CN108593195B - High-temperature hydraulic pressure sensor packaging structure - Google Patents

High-temperature hydraulic pressure sensor packaging structure Download PDF

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Publication number
CN108593195B
CN108593195B CN201810417624.1A CN201810417624A CN108593195B CN 108593195 B CN108593195 B CN 108593195B CN 201810417624 A CN201810417624 A CN 201810417624A CN 108593195 B CN108593195 B CN 108593195B
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China
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outer cover
pressure sensor
ceramic base
cylinder
hydraulic pressure
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CN201810417624.1A
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CN108593195A (en
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朱平
裴振伟
郭学敏
冷贺彬
雷武
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North University of China
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North University of China
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0609—Pressure pulsation damping arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0681—Protection against excessive heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/142—Multiple part housings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention relates to a high-temperature hydraulic pressure sensor packaging structure which comprises a ceramic base, a gland, a central tube, an inner tube, a cylinder barrel, an outer cover sleeve and an inner cover cap, wherein the ceramic base is provided with a plurality of through holes; the ceramic base is provided with a first groove and a second groove along the axial upper surface and the axial lower surface respectively, a substrate is placed in the first groove, an SOI pressure sensitive chip is bonded on the substrate, and a first heat sink structure is placed in the second groove. The central tube is arranged at the periphery of the ceramic base and is in limit fit with the ceramic base, the cylinder barrel is arranged at the upper part of the central tube, a gap is formed between the cylinder barrel and the inner cylinder, and a second heat sink structure and a piston are respectively arranged at the inner lower part and the upper part of the gap; the outer cover is arranged on the outer side of the inner cylinder, and a ring key is arranged between the inner cylinder and the outer cover; the ring key is embedded in a ring groove between the inner cylinder and the outer cover, and the outer cover sleeve is fixedly installed at the bottom of the outer cover. The packaging structure can effectively reduce the influence of process stress and high-temperature thermal stress on the sensitive chip of the pressure sensor, and achieves the purpose of ensuring the reliable measurement of the sensor.

Description

High-temperature hydraulic pressure sensor packaging structure
Technical Field
The invention relates to a pressure sensor, in particular to an SOI pressure sensor packaging structure applied to a hydraulic system.
Background
The development of a hydraulic system is towards high pressure and high power, and the problems of system ineffective power increase, oil pollution, pressure pulsation and the like are caused. The hydraulic system reactive power is mainly reflected in that a large amount of heat energy is generated, and the heat energy mainly comes from pump source volume loss and mechanical loss, hydraulic long pipeline on-way loss, throttling loss of an electro-hydraulic valve, volume loss of an actuating cylinder, hydraulic system temperature rise caused by pneumatic action in a reverse stroke and the like; the high temperature of the hydraulic system causes the viscosity of hydraulic oil to be reduced, the oil film on the sliding surface to be damaged, the abrasion to be accelerated, the early aging of a sealing element and the leakage of the oil to be increased, the high temperature also causes the oil to be oxidized and deteriorated in an accelerated way, the clearance of a kinematic pair to be reduced, and the generated sediment can block hydraulic elements; the pipeline vibration caused by the pressure pulsation is a main reason of failure of a plurality of hydraulic systems, and the pressure pulsation and the pipeline vibration caused by the flow pulsation bring more serious noise along with the high-pressure of the hydraulic systems, and can cause catastrophic accidents to occur to the pipeline system and the corresponding measuring system under overload or fatigue load. Therefore, accurate and reliable feedback signals are the prerequisite for fault diagnosis and high-precision servo control of the hydraulic system, wherein pressure signals are the most important feedback signals of the working condition of the hydraulic system.
Due to the fact that the working temperature of the high-power hydraulic system is high, the measuring temperature of the commercial hydraulic pressure sensor is lower than 125 ℃, and the high-power hydraulic system cannot work within the temperature range of 150 ℃. The main reason is that the existing hydraulic pressure sensor packaging technology can not ensure the sensor to work stably for a long time under severe hydraulic environments such as high temperature, strong vibration, corrosiveness and the like. The sensor packaging structure is the connection of the pressure sensitive chip and the carrier or the tube shell, and the performance of the sensor is directly influenced by the quality of packaging. The packaging method of the pressure sensor mainly comprises a soft sealing method and a hard sealing method. Soft sealing refers to the bonding of silica gel and epoxy. Hard sealing refers to anodic bonding, direct silicon bonding, eutectic bonding, glass sealing, and the like. Because the pressure sensor needs to work in a severe hydraulic environment, the common packaging technology cannot well meet the packaging requirements of the hydraulic pressure sensor.
