CN108527424A - Manipulator and target processing unit (plant) - Google Patents
Manipulator and target processing unit (plant) Download PDFInfo
- Publication number
- CN108527424A CN108527424A CN201810343571.3A CN201810343571A CN108527424A CN 108527424 A CN108527424 A CN 108527424A CN 201810343571 A CN201810343571 A CN 201810343571A CN 108527424 A CN108527424 A CN 108527424A
- Authority
- CN
- China
- Prior art keywords
- clamping
- manipulator
- workpiece
- absorbent module
- claw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/08—Gripping heads and other end effectors having finger members
- B25J15/10—Gripping heads and other end effectors having finger members with three or more finger members
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
A kind of manipulator of present invention offer and target processing unit (plant), are related to clamping apparatus technical field, manipulator includes manipulator ontology and absorbent module；The manipulator ontology is used for clamping workpiece；The absorbent module is fixedly connected with the manipulator ontology, and the absorbent module is used for absorbent bodies.While manipulator ontology clamping workpiece, absorbent module can adsorb object (such as inspection moves ticket or work piece production requires nameplate etc.) corresponding with workpiece, make to move together with workpiece and object corresponding with workpiece, to prevent batch mixing, improves the reliability of processing.
Description
Technical field
The present invention relates to clamping apparatus technical fields, having the manipulator more particularly, to a kind of manipulator, and one kind
Target processing unit (plant).
Background technology
Plated film target be by magnetron sputtering, multi-arc ion coating or other kinds of coating system under appropriate process conditions
It sputters on substrate and forms the sputtering source of various functions film.Briefly, target is exactly the mesh of high speed lotus energy particle bombardment
Mark material, in high energy laser weapon, different capacity density, different output waveforms, different wave length laser and different targets
When material interacts, different killing damage effects will produce.Such as：Magnetron evaporation sputter coating is heating evaporation plated film, aluminium
Film etc..Replace different target (such as aluminium, copper, stainless steel, titanium, nickel target), you can obtain different membrane systems (it is such as superhard, wear-resisting,
Corrosion-resistant alloy film etc.).
In target production process, corresponding to issue a inspection shifting ticket, inspection, which moves on ticket, can clearly prompt each process
Production procedure, and workpiece corresponds to a inspection and moves ticket.In the prior art, operator takes corresponding again after workpiece of taking
Inspection moves ticket, and ticket content workpieces processing is moved according to inspection.
But need to place inspection shifting ticket by hand after product of manually taking, when live workpiece is excessive, easily causes to examine and move ticket
It puts mixed, batch mixing accident occurs.
Invention content
The purpose of the present invention is to provide a kind of manipulators, to solve technical problem in the prior art.
Manipulator provided by the invention, including manipulator ontology and absorbent module；
The manipulator ontology is used for clamping workpiece；
The absorbent module is fixedly connected with the manipulator ontology, and the absorbent module is used for absorbent bodies.
Further, the absorbent module includes vacuum cup.
Further, the absorbent module further includes actuator, and the actuator is for driving the vacuum cup opposite
It is moved in the manipulator ontology.
Further, the absorbent module further includes detection piece, and the detection piece is used to obtain the position letter of the object
Breath.
Further, the actuator can obtain the location information for the object that the detection piece obtains, and according to object
Location information drive the vacuum pan to be moved to the position of object.
Further, manipulator ontology includes moving assembly and clamping assembly；
The clamping assembly and the absorbent module are separately fixed on the moving assembly, and the moving assembly is used for band
It moves the clamping assembly and the absorbent module is moved to selected position；
The clamping assembly is used for clamping workpiece.
Further, the clamping assembly includes multiple clamping wheels, and multiple clamping wheels can coordinate clamping workpiece, and
Multiple clamping wheels are able to stretch between clamping jaw adjacent in turning attachment.
Further, the clamping assembly further includes mounting disc and multiple claws；
Each claw is slidably connected with the mounting disc respectively, and each claw is able to along the mounting disc
Radially slide, each one end of the claw far from the mounting disc is fixed with the clamping wheel respectively, and multiple described
Claw is arranged along the circumferential uniform intervals of the mounting disc.
Further, the clamping assembly further includes claw actuator, and the claw actuator is for driving the claw
Along radially sliding for the mounting disc.
The present invention also aims to provide a kind of target processing unit (plant), including manipulator of the present invention.
