CN108563042B - Mach-Zehnder modulator based on photonic crystal and nanowire waveguide - Google Patents
Mach-Zehnder modulator based on photonic crystal and nanowire waveguide Download PDFInfo
- Publication number
- CN108563042B CN108563042B CN201810121846.9A CN201810121846A CN108563042B CN 108563042 B CN108563042 B CN 108563042B CN 201810121846 A CN201810121846 A CN 201810121846A CN 108563042 B CN108563042 B CN 108563042B
- Authority
- CN
- China
- Prior art keywords
- photonic crystal
- waveguide
- multimode interference
- nanowire
- mach
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The invention relates to a Mach-Zehnder modulator based on a photonic crystal and a nanowire waveguide, which comprises a photonic crystal multimode interference coupling wave splitting module, a photonic crystal slab waveguide phase modulation module and a photonic crystal multimode interference coupling wave combining module, wherein the photonic crystal multimode interference coupling wave splitting module is connected with the photonic crystal slab waveguide phase modulation module through the nanowire waveguide, and the photonic crystal multimode interference coupling wave combining module is connected with the photonic crystal slab waveguide phase modulation module through the nanowire waveguide; the photonic crystal multimode interference coupling wave splitting module and the photonic crystal multimode interference coupling wave combining module respectively comprise a photonic crystal multimode interference coupler, the photonic crystal slab waveguide phase modulation module comprises a photonic crystal slab waveguide, and a multimode interference coupling area is arranged in the photonic crystal multimode interference coupler. The modulator has the characteristics of high transmission speed, high modulation bandwidth, small size, easy high-integration interconnection and important practical value.
Description
Technical Field
The invention relates to a modulator, in particular to a Mach-Zehnder modulator based on photonic crystals and nanowire waveguides.
Background
With the technological progress and economic development, people have entered the information-based society. The optical information processing technology has the advantages of large transmission bandwidth, low loss and the like. Becomes a new favorite for meeting the development requirements of modern communication technology. The photonic integrated chip is a very important research of people as an integrated chip for information processing, and it is very critical to reduce the size of a photonic device to a micro-nano order of magnitude in order to achieve high-level integrated interconnection. Thus, one turns the viewing angle towards the photonic crystal. As a brand new artificial microstructure material, the material has a plurality of outstanding advantages, such as photonic band gap, slow light effect, photonic local area, auto-collimation effect and the like, so that the design of an optical communication device with higher integration level and better performance becomes possible, and the material is suitable for the higher and higher integration level requirements brought by the development of current optical communication. The photonic crystal fundamentally solves the problem of light control of the micro-nano optical device, so that the photonic crystal slab waveguide, the filter, the modulator, the beam splitter and the like based on the photonic crystal have wide application prospects. The modulator is one of core devices of an optical signal transmission and processing system, and has a wide application range. In order to meet the development requirements of modern information technology, optical integrated interconnection systems and optical communication, it is particularly necessary to research ultra-dense micro-nano electro-optical modulators with the characteristics of high transmission speed, high transmission bandwidth, high processing speed and the like, and photonic crystal materials enable the aim.
Introduction of photonic crystals into optical devices has long been a hotspot, and research has now been conducted to produce a variety of devices based entirely on photonic crystals, which generally have higher performance and facilitate integration of photonic crystal chips. It is therefore feasible and significant to design a subminiature mach-zehnder type modulator based entirely on photonic crystal chips, which has the advantage of being easily implemented in integrated circuits with ultra-small dimensions and good performance.
There is a considerable amount of literature on the study of mach-zehnder type modulators based on photonic crystals. However, most of the common waveguides used in the beam splitter and the beam combiner, such as the Y-type waveguide structure, have the disadvantages that the device size is very large, and the mode mismatch at the junction of the waveguide and the photonic crystal slab waveguide when they are cascaded causes severe loss. The photonic crystal Y-type and T-type linear defect structures are adopted for beam splitting and beam combining, but the defect is high loss.
Disclosure of Invention
In order to adapt to the development of a highly integrated communication system, the invention provides a Mach-Zehnder modulator based on photonic crystals and nanowire waveguides, which has the characteristics of high transmission speed and modulation bandwidth, small size, easy high-integration interconnection and important practical value. The photonic crystal multimode interference coupler is creatively introduced to be combined with the nanowire waveguide and the photonic crystal slab waveguide, the tapered structure is optimized at the cascade position of the nanowire waveguide and the photonic crystal, the device is small in size and compact in structure, the insertion loss of the modulator is greatly reduced, and the extinction ratio is greatly improved.