From the above analysis, the biggest problem of pressure sensor packaging under severe hydraulic environments such as high temperature, strong vibration, corrosiveness and the like is to ensure that the pressure sensitive chip can stably measure pressure for a long time in a large temperature range.
Disclosure of Invention
The invention aims to provide a high-temperature hydraulic pressure sensor packaging structure to realize stable work of a pressure sensitive chip in a large temperature range.
In order to solve the technical problems, the invention adopts the technical scheme that: a high-temperature hydraulic pressure sensor packaging structure comprises a ceramic base, a gland, a central tube, an inner tube, a cylinder barrel, an outer cover sleeve and an inner cover cap;
the upper surface and the lower surface of the ceramic base along the axial direction are respectively provided with a first groove and a second groove, a substrate is placed in the first groove, an SOI pressure-sensitive chip is bonded on the substrate, and a first heat sink structure is placed in the second groove; a gland is arranged at the bottom of the ceramic base, and mounting holes for mounting lead posts are correspondingly formed in the ceramic base and the gland;
the central tube is arranged at the periphery of the ceramic base and is in limit fit with the ceramic base, and the side surface of the gland is in contact fit with the inner wall of the central tube;
the inner cylinder is arranged on the outer side of the central tube and is fixedly connected with the outer wall of the central tube through threads;
the cylinder barrel is arranged at the upper part of the central tube, a gap is formed between the cylinder barrel and the inner tube, and a second heat sink structure and a piston are respectively arranged at the lower part and the upper part in the gap;
the outer cover is provided with a closed top surface and an open bottom, the outer cover is arranged on the outer side of the inner cylinder, and a ring key is arranged between the inner cylinder and the outer cover; the ring key is embedded in a ring groove between the inner cylinder and the outer cover;
the bottom of the outer cover is fixedly provided with an outer cover sleeve;
an inner hood cap with a central hole is arranged at the inner upper part of the outer hood, a first cavity is formed by the inner hood cap and the inner side of the top surface of the outer hood, and a needle base is arranged in the first cavity; the inner cover cap and the gland form a second cavity, and the ceramic base is arranged in the second cavity; the needle base is provided with a central boss matched with the central hole of the inner hood, and an ejector pin is arranged between the central boss and the SOI pressure-sensitive chip.
Furthermore, the inner side of the upper part of the central tube is sunken to form a step body structure, a gap is formed between the upper part of the step body structure and the ceramic base, and first glass is accommodated in the gap.
Further, the edge of the bottom of the ceramic base is provided with an annular concave part, and the lower part of the step body structure is in limit fit with the concave part.
Further, a second glass is arranged on the inner wall of the mounting hole.
Further, pre-oxidizing the FeNiCo kovar alloy lead wire before sealing the second glass to generate a layer of FeO and Fe on the surface of the FeCo kovar alloy lead wire3O4And (5) oxidizing the film.
Further, the first heat sink structure and the second heat sink structure are composed of fins and a phase-change material, wherein the phase-change material is a mixture of long-wall carbon nanotubes and paraffin with an addition amount of 30% (mass percentage).
Furthermore, a double-conical-surface rubber sealing ring is arranged on the contact surface of the outer cover sleeve and the outer cover.
Furthermore, an O-shaped rubber sealing ring, a contact surface of the outer cover and the inner cylinder, a contact surface of the inner cylinder and the piston, a contact surface of the inner cylinder and the cylinder and a contact surface of the cylinder and the piston are arranged on one or more contact surfaces.
Further, the whole packaging structure is a cylinder, and the ratio of the diameter to the length of the cylinder is D/L = 0.4-0.5.
Further, the end face of the outer cover is provided with micron-sized radial convergent taper of 2 degrees.
In the invention, the expansion force generated after the second heat sink structure is heated to be softened and melted pushes the piston to enable the piston to slide over the position for locking the ring key, the ring key falls onto the cylinder barrel after being unlocked, and the outer cover and the inner barrel slide relatively, thereby realizing the compensation of the micro-expansion of each part under the action of thermal stress. The packaging structure not only can effectively reduce the influence of process stress and high-temperature thermal stress on the sensitive chip of the pressure sensor, but also can resist vibration and corrosion-resistant liquid, thereby achieving the purpose of ensuring the reliable measurement of the sensor.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate exemplary embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention.
Fig. 1 is a schematic diagram of a pressure sensor package structure.
Fig. 2 is a schematic view of the structure of the housing.
Fig. 3 is a schematic structural view of the ceramic susceptor.
