CN108519057B - Three-dimensional sensing device and method for optical fiber side fluorescent substance deposition microprobe and preparation method of microprobe - Google Patents
Three-dimensional sensing device and method for optical fiber side fluorescent substance deposition microprobe and preparation method of microprobe Download PDFInfo
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- CN108519057B CN108519057B CN201810315887.1A CN201810315887A CN108519057B CN 108519057 B CN108519057 B CN 108519057B CN 201810315887 A CN201810315887 A CN 201810315887A CN 108519057 B CN108519057 B CN 108519057B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
A three-dimensional sensing device, a sensing method and a probe preparation method of a micro probe for fluorescent substance deposition on the side surface of an optical fiber belong to the technical field of micro-size measurement; the invention aims to solve the problems that the existing optical fiber probe has low optical coupling efficiency and a complex structure and does not have axial detection capability or has limited axial detection capability. The fiber core structure is changed in a fiber melting extrusion or stretching mode, fluorescent substances are deposited on the side surface of the fiber through a physical vapor deposition process, laterally incident fluorescence enters the fiber core from a fiber cladding and then is emitted from the end surface, the suspension and the guiding of the fiber probe are realized through the elastic membrane, and the high-resolution three-dimensional fiber probe system is obtained by combining a confocal detection principle. The invention is characterized in that: the probe is light in weight and simple in structure, detection signals are high-quality light spots, light intensity is stable, resolution is high, and the probe has axial detection capability.
Description
Technical Field
The invention relates to an optical fiber probe sensing device, a sensing method and a probe preparation method, in particular to an optical fiber side fluorescent substance deposition micro probe three-dimensional sensing device, a sensing method and a probe preparation method, and belongs to the field of micro-size technical measurement.
Background
At present, a three-coordinate measuring machine and a probe are combined for use to realize micro-size contact measurement, and performance parameters of the probe restrict the measurement range and precision. The optical fiber probe has many advantages such as a small diameter, a large elastic modulus, and a small measurement force, and thus is widely used in the field of micro-size measurement.
(1) The application No. 200510072254.5 describes a "dual-fiber coupling contact type micro-measuring force aiming sensor", which proposes a new structure sensor, which utilizes two fibers to fire the coupling ball to realize the reverse transmission of light and detect the emergent light.
Similar patent applications are: the micro-measurement force aiming sensor comprises a double-optical-fiber co-sphere coupling micro-measurement force aiming sensor with an end face microstructure (application number: 201410118922.2), a micro-measurement force aiming sensor based on three-optical-fiber co-sphere coupling (application number: 201410118924.1) and a micro-measurement force aiming sensor based on double-incidence optical-fiber co-sphere coupling (application number: 201410118968.4).
(2) The 'sensing method and device of micro-cavity size and three-dimensional coordinate based on two-dimensional micro-focus collimation' described in application No. 200910071623.7, uses optical fiber as a cylindrical lens to image the point light source collimation so as to realize detection.
Similar patent applications are: the micro-cavity size and two-dimensional coordinate sensing method and device based on one-dimensional micro-focus collimation (application number: 200910071624.1), the micropore measuring device and method based on orthogonal two-dimensional micro-focus collimation (application number: 201110438936.9), and the orthogonal light path two-dimensional micro-focus collimation and three-dimensional coordinate sensor (application number: 201110456022.5).
(3) The device and method for measuring the size of the micropore based on the fiber bragg grating described in the application number 201110456011.7 utilize the property that the fiber bragg grating is subjected to external force to cause the change of the grating pitch and further cause the change of the central wavelength of the reflected light.
Similar patent applications are: the device comprises a contact type temperature non-inductive three-dimensional detection sensor based on the fiber Bragg grating (application number: 201110456051.1), a three-dimensional micro-scale measuring device and method based on the four-core fiber grating (application number: 201410030736.3), a two-dimensional micro-scale measuring device and method based on the three-core fiber grating (application number: 201410030737.8), a two-dimensional micro-scale measuring device and method based on the double-core fiber grating (application number: 201410030738.2) and a two-dimensional micro-scale measuring device and method based on the double-fiber grating (application number: 201410030739.7).
