CN108548795A - A kind of humidity sensor based on Optical Microsphere type resonant cavity - Google Patents
A kind of humidity sensor based on Optical Microsphere type resonant cavity Download PDFInfo
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G02B6/255—Splicing of light guides, e.g. by fusion or bonding
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Abstract
The present invention relates to optical field and micro-nano system regions, specially a kind of humidity sensor based on Optical Microsphere type resonant cavity.When ambient humidity changes, the variation of relative humidity is so that the quantity of the hydrone of coupling regime changes between microspheric resonant cavity and conical fiber, the refractive index for resulting in coupling regime changes, the resonance wavelength of Microsphere Cavities can generate offset due to the variation of refractive index and size, so as to by determining the relative humidity of external environment to the detection of resonance wavelength drift value.Then by a quartz glass tube, two pieces of quartz glass and ultraviolet light solid glue, the encapsulation of device is completed under the premise of not changing oneself tuned good couple state.The present invention is compared with traditional humidity sensor, using optical fiber fabrication, have the characteristics that it is small, not by electromagnetic interference, it is anticorrosive, have very high sensitivity and long, the good, fast response time of stability of measurement accuracy, service life etc. a series of.
Description
Technical field
The present invention relates to optical field and micro-nano system regions, specially a kind of humidity based on Optical Microsphere type resonant cavity
Sensor.
Technical background
Humidity is raw in weather forecast, environmental monitoring, agricultural as one of more difficult detection and especially important environment parameter
Production, pharmaceutical production, semiconductor device fabrication, food storing, weaving, power generation, aerospace, locomotive naval vessel etc. have important
Application.In general, humidity sensor should meet it is claimed below：Fast response speed, small lag；High reliability, long-life；Compared with
Wide temperature range, very small temperature coefficient；Interchangeability is strong, renaturation is good；Easy making, price are low；It can be with corrosivity
Gas in work.However, it is desirable to meet above-mentioned requirements comprehensively, it is actually then extremely difficult.It can accurately and rapidly measure wet
Degree is most important in daily life and industrial production.
Traditional humidity sensor is mainly the types such as capacitance and resistance, and that there are volumes is big, sensitivity is low, the response time
The shortcomings of growing, needing the coating of humidity sensitive material and be vulnerable to electromagnetic interference.The sensitvity constraint of entire sensor is in coating
The selection of material, service life also rely on the type of coating material, limit the development of entire humidity sensor.Optical moisture senses
Utensil has the advantages that small, response is fast, electromagnetism interference.These advantages make optical moisture sensors apply in electricity humidity biography
Sensor and acoustics humidity sensor cannot be applied or be not suitable for the occasion of application, if fibre optical sensor is applied in microwave oven internal,
For detecting temperature and humidity parameter.Since optical sensor does not need electric power, can be used to detect inflammable liquid and
Gas, and can be used (such as in corrosive substance) under rugged environment.
In recent years, sensor is miniaturized in people and the requirement of integrated level is higher and higher, therefore miniature optical humidity sensor
The research of device becomes new research hotspot, the micro-resonator part based on Whispering-gallery-mode possess superelevation quality factor,
Low energy is lost and cheap cost of manufacture so that it has attracted the concern of numerous studies scholar.
Invention content
The present invention proposes a kind of humidity sensor coupled based on Optical Microsphere type resonant cavity and conical fiber.Using light
Fibre make it is a kind of it is small, not by electromagnetic interference, it is anticorrosive, have very high sensitivity and measurement accuracy, service life it is long,
Stability is good, fast response time humidity sensor, and the production method for providing fiber optic microsphere chamber humidity sensor.
The present invention adopts the following technical scheme that realization：A kind of humidity sensor based on Optical Microsphere type resonant cavity
Humidity sensor is formed after device, including Microsphere Cavities and conical fiber, Microsphere Cavities and conical fiber coupling package.
