CN108588650A - A kind of method of vacuum cathode arc arc source device and depositing coating - Google Patents
A kind of method of vacuum cathode arc arc source device and depositing coating Download PDFInfo
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- CN108588650A CN108588650A CN201810384095.XA CN201810384095A CN108588650A CN 108588650 A CN108588650 A CN 108588650A CN 201810384095 A CN201810384095 A CN 201810384095A CN 108588650 A CN108588650 A CN 108588650A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
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Abstract
The present invention relates to a kind of vacuum cathode arc arc source device and in the method for rocket tube inner surface depositing coating, more particularly to a kind of vacuum cathode arc arc source device and the method for in-orbit attitude control engine jet pipe inner surface depositing coating, double elements liquid rocket rail/attitude control engine of aerospace craft can be applied to.The present invention is realized deposits protective coating using the in-orbit attitude control engine jet pipe inner surface of vacuum cathode arc ionic depositing method, different coating can be deposited as needed, such as simple metal coating (iridium coating layer, rhenium coating, niobium coating and molybdenum coating), alloy coat (platinum rhodium coatings, Mo W coatings, MCrAlYSiB coatings), improves the working performance of rail attitude control engine.
Description
Technical field
The present invention relates to a kind of vacuum cathode arc arc source device and in rocket tube inner surface depositing coating
Method, more particularly to the side of a kind of vacuum cathode arc arc source device and in-orbit attitude control engine jet pipe inner surface depositing coating
Method can be applied to double elements liquid rocket rail/attitude control engine of aerospace craft.
Background technology
Double elements liquid propellant rail attitude control engine is the important composition of modern space aircraft and strategy and tactics weapon
Part is widely used in orbits controlling, pose adjustment etc..
In recent years, the development of course of new aircraft or weapon, the requirement to engine performance are continuously improved, it is desirable that it improves ratio
Punching increases chamber pressure, to reduce the consumption of propellant and mitigate engine weight, and extends engine life or increases war
Slightly Weapon Range.Jet pipe allowable temperature is to determine one of the principal element of engine/motor specific impulse, and jet pipe material and its inner surface are anti-
The performance of shield coating then determines the performances such as operating temperature and the service life of engine.
Spacecraft track imports and the matrix of the double elements liquid propellant rail attitude control engine jet pipe of gesture stability
Material is generally niobium alloy, and coating system is silicochromium titanium material system, and the method prepared is mainly fused slurry method.The coating
The engine operating temperature of system and preparation method is at 1400 DEG C hereinafter, it is impossible to meet engine high performance requirements of new generation.
Invention content
The technology of the present invention solves the problems, such as：The above-mentioned deficiency for overcoming the prior art provides a kind of vacuum cathode arc arc
Jet pipe diameter of bore may be implemented in source device and method in rocket tube inner surface depositing coating, this method：Ф10-
50mm, jet pipe length：5-200mm；Coating on inner surface thickness：100-300μm；The coating layer thickness deposition rate of inner surface：1-5μ
The coating deposition method of m/min, the type of depositing coating：Simple metal coating (iridium coating layer, rhenium coating, niobium coating and molybdenum coating),
Alloy coat (Mo-W coatings, Nb-W coatings, Hf-Ta coatings, MCrAlYSiB coatings), improves the high temperature nargin of engine, prolongs
Engine life is grown.
Technical solution of the invention is：
A kind of vacuum cathode arc arc source device, which includes cathode targets, non-magnetic stainless steel impressed current anode, non-contact
Formula high-voltage pulse thread-leading arc, cooling water pipe, mandrel and electromagnetic coil；
The material of the cathode targets is iridium, rhenium, niobium, molybdenum, Mo-W, Nb-W, Hf-Ta or MCrAlYSiB；
When the internal diameter of jet pipe is more than 20mm, the cathode targets include hollow cylindrical section and hollow conical section；
The top of conical section is arc transition section, and the converging portion of the arc transition section and jet pipe matches (phase profiling)；The circular cone
Section is located at the top of cylindrical section, and the angle between the busbar of conical section and the central shaft of the conical section is 8-13 °；Cylindrical section it is interior
Surface carries internal thread, and the height of cylindrical section is 8-10mm, if the height of conical section is h, the length of jet pipe oral area to throat is
L, h=L-d, d=5-8；
When the internal diameter of jet pipe is less than or equal to 20mm, there is hollow transition between the cylindrical section and conical section
Section；The height of changeover portion is 20-25mm；
The non-magnetic stainless steel impressed current anode is hollow cylinder, the maximum outside diameter of the internal diameter of hollow cylinder than cathode targets
