (PDMS), polyethylene terephthalate
Ester (PET), platinum catalysis silicon rubber (Ecoflex) etc..The flexible transparent substrate can apply film preparation, or profit by rotary coating
The liquid flexible transparent material layer that thickness is uniform, highly controllable is prepared above laser reactive layer with the methods of die casting, and
Cured to obtain.The transparent material needs to form good interfacial contact with laser reactive layer, avoids hole, empty production
It is raw.The thickness of the transparent material layer is typically much deeper than laser reactive layer, and thickness can be controlled in hundreds of microns to several millimeters.Cause
This flexible base board determines the degree of deformability of final flexible sensor.In general, substrate is thinner, degree of deformability is got over
It is good.
Step 3：Rigid substrates are detached using laser lift-off, obtain the bilayer of flexible transparent substrate and laser reactive layer
Structure.Laser penetration transparent rigid substrate 10, is absorbed by laser reactive layer 20, and interface reverse side occurs, leads to interfacial separation.Laser
Stripping technology is widely used at present in Flexible Displays manufacture, for detaching flexible display and rigid glass substrate, technique
Very ripe, this will not be repeated here.It should be noted that laser reactive generally can not be deposited directly in flexible transparent substrate
Layer, and need to obtain the double-layer structure using laser lift-off.The reason is that, in general, laser reactive layer needs high temperature
Curing process, general flexible transparent substrate are difficult to bear.Such as, polyimides needs long-time high temperature (200-300 degree) ability
It realizes imidization, obtains good mechanically and electrically performance, general transparent flexible substrate for a long time send out at such a temperature by exposure
Solution estranged.If laser absorption layer can be deposited directly to flexible transparent substrate or sensor is not necessarily to flexibility, step 2 can be omitted
With step 3.
Step 4：In laser reactive layer disposed thereon sensor function layer 30.The functional layer is to realize sensor function
It is crucial.The signal generated using functional layer material deformation realizes the measurement to related physical quantity.The functional layer can be selected
Piezoelectric material, such as Kynoar (PVDF) material and its derivative, piezoelectric high polymer nylon.Piezoelectric material functional layer is becoming
When shape, can builtin voltage changes in distribution be led to due to piezoelectric effect, by may be implemented the measurement of voltage to its deformation extent
Sensing and measurement.For capacitance sensor, laser reactive layer collectively constitutes functional layer with cavity, which can be omitted, work(
When ergosphere deforms, interelectrode capacitance changes, and progress can be deformed to it by the variation of capacitance between measuring electrode
Sensing and measurement.The thickness of functional layer be much smaller than laser reactive layer, be normally controlled in 1 micron hereinafter, functional layer thickness effect
Cavity heaves degree, avoids too thick leading to sensitivity decrease.Rotary coating, the techniques such as magnetron sputtering can be utilized to be sunk
Product, obtains the film of high quality as functional layer structure.
Step 5：Side's deposition upper electrode layer 40 on a functional, using lead connection electrode, the other end accesses measuring apparatus
Realize the measurement to signal specific.The electrode can be deposited by magnetron sputtering or vacuum evaporation mode, can select metal material
Material, such as gold, copper.Electrode layer usually requires to be patterned according to the design and arrangement of sensor.Patterned method can be with
By deposition when above covering hollow out mask plate realize.The thickness of the electrode layer deposited in the way of magnetron sputtering or vacuum evaporation
Degree is usually 100 nanometers or less.
Step 6：Flexible transparent substrate 11 is penetrated using laser 60, is irradiated in the laser reactive bed boundary 50 of specific region.
Laser is irradiated specific region with certain projectile energy, irradiation frequency.The projectile energy of laser, can be with irradiation frequency
It is controlled by the power and pulse frequency that adjust laser.It realizes and specific region is irradiated, it can be in transparent flexible substrate
Mask plate 62 is added in incident side, and mask plate can carry out mechanical processing mode by the material sheet to extinction or glitter flakes
Obtain.For laser in scanning, mask plate entity part can absorb or reflection laser, the laser reactive layer of mask plate corresponding region
Interface 51 is not affected by irradiation.Laser can pass through the hollow-out part of mask plate, irradiate the laser reactive bed boundary 50 of corresponding region.