Manipulator provided by the invention, including manipulator ontology and absorbent module；The manipulator ontology is used for clamping work
Part；The absorbent module is fixedly connected with the manipulator ontology, and the absorbent module is used for absorbent bodies.In manipulator sheet
While body clamping workpiece, absorbent module can will corresponding with workpiece object (such as inspection moves ticket or work piece production requires nameplate
Deng) absorption, make to move together with workpiece and object corresponding with workpiece, to prevent batch mixing, improves the reliability of processing.
Description of the drawings
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, in being described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, other drawings may also be obtained based on these drawings.
Fig. 1 is the structural schematic diagram of manipulator provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of clamping assembly in manipulator provided in an embodiment of the present invention (when non-clamping workpiece)；
Fig. 3 is the structural schematic diagram of clamping assembly in manipulator provided in an embodiment of the present invention (when clamping workpiece)；
Fig. 4 is the structural schematic diagram of clamping wheel in manipulator provided in an embodiment of the present invention.
Icon：1- clamping assemblies；11- mounting discs；12- claws；13- clamping wheels；131- side walls；132- grooves；
2- workpiece；3- moving assemblies；4- absorbent modules.
Specific implementation mode
Technical scheme of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
The every other embodiment that personnel are obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that such as occur term "center", "upper", "lower", "left", "right",
"vertical", "horizontal", "inner", "outside" etc., indicated by orientation or positional relationship be orientation based on ... shown in the drawings or position
Relationship is merely for convenience of description of the present invention and simplification of the description, and not indicating or implying the indicated device or element must have
There is specific orientation, with specific azimuth configuration and operation, therefore is not considered as limiting the invention.In addition, as occurred
Term " first ", is used for description purposes only " second ", is not understood to indicate or imply relative importance.Wherein, term
" first position " and " second position " is two different positions.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
Can also be electrical connection to be mechanical connection；It can be directly connected, can also indirectly connected through an intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
The present invention provides a kind of manipulator and target processing unit (plant)s, and multiple embodiments are given below to provided by the invention
Manipulator and target processing unit (plant) are described in detail.
Embodiment 1
Manipulator provided by the invention, as shown in Figures 1 to 4, including manipulator ontology and absorbent module 4；The machinery
Hand ontology is fixedly connected for absorbent module 4 described in clamping workpiece with the manipulator ontology, and the absorbent module 4 is for inhaling
Addendum body.
Wherein, manipulator ontology can be used for clamping target raw materials for production, can be used for grabbing folder aluminium raw materials for production etc.
Any suitable workpiece.
Absorbent module 4 is used for absorbent bodies, and wherein object can be that inspection corresponding with workpiece moves the scraps of paper class formations such as ticket,
Can be any suitable forms such as identity nameplate corresponding with workpiece.
While manipulator ontology clamping workpiece, absorbent module 4 can will corresponding with workpiece object (such as inspection moves ticket
Or work piece production requires nameplate etc.) absorption, make to move together with workpiece and object corresponding with workpiece, to prevent batch mixing, improve
The reliability of processing.
Further, the absorbent module 4 includes vacuum cup.
Under the action of vacuum cup, it can be used for adsorbing object corresponding with workpiece, due to the adsorption capacity of vacuum cup
Relatively large, object is not easy to fall, and can improve the reliability and stability of processing.
Further, the absorbent module 4 further includes actuator, and the actuator is for driving the vacuum cup opposite
It is moved in the manipulator ontology.
Specifically, actuator may include the first actuator and the second actuator, and one end of the second actuator is fixed on
On one actuator, the other end is fixed with vacuum cup, for driving vacuum cup vertically to be transported relative to manipulator ontology
It is dynamic；One end of first actuator is fixed on moving assembly, and the other end is fixed with the second actuator, for driving vacuum cup phase
Manipulator ontology is moved in the horizontal direction.
Wherein, actuator can be any suitable forms such as cylinder or oil cylinder.
In use, after moving assembly drives absorbent module 4 and clamping assembly to be moved to suitable position, clamping group
Part can clamping workpiece, at this time if still there is a certain distance, Ke Yitong between absorbent module 4 and the object that adsorbs of needs
Part of overdriving drives vacuum cup movement, and object is adsorbed.
Further, the absorbent module 4 further includes detection piece, and the detection piece is used to obtain the position letter of the object
Breath.After detection piece obtains the location information of object, which can be sent to actuator, actuator is according to the position of object
Set the position that vacuum pan described in information-driven is moved to object.Improve the accuracy of absorbent bodies.