The outer diameter of big 10-15mm, hollow cylinder are 50-60mm；The height of hollow cylinder and the cylindrical section of cathode targets it is highly consistent；
The side of non-magnetic stainless steel impressed current anode carries a tapped through hole；
The non-contact type high voltage pulse striking includes copper core, porcelain bushing and molybdenum sleeve, and porcelain bushing is sleeved on copper core
Outside, molybdenum sleeve are sleeved on outside porcelain bushing, and the length of a diameter of 2-3mm of copper core, copper core are bigger 10- than the length of porcelain bushing
20mm, the internal diameter of porcelain bushing and the diameter of copper core match, and the length of porcelain bushing is 30-35mm, the outer diameter of porcelain bushing
For 10-12mm, the internal diameter of molybdenum sleeve and the outer diameter of porcelain bushing match, and the length of molybdenum sleeve is smaller than the length of porcelain bushing
The wall thickness of 10-15mm, molybdenum sleeve are 1-3mm；The outer surface of molybdenum sleeve carries external screw thread；
The material of the mandrel is the permeability magnetic material of low remanent magnetism, such as pure iron；Mandrel is hollow cylinder, the top of mandrel
Outer surface carry external screw thread, the wall thickness of mandrel is 3-5mm；The outer diameter of mandrel is 20-25mm；
The material of the electromagnetic coil is that high temperature resistant enamel covered wire is entwined, and the winding number of turns is enclosed for 500-800, height
For 100-150mm, the internal diameter of electromagnetic coil and the outer diameter of mandrel match；
The electromagnetic coil is wrapped in the outside of mandrel, and one end of mandrel connects cathode, the other end and cathode of mandrel
The cylindrical section of target bottom end is connected through a screw thread, and cooling water pipe extends to the conical section on cathode targets top after mandrel；It is non-
Magnetic stainless steel impressed current anode is sleeved on the outer surface of the cylindrical section of cathode targets；Non-contact type high voltage pulse striking passes through non-magnetic stainless
The tapped through hole of steel impressed current anode side is fixedly connected in non-magnetic stainless steel impressed current anode；Non-contact type high voltage pulse striking
The outer surface distance of the cylindrical section of copper core end face and cathode targets is 1-2mm.
A method of using vacuum cathode arc arc source device in rocket tube inner surface depositing coating, the party
The step of method includes：
(1) by cathode targets, non-magnetic stainless steel impressed current anode, the non-contact type high voltage in vacuum cathode arc arc source device
Pulse striking is placed into vacuum chamber, and electromagnetic coil is located at outside vacuum chamber, and a part for cooling water pipe and mandrel is located at vacuum chamber
Interior, another part of cooling water pipe and mandrel is located at outside vacuum chamber；
(2) jet pipe inner surface is cleaned；It is cleaned by ultrasonic using pickling and acetone when cleaning, and is dried；
(3) outer surface of the cathode targets in covering the jet pipe after step (2) cleaning in step (1), and vacuum chamber is taken out
Vacuum；Jet pipe is coaxial with cathode targets and the inner surface of jet pipe is not contacted with cathode targets；The conical section of cathode targets is respectively positioned on
The inside of jet pipe；
(4) when vacuum degree is less than 5 × 10-2When Pa, using arc deposited method jet pipe inner surface depositing coating；
(5) after depositing coating under vacuum, cooling 3h or more, then takes out jet pipe, obtains inner surface deposition
Cated jet pipe.
In the step (4), the technological parameter of arc deposited is：The electric current of electromagnetic coil is DC current, and electric current is adopted
Frequency with triangular wave, amplitude 0.2-15A, electric current is 1-5Hz, realizes electric arc arc spot in the moon by adjusting the amplitude of electric current
The distance and height of pole target material surface movement, the FREQUENCY CONTROL electric arc arc spot by controlling electric current are transported above and below cathode targets surface
Dynamic speed；The arc current of arc deposited is 40-80A；The thickness of depositing coating is at 100-200 μm.
The present invention has the advantages that compared with prior art：
(1) present invention designs from engine jet pipe inner surface feature and meets the deposition painting of engine jet pipe inner surface
The vacuum cathode arc arc source of layer and deposition method.It is designed by vacuum cathode arc arc source, including control cathodic arc spot movement
Electromagnetic field design, contactless cathode targets arc-striking structure design, profiling cathode targets design, arc source impressed current anode, solve
Rail attitude control engine jet pipe coating on inner surface deposits difficult problem.It is heavy to jet pipe inner surface using the vacuum arc cathode arc source
Product protective coating, optimization coating depositing operation optimization, includes mainly arc current, electromagnetic electric current, sedimentation time etc., realization is started
Machine jet pipe inner surface high quality protective coating deposits, and coating layer thickness is more than 100 microns, and coating is fine and close and adhesive force is good.