(4) The 'double-incidence polarization-maintaining flat fiber coupling sphere micro-scale sensor based on polarization state detection' described in application No. 201410118970.1 utilizes a coupling sphere sintered by optical fibers to realize light reverse transmission, and detection is realized by detecting the polarization state of emergent light.
Similar patent applications are: polarization-maintaining flat fiber coupled ball micro-scale sensor based on polarization state detection (application number: 201410118966.5).
(5) In the patent, "probe sensing device based on conjugate focus tracking detection technology" described in application No. 201510381711.2, a fiber optic probe sensing device capable of realizing three-dimensional detection is proposed.
(6) The application No. 201510381723.5 describes a combined cantilever beam probe sensing method and device based on optical fiber emergent light detection, which proposes a new structure sensor, wherein the probe is formed by vertically gluing an optical fiber cantilever beam and a probe.
At present, the optical fiber probe faces the bottlenecks of low optical coupling efficiency, complex structure, complex signal processing and no or weak three-dimensional detection capability. Therefore, the research of the three-dimensional sensing device and the sensing method for the optical fiber side fluorescent substance deposition microprobe and the preparation method for the microprobe are of great significance.
Disclosure of Invention
The following presents a simplified summary of the invention in order to provide a basic understanding of some aspects of the invention. It should be understood that this summary is not an exhaustive overview of the invention. It is not intended to determine the key or critical elements of the present invention, nor is it intended to limit the scope of the present invention. Its sole purpose is to present some concepts in a simplified form as a prelude to the more detailed description that is discussed later.
In view of the above, the present invention provides a three-dimensional sensing device and a sensing method for a fluorescent substance deposition micro-probe on the side surface of an optical fiber, wherein the probe can achieve the purpose of enabling the optical fiber to emit light by self-luminescence and be detected in a confocal manner without increasing the weight of the optical fiber significantly, and has higher frequency response, higher resolution and axial measurement capability which is not possessed by the micro-probe.
The first scheme is as follows: the invention provides a three-dimensional sensing device of a micro probe for fluorescent substance deposition on the side surface of an optical fiber, which comprises an elastic diaphragm, a fixing device, a wide-field illumination system, a fluorescent coupling probe on the side surface of the optical fiber, a collimating lens, a filter, a tube lens and a CCD (charge coupled device) detector, wherein the elastic diaphragm is arranged on the side surface of the optical fiber;
the optical fiber side fluorescent coupling probe is suspended on the fixing device through the elastic membrane, the wide-field illumination system is arranged above the elastic membrane and provides light to irradiate a region, wrapped by fluorescent substances, on the side surface of the optical fiber side fluorescent coupling probe, and the collimating lens, the filter, the tube lens and the CCD detector are sequentially arranged on an emergent light path of the optical fiber side fluorescent coupling probe.
Further: the optical fiber side fluorescent coupling probe comprises a single-mode optical fiber, wherein the middle part area of the single-mode optical fiber is an area wrapped by a fluorescent substance and is of an outward convex structure; one end of the single-mode optical fiber is a tangent plane and is used as an emergent end face of the probe; the other end of the single-mode fiber is fused with a spherical probe.