The principle of the humidity sensor is：Optical Microsphere Cavities are due to its high quality factor (Q0>109) and minimum mould
Co-volume and by increasingly extensive concern, the characteristic of Microsphere Cavities derives from its unique Whispering-gallery-mode:Light wave is in microballoon
It is constantly totally reflected on surface, to be constrained on the great circle detour in ball and along ball.In order to directly be excited in Microsphere Cavities
The mode of resonance in Microsphere Cavities can be excited to obtain higher coupling efficiency using conical fiber by playing Whispering-gallery-mode.
When ambient humidity changes, the variation of relative humidity makes the hydrone of coupling regime between Microsphere Cavities and conical fiber
Quantity changes, and the refractive index for resulting in coupling regime changes, and the resonance wavelength of Microsphere Cavities can be due to refractive index and ruler
Very little variation and generate offset, so as to by determining the relatively wet of external environment to the detection of resonance wavelength drift value
Degree.
The above-mentioned humidity sensor based on Optical Microsphere type resonant cavity, preparation method includes the following steps：
The first step：Microsphere Cavities are prepared using the method for heat fusing；
Second step：Conical fiber is prepared using molten daraf(reciprocal of farad)；
Third walks：（1）Microsphere Cavities are fixed on by remaining optical fiber handle on glass tube, and conical fiber is fixed on glass by quartz plate
On glass piece A, glass tube is fixed on the shaft coupling of D translation platform, and sheet glass A is arranged on D translation platform,（2）Pass through tune
The relative position of whole Microsphere Cavities and conical fiber obtains desired couple state；（3）Sheet glass B is placed under sheet glass A
Side, two sheet glass is sucked by magnet, in the upper surface drop coating light binding of sheet glass B；（4）By sheet glass B push forward until
It is contacted with glass tube, then in the two contact area drop coating light binding, since Microsphere Cavities are contacted with conical fiber,
It couples highly stable：（5）The region that light binding is coated with light-illuminating, makes its solidification, irradiation time want long enough to have ensured
All solidstate, otherwise, the device after encapsulation can make the relative position of Microsphere Cavities and conical fiber produce due to the continuing to cure of glue
Changing influences performance so that resonance spectrum changes；（6）Shaft coupling is detached with glass tube after solidification, sheet glass A
It is detached with D translation platform, has thus obtained the packaged humidity sensor based on microspheric resonant cavity.
A kind of above-mentioned humidity sensor based on Optical Microsphere type resonant cavity, heat melting method prepare Microsphere Cavities and specifically include
Following steps：（1）One section of optical fiber is taken, is peelled off the organic coat layer of optical fiber one end with optical fiber wire stripper；（2）It is soaked with alcohol
Dust-free paper is fixed on by fiber cores wiped clean, and by optical fiber on three-dimensional trim holder；（3）Open CO2Laser, power are adjusted to only
The degree of optical fiber can be softened, at this time under laser action, optical fiber is heated to send out light；（4）By three-dimensional trim holder by optical fiber
Core end is adjusted to focal point, then moves a distance L straight down, and the size by controlling L can realize microballoon chamber size
Control, ignoring small material volatilization, by material volume invariance, microsphere radius can be approximately：R=(2930L
)1/3Um, L unit are um；（5）Laser power is turned up and opens CO2Laser, fiber cores melted by heating under laser irradiation,
Fiber cores below focus point can be shunk upwards, finally since surface tension effects automatically form a microballoon.
A kind of above-mentioned humidity sensor based on Optical Microsphere type resonant cavity, it includes following that molten daraf(reciprocal of farad), which prepares conical fiber,
Step：（1）One section of optical fiber is taken, the organic coat layer of middle section is peelled off and wiped clean, by two fiber clamps by light
Fibre is fixed on accurate translation stage, and accurate translation stage is by two step motor controls；（2）The flame gun igniting of oxyhydrogen flame will be provided
And it is moved to fiber core region, it is ensured that the flame envelope position that fiber cores are in flame makes the medium temperature highest of heat affected zone, preheating
Driving Stepping Motor makes two accurate translation stages backwards to movement after 10 s, can gradually be become under stretching action by the fiber cores of thermal softening
Carefully, it closes flame gun when boring waist diameter and reaching the scale of needs and stops the movement of translation stage.