Step 7：Laser reactive layer is decomposed reaction under the irradiation of laser, and laser reactive bed boundary detaches.Swash
Light reaction bed boundary generates a large amount of laser reactive layer gaseous products when decomposing.It is still closed due to not irradiating interface 51, gas
It can not be discharged, then form closed structure.When gas flow gradually increases, the internal gas pressure in closed area gradually rises
Height, and topmost thin film is jacked up upwards.Ultimately form the cavity structure 70 with certain altitude.The shape of cavity structure 70 is by laser
The shape of irradiation area determines.Since the thickness of functional layer 30 and electrode layer 40 is much smaller than laser reactive layer 20,30 He of functional layer
The rigidity of electrode layer 20 can be ignored relative to laser reactive layer 20.The height and internal gas pressure of cavity structure 70, by swashing
The rigidity of light reaction layer 20 determines.The Regulation Mechanism of cavity inside air pressure and height parameter is described in detail below.
Step 8：If mentioned sensor is parallel plate capacitor sensor, need heavy in the transparent flexible substrate other side
Product lower electrode layer 41 corresponding with upper electrode layer, to make upper/lower electrode form two electrodes of parallel plate capacitor.If preparing
Sensor is planar capacitance sensor or piezoelectric transducer, and the step is negligible.Specific deposition method and deposition top electrode 40
Method is similar.
The sensor prepared in the way of this kind can delicately perceive the variation of ambient pressure.It is passed if parallel plate capacitor
Sensor then has：
ε in formula0For permittivity of vacuum, εl、εairThe respectively dielectric constant of laser reactive layer and empty intracavity gas, dl、
dairThe respectively thickness of laser reactive layer and cavity layer.
Sensor cavities internal gas pressure, which is used as, refers to pressure, and under the action of ambient pressure, cavity film becomes
Shape, dlIt is almost unchanged in deformation process, dairReduce, the capacitance between two-plate increases therewith.If plane capacitance pressure sensing
The deformation of device, cavity film makes two interelectrode dielectric fields change, to the variation of plane capacitance.If piezoelectric sensing
Device, piezoelectricity functional layer film deform and generate electric signal.By obtaining the deformation feelings of air cavity outer wall to the measurement of electric signal
Condition, and then realize perception and measurement to extraneous pressure change.
As shown in Fig. 2, for the operation principle schematic diagram of sensor according to the present invention.Schematic diagram chooses one typically
Sensor unit illustrates.The sensor unit include transparent flexible substrate 11, cavity 70, laser reactive layer 20, functional layer 30,
Upper electrode 43, non-cavity area upper electrode 42, lower electrode 41 right over cavity.When in stable external environment,
The sensor unit internal gas pressure, wraps up the tension of the outer membrane of air cavity, is balanced with ambient pressure, and sensor air cavity is high
Degree stabilizes to H1.When there are ambient pressure or ambient pressure change, above-mentioned equilibrium state is broken, outside sensor cavities structure
Wall film can deform.Air cavity internal pressure can change to reach new balance.If temperature remains unchanged, according to ideal
The volume of the equation of gas state, air cavity internal gas can change, and since the shape of air cavity is fixed, what is finally changed is
The height of air cavity.So, ambient pressure is received right over sensor unit such as figure, cavity is compressed, and internal volume is reduced, cavity
Height change is H2, and air pressure inside is increased to balance impressed pressure.The variation of the height of sensor unit internal cavities makes insertion
The functional layer structure of air cavity outer wall deforms, to realize the detection deformed to air cavity using detection functional layer deformation, into
And realize the perception and measurement to ambient pressure.