Scheme II: the invention provides a three-dimensional sensing method for an optical fiber side fluorescent substance deposition microprobe, which is realized by depending on a three-dimensional sensing device of a scheme I, and specifically comprises the following steps:
the wide-field illumination system emits light beams which irradiate the area, wrapped by fluorescent substances, of the optical fiber side fluorescent coupling probe to excite fluorescence, the fluorescence enters the optical fiber side fluorescent coupling probe from the cladding of the optical fiber side fluorescent coupling probe and then is emitted from the emitting end face, the emitted light beams are focused to form light spots conjugated with the light beams through the optical system, and the optical system is composed of a collimating lens, a filter, a tube lens and a CCD detector; the contact position of the elastic diaphragm and the optical fiber side fluorescent coupling probe forms a probe swinging fulcrum, the elastic diaphragm provides the swinging fulcrum for the optical fiber side fluorescent coupling probe, and when a spherical measuring head of the optical fiber side fluorescent coupling probe deflects around the fulcrum, an emergent light beam of an emergent end face of the optical fiber side fluorescent coupling probe synchronously deflects; when the spherical measuring head of the optical fiber side fluorescence coupling probe moves axially, the emergent light beam of the emergent end face of the optical fiber side fluorescence coupling probe moves axially, the CCD detector is used for detecting the deviation of the central position of the light spot, so that the transverse deviation of the spherical measuring head is obtained, and the axial deviation of the spherical measuring head is obtained through the sum of the gray values of the limited pixels on the CCD detector.
The third scheme is as follows: the invention provides a preparation method of an optical fiber side fluorescent coupling probe, wherein the probe is the optical fiber side fluorescent coupling probe in a scheme I and a scheme II, and the preparation method specifically comprises the following steps:
taking a section of single-mode optical fiber with a coating layer removed, placing the middle part of the single-mode optical fiber between two electrodes of an optical fiber fusion splicer, and respectively fixing two ends of the single-mode optical fiber on a one-dimensional electric displacement table and a three-dimensional manual displacement table; the moving direction of the one-dimensional electric displacement table is moved along the axis of the single-mode optical fiber through the adjustment of the three-dimensional manual displacement table, the one-dimensional electric displacement table is moved to extrude or stretch the fused area of the optical fiber while the electrode of the optical fiber fusion splicer discharges, so that the shape of the fiber core of the fused area of the optical fiber is changed, and then the fluorescent substance is uniformly deposited on the cladding of the area of the optical fiber through a physical vapor deposition method; using an optical fiber cutter to flatten one end face of the single-mode optical fiber, and using the end face as an emergent end face of the probe; and (4) obtaining the spherical measuring head of the probe by melting the tail end of the optical fiber, and finishing the preparation of the probe.
Has the advantages that:
the probe of the invention can achieve the purpose that the optical fiber has self-luminous emergent capability and can be detected in a confocal way on the premise of not increasing the weight of the optical fiber obviously, and has higher frequency response, higher resolution and axial measurement capability which is not possessed by a micro probe. The sensing method of the invention utilizes CCD to detect the deviation of the central position of the light spot, thereby obtaining the transverse deviation of the spherical measuring head, and the axial deviation of the spherical measuring head is obtained by summing the gray values of the limited pixels in the range of the soft pinhole on the CCD as the light intensity of the light spot, therefore, the sensing principle is simple, and the optical fiber probe has high transverse resolution and axial measuring capability which is not possessed by the common optical fiber probe. The probe preparation method has the advantage of simple preparation process.
Drawings
FIG. 1 is a schematic structural diagram of an optical fiber side fluorescent substance deposition microprobe three-dimensional sensing device according to the present invention;
FIG. 2 is a schematic diagram of the structure of a probe according to the present invention;
FIG. 3 is an optical diagram of a probe according to the present invention;
FIG. 4 is a schematic side view of the optical fiber side fluorescence coupling probe according to the present invention.
Detailed Description
Exemplary embodiments of the present invention will be described hereinafter with reference to the accompanying drawings. In the interest of clarity and conciseness, not all features of an actual implementation are described in the specification. It will of course be appreciated that in the development of any such actual embodiment, numerous implementation-specific decisions must be made to achieve the developers' specific goals, such as compliance with system-related and business-related constraints, which will vary from one implementation to another. Moreover, it will be appreciated that such a development effort might be complex and time-consuming, but would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure.
It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the device structures and/or processing steps closely related to the solution according to the present invention are shown in the drawings, and other details not so relevant to the present invention are omitted.
