CN108604618A - Method and system for monitoring the laser scribing process for forming isolation channel in solar energy module - Google Patents
Method and system for monitoring the laser scribing process for forming isolation channel in solar energy module Download PDFInfo
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- CN108604618A CN108604618A CN201680074172.0A CN201680074172A CN108604618A CN 108604618 A CN108604618 A CN 108604618A CN 201680074172 A CN201680074172 A CN 201680074172A CN 108604618 A CN108604618 A CN 108604618A
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- 238000002955 isolation Methods 0.000 title claims abstract description 193
- 238000000034 method Methods 0.000 title claims abstract description 73
- 230000008569 process Effects 0.000 title claims abstract description 40
- 238000012544 monitoring process Methods 0.000 title claims abstract description 15
- 239000011265 semifinished product Substances 0.000 claims abstract description 126
- 238000001514 detection method Methods 0.000 claims abstract description 54
- 230000001678 irradiating effect Effects 0.000 claims abstract description 8
- 239000010410 layer Substances 0.000 claims description 156
- 239000002346 layers by function Substances 0.000 claims description 62
- 239000000758 substrate Substances 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 27
- 230000007547 defect Effects 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 239000000047 product Substances 0.000 claims description 6
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- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
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- 229910004613 CdTe Inorganic materials 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
- B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
- B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0838—Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/16—Composite materials, e.g. fibre reinforced
- B23K2103/166—Multilayered materials
- B23K2103/172—Multilayered materials wherein at least one of the layers is non-metallic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Abstract
The present invention describes a kind of method and system (200) for monitoring the laser scribing process for forming isolation channel (21,22,23) in solar energy module.It the described method comprises the following steps：Semi-finished product solar energy module (10) is provided, form isolation channel (21,22,23), the region (4) of the semi-finished product solar energy module is irradiated at the first surface (101) of the semi-finished product solar energy module, detection is transmitted through the amount of the light of the irradiated region of the semi-finished product solar energy module (10) at the second surface (102) of the semi-finished product solar energy module (10), and described in the assessment irradiated region is formed by isolation channel (21,22,23).The system comprises the devices for generating laser beam, the device in the region for irradiating semi-finished product solar energy module, are used for the device of the amount of detection light (500) and for assessing the device for being formed by isolation channel (600).The method and the system (200) provide a kind of simple, quickly and very effective mode for continuously checking isolation channel (21,22,23).
Description
Technical field
The theme of the application is a kind of side for monitoring the laser scribing process for forming isolation channel in solar energy module
Method and system.
Background technology
Photovoltaic devices or solar energy module include the multiple solar cells for converting sunlight into electric current.One solar energy mould
The solar cell of block is electrically connected in series.Thin-film solar cells is usually formed in large area lining in common processing step
On bottom, wherein each solar cell includes the first contact layer, the second contact layer, and in the first contact layer and the second contact layer
Between form and convert the photovoltaic layer of sunlight.To form separated and electrical isolation solar cell and being by the solar-electricity
Adjacent solar battery in pond is electrically connected in series, in the first contact layer, photovoltaic during the generation process of solar cell
Isolation channel is formed at least one of layer and the second contact layer.Therefore, cladding plate (superstrate) generation process is usually wrapped
Include the following procedure step in mentioned process sequence：On a transparent substrate, the first transparent contact layer, photovoltaic layer are formed
It deposits on the first contact layer.Then, the first isolation channel is formed in photovoltaic layer and the first contact layer.Then, with the first isolation
Material fills the first isolation channel.Second isolation channel is formed in photovoltaic layer, and is not formed in the first contact layer, wherein second every
It is adjacent with the first isolated material in the first isolation channel from slot formation or be formed as on the first lateral with the first isolation channel
It is spaced apart.Instead of second groove, other second structures, such as clearance hole can be formed in photovoltaic layer, wherein the second structure can be with
The adjacent formation of first isolated material is spaced apart with first isolated material.Then, the second usually opaque contact layer is heavy
Product in the second isolation channel or is deposited in the second structure, and deposit on photovoltaic layer and deposit in the first isolation channel first
On isolated material.In this sequence, finally, third isolation channel is formed in the second contact layer and is formed in photovoltaic layer, without
Be formed in the first contact layer, wherein third isolation channel it is adjacent with the second isolation channel on the side opposite with the first isolation channel and
It is formed, or is formed as being spaced apart with the second isolation channel on the side opposite with the first isolation channel on the first lateral.It can
Other step is executed, such as fill third isolation channel with the second isolated material and the second substrate is coated to the second contact layer.First
Lateral is to be orthogonal to along the direction from transparent substrates to the straight line of the second contact layer (that is, the thickness of solar cell
Direction) plane in direction.During substrate generates, a other process steps execute in reverse order.
Isolation channel should be narrow, but should also provide the security isolation of single solar cell, especially for first every
For slot and third isolation channel, or provide the secure electrical contact of the second contact layer and the first contact layer in the second isolation channel.
Such isolation channel usually has a width in the range between 20 μm to 80 μm, and the distance away from adjacent isolation channel at 40 μm extremely
In range between 80 μm.Therefore, isolation channel is usually formed by laser scribing, and wherein material is led by the energy due to merging
The evaporative removal of cause.In addition, different isolation channels there should be minimum potential range to each other, photovoltaic conversion is not done to reduce
The area of the substrate of contribution.On the other hand, all isolation channels all must be clearly distinguished from each other.
During laser scribing, laser beam focus is on necessary processed layer.Laser beam is with specifically laterally prolonging
There is specific shape, for example, there is the ellipse or circular shape of at least first diameter on the processed layer of extending portion.In order to
Groove is formed in the form of long line, laser beam and semi-finished product solar energy module are moved relative to each other.Because laser beam is usually
Impulse form and due to relative movement, it is actually the shape for having in plan view substantially laser beam to be formed by groove
A series of and holes being overlapped at least a certain degree.
However, two typical defects may occur in which during laser scribing：First, the groove marked may be too wide, never
So that different grooves does not distinguish clearly each other.Second, a some holes of the groove marked may be too narrow, and not with same ditch
The adjacent holes of slot are overlapped, and therefore, groove is not isolated adjacent solar cell really actually and is allowed to insulate.Such defect
Can randomly occur, that is, caused by the persistent error in laser beam generation system, or laser beam generation system can be passed through
The drift (change of institute's time) of parameter causes.
In general, in the off-line test for implementing defect for identification for executing the device external of laser scribing process, it is described
Test includes optical check or electric measurement.However, these tests only randomly execute, it is difficult and complicated, citing comes
It says, if it is necessary to if the image that assessment is shot by camera, and only extremely sparsely provide the possibility reformed to correct
Defect.