The technical scheme adopted by the invention is as follows: a Mach-Zehnder modulator based on photonic crystals and nanowire waveguides comprises a photonic crystal multimode interference coupling wave splitting module, a photonic crystal slab waveguide phase modulation module and a photonic crystal multimode interference coupling wave combining module, wherein the photonic crystal multimode interference coupling wave splitting module is connected with the photonic crystal slab waveguide phase modulation module through the nanowire waveguides, and the photonic crystal multimode interference coupling wave combining module is connected with the photonic crystal slab waveguide phase modulation module through the nanowire waveguides;
the photonic crystal multimode interference coupling wave splitting module and the photonic crystal multimode interference coupling wave combining module both comprise photonic crystal multimode interference couplers, the photonic crystal slab waveguide phase modulation module comprises photonic crystal slab waveguides, the photonic crystal multimode interference couplers and the photonic crystal slab waveguides are air hole type photonic crystal slab structures which are periodically distributed along an X-Y plane, and multimode interference coupling areas are arranged in the photonic crystal multimode interference couplers.
Further, the multimode interference coupling area is formed by removing a plurality of air holes in the middle of the photonic crystal flat plate.
Further, the multimode interference coupling region is formed by removing 5 × 7 air holes in the middle of a two-dimensional triangular lattice photonic crystal plate.
Further, the length of the multimode interference coupling zone is 3.31 mu m.
Furthermore, the photonic crystal multimode interference coupler is a two-dimensional triangular lattice photonic crystal multimode interference coupler, the photonic crystal slab waveguide is a two-dimensional triangular lattice photonic crystal slab waveguide, and the substrate material of the air hole type photonic crystal slab is silicon.
Further, the lattice constant a of the two-dimensional triangular lattice photonic crystal multimode interference coupler and the two-dimensional triangular lattice photonic crystal slab waveguide1420nm, air hole radius r1＝0.286a1。
Furthermore, photonic crystal tapered regions are arranged at the contact section of the nanowire waveguide and photonic crystal multimode interference coupler and the contact section of the nanowire waveguide and photonic crystal slab waveguide, and the photonic crystal tapered regions are arranged in air holes at two sides of the photonic crystal line defect to form a tapered structure.
Further, the photonic crystal tapering region is formed by removing two outermost air holes of the contact section, and the radius of the air holes on two sides of the subsequent photonic crystal line defect is determined according to the following ratio of 1: 2: 3, the input end and the output end of the photonic crystal slab waveguide form a tapered structure.
Further, the width of the photonic crystal slab waveguide is W1＝sqrt(3)/2×a1The width of the nanowire waveguide is W2＝2W1+2r1。
Furthermore, the thicknesses of the photonic crystal multimode interference coupler, the photonic crystal slab waveguide and the nanowire waveguide are all 220nm, and the thickness of the substrate silicon is 2 microns.
The modulation method of the modulator comprises the following steps: when a beam of light is input into the photonic crystal multimode interference coupler a from the port 1 and split and then respectively input into two photonic crystal slab waveguides, the photonic crystal slab waveguide between two electrodes is used as a phase modulation arm, the refractive index of the photonic crystal slab waveguide is changed under the action of modulation voltages at two ends, so that the phase of the passing light wave is changed, the other photonic crystal slab waveguide is used as a reference arm, the passing light wave is not influenced by the modulation voltage, and the two beams of light are finally converged in the photonic crystal multimode interference coupler and output from the output port 2. If the phase difference of the two light beams is pi, the two lights are cancelled to form an off state, if the phase difference of the two light beams is 0, the two lights are added to form an on state, and the signal is loaded on the light wave by controlling the on and off of the light wave.