There are many operating modes for this kind of sensor.It include mainly following three kinds：1, plane capacitance sensor.Laser reactive
Layer is with cavity collectively as functional layer.Plane electricity is constituted right over cavity between upper electrode 43 and non-cavity area upper electrode 42
Container, under extraneous gas pressure, air cavity outer wall film deforms, and dielectric field changes in cavity, plane capacitance also with
Change, and then ambient pressure can be perceived.Other than sensitive to pressure change, planar capacitance sensor is in model
Also certain dielectric field can be formed, the detection for structural damages such as model surface or underbead cracks.2, parallel plate capacitor formula passes
Sensor.Laser reactive layer is with cavity collectively as functional layer.It is constituted between upper electrode 43 and lower electrode 41 right over cavity
Plane-parallel capacitor.The effect of ambient pressure causes parallel plate capacitor to change, to realize so that deforming for film
The measurement of pressure.3, piezoelectric transducer：When air cavity stereomutation, air cavity outer wall deforms, if functional layer is piezoelectric material,
When piezoelectric membrane deforms, due to the voltage right over piezoelectric effect cavity between upper electrode 43 and non-cavity area upper electrode 42
It changes, it can be by obtaining the deformation of air cavity outer wall to the measurement of electric signal, and then realize to extraneous pressure change
Perception and measurement.Due to capacitance sensor depend on functional layer itself deformability, therefore apply in general to static pressure or
The measurement of low frequency, and piezoelectric pressure indicator is more sensitive to vibration signal, is suitable for the measurement of high frequency or fluctuation pressure.
If two kinds of sensors are combined, the measurement range of pressure can be expanded.Meanwhile it can also be achieved flight in conjunction with planar capacitance sensor
The monitoring structural health conditions of device.
As shown in figure 3, regulating and controlling the sensitivity of sensor according to the present invention and the original of range to change technological parameter
Rationality schematic diagram.The sensitivity of the sensor of this kind construction and range are by initial pressure inside air cavity, air cavity outer wall rigidity, air cavity
Elemental height determines.Air cavity outer wall rigidity is smaller, and air cavity air pressure inside is lower, and the volume change under extraneous pressure change is got over
Significantly, to which outer wall deformation is bigger, the signal measured is stronger, to which sensor has higher measurement sensitivity.Air cavity is initial
Height is bigger, and the deformable amplitude of outer wall is bigger, and the range of appreciable ambient pressure is bigger, to which sensor has bigger
Range.Above-mentioned initial pressure, air cavity outer wall rigidity, gas referring to sensor measurement sensitivity and inside the relevant air cavity of range
Three parameters of chamber elemental height can flexibly be regulated and controled during preparing sensor by changing technological parameter.Tool
The regulation and control method of body is change laser irradiation parameters appropriate and change air cavity outer wall thickness.Utilize the laser irradiation of certain parameter
Behind interface, interfacial separation, boundary material is decomposed, and generates gaseous product.Gas confinement cannot exclude in closed structure, with
The increase of gas generation, internal pressure gradually rises, and gas jacks up cavity outer wall 44, forms the cavity knot with certain altitude
Structure.When gas gross is stablized, influence final cavity height is the bending stiffness (deformation rigidity) of cavity outer wall 44.Outside cavity
The bending stiffness of wall 44 is bigger, and the air pressure that gas jacks up needs upwards is bigger, and the volume of gas is smaller, and cavity height is lower.Such as
Figure, when air cavity outer wall is thicker, with the 61 irradiation portion interface region of laser compared with low energy, lower frequency.Low frequency low energy swashs
The boundary material of light ablation is limited, and it is limited to generate gas flow.Limited gas is difficult to jack up the larger thicker gas of deformation rigidity
Cavity outer wall, finally obtained air cavity height is relatively low, and air pressure inside is relatively low.As schemed, if in the case where not changing air cavity outer wall,
Using energy higher, the higher laser 62 of frequency irradiates.The boundary material of the laser ablation of high energy high frequency increases, the gas of generation
Amount increase.A large amount of gas can be obtained the air pressure inside of bigger to further jack up air cavity outer wall by compression.Final
The air cavity structure height arrived increases, and air pressure inside increases.It is rigid to reduce its deformation when the thickness for reducing air cavity outer wall such as figure
When spending.With the 61 irradiation portion interface region of laser compared with low energy, lower frequency.Although the boundary of the laser ablation of low frequency low energy
Face substance is limited, and it is limited to generate gas flow.But since the deformation rigidity of air cavity outer wall reduces, lower air pressure inside is the same can be with
Jack up cavity outer wall.Finally obtained air cavity structure has certain height, while air pressure inside is limited.