(2) a large number of experiments show that, jet pipe diameter of bore may be implemented in this method：Ф 10-50mm, jet pipe length：5-
200mm；Coating on inner surface thickness：100-300 μm, layer thickness uniformity ± 10 micron；The coating layer thickness deposition speed of inner surface
Rate：The coating deposition method of 1-5 μm/min, the type of depositing coating：Simple metal coating (iridium coating layer, rhenium coating, niobium coating and molybdenum
Coating), alloy coat (Mo-W coatings, Nb-W coatings, Hf-Ta coatings, MCrAlYSiB coatings) improves the high temperature of engine
Nargin extends engine life.
Currently, disclosed preparation technology of coating and vacuum arc deposition system cannot achieve engine jet pipe coating on inner surface
Deposition, especially jet pipe size：Jet pipe diameter of bore：Ф 10-50mm, jet pipe length：5-200mm；Rail attitude control engine jet pipe
The coating layer thickness of inner surface：100-300μm；The coating layer thickness deposition rate of inner surface：1-5μm/min.
The type of depositing coating：Simple metal coating (iridium coating layer, rhenium coating, niobium coating and molybdenum coating), alloy coat (Mo-W
Coating, Nb-W coatings, Hf-Ta coatings, MCrAlYSiB coatings).
In order to improve the operating temperature of engine, engine life is extended, needs to design a kind of new vacuum arc
The coating deposition method in arc source realizes prepared by the more excellent performance of coating of jet pipe inner surface, and especially jet pipe inner surface is smooth
Fine and close and fabulous adhesive force high quality protective coating.
(3) present invention is directed to a kind of rail attitude control engine jet pipe jet pipe, provides a kind of jet pipe inner surface depositing coating
Vacuum cathode arc arc source and deposition method.It is designed by vacuum cathode arc arc source, includes the electricity of control cathodic arc spot movement
Magnetic Field Design, the design of contactless cathode targets arc-striking structure, the design of profiling cathode targets, arc source impressed current anode, solve rail appearance
It controls engine jet pipe coating on inner surface and deposits difficult problem.Using the vacuum arc cathode arc source, jet pipe inner surface is deposited anti-
Coating is protected, optimization coating depositing operation optimization, includes mainly arc current, electromagnetic electric current, sedimentation time etc., realizes engine spray
Pipe internal surface high quality protective coating deposits, and coating layer thickness is more than 100 microns, and coating is fine and close and adhesive force is good.
The present invention realizes heavy using the in-orbit attitude control engine jet pipe inner surface of vacuum cathode arc ionic depositing method for the first time
Product protective coating can deposit different coating as needed, for example (iridium coating layer, rhenium coating, niobium coating and molybdenum apply simple metal coating
Layer), alloy coat (platinum-rhodium coating, Mo-W coatings, MCrAlYSiB coatings) improves the working performance of rail attitude control engine.
Description of the drawings
Fig. 1 is the structural schematic diagram of double elements liquid rocket rail attitude control engine jet pipe of the present invention；
Fig. 2 is the structural schematic diagram of vacuum cathode arc arc source device of the present invention；
Fig. 3 is coating on inner surface schematic diagram of the present invention deposition engine jet pipe straightway to throat position；
Fig. 4 is coating on inner surface schematic diagram of the present invention deposition engine jet pipe throat to outlet fragment position；
Fig. 5 is thickness measure and the micro-analysis result schematic diagram of 1 jet pipe of embodiment；
Fig. 6 is thickness measure and the micro-analysis result schematic diagram of 2 jet pipe of embodiment.
Specific implementation mode
A kind of vacuum cathode arc ionic depositing method for rail attitude control engine jet pipe coating on inner surface, the vacuum
Cathodic vacuum arc deposition arc source is deposited for rail attitude control engine jet pipe inner surface high-temperature protection coating.
The size of rail attitude control engine jet pipe product：Jet pipe diameter of bore：Ф 10-50mm, jet pipe length：5-200mm.Rail
The coating layer thickness of attitude control engine jet pipe inner surface：100-300μm.
(1) the arc source of vacuum cathode arc ion deposition uses new-type non-contact type high voltage pulse striking.
(2) spots moving on electromagnetic field control cathode targets surface is used, electric current uses triangular wave, amplitude 0.2-15A,
Frequency is 1-5Hz.The distance and height that amplitude by adjusting electric current moves to realize arc spot in target material surface, by controlling electricity
The speed and etch period that rheology FREQUENCY CONTROL arc spot moves up and down on cathode targets surface.
(3) cathode targets are designed as hollow jet pipe profiling cylinder taper target, have high magnetic conductive tube inside cathode targets
Material, by high permeability material by electromagnetic field guide cylinder taper target material surface.
(4) there is non-magnetic stainless steel cage, it acts as providing impressed current anode, while between having with target below cathode targets
Gap shields.
(5) jet pipe is as depositing coating workpiece, while as arc source anode.
A kind of vacuum cathode arc ionic depositing method for engine jet pipe inner wall depositing coating, step are：
(1) vacuum cathode arc ion source can be in high vacuum (vacuum degree≤3 × 10-3Pa under the conditions of), it can be achieved that in jet pipe
Surface metal coating deposits.
(2) the coating layer thickness deposition rate of rail attitude control engine jet pipe inner surface is realized：1-5μm/min.
(3) coating layer thickness of rail attitude control engine jet pipe inner surface is realized：100-300μm.
(4) so that cathode material is evaporated and is ionized using vacuum pulse arc discharge, form pure plasma, be deposited on
Coating needed for being formed after on substrate surface.Pure plasma is only generated in entire technical process, coating performance is stablized, smooth cause
Close and fabulous adhesive force quality coating.
Fig. 1 show the schematic diagram of double elements liquid rocket rail/attitude control engine jet pipe, and engine jet pipe shape is to become to cut
Face structure.
Fig. 2 show vacuum cathode arc arc source of the present invention for the preparation of rail attitude control engine jet pipe coating on inner surface,
It is designed by vacuum cathode arc arc source, including the electromagnetic field design of control cathodic arc spot movement, contactless cathode targets draw
Arc structure design, the design of profiling cathode targets, arc source impressed current anode, it is tired to solve rail attitude control engine jet pipe coating on inner surface deposition
Difficult problem.Jet pipe diameter of bore may be implemented：Ф 10-50mm, jet pipe length：5-200mm；Coating on inner surface thickness：100-300
μm；Layer thickness uniformity ± 10 micron；The coating layer thickness deposition rate of inner surface：The coating deposition method of 1-5 μm/min sinks
The type of product coating：Simple metal coating (iridium coating layer, rhenium coating, niobium coating and molybdenum coating), alloy coat (Mo-W coatings, Nb-W
Coating, Hf-Ta coatings, MCrAlYSiB coatings).
Vacuum cathode arc arc of the present invention source to the preparation method of engine jet pipe inner surface depositing coating, specifically include as
Lower step：
(1) inventive engine jet pipe straightway is illustrated in figure 3 to throat's position inner surface arc deposited cathode arc source
Schematic diagram；The structure of the cathode is：1, the arc source of vacuum cathode arc ion deposition uses new-type non-contact type high voltage pulse
Striking.2, using the spots moving on electromagnetic field control cathode targets surface, current waveform uses triangular wave, amplitude 0.2-15A,
Frequency is 1-5Hz.The distance and height that amplitude by adjusting electric current moves to realize arc spot in target material surface, by controlling electricity
The speed and etch period that rheology FREQUENCY CONTROL arc spot moves up and down on cathode targets surface.3, cathode targets are designed as hollow
Jet pipe profiling cylinder taper target, there is inside cathode targets high magnetic conduction tube material, led electromagnetic field by high permeability material
To cylinder taper target material surface.4, there is non-magnetic stainless steel cage below cathode targets, it acts as offer impressed current anodes, while with
Target has gap shielding.5, jet pipe is as depositing coating workpiece, while as arc source anode.
(2) target, metal targets and engine in the metallic cathode of profiling are processed according to engine jet pipe shape and size
Jet pipe inner surface configuration matches, and is segment+round platform+cylindrical shape, center opening.It is designed according to jet pipe inner surface configuration
The principle of the shape design of cathode targets is that the target of profiling is designed according to nozzle shape, and target material surface size is less than table in jet pipe
Face size is 5-8mm.The target that will be processed is installed to vacuum arc cathode arc source, as shown in Figure 2.Target is risen
Arc, arcing time 5-10min mainly remove target material surface pollutant, such as oil stain, oxide skin etc..
(3) oil removing, derusting are carried out to qualified engine jet pipe surfaces externally and internally, mainly uses pickling and acetone ultrasound clear
It washes, depositing coating is waited for after drying.
(4) engine jet pipe after cleaning is vertically placed on product platform, keeps jet pipe inner surface with target in same circle
In the heart, while target and product being avoided to contact with each other, as shown in Figure 3.
(5) vacuum chamber is vacuumized, when vacuum degree≤5 × 10-2When Pa, start depositing coating；Technological parameter：Arc electricity
Stream is 40-80A, 0.2~15A of coil current, frequency 1-5Hz；Sedimentation time is determined according to coating thickness requirement, generally
The thickness of depositing coating is at 100-300 μm.
(6) after the completion of the straightway of jet pipe to the inner surface depositing coating of throat position, jet pipe is cooled to 45 with vacuum chamber
After DEG C, opens vacuum chamber and take out jet pipe.
(7) downward by the engine jet pipe outlet section of the good coating of above-mentioned deposition, it is vertically placed on product platform, keeps jet pipe
Inner surface and target avoid target and product from contacting with each other on the same center of circle, as shown in figure 4, engine jet pipe is both made
For the workpiece of depositing coating, while as impressed current anode；Throat is 5mm at a distance from molybdenum target material top in the present embodiment, is carried out
Nozzle throat to outlet section coating on inner surface deposits.
(8) vacuum is extracted, when vacuum degree≤5 × 10-2When Pa, start depositing coating；Technological parameter：Arc current is 40-
80A, 0.2~15A of coil current, frequency 1-5Hz；Sedimentation time is determined according to coating thickness requirement, and general deposition applies
The thickness of layer is at 100-300 μm.
(9) after the completion of outlet section to the inner surface depositing coating of throat position, engine jet pipe is cooled to 45 with vacuum chamber
After DEG C, opens vacuum chamber and take out engine jet pipe.
(10) double elements liquid rocket rail attitude control engine jet pipe coating on inner surface deposition is completed.
The present invention is described in further detail in the following with reference to the drawings and specific embodiments.
Embodiment 1
As shown in Figure 1, being to manufacture a kind of engine jet pipe size(For hair
Motivation jet pipe minimum diameter diameter, 100mm are engine jet pipe total length) for, Mo-W is deposited to engine jet pipe inner surface
Alloy coat.
(a) engine jet pipe prepares：According to the drawing requirement of engine jet pipe, engine jet pipe processing is carried outSuch as Fig. 1, oil removing, derusting are carried out to engine jet pipe surfaces externally and internally after processing is completed, mainly
It is cleaned by ultrasonic using pickling and acetone, depositing coating is waited for after drying.
(b) prepared by engine jet pipe Mo-W alloy coats；
It uses following steps to prepare Mo-W alloy coats in engine jet pipe inner surface：
(1) according to two Mo-W alloys (Mo of drawing dimensioned:W=80:20 weight percent) cathode targets 1, such as scheme
2, respectively straightway to throat's inner surface Mo-W alloy target materials and throat to outlet section inner surface Mo-W alloy target materials；
(2) by after the Mo-W alloy target material oil removings of straightway to throat's inner surface, it is mounted on vacuum cathode arc arc source
On device, the vacuum cathode arc arc source device is as cathode；
(3) downward by the cleaned engine jet pipe straightway of step (a), it is vertically placed on product platform, keeps in jet pipe
Surface and target avoid target and product from contacting with each other on the same center of circle, as shown in figure 3, engine jet pipe both conducts
The workpiece of depositing coating, while as impressed current anode；Throat is 5mm at a distance from cathode targets top.
(4) vacuum, vacuum gauge pressure≤5 × 10 are extracted-2Pa or less starts to deposit Mo-W alloy coats；Deposition process parameters：
Striking voltage：5000V, arc spot electric current：100A, 0.5~10A of coil current, frequency 2Hz；Sedimentation time is 25min, deposition
Mo-W alloy coats thickness at 100-110 μm；
(5) after the completion of straightway to the inner surface deposition Mo-W alloy coats of throat position, jet pipe is cooled to vacuum chamber
After 45 DEG C, opens vacuum chamber and take out engine jet pipe.
(6) by after the Mo-W alloy target material oil removings of the inner surface of throat to outlet port, it is cloudy to be mounted on inner surface vacuum
On pole electrical arc depositing device, as cathode；
(7) downward by the engine jet pipe outlet section of the good Mo-W alloy coats of above-mentioned deposition, it is vertically placed on product platform,
It keeps jet pipe inner surface with target on the same center of circle, while target and product being avoided to contact with each other, as shown in figure 4, engine
Jet pipe is both as the workpiece of depositing coating, while as impressed current anode；Throat and Mo-W alloy target materials top in the present embodiment
Distance is 5mm.
(8) vacuum, vacuum gauge pressure≤5 × 10 are extracted-2Pa or less starts to deposit Mo-W alloy coats；Deposition process parameters：
Striking voltage：5000V, arc spot electric current：120A, 0.5~15A of coil current, frequency 2-4Hz；Sedimentation time is 30min, is sunk
The thickness of long-pending Mo-W alloy coats is at 110-120 μm；
(9) after the completion of outlet section to the inner surface deposition Mo-W alloy coats of throat position, engine jet pipe is with vacuum chamber
After being cooled to 45 DEG C, opens vacuum chamber and take out engine jet pipe.
Jet pipe to having deposited Mo-W coatings carries out dissection and analysis, in the straightway of jet pipe, converging portion, throat and outlet section
1 point is respectively taken to carry out section thickness measurement and micro-analysis, the results are shown in Figure 5 for thickness measure and micro-analysis, can by Fig. 5
Know, inner surface vacuum cathode arc arc source realizes that engine jet pipe size isInner surface Mo-W coatings it is heavy
Product, the coating layer thickness of deposition：100-120μm；Layer thickness uniformity：± 10 microns, the Mo-W coating layer thicknesses of jet pipe inner surface
Deposition rate：4-5 μm/min, Mo-W alloy coats are fine and close.