Further, manipulator ontology includes moving assembly and clamping assembly；The clamping assembly and the absorbent module 4
It is separately fixed on the moving assembly, the moving assembly is for driving the clamping assembly and the absorbent module 4 to move
To selected position；The clamping assembly is used for clamping workpiece.
In use, after moving assembly drives absorbent module 4 and clamping assembly to be moved to suitable position, clamping group
Part can clamping workpiece, while absorbent module 4 can adsorb object corresponding with the workpiece of clamping.
The clamping assembly 1 includes multiple clamping wheels 13, and multiple clamping wheels 13 can coordinate clamping workpiece 2, and more
Between a clamping wheel 13 is able to stretch into clamping jaw adjacent in turning attachment, to which workpiece is delivered in lathe, with
Workpiece is processed convenient for lathe.
Workpiece 2 is conveyed when on the fixture of lathe using clamping device provided in this embodiment, first with multiple folders
It holds 13 cooperation of wheel to clamp workpiece 2, clamping assembly 1 is then moved to selected position using moving assembly 3, in clamping group
When part 1 is moved to selected location, workpiece 2 is coaxially disposed with turning attachment, and multiple clamping wheels 13 are able to stretch into turning attachment
In between adjacent clamping jaw, will not interfere with the clamping jaw of turning attachment, be suitble to so that workpiece 2 can extend into turning attachment
Position, using turning attachment clamp workpiece 2, then by multiple clamping wheels 13 coordinate unclamp workpiece 2, moving assembly 3 drive clamping
Component 1 is moved to initial position and clamped one time can be completed, and using clamping device clamping workpiece 2, without using artificial, can drop
Low hand labor intensity improves efficiency and convenience, and moving assembly 3 can drive workpiece 2 to be moved to selected position, with
So that workpiece 2 is stretched into the position being suitble in fixture, can improve the stability of 2 clamping position of workpiece, reduce workpiece 2 fill it is askew general
Rate prevents workpiece 2 from crushing, so as to improve the convenience and stability that workpiece 2 clamps.
Wherein, moving assembly 3 can be the mobile mechanism of manipulator, or any suitable shape such as electric telescopic rod
Formula, as long as moving assembly 3 can drive clamping assembly 1 to be moved to selected position.
Control assembly can also be set in clamping device, and control assembly controls movement for controlling 3 start and stop of moving assembly
Component 3 is moved to suitable position, the clamping of control clamping assembly 1 or release workpiece 2.
Further, the clamping assembly 1 further includes mounting disc 11 and multiple claws 12；Each claw 12 respectively with
The mounting disc 11 is slidably connected, and each claw 12 is able to radially sliding along the mounting disc 11, each described
The one end of claw 12 far from the mounting disc 11 is fixed with the clamping wheel 13 respectively, and multiple claws 12 are along the peace
The circumferential uniform intervals of sabot 11 are arranged.
In each claw 12 respectively along mounting disc 11 when radially sliding, each clamping wheel 13 can be driven along mounting disc 11
Radially slide, to make multiple clamping wheels 13 cooperation clamping or unclamp workpiece 2.Multiple claws 12 are along the mounting disc 11
Circumferential uniform intervals setting, can make multiple clamping wheels 13 along the mounting disc 11 circumferential uniform intervals be arranged, to make
When multiple clamping wheels 13 coordinate clamping workpiece 2, workpiece 2 is more uniformly stressed, and prevents from crushing workpiece 2.
Also, when multiple claws 12 slide, 12 synchronous slide of multiple claws, that is, simultaneously towards mounting disc 11 with phase
Same speed sliding, or slided simultaneously with identical speed far from mounting disc 11.
And in order to make 2 uniform force of workpiece, the structure of each claw 12 is identical, and size is also identical.
Further, the claw 12 and the clamping wheel 13 are detachably connected.
The connection type of the claw 12 and the clamping wheel 13 can be to be fixedly attached, or be threadedly coupled.Energy
It is enough conveniently replaceable clamping wheel 13, to adapt to various sizes of workpiece 2.
Further, the clamping assembly 1 further includes claw actuator, and the claw actuator is for driving the claw
12 radially sliding along the mounting disc 11.
Wherein, claw actuator can be cylinder, or any suitable form such as oil cylinder, as long as claw actuator
The radially sliding along the mounting disc 11 of claw 12 can be driven.