In the figure, 1-ceramic base, 2-gland, 3-central tube, 4-inner tube, 5-cylinder, 6-outer cover, 7-outer cover sleeve, 8-inner cover cap, 9-first groove, 10-second groove, 11-substrate, 12-SOI pressure sensitive chip, 13-first heat sink structure, 14-lead column, 15-mounting hole, 16-second heat sink structure, 17-piston, 18-ring key, 19-needle seat, 20-thimble, 21-first glass, 22-second glass, 23-double-conical rubber sealing ring, and 24- 'O' -type rubber sealing ring.
Detailed Description
In order that those skilled in the art will better understand the present invention, a more complete and complete description of the present invention is provided below in conjunction with the accompanying drawings and embodiments. It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
Aiming at the defects that the pressure sensor has low reliability under severe hydraulic environments such as high temperature, strong vibration, corrosivity and the like and the pressure measurement requirement of a hydraulic system is met, the invention designs the pressure sensor packaging structure which can be applied to the high-power hydraulic system.
The invention provides a high-temperature hydraulic pressure sensor packaging structure, and in a typical embodiment, referring to fig. 1, the high-temperature hydraulic pressure sensor packaging structure comprises a ceramic base 1, a gland 2, a central pipe 3, an inner cylinder 4, a cylinder barrel 5, an outer cover 6, an outer cover sleeve 7 and an inner cover cap 8.
Referring to fig. 3, the upper surface and the lower surface of the ceramic base 1 along the axial direction are respectively provided with a first groove 9 and a second groove 10, a substrate 11 is placed in the first groove 9, an SOI pressure sensitive chip 12 is bonded on the substrate 11, and a first heat sink structure 13 is placed in the second groove 10; the bottom of the ceramic base 1 is provided with a gland 2, and the ceramic base 1 and the gland 2 are correspondingly provided with mounting holes 15 for mounting the lead posts 14.
In the pressure sensor packaging structure, the SOI pressure-sensitive chip is carried in a substrate embedding mode, namely the SOI pressure-sensitive chip is embedded in a substrate which has high heat conductivity and is matched with the thermal expansion coefficient of the chip, so that the thermal property can be ensured, and the environmental isolation capability is not reduced. The substrate and the chip base material are both SOI materials.
The first heat sink structure 13 is used for transient thermal management of the chip to reduce thermal fatigue failure of the chip caused by sudden changes in operating temperature and the presence of temperature gradients.
The central tube 3 is arranged at the periphery of the ceramic base 1 and is in limit fit with the ceramic base, and the side surface of the gland 2 is in contact fit with the inner wall of the central tube 3.
The inner cylinder 4 is arranged outside the central tube 3 and fixedly connected with the outer wall of the central tube 3 through threads.
The cylinder 5 is arranged on the upper part of the central tube 3, a gap is formed between the cylinder 5 and the inner tube 4, and the inner lower part and the upper part of the gap are respectively provided with a second heat sink structure 16 and a piston 17.
Referring to fig. 1 and 2, the outer cover 6 has a closed top surface and an open bottom, the outer cover 6 is disposed outside the inner cylinder 4, and a ring key 18 is provided between the inner cylinder 4 and the outer cover 6; the ring key 18 is embedded in a ring groove between the inner cylinder 4 and the outer cover 5, and prevents the inner cylinder 4 and the outer cover 5 from generating displacement in the axial direction under normal conditions. The outer cover 5 bears the weight of each component, the telescopic compensation formed by the central pipe 3, the inner cylinder 4 and other components in a suspension mode, and the expansion force generated after the second heat sink structure is heated, softened and melted.
The bottom of the outer cover 6 is fixedly provided with an outer cover sleeve 7. The outer cover sleeve 7 and the outer cover 6 are fixed together through threaded connection. The outer cover sleeve 7 comprises a bottom cover body and a side edge formed by protruding along the inner side of the cover body, the side edge of the center tube 3 and the outer cover 6 are respectively connected with the inner wall of the outer cover 6 in a threaded mode along the outer side.
An inner hood cap 8 with a central hole is arranged at the inner upper part of the outer hood 6, a first cavity is formed by the inner hood cap 8 and the inner side of the top surface of the outer hood 6, and a needle base 19 is arranged in the first cavity; the inner hood cap 8 and the gland 2 form a second chamber, and the ceramic base 1 is arranged in the second chamber; the needle holder 19 has a central boss that mates with the central hole of the inner hood 8, with a thimble 20 disposed between the central boss and the SOI pressure sensitive chip 12.
According to the above embodiment, the expansion force generated after the second heat sink structure 16 is softened and melted by heat pushes the piston 17, so that the piston 17 slides over the position of the locking ring key 18, the ring key 18 falls onto the cylinder barrel 5 after being unlocked, and the outer cover 6 and the inner barrel 4 slide relatively, thereby realizing compensation of micro expansion of each component under the action of thermal stress.