Cavity outer wall 44 is usually made of three-decker, respectively laser reactive layer 20, sensor function layer 30 and is powered on
Pole layer 40.Since the thickness of functional layer 30 and electrode layer 40 is generally much less than laser reactive layer 20.The bending stiffness of film and its
The cube of thickness is directly proportional, therefore functional layer 30 and the bending stiffness of electrode layer 40 can be ignored relative to laser reactive layer.
Preferably, using Kapton as when laser reactive layer, typical thickness is 1 micron to 50 microns.Polyimides is thin
Film itself can be used as the dielectric layer of capacitance sensor, and sensor is not necessarily to deposit functional layers at this time.Utilize vacuum evaporation process system
The thickness of standby metal electrode layer is usually at 100 nanometers hereinafter, the bending stiffness of Kapton is about the 200 of electrode layer
Times or so.Therefore it is only necessary to consider influence of the deformation rigidity of Kapton to cavity height.In preparation process
In, it when Kapton is thicker, is irradiated using low frequency, low-energy laser 61, obtained relatively low, the internal pressure of air cavity height
It is moderate.For example, when the thickness of polyimide layer is 20 microns, using the excimer laser of 308 nano wave lengths,
With 160mJ/cm2Energy density, irradiated with the frequency of per unit area irradiation 10 times, obtained cavity height is about 1.5 microns.
If wish to increase internal air cavity pressure while improving air cavity height to expand transducer range.Polyimides can not changed
Under the premise of layer thickness, using high-energy, the laser 61 of high irradiation frequency, makes more substances that ablation reaction occur, generate bigger
The gas of amount.Obtained air cavity height increases, and internal pressure increases.Such as when the thickness of polyimide layer is 20 microns,
Using the excimer laser of 308 nano wave lengths, with 220mJ/cm2Energy density, with 20 frequencies of per unit area irradiation
Irradiation, obtained cavity height is about 3 microns, and cavity height operating mode compared to before is doubled.If being intended merely to improve air cavity
Height is to expand transducer range, it is undesirable that dramatically increases air cavity pressure to reduce transducer sensitivity.It can prepare
When reduce laser reactive layer thickness.Such as when the thickness of polyimide layer is 10 microns, the standard of 308 nano wave lengths is utilized
Molecular laser, with 160mJ/cm2Energy density, with 10 irradiation frequencies of per unit area irradiation, obtained cavity height
Also about 3 microns.For different laser reactive layer materials, laser reactive layer thickness, laser processing technology parameter, need into
Technological experiment determines the cavity height obtained under different parameters combination and air pressure inside situation to row repeatedly, to real in the preparation
Now to the control of transducer sensitivity and range.
Fig. 4 is the schematic diagram that the preparation of array sensor is realized using one step of photomask.Array sensor can be with
Realization measures the multiple spot of measured zone simultaneously, to obtain the whole audience information of the measurement field.Using the flexibility of laser processing,
Can in laser irradiation using photomask to form arbitrary graphic pattern, the cavity structure of General Cell arrangement, to real
A laser scanning is now utilized to realize the preparation of high density arrays sensor.As shown, in laser irradiation, in transparent base
Place photomask 63 in plate incidence side.The photomask allows laser to pass through in specific region, is absorbed in specific region
Or reflection incident laser, prevent laser from passing through.If the requirement on machining accuracy to array sensor is not high, which can be with
By way of mechanical processing, on the impermeable stimulative substance tablet such as metal scribing pierced pattern obtains.Using laser according to default
Path scan entire transparent substrate.The laser of non-hollow-out part fails to penetrate mask plate, and the interface of corresponding region is not affected by photograph
It penetrates.The hollow-out part laser of mask plate can pass through, and corresponding region interface occurs to detach and formed cavity structure, each individual
Cavity structure can form a sensor unit.The shape of final sensor unit, rule of arranging, arrangement density etc. is by mask
The shape control of the hollow-out part of version.If wanting to prepare the array biography that as shown in Figure 44 multiply 3 arrangements on a lens substrate
Sensor.Then photomask 63 is 4 circular holes for multiplying 3 arrangements.Each hollow-out part forms individual air cavity, to form one
A independent sensor unit.Laser scans entire transparent substrate according to predefined paths, and corresponding hollow-out part forms 4 and multiplies 3 arrangements
Round air cavity 70, can prepare 4 sensor arrays for multiplying 3 arrangements using the array air cavity.The pattern of the array polarizing electrode
Change can by deposition when mask film covering version patterned to obtain.To complete entire array using a laser scanning
The preparation of sensor.
