CN108500843A - A kind of adaptive dressing method of abradant jet for concretion abrasive polishing pad - Google Patents
A kind of adaptive dressing method of abradant jet for concretion abrasive polishing pad Download PDFInfo
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- CN108500843A CN108500843A CN201810294365.8A CN201810294365A CN108500843A CN 108500843 A CN108500843 A CN 108500843A CN 201810294365 A CN201810294365 A CN 201810294365A CN 108500843 A CN108500843 A CN 108500843A
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- polishing
- polishing pad
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- image
- jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
A kind of adaptive dressing method of abradant jet for concretion abrasive polishing pad, it is characterized in that it includes the following steps：First, the feature that different surfaces state is padded in polishing, such as sharp state, passive state are obtained by image recognition；Polishing, which is obtained, by the force signal that rubs pads different surfaces state feature；Secondly, artificial neural network is established, the mapping relations between image and frictional force feature and processing efficiency, quality etc. are obtained；Third in actual processing, while on-line measurement image, rubbing and force signal and extracting feature, and further according to process requirements, whether adaptive judgement needs which type of dressing parameter modified polishing pad and use.Dressing efficiency of the present invention is high and timely, can significantly improve polishing quality.
Description
Technical field
The present invention relates to a kind of machining process, the polishing technology especially finished, specifically one kind is used for
The adaptive dressing method of abradant jet of concretion abrasive polishing pad.
Background technology
Existing dressing technique all has certain defect：（1）The finishing effect for reviewing one's lessons by oneself adjusting technique is poor, and the later stage, there is still a need for it
Its tooling revisions；（2）The abrasion of polishing pad is big when diamond truer is modified, its service life is caused to decline, and Remaining debris is difficult
With cleaning, polishing cushion steam hole is blocked；（3）The cleaning performance of water jet finishing is good, but part " glazing " layer is difficult to remove, finishing effect
Fruit is limited.In addition, the finishing mode that existing dressing technique uses is offline finishing or Dressing continuously in line.Offline finishing needs
Increase special process, upset productive temp, increases the production cycle；And continuous dressing, increase the invalid finishing time and
The excessive wear of polishing pad reduces the service life of polishing pad.What is more important, workpiece are in the different process segments pair
The surface characteristics demand of polishing pad is different, requires finishing also different.Workpiece needs the surface of polishing pad thick at polishing initial stage
It is rough big, to ensure that workpiece material removal rate is high；In polishing latter stage, need the rough surface of polishing pad small, to ensure workpiece surface
It is high-quality；In polishing mid-term, polishing pad surface characteristics is needed to keep stablizing, to ensure the steady of workpiece material removal.However, from
Existing open source literature report sees that existing dressing technique research does not account for such demand.
Invention content
The purpose of the present invention is for existing existing dressing technique stability difference and inefficient problem, invention is a kind of
The adaptive dressing method of abradant jet for concretion abrasive polishing pad.
The technical scheme is that：
A kind of adaptive dressing method of abradant jet for concretion abrasive polishing pad, it is characterized in that it includes the following steps：
First, the feature for obtaining the surface state that different phase is padded in polishing is identified by characteristics of image；
Secondly, the feature that different surfaces state is padded in polishing is obtained by the force signal that rubs；
The characteristics of image obtained and frictional force feature input computer are entered processing, generate standard gallery by third；
4th, when actual processing, system judges the process segment residing for polishing pad first, then obtains the process segment in real time
Characteristics of image and frictional force feature, then in standard gallery to standard value criticized compared with being set if the deviation of the two is all higher than
Definite value then starts abrasive jet device and is modified to polishing pad immediately, and abrasive jet device is automatic according to the size of deviation
Determine that abradant jet nozzle parameter is modified；In dressing process, system interval obtains the polishing panel surface image after finishing
Feature and frictional force characteristic value are simultaneously compared with the data in standard gallery, until the characteristics of image on polishing pad surface and friction
Power feature meets the needs in corresponding process segment；
5th, the 4th step is repeated, until process finishing.
The characteristics of image includes color characteristic, image texture characteristic, shape feature and the feature spot size of image.
The friction force signal includes frictional resistance force mean value size and frictional force real-time change amount.