Example 1: as shown in fig. 1 and fig. 2, the three-dimensional sensing device of the fiber-side fluorescent substance deposition microprobe of the present embodiment includes an elastic diaphragm 1, a fixing device 2, a wide-field illumination system 3, a fiber-side fluorescent coupling probe 4, a collimating lens 5, a filter 6, a tube mirror 7 and a CCD detector 8;
the optical fiber side fluorescent coupling probe 4 is hung on the fixing device 2 through the elastic membrane 1, the wide-field illumination system 3 is arranged above the elastic membrane, light beams emitted by a light source are provided to irradiate a region, wrapped by fluorescent substances, on the side surface of the optical fiber side fluorescent coupling probe 4, and the collimating lens 5, the filter 6, the tube mirror 7 and the CCD detector 8 are sequentially arranged on an emergent light path of the optical fiber side fluorescent coupling probe 4.
More specifically: the optical fiber side fluorescent coupling probe 4 comprises a single-mode optical fiber, the middle part area of the optical fiber 4b is an area 4a wrapped by fluorescent substances, and the area is of an outward convex structure; one end of the single-mode optical fiber is a tangent plane and is used as an emergent end face of the probe; the other end of the single mode fiber is fused with a spherical probe 4 c.
The working principle is as follows: laser enters the fiber core from the cladding of the optical fiber side fluorescence coupling probe and then is emitted from the end face, an end face emitting light beam is focused through an optical system to form a light spot conjugated with an emitting light source, the position of the center of the light spot is detected by a CCD detector, so that the transverse offset of the probe measuring head is obtained, and the axial offset of the probe measuring head is obtained by detecting the sum of gray values of limited pixels on the CCD.
Example 2: as shown in fig. 1 to fig. 3, the three-dimensional sensing method for an optical fiber side fluorescent substance deposition microprobe according to the present embodiment is implemented by the three-dimensional sensing device according to embodiment 1, and specifically includes:
the light beam emitted by the wide-field illumination system 3 irradiates on a fluorescent substance-wrapped region of the optical fiber side fluorescent coupling probe 4 to excite fluorescence, the fluorescence enters the optical fiber side fluorescent coupling probe 4 from a cladding of the optical fiber side fluorescent coupling probe 4 and then is emitted from an emitting end face, the emitting light beam is focused to form a light spot conjugated with the emitting light beam through an optical system, and the optical system is composed of a collimating lens 5, a filter 6, a tube mirror 7 and a CCD detector 8; the contact position of the elastic diaphragm 1 and the optical fiber side fluorescent coupling probe 4 forms a probe swinging fulcrum, and because the elastic diaphragm provides the swinging fulcrum for the optical fiber side fluorescent coupling probe 4, when a spherical measuring head of the optical fiber side fluorescent coupling probe 4 deflects around the fulcrum, an emergent light beam of an emergent end face of the optical fiber side fluorescent coupling probe 4 synchronously deflects; when the spherical measuring head of the optical fiber side fluorescent coupling probe 4 moves axially, the emergent light beam of the emergent end face of the optical fiber side fluorescent coupling probe 4 moves axially, the deviation of the central position of the light spot is detected by the CCD detector, so that the transverse deviation of the spherical measuring head is obtained, and the axial deviation of the spherical measuring head is obtained through the sum of the gray values of the limited pixels on the CCD detector.