Fig. 5 is the Signal acquiring and processing flow chart of array sensor.It is more by front end if capacitance sensor array
Path multiplexer (MUX) is connected to capacitive digital converter (AD7747), and capacitance signal is converted directly into voltage digital signal, from
And realize the measurement of entire array capacitance, miniature control unit (MCU) plays the role of control to whole work process.If
Piezoelectric signal is amplified and is filtered first, is then attached to Front End Multiplexer by piezoelectric-array sensor array
(MUX), digital signal is converted to by capture card A/D, MCU plays the role of control to whole process, and final data passes through USB
Output is to PC or is further processed.
Fig. 6 is the method schematic diagram of the sensitivity and range of the sensor involved by a kind of real-time control this patent.It is different
Wind tunnel test, under different Mach numbers, the range of required pressure measurement and sensitivity are often different, and for hypervelocity wind tunnel
Experiment, model surface pressure span is big, needs the pressure sensor of a variety of ranges, therefore the sensor of controllable range and sensitivity
With wide applicability, different wind tunnel pressure measuring test requirements documents are disclosure satisfy that.This method is referred to using above-mentioned, can be utilized and be covered
Film version is to this feature of the shape progress arbitrary graphic patternization of array cavity.The fluid channel 47 of sensor array 45 is connected.It is micro-
The purpose of runner 47 is that the air cavity of each sensor unit is connected with other sensors unit, forms the air cavity of a unicom.
Air cavity is finally communicated to air storing cavity 48 using fluid channel.The volume of air storing cavity 48 the total volume of entire unicom air cavity occupy compared with
Big share.It can be by pressing to air storing cavity 48, to change the pressure inside entire air cavity, and then adjust and be connected together
The height and air pressure inside of the air cavity of each sensor unit realize the real-time control to each sensor unit range and sensitivity
System.Such as figure, the two completely the same sensor arrays 45,46 in left and right are prepared on one piece of substrate, the sensor of each array is equal
It is connected to air storing cavity 48 by fluid channel 47.The two sensor array air cavitys in left and right are respectively 71,72.Air cavity 71 and gas when initial
Chamber 72 is highly consistent, and pressure is consistent.By regulate and control pressure and the air cavity height of 46 inside air cavity of the right sensor array array with
It realizes to the sensitivity of the sensor array and the adjustment of range.The air storing cavity of sensor array on the right of pressable.It realizes to the right side
The supercharging of side sensor array air pressure inside.At this point, raising of the air cavity 72 of the right sensor 46 due to air pressure inside, air cavity is high
Degree increases.For the sensor array 46 of the right array relative to uninflated left sensor array 45, sensitivity and range are equal
Changed.Its degree changed can be controlled by squeezing the degree of air cavity.This method may be implemented to the present invention
The sensitivity of mentioned sensor unit and range adjust and control in real time.
The laser reactive layer above energy density, irradiation frequency and the cavity, functional layer by adjusting the laser or
The thickness of electrode layer realizes the adjustment of the height and air pressure inside of cavity, the height of cavity with above air pressure inside and the cavity
The thickness of laser reactive layer, functional layer or electrode layer realizes the adjustment of the flexible sensor range and sensitivity respectively.
The cavity structure shape size of the sensor prepared in the way of this kind is controllable, and cavity height is controllable, cavity inside
Gas pressure is controllable, can realize the regulation and control to sensor measurement sensitivity, range in the preparation.The size and shape of the cavity
Depending on the range of laser irradiation, the height and internal pressure of the cavity depend on generating the mole and cavity outer wall of gas
Rigidity can dramatically increase the gas that reaction generates, to increase cavity height and inside using high energy laser reirradiation
Pressure, under same gas amount, cavity outer wall rigidity is bigger, and it is bigger that gas jacks up the required pressure of outer wall, final cavity volume
Smaller, height is lower, and cavity outer wall rigidity and gas yield have codetermined cavity height and pressure, cavity height and internal gas
Body pressure can significantly affect the final sensitivity of sensor and range, to realize the control to sensor parameters.