As a preferred embodiment, referring to fig. 1, the inner side of the upper part of the central tube 3 is recessed to form a step structure, and a gap is formed between the upper part of the step structure and the ceramic base 1, and the gap accommodates a first glass 21.
As a relatively specific embodiment, referring to fig. 1, the bottom edge of the ceramic base 1 is provided with an annular recess, and the lower part of the stepped body structure of the central tube 3 is in limit fit with the recess.
In a preferred embodiment, referring to fig. 1, a second glass 22 is disposed on the inner wall of the mounting hole 15. The embedding of the lead wire is realized in the ceramic base 1 by adopting a crystallized glass sealing process, so that the tensile strength of the original glass can reach more than 5 times.
In a preferred embodiment, the FeCo-Cuvar wire is pre-oxidized to form a layer of FeO and Fe on the surface before sealing the second glass 223O4And the film is oxidized to improve the wettability of the glass on the metal surface and effectively control the sealing quality.
In a preferred embodiment, the first heat sink structure 13 and the second heat sink structure 16 are made of fins and a phase change material, wherein the phase change material is a mixture of long-wall carbon nanotubes and paraffin wax, and the amount of the phase change material is 30% (mass percentage), and the heat sink structure is used for adapting to the working occasions with intermittent heating characteristics or in a pulse-type temperature environment. And (3) mixing and adsorbing the long-wall carbon nano tube and the paraffin for 8 hours in a water bath environment at 100 ℃ by utilizing the characteristics of solid-liquid surface tension between the paraffin and the long-wall carbon nano tube, capillary force of a pore structure, a porous structure, non-polarity and the like, and preparing the composite heat sink material.
As a preferred embodiment, referring to fig. 1, a double-conical rubber sealing ring 23 is arranged on the contact surface of the outer cover sleeve 7 and the outer cover 6. The outer cover sleeve 7 and the outer cover 6 are fixedly connected together through threads, and the 1 double-conical-surface rubber sealing ring 23 is used for realizing the first-stage sealing, so that the influence of the deformation of the sealing ring caused by the thermal coupling deformation and the hydrostatic pressure lubrication action of the whole sealing end surface in a high-pressure environment is reduced.
In a preferred embodiment, an "O" rubber seal 24 is provided on one or more of the following contact surfaces: the contact surface of the outer cover 6 and the inner cylinder 4, the contact surface of the inner cylinder 4 and the piston 17, the contact surface of the inner cylinder 4 and the cylinder 5, and the contact surface of the cylinder 5 and the piston 17.
In order to prevent the high-temperature and high-pressure liquid from leaking from the outer cover 6 to the inner cylinder, 1O-shaped rubber sealing ring is arranged between the outer cover and the inner cylinder to realize the second-stage sealing. And O-shaped rubber sealing rings 24 are also arranged between the inner cylinder 4 and the cylinder 5, between the cylinder 5 and the piston 17, and between the piston 17 and the inner cylinder 4, so that high-temperature and high-pressure liquid cannot enter a sealed space formed by the inner cylinder 4, the cylinder 5 and the piston 17, and the second heat sink structure 16 in the sealed space cannot be polluted.
As a preferred embodiment, the package structure is a cylinder as a whole, and the ratio of the diameter to the length of the cylinder is D/L = 0.4-0.5. The longitudinal vibration response of the impulse impact elastic support cylinder in the hydraulic system can be limited within a certain range, and the pressure peak value is reduced as much as possible to avoid mechanical resonance.
In a preferred embodiment, referring to fig. 2, the end face of the housing 6 is provided with a micrometer-scale radial convergent taper of 2 ° to achieve mechanical sealing between the housing and the hydraulic pipe.
All metal structural parts can be coated with the polyphenylene sulfide/polytetrafluoroethylene coating by adopting an electrostatic spraying process so as to achieve the performances of high temperature resistance, corrosion resistance, scale inhibition, super hydrophobicity and friction and wear resistance.
The packaging structure provided by the invention is designed by adopting a method combining soft sealing and hard sealing, and the components of each packaging structure have good thermal conductivity, so that the phenomenon that the temperature of a certain component or part is too high can not occur; the thermal expansion coefficients of all parts of the whole packaging structure are relatively similar, and the packaging structure has better thermal shock resistance; each part of the packaging structure and all parts of the packaging structure need to have good thermochemical stability, and chemical reaction does not occur or occurs as little as possible under a high-temperature state; the packaging structure not only can effectively reduce the influence of process stress and high-temperature thermal stress on the sensitive chip of the pressure sensor, but also can resist vibration and corrosion-resistant liquid, thereby achieving the purpose of ensuring the reliable measurement of the sensor.