Example 3: as shown in fig. 4, the method for preparing an optical fiber side fluorescence coupling probe according to this embodiment is the optical fiber side fluorescence coupling probe 4 described in embodiments 1 and 2, and the specific preparation method includes:
taking a section of single-mode optical fiber 12 with a coating layer removed, placing the middle part of the single-mode optical fiber between two electrodes 11 of an optical fiber fusion splicer, and respectively fixing two ends of the single-mode optical fiber on a one-dimensional electric displacement table 9 and a three-dimensional manual displacement table 13; the moving direction of the one-dimensional electric displacement table 9 is moved along the axis of the single-mode optical fiber through the adjustment of the three-dimensional manual displacement table 13, and the extrusion or the stretching of the fused area of the optical fiber is realized by moving the one-dimensional electric displacement table 9 while the electrode 11 of the optical fiber fusion splicer discharges; so as to change the shape of the fiber core in the fused area of the optical fiber, and then uniformly deposit the fluorescent substance on the cladding of the area of the optical fiber by a physical vapor deposition method; using an optical fiber cutter to flatten one end face of the single-mode optical fiber, and using the end face as an emergent end face of the probe; and (4) obtaining the spherical measuring head of the probe by melting the tail end of the optical fiber, and finishing the preparation of the probe.
Although the embodiments of the present invention have been described above, the contents thereof are merely embodiments adopted to facilitate understanding of the technical aspects of the present invention, and are not intended to limit the present invention. It will be apparent to persons skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (2)
1. The three-dimensional sensing device for the optical fiber side fluorescent substance deposition microprobe is characterized by comprising an elastic membrane (1), a fixing device (2), a wide-field illumination system (3), an optical fiber side fluorescent coupling probe (4), a collimating lens (5), a filter (6), a tube mirror (7) and a CCD detector (8);
the optical fiber side fluorescent coupling probe (4) is suspended on the fixing device (2) through the elastic membrane (1), the wide-field illumination system is arranged above the elastic membrane and provides light beams emitted by a light source to irradiate an area, wrapped by fluorescent substances, on the side surface of the optical fiber side fluorescent coupling probe (4), fluorescent light enters the optical fiber side fluorescent coupling probe (4) from a cladding of the optical fiber side fluorescent coupling probe (4) in a coupling mode and then is emitted from an emitting end face, and a collimating lens (5), a filter plate (6), a tube mirror (7) and a CCD detector (8) are sequentially arranged on an emitting light path of the optical fiber side fluorescent coupling probe (4);
the optical fiber side fluorescent coupling probe (4) comprises a single-mode optical fiber, the middle part area of the single-mode optical fiber is an area wrapped by fluorescent substances, and the area is of an outward convex structure; one end of the single-mode optical fiber is a tangent plane and is used as an emergent end face of the probe; the other end of the single-mode fiber is fused with a spherical probe.
2. A three-dimensional sensing method of a micro probe for fluorescent substance deposition on the side surface of an optical fiber is realized by the three-dimensional sensing device of claim 1, and is characterized by comprising the following steps:
the wide-field illumination system (3) emits light beams which irradiate a fluorescent substance-wrapped region of the optical fiber side fluorescent coupling probe (4) to excite fluorescence, the fluorescence is coupled into the optical fiber side fluorescent coupling probe (4) from a cladding of the optical fiber side fluorescent coupling probe (4) and then is emitted from an emitting end face, the emitted light beams are focused through the optical system to form light spots conjugated with the emitted light beams, and the optical system is composed of a collimating lens (5), a filter (6), a tube mirror (7) and a CCD detector (8); the contact position of the elastic diaphragm (1) and the optical fiber side fluorescent coupling probe (4) forms a probe swinging fulcrum, and because the elastic diaphragm provides the swinging fulcrum for the optical fiber side fluorescent coupling probe (4), when a spherical measuring head of the optical fiber side fluorescent coupling probe (4) deflects around the fulcrum, an emergent light beam of an emergent end face of the optical fiber side fluorescent coupling probe (4) synchronously deflects; when the spherical measuring head of the optical fiber side fluorescent coupling probe (4) moves axially, the emergent light beam of the emergent end face of the optical fiber side fluorescent coupling probe (4) moves axially, the deviation of the central position of the light spot is detected by the CCD detector, so that the transverse deviation of the spherical measuring head is obtained, and the axial deviation of the spherical measuring head is obtained through the sum of the gray values of the limited pixels on the CCD detector.
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