The preparation of array sensor may be implemented by mask plate, while can be set by carrying out patterning to air cavity
Meter is made each array air cavity be connected with each other using fluid channel, and is ultimately connected to external air storing cavity.By controlling external gas storage
The control of cavity volume, can be with the pressure and air cavity height of real-time control sensor internal air cavity, to realize to sensor array
Sensitivity and range real-time monitoring.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all within the spirits and principles of the present invention made by all any modification, equivalent and improvement etc., should all include
Within protection scope of the present invention.
Claims (10)
1. the preparation method of a kind of range and the adjustable flexible sensor of sensitivity, which is characterized in that this method includes following step
Suddenly：
(a) rigid transparent substrate is chosen, laser of the deposition thickness between 1 micron to 50 microns is anti-on the rigid transparent substrate
Layer is answered, transparent flexible substrate of the deposition thickness between 50 microns to 5 millimeters on the laser reactive layer, by the laser reactive
Layer is detached with the rigid transparent substrate, and the double-layer structure of laser reactive layer and transparent flexible substrate layer is obtained with this, judges institute
The type for the sensor that need to be prepared；
(b) when the sensor of preparation is piezoelectric transducer, the biography of piezoelectric material is used in the laser reactive layer disposed thereon
Then sensor functional layer is used to draw the electrode layer of signal to be measured in the functional layer disposed thereon；When the sensor of preparation is
When parallel plate capacitor sensor, in the disposed thereon electrode layer of the laser reactive layer；
(c) in the lower section of the flexible transparent substrate using the laser irradiation flexible transparent substrate, wherein the transparent flexible substrate
Mask plate is placed at the both ends of lower section, and the flexible transparent substrate that mask plate region is not placed in the laser penetration exposes to the laser
Ablation decomposition reaction, the gas which generates occur for the bottom surface of conversion zone, the energy which absorbs the laser
The illuminated region of the laser reactive layer is jacked up and is detached with the flexible transparent substrate by body, in the flexible and transparent
Cavity is formed between substrate and laser reactive layer, by adjusting the air pressure inside of the cavity and swashing above height and the cavity
The thickness of light reaction layer, functional layer or electrode layer realizes the adjustment of the flexible sensor range and sensitivity respectively.
2. a kind of preparation method of range and the adjustable flexible sensor of sensitivity as described in claim 1, which is characterized in that
When the sensor of preparation be parallel plate capacitor sensor when, after step (c), need to also below the transparent flexible substrate with
The cavity corresponding position depositing electrode layer.
3. a kind of preparation method of range and the adjustable flexible sensor of sensitivity as claimed in claim 1 or 2, feature exist
In in step (b), the electrode layer is divided into two parts, and a part is arranged in the top of the cavity, and another part is set
It sets in the top of non-cavity.
4. the preparation method of a kind of range as described in any one of claims 1-3 and the adjustable flexible sensor of sensitivity,
It is characterized in that, in step (a), the rigid transparent substrate uses the material of resistance to 300 DEG C or more high temperature, it is preferred to use quartzy glass
Glass or sapphire；The flexible transparent substrate is preferably urged using dimethyl silicone polymer, polyethylene terephthalate or platinum
SiClx rubber, the deposition method of the flexible transparent substrate is to preferably using rotary coating, film or die casting.
5. the preparation method of a kind of range according to any one of claims 1-4 and the adjustable flexible sensor of sensitivity,
It is characterized in that, in step (a), the laser reactive layer preferably uses polyimides, polymethyl methacrylate or various light
Sensibility Other substrate materials.
6. the preparation method of a kind of range as described in any one in claim 1-5 and the adjustable flexible sensor of sensitivity,
It is characterized in that, in step (b), the piezoelectric material preferably uses polyvinylidene fluoride material and its derivative or piezoelectricity high
Polymers nylon.
7. the preparation method of a kind of range as claimed in any one of claims 1 to 6 and the adjustable flexible sensor of sensitivity,
Be characterized in that, in step (b), the thickness of the sensor function layer at least below the laser reactive layer thickness five/
One.