The beneficial effects produced by the invention comprise: the invention provides a photonic crystal and nanowire waveguide-based Mach-Zehnder modulator, which is different from a common photonic crystal Mach-Zehnder modulator structure by introducing a two-dimensional triangular lattice photonic crystal multimode interference coupler into the photonic crystal Mach-Zehnder modulator, and takes two-dimensional triangular lattice photonic crystal multimode interference couplers as the modulator structure of a wave splitting and wave combining device, so that the overall size of the modulator can be greatly reduced, and the insertion loss can be reduced. The mode of tapering optimization at the joint of the two-dimensional triangular lattice photonic crystal multi-mode interference coupler and the two-dimensional triangular lattice photonic crystal slab waveguide and the nanowire waveguide is different from the mode of tapering optimization of the nanowire waveguide, so that the loss caused by mode matching is smaller. The modulator in the invention reduces the size of the modulator and simultaneously reduces the insertion loss of the modulator. The mode mismatch between the nanowire waveguide and the photonic crystal slab waveguide is optimized by introducing the tapered structure, the insertion loss is as low as 0.9dB, the extinction ratio is 14dB, the tuning performance is good, and the requirements of the development of an optical information transmission and processing system can be met.
Drawings
FIG. 1 is a diagram of a Mach-Zehnder modulator based on photonic crystals and nanowire waveguides according to the present invention;
fig. 2(a) is a steady-state field profile of the "on" state after an optical beam having a wavelength of 1.55 μm is input from an input port.
FIG. 2(b) is a steady-state field profile of an "off" state after an optical beam having a wavelength of 1.55 μm is input from an input port.
FIG. 3 is a transmission spectrum of the modulator in the "off" state at an operating wavelength of 1.5 μm to 1.6 μm;
in the figure: 1. the photonic crystal multi-mode interference coupler comprises a first two-dimensional triangular lattice photonic crystal multi-mode interference coupler, 2 a multi-mode interference coupling area, 3 a nanowire waveguide, 4 a two-dimensional triangular lattice photonic crystal slab waveguide, 5 a photonic crystal tapering area, 6 and a second two-dimensional triangular lattice photonic crystal multi-mode interference coupler.
Detailed Description
The present invention is explained in further detail below with reference to the drawings and the detailed description, but it should be understood that the scope of the present invention is not limited by the detailed description.
As shown in figure 1, the Mach-Zehnder modulator based on photonic crystals and nanowire waveguides mainly comprises a photonic crystal multimode interference coupling wave splitting module, a photonic crystal slab waveguide phase modulation module and a photonic crystal multimode interference coupling wave combining module which are sequentially connected, wherein the photonic crystal multimode interference coupling wave splitting module comprises a first two-dimensional triangular lattice photonic crystal multimode interference coupler 1, the photonic crystal multimode interference coupling wave combining module comprises a second two-dimensional triangular lattice photonic crystal multimode interference coupler 6, the photonic crystal slab waveguide phase modulation module is a two-dimensional triangular lattice photonic crystal slab waveguide 4, the first two-dimensional triangular lattice photonic crystal multimode interference coupler 1 is connected with the two-dimensional triangular lattice photonic crystal slab waveguide 4 through the nanowire waveguide 3, and the second two-dimensional triangular lattice photonic crystal multimode interference coupler 6 is connected with the two-dimensional triangular lattice photonic crystal slab waveguide 4 through the nanowire waveguide 3 And (4) connecting. Multimode interference coupling regions 2 are arranged in the first two-dimensional triangular lattice photonic crystal multimode interference coupler 1 and the second two-dimensional triangular lattice photonic crystal multimode interference coupler 6, and photonic crystal tapering regions 5 are arranged at contact sections of the nanowire waveguide 3 and the first two-dimensional triangular lattice photonic crystal multimode interference coupler 1, contact sections of the nanowire waveguide 3 and the second two-dimensional triangular lattice photonic crystal multimode interference coupler 6, and contact sections of the nanowire waveguide 3 and the two-dimensional triangular lattice photonic crystal slab waveguide 4.
The two-dimensional triangular lattice photonic crystal multimode interference coupler and the two-dimensional triangular lattice photonic crystal slab waveguide 4 are air hole type photonic crystal slab structures which are periodically distributed along an X-Y plane, and the substrate material of the two-dimensional triangular lattice photonic crystal multimode interference coupler and the two-dimensional triangular lattice photonic crystal slab waveguide is silicon; the multimode interference coupling region 2 is formed by removing 5 × 7 air holes in the middle of a two-dimensional triangular lattice photonic crystal slab. The photonic crystal tapering region 5 is formed by removing two outermost air holes of the contact section, and the radius of the air holes at two sides of the subsequent photonic crystal line defect is 1: 2: 3, the input end and the output end of the photonic crystal line defect form a conical structure.