Claw 12 is slidably connected with mounting disc 11, and one end fixed setting of claw actuator, the other end is fixed with claw 12
Connection, to drive the radially sliding along mounting disc 11 of claw 12.
Further, the clamping wheel 13 is three, and three clamping wheels 13 are along the circumferential uniform of the mounting disc 11
Interval setting.
The clamping jaw of turning attachment is usually three, and tool is there are three gap between three clamping jaws, three clamping wheels 13 and three
Gap is arranged in a one-to-one correspondence, and each clamping wheel 13 can extend among gap corresponding with the clamping wheel 13.
Further, the clamping wheel 13 is made of nylon.Nylon material can prevent the cooperation clamping of multiple clamping wheels 13
When workpiece 2, workpiece 2 is crushed.
Further, there is groove 132 on the side wall 131 of the clamping wheel 13.Coordinate clamping work in multiple clamping wheels 13
When part 2, workpiece 2 can be arranged in groove 132, can further increase the stability of clamping.
Further, the clamping assembly 1 and the moving assembly 3 are detachably connected.Clamping group can be conveniently replaceable
Part 1 and moving assembly 3, to adapt to different workpiece 2.Clamping assembly 1 and the connection type of moving assembly 3 can be that engaging connects
It connects, or any suitable form such as threaded connection.
In lathe for the suitable clamping position that when processing target, clamping device is used to be delivered to target in turning attachment
It sets.Clamping device conveys workpiece 2 when on the fixture of lathe, coordinates first with multiple clamping wheels 13 and clamps workpiece 2,
Then clamping assembly 1 is moved to selected position using moving assembly 3, when clamping assembly 1 is moved to selected location, workpiece
2 with turning attachment be coaxially disposed, between multiple clamping wheels 13 are able to stretch into clamping jaw adjacent in turning attachment, will not and vehicle
The clamping jaw of bed fixture interferes, so that workpiece 2 can extend into the position being suitble in turning attachment, work is clamped using turning attachment
Part 2, then multiple clamping wheels 13 are coordinated and unclamp workpiece 2, moving assembly 3 drives clamping assembly 1 to be moved to initial position can be complete
At clamped one time, using clamping device clamping workpiece 2, without using artificial, hand labor intensity can be reduced, improve efficiency and
Convenience, and moving assembly 3 can drive workpiece 2 to be moved to selected position, so that workpiece 2 stretches into the position being suitble in fixture
It sets, the stability of 2 clamping position of workpiece can be improved, reduce workpiece 2 and fill askew probability, prevent workpiece 2 from crushing, so as to carry
The convenience and stability that high workpiece 2 clamps.
Further, the lathe includes fixture, and the fixture includes multiple clamping jaws, and multiple clamping jaws are along the fixture
The setting of circumferential uniform intervals, there is between the adjacent clamping jaw gap；The quantity phase in the gap and the clamping wheel 13
Together, and multiple gaps are arranged in a one-to-one correspondence with multiple clamping wheels 13, and each clamping wheel 13 can extend into this
In 13 corresponding gap of clamping wheel.
For example, the clamping jaw of turning attachment is three, tool is there are three gap between three clamping jaws, three clamping wheels 13 and three
Gap is arranged in a one-to-one correspondence, and each clamping wheel 13 can extend among gap corresponding with the clamping wheel 13.
Manipulator provided in this embodiment, including manipulator ontology and absorbent module 4；The manipulator ontology is used for clamping
Workpiece；The absorbent module 4 is fixedly connected with the manipulator ontology, and the absorbent module 4 is used for absorbent bodies.In machinery
While hand ontology clamping workpiece, absorbent module 4 can will corresponding with workpiece object (such as inspection moves ticket or work piece production requirement
Nameplate etc.) absorption, make to move together with workpiece and object corresponding with workpiece, to prevent batch mixing, improves the reliability of processing.
Embodiment 2
Target processing unit (plant) provided in this embodiment, including manipulator described in embodiment 1.Manipulator is in manipulator ontology
While clamping target, absorbent module 4 can will corresponding with workpiece object (such as inspection moves ticket or work piece production requires nameplate
Deng) absorption, make to move together with workpiece and object corresponding with workpiece, to prevent batch mixing, improves the processing of target processing unit (plant)
Reliability.