The corresponding surface state feature of the friction force signal includes polishing pad surface roughness, pore plugging rate, grinds
It throws pad surface defect size and surface smoothness is padded in polishing.
The different phase of the polishing pad refers to polishing initial stage, mid-term and latter stage, and polishing initial stage needs the table of polishing pad
Face is coarse big, to ensure that workpiece material removal rate is high；In polishing latter stage, need the rough surface of polishing pad small, to ensure workpiece
Surface quality is good；In polishing mid-term, polishing pad surface characteristics is needed to keep stablizing, to ensure the steady of workpiece material removal.
The characteristics of image and frictional force feature of acquisition are handled using neuroid, image is obtained and frictional force is special
Sign and the mapping relations between processing efficiency, quality, and the optimised process of real-time judgment polishing pad is joined during actual processing
Number, provides abradant jet dressing parameter in time.
Abradant jet dressing parameter includes that jet pressure, fluid jet nozzle and polishing pad surface distance, flow for speed, jet mill
Expect type, size and abrasive concentration.
Beneficial effects of the present invention：
Frictional force mean value when the present invention is using friction sensor detection polishing and time-varying characteristics, are ground using visual sensor detection
Pad surface image information is thrown, and judges that surface is padded in polishing based on multiple features such as frictional force mean value, time varying characteristic and visual signatures
Form realizes that abradant jet pads polishing the adaptive finishing control on surface.
（1）Finishing effect is good, uses abradant jet finishing can be with dynamic regulation jet pressure, the parameters such as flow angle are controlled
Jet stream processed is to the finishing dynamics of polishing pad, to improve finishing effect.
（2）Without upsetting the production cycle, production it is efficient.Use abradant jet can be with restoring on line, when polishing pad is special
When sign display needs finishing, it can be modified while polishing, avoid halt production when offline finishing, production efficiency higher.
（3）Can self adaptive control, improve the service life of polishing pad, reduce production cost, avoid product matter
Amount accident.When polishing pad surface block, polishing pad flatness difference and polishing pad surface it is defective when, using frictional force mean value, when
The configuration of surface of polishing pad can accurately be judged by becoming special multiple features such as characteristic and surface visual signal, be penetrated to control abrasive material
Stream modifies concretion abrasive polishing pad, can significantly increase the service life of polishing pad, and polishing is avoided to pad defect to work
The influence of part quality.
（4）It disclosure satisfy that the finishing demand of different processing stages, improve product quality.It is special using frictional force mean value, time-varying
Multiple features such as property and surface visual signal can accurately judge the configuration of surface of polishing pad, can be repaiied in the polishing starting stage
It is whole go out roughness it is high polishing pad surface improve material removing rate；In polishing ending phase, the lower polishing of roughness is modified out
Pad the surface quality that surface ensures workpiece；In polishing stage casing, jet stream finishing ensures that polishing pad surface characteristics is stablized, and improves polishing
The stability of journey.
（5）Cleaning performance is good, is conducive to chip removal.Can be impacted using abradant jet the abrasive dust that is blocked in polishing pad holes gap and
Residue, and taken away by the water in jet stream, there is excellent cleaning performance.
Description of the drawings
Fig. 1 is sensor of the invention and finishing nozzle layout schematic diagram.
Fig. 2 is the abradant jet dressing process schematic diagram of the present invention.
Fig. 3 is that the abradant jet of the present invention adaptively modifies flow chart.
Specific implementation mode
The present invention is further illustrated with reference to the accompanying drawings and examples.
As shown in Figs. 1-3.
A kind of adaptive dressing method of abradant jet for concretion abrasive polishing pad, flow is as shown in figure 3, specific step
It is rapid as follows：
First, using abradant jet technology and auto-adaptive parameter setting technique as polishing pad finishing means, as shown in Figure 1；
Secondly, identify that obtaining polishing pads different phase by characteristics of image（Including initial stage, mid-term and latter stage）Surface state
Feature；Characteristics of image includes color characteristic, image texture characteristic and shape feature and feature spot size etc., passes through feature recognition
Obtain the feature of the surface state of polishing pad different processing stages, such as sharp state, passive state；
Third passes through the force signal that rubs（Such as：Frictional resistance force mean value size, frictional force real-time change amount）Obtain polishing pad difference table
The feature of surface state（Such as：Polishing pad surface roughness, pore plugging rate, polishing pad surface defect size, polishing pad surface are flat
The surface state features such as whole degree）；
4th, the characteristics of image obtained and frictional force feature input computer are entered into processing, generate standard gallery；It is preferred that adopting
The characteristics of image and frictional force feature of acquisition are handled with Techniques of Neural Network, image and frictional force feature is obtained and adds
Mapping relations between work efficiency rate, quality, and during actual processing real-time judgment polishing pad optimal processing parameter, in time
Provide abradant jet dressing parameter.