The specific parameters are as follows: the parameters of the two-dimensional triangular lattice photonic crystal multi-mode interference coupler and the two-dimensional triangular lattice photonic crystal slab waveguide 4 are as follows: lattice constant a1420nm, air hole radius r1＝0.286a1The width of the photonic crystal slab waveguide is W1＝sqrt(3)/2×a1The nanowire waveguide 3 has a width W2＝2W1+2r1(ii) a The multimode interference coupling zone 2 is formed by removing 5 × 7 air holes, the coupling zone length being 3.31 μm. The photonic crystal tapering region 5 is formed by removing two air holes at the joint, and the radiuses of the air holes at two sides of the subsequent photonic crystal line defect are 1: 2: 3 proportional setting of ra＝0.3r1、rb＝0.6r1、rc＝0.9r1，The input end and the output end of the photonic crystal line defect form a conical structure. The thicknesses of the photonic crystal multimode interference coupler, the photonic crystal flat plate and the nanowire waveguide 3 are all 220nm, and the thickness of the substrate silicon dioxide is 2 microns. The refractive index of silicon is 3.48 at around 1550nm wavelength and the refractive index of silicon dioxide is 1.44.
FIG. 2(a) is a steady-state field profile when a light beam having a wavelength of 1.55 μm is input from port 1 without introducing a modulation voltage, and when the light beam is output from port 2, the modulator assumes an "on" state; as can be seen from fig. 2 (a): the two-dimensional photonic crystal multimode interference coupler at the input end is averagely divided into two beams of light with equal intensity and phase, the two beams of light are respectively incident into the two photonic crystal slab waveguides, no modulation voltage is introduced at two ends of the photonic crystal slab waveguide serving as a phase modulation arm at the moment, and the two beams of light are converged in the two-dimensional photonic crystal multimode interference coupler at the output end with the same intensity and phase. The modulator at this point has an optical output at port 2 and assumes an "on" state. The values on the abscissa and ordinate indicate the size (unit: micrometer) of the device in the X-Y plane. In the figure, the brightness of the white area represents the intensity of light, if the white brightness is large, the intensity of light is high, if the white brightness is low, the intensity of light is low, and the black area represents no intensity of light. The white light path represented in the figure is the steady state field distribution of the "on" state in the modulator after light is passed through the modulator when no modulation voltage is introduced.
FIG. 2(b) shows the steady state field profile when a modulation voltage is applied, with a wavelength of 1.55 μm at the input from port 1, and with no beam output from port 2, the modulator assumes an "off" state; as can be seen from fig. 2 (b): the two-dimensional photonic crystal multimode interference coupler at the input end is averagely divided into two beams of light with equal intensity and phase, the two beams of light are respectively incident into the two photonic crystal slab waveguides, at the moment, modulation voltage is introduced at two ends of the photonic crystal slab waveguides serving as phase modulation arms, the light beams incident into the phase modulation arms generate pi phase change, the phase difference pi between the light beams and the other light beam is, and the two beams of light are cancelled in the two-dimensional photonic crystal multimode interference coupler at the output end with the same intensity and different phases (the phase difference pi). The modulator at this point has no light output at port 2 and assumes an "off" state. The values on the abscissa and ordinate indicate the size (unit: micrometer) of the device in the X-Y plane. In the figure, the brightness of the white area represents the intensity of light, if the white brightness is large, the intensity of light is high, if the white brightness is low, the intensity of light is low, and the black area represents no intensity of light. The white light path represented in the figure is the steady state field distribution of the "off" state in the modulator after the modulator has been turned on when the modulation voltage is introduced.
The modulation method of the modulator comprises the following steps: when a beam of light (1550nm) is input into the first photonic crystal multimode interference coupler from the port 1, the split beam is respectively input into two photonic crystal slab waveguides, the photonic crystal slab waveguide between two electrodes is used as a phase modulation arm, the refractive index of the photonic crystal slab waveguide is changed under the action of modulation voltages at two ends, so that the phase of the passing light wave is changed, the other photonic crystal slab waveguide is used as a reference arm, the light wave passing through the reference arm is not influenced by the modulation voltage, and the two beams of light are finally converged in the second photonic crystal multimode interference coupler and output from the port 2. If the phase difference of the two light beams is 0, the two lights are added, the light intensity of the output end of the modulator is about 0.8, the insertion loss is 0.9dB, and an 'on' state appears; if the phase difference between the two light beams is pi, the two light beams cancel each other, and an "off" state appears, as shown in fig. 3, at this time, the light intensity at the output end of the modulator is about 0.032, and the extinction ratio is 14 dB. The modulation of the signal is realized by controlling the on and off of the light wave.