Finally it should be noted that：The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Present invention has been described in detail with reference to the aforementioned embodiments for pipe, it will be understood by those of ordinary skill in the art that：Its according to
So can with technical scheme described in the above embodiments is modified, either to which part or all technical features into
Row equivalent replacement；And these modifications or replacements, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of manipulator, which is characterized in that including manipulator ontology and absorbent module；
The manipulator ontology is used for clamping workpiece；
The absorbent module is fixedly connected with the manipulator ontology, and the absorbent module is used for absorbent bodies.
2. manipulator according to claim 1, which is characterized in that the absorbent module includes vacuum cup.
3. manipulator according to claim 2, which is characterized in that the absorbent module further includes actuator, the driving
Part is for driving the vacuum cup to be moved relative to the manipulator ontology.
4. manipulator according to claim 3, which is characterized in that the absorbent module further includes detection piece, the detection
Part is used to obtain the location information of the object.
5. manipulator according to claim 4, which is characterized in that the actuator can obtain what the detection piece obtained
The location information of object, and drive the vacuum pan to be moved to the position of object according to the location information of object.
6. manipulator according to any one of claims 1-5, which is characterized in that manipulator ontology includes moving assembly
And clamping assembly；
The clamping assembly and the absorbent module are separately fixed on the moving assembly, and the moving assembly is for driving institute
It states clamping assembly and the absorbent module is moved to selected position；
The clamping assembly is used for clamping workpiece.
7. manipulator according to claim 6, which is characterized in that the clamping assembly includes multiple clamping wheels, Duo Gesuo
Clamping workpiece can be coordinated by stating clamping wheel, and multiple clamping wheels be able to stretch into clamping jaw adjacent in turning attachment it
Between.
8. manipulator according to claim 7, which is characterized in that the clamping assembly further includes mounting disc and multiple cards
Pawl；
Each claw is slidably connected with the mounting disc respectively, and each claw is able to the diameter along the mounting disc
To sliding, each one end of the claw far from the mounting disc is fixed with the clamping wheel, and multiple claws respectively
Circumferential uniform intervals along the mounting disc are arranged.
9. manipulator according to claim 1, which is characterized in that the clamping assembly further includes claw actuator, described
Claw actuator is for driving the claw radially sliding along the mounting disc.
10. a kind of target processing unit (plant), which is characterized in that including the manipulator described in any one of claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810343571.3A CN108527424A (en) | 2018-04-17 | 2018-04-17 | Manipulator and target processing unit (plant) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810343571.3A CN108527424A (en) | 2018-04-17 | 2018-04-17 | Manipulator and target processing unit (plant) |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108527424A true CN108527424A (en) | 2018-09-14 |
Family
ID=63480502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810343571.3A Pending CN108527424A (en) | 2018-04-17 | 2018-04-17 | Manipulator and target processing unit (plant) |
Country Status (1)
| Country | Link |
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| CN (1) | CN108527424A (en) |
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| CN201966196U (en) * | 2011-03-03 | 2011-09-07 | 中芯国际集成电路制造(上海)有限公司 | Wafer clamping device |
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| CN205889230U (en) * | 2016-07-08 | 2017-01-18 | 苏州德机自动化科技有限公司 | Mechanical hand tool |
| CN106829568A (en) * | 2017-02-22 | 2017-06-13 | 袁红 | A kind of intelligence absorption manipulator for printing equipment |
| CN107695645A (en) * | 2017-10-26 | 2018-02-16 | 周慈 | A kind of casting embeds movable insert automated exchanged cutter mechanical paw |
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2018
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Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201966196U (en) * | 2011-03-03 | 2011-09-07 | 中芯国际集成电路制造(上海)有限公司 | Wafer clamping device |
| JP2013059819A (en) * | 2011-09-12 | 2013-04-04 | Toyota Auto Body Co Ltd | Panel work takeout system |
| CN203125525U (en) * | 2013-03-11 | 2013-08-14 | 北京机械工业自动化研究所 | Vehicle lithium battery assembly manipulator for horizontal multi-joint robot |
| CN104668837A (en) * | 2015-02-05 | 2015-06-03 | 珠海格力电器股份有限公司 | Tool block taking device |
| US20160271801A1 (en) * | 2015-03-20 | 2016-09-22 | Hyundai Motor Company | Inspection system and inspection method for electronic device of vehicle |
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| CN107695645A (en) * | 2017-10-26 | 2018-02-16 | 周慈 | A kind of casting embeds movable insert automated exchanged cutter mechanical paw |
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Application publication date: 20180914 |
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