The scope of the invention is not limited to the above embodiments, and various modifications and changes may be made by those skilled in the art, and any modifications, improvements and equivalents within the spirit and principle of the invention should be included in the scope of the invention.

Claims (10)

1. A high-temperature hydraulic pressure sensor packaging structure comprises a ceramic base, a gland, a central tube, an inner tube, a cylinder barrel, an outer cover sleeve and an inner cover cap;
the upper surface and the lower surface of the ceramic base along the axial direction are respectively provided with a first groove and a second groove, a substrate is placed in the first groove, an SOI pressure-sensitive chip is bonded on the substrate, and a first heat sink structure is placed in the second groove; a gland is arranged at the bottom of the ceramic base, and mounting holes for mounting lead posts are correspondingly formed in the ceramic base and the gland;
the central tube is arranged at the periphery of the ceramic base and is in limit fit with the ceramic base, and the side surface of the gland is in contact fit with the inner wall of the central tube;
the inner cylinder is arranged on the outer side of the central tube and is fixedly connected with the outer wall of the central tube through threads;
the cylinder barrel is arranged at the upper part of the central tube, a gap is formed between the cylinder barrel and the inner tube, and a second heat sink structure and a piston are respectively arranged at the lower part and the upper part in the gap;
the outer cover is provided with a closed top surface and an open bottom, the outer cover is arranged on the outer side of the inner cylinder, and a ring key is arranged between the inner cylinder and the outer cover; the ring key is embedded in a ring groove between the inner cylinder and the outer cover;
the bottom of the outer cover is fixedly provided with an outer cover sleeve;
an inner hood cap with a central hole is arranged at the inner upper part of the outer hood, a first cavity is formed by the inner hood cap and the inner side of the top surface of the outer hood, and a needle base is arranged in the first cavity; the inner cover cap and the gland form a second cavity, and the ceramic base is arranged in the second cavity; the needle base is provided with a central boss matched with the central hole of the inner hood cap, and an ejector pin is arranged between the central boss and the SOI pressure-sensitive chip;
the expansion force generated after the second heat sink structure is heated to be softened and melted pushes the piston to enable the piston to slide through the position for locking the ring key, the ring key falls onto the cylinder barrel after being unlocked, and the outer cover and the inner barrel slide relatively.
2. The high temperature hydraulic pressure sensor package structure of claim 1, wherein: the inner side of the upper part of the central tube is sunken to form a step structure, a gap is formed between the upper part of the step structure and the ceramic base, and first glass is accommodated in the gap.
3. The high temperature hydraulic pressure sensor package of claim 2, wherein: the edge of the bottom of the ceramic base is provided with an annular depressed part, and the lower part of the step body structure is in limit fit with the depressed part.
4. The high temperature hydraulic pressure sensor package structure of claim 1, 2 or 3, wherein: and the inner wall of the mounting hole is provided with second glass.
5. The high temperature hydraulic pressure sensor package structure of claim 4, wherein: pre-oxidizing the FeNiCo kovar alloy lead wire before sealing the second glass to generate a layer of FeO and Fe on the surface3O4Oxide film。
6. The high temperature hydraulic pressure sensor package structure of claim 1, 2, 3 or 5, wherein: the first heat sink structure and the second heat sink structure are composed of fins and phase-change materials, wherein the phase-change materials are a mixture of long-wall carbon nanotubes and paraffin with the addition amount of 30% (mass percentage).
7. The high temperature hydraulic pressure sensor package of claim 6, wherein: the contact surface of the outer cover sleeve and the outer cover is provided with a double-conical rubber sealing ring.
8. The high temperature hydraulic pressure sensor package of claim 7, wherein: an O-shaped rubber sealing ring, a contact surface of the outer cover and the inner cylinder, a contact surface of the inner cylinder and the piston, a contact surface of the inner cylinder and the cylinder barrel, and a contact surface of the cylinder barrel and the piston are arranged on one or more contact surfaces.
9. The high temperature hydraulic pressure sensor package structure of claim 7 or 8, wherein: the whole packaging structure is a cylinder, and the ratio of the diameter to the length of the cylinder is D/L = 0.4-0.5.
10. The high temperature hydraulic pressure sensor package of claim 9, wherein: the end face of the outer cover is provided with micron-sized radial convergence taper of 2 degrees.
CN201810417624.1A 2018-05-04 2018-05-04 High-temperature hydraulic pressure sensor packaging structure Expired - Fee Related CN108593195B (en)

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