The above description is only a preferred embodiment of the present invention, and the present invention is not limited to the content of the embodiment. It will be apparent to those skilled in the art that various changes and modifications can be made within the technical scope of the present invention, and any changes and modifications made are within the protective scope of the present invention.
Claims (10)
1. A Mach-Zehnder modulator based on photonic crystals and nanowire waveguides is characterized in that: the photonic crystal multi-mode interference coupling wave splitting module is connected with the photonic crystal panel waveguide phase modulation module through a nanowire waveguide, and the photonic crystal multi-mode interference coupling wave combining module is connected with the photonic crystal panel waveguide phase modulation module through a nanowire waveguide;
the photonic crystal multimode interference coupling wave splitting module and the photonic crystal multimode interference coupling wave combining module both comprise photonic crystal multimode interference couplers, the photonic crystal slab waveguide phase modulation module comprises photonic crystal slab waveguides, the photonic crystal multimode interference couplers and the photonic crystal slab waveguides are air hole type photonic crystal slab structures which are periodically distributed along an X-Y plane, and multimode interference coupling areas are arranged in the photonic crystal multimode interference couplers.
2. A mach-zehnder type modulator based on a photonic crystal and nanowire waveguide as defined in claim 1 wherein: the multimode interference coupling region is formed by removing a plurality of air holes in the middle of the photonic crystal flat plate.
3. A mach-zehnder type modulator based on a photonic crystal and nanowire waveguide as defined in claim 2 wherein: the multimode interference coupling region is formed by removing 5 multiplied by 7 air holes in the middle of a two-dimensional triangular lattice photonic crystal flat plate.
4. A mach-zehnder type modulator based on a photonic crystal and nanowire waveguide as defined in claim 3 wherein: the length of the multimode interference coupling region is 3.31 mu m.
5. A mach-zehnder type modulator based on a photonic crystal and nanowire waveguide as defined in claim 1 wherein: the photonic crystal multimode interference coupler is a two-dimensional triangular lattice photonic crystal multimode interference coupler, the photonic crystal slab waveguide is a two-dimensional triangular lattice photonic crystal slab waveguide, and the substrate material of the air hole type photonic crystal slab is silicon.
6. The photonic-crystal-and-nanowire-based wave of claim 5A mach-zehnder type modulator characterized by: the two-dimensional triangular lattice photonic crystal multimode interference coupler and the lattice constant a of the two-dimensional triangular lattice photonic crystal slab waveguide1=420nm, radius of air hole r1=0.286a1。
7. A mach-zehnder type modulator based on a photonic crystal and nanowire waveguide as defined in claim 1 wherein: and photonic crystal tapered regions are arranged at the contact section of the nanowire waveguide and photonic crystal multimode interference coupler and the contact section of the nanowire waveguide and photonic crystal slab waveguide, and the photonic crystal tapered regions are arranged in air holes at two sides of the photonic crystal line defect to form a tapered structure.
8. A mach-zehnder type modulator based on a photonic crystal and nanowire waveguide as defined in claim 7 wherein: the photonic crystal tapering region is formed by removing two air holes on the outermost layer of the contact section, and the radius of the air holes on two sides of the subsequent photonic crystal line defect is 1: 2: 3, the input end and the output end of the photonic crystal line defect form a conical structure.
9. A mach-zehnder type modulator based on a photonic crystal and nanowire waveguide as defined in claim 1 wherein: the width of the photonic crystal slab waveguide is W1=sqrt(3)/2×a1The width of the nanowire waveguide is W2=2W1+2r1Wherein a is1Is a lattice constant, r1Is the air hole radius.