8. such as the preparation method of claim 1-7 any one of them a kind of range and the adjustable flexible sensor of sensitivity,
It is characterized in that, the thickness of the electrode layer is no more than 100 nanometers.
9. a kind of preparation side using claim 1-8 any one of them a kind of range and the adjustable flexible sensor of sensitivity
Flexible sensor prepared by method.
10. flexible sensor as claimed in claim 9, which is characterized in that the flexible sensor is a unit, by more
The arrangement and combination of a unit form array sensor, and the cavity of each unit in the array sensor is interconnected,
And it is connected with the air storing cavity for being arranged in the array sensor external, passes through the air pressure changed in air storing cavity and realize each list
The adjustment of the array transducer sensitivity and range is realized in the air pressure of first cavity and the adjustment of height with this.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810497330.4A CN108615807A (en) | 2018-05-22 | 2018-05-22 | A kind of range and the adjustable flexible sensor of sensitivity and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810497330.4A CN108615807A (en) | 2018-05-22 | 2018-05-22 | A kind of range and the adjustable flexible sensor of sensitivity and preparation method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108615807A true CN108615807A (en) | 2018-10-02 |
Family
ID=63663589
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810497330.4A Pending CN108615807A (en) | 2018-05-22 | 2018-05-22 | A kind of range and the adjustable flexible sensor of sensitivity and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108615807A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110589754A (en) * | 2019-09-12 | 2019-12-20 | 复旦大学 | Flexible underwater pressure sensor and preparation method thereof |
| CN111119860A (en) * | 2019-12-23 | 2020-05-08 | 山东科技大学 | Pressure bar for sensing pressure distribution state in hole |
| WO2020108195A1 (en) * | 2018-11-27 | 2020-06-04 | 东南大学 | Wind speed sensor based on dual layer lens structure |
| CN112146693A (en) * | 2019-06-27 | 2020-12-29 | 清华大学 | Method for greatly adjusting sensitivity of capacitive sensor |
| CN115370819A (en) * | 2022-08-11 | 2022-11-22 | 苏州协昌环保科技股份有限公司 | Diaphragm assembly for electromagnetic pulse valve and electromagnetic pulse valve comprising same |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1217467A (en) * | 1997-11-14 | 1999-05-26 | 中国科学院电子学研究所 | Microcavity-inflated type vacuum microelectronic pressure sensor |
| CN103148977A (en) * | 2013-02-27 | 2013-06-12 | 东南大学 | Flexible-substrate-based passive wireless pressure sensor with self-packaging function |
| CN103700662A (en) * | 2013-12-09 | 2014-04-02 | 京东方科技集团股份有限公司 | Bearing substrate, and method for manufacturing flexible display device |
| CN104769021A (en) * | 2012-11-08 | 2015-07-08 | 旭化成电子材料株式会社 | Substrate for flexible device, flexible device and method for producing same, laminate and method for producing same, and resin composition |
| CN105424261A (en) * | 2015-12-08 | 2016-03-23 | 上海交通大学 | Flexible MEMS bubble pressure sensor, and application and preparation method thereof |
| CN105645349A (en) * | 2014-12-04 | 2016-06-08 | 中芯国际集成电路制造(上海)有限公司 | MEMS device formation method |
| CN106910678A (en) * | 2017-03-09 | 2017-06-30 | 华中科技大学 | Patterned mask version, its preparation method and the method that laser lift-off is carried out using it |
-
2018
- 2018-05-22 CN CN201810497330.4A patent/CN108615807A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1217467A (en) * | 1997-11-14 | 1999-05-26 | 中国科学院电子学研究所 | Microcavity-inflated type vacuum microelectronic pressure sensor |
| CN104769021A (en) * | 2012-11-08 | 2015-07-08 | 旭化成电子材料株式会社 | Substrate for flexible device, flexible device and method for producing same, laminate and method for producing same, and resin composition |
| CN103148977A (en) * | 2013-02-27 | 2013-06-12 | 东南大学 | Flexible-substrate-based passive wireless pressure sensor with self-packaging function |
| CN103700662A (en) * | 2013-12-09 | 2014-04-02 | 京东方科技集团股份有限公司 | Bearing substrate, and method for manufacturing flexible display device |