Some known in-service monitoring method and systems, described method and system pass through second laser scribing processes for controlling
The second groove of formation is away from the first ditch formed by the first laser scribing processes executed before second laser scribing processes
The distance of slot.This in-service monitoring directly executes in the system for executing laser scribing process, and based on the previous shape of shooting
At groove image.For example, US 2015/0185162A1 describe following methods and system：By shooting close to
The first groove of first laser scribing processes formation is identified by the infrared image in the region of first groove, wherein detecting
Infrared ray given off from semi-finished product solar energy module；Second laser scribing processes are controlled according to the infrared image assessed,
Distance of the second groove especially marked away from first groove.It is identified in marked groove however, these methods are not used in
Defect and the image evaluation for also using time and effort consuming.
Invention content
The object of the present invention is to provide a kind of for monitoring the laser scribing process for forming isolation channel in solar energy module
Method and system, the method be easily and rapidly, and provide correction defect and identify in laser beam generation system
The chance of the drift of parameter.
This target with system according to claim 8 by realizing according to the method for claim 1.It is advantageous
Embodiment discloses in corresponding dependent claims.
Included the following steps according to the present processes：Semi-finished product solar energy module is provided, isolation channel is formed, in semi-finished product
The region that semi-finished product solar energy module is irradiated at the first surface of solar energy module, in the second surface of semi-finished product solar energy module
Place's detection is transmitted through in the amount of the light of the irradiated region of semi-finished product solar energy module, and assessment irradiated region and is formed by isolation
Slot.Semi-finished product solar energy module includes that functional layer on a transparent substrate stacks, wherein functional layer stacking includes first connecing
At least one of contact layer, photovoltaic layer and second contact layer.That is：Functional layer stacking may include only the first contact layer,
Or the functional layer stacking may include the first contact layer on a transparent substrate and the photovoltaic layer on the first contact layer or described
Functional layer stacking may include the first contact layer on a transparent substrate, the photovoltaic layer on the first contact layer and on photovoltaic layer
The second contact layer.
Isolation channel is formed using laser beam at least one of functional layer stacking layer, and the laser beam removal is being isolated
At least one of functional layer stacking in the region of slot layer.At least transparent substrates remain substantially unprocessed.It is formed
Isolation channel can be from a side of semi-finished product solar energy module extend to semi-finished product solar energy module opposite side it is continuous
Groove.Therefore, isolation channel has the first extension along the first lateral, wherein first lateral is from semi-finished product
One side of solar energy module extends to the opposite side of semi-finished product solar energy module, the second extension with the first lateral side
Extend on the second orthogonal lateral.First lateral and the second lateral, which define, is parallel to semi-finished product solar energy mould
The plane that the first surface of block extends.
First extension is also known as the length of isolation channel, and the second extension is also known as the width of isolation channel.Isolation
The width of slot is due to the variation of laser beam characteristic or due to the variation in the removal layer that functional layer stacks, for example, due to crystal
The variation of structure, and change with the length of isolation channel.The third extension of isolation channel is also known as the depth of isolation channel, just
It meets on the third direction of the first lateral and the second lateral and measures.In general, isolation channel extends completely through functional layer
At least one layer being removed in stacking, that is, the depth of isolation channel is equal at least about the thickness of a layer.However, isolation channel
Depth is also smaller than or the thickness more than at least one layer, and due to similar to mentioned by the variation for width,
It can also change with the length of isolation channel.For example, if laser beam does not completely remove at least one layer as it should do,
At least one layer of remainder can be left.Can also be other structures according to the isolation channel of the application, the structure has small
In the first extension of the extension from a side to opposite side of semi-finished product solar energy module.That is, isolation channel
It can also be the smaller structure being isolated with the other structures being placed along in the straight line of the first lateral extension.Isolation channel is to appoint
Where formula extends on the direction towards transparent substrates from the surface that functional layer stacks.
After forming isolation channel, irradiation semi-finished product solar energy module at the first surface of semi-finished product solar energy module
Region." after forming isolation channel " means isolation channel before exposure at least formed in irradiated region.That is, half at
The specific region of product solar energy module executes the step of the step of forming isolation channel and irradiation in succession.However, in first area quilt
When irradiation, isolation channel can simultaneously form in the second area of semi-finished product solar energy module.Irradiated region is in the first lateral
At least part of upper covering isolation channel, and entire isolation channel and peripheral region are covered on the second lateral.Therefore, along
The length for the irradiated region that first lateral measures is smaller than, equal to or more than the length of isolation channel, and along the second lateral side
It is more than the width of isolation channel to the width of the irradiated region measured.For example, the width of irradiated region is bigger than the width of isolation channel by 36%.With
Preferably there is smaller beam divergence angle in the light of irradiation, and especially preferred is a parallel ray beam.
The first surface of semi-finished product solar energy module can be that laser beam impacts surface or the semi-finished product sun thereon
The apparent surface of energy module.Laser beam can impact half at the side on the surface that transparent substrates form semi-finished product solar energy module
On finished product solar energy module, or it can be impacted at the side that functional layer stacks the surface being located at.
At the second surface of semi-finished product solar energy module, detect the photograph for being transmitted through semi-finished product solar energy module
The amount of the light in area is penetrated, the second surface is the surface opposite with the third direction of semi-finished product solar energy module.For detection light
Device with for irradiation device be arranged at identical optical axis.That is, semi-finished product solar energy module is by orthogonal eradiation.
The amount of the light detected is to indicate compared with the image of the lateral distribution comprising transmitted light, is transmitted through semi-finished product solar energy module
Light amount or light one of intensity value.Therefore, only this value must be assessed according to the application, rather than as existing skill
Whole image is equally needed in art.
Such as know from the prior art, the light for irradiation can quilt before the first surface for reaching semi-finished product solar energy module
Focus or handle in other ways, and be transmitted through the light of semi-finished product solar energy module also can reach for detection device it
Before be focused or handle in other ways.
Then, by the amount of the light detected compared at least one reference value, to assess being formed by irradiated region
Isolation channel.Reference value indicates the width of isolation channel or the width and length of the isolation channel in irradiated region, for the irradiated region, every
From the requirement that slot meets good function.For example, reference value can correspond to the lower limiting value of the width of isolation channel.Therefore, if inspection
The amount measured be less than this reference value, then isolation channel can be assessed as it is too narrow in irradiated region, that is, it is not wide enough.On the other hand, join
Examine the upper limit value that value can correspond to the width of isolation channel.Therefore, if the amount detected is more than this reference value, isolation channel can
It is assessed as too wide in irradiated region, that is, not narrow enough.It should be evident that the amount of the light detected preferably with two reference values
Compare, exactly, compared with lower limiting value and upper limit value, does so and provide the suitable width about isolation channel in irradiated region
Isolation channel good assessment.
For example, reference value is by obtaining isolation channel irradiation light and detection light, and the isolation channel is by analyzing institute
The image of the isolation channel of acquisition or by being assessed with the width of isolation channels is measured according to the existing other technologies in this field.
If isolation channel is assessed as not meeting the requirement in irradiated region, isolation channel can be reformed in the region.Example
Such as, the isolation channel that the step of being used to form isolation channel can be formed in first time repeats when too narrow.