5th, when actual processing, system judges the process segment residing for polishing pad first, then obtains the processing rank in real time
Section characteristics of image and frictional force feature, then in standard gallery to standard value criticized compared with if the deviation of the two is big
In setting value（If deviation is between 50-80%）, then start abrasive jet device immediately and polishing pad is modified, abradant jet
Device automatically determines abradant jet nozzle parameter according to the size of deviation（Table is padded including jet pressure, fluid jet nozzle and polishing
From, flow for speed, jet stream abrasive species, size and abrasive concentration, these parameters can be obtained identity distance by advance experiment）Into
Row finishing；In dressing process, system interval obtain finishing after polishing panel surface characteristics of image and frictional force characteristic value and with
Data in standard gallery are compared, until the characteristics of image on polishing pad surface and frictional force feature meet corresponding processing rank
The needs of section（Deviation is less than 20%）；As shown in Figure 1.
6th, the 4th step is repeated, until process finishing.
The different phase of polishing pad refers to polishing initial stage, mid-term and latter stage, and polishing initial stage needs the rough surface of polishing pad
Greatly, to ensure that workpiece material removal rate is high；In polishing latter stage, need the rough surface of polishing pad small, to ensure workpiece surface matter
It measures；In polishing mid-term, polishing pad surface characteristics is needed to keep stablizing, to ensure the steady of workpiece material removal.
It is a concrete application of the present invention in sapphire Polishing machining below.
When carrying out polishing to sapphire using concretion abrasive polishing pad, polishing is obtained using high-definition camera and pads surface
Picture signal, analyzes the features such as its color of image feature, textural characteristics and shape feature and feature spot size, and by it with repair
It is whole after polishing pad surface color of image feature, textural characteristics and shape feature and feature spot size and completely " glazing "（Fig. 2）
Polishing pad surface color of image feature, textural characteristics and shape feature and the features such as feature spot size carry out similarity ratio
According to, obtain the similarity or deviation ratio that it is compared with the two, then use friction force sensor obtain Polishing machining when friction
Force mean value size, the frictional force feature such as frictional force real-time change amount, and by it and with after finishing polishing pad surface frictional force
Power mean value size, the frictional force feature such as frictional force real-time change amount carry out similarity and contrast, and obtain to obtain its phase for being compared with the two
Like degree or deviation ratio.When picture signal characteristics and frictional force signal characteristic and the similarity of polishing pad after finishing are in 20%-
When 50% or when the deviation ratio of picture signal characteristics and frictional force signal characteristic and " glazing " polishing pad afterwards is in 20%-50%,
Illustrate that polishing pad needs to modify, at this moment jet nozzle is opened, and is modified to polishing pad, the dressing parameter of jet stream is as follows at this time：Abrasive material
Jet parameters：Jet pressure 0.5-3.5MPa, 60-90 ° of incident angle, fluid jet nozzle are apart from polishing pad：5-10mm；Flow supplies
Speed：1.0-2.5L/min；Used in water jet abrasive material for：The mills such as white fused alumina, silicon carbide, diamond, boron carbide, silica
Material；Use granularity for 0.1-100um；Abrasive concentration is between 0.1%-10%.After modifying a period of time, sensed according to frictional force
The polishing pad surface image signal characteristic and frictional force signal characteristic that device and visual signal obtain in real time and polishing pad after finishing
When individual features similarity reaches 80%-100% or polishing after picture signal characteristics and frictional force signal characteristic are with " glazing "
When the deviation ratio of pad reaches 80%-100%, illustrate that polishing pad is trimmed and reach requirement, at this moment jet nozzle stops injection.Abrasive material
Adaptively finishing finishes jet stream.