| CN105645349A (en) * | 2014-12-04 | 2016-06-08 | 中芯国际集成电路制造(上海)有限公司 | MEMS device formation method |
| CN105424261A (en) * | 2015-12-08 | 2016-03-23 | 上海交通大学 | Flexible MEMS bubble pressure sensor, and application and preparation method thereof |
| CN106910678A (en) * | 2017-03-09 | 2017-06-30 | 华中科技大学 | Patterned mask version, its preparation method and the method that laser lift-off is carried out using it |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020108195A1 (en) * | 2018-11-27 | 2020-06-04 | 东南大学 | Wind speed sensor based on dual layer lens structure |
| CN112146693A (en) * | 2019-06-27 | 2020-12-29 | 清华大学 | Method for greatly adjusting sensitivity of capacitive sensor |
| CN110589754A (en) * | 2019-09-12 | 2019-12-20 | 复旦大学 | Flexible underwater pressure sensor and preparation method thereof |
| CN111119860A (en) * | 2019-12-23 | 2020-05-08 | 山东科技大学 | Pressure bar for sensing pressure distribution state in hole |
| CN111119860B (en) * | 2019-12-23 | 2023-01-10 | 山东科技大学 | Pressure bar for sensing pressure distribution state in hole |
| CN115370819A (en) * | 2022-08-11 | 2022-11-22 | 苏州协昌环保科技股份有限公司 | Diaphragm assembly for electromagnetic pulse valve and electromagnetic pulse valve comprising same |
| CN115370819B (en) * | 2022-08-11 | 2023-11-14 | 苏州协昌环保科技股份有限公司 | Diaphragm assembly for electromagnetic pulse valve and electromagnetic pulse valve comprising same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108615807A (en) | A kind of range and the adjustable flexible sensor of sensitivity and preparation method thereof | |
| Li et al. | All‐in‐one iontronic sensing paper | |
| CN112729625B (en) | Laser texture bionic capacitive flexible pressure sensor and preparation method thereof | |
| Kim et al. | Highly sensitive tactile sensors integrated with organic transistors | |
| CN105612588A (en) | High-sensitivity sensor comprising conductive thin film containing cracks and method for manufacturing same | |
| Li et al. | based piezoelectric touch pads with hydrothermally grown zinc oxide nanowires | |
| CN105758562A (en) | Flexible pressure sensor and preparation method thereof | |
| CN112834087B (en) | Double-layer flexible pressure sensor and preparation method thereof | |
| CN110926590B (en) | Piezoelectric type MEMS hydrophone | |
| CN113074843B (en) | Multifunctional planar capacitive flexible sensor and preparation method thereof | |
| CN106092384A (en) | Capacitance type pressure sensor and preparation method thereof | |
| An et al. | Soft sensor for measuring wind pressure | |
| Palaniappan et al. | Laser-assisted fabrication of flexible micro-structured pressure sensor for low pressure applications | |
| Palaniappan et al. | Highly sensitive and flexible M-tooth based hybrid micro-structured capacitive pressure sensor | |
| CN110426063A (en) | A kind of double mode sensor and its application in detection pressure and strain path | |
| Li et al. | Dispenser-printed sound-emitting fabrics for applications in the creative fashion and smart architecture industry | |
| CN109764981B (en) | Flexible force-heat integrated sensor | |
| CN112254848A (en) | Multi-channel flexible pressure sensor based on ink-jet printing preparation | |
| CN114279600B (en) | Flexible pressure sensor of composite material dielectric layer based on laser-induced graphene | |
| CN103995020B (en) | A kind of biosensor array based on PVDF thin film and preparation method thereof | |
| CN109238438A (en) | A kind of fexible film acoustic vector sensors based on nano material | |
| CN108217575A (en) | A kind of sensor and preparation method thereof | |
| Li et al. | Dielectrostriction effect in flexible dielectric realized by ordered doping of iron nanoparticles for wide-range pressure detection | |
| CN102654459A (en) | Method for fabricating surface plasma resonance sensor chip | |
| CN113432773A (en) | Sensor suitable for measuring surface shock wave pressure of flexible object and manufacturing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20181002 |
|
| WD01 | Invention patent application deemed withdrawn after publication |