Change the relative humidity of resonant cavity and conical fiber coupled zone, the hydrone quantity variation in air causes coupled zone
The variation of domain refractive index is drifted about so as to cause resonance spectrum.The present invention is compared with traditional humidity sensor, using optical fiber
Make, have it is small, not by electromagnetic interference, it is anticorrosive, with very high sensitivity and measurement accuracy, service life length,
A series of features such as the good, fast response time of stability.
Description of the drawings
Fig. 1 is Microsphere Cavities producing principle figure.
Fig. 2 is the making schematic diagram of conical fiber.
Fig. 3 is encapsulation process schematic diagram.
Fig. 4 is the coupling schematic diagram of Microsphere Cavities and conical fiber.
In figure：1- sheet glass A, 2- sheet glass B, 3- magnet, 4- glass tubes, 5- shaft couplings, 6- quartz plates.
Specific implementation mode
The Microsphere Cavities humidity sensor of the present invention mainly consists of two parts, and is Microsphere Cavities respectively with conical fiber.
The preparation of one, Microsphere Cavities uses the method for heat fusing:After the coat of single mode optical fiber is removed, CO is then used2Laser
Calcination is carried out to its fiber cores tip, becomes molten condition, then forms more standard under the action of surface tension
The diameter of spherical shape, ball is about 80~500 um.
Microballoon is made to be as follows：（1）One section of optical fiber is taken, is peelled off organic coat layer with optical fiber wire stripper；（2）
Fiber cores wiped clean is fixed on three-dimensional trim holder by the dust-free paper soaked with alcohol；（3）Open CO2Laser,
Power is adjusted to be only capable of the degree of softening optical fiber, and at this time under laser action, fiber cores are heated to send out light, observe and fill in side
Under the monitoring set, laser focus point can be found, the camera lens for observing device is located in focal point later and closes CO2Laser；
（4）Fiber cores end is adjusted to focal point by three-dimensional trim holder, then moves a distance L straight down, by controlling L
Size can realize the control of microballoon chamber size, ignoring small material volatilization, by material volume invariance, microballoon
Radius can be approximately：R=(2930L)1/3Um, L unit are um；（5）Laser power is turned up and opens laser, fiber cores are swashing
Light irradiates lower melted by heating, and the fiber cores below focus point can be shunk upwards, finally since surface tension effects automatically form one
A microballoon, in addition to CO2Laser can also be carried out fused optic fiber core using oxyhydrogen flame or electrical discharge arc and make microballoon, principle class
Seemingly.
The preparation of two, conical fibers is using molten daraf(reciprocal of farad):Water is fixed on by fiber clamp after single mode optical fiber removal coat
On flat displacement platform, while hydrogen flame is heated to fiber cores, two horizontal position moving stage with identical speed stretching fiber, from
And optical fiber is made to form taper in flame portion, the method can realize prepared by the conical fiber of ultra-low loss (0.29 dB), bore area
Beam waist diameter is about 2~10 um.
Concrete operation step is as follows：（1）One section of ordinary optic fibre is taken, by middle section（About 15 mm）Organic coat layer stripping
Simultaneously wiped clean is gone, optical fiber is fixed on accurate translation stage by two fiber clamps, accurate translation stage is by two stepping electricity
Machine controls；（2）The flame gun point for providing oxyhydrogen flame is fought and is moved to fiber area, it is ensured that fiber cores are in the flame envelope position of flame
Setting makes the medium temperature highest of heat affected zone, and Driving Stepping Motor makes two translation stages backwards to movement after preheating 10 s, by thermal softening
Optical fiber can be tapered under stretching action, closed when boring waist diameter and reaching the scale of needs and flame gun and stop translation stage
Movement, as shown in Figure 2；（3）After conical fiber is made, since cone waist is carefully particularly easy to very much damage, it is therefore desirable to by it
It is fixed on a device and is moved easily and tests, admittedly fixing optical fiber using quartz plate, it is flat that quartz plate is placed on a precision
In moving stage；（4）After quartz plate is adjusted to suitable position, it is in contact with it the upper ultraviolet light solid glue of position drop at optical fiber both ends, and
Quartz plate is removed, the conical fiber device fixed is just made after light binding solidification with ultra violet lamp 3~5 minutes
.