Embodiment 2
It is to manufacture a kind of engine jet pipe size(For engine jet pipe minimum diameter
Diameter, 200mm are engine jet pipe total length) for, iridium coating layer is deposited to engine rhenium jet pipe inner surface, illustrates present invention side
The specific implementation mode of method.
(a) engine rhenium jet pipe prepares：According to the drawing requirement of engine rhenium jet pipe, engine jet pipe processing is carried outSuch as Fig. 1, oil removing, derusting are carried out to engine rhenium jet pipe surfaces externally and internally after processing is completed, mainly used
Pickling and acetone are cleaned by ultrasonic, and depositing coating is waited for after drying.
(b) prepared by engine rhenium jet pipe iridium coating layer：
It uses following steps to prepare iridium coating layer in engine jet pipe inner surface：
(1) according to target (such as Fig. 2) in drawing dimensioned profiling iridium (99.98at.%) cathode, respectively straightway arrives
Throat's inner surface iridium target and throat are to outlet section inner surface iridium target；
(2) inner surface vacuum cathode arc after the iridium target oil removing of straightway to throat's inner surface, will be mounted on to deposit
In equipment, as cathode；
(3) downward by the cleaned engine jet pipe straightway of step (a), it is vertically placed on product platform, keeps in jet pipe
Surface and target avoid target and product from contacting with each other on the same center of circle, as shown in figure 3, engine jet pipe both conducts
The workpiece of depositing coating, while as impressed current anode；Throat is 8mm at a distance from molybdenum target material top in the present embodiment.
(4) vacuum, vacuum gauge pressure≤5 × 10 are extracted-2Pa or less starts to deposit iridium coating layer；Deposition process parameters：Striking electricity
Pressure：5000V, arc spot electric current：60A, 0.5~15A of coil current, frequency 3Hz；Sedimentation time is 40min, the iridium coating layer of deposition
Thickness at 200-210 μm；
(5) after the completion of straightway to the inner surface deposition iridium coating layer of throat position, after jet pipe is cooled to 45 DEG C with vacuum chamber,
It opens vacuum chamber and takes out engine jet pipe.
(6) by after the iridium target oil removing of the inner surface of throat to outlet port, it is mounted on inner surface vacuum cathode arc
On depositing device, as cathode；
(7) downward by the engine jet pipe outlet section of the good iridium coating layer of above-mentioned deposition, it is vertically placed on product platform, keeps spray
Pipe internal surface and target avoid target and product from contacting with each other on the same center of circle, as shown in figure 4, engine jet pipe was both
As the workpiece of deposition iridium coating layer, while as impressed current anode；Throat is 5mm at a distance from iridium target top in the present embodiment.
(8) vacuum, vacuum gauge pressure≤5 × 10 are extracted-2Pa or less starts to deposit iridium coating layer；Deposition process parameters：Striking electricity
Pressure：5000V, arc spot electric current：60A, 0.5~15A of coil current, frequency 3Hz；Sedimentation time is 60min, and the Mo-W of deposition is closed
The thickness of gold plating is at 280-300 μm；
(9) after the completion of outlet section to the inner surface deposition iridium coating layer of throat position, engine jet pipe is cooled to vacuum chamber
After 45 DEG C, opens vacuum chamber and take out engine jet pipe.
Dissection and analysis is carried out to the jet pipe of the iridium coating layer deposited, in the straightway of jet pipe, converging portion, throat and outlet section
1 point is respectively taken to carry out section thickness measurement and micro-analysis, the results are shown in Figure 6 for thickness measure and micro-analysis, can by Fig. 6
Know, experiments have shown that：Realize that engine jet pipe size is in inner surface vacuum cathode arc arc sourceInner surface
Iridium coating layer deposits, the coating layer thickness of deposition：280-300μm；Layer thickness uniformity：± 10 microns, the iridium of jet pipe inner surface applies
Layer thickness deposition rate：4.8-5 μm/min, iridium coating layer is continuously fine and close.
The above, best specific implementation mode only of the invention, but scope of protection of the present invention is not limited thereto,
Any one skilled in the art in the technical scope disclosed by the present invention, the change or replacement that can be readily occurred in,
It should be covered by the protection scope of the present invention.
The content that description in the present invention is not described in detail belongs to the known technology of professional and technical personnel in the field.
Claims (10)
1. a kind of vacuum cathode arc arc source device, it is characterised in that：The device includes that cathode targets (1), non-magnetic stainless steel are auxiliary
Supporing yang pole (2), non-contact type high voltage pulse striking (3), cooling water pipe (4), mandrel (5) and electromagnetic coil (6)；
The electromagnetic coil (6) is wrapped in the outside of mandrel (5), and one end of mandrel (5) connects cathode, mandrel (5) it is another
The cylindrical section with cathode targets (1) bottom end is held to be connected through a screw thread, cooling water pipe (4) extends to cathode target after passing through mandrel (5)
The conical section on material (1) top；Non-magnetic stainless steel impressed current anode (2) is sleeved on the outer surface of the cylindrical section of cathode targets (1)；It is non-contact
Formula high-voltage pulse thread-leading arc (3) assists sun by the tapped through hole of non-magnetic stainless steel impressed current anode (2) side in non-magnetic stainless steel
Pole (2) is fixedly connected.
2. a kind of vacuum cathode arc arc source device according to claim 1, it is characterised in that：The contactless height
It is 1-2mm to press the copper core end face of pulse striking (3) and the outer surface of the cylindrical section of cathode targets (1) distance；
The material of the cathode targets (1) is iridium, rhenium, niobium, molybdenum, Mo-W, Nb-W, Hf-Ta or MCrAlYSiB.
3. a kind of vacuum cathode arc arc source device according to claim 1, it is characterised in that：The internal diameter of jet pipe is more than
20mm, cathode targets (1) include hollow cylindrical section and hollow conical section；The top of conical section is arc transition section, the circle
The converging portion of arc changeover portion and jet pipe matches；The conical section is located at the top of cylindrical section, the busbar of conical section and the circle
The angle bored between the central shaft of section is 8-13 °；The inner surface of cylindrical section carries internal thread, and the height of cylindrical section is 8-10mm,
If the height of conical section is h, the length of jet pipe oral area to throat is L, h=L-d, d=5-8.
4. a kind of vacuum cathode arc arc source device according to claim 1, it is characterised in that：The internal diameter of jet pipe be less than etc.
In 20mm, cathode targets (1) include hollow cylindrical section, changeover portion and hollow conical section, changeover portion be located at cylindrical section and in
Between empty conical section, the top of conical section is arc transition section, and the converging portion of the arc transition section and jet pipe matches；It is described
Conical section be located at the top of changeover portion, changeover portion is located at the top of cylindrical section, the busbar of conical section and the center of the conical section
Angle between axis is 8-13 °；The inner surface of cylindrical section carries internal thread, and the height of cylindrical section is 8-10mm, if conical section
Height is h, and the length of jet pipe oral area to throat is L, h=L-d, d=5-8；The height of changeover portion is 20-25mm.
5. a kind of vacuum cathode arc arc source device according to claim 1, it is characterised in that：The non-magnetic stainless steel
Impressed current anode (2) is hollow cylinder, and the internal diameter of hollow cylinder is bigger 10-15mm than the maximum outside diameter of cathode targets (1), hollow cylinder
Outer diameter be 50-60mm；The height of hollow cylinder is highly consistent with the cylindrical section of cathode targets (1)；Non-magnetic stainless steel auxiliary
The side of anode (2) carries a tapped through hole.
6. a kind of vacuum cathode arc arc source device according to claim 1, it is characterised in that：The contactless height
Pressure pulse striking (3) includes copper core, porcelain bushing and molybdenum sleeve, and porcelain bushing is sleeved on outside copper core, and molybdenum sleeve is sleeved on ceramic jacket
The length of tube outside, a diameter of 2-3mm of copper core, copper core is bigger 10-20mm than the length of porcelain bushing, the internal diameter of porcelain bushing with
The diameter of copper core matches, and the length of porcelain bushing is 30-35mm, and the outer diameter of porcelain bushing is 10-12mm, the internal diameter of molybdenum sleeve
Match with the outer diameter of porcelain bushing, the length of molybdenum sleeve is smaller 10-15mm than the length of porcelain bushing, and the wall thickness of molybdenum sleeve is 1-
3mm；The outer surface of molybdenum sleeve carries external screw thread.
7. a kind of vacuum cathode arc arc source device according to claim 1, it is characterised in that：The mandrel (5)
Material is the permeability magnetic material of low remanent magnetism；Mandrel (5) is hollow cylinder, and the outer surface on the top of mandrel (5) carries external screw thread, mandrel
(5) wall thickness is 3-5mm；The outer diameter of mandrel (5) is 20-25mm.
8. a kind of vacuum cathode arc arc source device according to claim 1, it is characterised in that：The electromagnetic coil
(6) material is that high temperature resistant enamel covered wire is entwined, and the winding number of turns is enclosed for 500-800, is highly 100-150mm, electromagnetic wire
The outer diameter of the internal diameter and mandrel (5) that enclose (6) matches.
9. it is a kind of using any vacuum cathode arc arc source devices of claim 1-8 in rocket tube inner surface
The method of depositing coating, it is characterised in that the step of this method includes：
(1) by cathode targets (1), non-magnetic stainless steel impressed current anode (2), the contactless height in vacuum cathode arc arc source device
Pressure pulse striking (3) is placed into vacuum chamber, and electromagnetic coil (6) is located at outside vacuum chamber, and the one of cooling water pipe (4) and mandrel (5)
Part is located in vacuum chamber, and another part of cooling water pipe (4) and mandrel (5) is located at outside vacuum chamber；
(2) jet pipe inner surface is cleaned, and dried；
(3) outer surface of the cathode targets (1) in covering the jet pipe after step (2) cleaning in step (1), and vacuum chamber is taken out true
It is empty；Jet pipe inner surface coaxial and jet pipe with cathode targets (1) is not contacted with cathode targets (1)；The conical section of cathode targets (1)
It is respectively positioned on the inside of jet pipe；
(4) when vacuum degree is less than 5 × 10-2When Pa, using arc deposited method jet pipe inner surface depositing coating；
(5) after depositing coating under vacuum, cooling 3h or more, then takes out jet pipe, and obtaining inner surface deposition has painting
The jet pipe of layer.
10. the method according to claim 9 in rocket tube inner surface depositing coating, it is characterised in that：Institute
In the step of stating (4), the technological parameter of arc deposited is：The electric current of electromagnetic coil (6) is DC current, and electric current uses triangle
The frequency of wave, amplitude 0.2-15A, electric current is 1-5Hz, realizes electric arc arc spot in cathode targets by adjusting the amplitude of electric current
(1) distance and height of apparent motion, the FREQUENCY CONTROL electric arc arc spot by controlling electric current are transported up and down on cathode targets (1) surface
Dynamic speed；The arc current of arc deposited is 40-80A；The thickness of depositing coating is at 100-300 μm.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU528386A1 (en) * | 1975-07-07 | 1976-09-15 | Предприятие П/Я В-8495 | Sorption Vacuum Pump |
| RU2099573C1 (en) * | 1995-04-27 | 1997-12-20 | Исследовательский центр им.М.В.Келдыша | Electric arc rocket engine |
| WO2005116291A2 (en) * | 2004-05-19 | 2005-12-08 | Sub-One Technology, Inc. | Apparatus for directing plasma flow to coat internal passageways |
| CN1886225A (en) * | 2003-11-25 | 2006-12-27 | 弗罗纽斯国际有限公司 | Method and circuit for contactless ignition of a welding arc with high frequency ignition pulse packets |
| WO2007115253A2 (en) * | 2006-04-04 | 2007-10-11 | Southwest Research Institute | Method for magnetron sputter deposition |
| CN204281846U (en) * | 2014-12-05 | 2015-04-22 | 大连维钛克科技股份有限公司 | A kind of novel magnetic field structure of vacuum ion membrane plating equipment |
| CN105112857A (en) * | 2015-07-24 | 2015-12-02 | 航天材料及工艺研究所 | Method for preparing iridium-silicide composite coating for engine thrust chamber body |
| CN204825032U (en) * | 2015-07-28 | 2015-12-02 | 东莞市汇成真空科技有限公司 | Arc spot that discharges is abound with vacuum cathode arc source of target surface |
| CN106001554A (en) * | 2016-06-29 | 2016-10-12 | 航天材料及工艺研究所 | Preparation method for rhenium-iridium combustion chamber |
-
2018
- 2018-04-26 CN CN201810384095.XA patent/CN108588650B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU528386A1 (en) * | 1975-07-07 | 1976-09-15 | Предприятие П/Я В-8495 | Sorption Vacuum Pump |
| RU2099573C1 (en) * | 1995-04-27 | 1997-12-20 | Исследовательский центр им.М.В.Келдыша | Electric arc rocket engine |
| CN1886225A (en) * | 2003-11-25 | 2006-12-27 | 弗罗纽斯国际有限公司 | Method and circuit for contactless ignition of a welding arc with high frequency ignition pulse packets |
| WO2005116291A2 (en) * | 2004-05-19 | 2005-12-08 | Sub-One Technology, Inc. | Apparatus for directing plasma flow to coat internal passageways |
| WO2007115253A2 (en) * | 2006-04-04 | 2007-10-11 | Southwest Research Institute | Method for magnetron sputter deposition |
| CN204281846U (en) * | 2014-12-05 | 2015-04-22 | 大连维钛克科技股份有限公司 | A kind of novel magnetic field structure of vacuum ion membrane plating equipment |
| CN105112857A (en) * | 2015-07-24 | 2015-12-02 | 航天材料及工艺研究所 | Method for preparing iridium-silicide composite coating for engine thrust chamber body |
| CN204825032U (en) * | 2015-07-28 | 2015-12-02 | 东莞市汇成真空科技有限公司 | Arc spot that discharges is abound with vacuum cathode arc source of target surface |
| CN106001554A (en) * | 2016-06-29 | 2016-10-12 | 航天材料及工艺研究所 | Preparation method for rhenium-iridium combustion chamber |
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