Part that the present invention does not relate to is the same as those in the prior art or can be realized by using the prior art.
Claims (7)
1. a kind of adaptive dressing method of abradant jet for concretion abrasive polishing pad, it is characterized in that it includes the following steps：
First, the feature for obtaining the surface state that different phase is padded in polishing is identified by characteristics of image；
Secondly, the feature that different surfaces state is padded in polishing is obtained by the force signal that rubs；
The characteristics of image obtained and frictional force feature input computer are entered processing, generate standard gallery by third；
4th, when actual processing, system judges the process segment residing for polishing pad first, then obtains the process segment in real time
Characteristics of image and frictional force feature, then in standard gallery to standard value criticized compared with being set if the deviation of the two is all higher than
Definite value then starts abrasive jet device and is modified to polishing pad immediately, and abrasive jet device is automatic according to the size of deviation
Determine that abradant jet nozzle parameter is modified；In dressing process, system interval obtains the polishing panel surface image after finishing
Feature and frictional force characteristic value are simultaneously compared with the data in standard gallery, until the characteristics of image on polishing pad surface and friction
Power feature meets the needs in corresponding process segment；
5th, the 4th step is repeated, until process finishing.
2. according to the method described in claim 1, it is characterized in that the characteristics of image includes the color characteristic of image, image line
Manage feature, shape feature and feature spot size.
3. according to the method described in claim 1, it is characterized in that the friction force signal include frictional resistance force mean value size and
Frictional force real-time change amount.
4. according to the method described in claim 1, it is characterized in that the corresponding surface state feature of the friction force signal includes
Polishing pads surface roughness, pore plugging rate, polishing pad surface defect size and polishing and pads surface smoothness.
5. according to the method described in claim 1, it is characterized in that the different phase of the polishing pad refers to polishing initial stage, mid-term
And latter stage, polishing initial stage need the rough surface of polishing pad big, to ensure that workpiece material removal rate is high；In polishing latter stage, need
The rough surface of polishing pad is small, to ensure that workpiece surface quality is good；In polishing mid-term, polishing pad surface characteristics is needed to keep steady
It is fixed, to ensure the steady of workpiece material removal.
6. according to the method described in claim 1, it is characterized in that using neuroid to the characteristics of image and frictional force of acquisition
Feature is handled, and obtains the mapping relations between image and frictional force feature and processing efficiency, quality, and in actual processing mistake
The optimal processing parameter of real-time judgment polishing pad, provides abradant jet dressing parameter in time in journey.
7. method according to claim 1 or 6, it is characterized in that abradant jet dressing parameter includes jet pressure, jet stream spray
Head is with polishing pad surface distance, flow for speed, jet stream abrasive species, size and abrasive concentration.
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| CN201810294365.8A CN108500843B (en) | 2018-04-04 | 2018-04-04 | Abrasive jet flow self-adaptive finishing method for fixed abrasive polishing pad |
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| CN201810294365.8A CN108500843B (en) | 2018-04-04 | 2018-04-04 | Abrasive jet flow self-adaptive finishing method for fixed abrasive polishing pad |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110774160A (en) * | 2019-11-14 | 2020-02-11 | 河南工业大学 | Superfine superhard abrasive grinding wheel ultra-precision grinding method assisted by abrasive particle jet flow |
| US20200070307A1 (en) * | 2018-08-31 | 2020-03-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Chemical mechanical planarization system and a method of using the same |
| CN113916800A (en) * | 2021-10-08 | 2022-01-11 | 南京航空航天大学 | Detection method for visually judging abrasion of high polymer plastic abrasive |
| CN117697554A (en) * | 2024-02-05 | 2024-03-15 | 华海清科股份有限公司 | Wafer processing system, device and method and wafer thinning equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110774160A (en) * | 2019-11-14 | 2020-02-11 | 河南工业大学 | Superfine superhard abrasive grinding wheel ultra-precision grinding method assisted by abrasive particle jet flow |
| CN113916800A (en) * | 2021-10-08 | 2022-01-11 | 南京航空航天大学 | Detection method for visually judging abrasion of high polymer plastic abrasive |
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| CN117697554B (en) * | 2024-02-05 | 2024-05-17 | 华海清科股份有限公司 | Wafer processing system, device and method and wafer thinning equipment |
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