Three, make Microsphere Cavities packaging：Microsphere Cavities are fixed on by remaining optical fiber handle on glass tube, and conical fiber is solid
It being scheduled on sheet glass A, glass tube is fixed on the shaft coupling of D translation platform, and sheet glass A is arranged on D translation platform,（1）
By the accurate relative position for adjusting microcavity and conical fiber, desired couple state is obtained；（2）Sheet glass B is placed under A
Side, two sheet glass are sucked by magnet, with syringe B upper surface drop coating light binding；（3）Slowly by sheet glass B to being pushed forward
It moves until it and glass tube gentle touchdown, then in contact area drop coating light binding, since microcavity is contacted with conical fiber,
Therefore it couples highly stable, operates the platform slight vibration brought and coupling phenomenon is had little effect：（4）With 365 nm wavelength
Ultra violet lamp coating light binding region, make its solidification, irradiation time wants long enough to ensure to be fully cured, otherwise, envelope
Device after dress can so that the relative position of microcavity and conical fiber generates variation due to the continuing to cure of glue, so that humorous
Spectrum of shaking changes, and influences performance, and the light application time of general 30 min can be met the requirements；（5）It will be connected to three-dimensional after solidification
The shaft coupling of translation stage is detached with glass tube, and sheet glass A is detached with D translation platform, has thus obtained packaged Microsphere Cavities
Coupled apparatus, such as Fig. 3（e）It is shown.
Claims (4)
1. a kind of humidity sensor based on Optical Microsphere type resonant cavity, it is characterised in that micro- including Microsphere Cavities and conical fiber
Humidity sensor is formed after spherical cavity and conical fiber coupling package.
2. a kind of humidity sensor based on Optical Microsphere type resonant cavity according to claim 1, it is characterised in that it is made
Preparation Method includes the following steps：
The first step：Microsphere Cavities are prepared using the method for heat fusing；
Second step：Conical fiber is prepared using molten daraf(reciprocal of farad)；
Third walks：（1）Microsphere Cavities are fixed on glass tube by remaining optical fiber handle（4）On, conical fiber passes through quartz plate（6）Gu
It is scheduled on sheet glass A（1）On, glass tube（4）It is fixed on the shaft coupling of D translation platform（5）On, sheet glass A（1）It is arranged in three-dimensional
On translation stage,（2）By adjusting the relative position of Microsphere Cavities and conical fiber, desired couple state is obtained；（3）By sheet glass
B（2）It is placed on sheet glass A（1）Lower section, by magnet（3）Two sheet glass are sucked, in sheet glass B（2）Upper surface drop coating light it is solid
Glue；（4）By sheet glass B（2）It pushes forward until it and glass tube（4）Contact, then in the two contact area drop coating light binding,
Since Microsphere Cavities are contacted with conical fiber, coupling is highly stable：（5）The region of light binding is coated with light-illuminating,
Make its solidification；（6）By shaft coupling after solidification（5）With glass tube（4）Separation, sheet glass A（1）It is detached with D translation platform, in this way
The packaged humidity sensor based on microspheric resonant cavity is just obtained.
3. a kind of humidity sensor based on Optical Microsphere type resonant cavity according to claim 2, it is characterised in that hot melt
The method of melting prepares Microsphere Cavities and specifically includes following steps：（1）One section of optical fiber is taken, with optical fiber wire stripper by the organic coat of optical fiber one end
Layer is peelled off；（2）It is fixed on three-dimensional trim holder by fiber cores wiped clean, and by optical fiber with the dust-free paper that alcohol soaks；（3）It beats
Open CO2Laser, power is adjusted to be only capable of the degree of softening optical fiber, and at this time under laser action, optical fiber is heated to send out light；
（4）Fiber cores end is adjusted to focal point by three-dimensional trim holder, then moves a distance L straight down, by controlling L
Size can realize the control of microballoon chamber size；（5）Laser power is turned up and opens CO2Laser, fiber cores are in laser irradiation
Lower melted by heating, the fiber cores below focus point can be shunk upwards, finally since surface tension effects automatically form a microballoon.