10. A mach-zehnder type modulator based on a photonic crystal and nanowire waveguide as defined in claim 1 wherein: the thicknesses of the photonic crystal multimode interference coupler, the photonic crystal slab waveguide and the nanowire waveguide are all 220nm, and the thickness of the substrate silicon is 2 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810121846.9A CN108563042B (en) | 2018-02-07 | 2018-02-07 | Mach-Zehnder modulator based on photonic crystal and nanowire waveguide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810121846.9A CN108563042B (en) | 2018-02-07 | 2018-02-07 | Mach-Zehnder modulator based on photonic crystal and nanowire waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108563042A CN108563042A (en) | 2018-09-21 |
| CN108563042B true CN108563042B (en) | 2021-02-12 |
Family
ID=63532202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810121846.9A Active CN108563042B (en) | 2018-02-07 | 2018-02-07 | Mach-Zehnder modulator based on photonic crystal and nanowire waveguide |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108563042B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111443426B (en) * | 2020-04-08 | 2021-03-12 | 清华大学 | Slow wave matching structure film type electro-optical modulator |
| CN112462535A (en) * | 2020-11-18 | 2021-03-09 | 南京邮电大学 | Silicon-based electro-optical modulation and mode division multiplexing integrated device |
| CN113031316A (en) * | 2021-03-16 | 2021-06-25 | 电子科技大学 | Electro-optical modulator based on valley photonic crystal waveguide |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002196296A (en) * | 2000-12-25 | 2002-07-12 | Mitsubishi Electric Corp | Optical modulator |
| US7787127B2 (en) * | 2007-10-15 | 2010-08-31 | Michael Galle | System and method to determine chromatic dispersion in short lengths of waveguides using a common path interferometer |
| CN100547456C (en) * | 2008-07-29 | 2009-10-07 | 浙江大学 | Electrooptic modulator based on horizontal narrow slit flat-plate and photon crystal linear defect wave-guide |
| US9459404B2 (en) * | 2009-10-23 | 2016-10-04 | Lumilant, Inc. | Optical router using interconnected photonic crystal elements with specific lattice-hole geometry |
| CN101840126B (en) * | 2010-04-21 | 2012-05-23 | 中国科学院半导体研究所 | Silicon-based cascaded resonant cavity all-optical logical AND gate structure capable of reducing power consumption |
| CN103336379B (en) * | 2013-07-16 | 2017-08-25 | 北京邮电大学 | A kind of integrated photon crystal MZI modulator applied to 60GHz ROF systems |
-
2018
- 2018-02-07 CN CN201810121846.9A patent/CN108563042B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN108563042A (en) | 2018-09-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6954568B2 (en) | Method and apparatus for splitting or combining optical beams with A Y coupler with reduced loss and electrical isolation | |
| JP6198091B2 (en) | Waveguide polarization splitter and polarization rotator | |
| EP3058402B1 (en) | Optical power splitter | |
| US20040202440A1 (en) | Mode transformation and loss reduction in silicon waveguide structures utilizing tapered transition regions | |
| CN108563042B (en) | Mach-Zehnder modulator based on photonic crystal and nanowire waveguide | |
| JP2003057464A (en) | Y-branch optical waveguide and multistage optical power splitter using the same | |
| CN111399118B (en) | Integrated polarization beam splitter based on thin-film lithium niobate waveguide | |
| CN110376753B (en) | High-performance polarization beam splitter and design method thereof | |
| US10422957B2 (en) | Method and system for a low-loss optical Y-junction power splitter | |
| CN114721176B (en) | Polarization controller based on-chip mode conversion | |
| CN112630892A (en) | Four-channel coarse wavelength division multiplexer based on non-equal-arm wide Mach-Zehnder interferometer | |
| CN113534504A (en) | Electric control adjustable polarization beam splitting method and device based on thin-film lithium niobate | |
| NL9300204A (en) | Integrated optical component for manipulating the polarization of optical signals. | |
| JPH04259801A (en) | Macha-zehnder interferometer | |
| CN115877506A (en) | Thin-film lithium niobate end-face coupler covering visible light wave band and preparation method thereof | |
| JPH10282350A (en) | Optical splitter | |
| CN112904479B (en) | Optical switch based on reverse Fano coupling micro-ring | |
| Chen et al. | Single-step etching polarization splitter-rotator based on lithium niobate ridge waveguide | |
| KR100417001B1 (en) | Optical power splitter with assistant waveguide | |
| CN112596254A (en) | Compact polarization beam splitter based on photonic crystal | |
| US20050129366A1 (en) | Graded index optical coupler | |
| CN109407211B (en) | Waveguide element and beam splitter | |
| Zhang et al. | Ultra-broadband 3dB power splitter based on adiabatic taper with ridge waveguide | |
| Sawada et al. | CMOS-compatible Si-wire polarization beam splitter based on wavelength-insensitive coupler | |
| JPH06313868A (en) | Waveguide type optical pulse multiple circuit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |