CN108535515A - A kind of sensor applied to atomic force microscope - Google Patents
A kind of sensor applied to atomic force microscope Download PDFInfo
- Publication number
- CN108535515A CN108535515A CN201810279030.9A CN201810279030A CN108535515A CN 108535515 A CN108535515 A CN 108535515A CN 201810279030 A CN201810279030 A CN 201810279030A CN 108535515 A CN108535515 A CN 108535515A
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- China
- Prior art keywords
- probe
- crystal oscillator
- quartz crystal
- groove
- prong
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The present invention relates to a kind of sensors applied to atomic force microscope, including pedestal, the insulation bearing bed being detachably arranged on the upside of pedestal, quartz crystal oscillator and probe on insulation bearing bed；First prong of quartz crystal oscillator and the second prong of quartz crystal oscillator are oppositely disposed up and down, and quartz crystal oscillator is configured at by the second prong on insulation bearing bed；Probe configuration is in the first prong of quartz crystal oscillator.Sensor of the invention has the advantages that simple in structure.
Description
Technical field
The present invention relates to atomic force microscope technologies, and in particular, to a kind of sensor applied to atomic force microscope.
Background technology
Atomic force microscope is a kind of common characterization tool, is mainly used to obtain the information characteristics on sample to be tested surface.
Micro-force sensor is the core component of atomic force microscope, it directly determines force sensitivity and the space point of atomic force microscope
Resolution.Existing atomic force microscope mostly uses micro-cantilever structure Micro-force sensor, by detecting the spy of material surface character
Needle and for detect micro- power micro-cantilever two parts form.When detecting sample, the probe needle of micro-cantilever structure Micro-force sensor
Point interacts close to sample to be tested surface, the atom of needle point and the atom of sample surfaces, and active force passes to and probe phase
On micro-cantilever even, micro-cantilever generates deformation or motion state changes, and is risen with sample surfaces by laser detection micro-cantilever
The change information for lying prostrate variation, to obtain the information of sample surfaces.But since micro-cantilever structure Micro-force sensor quality factor are low
Inherent defect, leads to that all atomic force microscope measurement sensitivities are low at present and stability is poor；Existing micro-cantilever passes simultaneously
Sensor technology needs are assisted by laser structure, the usually more difficult requirement for adapting to extreme environment of existing laser structure,
Connecing causes not tested in extreme environments such as ultralow temperature, ultrahigh vacuum using the microscope of micro-cantilever technology.For this shape
Condition, spy propose the application.
Invention content
It is existing to solve that technical problem to be solved by the invention is to provide a kind of sensors applied to atomic force microscope
The problems of some microcantilever sensors.
In order to solve the above technical problems, the present invention provides a kind of sensor applied to atomic force microscope, including pedestal,
It is detachably arranged in the insulation bearing bed on the upside of pedestal, quartz crystal oscillator and probe on insulation bearing bed；Quartz-crystal
Second prong of the first prong and quartz crystal oscillator shaken is oppositely disposed up and down, and quartz crystal oscillator is configured at insulation by the second prong
On bearing bed；Probe configuration is in the first prong of quartz crystal oscillator.
Preferably, the pedestal is cuboid, and its upside offers groove, the groove from a side of pedestal to
The opposite the other side in one side extends, and the extending direction phase of the extending direction of the groove and each prong of quartz crystal oscillator
Together；The insulation bearing bed is located on the upside of the groove.
Preferably, the groove is section be V-type shape groove.
Preferably, the depth of the groove is 2mm to 4mm, the recess width is 1mm to 3mm.
Preferably, quartz crystal oscillator is not at the surface of groove.
Preferably, the quartz crystal oscillator is passive quartz crystal oscillator, and its resonant frequency is 20kHz to 100kHz.
Preferably, the weight of the pedestal is 10g-15g.
Preferably, the probe is silicon probe, tungsten tipped probe, Au probe, platinumiridio probe, diamond probe or carbon fiber
Probe.
Preferably, the probe is carbon fiber probe, and a diameter of 5um to 10um of the carbon fiber probe, the carbon fiber
The radius of curvature for tieing up probe tip is 5nm to 100nm.
By using above-mentioned technical proposal, the present invention can obtain following technique effect：
1, sensor of the invention has the advantages that simple in structure；
2, the application is used using the sensor of quartz crystal oscillator with self-excitation, self-checking function, does not need optical detection system, and
Quality factor are high, and there is very high force sensitivity, the sensor of the application to help to improve the resolution ratio of atomic force microscope；
3, sensor of the invention on the upside of pedestal by opening up groove, and then will can insulate bearing bed more conveniently certainly
Pedestal is detached from, to reuse pedestal；
4, compared to the prior art, the sensor of the application need not be assisted by laser structure, thus application has this biography
The atomic force microscope of sensor can preferably be suitable for extreme operating environments, and have higher resolution ratio and scanning accuracy.
Description of the drawings
Fig. 1 and Fig. 2 depicts the sensor different visual angles applied to atomic force microscope of one embodiment of the invention respectively
Under schematic diagram.
Specific implementation mode
To keep the purpose, technical scheme and advantage of embodiment of the present invention clearer, implement below in conjunction with the present invention
The technical solution in embodiment of the present invention is clearly and completely described in attached drawing in mode, it is clear that described reality
The mode of applying is some embodiments of the invention, rather than whole embodiments.Based on the embodiment in the present invention, ability
The every other embodiment that domain those of ordinary skill is obtained without creative efforts, belongs to the present invention
The range of protection.
Combined with Figure 1 and Figure 2, in one embodiment, the present invention is applied to the sensor of atomic force microscope, including：Pedestal
1, insulation bearing bed 2, the quartz crystal oscillator 3 and probe on insulation bearing bed 2 for being detachably arranged in 1 upside of pedestal
6；First prong 4 of quartz crystal oscillator 3 and the second about 5 prong relative configuration of quartz crystal oscillator 3, and quartz crystal oscillator 3 passes through second
Prong 5 is configured on insulation bearing bed 2；Probe 6 is configured in the first prong 4 of quartz crystal oscillator 3.Probe 6 stretches out upwards, needle
Nose part is higher than the upper surface of the first prong 4.Insulation bearing bed 2 is, for example, alumina ceramic plate or other common can expire
The material of 3 job requirement of sufficient quartz crystal oscillator.
Pedestal 1 can be cuboid, and its upside offer groove 1A, the groove 1A from a side of pedestal 1 to this
The opposite the other side in one side extends, and the extending direction of groove 1A is identical as the extending direction of 3 each prong of quartz crystal oscillator；Absolutely
Edge bearing bed 2 is located on the upside of the groove 1A.Groove 1A is the groove that section is V-type shape.The depth of groove 1A can be for 2mm extremely
4mm, such as 2mm.The width of groove 1A is 1mm to 3mm, such as upside is 3mm.The weight of pedestal 1 can be 10g to 15g, such as
15g.Bottom degree 1 can be metab.Quartz crystal oscillator 3 is not at the surface of groove 1A, i.e. pedestal 1 is right against quartz crystal oscillator 3
It is entity structure to divide all, helps to improve the quality factor of sensor.
The length of insulation bearing bed 2, width, thickness can meet the following conditions：3mm≤length≤10mm, 2mm≤wide≤
10mm, 0.5mm≤thickness≤1.5mm may be, for example, 8mm (length) × 6mm (width) × 1mm (thickness).
Quartz crystal oscillator 3 can be passive quartz crystal oscillator, and its resonant frequency is 20kHz to 100kHz, for example,
32.768kHz.Quartz crystal oscillator 3 has the first terminals 3A and the second terminals 3B, to connect external drive and detection device.
Probe 6 can be silicon probe, tungsten tipped probe, Au probe, platinumiridio probe, diamond probe or carbon fiber probe.It visits
The tip portion of needle 6 can use the preparations such as electrochemical erosion method, mechanical polishing method, electrochemical milling method.When probe 6 is visited for carbon fiber
Needle, a diameter of 5um to 10um of carbon fiber probe, such as 7um.The radius of curvature of carbon fiber probe tip is 5nm to 100nm,
Such as 50nm.Tip dimensions are the accuracy of detection that nano level probe helps to improve sensor.Glass paste is, for example,
The glass paste that the KOARTAN companies trade mark is 5635.
Quartz crystal oscillator 3 can be adhered to by adhesives 7 on insulation bearing bed 2, and used glue is, for example, hot melt adhesive.
Insulation bearing bed 2 can be also adhered on pedestal 1 by adhesives.
The present invention can obtain following technique effect：Sensor of the invention has the advantages that simple in structure, and sensor is logical
It crosses and opens up groove on the upside of pedestal, and then more conveniently can be detached from insulation bearing bed from pedestal, to reuse
Pedestal.
The foregoing is merely the preferred embodiment of the present invention, are not intended to restrict the invention, for this field
For technical staff, the invention may be variously modified and varied.All within the spirits and principles of the present invention, any made by
Modification, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (9)
1. a kind of sensor applied to atomic force microscope, which is characterized in that include：Pedestal (1) is detachably arranged in bottom
Insulation bearing bed (2) on the upside of seat (1), the quartz crystal oscillator (3) on insulation bearing bed (2) and probe (6)；Quartz-crystal
First prong (4) of (3) of shaking and the second prong (5) of quartz crystal oscillator (3) are oppositely disposed up and down, and quartz crystal oscillator (3) passes through
Two prongs (5) are configured on insulation bearing bed (2)；Probe (6) is configured in the first prong (4) of quartz crystal oscillator (3).
2. sensor according to claim 1, which is characterized in that the pedestal (1) is cuboid, and its upside offers
Groove (1A), the groove (1A) extend from a side of pedestal (1) to the other side opposite with a side, and described recessed
The extending direction of slot (1A) is identical as the extending direction of quartz crystal oscillator (3) each prong；The insulation bearing bed (2) is located at described recessed
On the upside of slot (1A).
3. sensor according to claim 2, which is characterized in that the groove (1A) is the groove that section is V-type shape.
4. sensor according to claim 3, which is characterized in that the depth of the groove (1A) is 2mm to 4mm, described
Groove (1A) width is 1mm to 3mm.
5. sensor according to claim 2, which is characterized in that quartz crystal oscillator (3) is not at the surface of groove (1A).
6. sensor according to claim 1, which is characterized in that the quartz crystal oscillator (3) is passive quartz crystal oscillator, and its
Resonant frequency is 20kHZTo 100kHZ。
7. sensor according to claim 1, which is characterized in that the weight of the pedestal (3) is 10g-15g.
8. sensor according to claim 1, which is characterized in that the probe (6) be silicon probe, tungsten tipped probe, Au probe,
Platinumiridio probe, diamond probe or carbon fiber probe.
9. sensor according to claim 1, which is characterized in that the probe (6) is carbon fiber probe, the carbon fiber
The radius of curvature of a diameter of 5um to 10um of probe, the carbon fiber probe tip are 5nm to 100nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810279030.9A CN108535515A (en) | 2018-03-30 | 2018-03-30 | A kind of sensor applied to atomic force microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810279030.9A CN108535515A (en) | 2018-03-30 | 2018-03-30 | A kind of sensor applied to atomic force microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108535515A true CN108535515A (en) | 2018-09-14 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810279030.9A Pending CN108535515A (en) | 2018-03-30 | 2018-03-30 | A kind of sensor applied to atomic force microscope |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6094971A (en) * | 1997-09-24 | 2000-08-01 | Texas Instruments Incorporated | Scanning-probe microscope including non-optical means for detecting normal tip-sample interactions |
| CN1510694A (en) * | 2002-12-23 | 2004-07-07 | 中国科学技术大学 | Fibre-optical probe with excellent vibration characteristic and producing method thereof |
| CN1526142A (en) * | 2001-05-11 | 2004-09-01 | ̩����ѧ�������о��� | Actuating and sensing device for scanning probe microscopes |
| CN101776436A (en) * | 2010-03-10 | 2010-07-14 | 合肥工业大学 | Quartz tuning fork-based nano measuring head and sample surface micro-topography measuring method |
| CN103424572A (en) * | 2012-05-25 | 2013-12-04 | 国家纳米科学中心 | Manufacturing method for atomic power sensor, sensor, and atomic power sensor measuring apparatus and method thereof |
-
2018
- 2018-03-30 CN CN201810279030.9A patent/CN108535515A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6094971A (en) * | 1997-09-24 | 2000-08-01 | Texas Instruments Incorporated | Scanning-probe microscope including non-optical means for detecting normal tip-sample interactions |
| CN1526142A (en) * | 2001-05-11 | 2004-09-01 | ̩����ѧ�������о��� | Actuating and sensing device for scanning probe microscopes |
| CN1510694A (en) * | 2002-12-23 | 2004-07-07 | 中国科学技术大学 | Fibre-optical probe with excellent vibration characteristic and producing method thereof |
| CN101776436A (en) * | 2010-03-10 | 2010-07-14 | 合肥工业大学 | Quartz tuning fork-based nano measuring head and sample surface micro-topography measuring method |
| CN103424572A (en) * | 2012-05-25 | 2013-12-04 | 国家纳米科学中心 | Manufacturing method for atomic power sensor, sensor, and atomic power sensor measuring apparatus and method thereof |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180914 |
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| RJ01 | Rejection of invention patent application after publication |