Light for irradiation includes first wave length, transparent substrates and functional layer stack in all layers not being removed for
The first wave length is transparent, and at least one layer being removed in functional layer stacking is impermeable for the first wave length
Bright.Term " transparent " and " opaque " are not necessarily referring to absolute transparent or opaque, and refer to transparent substrates and function layer heap
All layers not being removed in folded, which have the light with first wave length, is apparently higher than being removed in functional layer stacking
The transmissivity of at least one layer of transmissivity.Preferably, the difference between the two transmissivities is more than 0.2.For solar-electricity
Pond, first wave length are preferably in the range of 300nm to 900nm.Therefore, it generates comprising at least one of this range wave
Any light source of long light can be used for irradiating semi-finished product solar energy module, for example, " white " light of ordinary lamps.However, also can be used
The light source of the light of specific first wave length, such as light emitting diode (LED) are only provided.
In certain embodiments, semi-finished product solar energy module in individual sub-step with two different wavelength
Light irradiates, so that the spectral information for using the amount of the transmitted light by detecting two wavelength to collect stacks to obtain about functional layer
In different layers other information.Semi-finished product solar energy module uses up irradiation in two sub-steps, wherein in the second sub-step
The light with first wave length in the first sub-step for irradiation should not included for the light of irradiation in rapid, or in the first sub-step
In for irradiation light should not include the second sub-step in for irradiation the light with second wave length.Preferably, using two
The light of different LED.Functional layer includes at least two different layers, and wherein at least one of functional layer stacking layer is in isolation channel
Region in be removed, and functional layer stack at least one layer for being removed or functional layer stack in be not removed
At least one layer has the different transmissivities of the light to the light and second wave length of first wave length.Different transmissivities means accordingly
Layer becomes opaque from transparent, and vice versa.
If at least one layer not being removed during functional layer stacks changes it between first wave length and second wave length
Transmissivity, then can get about at least one layer not being removed by removing caused by least one other layer such as hole or
The information of the damages such as scraping.For example, this can hold checking the when of being formed in the isolation channel in photovoltaic layer rather than in the first contact layer
Row.
In another example, at least two layers during functional layer stacks are removed, wherein being removed in functional layer stacking
At least one first layer change its transmissivity, and at least one in this at least two layers between first wave length and second wave length
A second layer does not change its transmissivity.That is, for first wave length, all layers not being removed during functional layer stacks are
Transparent, and at least one first layer and at least one second layer are opaque.For second wave length, transparent substrates and at least
One first layer is transparent, and at least one second layer is opaque.Therefore, first layer is can detect in isolation channel
Remainder.For example, this can be executed in the isolation channel that inspection is formed in photovoltaic layer and is formed in the first contact layer.
For example, first wave length can be in the range of visible light, that is, between 400nm and 700nm, and illustrates and
It says, second wave length can be in the range of infrared light, that is, between 780nm and 1mm, or in the range in ultraviolet light, that is,
Between 10nm and 380nm.
Similar technology, which can be used for assessing, is filled into the material being formed by isolation channel.For example, the material can
To be filled into the photoresist in the first isolation channel according to the prior art.The material has the light with third wavelength
First transmissivity, for the third wavelength, at least one layer being removed during functional layer stacks is opaque and transparent
All layers not being removed during substrate and functional layer stack are transparent.Third wavelength can be equal to above-described first wave length
Or it is equal to above-described second wave length or different from them.The of the characteristic that first transmissivity of material is stacked with expression layer
Two transmissivities are different, the folded all layers not being removed comprising in transparent substrates and functional layer stacking of the layer heap.Preferably,
Two transmissivities are more than the first transmissivity so that the amount of transmitted light corresponds essentially to the first transmissivity of material, and described first thoroughly
Rate is penetrated depending on the type of material, the thickness of the quality of material and material.The region of semi-finished product solar energy module is with material
It is illuminated after the step of filling isolation channel, wherein the light with third wavelength is for irradiating.Then by the amount of the light detected
Characteristic for assessment material.
In preferred embodiments, it is used to form the first or second of the laser beam in semi-finished product solar energy module of isolation channel
Surface relatively moves, and the device for irradiation and device for detection light in a manner of identical with laser beam correspondingly
It is relatively moved in the first or second surface of semi-finished product solar energy module.That is, laser beam and for irradiation
Device and device for detection can be moved when semi-finished product solar energy module is static or semi-finished product solar energy module is in laser beam
And it is moved when the device for irradiation and the static device for detection.However, it is also possible to semi-finished product solar energy module
It moves on the one hand, laser beam and the device for irradiation and the device for detection move on the other hand, wherein generating
Relative movement.Under any circumstance, irradiate, detect and assessment the step of for along the first lateral along isolation channel
The multiple regions of extension arrangement execute.In other words：By relatively moving the long isolation channel of laser beam formation by being directed to
Multiple regions are irradiated and are detected and assess to check and assess repeatedly, each wherein in these regions is preferably adjacent another
One region partly overlaps with adjacent area.Therefore, entire isolation channel can be monitored.
Preferably, the device for the device of irradiation and for detection light directly follows laser beam with fixed range.
That is light beam impacts on the semi-finished product solar energy module with laser beam fixed distance so that, between each time
Every in the region for forming isolation channel during the time interval and the semi-finished product solar energy module of semi-finished product solar energy module
Fixed range is provided between the region that light for irradiation impacts.This distance can be in the range of 5mm to 20mm.
When the device for illumination and the device for detection move, a series of light continuously detected can be obtained
Amount, that is, indicate the signal curve of the amount of the light detected with the change in location of specified device.It is described a series of continuously to detect
The amount of light allow to monitor isolation channel at any time, and therefore provide what defect in the total failare of detection laser beam, isolation channel occurred
The possibility of drift in the parameter of increase or laser beam simultaneously eliminates these problems.For this purpose, interior execution the step of assessing
Another statistical estimation routine, mean value, minimum value or the maximum value of the amount of the light such as confirmly detected in given time period.It is described
Method further includes the steps that changing the parameter of the device for generating laser beam, if one in specified event occurs and needs
Pass through the change of statistical estimation routine detection parameters.
Include according to the system for monitoring the laser scribing process for forming isolation channel in solar energy module of the application
Device for generating laser beam, the device in the region for irradiating semi-finished product solar energy module, the dress of the amount for detection light
It sets and for assessing the device for being formed by isolation channel.At least some of these devices can merge within one device, that is,
Described device can physically be fixed to each other or be formed sealing unit.However, all devices can be realized in separated equipment,
In for being sent to from the device of the amount for detection light data show that data connection exists for the device of assessment.
Device for generating laser beam is suitable in being stacked by the functional layer removed in the region of isolation channel extremely
A few layer forms isolation channel at least one of the functional layer stacking of semi-finished product solar energy module layer.Functional layer stacks
Including at least one of the first contact layer, photovoltaic layer and second contact layer and arrange on a transparent substrate.It is sharp for generating
The device of light beam can generate at least one laser beam of first wave length, but can also generate two of identical or different wavelength or be more than
Two laser beams.