4. a kind of humidity sensor based on Optical Microsphere type resonant cavity according to claim 2 or 3, it is characterised in that molten
Daraf(reciprocal of farad) prepares conical fiber and includes the following steps：（1）One section of optical fiber is taken, the organic coat layer of middle section is peelled off and wiped
Only, optical fiber is fixed on accurate translation stage by two fiber clamps, accurate translation stage is by two step motor controls；（2）
The flame gun point for providing oxyhydrogen flame is fought and is moved to fiber core region, it is ensured that the flame envelope position that fiber cores are in flame makes to be heated
The medium temperature highest in region, Driving Stepping Motor makes two accurate translation stages backwards to movement after preheating 10 s, by the light of thermal softening
Fibre core can be tapered under stretching action, and flame gun is closed when boring waist diameter and reaching the scale of needs and stops translation stage
It is mobile.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109580562A (en) * | 2018-11-15 | 2019-04-05 | 安徽光纤光缆传输技术研究所(中国电子科技集团公司第八研究所) | A kind of micro-nano fiber fluorescent optical sensor system and preparation method based on evanscent field |
| CN109633821A (en) * | 2018-12-24 | 2019-04-16 | 暨南大学 | A kind of preparation method and microwave photon filter of microcavity coupled system |
| CN110441869A (en) * | 2019-08-02 | 2019-11-12 | 福州腾景光电科技有限公司 | A kind of precise adjustable optical fibre coupler |
| CN111965758A (en) * | 2020-08-07 | 2020-11-20 | 华南师范大学 | Quality optimization device for high-power laser beam, testing device and preparation method |
| CN112268636A (en) * | 2020-09-22 | 2021-01-26 | 北京航空航天大学 | Liquid temperature sensing system based on whispering gallery mode spherical optical microcavity |
| CN113777807A (en) * | 2021-09-07 | 2021-12-10 | 哈尔滨工程大学 | Based on Ge2Sb2Te5Nonvolatile echo wall mode all-optical switch of phase change material and manufacturing method thereof |
| CN115980924A (en) * | 2023-01-18 | 2023-04-18 | 北京大学长三角光电科学研究院 | Preparation method of optical fiber microcavity coupling system and ultrasonic detector |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109580562A (en) * | 2018-11-15 | 2019-04-05 | 安徽光纤光缆传输技术研究所(中国电子科技集团公司第八研究所) | A kind of micro-nano fiber fluorescent optical sensor system and preparation method based on evanscent field |
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| CN109633821B (en) * | 2018-12-24 | 2020-10-27 | 暨南大学 | Preparation method of microcavity coupling system and microwave photon filter |
| CN110441869A (en) * | 2019-08-02 | 2019-11-12 | 福州腾景光电科技有限公司 | A kind of precise adjustable optical fibre coupler |
| CN111965758A (en) * | 2020-08-07 | 2020-11-20 | 华南师范大学 | Quality optimization device for high-power laser beam, testing device and preparation method |
| CN112268636A (en) * | 2020-09-22 | 2021-01-26 | 北京航空航天大学 | Liquid temperature sensing system based on whispering gallery mode spherical optical microcavity |
| CN113777807A (en) * | 2021-09-07 | 2021-12-10 | 哈尔滨工程大学 | Based on Ge2Sb2Te5Nonvolatile echo wall mode all-optical switch of phase change material and manufacturing method thereof |
| CN115980924A (en) * | 2023-01-18 | 2023-04-18 | 北京大学长三角光电科学研究院 | Preparation method of optical fiber microcavity coupling system and ultrasonic detector |
| CN115980924B (en) * | 2023-01-18 | 2023-10-13 | 北京大学长三角光电科学研究院 | Preparation method of optical fiber microcavity coupling system and ultrasonic detector |
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Application publication date: 20180918 |
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