Device for irradiation is suitable for irradiating the first table in semi-finished product solar energy module of semi-finished product solar energy module
Region at face.Irradiated region covers at least part of isolation channel on the first lateral, and is being orthogonal to the first lateral side
To the second lateral on cover entire isolation channel and peripheral region.Lateral is in above description.
The device of amount for detection light, which is suitable for detecting at the second surface of semi-finished product solar energy module, to be transmitted through
The amount of the light of the irradiated region of semi-finished product solar energy module.Second surface is the opposite with first surface of semi-finished product solar energy module
That surface.First surface and second surface correspondingly extend in the plane for the thickness for being orthogonal to solar energy module.For examining
The device and the device for irradiation for surveying light are arranged at identical optical axis, and for example, it may include are used for the luminosity of detection light
Meter or an optical sensor or multiple optical sensors.
It is formed by the device of isolation channel for assessing and is suitable for the amount of the light detected by comparing with reference value and comments
Estimate in irradiated region and is formed by isolation channel.For this purpose, the device for assessment may include that one or more threshold values, citing are come
It says, lower limiting value and upper limit value, the threshold value are recorded in memory cell, comparing unit and output unit, and the output is single
Member is for at least output signal when having there is the violation to one in threshold value.
Device for irradiation be suitable for transmitting include first wave length light, transparent substrates and functional layer stacking in not by
All layers of removal are transparent for the first wave length, and at least one layer being removed in functional layer stacking is for institute
It is opaque to state first wave length.For example, the device for illumination can be the common lamp of transmitting " white " light or may include emitting
The light emitting diode of the light of one specific wavelength.Preferably, the device for being used for irradiation is generated with smaller beam divergence angle
Light, an and more preferably parallel ray beam.For this purpose, the device for irradiation may also include optical element, for example, thoroughly
Mirror.
In one embodiment, it is suitable for light of the transmitting with first wave length for the device of irradiation and is suitable for emitting
Light with second wave length, the second wave length are different from the first wave length.Preferably, at least one of functional layer stacking
Layer has the transmissivity entirely different with first wave length for second wave length, that is, becomes opaque from transparent, vice versa.
In one example, first wave length is located in visible region, and second wave length is located in infrared or in the areas UV.
In preferred embodiments, the system comprises transmitting devices, and the transmitting device is for realizing for generating
Relative movement of the device of laser beam along the first lateral in the first or second surface of semi-finished product solar energy module,
And for realizing the device for irradiation and the device for detection light in a manner of identical with the device for generating laser beam
Correspondingly in the relative movement of the first or second surface of semi-finished product solar energy module.For example, this Transmission system can
For transmission belt or multiple rollers or axis, wherein Transmission system moves semi-finished product solar energy along the first lateral in system
Module so that semi-finished product solar energy module move through for generate laser beam device generate laser beam and by from for
The light beam of the device transmitting of irradiation.For generating the device of laser beam, the device for irradiation and the amount for detection light
Device can be static in system, also move.
Device for irradiation, which is preferably adapted to change over time, is continually transmitted light, and the dress of the amount for detection light
It sets and is also preferably suitable for changing over time continuously detection light.In addition, the device for assessment is suitable for assessing a series of companies
The amount of the continuous light detected.Therefore, if in semi-finished product solar energy module and for the device of irradiation and for detection light
The device of amount be moved relative to each other, then can isolation channel continuously be assessed in Large Amount of Irradiated area, that is, in greater depth
On, wherein can be reliable and at least one of the defect of isolation channel and/or the assessment parameter of isolation channel be rapidly detected
Drift, that is, slowly transformation.
In specific embodiments, the device for generating laser beam and the device for irradiation are arranged in sharp for executing
In the equipment of light scribing processes so that the two devices have the first distance each other along the first lateral.First apart from excellent
Selection of land is in the range of 5mm to 20mm, is more preferably in the range of 5mm to 15mm, such as 10mm.This distance is for spy
Fixed laser scribing process is fixed.Therefore, the defects of isolation channel is quickly known after the formation of isolation channel
Do not go out.
In preferred embodiments, semi-finished product solar energy module in first time period for executing laser scribing beam
Is transmitted in a first direction along the first lateral in equipment, and in second time period along the first lateral second
It is transmitted on direction, wherein second direction is opposite with first direction.First direction and second direction can also be accordingly called along
The positive direction and negative direction of first lateral.That is, to form multiple isolation channels in semi-finished product solar energy module, half
Finished product solar energy module is firstly moved to pass through laser beam in first direction, is subsequently moved in second direction, wherein each time
All form isolation channel.Between the two laser scribing steps, semi-finished product solar energy module is moved along the second lateral, institute
The second lateral is stated to be orthogonal to the first lateral and define the plane for the first surface for being parallel to semi-finished product solar energy module.
To be formed by isolation channel in both direction assessment, the first device for irradiation and the first device for detection light are along the
One lateral is arranged in the first side of the device for generating laser beam, and for the second device of irradiation and for detecting
The second device of light is arranged in the second side of the device for generating laser beam along the first lateral, wherein the second side with
First side is opposite.
The system can also comprise the memory device of the position in the region for storing semi-finished product solar energy module, right
In the region, the defect of isolation channel is identified by the device for assessment.The information stored later is used in this position
Reform isolation channel in the place of setting.The position is relative to the reference point on semi-finished product solar energy module, for example, semi-finished product solar energy
The corner of module.
The system can also comprise control device, and the control device is used for according to by the device offer for assessment
Result control the device for generating laser beam.Therefore, it needs to change parameter if the device for assessment detects, swash
At least one of parameter of light beam can be changed or correct.In addition, the also controllable transmitting device of control device.
The system may also include suction unit, the suction unit be suitable for the gas that will be generated by scribing processes and
Grain pumps out the environment of semi-finished product solar energy module.Suction unit is preferably arranged in the second side of semi-finished product solar energy module
On, wherein transparent substrates form the surface of semi-finished product solar energy module in first side position and the second side is opposite with the first side.
Description of the drawings
Including attached drawing to be to provide further understanding of the invention, and attached drawing is incorporated into this specification and constitutes this explanation
A part for book.Schema illustrates embodiment of the present invention and together with the description to principle of specification.Other implementations of the present invention
Scheme is possible and is within the scope of the invention.The element of schema is not necessarily to scale relative to each other.Identical ginseng
It examines label and specifies corresponding same section.
Fig. 1 schematically shows tool, and there are three the cross sections of the solar energy module of different types of isolation channel.
Fig. 2 is shown schematically in the plan view of semi-finished product solar energy module.
Fig. 3 schematically shows cross section of the semi-finished product solar energy module along A-A '.
Fig. 4 schematically shows cross section of the semi-finished product solar energy module along B-B '.
Fig. 5 A schematically show the plan view for being formed by isolation channel with enlarged view.
Fig. 5 B schematically show the curve corresponding to the amount for the light detected continuously monitored to isolation channel.
The system that Fig. 6 is shown schematically for monitoring laser scribing process.
Fig. 7 schematically shows the reality according to the present invention for monitoring the system of laser scribing process with viewgraph of cross-section
Apply scheme.
Specific implementation mode
Fig. 1 is the schematic cross-section of solar energy module (1), and the solar energy module includes transparent substrates (11), function
Layer heap folds (12) and backing bottom (13).The side of solar energy module from transparent substrates (11) is illuminated, this is indicated by arrow.
For example, transparent substrates (11) are made of glass, and backing bottom (13) can be made of any suitable material and it is transparent to be
Or it is opaque.It includes the first contact layer (121) that functional layer, which stacks (12), and first contact layer is for example saturating by transparent material
Bright conductive oxide (TCO) is made；Photovoltaic layer (122), the photovoltaic layer absorb light and the light are converted into electric current；And the
Two contact layers (123), second contact layer can be made of opaque material such as metal,.Functional layer stacks all of (12)
Layer may include the different layers for the different materials such as known from the prior art.For example, this photovoltaic layer may include CdS layer and CdTe
Layer.
" transparent " and " opaque " referred in paragraph previous means transparent or not for the light with a certain wavelength
Transparent, the photovoltaic layer (122) that the light is stacked (12) by functional layer absorbs and is converted into electric current.
To form the solar cell (100) for being connected in series to adjacent solar battery, in two adjacent solar-electricities
Functional layer between pond (100), which stacks, forms three isolation channels (21,22,23) in (12).First isolation channel (21) is at least formed
It in the first contact layer (121) and can also be formed in photovoltaic layer (122), as shown in fig. 1.The first isolation channel electricity consumption is exhausted
Edge material (2) is filled, such as photoresist, and the first contact layer area of adjacent solar cell is made to be electrically insulated.Second every
It is only formed in photovoltaic layer (122) from slot (22) and is filled with conductive material, for example, with the material of the second contact layer (123)
Material filling.First contact layer area of second isolation channel in the second contact layer area of solar cell and adjacent solar battery
Between electrical connection is provided.Third isolation channel (23) is interior at least formed on the second contact layer (123), as shown in fig. 1, and can also shape
At in photovoltaic layer (122).The third isolation channel electrically insulating material fills and makes the second of adjacent solar cell to connect
Contact layer area is electrically insulated.
Fig. 2 shows according to present application for during monitoring the exemplary implementation scheme of method of laser scribing process
The plan view of semi-finished product solar energy module (10).Fig. 3 and 4 is schematically shown along line A-A, (Fig. 3) and along line B-B,
The cross section of the semi-finished product solar energy module (10) of (Fig. 4).The schema illustratively illustrates for monitoring the second isolation channel
The method of the laser scribing of second part (22b).However, the principle of the method can be used for any isolation through laser scribing
Slot is not removed and therefore deposits as long as at least one layer removed by forming isolation channel is opaque for irradiation light
It is transparent for irradiation light to be to be formed by all other layer above and below isolation channel.
Semi-finished product solar energy module (10) includes that transparent substrates (11) and functional layer stack (12), and the functional layer stacks
(12) only include the first contact layer (121) and photovoltaic layer (122).Semi-finished product solar energy module (10) has first surface (101),
The first surface is the surface of photovoltaic layer (122) in the illustrated example.First surface and semi-finished product solar energy module
Relatively, the second surface is the surface of transparent substrates (11) to second surface (102).First isolation channel (21) has been formed on function
Layer heap is folded in the current layer of (12), that is, it is interior to be formed in the first contact layer (121) and photovoltaic layer (122), and with insulating materials (2)
Filling.First isolation channel (21) is stretched along the first lateral (x) from the first side (103) of semi-finished product solar energy module (10)
To the second side (104) of semi-finished product solar energy module (10).First side (103) and the second side (104) are along the first side
It is relative to each other to direction (x).Second isolation channel is formed as isolated part (22a-22c) in this exemplary implementation scheme, but also
The second side (104) can be extended to from the first side (103).Each section (22a-22c) has along the first lateral (x)
Length (the l measured1), wherein the length (l1) can be different or identical for different parts (22a-22c).In addition,
Each section (22a-22c) has the width (w measured along the second lateral (y)1).Second lateral (y) is orthogonal to
First lateral (x) simultaneously defines the plane for being parallel to first surface (101) with first lateral (x).Width (w1)
Can be different or identical for different parts (22a-22c).Width (w1) it can be at model between 20 μm and 80 μm
In enclosing, such as 50 μm.First isolation channel (21) extends substantially downward to transparent substrates along third direction (z) from first surface (101)
(11), the third direction (z) is orthogonal to the first lateral (x) and is orthogonal to the second lateral (y) and is thickness direction.
The part (22a-22c) of second isolation channel extends substantially downward to the first contact layer along third direction (z) from first surface (101)
(121)。
First part (22a) and second part (22b) have been formed, and wherein Part III (22c) forming process is still carrying out
In.This is indicated by the first surface (101) that laser beam (30) impacts in laser beam area (3).Laser beam (30) is along first
Lateral (x) is mobile above first surface (101), thus to the part scribing of the second isolation channel.The shifting of laser beam (30)
Dynamic to be realized by moving semi-finished product solar energy module (10) in transmission direction (V), the transmission direction (V) is lateral first
On the negative direction in direction (x).
It has been formed wherein in the region of first surface (101) of the second isolation channel, for example, in second part (22b)
In region, illumination beam (40) impacts on semi-finished product solar energy module (10), and irradiated region (4) is consequently formed.In the second isolation
The photovoltaic layer (122) removed in the part (22a-22c) of slot is opaque at least one of illumination beam (40) wavelength, and
Transparent substrates (11) and the first contact layer (121) are transparent.Preferably, illumination beam includes the light or right of only one wavelength
In most of wavelength in illumination beam (40), photovoltaic layer (122) is opaque, transparent substrates (11) and the first contact layer
(121) it is transparent.
Irradiated region (4) has the length (l measured on the first lateral (x)2) and surveyed on the second lateral (y)
Width (the w obtained2).Length (the l of irradiated region (4)2) it is less than the length (l of second part (22b)1).However, the length of irradiated region
It can length identical as the length of second part or even greater than second part.Width (the w of irradiated region (4)2) always greater than
Width (the w of two parts (22b)1).Therefore, the only a part at least along the second lateral in illumination beam (40) can be worn
Cross semi-finished product solar energy module (10), that is, there is no photovoltaic layer (122) and formed in those of transmitted light beam (41) region,
As shown in Figure 3.The amount of transmitted light can be then detected, for example, detected with photometer, it is such as illustrated later.
Although the method according to present application is as shown in Figures 2 to 4, laser beam and illumination beam impact are in semi-finished product solar energy
On the same surface of module, but this it is not necessary to.The laser beam and illumination beam can also be impacted in semi-finished product solar energy
On the different surfaces of module.In addition, illumination beam is that stratum boundary of the impact as shown in Figures 2 to 4 in being stacked by functional layer is fixed
On the surface of semi-finished product solar energy module or impact is on the surface of the semi-finished product solar energy module defined by transparent substrates
It is not important.
In addition, the first isolation channel (21) and/or the insulating materials (2) in first isolation channel can also use illumination beam
(40) it checks.It may be it is required that illumination beam includes then the light with another wavelength, such as in the portion for checking the second isolation channel
Divide as in the case of (22a-22c), the unused any material filling in part of second isolation channel.
In addition, the different illumination beams comprising different wave length can be used for the amount of the transmitted light from the different wave length detected
Difference obtains information.However, an illumination beam for including different wave length also can be used, however wherein transmitted light beam must be divided
The amount of the transmitted light of beam and different wave length must be detected by different detection devices.At least one of functional layer stacking layer must
Must be by its transmissivity from being changed to opaque for different wavelength is transparent, vice versa.
About Fig. 5 A and 5B, the shape of the isolation channel by the process generation of laser scribing is shown, to being formed by isolation
The possible detection of slot, and corresponding to the transmitted light detected amount and allow the letter of the assessment to being formed by isolation channel
Number.Fig. 5 A show the enlarged plan view for being formed by the second isolation channel (22).Second isolation channel (22) by semi-finished product too
Mobile pulse laser is formed above the first surface (101) of positive energy module, wherein single, substantially circular laser beam shines
Exit point (3a) is formed in first surface (101).However, other shapes of laser beam point of irradiation is also possible.For generating
The device of laser beam forms 10 to 50 laser beam points of irradiation (3a) usually in the length of isolation channel per mm.Adjacent is single sharp
Light beam point of irradiation (3a) overlaps each other so that the laser beam point of irradiation forms the continuous channel with wave edges.If according to
Irradiating light beam is mobile above first surface (101) also along the extension of the second isolation channel (22), then the transmitted light detected
Amount also have wave process, such as it is visible in figure 5B.By example, show to generate by the device of the amount for detection light and
Corresponding to the electric signal of the amount of the light detected.That is, the amount detected not instead of steady state value, vibrates around mean value.
However, if in isolation channel existing defects, for example, region (3b), wherein laser beam point of irradiation is missed, then examining
The amount measured greatly deviates from this mean value.This passes through the undershoot in the signal corresponding to the region (3b) for missing laser beam point of irradiation
It shows.If isolation channel is too wide, the positive spike in signal will be generated.It can correspond to not permissible and mean value deviation
Define lower limiting value (TL) and upper limit value (TU).If signal violates one in these threshold values, it is detected as defect.In addition, because
Correspond to the specific region of the second isolation channel (22) for the amount of each light detected, so the position of defect can determine and later
In where applicable for reforming.
Other threshold value can be defined to control the stability of laser beam and/or the width of isolation channel.To detect isolation
The failure of the laser beam of drift or increase number in the parameter of slot, also statistics routine can be used to assess in given time period
Generated signal other parameters, such as mean value or amplitude (the minimum difference between peak within the period of signal
Value).
A kind of drift for continuously checking isolation channel and detecting defect or device parameter is provided according to the present processes
Simple, quickly and very effective mode.It need not take pictures to some random areas of isolation channel, and a large amount of numbers need not be collected
According to.The signal obtained can automatically be assessed by machine using suitable appraisal procedure, and the machine can also be according to assessment
As a result the device for generating laser beam is controlled.
In addition, can not only find defect, but also the distance between isolation structure can be measured, if the structure passes through tool
If the zone isolation for having the transmissivity different from structure itself.
Fig. 6 shows the system that the laser scribing process of isolation channel is used to form according to the application monitoring in a schematic way
(200).System (200) includes for generating the device of laser beam (300), for the device (400) of irradiation, for detection light
The device (500) of amount and for assessing the device (600) for being formed by isolation channel.System (200) can also comprise transmission dress
Set (700), memory device (800), control device (900) and/or suction unit (950).Some in these devices, preferably
Ground, the device (300) for generating laser beam, for the device (400) of irradiation, the device (500) of the amount for detection light passes
Defeated device (700) and suction unit (950) are arranged in the same equipment (250) for executing laser scribing process.For
The device (300) for generating laser beam is suitable for stacking interior formation isolation channel in functional layer with laser beam is formed by.For shining
The device (500) of the device (400) and the amount for detection light penetrated is suitable for a certain region generation pair by irradiating isolation channel
Ying Yu is formed by the signal of at least one characterisitic parameter such as width of isolation channel, and detects and to transmit as described above
The amount of light.Generated signal is then by for assessing device (600) assessment for being formed by isolation channel.Assessment result is subsequent
May be recorded in memory device (800) or be transferred to control device (900), the control device can according to assessment result come
Control the device (300) and transmitting device (700) for generating laser beam.Suction unit (950) be suitable for removal by formed every
The gas or particle that process from slot generates, exactly so that these gases and particle do not interfere the irradiation or detection of light.
Fig. 7 shows the example of this system.In the equipment (250) for executing laser scribing process, arrange for generating
The device (300) of laser beam, for two devices (400a, 400b) of irradiation, two devices of the amount for detection light
(500a, 500b), the roller (710) and suction unit (950) of transmitting device.Semi-finished product solar energy module (10) is along first
Lateral (x) passes through the equipment for executing laser scribing process in transmission direction (V) by roller (710) movement
(250) or in the equipment it moves.However, mobile station or any other suitable device also are used as transmitting device.Half
On first side of finished product solar energy module (10), such as below the semi-finished product solar energy module, for generating laser beam
Device (300) and the device (500a, 500b) of the amount for detection light are mounted on the first common mechanically retained device (261),
The dress for generating laser beam is wherein mounted on along the first lateral (x) for the first device (500a) of the amount of detection light
It sets on first side of (300), the second device (500b) of the amount for detection light is mounted on along the first lateral (x) to be used for
In the second side for generating the device (300) of laser beam.The second side is the opposite side of the first side.Device for generating laser beam
(300) laser optics for including laser device (310) for generating laser and being used to form laser beam (30)
(320).Function of the laser beam (30) from transparent substrates (11) the removal semi-finished product solar energy module (10) in laser beam region (3)
Layer heap folds (12), and isolation channel is consequently formed.For example, it does so and is used to form the first isolation channel, as shown in Figure 1.
Suction unit (950) in the second side of semi-finished product solar energy module (10), for example, in the semi-finished product
Above solar energy module and on axis identical with laser beam axis, for remove formed gas that isolation channel generates and
Grain.Suction unit (950) and device (400a, 400b) for irradiation are mounted on the second common mechanically retained device (262),
The first device (400a) for being wherein used for irradiation is mounted on the first side of suction unit (950) along the first lateral (x),
And the second side of suction unit (950) is mounted on along the first lateral (x) for the second device (400b) of irradiation.With
It is installed such that the first device (400a) for irradiation and the amount for detection light in the first device (400a) of irradiation
First device (500a) on the same axis, and the second device (400b) for irradiation be installed such that it is described for shining
The second device (500b) of the second device (400b) penetrated and the amount for detection light is on the same axis.Preferably, swashing
The axis of light beam with for the distance between the axis of first device (the 400a) (a of irradiation1) be equal to laser beam axis with
The distance between the axis of second device (400b) for irradiation (a2).However, distance a1And a2It can also be different.First is solid
Holder (261) and the second holder (262) ensure distance a1And a2For fixed value, and for the device (400a, 400b) of irradiation with
The paraxial arrangement of the related device (500a, 500b) of the corresponding amount for detection light.In addition, illumination beam (40) automatically with
It is formed by isolation channel alignment.
Each device (400a, 400b) for irradiation includes：Lamp (410), such as LED light；And form illumination beam
(40) illuminated optical apparatus (420).Each device (500a, 500b) of amount for detection light includes detection Optical devices
(510) and detector (520).Detection Optical devices (510) guide transmitted light beam (41) to detector (520), the detection
Device (520) generates corresponding signal.
This signal is transferred to the device (600) for assessment via data line (610), and the data line can be data conductor
Or wireless data line.For example, the device (600) for assessment can be computer, the computer may be arranged at sharp for executing
On the outside of the equipment (250) of light scribing processes.
If executing laser scribing process, semi-finished product solar energy module (10) can be first along the first lateral
(x) it moves in a first direction, for example, moving in the negative x direction.This is shown by the arrow with reference mark V in the figure 7
Go out.In the case, first device (500a) work of the first device (400a) and the amount for detection light that are used for irradiation is simultaneously
Realize the inspection for being formed by isolation channel.When laser beam (30) and illumination beam (40) reach semi-finished product solar energy module (10)
When side (that is, right end in Fig. 7), semi-finished product solar energy module (10) is moved to second then along the first lateral (x)
In direction.Second direction is opposite with first direction.That is, if first direction is negative x-direction, second direction is just
The directions x.When semi-finished product solar energy module (10) is moved in second direction, laser beam (30) forms another isolation channel.Herein
In the case of, it works for the second device (400b) of irradiation and the second device (500b) of the amount for detection light and realizes institute's shape
At isolation channel inspection.One device for irradiation is set on every side of the device (300) for generating laser beam
Device (the 500a, 500b) permission of (400a, 400b) and an amount for detection light exists in semi-finished product solar energy module (10)
Mobile period in both direction, which checks, is formed by isolation channel.Do so save the time and eliminate for make to be formed by every
From slot and illumination beam (40) alignment procedures aligned with each other.
The embodiment of the present invention described in the foregoing written description is the example by illustrating to provide and the present invention never limits
In this.The combination of any modification, change type and equivalent arrangements and embodiment should be considered being comprised in the present invention's
In range.
Reference numeral
1. solar energy module
2. insulating materials
3. laser beam area
The single laser beam points of irradiation of 3a
The laser beam point of irradiation that 3b is missed
4 irradiated regions
10 semi-finished product solar energy modules
11 transparent substrates
12 functional layers stack
13 backing bottoms
21 first isolation channels
22 second isolation channels
The part of the second isolation channels of 22a-22c
23 third isolation channels
30 laser beams
40 illumination beams
41 transmitted light beams
100 solar cells
The first surface of 101 semi-finished product solar energy modules
The second surface of 102 semi-finished product solar energy modules
First side of 103 semi-finished product solar energy modules
Second side of 104 semi-finished product solar energy modules
121 first contact layers
122 photovoltaic layers
123 second contact layers
200 system for monitoring laser scribing process
250 equipment for executing laser scribing process
261 first holders
262 second holders
300 device for generating laser beam
310 laser devices
320 laser opticses
400 device for irradiation
First devices of the 400a for irradiation
Second devices of the 400b for irradiation
410 lamps
420 illuminated optical apparatus
500 device for the amount of detection light
First devices of the 500a for the amount of detection light
Second devices of the 500b for the amount of detection light
510 detection Optical devices
520 photodetectors
600 device for assessment
610 data lines
700 transmitting devices
710 rollers
800 memory devices
900 control devices
950 suction units
a1Axis in laser beam between the axis of the first device for irradiation at a distance from
a2Axis in laser beam between the axis of the second device for irradiation at a distance from
l1The length of isolation channel
l2The length of irradiated region
w1The width of isolation channel
w2The width of irradiated region
TLLower limiting value
TUUpper limit value
The transmission direction of V semi-finished product solar energy modules
The first laterals of x
The second laterals of y
Z third directions
Claims (17)
1. a kind of method for monitor in solar energy module the laser scribing process of formation isolation channel, the method includes with
Lower step：
Semi-finished product solar energy module is provided, the semi-finished product solar energy module includes functional layer stacking on a transparent substrate,
Functional layer stacking includes at least one of the first contact layer, photovoltaic layer and second contact layer,
It at least one of is stacked in the functional layer using laser beam and forms isolation channel in layer, the laser beam removal is in institute
At least one layer during the functional layer in the region of isolation channel stacks is stated,
The region of the semi-finished product solar energy module is irradiated at the first surface of semi-finished product solar energy module, wherein the photograph
Area is penetrated to cover at least part of the isolation channel on the first lateral and be orthogonal to the of first lateral
The entire isolation channel and peripheral region are covered on two laterals,
Detection is transmitted through the photograph of the semi-finished product solar energy module at the second surface of semi-finished product solar energy module
The amount of the light in area is penetrated, wherein the device for detecting the light is arranged in the device for irradiation at identical optical axis, and
Assessed at least one reference value by comparing the amount of the light detected formed in the irradiated region it is described
Isolation channel.
2. according to the method described in claim 1, it is characterized in that, the region of the semi-finished product solar energy module is with including
The light of first wave length irradiates, and all layers not being removed in the transparent substrates and functional layer stacking are for described first
Wavelength is transparent, and at least one layer being removed in functional layer stacking is opaque for the first wave length
's.
3. according to the method described in claim 1, it is characterized in that,
The functional layer stacking includes at least two layers,
At least one of functional layer stacking layer is removed in the region of the isolation channel,
The step of irradiation includes：The first sub-step of the semi-finished product solar energy module is irradiated with the light with first wave length
Suddenly, all layers not being removed in the transparent substrates and functional layer stacking are transparent for the first wave length,
And at least one layer being removed in the functional layer stacking is opaque for the first wave length；And with the
The light of two wavelength penetrates the second sub-step of the semi-finished product solar energy module, and the transparent substrates are for the second wave length
Bright, and at least one layer being removed in functional layer stacking is opaque and described for the second wave length
Functional layer stack in being removed and be opaque at least another layer to the first wave length being transparent to the second wave length
Or the functional layer stack at least one layer not being removed be for the second wave length it is opaque,
The step of detection includes：Detection is with the first wave length and is transmitted through the semi-finished product solar energy module
First sub-step of the amount of the first light, and detection with the second wave length and are transmitted through the semi-finished product solar energy module
The second light amount the second sub-step, and
By by the amount of first light detected and the amount of second light detected and corresponding reference value relatively come
Isolation channel is formed by described in assessment.
4. according to the method described in claim 1, the method further includes with saturating with first for the light with third wavelength
Penetrate the step of material of rate fills the isolation channel, the functional layer stack at least one layer being removed for described the
Three wavelength are opaque, and all layers not being removed in the transparent substrates and functional layer stacking are to the third
Wavelength is transparent, and all layers not being removed during the functional layer stacks are second for the transmissivity of the third wavelength
Transmissivity, second transmissivity are more than first transmissivity, and the method is characterized in that, the semi-finished product solar energy mould
The region of block is illuminated after the step for filling the isolation channel with material, wherein with the third wavelength
The characteristic of the material that light is used to irradiate, and be filled into the isolation channel the assessment the step of in by by the inspection
The amount of the light measured is compared to assess with corresponding reference value.
5. according to the method described in claim 1, it is characterized in that, being used to form the laser beam of the isolation channel described
It is relatively moved on described first or described second surface of semi-finished product solar energy module, and the device and described for irradiation
For detecting the device of the light in a manner of identical with the laser beam correspondingly in the institute of the semi-finished product solar energy module
It states and is relatively moved on the first or described second surface, the irradiation is detected and is directed to along first side the step of assessment
It is executed to direction along the multiple regions that the extension of the isolation channel is arranged.
6. according to the method described in claim 5, it is characterized in that, the device for irradiation and described described for detecting
The device of light follows directly after the laser beam with fixed range.
7. according to the method described in claim 5, it is characterized in that, a series of amount of light continuously detected is used for described
The device of the irradiation and mobile period for detecting the device of the light obtains, and is held in described the step of being used to assess
Row statistical estimation routine needs to change the parameter if detected by the statistical estimation routine, and the method is also wrapped
The step of including the parameter for changing the device for generating the laser beam.
8. a kind of system for monitoring the laser scribing process for forming isolation channel in solar energy module, the system comprises：
Device for generating laser beam, the laser beam are suitable for by removing the function layer heap in the region of isolation channel
At least one of folded layer, to be formed at least one layer in the functional layer of semi-finished product solar energy module stacking
The isolation channel, the functional layer stacking includes at least one of the first contact layer, photovoltaic layer and second contact layer and cloth
It sets on a transparent substrate,
Dress for the region for irradiating the semi-finished product solar energy module at the first surface of the semi-finished product solar energy module
It sets, wherein the irradiated region covers at least part of the isolation channel on the first lateral and is being orthogonal to described first
The entire isolation channel and peripheral region are covered on second lateral of lateral,
It is transmitted through the semi-finished product solar energy module for being detected at the second surface of the semi-finished product solar energy module
The device of the amount of the light of the irradiated region, wherein the device for detecting the light is arranged with the device for irradiation
At identical optical axis, and
For by being compared to assess institute's shape in the irradiated region by the amount of the light detected and reference value
At isolation channel device.
9. system according to claim 8, which is characterized in that the device for irradiation, which is suitable for transmitting, has first
The light of wavelength, all layers not being removed during the transparent substrates and the functional layer stack are for the first wave length
Bright, and at least one layer being removed in functional layer stacking is opaque for the first wave length.
10. system according to claim 8, which is characterized in that the device for irradiation, which is suitable for transmitting, has the
The light of one wavelength and it is suitable for light of the transmitting with second wave length, the second wave length is different from the first wave length.
11. system according to claim 10, which is characterized in that the first wave length is located in visible region, and described
Second wave length is located in infrared or in the area UV.
12. system according to claim 8, which is characterized in that the system comprises transmitting device, the transmitting device is used
In realize it is described for generate the device of laser beam along first lateral the semi-finished product solar energy module institute
State the relative movement on the first or described second surface, and for realizing the device for irradiation and described for detecting institute
State the device of light by with it is described for generate the device of laser beam it is identical in a manner of correspondingly in the semi-finished product solar energy module
The described first or described second surface side relative movement.
13. system according to claim 12, which is characterized in that the device for generating laser beam and described be used for
The device of irradiation is arranged in the equipment for executing laser scribing process so that the two devices are along the described first lateral side
To with the first distance.
14. system according to claim 12, which is characterized in that the amount for the first device of irradiation and for detection light
First device be arranged in first side for generating the device of laser beam along first lateral, and be used for
The second device of the second device of irradiation and amount for detection light is arranged in described sharp for generating along the first direction
In the second side of the device of light beam, wherein the second side is opposite with first side, the transmitting device is suitable for described
Above described first and the second surface of semi-finished product solar energy module this in a first direction in both second directions along
First lateral relatively moves the device for generating laser beam and first and the institute for irradiation
Second device is stated, wherein the second direction is opposite to the first direction.
15. system according to claim 8, the system also includes the areas for storing the semi-finished product solar energy module
The memory device of the position in domain, for the region, the defect of the isolation channel is known by the device for assessment
Not.
16. system according to claim 8, the system also includes control device, the control device is used for according to logical
The result that the device for assessment provides is crossed to control the device for generating laser beam.
17. system according to claim 8, which is characterized in that the transparent substrates first side position formed described half at
The surface of product solar energy module, the system also includes suction unit, the suction unit is arranged in the semi-finished product solar energy
In the second side of module, and it is suitable for the gas and shell that are generated by scribing processes pumping out the semi-finished product solar energy module
Environment, wherein the second side is opposite with first side.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2016/112416 WO2018119680A1 (en) | 2016-12-27 | 2016-12-27 | Method and system for monitoring laser scribing process for forming isolation trenches in solar module |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108604618A true CN108604618A (en) | 2018-09-28 |
| CN108604618B CN108604618B (en) | 2022-12-06 |
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|---|---|---|---|
| CN201680074172.0A Active CN108604618B (en) | 2016-12-27 | 2016-12-27 | Method and system for monitoring a laser scribing process for forming isolation trenches in a solar module |
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| Country | Link |
|---|---|
| JP (1) | JP6708756B2 (en) |
| CN (1) | CN108604618B (en) |
| DE (1) | DE112016006757T5 (en) |
| WO (1) | WO2018119680A1 (en) |
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| JP2021136780A (en) * | 2020-02-27 | 2021-09-13 | 三星ダイヤモンド工業株式会社 | Inspection device for solar cell |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2018119680A1 (en) | 2018-07-05 |
| CN108604618B (en) | 2022-12-06 |
| DE112016006757T5 (en) | 2018-12-27 |
| JP6708756B2 (en) | 2020-06-17 |
| JP2019517157A (en) | 2019-06-20 |
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